CN113203403A

CN113203403A - Three-axis gyroscope

Info

Publication number: CN113203403A
Application number: CN202110565171.9A
Authority: CN
Inventors: 丁希聪; 凌方舟; 蒋乐跃; 苏云鹏
Original assignee: Meixin Semiconductor Tianjin Co ltd
Current assignee: Meixin Semiconductor Tianjin Co ltd
Priority date: 2021-05-24
Filing date: 2021-05-24
Publication date: 2021-08-03

Abstract

The present invention provides a three-axis gyroscope comprising: a first driving frame, which is located on the left side and can perform resonance motion along the X axis in the left-right direction; a second driving frame, which is positioned at the right side, is parallel to the first driving frame and is spaced apart from the first driving frame by a predetermined distance, and is capable of performing a resonant motion along the X-axis in the opposite direction to the first driving frame; an X/Y gyro structure connected between the first driving frame and the second driving frame; the Z gyro structure is connected to the outer sides of the first driving frame and the second driving frame; the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together. Compared with the prior art, the X/Y gyroscope structure and the Z gyroscope structure of the three-axis gyroscope are driven by the same two driving frames, and the X/Y gyroscope structure and the Z gyroscope structure are independent from each other, so that the quadrature error can be reduced, and the detection precision is improved.

Description

Three-axis gyroscope

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of micro mechanical systems, in particular to a three-axis gyroscope.

[ background of the invention ]

The gyroscope is a sensor for measuring angular rate, is one of core devices of the inertial technology, and plays an important role in the fields of modern industrial control, aerospace, national defense and military, consumer electronics and the like.

The development of a spinning top can be roughly divided into three stages:

the first stage is a traditional mechanical rotor gyro which has high precision and plays an irreplaceable role on military strategic weapons such as nuclear submarines, intercontinental strategic missiles and the like, but has larger volume, complex manufacturing process, high price, long period and unsuitability for batch production; the second stage is an optical detection gyroscope which mainly comprises a laser gyroscope and a fiber-optic gyroscope and mainly utilizes the Sagnac effect, and the optical detection gyroscope has the advantages of no rotating part, higher precision, important function in navigation and aerospace, larger volume, higher cost and difficult integration; the third stage is a micromechanical gyroscope which is developed in the 90 s of the 20 th century, the research of which is started later, but the micromechanical gyroscope is developed rapidly by virtue of the unique advantages of small volume, low power consumption, light weight, batch production, low price, strong overload resistance and integration, is suitable for civil fields of aircraft navigation, automobile manufacturing, digital electronics, industrial instruments and the like and modern national defense and military fields of unmanned aerial vehicles, tactical missiles, intelligent bombs, military aiming systems and the like, has wide application prospect and is more and more concerned by people.

With the increasing demand of the consumer market, the requirements on the size and the performance of a Micro-Electro-Mechanical System (MEMS) gyroscope are higher, the gyroscope is changed from a single-axis gyroscope to a three-axis gyroscope, the early three-axis gyroscope consists of three independent single-axis gyroscopes, and an independent driving structure is required to be included, so the overall structure size is large. In the current consumer-grade application, the gyroscope is generally a single-chip three-axis gyroscope and is characterized in that the driving is shared, and an X/Y/Z gyroscope mass block is reasonably arranged, but the three-axis gyroscope also has the problems of larger size, low integration level and large quadrature error.

Referring to the chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork driving effect, the three-axis gyroscope structure disclosed in this patent designs a steering structure ingeniously, the left and right mass blocks are used for detecting the Y/Z axis angular rate, the central mass block is used for detecting the X axis angular rate, but obviously its integration level is not high, and the common mass block of the Y/Z mass blocks is easy to generate coupling; continuing to refer to the chinese invention patent CN110926445A, it discloses a three-axis MEMS gyroscope, the micro gyroscope structure disclosed in this patent is a shared drive, and its innovation point is that the design of the X/Y gyroscope structure is novel, and the X/Y gyroscope interacts and is arranged in the middle of the driving frame and is supported by the central anchor point, the Z-axis gyroscopes are distributed on both sides of the X/Y gyroscope and are connected to the middle gyroscope structure. The integrated structure is novel and reasonable in design and high in integration level, but the Z-axis gyroscope is not directly decoupled, and the problems of low sensitivity and large quadrature error can be faced.

Therefore, a new technical solution is needed to solve the problems of low integration level and large quadrature error of the three-axis gyroscope in the prior art.

[ summary of the invention ]

One of the objectives of the present invention is to provide a three-axis gyroscope with high integration and small quadrature error.

According to one aspect of the invention, there is provided a three-axis gyroscope comprising: a first driving frame, which is located on the left side and can perform resonance motion along the X axis in the left-right direction; a second driving frame, which is positioned at the right side, is parallel to the first driving frame and is spaced apart from the first driving frame by a predetermined distance, and is capable of performing a resonant motion along the X-axis in the opposite direction to the first driving frame; an X/Y gyro structure connected between the first driving frame and the second driving frame; the Z gyro structure is connected to the outer sides of the first driving frame and the second driving frame; the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together.

Compared with the prior art, the X/Y gyroscope structure and the Z gyroscope structure of the three-axis gyroscope are driven by the same two driving frames, and the X/Y gyroscope structure and the Z gyroscope structure are independent from each other. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise. Wherein:

FIG. 1 is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention;

FIG. 2 is a schematic structural diagram of the X/Y gyroscope structure shown in FIG. 1 according to the present invention;

FIG. 3 is a schematic structural diagram of the X/Y center-coupled beam structure shown in FIG. 1 according to the present invention;

FIG. 4 is a schematic structural diagram of the Z-gyroscope structure shown in FIG. 1 in accordance with the present invention;

FIG. 5 is a schematic diagram of the tri-axis gyroscope of FIG. 1 in a driven state according to the present invention;

FIG. 6 is a schematic diagram of the three-axis gyroscope of FIG. 1 during X-axis detection according to the present invention;

FIG. 7 is a schematic diagram of the three-axis gyroscope of FIG. 1 during Y-axis detection according to the present invention;

FIG. 8 is a schematic view of the three-axis gyroscope of FIG. 1 during Z-axis detection according to the present invention;

FIG. 9 is an enlarged schematic view of the drive frame region shown in FIG. 1;

FIG. 10 is an enlarged schematic view of the area of the stringer shown in FIG. 1;

fig. 11 is an enlarged schematic view of the Z mass region shown in fig. 1.

Wherein, 1 a-left drive frame (or first drive frame); 1 b-right drive frame (or second drive frame); 2a-X upper mass (or first mass); 2b-X lower mass (or second mass); 2c-Y left mass (or third mass); 2d-Y right mass (or fourth mass); 2e-Z left mass (or first Z mass); 2f-Z right mass (or second Z mass); 2 g-left detection frame (or first Z detection frame); 2 h-right detection frame (or second Z detection frame);

3a.1-3 a.8-drive electrodes; 3b.1-3 b.8-driving a feedback electrode; 3c.1 and 3c.2-Y axis detection electrodes; 3d.1 and 3d.2-X axis detection electrodes; 3 e.1-a first Z-axis detection electrode, 3 e.2-a second Z-axis detection electrode;

4a.1-4 a.4-driving the frame support beam; 4 b.1-a first X/Y drive coupling beam, 4 b.2-a second X/Y drive coupling beam; 4 c.1-first Z drive coupling beam; 4 c.2-second Z drive coupling beam; 4 d.1-4 d.4-X mass block supporting beams; 4 e.1-4 e.4-Y mass block support beam; 4 f.1-4 f.4-oblique beam; 4g.1 and 4g.2-X mass coupling beam (or X/Y mass coupling beam); 4h.1 and 4h.2-Y mass coupling beams (or X/Y mass coupling beams); 4i-X/Y center coupling mechanism; 4j-X/Y center coupling beam; 4 j.1-cross-shaped coupling center beam; 4j.2 — first coupled folded beam; 4j.3 — second coupling fold; 4 j.4-L-shaped intermediate support beams; 4 k.1-4 k.8-Z detecting frame support beam; 4 L.1-4 L.8-Z detection frame coupling beam; 4 m.1-4 m.4-a first Z detection beam; 4 m.5-4 m.8-second Z detection beam;

5a.1-5 a.4-driving a frame support beam anchor point; 5 b.1-5 b.4-X mass block anchor points; 5 c.1-5 c.4-Y mass block anchor points; 5 d.1-5 d.4-X/Y center coupling beam anchor points; 5 e.1-5 e.8-Z detecting a framework support beam anchor point; 5 f.1-5 f.8-Z detection frame coupling beam anchor point.

[ detailed description ] embodiments

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," "coupled," and the like are to be construed broadly; for example, the connection can be fixed, detachable or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other suitable relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Aiming at the problems in the prior art, the invention provides a three-axis gyroscope. Fig. 1 is a schematic diagram of a three-axis gyroscope according to an embodiment of the present invention. Please refer to fig. 2, which is a schematic structural diagram of the X/Y gyroscope structure shown in fig. 1 according to the present invention; fig. 4 is a schematic structural diagram of the Z-gyroscope structure shown in fig. 1 according to the present invention. As can be seen from fig. 2 and 4, the three-axis gyroscope shown in fig. 1 includes a first drive frame 1a, a second drive frame 1b, an X/Y gyro structure, and a Z gyro structure. The first driving frame 1a is located on the left side, and is capable of performing a resonant motion in the left-right direction (or horizontal direction) along the X-axis. The second driving frame 1b is positioned at the right side, parallel to and spaced apart from the first driving frame 1a by a predetermined distance, and is capable of performing a resonant motion along the X-axis in the opposite direction to the first driving frame 1 a. The X/Y gyro structure is connected between the first driving frame 1a and the second driving frame 1b, and is capable of sensing an X-axis angular velocity and a Y-axis angular velocity. The Z gyro structure is connected to the outside of the first driving frame 1a and the second driving frame 1b, and can sense a Z-axis angular velocity. The X/Y gyroscope structure and the Z gyroscope structure are independent of each other and are not directly connected with each other, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame 1a and the second driving frame 1b together. The three-axis gyroscope is reasonable and compact in structure and high in integration level. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.

