CN113218381A

CN113218381A - Three-axis gyroscope

Info

Publication number: CN113218381A
Application number: CN202110565172.3A
Authority: CN
Inventors: 蒋乐跃; 丁希聪; 凌方舟; 姜萍; 李光煊
Original assignee: Meixin Semiconductor Tianjin Co ltd
Current assignee: Meixin Semiconductor Tianjin Co ltd
Priority date: 2021-05-24
Filing date: 2021-05-24
Publication date: 2021-08-06

Abstract

The present invention provides a three-axis gyroscope comprising: the first X/Y mass block, the second X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are respectively arranged at the left, right, upper and lower positions of the central point A; the four steering beam anchor points and the four steering beams, wherein each steering beam is connected with one corresponding steering beam anchor point, and two adjacent X/Y mass blocks are connected through one corresponding steering beam; a first drive electrode and a first drive feedback electrode disposed within the first X/Y mass block; a second drive electrode and a second drive feedback electrode disposed within the second X/Y mass block; the first Z mass block is arranged in a first Z space defined in the third X/Y mass block and is connected with the third X/Y mass block through a first Z detection beam; and the second Z mass block is arranged in a second Z space defined in the fourth X/Y mass block and is connected with the fourth X/Y mass block through a second Z detection beam. Compared with the prior art, the three-axis gyroscope has the advantages of reasonable design, compact structure and high integration level.

Description

Three-axis gyroscope

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of micro mechanical systems, in particular to a high-integration-level three-axis gyroscope.

[ background of the invention ]

The gyroscope is a sensor for measuring angular rate, is one of core devices of the inertial technology, and plays an important role in the fields of modern industrial control, aerospace, national defense and military, consumer electronics and the like.

The development of a spinning top can be roughly divided into three stages:

the first stage is a traditional mechanical rotor gyro which has high precision and plays an irreplaceable role on military strategic weapons such as nuclear submarines, intercontinental strategic missiles and the like, but has larger volume, complex manufacturing process, high price, long period and unsuitability for batch production; the second stage is an optical detection gyroscope which mainly comprises a laser gyroscope and a fiber-optic gyroscope and mainly utilizes the Sagnac effect, and the optical detection gyroscope has the advantages of no rotating part, higher precision, important function in navigation and aerospace, larger volume, higher cost and difficult integration; the third stage is a micromechanical gyroscope which is developed in the 90 s of the 20 th century, the research of which is started later, but the micromechanical gyroscope is developed rapidly by virtue of the unique advantages of small volume, low power consumption, light weight, batch production, low price, strong overload resistance and integration, is suitable for civil fields of aircraft navigation, automobile manufacturing, digital electronics, industrial instruments and the like and modern national defense and military fields of unmanned aerial vehicles, tactical missiles, intelligent bombs, military aiming systems and the like, has wide application prospect and is more and more concerned by people.

With the increasing demand of the consumer market, the requirements on the size and the performance of a Micro-Electro-Mechanical System (MEMS) gyroscope are higher, the gyroscope is changed from a single-axis gyroscope to a three-axis gyroscope, the early three-axis gyroscope consists of three independent single-axis gyroscopes, and an independent driving structure is required to be included, so the overall structure size is large. In the current consumer-grade application, the gyroscope is generally a single-chip three-axis gyroscope and is characterized in that the driving is shared, and an X/Y/Z gyroscope mass block is reasonably arranged, but the three-axis gyroscope also has the problems of larger size, low integration level and large quadrature error.

Referring to the chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork driving effect, the three-axis gyroscope structure disclosed in this patent designs a steering structure ingeniously, the left and right mass blocks are used for detecting the Y/Z axis angular rate, the central mass block is used for detecting the X axis angular rate, but obviously its integration level is not high, and the common mass block of the Y/Z mass blocks is easy to generate coupling; continuing to refer to the chinese invention patent CN110926445A, it discloses a three-axis MEMS gyroscope, the micro gyroscope structure disclosed in this patent is a shared drive, and its innovation point is that the design of the X/Y gyroscope structure is novel, and the X/Y gyroscope interacts and is arranged in the middle of the driving frame and is supported by the central anchor point, the Z-axis gyroscopes are distributed on both sides of the X/Y gyroscope and are connected to the middle gyroscope structure. The integrated structure is novel and reasonable in design and high in integration level.

Therefore, it is necessary to provide a new technical solution to solve the problem of low integration level of the three-axis gyroscope in the prior art.

[ summary of the invention ]

One of the objectives of the present invention is to provide a three-axis gyroscope which has the advantage of high integration.

According to one aspect of the invention, there is provided a three-axis gyroscope comprising: the first X/Y mass block, the second X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are respectively arranged at the left, right, upper and lower positions of a central point A of the triaxial gyroscope, the first X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are adjacently arranged, and the second X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are adjacently arranged; the four steering beam anchor points and the four steering beams, wherein each steering beam is connected with one corresponding steering beam anchor point, and two adjacent X/Y mass blocks are connected through one corresponding steering beam; a first drive electrode and a first drive feedback electrode disposed within the first X/Y mass block; a second drive electrode and a second drive feedback electrode disposed within the second X/Y mass block; the first Z mass block is arranged in a first Z space defined in the third X/Y mass block and is connected with the third X/Y mass block through a first Z detection beam; and the second Z mass block is arranged in a second Z space defined in the fourth X/Y mass block and is connected with the fourth X/Y mass block through a second Z detection beam.

