CN211367795U - Cooling device for vertical pulling single crystal - Google Patents
Cooling device for vertical pulling single crystal Download PDFInfo
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- CN211367795U CN211367795U CN201921655815.8U CN201921655815U CN211367795U CN 211367795 U CN211367795 U CN 211367795U CN 201921655815 U CN201921655815 U CN 201921655815U CN 211367795 U CN211367795 U CN 211367795U
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- single crystal
- locking piece
- locking
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Abstract
The utility model provides a cooling device for czochralski single crystal, including interior leading, lead and fixed retaining member outward, interior leading is located and is led outside inside, and interior leading is connected with fixed retaining member respectively with leading outward, and interior leading can dismantle with the fixed retaining member that switches on outward and be connected, leads locking outward and to interior leading. The beneficial effects of the utility model are that interior leading and outer fixed retaining member that switches on can dismantle the connection, interior leading and outer locking when being connected of leading are fixed, avoid the carbon felt to leak the risk outward, avoid interior leading and outer separation of leading, improve because the carbon felt exposes the single crystal growth difficulty and the quality risk that leads to.
Description
Technical Field
The utility model belongs to the technical field of vertical pulling single crystal, especially, relate to a cooling device for vertical pulling single crystal.
Background
The czochralski method for growing single crystal silicon is the most widely applied technology for producing single crystal silicon at present, and as the market competition is increased and the market competition is increased, the cost pressure is increased, so that the cost of a single crystal silicon manufacturer is reduced by reducing the price of a thermal field. The guide cylinder is added to maintain the normal growth of the single crystal, so the guide cylinder becomes one of the important systems of the current czochralski crystal growing furnace. The guide shell mainly has the following functions:
firstly, isolating heat radiation of a heater to the single crystal, ensuring the temperature gradient required by the growth of the single crystal and ensuring the stable crystallization rate of the single crystal;
secondly, the flowing direction of the protective gas in the furnace is ensured, vortex is avoided being formed, the gas flow velocity on the surface of the liquid level is accelerated, and the volatile impurities are accelerated to be taken away;
the defects are as follows: the existing inner guide and outer guide are matched with each other to form a placing structure, a fixed locking design is not adopted, and heat insulation materials such as carbon felt are arranged between the inner guide and the outer guide and used for isolating heat radiation of a heater to a single crystal. Along with the increase of the size of the pulled single crystal, the lower aperture of the inner guide and the lower aperture of the outer guide are increased, so that the thermal insulation materials such as carbon felt are shrunk, the inner guide is easily supported, the inner guide is separated from the outer guide, the carbon felt leaks outwards, the growth of the single crystal is influenced, and the quality of the single crystal is also influenced.
Disclosure of Invention
In view of the above problem, the to-be-solved problem of the utility model is to provide a cooling device for czochralski single crystal, interior leading is connected through fixed retaining member with leading outward and can dismantle the connection, and it is fixed with leading locking outward to lead internally, avoids the carbon felt to leak the risk outward, improves because the carbon felt exposes single crystal growth difficulty and the quality risk that leads to.
In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides a cooling device for czochralski single crystal, leads and fixed retaining member outward including interior, and interior leading is located and is led inside outward, and interior leading is connected with fixed retaining member respectively with leading outward, and interior leading can dismantle with leading fixed retaining member outward and be connected, leads internally and leads locking outward.
Further, fixed locking piece includes interior locking piece and leads the locking piece outward, and interior locking piece leads with interior to be connected, leads the locking piece outward and is connected, and interior locking piece leads the locking piece outward and can dismantle with locking piece outward and be connected, leads in being convenient for and leads with outer fixed locking.
Furthermore, the quantity of interior locking piece is a plurality of, and the locking piece equipartition is led in a plurality of is located and is led in.
Furthermore, the quantity of outer guide locking piece is unanimous with the quantity of interior guide locking piece, and a plurality of outer guide locking piece equipartitions are located and are led outward.
Furthermore, interior locking piece of leading includes the latch segment, and the quantity of latch segment is a plurality of, and the latch segment is connected with interior leading, and a plurality of latch segments equipartitions are led in interior.
Further, the locking block is provided with an external thread.
Further, the outer guide locking piece comprises a locking groove, the locking groove is provided with an internal thread, and the locking groove and the locking block are meshed with the external thread through the internal thread.
Furthermore, the locking groove comprises a first groove wall and a second groove wall, the first groove wall and the second groove wall are arranged in parallel, and the width of the second groove wall is larger than that of the second groove wall.