To better explain the structure of the three-axis gyroscope according to the present invention, a three-dimensional rectangular coordinate system may be established, and in the embodiment shown in fig. 1, 2 and 4, in the plane where the base of the three-axis gyroscope is located, the three-dimensional rectangular coordinate system established by the X-axis, the Y-axis and the Z-axis is embodied in fig. 1, 2 and 4 by taking the direction parallel to the first driving frame 1a and the second driving frame 1b as the Y-axis, the direction perpendicular to the first driving frame 1a and the second driving frame 1b as the X-axis, the X-axis and the Y-axis as coordinate axes to determine the Z-axis, and the central point a of the X/Y gyroscope structure as the origin of coordinates.

As shown in fig. 1, 4 and 9, the three-axis gyroscope further includes: first drive frame support beam anchor points 5a.1 and 5 a.2; first drive frame support beams 4a.1 and 4a.2 connected between the first drive frame support beam anchor points 5a.1, 5a.2 and the first drive frame 1 a; second drive frame support beam anchor points 5a.3 and 5 a.4; second drive frame support beams 4a.3 and 4a.4 connected between the second drive frame support beam anchor points 5a.3, 5a.4 and the second drive frame 1 b; first driving electrodes 3a.1-3a.4 and first driving feedback electrodes 3b.1-3b.4 arranged at two sides of the first driving frame 1 a; second driving electrodes 3a.5-3a.8 and second driving feedback electrodes 3b.5-3b.8 disposed at both sides of the second driving frame 1 b.

The first driving electrodes 3a.1-3a.4, the first driving feedback electrodes 3b.1-3b.4, the second driving electrodes 3a.5-3a.8 and the second driving feedback electrodes 3b.5-3b.8 are fixedly arranged on a substrate (not shown), the first driving frame 1a is connected with first driving frame support beam anchors 5a.1, 5a.2 through first driving frame support beams 4a.1, 4a.2, the first driving frame 1a and the first driving frame support beams 4a.1, 4a.2 are suspended above the substrate, the second driving frame 1b is connected with second driving frame support beam anchors 5a.3, 5a.4 through second driving frame support beams 4a.3, 4a.4, and the second driving frame 1b and the second driving frame support beams 4a.3, 4a.4 are suspended above the substrate. The

driving frames

1a and 1b and the driving frame support beams 4a.1-4a.4 are of the same thickness and are of a suspension structure, and the anchor points 5a.1-5a.4 are of a non-suspension structure and are directly connected with the substrate to play a supporting role.

In the specific embodiment shown in fig. 1 and 4, the first driving frame 1a and the second driving frame 1b are identical in structure, and the first driving frame 1a and the second driving frame 1b are disposed parallel to the Y axis and are symmetrically arranged (or distributed bilaterally) with respect to the Y axis.

In the specific embodiment shown in fig. 1, 4 and 9, the number of the first driving electrodes 3a.1-3a.4 is 4, wherein two first driving electrodes 3a.1 and 3a.3 are located at the left side of the first driving frame 1a and are sequentially placed parallel to the Y-axis, and the other two first driving electrodes 3a.2 and 3a.4 are located at the right side of the first driving frame 1a and are sequentially placed parallel to the Y-axis, and the first driving electrodes located at the left side and the right side of the first driving frame 1a are opposite to each other, for example, the first driving electrodes 3a.1 and 3a.2 located at the left side and the right side of the first driving frame 1a are opposite to each other, and the first driving electrodes 3a.3 and 3a.4 are opposite to each other. The number of the second driving electrodes 3a.5-3a.8 is 4, wherein two second driving electrodes 3a.5 and 3a.7 are located at the left side of the second driving frame 1b and are sequentially placed parallel to the Y axis, the other two second driving electrodes 3a.6 and 3a.8 are located at the right side of the second driving frame 1b and are sequentially placed parallel to the Y axis, the second driving electrodes located at the left side and the right side of the second driving frame 1b are opposite to each other in pairs, for example, the second driving electrodes 3a.5 and 3a.6 located at the left side and the right side of the second driving frame 1b are opposite to each other, and the second driving electrodes 3a.7 and 3a.8 are opposite to each other.

It should be noted that in other embodiments, the number of the first driving electrodes may be an even number of 2, 6 or more; the second drive electrodes may be an even number of 2, 6 or more. That is, the number of the first driving electrodes may be 2m, wherein m first driving electrodes are located at the left side of the first driving frame 1a and are sequentially placed parallel to the Y axis, and the other m first driving electrodes are located at the right side of the first driving frame 1a and are sequentially placed parallel to the Y axis, and the first driving electrodes located at the left side and the right side of the first driving frame 1a are opposite to each other two by two; the number of the second driving electrodes may be 2m, where m second driving electrodes are located on the left side of the second driving frame 1b and are sequentially placed parallel to the Y axis, and in addition, m second driving electrodes are located on the right side of the second driving frame 1b and are sequentially placed parallel to the Y axis, and the second driving electrodes located on the left side and the right side of the second driving frame 1b are opposite to each other, where m is a natural number greater than or equal to 1.

In the specific embodiment shown in fig. 1, 4 and 9, the number of the first driving feedback electrodes 3b.1-3b.4 is 4, wherein two first driving feedback electrodes 3b.1 and 3b.3 are located at the left side of the first driving frame 1a and are sequentially placed parallel to the Y axis, the other two first driving feedback electrodes 3b.2 and 3b.4 are located at the right side of the first driving frame 1a and are sequentially placed parallel to the Y axis, the first driving feedback electrodes located at the left side and the right side of the first driving frame 1a are opposite to each other, for example, the first driving feedback electrodes 3b.1 and 3b.2 located at the left side and the right side of the first driving frame 1a are opposite to each other, and the first driving feedback electrodes 3b.3 and 3b.4 are opposite to each other. The number of the second driving feedback electrodes 3b.5 to 3b.8 is 4, wherein two second driving feedback electrodes 3b.5 and 3b 3b.7 are located at the left side of the second driving frame 1b and are sequentially placed parallel to the Y axis, the other two second driving feedback electrodes 3b.6 and 3b.8 are located at the right side of the second driving frame 1b and are sequentially placed parallel to the Y axis, the second driving feedback electrodes located at the left and right sides of the second driving frame 1b are opposite to each other, for example, the second driving feedback electrodes 3b.5 and 3b.6 located at the left and right sides of the second driving frame 1b are opposite to each other, and the second driving feedback electrodes 3b.7 and 3b.8 are opposite to each other.

It should be noted that in other embodiments, the number of the first driving feedback electrodes may be an even number of 2, 6 or more; the second drive feedback electrodes may be an even number of 2, 6 or more. That is, the number of the first driving feedback electrodes may be 2n, where n first driving feedback electrodes are located on the left side of the first driving frame 1a and sequentially placed parallel to the Y axis, and the other n first driving feedback electrodes are located on the right side of the first driving frame 1a and sequentially placed parallel to the Y axis, and the first driving feedback electrodes located on the left side and the right side of the first driving frame are opposite to each other; the number of the second driving feedback electrodes is 2n, wherein n second driving feedback electrodes are positioned on the left side of the second driving frame 1b and are sequentially placed in parallel to the Y axis, in addition, n second driving feedback electrodes are positioned on the right side of the second driving frame 1b and are sequentially placed in parallel to the Y axis, the two paths of the second driving feedback electrodes positioned on the left side and the right side of the second driving frame are opposite, and n is a natural number which is more than or equal to 1.

In the specific embodiment shown in fig. 1, 4 and 9, 4 first drive electrodes 3a.1-3a.4 are distributed on the left and right sides of the middle of the first drive frame 1 a; 4 first driving feedback electrodes 3b.1-3b.4 are distributed on the left and right sides of the two ends of the first driving frame 1 a; 4 second driving electrodes 3a.5-3a.8 are distributed on the left side and the right side of the middle part of the second driving frame 1 b; 4 second driving feedback electrodes 3b.5 to 3b.8 are distributed on the left and right sides of both ends of the second driving frame 1 b.

In the specific embodiment shown in fig. 1, 4 and 9, there are two first drive frame support beam anchor points 5a.1, 5a.2, which are located at the upper and lower ends of the first drive frame 1a, respectively; two first driving frame support beams 4a.1 and 4a.2 are respectively positioned at the upper end and the lower end of the first driving frame 1 a; the two first driving frame support beam anchor points 5a.1 and 5a.2 are respectively connected with the upper end and the lower end of the first driving frame 1a through two first driving frame support beams 4a.1 and 4 a.2. Two second driving frame support beam anchor points 5a.3 and 5a.4 are respectively positioned at the upper end and the lower end of the second driving frame 1 b; two second driving frame support beams 4a.3 and 4a.4 are respectively positioned at the upper end and the lower end of the second driving frame 1 b; the two second driving frame support beam anchor points 5a.3 and 5a.4 are respectively connected with the upper end and the lower end of the second driving frame 1b through the two second driving frame support beams 4a.3 and 4 a.4.