Compared with the prior art, in the three-axis gyroscope, the first driving electrode and the first driving feedback electrode are arranged in the first X/Y mass block; the second driving electrode and the second driving feedback electrode are arranged in the second X/Y mass block; the first Z mass block is arranged in the third X/Y mass block; the second Z mass block is arranged in the fourth X/Y mass block, so that the three-axis gyroscope is reasonable in structural design, compact in structure and high in integration level.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise. Wherein:

fig. 1 is a schematic view of the overall structure of a three-axis gyroscope according to a first embodiment of the present invention;

FIG. 2 is a schematic diagram of the tri-axis gyroscope of FIG. 1 in a driven state according to the present invention;

FIG. 3 is a schematic diagram of the three-axis gyroscope of FIG. 1 during X-axis detection according to the present invention;

FIG. 4 is a schematic diagram of the three-axis gyroscope of FIG. 1 during Y-axis detection according to the present invention;

FIG. 5 is a schematic view of the three-axis gyroscope of FIG. 1 during Z-axis detection according to the present invention;

FIG. 6 is a schematic view of a second embodiment of the center-coupled beam structure of FIG. 1 according to the present invention;

FIG. 7 is a schematic view of a third embodiment of the center-coupled beam structure of FIG. 1 according to the present invention;

fig. 8 is a schematic structural view of a fourth embodiment of the center-coupled beam structure shown in fig. 1 according to the present invention.

Wherein, 1 a-left X mass (or first X/Y mass); 1 b-right X mass (or second X/Y mass); 1 c-upper Y mass (or third X/Y mass); 1 d-lower Y mass (or fourth X/Y mass); 1 e-upper Z mass (or first Z mass); 1 f-lower Z mass (or second Z mass);

2 a.1-2 a.12-drive electrodes; 2 b.1-2 b.8 driving the feedback electrode; 2 c.1-2 c.2-X axis detection electrodes; 2 d.1-2 d.2-Y axis detection electrodes; 2 e.1-2 e.2-Z axis detection electrodes;

3 a.1-3 a.4-steering beam; 3 b.1-3 b.2-X detection beam (or X/Y detection beam); 3 c.1-3 c.2-Y detection beam (or X/Y detection beam); 3 d-center coupled beam structure; 3 e.1-3 e.8-Z detection beam; 3 f-center coupling mechanism; 3 g-central coupling beam, 3g.1 cross coupling central beam, 3g.2 coupling folding beam, 3g.3-L type middle supporting beam;

4 a.1-4 a.4-steering beam anchor point; 4b, 4 b.1-4 b.4-center coupling beam anchor point.

[ detailed description ] embodiments

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," "coupled," and the like are to be construed broadly; for example, the connection can be fixed, detachable or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other suitable relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Aiming at the problems in the prior art, the invention provides a high-integration three-axis gyroscope. Fig. 1 is a schematic diagram of a three-axis gyroscope according to an embodiment of the present invention.

The three-axis gyroscope shown in fig. 1 includes: a first X/Y mass block 1a, a second X/Y mass block 1b, a third X/Y mass block 1c, a fourth X/Y mass block 1d, a first Z mass block 1e and a second Z mass block 1 f; first drive electrodes 2 a.1-2 a.6, second drive electrodes 2 a.7-2 a.12, first drive feedback electrodes 2b.1, 2b.2, second drive feedback electrodes 2b.3, 2 b.4; first Z detection beams 3 e.1-3 e.4, second Z detection beams 3 e.5-3 e.8; four steering beams 3 a.1-3 a.4; four steering beam anchor points 4a.1 ~ 4 a.4.

To better explain the structure of the tri-axial gyroscope of the present invention, a three-dimensional rectangular coordinate system may be established, in the embodiment shown in fig. 1, in the plane where the base of the tri-axial gyroscope is located, the direction parallel to the first X/Y mass block 1a and the second X/Y mass block 1b is the Y axis, the direction parallel to the third X/Y mass block 1c and the fourth X/Y mass block 1d is the X axis, the X axis and the Y axis are coordinate axes to determine the Z axis, the central point a of the tri-axial gyroscope shown in fig. 1 is the coordinate origin, and the three-dimensional rectangular coordinate system established by the X axis, the Y axis and the Z axis is embodied in fig. 1, wherein the X axis is along the left-right direction, and the Y axis is along the up-down direction.

The first X/Y mass block 1a, the second X/Y mass block 1b, the third X/Y mass block 1c and the fourth X/Y mass block 1d are respectively arranged at the left, right, upper and lower positions of a central point A of the triaxial gyroscope, the first X/Y mass block 1a, the third X/Y mass block 1c and the fourth X/Y mass block 1d are adjacently arranged, and the second X/Y mass block 1b, the third X/Y mass block 1c and the fourth X/Y mass block 1d are adjacently arranged. Each steering beam 3 a.1-3 a.4 is connected with a corresponding steering beam anchor point 4 a.1-4 a.4, and two adjacent X/Y mass blocks are connected through a corresponding steering beam. The first Z mass block 1e is arranged in a first Z space defined in the third X/Y mass block 1c and is connected with the third X/Y mass block 1c through first Z detection beams 3 e.1-3 e.4; the second Z mass block 1f is disposed in a second Z space defined in the fourth X/Y mass block 1d, and is connected to the fourth X/Y mass block 1d through second Z detection beams 3 e.5-3 e.8. The first driving electrodes 2 a.1-2 a.6 and the first driving feedback electrodes 2b.1 and 2b.2 are arranged in the first X/Y mass block 1 a; second driving electrodes 2 a.7-2 a.12 and second driving feedback electrodes 2b.3, 2b.4 are arranged in the second X/Y mass block 1 b.