Furthermore, the inner guide locking piece corresponds to the outer guide locking piece in position, so that the inner guide locking piece and the outer guide locking piece can be conveniently locked.
Further, an inner guide locking member is disposed at an end of the inner guide adjacent the single crystal and an outer guide locking member is disposed at an end of the outer guide adjacent the single crystal.
Owing to adopt above-mentioned technical scheme for cooling device for czochralski crystal simple structure, convenient to use, and interior leading and outer switching on fixed retaining member can dismantle the connection, dismantle simple to operate, simultaneously, the setting of fixed retaining member, interior leading and outer locking when leading and being connected are fixed, avoid carbon felt to leak the risk outward, avoid interior leading and outer separation of leading, improve because carbon felt exposes single crystal growth difficulty and the quality risk that leads to.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is a top view of an inner guide structure according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view A-A of FIG. 2;
fig. 4 is a top view of an external guide structure according to an embodiment of the present invention;
FIG. 5 is a cross-sectional view C-C of FIG. 4;
fig. 6 is an enlarged view of a portion I of fig. 5.
In the figure:
1. inner guide 2, locking block 3 and outer guide
4. Locking groove 40, first groove wall 41 and second groove wall
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific embodiments.
Fig. 1 shows the structure schematic diagram of an embodiment of the utility model, specifically show the structure of this embodiment, this embodiment relates to a cooling device for czochralski single crystal for use when czochralski single crystal, interior lead with outer turn-on fixed retaining member can dismantle the connection, and the interior lead after connecting can fix the locking with leading outward, avoid because in leading with lead outward when the aperture increases, insulating material locking such as the carbon felt that leads to props in with leading, lead in with lead outward the separation, the emergence of the outer hourglass phenomenon of carbon felt.
The utility model provides a cooling device for czochralski single crystal, as shown in figure 1, including interior leading 1, lead 3 and fixed retaining member outward, interior leading 1 is located and is led 3 inside outward, interior leading 1 is connected with fixed retaining member respectively with outer leading 3, and interior leading 1 can dismantle through fixed retaining member with outer leading 3 and be connected, lead 3 locking to interior leading 1 and outer, make interior leading 1 and outer leading 3 when the installation, can dismantle through fixed retaining member and be connected, and interior leading 1 and outer leading 3 installation backs, can fix the locking, can not be because of leading 1 under the bore with lead 3 under the bore increase of bore outward, and lead 1 to prop up in causing insulation material locking such as carbon felt, avoid causing interior leading 1 and outer leading 3 separation.
This fixed retaining member leads the end connection of the lower bore of 1 and 3 with outer respectively with interior, that is to say, fixed retaining member leads 1 and leads 3 end connection that is close to the single crystal with interior respectively, and here is the biggest department of insulation material compaction crimps such as carbon felt, also leads 1 department of strutting in being the most easily, leads 1 and leads 3 fixed locking outward with interior of here, can effectively avoid interior leading 1 and leading 3 separation outward, and the carbon felt leaks outward.
Foretell fixed retaining member leads retaining member and outer retaining member including interior, interior retaining member leads 1 with interior and is connected, it leads 3 with leading outward to be connected to lead the retaining member outward, interior retaining member leads the retaining member and leads the retaining member outward and can dismantle and be connected, it leads 1 and leads 3 fixed locks outward to be convenient for in, and lead 1 fixed connection in interior retaining member and interior, lead 3 fixed connection with leading outward outside the retaining member, this fixed connection mode can be through connecting piece fixed connection such as bolts, or integrated into one piece, or other fixed connection modes, select according to the actual demand, do not do the specific requirement here.
Foretell interior guide locking piece is corresponding with outer guide locking piece position, it is convenient for interior guide 1 and outer 3 when installing to lead, interior guide locking piece and outer guide locking piece locking, and interior guide locking piece locates interior guide 1 tip that is close to the single crystal, outer guide locking piece locates and leads 3 tip that is close to the single crystal outward, that is, interior guide locking piece fixed mounting is including leading 1 lower bore tip, outer guide locking piece fixed mounting is leading 3 lower bore tip outward, because the diameter of the lower bore of interior guide 1 and the lower bore of outer guide 3 suits, make interior guide 1 lower bore and outer 3 lower bores can be connected, the position that interior guide lower bore department was located to interior guide locking piece is corresponding with the position that outer guide lower bore department was located to outer guide locking piece, it is convenient for interior guide locking piece and outer guide locking piece link together through the cooperation.
