CN207793474U - A kind of polysilicon producing and reducing furnace electrode assembly - Google Patents

Abstract

The utility model discloses a kind of polysilicon producing and reducing furnace electrode assemblies, including the insulating supporting component being set on chassis of reducing furnace, the electrode being connected on the insulating supporting component, it is set to the graphite base of the top of electrodes, the graphite clamping petal being fixedly installed on the graphite base and the graphite ferrule for controlling the graphite clamping petal folding；The insulating supporting component includes the ladder-like insulated support being connected on the chassis of reducing furnace, it is set to the quartz sleeve in the ladder-like insulated support and being sheathed on outside the electrode, it is sheathed on the upper crystal mounting that the quartz sleeve is outer and abuts, seals with the chassis of reducing furnace, it is sheathed on the lower crystal mounting of the ladder-like insulated support lower part, is set to the gasket of the lower crystal mounting bottom and the annular fastener being arranged in outside the electrode.The utility model electrode assembly can improve the insulating properties between electrode and chassis of reducing furnace, reduce the phenomenon of falling stove.

Description

A kind of polysilicon producing and reducing furnace electrode assembly

Technical field

The utility model is related to production of polysilicon apparatus fields, and in particular to a kind of polysilicon producing and reducing furnace electrode group Part.

Background technology

The stove that opens of reduction furnace in polycrystalline silicon production needs to be punctured silicon core with the high pressure of 10KV.But about due to reduction furnace It needs within every 5 days to dismount and once needs to check the insulating mount for replacing electrode in disassembly process.When electrode and chassis of reducing furnace it Between insulation performance it is inadequate when, usually will appear electric current and climb arcing, such case can cause following influence：1, electrode can be caused It is shaken with silicon core, silicon core is made to be broken, replacing silicon core can make to open normal time of stove toward rear dragging 15-20 hours；2, electric discharge can make change The high-pressure side of depressor generates larger voltage fluctuation, it can influence the normal production of collinear other reduction furnaces of road, makes other also Former stove non-normal shutdown.3, serious to puncture scorification electrode and chassis of reducing furnace.

In addition, when installing silicon core, graphite clamping petal is generally arranged by graphite base on the top of electrode, and then fixed Silicon core.Slot is set in graphite base, the top of electrode is inserted in slot；This connection type of electrode and graphite base, The fixation between electrode and graphite base cannot be realized well, and the bonding strength of the two is inadequate, easily causes down stove.

Utility model content

In view of the above-mentioned problems, the utility model discloses a kind of polysilicon producing and reducing furnace electrode assembly, this electrode group Part can improve the insulating properties between electrode and chassis of reducing furnace, while ensure the stability connected between electrode and graphite base, Reduce the phenomenon of falling stove.

To achieve the above object, technical solution used by the utility model is：A kind of polysilicon producing and reducing furnace electricity consumption Pole component, including the insulating supporting component that is set on chassis of reducing furnace, the electrode being connected on the insulating supporting component, if It is placed in the graphite base of the top of electrodes, the graphite clamping petal and the control graphite clamping being fixedly installed on the graphite base The graphite ferrule of valve folding；

The insulating supporting component includes the ladder-like insulated support being connected on the chassis of reducing furnace, is set to institute State the quartz sleeve in ladder-like insulated support and being sheathed on outside the electrode, be sheathed on the quartz sleeve it is outer and with it is described The upper crystal mounting that chassis of reducing furnace is abutted, sealed, is sheathed on the lower crystal mounting of the ladder-like insulated support lower part, is set to The gasket of the lower crystal mounting bottom and the annular fastener being arranged in outside the electrode.

Further：Water cooling cavity is offered in the electrode, the inner wall of the water cooling cavity is equipped with thermal insulation layer.