The first driving electrodes 2 a.1-2 a.6, the first driving feedback electrodes 2 b.1-2 b.2, the second driving electrodes 2 a.7-2 a.12, the second driving feedback electrodes 2 b.3-2 b.4 and the steering beam anchor points 4 a.1-4 a.4 are fixedly arranged on a substrate (not shown). The first X/Y mass block 1a, the second X/Y mass block 1b, the third X/Y mass block 1c, the fourth X/Y mass block 1d, the first Z mass block 1e, the second Z mass block 1f and the X/Y steering beams 3 a.1-3 a.4 are suspended above the substrate.

As shown in fig. 2, a driving voltage is applied to the first driving electrodes 2 a.1-2 a.6 to drive the first X/Y mass block 1a to perform resonant motion along the Y axis in the up-down direction; and applying a driving voltage on the second driving electrodes 2 a.7-2 a.12 to drive the second X/Y mass block 1b to perform resonant motion along the Y axis in the direction opposite to the first X/Y mass block 1 a. Fig. 2 shows by way of example only one direction of movement of the first X/Y mass 1a and the second X/Y mass 1b along the Y axis. For details of the application of the driving voltage to the driving electrodes to drive the first X/Y mass 1a and the second X/Y mass 1b to perform the resonant motion along the Y axis, reference may be made to the related art, and details thereof will not be described herein.

As shown in fig. 2, when the first X/Y mass 1a performs a resonant motion in the up-down direction along the Y axis and the second X/Y mass 1b performs a resonant motion in the opposite direction to the first X/Y mass 1a along the Y axis, the first X/Y mass 1a and the second X/Y mass 1b drive the third X/Y mass 1c to perform a resonant motion in the left-right direction along the X axis through the corresponding steering beams (e.g., steering beams 3a.1 and 3a.2), and drive the fourth X/Y mass 1d to perform a resonant motion in the opposite direction to the third X/Y mass 1c along the X axis through the corresponding steering beams (e.g., steering beams 3a.3 and 3 a.4); when the third X/Y mass block 1c performs resonant motion in the left-right direction along the X axis, the third X/Y mass block 1c drives the first Z mass block 1e to perform resonant motion in the left-right direction along the X axis through the first Z detection beams 3 e.1-3 e.4; when the fourth X/Y mass 1d performs a resonant motion along the X axis in a direction opposite to that of the third X/Y mass 1c, the fourth X/Y mass 1d drives the second Z mass 1f to perform a resonant motion along the X axis in a direction opposite to that of the first Z mass 1e through the second Z detection beams 3 e.5-3 e.8.

In the embodiment shown in fig. 1, the four X/Y mass blocks 1a to 1d have the same structure and each include a rectangular portion and an isosceles trapezoid portion; the four X/Y mass blocks 1 a-1 d are integrally symmetrical about the X axis and the Y axis; the four steering beams 3 a.1-3 a.4 are integrally symmetrical about the X axis and the Y axis; the four steering beam anchor points 4 a.1-4 a.4 are integrally symmetrical about the X axis and the Y axis; four steering beams 3 a.1-3 a.4 are respectively positioned at four corners of a graph formed by the four X/Y mass blocks 1 a-1 d; the four steering beam anchor points 4 a.1-4 a.4 are respectively positioned at four corners of a graph formed by the four X/Y mass blocks 1 a-1 d; the four steering beams 3 a.1-3 a.4 are respectively connected with the four steering beam anchor points 4 a.1-4 a.4 in a one-to-one corresponding manner; two adjacent mass blocks are connected through a corresponding steering beam, for example, the steering beam 3a.1 is connected with the third X/Y mass block 1c and the first X/Y mass block 1a, the steering beam 3a.2 is connected with the third X/Y mass block 1c and the second X/Y mass block 1b, the steering beam 3a.3 is connected with the first X/Y mass block 1a and the fourth X/Y mass block 1d, and the steering beam 4a.4 is connected with the second X/Y mass block 1b and the fourth X/Y mass block 1 d. A certain number of damping holes can be arranged on the X/Y mass blocks 1 a-1 d to reduce damping and improve the quality factor and the sensitivity of the gyroscope.

In the embodiment shown in fig. 1, each of the steering beams 3 a.1-3 a.4 is a pentagon formed by a square with one corner removed, one corner of each pentagon is connected with a corresponding steering beam block anchor point, and the other two corners adjacent to the corner are respectively connected with two corresponding adjacent X/Y mass blocks.

In the embodiment shown in fig. 1, the three-axis gyroscope further comprises: third driving feedback electrodes 2b.5, 2b.6 arranged within the third X/Y mass 1 c; fourth driving feedback electrodes 2b.7, 2b.8 arranged in the fourth X/Y mass 1d, wherein the third driving feedback electrodes 2b.5, 2b.6 and the fourth driving feedback electrodes 2b.7, 2b.8 are fixedly arranged on the substrate.

In the embodiment shown in FIG. 1, the first driving electrodes 2 a.1-2 a.6 and the second driving electrodes 2 a.7-2 a.12 have the same structure and are symmetrical with respect to the X-axis and the Y-axis as a whole; the driving feedback electrodes 2b.1 to 2b.8 have the same structure and are symmetrical with respect to the X-axis and the Y-axis as a whole. The first driving electrodes 2 a.1-2 a.6 are arranged in the middle of the first X/Y mass block 1a, and the first driving electrodes 2 a.1-2 a.6 are sequentially arranged in a direction parallel to the Y axis; the first driving feedback electrodes 2b.1 and 2b.2 are arranged at the upper end and the lower end of the first X/Y mass block 1 a; the second driving electrodes 2 a.7-2 a.12 are arranged in the middle of the second X/Y mass block 1b, and the second driving electrodes 2 a.7-2 a.12 are sequentially arranged in parallel to the Y-axis direction; second driving feedback electrodes 2b.3 and 2b.4 are arranged at the upper end and the lower end of the second X/Y mass block 1 b; third driving feedback electrodes 2b.5 and 2b.6 are arranged at the left end and the right end of the third X/Y mass block 1 c; fourth driving feedback electrodes 2b.7, 2b.8 are provided at left and right ends of the fourth X/Y mass 1 d.