The quantity of the locking piece is led in foretell is a plurality of, lead in a plurality of the locking piece equipartitions locate in lead 1 on, the quantity of the locking piece is selected according to the actual demand in interior, do not do the specification here, and lead in a plurality of the locking piece along interior 1 lower mouth footpath circumference equidistant settings, the equipartition leads 1 lower mouth footpath department in for when leading in 1 with lead 3 outward and be connected, lead the locking piece in a plurality of and constitute a plurality of connecting pieces, make in lead 1 and lead 3 outward and be connected stably.
Foretell outer quantity of leading locking piece is unanimous with the quantity of interior locking piece, a plurality of outer locking piece equipartitions of leading are located and are led on 3 outward, each leads locking piece and each in outer locking piece and matches and be connected, lead 1 and lead 3 links together outward in with, and a plurality of outer locking pieces of leading lead along leading the equidistant setting of aperture circumference down outward, the equipartition leads under the aperture department outward, be convenient for in lead with lead outward when being connected, interior locking piece and outer locking piece of leading are connected.
The inner guide 1 is a water-cooling inner guide, and the outer guide 3 is a guide cylinder.
As shown in fig. 2-3, the inner guide locking member includes a plurality of locking blocks 2, the locking blocks 2 are connected to the inner guide 1, the locking blocks 2 are uniformly distributed on the inner guide 1, the locking blocks 2 are of a plate-shaped structure, and the width of the locking blocks 2 is greater than the thickness of the inner guide 1, so that when the locking blocks 2 are installed at the lower caliber of the inner guide 1, one end of the locking block 2 is flush with the inner wall of the inner guide 1, and the other end of the locking block 2 extends out of the outer wall of the inner guide 1, that is, in the width direction of the locking blocks 2, one end of the locking block 2 is flush with the inner wall of the inner guide 1, and the other end of the locking block 2 protrudes out of the outer wall of the inner guide 1, so as to be conveniently connected to the outer guide locking member in a matching manner, the locking blocks 2 are fixedly installed at the end face of the lower caliber of the inner guide 1, and the fixing manner may be connected by a connecting member such as a bolt, the selection is carried out according to the actual requirement, and no specific requirement is made here.
The length and thickness of the locking block 2 are selected according to actual requirements, and are not specifically required here. Preferably, the thickness of the locking block 2 is adapted to the thickness of the inner guide 1, so that the locking block 2 and the outer guide locking piece are conveniently matched and connected.
A plurality of latch segments 2 equidistant fixed mounting are including leading the terminal surface portion of 1 lower bore, and latch segment 2 is the arc piece, lead 1 lower bore's terminal surface junction shape with interior and suit, and the latch segment 2 of being convenient for is installed including leading 1 lower bore's terminal surface department, and simultaneously, the latch segment 2 of being convenient for is connected with the cooperation of leading the retaining member outward.
Simultaneously, this latch segment 2 is equipped with the external screw thread for latch segment 2 can be dismantled with outer guide lock spare through thread engagement and be connected.
As shown in fig. 4-6, the above-mentioned outer guide locking member includes a locking groove 4, the locking groove 4 is provided with an internal thread, the locking groove 4 and the locking block 2 are engaged with the external thread through the internal thread, the locking groove 4 is fixedly installed at the end of the lower caliber of the outer guide 3, and the shape of the locking groove 4 is adapted to the shape of the locking block 2, so that the locking block 2 can be conveniently inserted into the locking groove 4, and the inner guide 1 and the outer guide 3 are connected together through the engagement of the internal thread and the external thread.
The locking groove 4 can be fixedly connected with the lower caliber end part of the outer guide 3 through connecting pieces such as bolts and the like, or integrally formed, or in other fixed connection modes, and is selected according to actual requirements without specific requirements.
Preferably, the locking groove 4 is horizontally arranged, and the opening direction of the locking groove 4 faces the inner side of the outer guide 3, that is, the opening of the locking groove 4 faces the single crystal, so as to be conveniently installed in cooperation with the locking block 2 of the inner guide locking piece.