In the specific embodiment shown in fig. 1, 4 and 9, the first drive frame support beam 4a.1, 4a.2 and the second drive frame support beam 4a.3, 4a.4 are each a U-shaped beam with an opening direction parallel to the Y-axis; a first containing area and a second containing area are respectively formed at the upper end and the lower end of the first driving frame 1a, and two first driving frame support beams 4a.1 and 4a.2 are respectively placed in the first containing area and the second containing area; a third accommodating area and a fourth accommodating area are formed at the upper end and the lower end of the second driving frame 1b respectively, and two second driving frame support beams 4a.3 and 4a.4 are placed in the third accommodating area and the fourth accommodating area respectively. Wherein the first drive frame support beams 4a.1, 4a.2 and the second drive frame support beams 4a.3, 4a.4 are distributed symmetrically with respect to the X-axis and the Y-axis as a whole; the first drive frame support beam anchor points 5a.1, 5a.2 and the second drive frame support beam anchor points 5a.3, 5a.4 are distributed symmetrically about the X-axis and the Y-axis as a whole; the first drive electrodes 3a.1-3a.4 and the second drive electrodes 3a.5-3a.8 are symmetrically distributed around the X axis and the Y axis as a whole; the first drive feedback electrodes 3b.1 to 3b.4 and the second drive feedback electrodes 3b.5 to 3b.8 are symmetrically distributed about the X axis and the Y axis as a whole.

As shown in fig. 5, the first drive frame 1a is driven in a resonant motion along the X-axis by applying a drive voltage across the first drive electrodes 3a.1-3 a.4; the second drive frame 1b is driven in a resonant movement along the X-axis in the opposite direction to the first drive frame 1a by applying a drive voltage over the second drive electrodes 3a.5-3 a.8. Fig. 5 shows by way of example only one direction of movement of the first drive frame 1a and the second drive frame 1b along the X-axis. For a detailed scheme of applying a driving voltage to the driving electrode to drive the driving frame to perform a resonant motion along the X-axis, reference may be made to the related art, and details thereof will not be provided herein.

In the embodiment shown in fig. 1, 2 and 10, the X/Y gyroscope structure comprises: the mass block comprises a first X/Y driving coupling beam 4b.1, a second X/Y driving coupling beam 4b.2, a first mass block 2a, a second mass block 2b, a third mass block 2c, a fourth mass block 2d, four oblique beams 4 f.1-4 f.4, eight mass block supporting beams 4 e.1-4 e.4 and 4 d.1-4 d.4 and eight mass block anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4. The first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d are respectively arranged at four positions, namely the upper position, the lower position, the left position and the right position, of a central point A of the X/Y gyroscope structure, the first mass block 2a is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the second mass block 2b is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the third mass block 2c is connected with the first driving frame 1a through the first X/Y driving coupling beam 4b.1, and the fourth mass block 2d is connected with the second driving frame 1b through the second X/Y driving coupling beam 4 b.2. The mass block anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4 are positioned at the outer sides of the four mass blocks 2 a-2 d of the X/Y gyroscope structure; the mass block support beams 4 e.1-4 e.4 and 4 d.1-4 d.4 are positioned at the outer sides of four mass blocks 2 a-2 d of the X/Y gyroscope structure, and each mass block of the X/Y gyroscope structure is connected with a mass block anchor point at the outer side of the mass block support beam through the mass block support beam at the outer side of the mass block support beam; the four oblique beams 4 f.1-4 f.4 are respectively located between every two adjacent mass blocks in the X/Y gyroscope structure, and every two adjacent mass blocks in the X/Y gyroscope structure are connected through the oblique beams located between the two adjacent mass blocks. Wherein, when the first driving frame 1a performs a resonant motion along the X-axis and the second driving frame 1b performs a resonant motion along the X-axis in the opposite direction to the first driving frame 1a, the first driving frame 1a drives the third mass block 2c to perform resonant motion along the X axis through the first X/Y driving coupling beam 4b.1, the second driving frame 1b drives the fourth mass block 2d to perform resonant motion along the X axis in the direction opposite to the third mass block 2c through the second X/Y driving coupling beam 4b.2, the third mass block 2c and the fourth mass block 2d drive the first mass block 2a to perform resonant motion along the Y axis through the corresponding oblique beams (e.g., oblique beams 4f.1 and 4f.2), the second mass 2b is in turn brought into a resonant movement along the Y axis, opposite to the first mass 2a, by means of corresponding oblique beams (for example, oblique beams 4f.3 and 4 f.4).

Referring to fig. 5, when the first driving frame 1a drives the third mass block 2c to approach the central point a of the X/Y gyroscope structure along the X axis through the first X/Y driving coupling beam 4b.1, and the second driving frame 1b drives the fourth mass block 2d to approach the central point a of the X/Y gyroscope structure along the X axis through the second X/Y driving coupling beam 4b.2, the third mass block 2c and the fourth mass block 2d further drive the first mass block 2a and the second mass block 2b to approach the central point a of the X/Y gyroscope structure along the Y axis through the corresponding oblique beams 4f.1 to 4 f.4; when the first driving frame 1a drives the third mass block 2c to be far away from the central point a of the X/Y gyroscope structure along the X axis through the first X/Y driving coupling beam 4b.1, and the second driving frame 1b drives the fourth mass block 2d to be far away from the central point a of the X/Y gyroscope structure along the X axis through the second X/Y driving coupling beam 4b.2, the third mass block 2c and the fourth mass block 2d further drive the first mass block 2a and the second mass block 2b to be far away from the central point a of the X/Y gyroscope structure along the Y axis through the corresponding oblique beams 4 f.1-4 f.4.

In the embodiment shown in fig. 1, 2 and 10, each of the four oblique beams 4 f.1-4 f.4 is a U-shaped beam, one end of which is connected to a corresponding one of the two adjacent masses and the other end of which is connected to a corresponding other one of the two adjacent masses, and the opening of the U-shaped beam is directed to the center point a of the X/Y gyroscope structure. For example, the oblique beam 4f.1 is located between the first mass block 2a and the third mass block 2c, one end of the oblique beam is connected with the first mass block 2a, the other end of the oblique beam is connected with the third mass block 2c, and the opening of the oblique beam 4f.1 points to the central point a of the X/Y gyroscope structure; the oblique beam 4f.2 is positioned between the first mass block 2a and the fourth mass block 2d, one end of the oblique beam is connected with the first mass block 2a, the other end of the oblique beam is connected with the fourth mass block 2d, and the opening of the oblique beam 4f.2 points to the central point A of the X/Y gyroscope structure; the oblique beam 4f.3 is positioned between the second mass block 2b and the third mass block 2c, one end of the oblique beam is connected with the second mass block 2b, the other end of the oblique beam is connected with the third mass block 2c, and the opening of the oblique beam 4f.3 points to the central point A of the X/Y gyroscope structure; between the second mass 2b and the fourth mass 2d, a diagonal beam 4f.4 is located, which is connected to the second mass 2b at one end and to the fourth mass 2d at the other end, and the opening of the diagonal beam 4e.f is directed towards the centre point a of the X/Y gyroscope structure. A certain number of damping holes can be arranged on the mass blocks 2 a-2 d of the X/Y gyroscope structure and used for reducing damping and improving the quality factor and the sensitivity of the gyroscope.

In the specific embodiment shown in fig. 1, 2 and 10, 8 mass anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4 are provided, each two mass anchor points corresponding to one mass in the X/Y gyroscope structure and located outside the mass, wherein the mass anchor points 5b.1 and 5b.2 are located outside the first mass 2a, the mass anchor points 5b.3 and 5b.4 are located outside the second mass 2b, the mass anchor points 5c.1 and 5c.2 are located outside the third mass 2c, and the mass anchor points 5c.3 and 5c.4 are located outside the fourth mass 2 d. 8 mass block supporting beams 4 e.1-4 e.4 and 4 d.1-4 d.4 are provided, each two mass block supporting beams correspond to one mass block in the X/Y gyro structure and are positioned on the outer side of the mass block, wherein the mass block supporting beams 4d.1 and 4d.2 are positioned on the outer side of the first mass block 2a, the mass block supporting beams 4d.3 and 4d.4 are positioned on the outer side of the second mass block 2b, the mass block supporting beams 4e.1 and 4e.2 are positioned on the outer side of the third mass block 2c, and the mass block supporting beams 4e.3 and 4e.4 are positioned on the outer side of the fourth mass block 2 d. Each mass block in the X/Y gyroscope structure is respectively connected with two mass block anchor points on the outer side of the mass block through two mass block support beams on the outer side of the mass block. For example, the first mass 2a is connected to mass anchors 5b.1 and 5b.2 through mass support beams 4d.1 and 4d.2, respectively, the second mass 2b is connected to mass anchors 5b.3 and 5b.4 through mass support beams 4d.3 and 4d.4, respectively, the third mass 2c is connected to mass anchors 5c.1 and 5c.2 through mass support beams 4e.1 and 4e.2, respectively, and the fourth mass 2d is connected to mass anchors 5c.3 and 5c.4 through mass support beams 4e.3 and 4e.4, respectively.

Two mass block supporting beams 4e.1 and 4e.2 outside the third mass block 2c are respectively positioned at the upper side and the lower side of the first X/Y driving coupling beam 4 b.1; two mass block anchor points 5c.1 and 5c.2 at the outer side of the third mass block 2c are respectively positioned at the upper side and the lower side of the first X/Y driving coupling beam 4 b.1; two mass support beams 4e.3 and 4e.4 outside the fourth mass 2d are respectively positioned at the upper side and the lower side of the second X/Y drive coupling beam 4 b.2; two mass block anchor points 5c.3 and 5c.4 at the outer side of the fourth mass block 2d are respectively positioned at the upper side and the lower side of the second X/Y driving coupling beam 4 b.2; two mass block support beams 4d.1 and 4d.2 outside the first mass block 2a are respectively positioned at the left end and the right end outside the first mass block 2 a; two mass block anchor points 5b.1 and 5b.2 on the outer side of the first mass block 2a are respectively positioned at the left end and the right end on the outer side of the first mass block 2 a; two mass block support beams 4d.3 and 4d.4 outside the second mass block 2b are respectively positioned at the left end and the right end outside the second mass block 2 b; two mass anchor points 5b.3 and 5b.4 outside the second mass 2b are respectively positioned at the left end and the right end outside the second mass 2 b. The two mass support beams 4e.1 and 4e2 outside the third mass block 2c and the two mass support beams 4e.3 and 4e.4 outside the fourth mass block 2d are both U-shaped beams, and the opening direction of the U-shaped beams is parallel to the Y-axis; the two mass support beams 4d.1, 4d.2 outside the first mass 2a and the two mass support beams 4d.3, 4d.4 outside the second mass 2b are folded beams, the opening direction (or folding direction) of which is parallel to the X-axis.