In the particular embodiment shown in fig. 1, the first Z mass 1e and the second Z mass 1f are structurally identical and are entirely symmetrical about the X-axis and the Y-axis; the first Z detection beams 3e.1 to 3e.4 and the second Z detection beams 3e.5 to 3e.8 have the same structure and are symmetrical with respect to the X axis and the Y axis as a whole. Four first Z detection beams 3 e.1-3 e.4 are provided, wherein two first Z detection beams 3e.1 and 3e.2 are respectively positioned at the left end and the right end of the top of the first Z mass block 1e, the other two first Z detection beams 3e.3 and 3e.4 are respectively positioned at the left end and the right end of the bottom of the first Z mass block 2e, and the first Z detection beams 3 e.1-3 e.4 are arranged in parallel to the X-axis direction (or arranged along the left-right direction); the number of the second Z detection beams 3 e.5-3 e.8 is four, wherein two second Z detection beams 3e.5 and 3e.6 are respectively located at the left and right ends of the top of the second Z mass block 1f, the other two second Z detection beams 3e.7 and 3e.8 are respectively located at the left and right ends of the bottom of the second Z mass block 1f, and the second Z detection beams 3 e.5-3 e.8 are placed in parallel to the X axis direction (or placed along the left and right direction). The first Z mass block 1e and the second Z mass block 1f can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.

In the embodiment shown in fig. 1, the three-axis gyroscope further comprises: a central coupled beam structure 3d located at said central point a; four X/Y detection beams 3b.1, 3b.2, 3c.1 and 3c.2 respectively connected to the inner sides of the corresponding X/Y mass blocks 1a to 1d, wherein each X/Y detection beam is connected to the central coupling beam structure 3 d; a first X-axis detection electrode 2c.1 disposed below the first mass block 1 a; a second X-axis detection electrode 2c.2 disposed below the second mass block 1 b; a first Y-axis detection electrode 2d.1 disposed below the third mass block 1 c; a second Y-axis detection electrode 2d.2 disposed below the fourth mass block 1 d; a first Z-axis detection electrode 2e.1 disposed within the first Z mass 1 e; a second Z-axis detection electrode 2e.2 disposed within the second Z mass 1 f.

As shown in fig. 3, when an input of an X-axis angular velocity is sensed, the first X/Y mass block 1a and the second X/Y mass block 1b move in opposite directions along the Z-axis direction, the first X-axis detection electrode 2c.1 detects a change in distance from the first X/Y mass block 1a, the second X-axis detection electrode 2c.2 detects a change in distance from the second X/Y mass block 1b, capacitances of the first X-axis detection electrode 2c.1 and the second X-axis detection electrode 2c.2 are increased and decreased, and a difference between the two capacitances is used to obtain a change in capacitance caused by the X-axis angular velocity, thereby obtaining the input X-axis angular velocity.

As shown in fig. 4, when an input of a Y-axis angular velocity is sensed, a reverse motion occurs between the third X/Y mass block 1c and the fourth X/Y mass block 1d along the Z-axis direction, the first Y-axis detection electrode 2d.1 detects a change in distance from the third X/Y mass block 1c, the second Y-axis detection electrode 2d.2 detects a change in distance from the fourth X/Y mass block 1d, capacitances of the first Y-axis detection electrode 2d.1 and the second Y-axis detection electrode 2d.2 are increased and decreased, and a difference between the two capacitances is obtained to obtain a change in capacitance caused by the Y-axis angular velocity, thereby obtaining a magnitude of the input Y-axis angular velocity.

As shown in fig. 5, when the input of the Z-axis angular velocity is sensed, the first Z mass block 1e and the second Z mass block 1f move in opposite directions along the Y-axis direction, the first Z-axis detection electrode detects a change in distance between the first Z mass block 1e and the first Z mass block 2e.1, the second Z-axis detection electrode 2e.2 detects a change in distance between the second Z mass block 1f and the first Z-axis detection electrode 2e.1, and the capacitance of the first Z-axis detection electrode 2e.1 and the capacitance of the second Z-axis detection electrode 2e.2 increase and decrease, and the capacitance change caused by the Z-axis angular velocity is obtained by differentiating the first Z mass block and the second Z-axis detection electrode, so that the magnitude of the input Z-axis angular velocity is obtained.

In the particular embodiment shown in fig. 1, the centrally coupled beam structure 3d is symmetrical about the X-axis and the Y-axis; the four X/Y detection beams 3b.1, 3b.2, 3c.1, 3c.2 are entirely symmetrical about the X-axis and the Y-axis. The central coupling beam structure 3d is a concentric circle structure, and the center of the circle is the central point A of the triaxial gyroscope; the four X/Y detection beams 3b.1, 3b.2, 3c.1 and 3c.2 have the same structure, and each X/Y connection beam 3b.1, 3b.2, 3c.1 and 3c.2 comprises a plurality of hollow straight beam parts which are sequentially arranged in parallel from outside to inside and a connection part for connecting the hollow straight beams; wherein, the X/Y detecting beams 3c.1 and 3c.2 at the upper and lower sides of the central coupling beam structure 3d are placed in parallel with the X axis (or placed along the left and right direction), and the X/Y detecting beams 3b.1 and 3b.2 at the left and right sides of the central coupling beam structure 3d are placed in parallel with the Y axis (or placed along the up and down direction).