Further：The thermal insulation layer bottom end is equipped with external screw thread, the electrode bottom after stretching out the bottom end of the electrode Portion is provided with electrode cooling device, and the electrode cooling device includes the first cooling water inlet pipe and is sheathed on first cooling water Cooling water outlet tube in inlet pipe, the first cooling water inlet pipe open top, sealed bottom, the first cooling water inlet pipe top Opening, which is equipped with, to be spirally connected with the matched internal thread of the external screw thread, the first cooling water inlet pipe with the thermal insulation layer, The bottom of the first cooling water inlet pipe is equipped with the second cooling water inlet pipe, and it is empty that the water cooling is stretched at the top of the cooling water outlet tube The bottom of the first cooling water inlet pipe is stretched out in the top of chamber, the cooling water outlet tube bottom.

Further：The top of the electrode is equipped with elastic clamping block, is offered for institute on the bottom surface of the graphite base State electrode insertion slot, the slot inner wall be equipped with the matched card slot of the elastic clamping block, the graphite base Side wall is equipped with the mandril stretched into the card slot.

It is had the beneficial effect that using caused by above-mentioned technical proposal：It is connected with quartz sleeve in ladder-like insulated support Cylinder, and quartz sleeve is sheathed on outside electrode, and be arranged with outside quartz sleeve and abutted with chassis of reducing furnace, the upper quartz of sealing Seat prevents electric current and climbs arcing which adds the insulation distance between electrode upper and chassis of reducing furnace, while Ladder-like insulated support lower part is equipped with lower crystal mounting and gasket, is also the increase in exhausted between electrode lower part and chassis of reducing furnace Edge distance prevents electric current and climbs arcing.

Water cooling cavity is opened up in electrode, thermal insulation layer is equipped on the inner wall of water cooling cavity, and set in electrode base It is equipped with electrode cooling device.Electrode can be cooled down by electrode cooling device in this way, electrode is on the one hand reduced by cooling Resistance, reduce electrode at electrical loss；On the other hand, heat caused by recycling in time at electrode, reduces the waste of energy.

Electrode is connected and fixed equipped with elastic clamping block with the card slot on slot inner wall with graphite base by the top of electrode, this Sample can greatly increase the stability that electrode is connect with graphite base；By mandril elastic clamping block is easily skidded off simultaneously Card slot, it is simple in structure, facilitate installation.

Description of the drawings

Fig. 1 show the structural schematic diagram of the utility model；

Fig. 2 show the portions the A enlarged diagram of Fig. 1；

Fig. 3 show the portions the B enlarged diagram of Fig. 1；

Wherein：1, chassis of reducing furnace；2, insulating supporting component, 21, ladder-like insulated support, 22, quartz sleeve, 23, Upper crystal mounting, 24, lower crystal mounting, 25, gasket, 26, annular fastener；3, electrode, 31, water cooling cavity, 32, thermal insulation layer, 321, external screw thread, 33, elastic clamping block；4, graphite base, 41, slot, 411, card slot, 412, mandril；5, graphite clamping petal；6, stone Black cutting ferrule；7, electrode cooling device, the 71, first cooling water inlet pipe, 711, internal thread, the 712, second cooling water inlet pipe, 72, cooling Water outlet pipe.

Specific implementation mode

The embodiment of the utility model is described in further detail with reference to the accompanying drawings and examples.Following embodiment For illustrating the utility model, but cannot be used for limiting the scope of the utility model.

Fig. 1 to Fig. 3 is a specific embodiment of the utility model：A kind of polysilicon producing and reducing furnace electrode assembly, Including the insulating supporting component 2 being set on chassis of reducing furnace 1, the electrode 3 being connected on the insulating supporting component 2, setting Graphite base 4 in 3 top of the electrode, the graphite clamping petal 5 being fixedly installed on the graphite base 4 and the control graphite The graphite ferrule 6 that card valve 5 opens and closes.In actual use, electrode 3 is mounted on by insulating supporting component 2 on chassis of reducing furnace 1, Graphite base 4 is mounted on to the top of electrode 3 again, silicon core is inserted into the graphite clamping petal 5 at 4 top of graphite base, is passing through stone 5 clamping of graphite clamping petal is realized the fixation to silicon core by black cutting ferrule 6.