In the specific embodiment shown in fig. 1, 2 and 10, the first and second X/Y drive coupling beams 4b.1 and 4b.2 are structurally identical and symmetrical about the Y axis; the four mass blocks 2 a-2 d in the X/Y gyroscope structure have the same structure and respectively comprise a rectangular part and an isosceles trapezoid part; the four mass blocks 2 a-2 d are integrally symmetrical about the X axis and the Y axis; the four oblique beams 4 f.1-4 f.4 are symmetrical with respect to the X axis and the Y axis as a whole; the two mass support beams 4d.1, 4d.2 outside the first mass 2a and the two mass support beams 4d.3, 4d.4 outside the second mass 2b are entirely symmetrical about the X-axis and the Y-axis; the two mass anchor points 5b.1, 5b.2 outside the first mass 2a and the two mass anchor points 5b.3, 5b.4 outside the second mass 2b are entirely symmetrical about the X-axis and the Y-axis; the two mass support beams 4e.1, 4e.2 outside the third mass 2c and the two mass support beams 4e.3, 4e.4 outside the fourth mass 2d are entirely symmetrical about the X-axis and the Y-axis; the two mass anchor points 5c.1, 5c.2 outside the third mass 2c and the two mass anchor points 5c.3, 5c.4 outside the fourth mass 2d are entirely symmetrical about the X-axis and the Y-axis. The mass block comprises X-axis detection electrodes 3d.1 and 3d.2, Y-axis detection electrodes 3c.1 and 3c.2, mass block anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4, wherein the mass block anchor points are fixedly arranged on a substrate; four mass blocks 2 a-2 d, oblique beams 4 f.1-4 f.4, X/Y driving coupling beams 4b.1 and 4b.2, X/Y mass block coupling beams 4h.1, 4h.2, 4g.1 and 4g.2, and mass block support beams 4 e.1-4 e.4 and 4 d.1-4 d.4 of the X/Y gyroscope structure are suspended above the substrate.

In the embodiment shown in fig. 1 and 2, the X/Y gyroscope structure further comprises: an X/Y center coupling beam structure (not identified) located at a center point A of the X/Y gyroscope structure; four X/Y mass coupling beams 4h.1 and 4h.2, 4g.1 and 4g.2 respectively connected to the inner sides of the corresponding masses, each X/Y mass coupling beam being connected to the X/Y central coupling beam structure; a first X-axis detection electrode 3d.1 disposed below the first mass block 2 a; a second X-axis detection electrode 3d.2 disposed below the second mass block 2 b; a first Y-axis detection electrode 3c.1 disposed below the third mass block 2 c; a second Y-axis detection electrode 3c.2 arranged below the fourth mass 2 d. When the input of the X-axis angular velocity is sensed, the first mass block 2a and the second mass block 2b can move reversely along the Z-axis direction, the first X-axis detection electrode 3d.1 detects the distance change with the first mass block 2a, the second X-axis detection electrode 3d.2 detects the distance change with the second mass block 2b, and specifically, the capacitance of the first X-axis detection electrode 3d.1 and the capacitance of the second X-axis detection electrode 3d.2 which are sensitive to the X-axis angular velocity are increased and decreased, the difference between the two capacitance changes caused by the X-axis angular velocity, and the input X-axis angular velocity is obtained. When the input of the Y-axis angular velocity is sensed, the third mass block 2c and the fourth mass block 2d are caused to move reversely along the Z-axis direction, the first Y-axis detection electrode 3c.1 detects the distance change between the third mass block 2c, the second Y-axis detection electrode 3c.2 detects the distance change between the fourth mass block 2d, specifically, the capacitance of the first Y-axis detection electrode 3c.1 and the capacitance of the second Y-axis detection electrode 3c.2 which are sensitive to the Y-axis angular velocity are increased and decreased, the difference between the two capacitances is used for obtaining the capacitance change caused by the Y-axis angular velocity, and further the input Y-axis angular velocity is obtained.

In the specific embodiment shown in fig. 1 and 2, the four X/Y mass coupling beams 4h.1 and 4h.2, 4g.1 and 4g.2 are identical in structure, and the four X/Y mass coupling beams 4h.1 and 4h.2, 4g.1 and 4g.2 are symmetrical with respect to the X axis and the Y axis as a whole, and each of the X/Y mass coupling beams 4h.1 and 4h.2, 4g.1 and 4g.2 includes a plurality of hollow straight beam portions whose lengths gradually decrease from outside to inside and a connecting portion connecting the hollow straight beams; the X/Y mass block coupling beams 4g.1 and 4g.2 positioned on the upper side and the lower side of the X/Y central coupling beam structure are placed in parallel to the X axis (or placed along the left-right direction), and the X/Y mass block coupling beams 4h.1 and 4h.2 positioned on the left side and the right side of the X/Y central coupling beam structure are placed in parallel to the Y axis (or placed along the up-down direction).

In the embodiment shown in fig. 1 and 3, the X/Y center-coupled beam structure includes:

an X/Y center coupling mechanism 4i in which an X/Y space is defined;

an X/Y center coupling beam 4j located within the X/Y space;

the X/Y central coupling beam anchor points are 5 d.1-5 d.4 and are positioned in the X/Y space;

the X/Y central coupling mechanism 4i is connected with X/Y central coupling beam anchor points 5 d.1-5 d.4 through an X/Y central coupling beam 4j, and the X/Y central coupling mechanism 4i is connected with four mass blocks 2 a-2 d of the X/Y gyroscope structure through the four X/Y mass block coupling beams 4h.1 and 4h.2, 4g.1 and 4g.2 respectively.

In the specific embodiment shown in fig. 1 and 3, the X/Y center coupled beams 4j comprise a cross-shaped coupled center beam 4j.1, a first coupled folded beam 4j.2 and a second coupled folded beam 4j.3, wherein the intersection of the cross-shaped coupled center beam 4j.1 is located at the center point a of the X/Y gyroscope structure. The number of the X/Y central coupling beam anchor points 5 d.1-5 d.4 is four, and the X/Y central coupling beam anchor points are respectively located in four areas divided by the cross-shaped coupling central beam 4j.1, wherein a first X/Y central coupling beam anchor point 5d.1 is located in the upper left area of the cross-shaped coupling central beam 4j.1, a second X/Y central coupling beam anchor point 5d.2 is located in the upper right area of the cross-shaped coupling central beam 4j.1, a third X/Y central coupling beam anchor point 5d.3 is located in the lower left area of the cross-shaped coupling central beam 4j.1, and a fourth X/Y central coupling beam anchor point 5d.4 is located in the lower right area of the cross-shaped coupling central beam 4 j.1; the first coupling folding beam 4j.2 is connected between a first X/Y center coupling beam anchor point 5d.1 and a second X/Y center coupling beam anchor point 5d.2, the middle point of the first coupling folding beam 4j.2 is connected with one end of the vertical rod part of the cross-shaped coupling center beam 4j.1, and the first coupling folding beam 4j.2 is symmetrical (or symmetrical about the Y axis) about the vertical rod part of the cross-shaped coupling center beam 4 i.1; the second coupling folding beam 4j.3 is connected between the third X/Y central coupling beam anchor point 5d.3 and the fourth X/Y central coupling beam anchor point 5d.4, the midpoint of the second coupling folding beam 4j.3 is connected with the other end of the vertical rod part of the cross-shaped coupling central beam 4j.1, and the second coupling folding beam 4j.3 is symmetrical (or symmetrical about the Y axis) with respect to the vertical rod part of the cross-shaped coupling central beam 4 j.1; one end and the other end of the beam part of the cross-shaped coupling center beam 4j.1 are respectively connected with the X/Y center coupling mechanism 4i. The X/Y central coupling beam 4j further comprises four L-shaped middle supporting beams 4j.4 which are respectively positioned in four areas divided by the cross-shaped coupling central beam 4j.1, one end of each L-shaped middle supporting beam 4j.4 is connected with the cross rod part of the cross-shaped coupling central beam 4j.1 in the area where the L-shaped middle supporting beam is positioned, the other end of each L-shaped middle supporting beam is connected with the vertical rod part of the cross-shaped coupling central beam 4j.1 in the area where the L-shaped middle supporting beam is positioned, the opening direction of each L-shaped middle supporting beam faces to the central point A of the X/Y gyroscope structure, and the four L-shaped middle supporting beams 4j.4 are sequentially connected end to form a field-shaped structure with the cross-shaped coupling central beam 4j.1 at the central point A of the X/Y gyroscope structure.