Fig. 6 is a schematic structural diagram of a center-coupled beam structure 3d shown in fig. 1 according to a second embodiment of the present invention. Fig. 7 is a schematic structural diagram of a center-coupled beam structure 3d shown in fig. 1 according to a third embodiment of the present invention. Fig. 8 is a schematic structural diagram of a center-coupled beam structure 3d shown in fig. 1 according to a fourth embodiment of the present invention. The center-coupled beam structures shown in fig. 6, 7 and 8 each include: a central coupling mechanism 3f having a coupling space defined therein; a central coupling beam 3g located within the coupling space; and the central coupling beam anchor point 4b is positioned in the coupling space, wherein the central coupling mechanism 3f is connected with the central coupling beam anchor point 4b through the central coupling beam 3g, and the central coupling mechanism 3f is respectively connected with the four X/Y mass blocks 1 a-1 d through the four X/Y detection beams 3b.1, 3b.2, 3c.1 and 3 c.2. The central coupling mechanism 3f and the central coupling beam 3g are suspended above the substrate, and the central coupling beam anchor point 4b is fixed on the substrate.

In the particular embodiment shown in fig. 6, the central coupled beam 3g comprises a cross-shaped coupled central beam 3g.1 and a coupled folded beam 3g.2, wherein the intersection of the cross-shaped coupled central beam 3g.1 is located at the centre point a. The number of the central coupling beam anchor points 4b is four, and the central coupling beam anchor points are respectively located in four areas divided by the cross-shaped coupling central beam 3g.1, wherein a first central coupling beam anchor point 4b.1 is located in an upper left area of the cross-shaped coupling central beam 3g.1, a second central coupling beam anchor point 4b.2 is located in an upper right area of the cross-shaped coupling central beam 3g.1, a third central coupling beam anchor point 4b.3 is located in a lower left area of the cross-shaped coupling central beam 3g.1, and a fourth central coupling beam anchor point 4b.4 is located in a lower right area of the cross-shaped coupling central beam 3 g.1. The four connecting ends of the cross-shaped coupling central beam 3g.1 comprise two ends of a transverse rod part and two ends of a vertical rod part, and the four connecting ends of the cross-shaped coupling central beam 3g.1 are all connected with the central coupling mechanism 3 f; each connecting end of the cross-shaped coupling central beam 3g.1 is connected with the central coupling beam anchor points on two sides of the connecting end through the corresponding coupling folding beam 3 g.2.

In the embodiment shown in fig. 6, the central coupling mechanism 3f is a diamond structure with a coupling space defined therein, and four corners of the diamond structure are respectively connected to the four X/Y detection beams 3b.1, 3b.2, 3c.1, and 3 c.2; the eight coupling folding beams 3g.2 are respectively positioned at the upper, lower, left and right connecting ends of the cross coupling central beam 3g.1 by taking two coupling folding beams as a pair, each coupling folding beam 3g.2 is a U-shaped elastic beam, and the opening direction of each coupling folding beam 3g.2 deviates from the central point A. Each connecting end of the cross-shaped coupling central beam 3g.1 is connected with a central coupling beam anchor point on one side of the connecting end through a corresponding coupling folding beam 3g.2, and is connected with a central coupling beam anchor point on the other side of the connecting end through another corresponding coupling folding beam 3 g.2. For example, the top end of the vertical rod part of the cross-shaped coupling central beam 3g.1 is connected with the central coupling beam anchor point 4b.1 at one side of the top end of the vertical rod part through a corresponding coupling folding beam 3g.2, and is connected with the central coupling beam anchor point 4b.2 at the other side of the top end of the vertical rod part through another corresponding coupling folding beam 3 g.2. The central coupling mechanism 3f is symmetrical about an X axis and a Y axis, the eight central coupling beams 3g are symmetrical about the X axis and the Y axis integrally, and the four central coupling beam anchor points 4 b.1-4 b.4 are symmetrical about the X axis and the Y axis integrally.

In the specific embodiment shown in fig. 6, the central coupling beam 3g further includes four L-shaped intermediate support beams 3g.3, which are respectively located in four areas divided by the cross-shaped coupling central beam 3g.1, one end of each L-shaped intermediate support beam 3g.3 is connected to the horizontal rod portion of the cross-shaped coupling central beam 3g.1 in the area where the L-shaped intermediate support beam is located, the other end of the L-shaped intermediate support beam is connected to the vertical rod portion of the cross-shaped coupling central beam 3g.1 in the area where the L-shaped intermediate support beam is located, and the opening direction of the L-shaped intermediate support beam faces the central point a of the three-axis gyroscope structure.

In the embodiment shown in fig. 7, the central coupling beam anchor point 4b is located at the center point a, and the central coupling beam 3g is located around the central coupling beam anchor point 4b.

In the embodiment shown in fig. 7, the central coupling mechanism 3f is a diamond structure with a coupling space defined therein, and four corners of the diamond structure are respectively connected to the four X/Y detection beams 3b.1, 3b.2, 3c.1, and 3 c.2; the number of the central coupling beams 3g is eight, two central coupling beams are used as a pair and are respectively positioned in the four directions of the central coupling beam anchor point 4b, namely the upper direction, the lower direction, the left direction and the right direction, wherein each central coupling beam 3g is connected between the central coupling beam anchor point 4b and the central coupling mechanism 3 f; each central coupling beam 3g is S-shaped. The central coupling mechanism 3f is symmetrical about the X-axis and the Y-axis, the 8 central coupling beams 3g are symmetrical about the X-axis and the Y-axis, and the central coupling beam anchor points 4b are symmetrical about the X-axis and the Y-axis.