Specific insulating supporting component 2 includes the ladder-like insulated support 21 being connected on the chassis of reducing furnace 1, if It is placed in the quartz sleeve 22 in the ladder-like insulated support 21 and being sheathed on outside the electrode 3, is sheathed on the quartz sleeve The upper crystal mounting 23 abutted outside cylinder 22 and with the chassis of reducing furnace 1, sealed, is sheathed under the ladder-like insulated support 21 The lower crystal mounting 24 in portion is set to the gasket 25 of 24 bottom of lower crystal mounting and the annular fastener being arranged in outside the electrode 3 26。

When electrode 3 specifically being installed by insulating supporting component 2, ladder-like insulated support 21 is connected to reduction first In the step-like chuck of furnace hearth plate 1, then electrode 3 is connected at the step of ladder-like insulated support 21, later by quartz sleeve Cylinder 22 is sheathed on outside electrode 3, and carries out insulated enclosure by upper crystal mounting 23.Which adds 3 tops of electrode and reduction Insulation distance between furnace hearth plate 1 prevents electric current and climbs arcing phenomenon.Lower crystal mounting 24 is installed on again ladder-like exhausted Gasket 25 is installed on 24 lower part of lower crystal mounting, is fixed finally by annular fastener 26 by 21 lower part of edge support element.Under The setting of crystal mounting 24 and gasket 25 increases the insulation distance between 3 lower part of electrode and chassis of reducing furnace 1, prevents electricity Stream climbs arcing phenomenon.

As a kind of preferred implementation：Water cooling cavity 31 is offered in electrode 3, the inner wall of the water cooling cavity 31 is equipped with Thermal insulation layer 32.Water cooling cavity 31 can cool down electrode 3, on the one hand reduce the resistance of electrode 3 by cooling, reduce Electrical loss at electrode 3；On the other hand, heat caused by recycling in time at electrode 3, reduces the waste of energy.

It is preferably implemented as another kind：32 bottom end of the thermal insulation layer is equipped with outer spiral shell after stretching out the bottom end of the electrode 3 Line 321,3 bottom of the electrode are provided with electrode cooling device 7, and the electrode cooling device 7 includes the first cooling water inlet pipe 71 With the cooling water outlet tube 72 being sheathed in the first cooling water inlet pipe 71,71 open top of the first cooling water inlet pipe, bottom Portion seals, and 71 top open part of the first cooling water inlet pipe is equipped with and 321 matched internal thread 711 of the external screw thread, institute It states the first cooling water inlet pipe 71 to be spirally connected with the thermal insulation layer 32, the bottom of the first cooling water inlet pipe 71 is cold equipped with second But the top of the water cooling cavity 31, the cooling water outlet tube 72 are stretched into water inlet pipe 712, the top of the cooling water outlet tube 72 The bottom of the first cooling water inlet pipe 71 is stretched out in bottom.

When needing to radiate to electrode 3, cooling water outlet tube 72 is inserted into water cooling cavity 31, and by the first cooling water 71 top of inlet pipe is spirally connected with thermal insulation layer 32, is passed through cold water at the second cooling water inlet pipe 712 at this time, cold water is through the first cooling Water inlet pipe 71 enters inside water cooling cavity 31, inside water cooling cavity 31, thermal insulation layer 32 and the first cooling water inlet pipe 71 it Between form cold water channel, cold water is moved upwards along cold water channel, and pass through between thermal insulation layer 32 and electrode 3 occur heat hand over It changes, the water after heat exchange occurs and flows into cooling water outlet tube 72, and is finally flowed out from the bottom of cooling water outlet tube 72.