In the embodiment shown in fig. 1 and 3, the first coupling folding beam 4j.2 comprises a first zigzag-shaped elastic beam and a third zigzag-shaped elastic beam, wherein one end of the first zigzag-shaped elastic beam is connected with the first X/Y center coupling beam anchor point 5d.1, the other end of the first zigzag-shaped elastic beam is connected with the other end of the third zigzag-shaped elastic beam, and one end of the third zigzag-shaped elastic beam is connected with the second X/Y center coupling beam anchor point 5 d.2; one end of the vertical rod portion of the cross-shaped coupling center beam 4j.1 is connected to the other end of the first zigzag-shaped elastic beam and the other end of the third zigzag-shaped elastic beam, and the first zigzag-shaped elastic beam and the third zigzag-shaped elastic beam are symmetrical with respect to the vertical rod portion of the cross-shaped coupling center beam 4j.1 (or symmetrical with respect to the Y-axis). The second coupling folding beam 4j.3 comprises a second zigzag elastic beam and a fourth zigzag elastic beam, wherein one end of the second zigzag elastic beam is connected with a third X/Y center coupling beam anchor point 5d.3, the other end of the second zigzag elastic beam is connected with the other end of the fourth zigzag elastic beam, and one end of the fourth zigzag elastic beam is connected with a fourth X/Y center coupling beam anchor point 5 d.4; the other end of the vertical rod portion of the cross-shaped coupling center beam 4j.1 is connected to the other end of the second zigzag-shaped elastic beam and the other end of the fourth zigzag-shaped elastic beam, and the second zigzag-shaped elastic beam and the fourth zigzag-shaped elastic beam are symmetrical with respect to the vertical rod portion of the cross-shaped coupling center beam 4j.1 (or symmetrical with respect to the Y-axis). The X/Y central coupling mechanism 4i is a diamond structure with an X/Y space defined inside, and four corners of the diamond structure are respectively connected with four X/Y mass block coupling beams 4h.1 and 4h.2, 4g.1 and 4 g.2.

In the particular embodiment shown in fig. 1 and 3, the X/Y center coupling mechanism 4i is generally symmetrical about the X and Y axes; the cross-shaped coupling center beam 4j.1 is symmetrical about the X-axis and the Y-axis; the first coupling fold 4j.2 and the second coupling fold 4j.3 are entirely symmetrical about the X-axis and the Y-axis; the four X/Y center coupling beam anchor points 5 d.1-5 d.4 are integrally symmetrical about the X axis and the Y axis.

As shown in fig. 1, 4 and 11, the Z gyro structure includes:

a first Z drive coupling beam 4c.1 and a second Z drive coupling beam 4 c.2;

the first Z detection frame 2g is positioned on one side, away from the X/Y gyro structure, of the first driving frame 1a, is connected with the first driving frame 1a through a first Z driving coupling beam 4c.1, and defines a first Z space therein;

a first Z mass block 2e which is positioned in the first Z space and connected with the first Z detection frame 2g through first Z detection beams 4 m.1-4 m.4;

the second Z detection frame 2h is positioned on one side, away from the X/Y gyro structure, of the second driving frame 1b, is connected with the second driving frame 1b through a second Z driving coupling beam 4c.2, and is internally defined with a second Z space;

the second Z mass block 2f is positioned in the second Z space and is connected with the second Z detection frame 2h through second Z detection beams 4 m.5-4 m.8;

when the first driving frame 1a performs resonant motion along the X axis and the second driving frame 1b performs resonant motion along the X axis in the direction opposite to the first driving frame 1a, the first driving frame 1a drives the first Z mass block 2e to perform resonant motion along the X axis through the first Z driving coupling beam 4c.1, the first Z detecting frame 2g and the first Z detecting beams 4 m.1-4 m.4, and the second driving frame 1b drives the second Z mass block 2f to perform resonant motion along the X axis in the direction opposite to the first Z mass block 2e through the second Z driving coupling beam 4c.2, the second Z detecting frame 2h and the second Z detecting beams 4 m.5-4 m.8. Referring to fig. 5, when the first driving frame 1a drives the first Z mass block 2e to approach the central point a of the X/Y gyroscope structure along the X axis through the first Z driving coupling beam 4c.1, the first Z detecting frame 2g, and the first Z detecting beams 4 m.1-4 m.4, the second driving frame 1b drives the second Z mass block 2f to approach the central point a of the X/Y gyroscope structure along the X axis through the second Z driving coupling beam 4c.2, the second Z detecting frame 2h, and the second Z detecting beams 4 m.5-4 m.8; when the first driving frame 1a drives the first Z mass block 2e to be far away from the central point a of the X/Y gyroscope structure along the X axis through the first Z driving coupling beam 4c.1, the first Z detecting frame 2g and the first Z detecting beams 4 m.1-4 m.4, the second driving frame 1b drives the second Z mass block 2f to be far away from the central point a of the X/Y gyroscope structure along the X axis through the second Z driving coupling beam 4c.2, the second Z detecting frame 2h and the second Z detecting beams 4 m.5-4 m.8.

In the particular embodiment shown in fig. 1, 4 and 11, the first and second Z drive coupling beams 4c.1 and 4c.2 are identical in structure and symmetrical about the Y axis; the first Z detection frame 2g and the second Z detection frame 2h are identical in structure and symmetrical about the Y axis; the first Z mass 2e and the second Z mass 2f are structurally identical and symmetrical about the Y axis; the first Z detection beams 4m.1 to 4m.4 and the second Z detection beams 4m.5 to 4m.8 are symmetrical with respect to the X axis and the Y axis as a whole. Four first Z detection beams 4 m.1-4 m.4 are provided, wherein two first Z detection beams 4m.1 and 4m.3 are respectively positioned at the left end and the right end of the upper side of the first Z mass block 2e, the other two first Z detection beams 4m.2 and 4m.4 are respectively positioned at the left end and the right end of the lower side of the first Z mass block 2e, the first Z detection beams 4 m.1-4 m.4 are U-shaped beams, and the first Z detection beams 4 m.1-4 m.4 are placed in parallel to the x-axis direction (or placed along the left-right direction); the number of the second Z detection beams 4 m.5-4 m.8 is four, wherein two second Z detection beams 4m.5 and 4m.7 are respectively located at the left and right ends of the upper side of the second Z mass block 2f, the other two second Z detection beams 4m.6 and 4m.8 are respectively located at the left and right ends of the lower side of the second Z mass block 2f, the second Z detection beams 4 m.5-4 m.8 are U-shaped beams, and the second Z detection beams 4 m.5-4 m.8 are placed in parallel to the X-axis direction (or placed along the left and right direction). The first Z mass block 2e and the second Z mass block 2f can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.

As shown in fig. 1, 4 and 11, the Z-gyro structure further includes:

a first Z-axis detection electrode 3e.1 disposed within the first Z mass 2 e;

a second Z-axis detection electrode 3e.2 disposed within the second Z mass 2 f;

when the input of the Z-axis angular velocity is sensed, the first Z mass block 2e and the second Z mass block 2f can move reversely along the Y-axis direction, the first Z-axis detection electrode detects the distance change between the 3e.1 and the first Z mass block 2e, the second Z-axis detection electrode 3e.2 detects the distance change between the 3e.2 and the second Z mass block 2f, specifically, the capacitance of the first Z-axis detection electrode 3e.1 and the capacitance of the second Z-axis detection electrode 3e.2 which are sensitive to the Z-axis angular velocity are increased and decreased, the difference between the two capacitance changes caused by the Z-axis angular velocity are obtained, and the input Z-axis angular velocity is obtained.

In the embodiment shown in fig. 1 and 4, the Z-gyro structure further includes:

first Z detection frame support beam anchor points 5 e.1-5 e.4 located outside the first Z detection frame 2 g;

first Z detection frame support beams 4 k.1-4 k.4 located outside the first Z detection frame 2g, the first Z detection frame support beams 4 k.1-4 k.4 connected between the first Z detection frame support beam anchor points 5 e.1-5 e.4 and the first Z detection frame 2 g;

second Z detection frame support beam anchor points 5 e.5-5 e.8 located outside the second Z detection frame 2 h;

second Z detection frame support beams 4 k.5-4 k.8 located outside the second Z detection frame 2h, the second Z detection frame support beams 4 k.5-4 k.8 connected between the second Z detection frame support beam anchor points 5 e.5-5 e.8 and the second Z detection frame 2 h;

first Z detection frame coupling beam anchor points 5 f.1-5 f.4 located on the outer side of the first Z detection frame 2 g;

first Z detection frame coupling beams 4 L.1-4 L.4 located at the outer side of the first Z detection frame 2g, the first Z detection frame coupling beams 4 L.1-4 L.4 connected between the first Z detection frame coupling beam anchor points 5 f.1-5 f.4 and the first Z detection frame 2 g;

second Z detection frame coupling beam anchor points 5 f.5-5 f.8 located on the outer side of the second Z detection frame 2 h;

and second Z detection frame coupling beams 4 L.5-4 L.8 are positioned at the outer side of the second Z detection frame 2h, and the second Z detection frame coupling beams 4 L.5-4 L.8 are connected between the second Z detection frame coupling beam anchor points 5 f.5-5 f.8 and the second Z detection frame 2 h.

In the embodiment shown in fig. 1 and 4, the first Z-detection frame support beam anchor points 5e.1 to 5e.4 are located on the left and right sides of the first Z-detection frame 2g, and the first Z-detection frame support beams 4k.1 to 4k.4 are located on the left and right sides of the first Z-detection frame 2g, wherein the left side of the first Z-detection frame 2g is connected to the first Z-detection frame support beam anchor points 5e.1 and 5e.2 located on the left side thereof via the first Z-detection frame support beams 4k.1 and 4k.2 located on the left side thereof, and the right side of the first Z-detection frame 2g is connected to the first Z-detection frame support beam anchor points 5e.3 and 5e.4 located on the right side thereof via the first Z-detection frame support beams 4k.3 and 4k.4 located on the right side thereof. The second Z detection frame support beam anchor points 5 e.5-5 e.8 are located on the left and right sides of the second Z detection frame 2h, the second Z detection frame support beams 4 k.5-4 k.8 are located on the left and right sides of the second Z detection frame 2h, wherein the left side of the second Z detection frame 2h is connected with the second Z detection frame support beam anchor points 5e.5 and 5e.6 located on the left side thereof through the second Z detection frame support beams 4k.5 and 4k.6 located on the left side thereof, and the right side of the second Z detection frame 2h is connected with the second Z detection frame support beam anchor points 5e.7 and 5e.8 located on the right side thereof through the second Z detection frame support beams 4k.7 and 4k.8 located on the right side thereof.