Fig. 8 is substantially the same as the structure of fig. 7, and fig. 8 and 7 are different mainly in that the central coupling mechanism 3f shown in fig. 8 is a square structure with a coupling space defined therein, and four sides of the square structure are connected to four X/Y detection beams 3b.1, 3b.2, 3c.1, and 3c.2, respectively.

The detection principle of the three-axis gyroscope shown in fig. 1 of the present invention is described below.

Fig. 2 is a schematic diagram illustrating a driving state of the three-axis gyroscope shown in fig. 1 according to the present invention. The driving voltage is applied to the driving electrodes 2 a.1-2 a.12, so that the first X/Y mass block 1a and the second X/Y mass block 1b perform reverse resonant motion in the vertical direction along the Y axis, and then the steering beams 3 a.1-3 a.4 arranged around the X/Y mass blocks 1 a-1 d drive the third mass block 1c and the fourth mass block 1d to generate reverse resonant motion in the left-right direction (or horizontal direction) along the X axis, so that the four X/Y mass blocks 1 a-1 d integrally rotate anticlockwise or clockwise along the Z axis. The first Z mass 1e provided inside the third X/Y mass 1c and the second Z mass 1f provided inside the fourth X/Y mass 1d generate a counter-resonant motion in the left-right direction with the third mass 1c and the fourth mass 1d along the X axis.

Please refer to fig. 3, which is a schematic diagram of the three-axis gyroscope of fig. 1 for X-axis detection. When the angular velocity of the X axis is input, the Coriolis effect can generate Coriolis force to drive the third mass block 2c and the fourth mass block 2d to move in an out-of-plane reverse direction along the Z axis direction, X axis detection electrodes 2c.1 and 2c.2 arranged below the first X/Y mass block 1a and the second X/Y mass block 1b are sensitive to the change of the distance, further, the self capacitance of the X axis detection electrodes 2c.1 and 2c.2 can be changed accordingly, and the angular velocity of the X axis can be obtained through the change of the detection capacitance.

Fig. 4 is a schematic diagram of the three-axis gyroscope of fig. 1 during Y-axis detection according to the present invention. When the Y-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the third X/Y mass block 1c and the fourth X/Y mass block 1d to move in an out-of-plane reverse direction along the Z-axis direction, Y-axis detection electrodes 2d.1 and 2d.2 arranged below the third X/Y mass block 1c and the fourth X/Y mass block 1d are sensitive to the change of the distance, the self capacitance of the Y-axis detection electrodes 2d.1 and 2d.2 can be changed accordingly, and the Y-axis angular rate can be obtained through the change of the detection capacitance.

Please refer to fig. 5, which is a schematic diagram of the three-axis gyroscope of fig. 1 for Z-axis detection. When the Z-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the first Z mass block 1e and the second Z mass block 1f to move reversely along the Y-axis direction, Z-axis detection electrodes 2e.1 and 2e.2 which are respectively arranged inside the first Z mass block 1e and the second Z mass block 1f are sensitive to the distance to change, the capacitance of the Z-axis detection electrodes 2e.1 and 2e.2 can change along with the change, and the Z-axis angular rate can be obtained through the change of the detection capacitance.

In summary, the three-axis gyroscope of the present invention includes: the three-axis gyroscope comprises a first X/Y mass block 1a, a second X/Y mass block 1b, a third X/Y mass block 1c and a fourth X/Y mass block 1d which are respectively arranged at the left, right, upper and lower positions of a central point A of the three-axis gyroscope; the four steering beam anchor points 4 a.1-4 a.4 and the four steering beams 3 a.1-3 a.4, wherein each steering beam is connected with a corresponding steering beam anchor point, and two adjacent X/Y mass blocks are connected through a corresponding steering beam; first driving electrodes 2 a.1-2 a.6 and first driving feedback electrodes 2 b.1-2 b.2 arranged in the first X/Y mass block 1 a; second driving electrodes 2 a.7-2 a.12 and second driving feedback electrodes 2 b.3-2 b.4 which are arranged in the second X/Y mass block 1 b; a first Z mass block 1e disposed in a first Z space defined in the third X/Y mass block 1c and connected to the third X/Y mass block 1c through first Z detection beams 3e.1 to 3 e.4; and the second Z mass block 1f is arranged in a second Z space defined in the fourth X/Y mass block 1d and is connected with the fourth X/Y mass block 1d through second Z detection beams 3 e.5-3 e.8, so that the triaxial gyroscope is reasonable in structural design, compact in structure and high in integration level.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.

While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that changes, modifications and variations may be made therein by those of ordinary skill in the art within the scope of the present invention.

Claims

1. A three-axis gyroscope, comprising:

the first X/Y mass block, the second X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are respectively arranged at the left, right, upper and lower positions of a central point A of the triaxial gyroscope, the first X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are adjacently arranged, and the second X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are adjacently arranged;

the four steering beam anchor points and the four steering beams, wherein each steering beam is connected with one corresponding steering beam anchor point, and two adjacent X/Y mass blocks are connected through one corresponding steering beam;

a first drive electrode and a first drive feedback electrode disposed within the first X/Y mass block;

a second drive electrode and a second drive feedback electrode disposed within the second X/Y mass block;

the first Z mass block is arranged in a first Z space defined in the third X/Y mass block and is connected with the third X/Y mass block through a first Z detection beam;

and the second Z mass block is arranged in a second Z space defined in the fourth X/Y mass block and is connected with the fourth X/Y mass block through a second Z detection beam.