As a kind of preferred implementation：The top of the electrode 3 is equipped with elastic clamping block 33, on the bottom surface of the graphite base 4 The slot 41 being inserted into for the electrode 3 is offered, 41 inner wall of the slot is equipped with and 33 matched card of the elastic clamping block Slot 411, the side wall of the graphite base 4 are equipped with the mandril 412 stretched into the card slot 411.It is installed on the top of electrode 3 When graphite base 4, hand presses elastic clamping block 33, it is made to be moved into slot 41, and finally slides into card slot 411, realizes electrode 3 Mandril 412 is pressed with hand, mandril 412 is by elastic clamping block when needing to dismantle graphite base 4 with connecting and fixing for graphite base 4 33 skid off from card slot 411, you can easily remove graphite base 4.

Finally it should be noted that：Above example is only to illustrate the technical solution of the utility model, rather than its limitations； Although the utility model is described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that： It can still modify to the technical solution recorded in previous embodiment, or be equal to which part technical characteristic It replaces；And these modifications or replacements, the utility model embodiment technical solution that it does not separate the essence of the corresponding technical solution Spirit and scope.

Claims (4)

1. a kind of polysilicon producing and reducing furnace electrode assembly, it is characterised in that：Including being set to chassis of reducing furnace（1）On it is exhausted Edge support component（2）, it is connected in the insulating supporting component（2）On electrode（3）, it is set to the electrode（3）The stone at top Black pedestal（4）, it is fixedly installed on the graphite base（4）On graphite clamping petal（5）With the control graphite clamping petal（5）Folding Graphite ferrule（6）；

The insulating supporting component（2）Including being connected in the chassis of reducing furnace（1）On ladder-like insulated support（21）If It is placed in the ladder-like insulated support（21）It is interior and be sheathed on the electrode（3）Outer quartz sleeve（22）, it is sheathed on described Quartz sleeve（22）It is outer and with the chassis of reducing furnace（1）It abuts, the upper crystal mounting of sealing（23）, it is sheathed on described ladder-like exhausted Edge support element（21）The lower crystal mounting of lower part（24）, it is set to the lower crystal mounting（24）The gasket of bottom（25）Be arranged in institute State electrode（3）Outer annular fastener（26）.

2. a kind of polysilicon producing and reducing furnace electrode assembly according to claim 1, it is characterised in that：The electrode （3）Inside offer water cooling cavity（31）, the water cooling cavity（31）Inner wall be equipped with thermal insulation layer（32）.

3. a kind of polysilicon producing and reducing furnace electrode assembly according to claim 2, it is characterised in that：The insulation is led Thermosphere（32）The electrode is stretched out in bottom end（3）Bottom end after be equipped with external screw thread（321）, the electrode（3）Bottom is provided with electrode Cooling device（7）, the electrode cooling device（7）Including the first cooling water inlet pipe（71）Be sheathed on first cooling water into Pipe（71）Interior cooling water outlet tube（72）, the first cooling water inlet pipe（71）Open top, sealed bottom, first cooling Water inlet pipe（71）Top open part is equipped with and the external screw thread（321）Matched internal thread（711）, first cooling water into Pipe（71）With the thermal insulation layer（32）It is spirally connected, the first cooling water inlet pipe（71）Bottom be equipped with the second cooling water inlet pipe （712）, the cooling water outlet tube（72）Top stretch into the water cooling cavity（31）Top, the cooling water outlet tube（72）Bottom The first cooling water inlet pipe is stretched out in portion（71）Bottom.

4. a kind of polysilicon producing and reducing furnace electrode assembly according to claim 1, it is characterised in that：The electrode （3）Top be equipped with elastic clamping block（33）, the graphite base（4）Bottom surface on offer for the electrode（3）That is inserted into inserts Slot（41）, the slot（41）Inner wall is equipped with and the elastic clamping block（33）Matched card slot（411）, the graphite base （4）Side wall be equipped with stretch into the card slot（411）Interior mandril（412）.