When the inner guide 1 and the outer guide 3 are connected, the inner guide 1 is placed inside the outer guide 3, when the inner guide 1 is placed, the inner guide locking piece of the inner guide 1 and the outer guide locking piece of the outer guide 3 are placed in a staggered mode, the inner guide 1 is rotated, the locking block of the inner guide locking piece is rotated to enter the locking groove 4 of the outer guide 3, the locking block 2 and the locking groove 4 are detachably connected through internal threads and external threads, and the inner guide 1 and the outer guide 3 are fixedly connected together; when the inner guide 1 is connected with the outer guide 3, heat insulation materials such as carbon felt are arranged between the inner guide 1 and the outer guide 3, the heat insulation materials such as the carbon felt are fixedly compressed between the inner guide 1 and the outer guide 3, and the inner guide and the outer guide cannot be separated.
When pulling a single crystal, the cooling device is used, compared with the prior pulling, as shown in the following table:
| single crystal growth rate | Yield of single crystal quality | |
| Existing crystal puller | 70％ | 77％ |
| This example | 73.5％ | 80.8％ |
As can be seen from the above table, the use of the cooling device in the pulling of large-size single crystals enables the single crystal crystallization rate to be improved by 5%, the quality qualification rate of the single crystals to be improved by 5%, the quality of the large-size single crystals to be improved, and the manufacturing and production cost of the large-size single crystals to be reduced.
Owing to adopt above-mentioned technical scheme for cooling device for czochralski crystal simple structure, convenient to use, and interior leading and outer switching on fixed retaining member can dismantle the connection, dismantle simple to operate, simultaneously, the setting of fixed retaining member, interior leading and outer locking when leading and being connected are fixed, avoid carbon felt to leak the risk outward, avoid interior leading and outer separation of leading, improve because carbon felt exposes single crystal growth difficulty and the quality risk that leads to.
The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (9)
1. A cooling device for pulling a single crystal is characterized in that: the inner guide is arranged in the outer guide, the inner guide and the outer guide are respectively connected with the fixed locking piece, and the inner guide and the outer guide are detachably connected through the fixed locking piece to lock the inner guide and the outer guide; fixed retaining member includes interior retaining member and the outer retaining member of leading, interior retaining member with interior leading is connected, outer retaining member with outer leading is connected, interior retaining member with outer retaining member can dismantle the connection, is convenient for interior leading with outer leading fixed locking.
2. The cooling apparatus for pulling a single crystal according to claim 1, wherein: the quantity of interior lock spare is a plurality of, a plurality of interior lock spare equipartitions of leading are located interior leading.
3. The cooling apparatus for pulling a single crystal according to claim 2, wherein: the quantity of outer guide locking piece with the quantity of interior guide locking piece is unanimous, a plurality of outer guide locking piece equipartitions are located lead outward.
4. The cooling apparatus for Czochralski single crystal according to any one of claims 1 to 3, wherein: interior locking piece of leading includes the latch segment, the quantity of latch segment is a plurality of, just the latch segment with interior leading is connected, a plurality of latch segment equipartitions in interior leading.
5. The cooling apparatus for pulling a single crystal according to claim 4, wherein: the locking block is provided with external threads.
6. The cooling apparatus for pulling a single crystal according to claim 5, wherein: the outer guide locking piece comprises a locking groove, an internal thread is arranged in the locking groove, and the locking groove is meshed with the external thread through the locking block.
7. The cooling apparatus for pulling a single crystal according to claim 6, wherein: the locking groove comprises a first groove wall and a second groove wall, the first groove wall and the second groove wall are arranged in parallel, and the width of the second groove wall is larger than that of the second groove wall.
8. The cooling apparatus for pulling a single crystal according to any one of claims 1 to 3 and 5 to 7, wherein: the inner guide locking piece corresponds to the outer guide locking piece in position, and the inner guide locking piece and the outer guide locking piece are convenient to lock.
9. The cooling apparatus for pulling a single crystal according to claim 8, wherein: the inner guide locking piece is arranged at the end part of the inner guide close to the single crystal, and the outer guide locking piece is arranged at the end part of the outer guide close to the single crystal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921655815.8U CN211367795U (en) | 2019-09-30 | 2019-09-30 | Cooling device for vertical pulling single crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921655815.8U CN211367795U (en) | 2019-09-30 | 2019-09-30 | Cooling device for vertical pulling single crystal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211367795U true CN211367795U (en) | 2020-08-28 |
Family
ID=72166098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921655815.8U Active CN211367795U (en) | 2019-09-30 | 2019-09-30 | Cooling device for vertical pulling single crystal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211367795U (en) |
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2019
- 2019-09-30 CN CN201921655815.8U patent/CN211367795U/en active Active
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