2. The tri-axial gyroscope of claim 1,

driving the first X/Y mass block to perform resonant motion along the Y axis in the up-and-down direction by applying a driving voltage on the first driving electrode;

driving the second X/Y mass to perform a resonant motion along a Y axis in an opposite direction to the first X/Y mass by applying a driving voltage on the second driving electrodes;

when the first X/Y mass block performs resonant motion along the Y axis and the second X/Y mass block performs resonant motion opposite to that of the first X/Y mass block along the Y axis, the first X/Y mass block and the second X/Y mass block drive the third X/Y mass block to perform resonant motion in the left-right direction along the X axis through corresponding steering beams and drive the fourth X/Y mass block to perform resonant motion opposite to that of the third X/Y mass block along the X axis through corresponding steering beams;

when the third X/Y mass block performs resonant motion in the left-right direction along the X axis, the third X/Y mass block drives the first Z mass block to perform resonant motion in the left-right direction along the X axis through the first Z detection beam; when the fourth X/Y mass block carries out resonant motion along the X axis in the direction opposite to that of the third X/Y mass block, the fourth X/Y mass block drives the second Z mass block to carry out resonant motion along the X axis in the direction opposite to that of the first Z mass block through the second Z detection beam,

the X axis and the Y axis are mutually perpendicular and define a plane where the triaxial gyroscope is located, the Z axis is perpendicular to the plane defined by the X axis and the Y axis, the direction parallel to the first X/Y mass block and the second X/Y mass block is the Y axis, the direction parallel to the third X/Y mass block and the fourth X/Y mass block is the X axis, the central point A is a coordinate origin, the X axis is in the left-right direction, and the Y axis is in the up-down direction.

3. The tri-axial gyroscope of claim 1, further comprising:

a third drive feedback electrode disposed within the third X/Y mass block;

a fourth drive feedback electrode disposed within the fourth X/Y mass block;

a central coupling beam structure located at the central point a;

and the four X/Y detection beams are respectively connected to the inner sides of the corresponding X/Y mass blocks, and each X/Y detection beam is connected to the central coupling beam structure.

4. The tri-axial gyroscope of claim 3,

the first driving electrode is arranged in the middle of the first X/Y mass block;

the first driving feedback electrodes are arranged at the upper end and the lower end of the first X/Y mass block;

the second driving electrode is arranged in the middle of the second X/Y mass block;

the second driving feedback electrodes are arranged at the upper end and the lower end of the second X/Y mass block;

the third driving feedback electrodes are arranged at the left end and the right end of the third X/Y mass block;

the fourth driving feedback electrodes are arranged at the left end and the right end of the fourth X/Y mass block.

5. The tri-axial gyroscope of claim 3, further comprising:

a first X-axis detection electrode disposed below the first X/Y mass block;

a second X-axis detection electrode disposed below the second X/Y mass block;

a first Y-axis detection electrode disposed below the third X/Y mass block;

a second Y-axis detection electrode disposed below the fourth X/Y mass block;

a first Z-axis detection electrode disposed within the first Z mass block;

a second Z-axis detection electrode disposed within the second Z mass block;

when the input of the X-axis angular velocity is sensed, the first X/Y mass block and the second X/Y mass block move reversely along the Z-axis direction, the first X-axis detection electrode detects the change of the distance from the first X/Y mass block, the second X-axis detection electrode detects the change of the distance from the second X/Y mass block, the capacitance of the first X-axis detection electrode and the capacitance of the second X-axis detection electrode are increased and decreased, the capacitance change caused by the X-axis angular velocity is obtained through difference of the first X-axis detection electrode and the second X-axis detection electrode, and the input X-axis angular velocity is obtained;

when the input of the Y-axis angular velocity is sensed, the third X/Y mass block and the fourth X/Y mass block are caused to move reversely along the Z-axis direction, the first Y-axis detection electrode detects the change of the distance between the third X/Y mass block and the first Y-axis detection electrode, the second Y-axis detection electrode detects the change of the distance between the fourth X/Y mass block and the second Y-axis detection electrode, the capacitance of the first Y-axis detection electrode and the capacitance of the second Y-axis detection electrode are increased and decreased, the capacitance change caused by the Y-axis angular velocity is obtained through difference of the first Y-axis detection electrode and the second Y-axis detection electrode, and the input Y-axis angular velocity is obtained;

when the input of the Z-axis angular velocity is sensed, the first Z mass block and the second Z mass block can move reversely along the Y-axis direction, the distance between the first Z-axis detection electrode and the first Z mass block is detected to be changed, the distance between the second Z-axis detection electrode and the second Z mass block is detected to be changed, the capacitance of the first Z-axis detection electrode and the capacitance of the second Z-axis detection electrode are increased and decreased, the difference between the first Z-axis detection electrode and the second Z-axis detection electrode is changed by the capacitance caused by the Z-axis angular velocity, and the input Z-axis angular velocity is obtained.

6. The tri-axial gyroscope of claim 3,

the four steering beams are respectively positioned at four corners of a graph consisting of the four X/Y mass blocks;

the four steering beam anchor points are respectively positioned at four corners of a graph consisting of the four X/Y mass blocks;

each X/Y detection beam comprises a plurality of hollow straight beam parts which are sequentially arranged in parallel from outside to inside and a connecting part for connecting the hollow straight beams;

a certain number of damping holes can be arranged on the four X/Y mass blocks to reduce damping so as to improve the quality factor and the sensitivity of the gyroscope;

the first Z mass block and the second Z mass block can be provided with a certain number of damping holes for reducing damping so as to improve the quality factor and the sensitivity of the gyroscope.