First Z detection frame coupling beam anchor points 5f.1 ~ 5f.4 are located the corner of first Z detection frame 2g, first Z detection frame coupling beam 4L.1 ~ 4L.4 are located the corner of first Z detection frame 2g, wherein, every corner of first Z detection frame 2g is connected with first Z detection frame coupling beam anchor points 5f.1 ~ 5f.4 that are located this corner through first Z detection frame coupling beam 4L.1 ~ 4L.4 that are located this corner. The second Z detection frame coupling beam anchor points 5 f.5-5 f.8 are located at corners of the second Z detection frame 2h, the second Z detection frame coupling beams 4 L.5-4 L.8 are located at corners of the second Z detection frame 2h, wherein each corner of the second Z detection frame 2h is connected with the second Z detection frame coupling beam anchor points 5 f.5-5 f.8 located at the corners through the second Z detection frame coupling beams 4 L.5-4 L.8 located at the corners.

In the embodiment shown in fig. 1 and 4, the number of the first Z-detection frame support beam anchor points 5 e.1-5 e.4 is four, wherein two first Z-detection frame support beam anchor points 5e.1 and 5e.2 are respectively located at the upper and lower positions of the left side of the first Z-detection frame 2g, and the other two first Z-detection frame support beam anchor points 5e.3 and 5e.4 are respectively located at the upper and lower positions of the right side of the first Z-detection frame 2g and are respectively located at the upper and lower sides of the first Z-drive coupling beam 4 c.1. The number of the first Z detection frame support beams 4 k.1-4 k.4 is four, wherein two first Z detection frame support beams 4k.1 and 4k.2 are respectively located at the upper and lower positions on the left side of the first Z detection frame 2g, and the other two first Z detection frame support beams 4k.3 and 4k.4 are respectively located at the upper and lower positions on the right side of the first Z detection frame 2g and are respectively located at the upper and lower sides of the first Z drive coupling beam 4 c.1. Wherein the left or right side of the first Z detection frame 2g is connected to the first Z detection frame support beam anchor points 5 e.1-5 e.4 through the first Z detection frame support beams 4 k.1-4 k.4 on the same side. For example, the left side of the first Z-detect frame 2g is connected to its left first Z-detect frame support beam anchor point 5e.1 via its left first Z-detect frame support beam 4k.1, the left side of the first Z-detect frame 2g is connected to its left first Z-detect frame support beam anchor point 5e.2 via its left first Z-detect frame support beam 4 k.2; the right side of the first Z-check frame 2g is connected to the first Z-check frame support beam anchor point 5e.3 on its right side via the first Z-check frame support beam 4k.3 on its right side, and the right side of the first Z-check frame 2g is connected to the first Z-check frame support beam anchor point 5e.4 on its right side via the first Z-check frame support beam 4k.4 on its right side.

The number of the second Z detection frame support beam anchor points 5 e.5-5 e.8 is four, wherein two second Z detection frame support beam anchor points 5e.5 and 5e.6 are respectively located at the upper and lower positions of the left side of the second Z detection frame 2h, and are respectively located at the upper and lower positions of the upper and lower sides of the second Z driving coupling beam 4c.2, and the other two second Z detection frame support beam anchor points 5e.7 and 5e.8 are respectively located at the upper and lower positions of the right side of the second Z detection frame 2 h. The number of the second Z detection frame support beams 4 k.5-4 k.8 is four, wherein two second Z detection frame support beams 4k.5 and 4k.6 are respectively located at upper and lower positions on the left side of the second Z detection frame 2h, and two second Z detection frame support beams 4k.7 and 4k.8 are respectively located at upper and lower positions on the right side of the second Z detection frame 2h, on upper and lower sides of the second Z driving coupling beam 4 c.2. Wherein the left side or the right side of the second Z detection frame 2h is connected with the second Z detection frame support beam anchor points 5 e.5-5 e.8 on the same side through the second Z detection frame support beams 4 k.5-4 k.8 on the same side. For example, the left side of the second Z-check frame 2h is connected to its left second Z-check frame support beam anchor point 5e.5 via its left second Z-check frame support beam 4k.5, and the left side of the second Z-check frame 2h is connected to its left second Z-check frame support beam anchor point 5e.6 via its left second Z-check frame support beam 4 k.6; the right side of the second Z-check frame 2h is connected to the second Z-check frame support beam anchor point 5e.7 on its right side via the second Z-check frame support beam 4k.7 on its right side, and the right side of the second Z-check frame 2h is connected to the second Z-check frame support beam anchor point 5e.8 on its right side via the second Z-check frame support beam 4k.8 on its right side.

The Z detection frame support beams 4 K.1-4 K.8 are all U-shaped beams, and the opening direction of the U-shaped beams is parallel to the Y axis (or the U-shaped beams are placed parallel to the Y axis); the Z detection frame support beams 4 K.1-4 K.8 are integrally distributed symmetrically about the X and Y axes; the Z detection frame support beam anchor points 5 e.1-5 e.8 are distributed symmetrically about the X and Y axes.

In the embodiment shown in fig. 1 and 4, the number of the first Z-detection frame coupling beam anchor points 5 f.1-5 f.4 is four, and the four first Z-detection frame coupling beam anchor points are respectively located at four corners of the first Z-detection frame 2 g; the number of the first Z detection frame coupling beams 4 L.1-4 L.4 is four, and the four first Z detection frame coupling beams are respectively positioned at four corners of the first Z detection frame 2 g; each corner of the first Z detection frame 2g is connected with the first Z detection frame coupling beam anchor points 5 f.1-5 f.4 at the corner through the first Z detection frame coupling beams 4 L.1-4 L.4 at the corner. For example, the upper left corner of the first Z detection frame 2g is connected to the first Z detection frame coupling beam anchor point 5f.1 at the upper left corner thereof via the first Z detection frame coupling beam 4L.1 at the upper left corner thereof; the left lower corner of the first Z detection frame 2g is connected with a first Z detection frame coupling beam anchor point 5f.2 at the left lower corner thereof through a first Z detection frame coupling beam 4L.2 at the left lower corner thereof; the right upper corner of the first Z detection frame 2g is connected with a first Z detection frame coupling beam anchor point 5f.3 at the right upper corner thereof through a first Z detection frame coupling beam 4L.3 at the right upper corner thereof; the right lower corner of the first Z detection frame 2g is connected to the first Z detection frame coupling beam anchor point 5f.4 at its right lower corner via the first Z detection frame coupling beam 4L.4 at its right lower corner.

The number of the second Z detection frame coupling beam anchor points 5 f.5-5 f.8 is four, and the second Z detection frame coupling beam anchor points are respectively located at four corners of the second Z detection frame 2 h; the number of the second Z detection frame coupling beams 4 L.5-4 L.8 is four, and the four second Z detection frame coupling beams are respectively positioned at four corners of the second Z detection frame 2 h; and each corner of the second Z detection frame 2h is connected with the second Z detection frame coupling beam anchor points 5 f.5-5 f.8 at the corner through the second Z detection frame coupling beams 4 L.5-4 L.8 at the corner. For example, the upper left corner of the second Z detection frame 2h is connected to the second Z detection frame coupling beam anchor point 5f.5 at the upper left corner thereof via the second Z detection frame coupling beam 4L.5 at the upper left corner thereof; the left lower corner of the second Z detection frame 2h is connected with the second Z detection frame coupling beam anchor point 5f.6 at the left lower corner thereof through the second Z detection frame coupling beam 4L.6 at the left lower corner thereof; the right upper corner of the second Z detection frame 2h is connected with a second Z detection frame coupling beam anchor point 5f.7 at the right upper corner thereof through a second Z detection frame coupling beam 4L.7 at the right upper corner thereof; the right lower corner of the second Z detection frame 2h is connected to the second Z detection frame coupling beam anchor point 5f.8 at the right lower corner thereof via the second Z detection frame coupling beam 4L.8 at the right lower corner thereof.

Each of the Z detection frame coupling beams 4 L.1-4 L.8 includes two U-shaped beams connected in sequence, one of the U-shaped beams is parallel to one side of the corner where the U-shaped beam is located, and the other U-shaped beam is parallel to the other side of the corner where the U-shaped beam is located, for example, the Z detection frame coupling beam 4L.1 is located at the upper left corner of the first Z detection frame 2g, one U-shaped beam is parallel to the upper side of the upper left corner, and the other U-shaped beam is parallel to the left side of the upper left corner. The Z detection frame coupling beams 4 L.1-4 L.8 are symmetrically distributed on the X axis and the Y axis; the Z detection frame coupling beam anchor points 5 f.1-5 f.8 are integrally distributed symmetrically about the X axis and the Y axis.

The detection principle of the three-axis gyroscope shown in fig. 1 of the present invention is described below.

First, X/Y axis gyroscope detection principle

Fig. 5 is a schematic diagram illustrating a driving state of the three-axis gyroscope shown in fig. 1 according to the present invention. The first driving frame 1a and the second driving frame 1b on the left and right sides generate reverse resonance motion along the X-axis direction by applying driving voltage, and the X/Y gyroscope structure is driven to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the third mass block 2c and the fourth mass block 2d to generate a left-right reverse resonant motion along the X-axis direction through the X/Y driving coupling beams 4b.1 and 4b.2, and the third mass block 2c and the fourth mass block 2d drive the first mass block 2a and the second mass block 2b to generate a vertical reverse resonant motion along the Y-axis through the oblique beams 4f.1 to 4f.4 arranged between the mass blocks, so that the motion of the four mass blocks 2a to 2d in the X/Y gyroscope structure is similar to a heart and moves outwards or inwards integrally.