7. The tri-axial gyroscope of claim 5,

the first driving electrode, the second driving electrode, the first driving feedback electrode, the second driving feedback electrode, the third driving feedback electrode and the fourth driving feedback electrode are fixedly arranged on the substrate;

the X-axis detection electrode and the Y-axis detection electrode are fixedly arranged on the substrate;

the first X/Y mass block, the second X/Y mass block, the third X/Y mass block and the fourth X/Y mass block are suspended above the substrate;

the X/Y detection beam is suspended above the substrate; the steering beam anchor points are fixedly arranged on the substrate; the steering beam is suspended above the substrate;

the first Z proof mass and the second Z proof mass are suspended above the substrate;

the first and second Z sense beams are suspended above the substrate.

8. The tri-axial gyroscope of claim 5,

each steering beam is a pentagon formed by a square with one corner removed;

in each pentagon, one corner of the pentagon is connected with one corresponding steering beam block anchor point, and the other two corners adjacent to the corner are respectively connected with two corresponding adjacent X/Y mass blocks;

the four X/Y mass blocks comprise rectangular parts and isosceles trapezoid parts.

9. The tri-axial gyroscope of claim 5,

the four X/Y mass blocks are integrally symmetrical about an X axis and a Y axis;

the four steering beams are integrally symmetrical about an X axis and a Y axis;

the four steering beam anchor points are integrally symmetrical about an X axis and a Y axis;

the first drive electrode and the first drive electrode are symmetrical as a whole about an X axis and a Y axis;

the first driving feedback electrode, the second driving feedback electrode, the third driving feedback electrode and the fourth driving feedback electrode are integrally symmetrical about an X axis and a Y axis;

the first Z mass block and the second Z mass block are integrally symmetrical about an X axis and a Y axis;

the first Z detection beam and the second Z detection beam are integrally symmetrical about an X axis and a Y axis;

the whole central coupling beam structure is symmetrical about an X axis and a Y axis;

the four X/Y detection beams are integrally symmetrical about the X axis and the Y axis.

10. The tri-axial gyroscope of claim 1,

the number of the first Z-shaped connecting beams is four, wherein two first Z-shaped connecting beam subsections are positioned at the left end and the right end of the top of the first Z-shaped mass block, and the other two first Z-shaped connecting beam subsections are positioned at the left end and the right end of the bottom of the first Z-shaped mass block;

the number of the second Z-shaped connecting beams is four, two second Z-shaped connecting beam subsections are positioned at the left end and the right end of the top of the second Z mass block, and the other two second Z-shaped connecting beam subsections are positioned at the left end and the right end of the bottom of the second Z mass block.

11. The tri-axial gyroscope of claim 1,

the central coupling beam structure is a concentric circle structure, and the circle center of the central coupling beam structure is the central point A; or

The center coupling beam structure includes:

a central coupling mechanism having a coupling space defined therein;

a central coupling beam located within the coupling space;

a central coupling beam anchor point located within the coupling space;

the central coupling mechanism is connected with the central coupling beam anchor point through the central coupling beam, and the central coupling mechanism is respectively connected with the four X/Y mass blocks through the four X/Y detection beams.

12. The tri-axial gyroscope of claim 11,

the central coupling beam comprises a cross-shaped coupling central beam and a coupling folding beam, wherein the cross-shaped coupling central beam has a cross point at the central point A,

the four central coupling beam anchor points are respectively positioned in four areas divided by the cross-shaped coupling central beam, wherein the first central coupling beam anchor point is positioned in the upper left area of the cross-shaped coupling central beam, the second central coupling beam anchor point is positioned in the upper right area of the cross-shaped coupling central beam, the third central coupling beam anchor point is positioned in the lower left area of the cross-shaped coupling central beam, and the fourth central coupling beam anchor point is positioned in the lower right area of the cross-shaped coupling central beam;

the four connecting ends of the cross-shaped coupling central beam comprise two ends of a transverse rod part and two ends of a vertical rod part of the cross-shaped coupling central beam, and the four connecting ends of the cross-shaped coupling central beam are connected with the central coupling mechanism;

each connecting end of the cross-shaped coupling central beam is connected with the central coupling beam anchor points on two sides of the connecting end through the corresponding coupling folding beam.

13. The tri-axial gyroscope of claim 11,

the center coupling beam further comprises four L-shaped middle supporting beams which are respectively positioned in four areas divided by the cross-shaped coupling center beam, one end of each L-shaped middle supporting beam is connected with the cross rod part of the cross-shaped coupling center beam in the area where the L-shaped middle supporting beam is positioned, the other end of each L-shaped middle supporting beam is connected with the vertical rod part of the cross-shaped coupling center beam in the area where the L-shaped middle supporting beam is positioned, and the opening direction of each L-shaped middle supporting beam faces to the central point A of the three-axis gyroscope.

14. The tri-axial gyroscope of claim 11,

the central coupling beam anchor point is located at the central point A;

the central coupling beam is located around the central coupling beam anchor point.

15. The tri-axial gyroscope of claim 11,

the central coupling mechanism is a diamond structure with a coupling space defined inside, and four corners of the diamond structure are respectively connected with the four X/Y mass block detection beams; or

The central coupling mechanism is a square structure with a coupling space defined inside, and four sides of the square structure are respectively connected with the four X/Y mass block detection beams.