Please refer to fig. 6, which is a schematic diagram of the three-axis gyroscope of fig. 1 for X-axis detection. When the angular velocity of the X axis is input, the Coriolis effect can generate Coriolis force to drive the first mass block 2a and the second mass block 2b to move in an out-of-plane reverse direction along the Z axis direction, X axis detection electrodes 3d.1 and 3d.2 arranged below the first mass block 2a and the second mass block 2b are sensitive to the change of the distance, further, self capacitances of the X axis detection electrodes 3d.1 and 3d.2 can be changed accordingly, and the angular velocity of the X axis can be obtained through the change of the detection capacitance.

Fig. 7 is a schematic diagram of the three-axis gyroscope of fig. 1 for Y-axis detection according to the present invention. When the Y-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the third mass block 2c and the fourth mass block 2d to move in an out-of-plane reverse direction along the Z-axis direction, Y-axis detection electrodes 3c.1 and 3c.2 arranged below the third mass block 2c and the fourth mass block 2d are sensitive to the change of the distance, the self capacitance of the Y-axis detection electrodes 3c.1 and 3c.2 can be changed accordingly, and the Y-axis angular rate can be obtained through the change of the detection capacitance.

Two-axis and Z-axis gyroscope detection principle

As shown in fig. 5, the first driving frame 1a and the second driving frame 1b on the left and right sides generate reverse resonant motion along the X-axis direction by applying the driving voltage, so as to drive the Z-gyroscope structure to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first Z detection frame 2g and the second Z detection frame 2h to generate reverse resonant motion in the left-right direction along the X-axis direction through the Z driving coupling beams 4c.1 and 4c.2, the first Z mass block 2e and the second Z mass block 2f are respectively arranged inside the first Z detection frame 2g and the second Z detection frame 2h, and the first Z detection frame 2g and the second Z detection frame 2h can drive the first Z mass block 2e and the second Z mass block 2f to generate reverse resonant motion in the left-right direction along the X-axis direction.

Please refer to fig. 8, which is a schematic diagram of the three-axis gyroscope of fig. 1 for Z-axis detection. When the Z-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the first Z mass block 2e and the second Z mass block 2f to move reversely along the Y-axis direction, Z detection electrodes 3e.1 and 3e.2 respectively arranged inside the first Z mass block 2e and the second Z mass block 2f are sensitive to the change of the distance, further the capacitance of the Z detection electrodes 3e.1 and 3e.2 can change along with the change, and the Z-axis angular rate can be obtained through the change of the detection capacitance.

In summary, in the three-axis gyroscope according to the present invention, when the upper driving frame 1a and the lower driving frame 1b drive the mass blocks 2a to 2f to move, the displacement of the mass blocks 2a to 2f in the sensitive direction is negligible, and the angular rate signal detection is not affected. When the gyroscope is sensitive to different direction angular rates, the corresponding mass blocks move due to the Coriolis effect without influencing other mass blocks, so that the triaxial gyroscope designed by the invention can reduce orthogonal errors and improve the detection precision.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.

While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that changes, modifications and variations may be made therein by those of ordinary skill in the art within the scope of the present invention.

Claims

1. A three-axis gyroscope, comprising:

a first driving frame, which is located on the left side and can perform resonance motion along the X axis in the left-right direction;

a second driving frame, which is positioned at the right side, is parallel to the first driving frame and is spaced apart from the first driving frame by a predetermined distance, and is capable of performing a resonant motion along the X-axis in the opposite direction to the first driving frame;

an X/Y gyro structure connected between the first driving frame and the second driving frame;

the Z gyro structure is connected to the outer sides of the first driving frame and the second driving frame;

the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together.

2. The tri-axial gyroscope of claim 1, further comprising:

a first drive frame support beam anchor point;

a first drive frame support beam connected between the first drive frame support beam anchor point and a first drive frame;

a second drive frame support beam anchor point;

a second drive frame support beam connected between the second drive frame support beam anchor point and a second drive frame;

first drive electrodes arranged on two sides of the first drive frame;

first driving feedback electrodes arranged at two sides of the first driving frame;

second drive electrodes arranged on two sides of the second drive frame;

second driving feedback electrodes arranged on two sides of the second driving frame;

driving the first driving frame to perform a resonant motion along the X-axis by applying a driving voltage to the first driving electrode;

the second drive frame is driven in a resonant motion along the X-axis in opposition to the first drive frame by applying a drive voltage to the second drive electrode.

3. The tri-axial gyroscope of claim 2,

first drive electrode, first drive feedback electrode, second drive electrode and second drive feedback electrode are fixed to be set up in the basement, and first drive frame is connected through first drive frame supporting beam and first drive frame supporting beam anchor point, and first drive frame supporting beam suspension in the basement top, second drive frame is connected through second drive frame supporting beam and second drive frame supporting beam anchor point, and second drive frame supporting beam suspension in the basement top.

4. The tri-axial gyroscope of claim 2,

the first and second drive frames are placed parallel to the Y-axis,

the X axis and the Y axis are mutually vertical;

the X axis is along the left-right direction, and the Y axis is along the up-down direction;

the two sides of the first driving frame are the left side and the right side of the first driving frame;

the two sides of the second driving frame are the left side and the right side of the second driving frame.

5. The three-axis gyroscope of claim 1, wherein the X/Y gyroscope structure comprises:

the first X/Y driving coupling beam and the second X/Y driving coupling beam;

the first mass block, the second mass block, the third mass block and the fourth mass block are respectively arranged at the upper, lower, left and right positions of a central point A of the X/Y gyroscope structure, the first mass block, the third mass block and the fourth mass block are adjacently arranged, the second mass block, the third mass block and the fourth mass block are adjacently arranged, the third mass block is connected with the first driving frame through the first X/Y driving coupling beam, and the fourth mass block is connected with the second driving frame through the second X/Y driving coupling beam;

mass block anchor points located outside the four mass blocks of the X/Y gyroscope structure;

the mass block supporting beams are positioned on the outer sides of the four mass blocks of the X/Y gyroscope structure, and each mass block of the X/Y gyroscope structure is connected with the mass block anchor point on the outer side of the X/Y gyroscope structure through the mass block supporting beam on the outer side of the X/Y gyroscope structure;

the four oblique beams are respectively positioned between every two adjacent mass blocks in the X/Y gyroscope structure, and every two adjacent mass blocks in the X/Y gyroscope structure are connected through the oblique beams positioned between the two adjacent mass blocks;

wherein, when the first driving frame carries out resonant motion along the X axis and the second driving frame carries out resonant motion along the X axis in the direction opposite to that of the first driving frame, the first driving frame drives the third mass block to carry out resonant motion along the X axis through the first X/Y driving coupling beam, the second driving frame drives the fourth mass block to carry out resonant motion along the X axis in the direction opposite to that of the third mass block through the second X/Y driving coupling beam, the third mass block and the fourth mass block further drive the first mass block to carry out resonant motion along the Y axis through the corresponding oblique beams, and the second mass block is further driven to carry out resonant motion along the Y axis in the direction opposite to that of the second mass block through the corresponding oblique beams,

the X-axis and the Y-axis are perpendicular to each other and define a plane in which the X/Y gyroscope structure lies, and the Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis.

6. The tri-axial gyroscope of claim 5, wherein the X/Y gyroscope structure further comprises:

an X/Y center coupling beam structure located at the center point A of the X/Y gyro structure,

the four X/Y mass block coupling beams are respectively connected to the inner sides of the corresponding mass blocks, and each X/Y mass block coupling beam is connected to the X/Y central coupling beam structure;

a first X-axis detection electrode disposed below the first mass block;

a second X-axis detection electrode disposed below the second mass block;

a first Y-axis detection electrode disposed below the third mass block;

a second Y-axis detection electrode disposed below the fourth mass block;

when the input of the X-axis angular velocity is sensed, the first mass block and the second mass block move reversely along the Z-axis direction, the first X-axis detection electrode detects the change of the distance from the first mass block, the second X-axis detection electrode detects the change of the distance from the second mass block, the capacitance of the first X-axis detection electrode and the capacitance of the second X-axis detection electrode are increased and decreased, the difference between the first X-axis detection electrode and the second X-axis detection electrode obtains the capacitance change caused by the X-axis angular velocity, and further the input X-axis angular velocity is obtained; when the input of the Y-axis angular velocity is sensed, the third mass block and the fourth mass block are caused to move reversely along the Z-axis direction, the distance between the first Y-axis detection electrode and the third mass block is changed, the distance between the second Y-axis detection electrode and the fourth mass block is changed, the capacitance of the first Y-axis detection electrode and the capacitance of the second Y-axis detection electrode are increased and decreased, the difference between the first Y-axis detection electrode and the second Y-axis detection electrode is obtained to obtain the capacitance change caused by the Y-axis angular velocity, and then the input Y-axis angular velocity is obtained.

7. The tri-axial gyroscope of claim 6,

the oblique beam is a U-shaped beam, one end of the oblique beam is connected with one of the two adjacent mass blocks correspondingly, the other end of the oblique beam is connected with the other one of the two adjacent mass blocks correspondingly, and an opening of the U-shaped beam points to a central point A of the X/Y gyroscope structure;

each X/Y mass block coupling beam comprises a plurality of hollow straight beam parts with the lengths gradually reduced from outside to inside and a connecting part for connecting the hollow straight beams.

8. The tri-axial gyroscope of claim 5,

the four mass blocks in the X/Y gyroscope structure comprise a rectangular part and an isosceles trapezoid part,

the four mass blocks are integrally symmetrical about an X axis and a Y axis;

the four oblique beams are integrally symmetrical about an X axis and a Y axis;

a mass block of the X/Y gyroscope structure can be provided with a certain number of damping holes for reducing damping and improving the quality factor and sensitivity of the gyroscope.

9. The tri-axial gyroscope of claim 6, wherein the X/Y center-coupled beam structure comprises:

the X/Y center coupling mechanism is internally defined with an X/Y space;

an X/Y center coupling beam located within the X/Y space;

an X/Y center coupling beam anchor point located within the X/Y space;

the X/Y center coupling mechanism is connected with the X/Y center coupling beam anchor point through the X/Y center coupling beam, and the X/Y center coupling mechanism is connected with the four mass blocks of the X/Y gyroscope structure through the four connecting beams.

10. The tri-axial gyroscope of claim 9,

the X/Y center coupling beam comprises a cross-shaped coupling center beam, a first coupling folding beam and a second coupling folding beam, wherein the cross point of the cross-shaped coupling center beam is positioned at the center point A of the X/Y gyroscope structure,

the X/Y central coupling beam anchor points are four and are respectively positioned in four areas divided by the cross-shaped coupling central beam, wherein a first X/Y central coupling beam anchor point is positioned in the upper left area of the cross-shaped coupling central beam, a second X/Y central coupling beam anchor point is positioned in the upper right area of the cross-shaped coupling central beam, a third X/Y central coupling beam anchor point is positioned in the lower left area of the cross-shaped coupling central beam, and a fourth X/Y central coupling beam anchor point is positioned in the lower right area of the cross-shaped coupling central beam;

the first coupling folding beam is connected between the first X/Y center coupling beam anchor point and the second X/Y center coupling beam anchor point, the middle point of the first coupling folding beam is connected with one end of the vertical rod part of the cross-shaped coupling center beam, and the first coupling folding beam is symmetrical about the vertical rod part of the cross-shaped coupling center beam;

the second coupling folding beam is connected between the third X/Y central coupling beam anchor point and the fourth X/Y central coupling beam anchor point, the middle point of the second coupling folding beam is connected with the other end of the vertical rod part of the cross-shaped coupling central beam, and the second coupling folding beam is symmetrical about the vertical rod part of the cross-shaped coupling central beam;

one end and the other end of the cross rod part of the cross coupling central beam are respectively connected with the X/Y central coupling mechanism.

11. The tri-axial gyroscope of claim 10,

the X/Y center coupling beam also comprises four L-shaped middle supporting beams which are respectively positioned in four areas divided by the cross-shaped coupling center beam, one end of each L-shaped middle supporting beam is connected with the cross rod part of the cross-shaped coupling center beam in the area where the L-shaped middle supporting beam is positioned, the other end of each L-shaped middle supporting beam is connected with the vertical rod part of the cross-shaped coupling center beam in the area where the L-shaped middle supporting beam is positioned, and the opening direction of each L-shaped middle supporting beam faces to the central point A of the X/Y gyroscope structure;

the X/Y center coupling mechanism is a diamond structure with an X/Y space defined inside, and four corners of the diamond structure are respectively connected with the four X/Y mass block coupling beams;

the first coupling folding beam comprises a first zigzag elastic beam and a third zigzag elastic beam, wherein one end of the first zigzag elastic beam is connected with the first X/Y central coupling beam anchor point, the other end of the first zigzag elastic beam is connected with the other end of the third zigzag elastic beam, and one end of the third zigzag elastic beam is connected with the second X/Y central coupling beam anchor point; one end of a vertical rod part of the cross coupling center beam is connected with the other end of the first inverted-V-shaped elastic beam and the other end of the third inverted-V-shaped elastic beam, and the first inverted-V-shaped elastic beam and the third inverted-V-shaped elastic beam are symmetrical relative to the vertical rod part of the cross coupling center beam;

the second coupling folding beam comprises a second zigzag elastic beam and a fourth zigzag elastic beam, wherein one end of the second zigzag elastic beam is connected with the anchor point of the third X/Y central coupling beam, the other end of the second zigzag elastic beam is connected with the other end of the fourth zigzag elastic beam, and one end of the fourth zigzag elastic beam is connected with the anchor point of the fourth X/Y central coupling beam; the other end of the vertical rod part of the cross coupling center beam is connected with the other end of the second inverted-V-shaped elastic beam and the other end of the fourth inverted-V-shaped elastic beam, and the second inverted-V-shaped elastic beam and the fourth inverted-V-shaped elastic beam are symmetrical relative to the vertical rod part of the cross coupling center beam.

12. The tri-axial gyroscope of claim 1, wherein the Z-gyroscope structure comprises:

a first Z drive coupling beam and a second Z drive coupling beam;

the first Z detection frame is positioned on one side, away from the X/Y gyro structure, of the first driving frame, is connected with the first driving frame through a first Z driving coupling beam, and defines a first Z space therein;

the first Z mass block is positioned in the first Z space and is connected with the first Z detection frame through a first Z connecting beam;

the second Z detection frame is positioned on one side, away from the X/Y gyro structure, of the second driving frame, is connected with the second driving frame through a second Z driving coupling beam, and defines a second Z space therein;

the second Z mass block is positioned in the second Z space and is connected with the second Z detection frame through a second Z connecting beam;

when the first driving frame carries out resonant motion along the X axis and the second driving frame carries out resonant motion opposite to the first driving frame along the X axis, the first driving frame drives the first Z mass block to carry out resonant motion along the X axis through the first Z driving coupling beam, the first Z detection frame and the first Z connecting beam, and the second driving frame drives the second Z mass block to carry out resonant motion opposite to the first Z mass block along the X axis through the second Z driving coupling beam, the second Z detection frame and the second Z connecting beam.

13. The tri-axial gyroscope of claim 12, wherein the Z-gyroscope structure further comprises:

a first Z-sense frame support beam anchor point located outside of the first Z-sense frame;

a first Z-sense frame support beam positioned outside of the first Z-sense frame, the first Z-sense frame support beam connected between the first Z-sense frame support beam anchor point and the first Z-sense frame;

a second Z-test frame support beam anchor point located outside of the second Z-test frame;

a second Z-sense frame support beam located outside of the second Z-sense frame, the second Z-sense frame support beam connected between the second Z-sense frame support beam anchor point and the second Z-sense frame;

a first Z detection frame coupling beam anchor point located outside the first Z detection frame;

the first Z detection frame coupling beam is positioned on the outer side of the first Z detection frame, and the first Z detection frame coupling beam is connected between the first Z detection frame coupling beam anchor point and the first Z detection frame;

a second Z detection frame coupling beam anchor point located outside the second Z detection frame;

and the second Z detection frame coupling beam is positioned on the outer side of the second Z detection frame, and is connected between the second Z detection frame coupling beam anchor point and the second Z detection frame.

14. The tri-axial gyroscope of claim 13,

the first Z detection frame support beam anchor points are positioned on the left side and the right side of the first Z detection frame, and the first Z detection frame support beams are positioned on the left side and the right side of the first Z detection frame, wherein the left side or the right side of the first Z detection frame is connected with the first Z detection frame support beam anchor points on the same side through the first Z detection frame support beam on the same side;

the second Z detection frame support beam anchor points are positioned on the left side and the right side of the second Z detection frame, and the second Z detection frame support beams are positioned on the left side and the right side of the second Z detection frame, wherein the left side or the right side of the second Z detection frame is connected with the second Z detection frame support beam anchor points on the same side through the second Z detection frame support beam on the same side;

the first Z detection frame coupling beam anchor point is positioned at a corner of the first Z detection frame, the first Z detection frame coupling beam is positioned at a corner of the first Z detection frame, wherein each corner of the first Z detection frame is connected with the first Z detection frame coupling beam anchor point at the corner through the first Z detection frame coupling beam at the corner;

the second Z detection frame coupling beam anchor point is located at a corner of the second Z detection frame, the second Z detection frame coupling beam is located at a corner of the second Z detection frame, and each corner of the second Z detection frame is connected with the second Z detection frame coupling beam anchor point located at the corner through the second Z detection frame coupling beam located at the corner.

15. The tri-axial gyroscope of claim 12, wherein the Z-gyroscope structure further comprises:

a first Z-axis detection electrode disposed within the first Z mass block;

a second Z-axis detection electrode disposed within the second Z mass block;

when the input of the Z-axis angular velocity is sensed, the first Z mass block and the second Z mass block can move reversely along the Y-axis direction, the distance between the first Z-axis detection electrode and the first Z mass block is detected to be changed, the distance between the second Z-axis detection electrode and the second Z mass block is detected to be changed, the capacitance of the first Z-axis detection electrode and the capacitance of the second Z-axis detection electrode are increased and decreased, the difference between the first Z-axis detection electrode and the second Z-axis detection electrode is changed by the capacitance caused by the Z-axis angular velocity, and the input Z-axis angular velocity is obtained.

16. The tri-axial gyroscope of claim 12,

the number of the first Z-shaped connecting beams is four, wherein two first Z-shaped connecting beams are respectively positioned at the left end and the right end of the upper side of the first Z-shaped mass block, and the other two first Z-shaped connecting beams are respectively positioned at the left end and the right end of the lower side of the first Z-shaped mass block;

the number of the second Z-shaped connecting beams is four, wherein two second Z-shaped connecting beam subsections are positioned at the left end and the right end of the upper side of the second Z-shaped mass block, and the other two second Z-shaped connecting beam subsections are positioned at the left end and the right end of the lower side of the second Z-shaped mass block;

the first Z mass block and the second Z mass block can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.