CN209974873U - Cathode with high field intensity and high target utilization rate - Google Patents
Cathode with high field intensity and high target utilization rate Download PDFInfo
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- CN209974873U CN209974873U CN201920349203.XU CN201920349203U CN209974873U CN 209974873 U CN209974873 U CN 209974873U CN 201920349203 U CN201920349203 U CN 201920349203U CN 209974873 U CN209974873 U CN 209974873U
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Abstract
The utility model relates to a magnetron sputtering negative pole discloses a high field intensity high target utilization ratio's negative pole, and its core is the magnetic circuit module of compriseing magnet steel group and yoke, and magnet steel group passes through magnetic force and yoke to be connected, and magnetic circuit module includes a yoke, and magnet steel group comprises five not equidistance and parallel placement's magnet steel, and the magnetic pole of magnet steel is crisscross to be set up. The magnetic circuit structure provided by the utility model enables the cathode surface to have more magnetic field components parallel to the target material, and can etch the target surface in a larger area, thereby improving the utilization rate of the target material and effectively saving materials; the service life of a single target is prolonged, the target can be prevented from being frequently replaced, the times of opening the vacuum chamber are reduced, the production continuity is ensured, the working efficiency is improved, and the cleanliness of products can be improved. In addition, the cathode ensures the magnetic field intensity on the surface of the target while providing more parallel magnetic field components through the matching of five magnetic steels, can effectively sputter magnetic conductive materials or thicker targets, widens the application field of products, and also effectively improves the sputtering efficiency.
Description
Technical Field
The utility model relates to a magnetron sputtering cathode, in particular to a cathode with high field intensity and high target utilization rate.
Background
The coating film is a very thin film coated on the surface, and has the functions of wear resistance, lubrication, electric conduction, optics, decoration and the like. With the higher and higher pursuit of products, the surfaces of more and more articles are coated with films. The most common method for coating is coating by a coating machine, while the most commonly used method is sputtering coating, which can be simply understood as bombarding a target material by ions or high-energy laser, and enabling surface components to be sputtered out in the form of atomic groups or ions to be finally deposited on the surface of a substrate to finally form a film.
As shown in fig. 3, the magnetron sputtering cathode, which is usually three magnetic steels, used in the current coating industry is limited by its working principle, and the target utilization rate is very low, which is about 20%, as shown in fig. 4, which results in a large amount of material waste; meanwhile, the low utilization rate of the target material can cause the equipment to need frequent target material replacement, and the production efficiency is greatly influenced.
If the utilization rate of the target material is improved by adopting other prior art, such as seven magnetic steels, the utilization rate can be improved well, but the cathode can not work normally for some thick target materials or target materials with magnetic conductivity because the magnetic field on the surface of the target material is lower.
Disclosure of Invention
The main object of the present invention is to provide a cathode with high field intensity and high target utilization, which can effectively solve the problems in the background art.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a high target utilization rate's negative pole of high field intensity, core component are the magnetic circuit module that magnet steel group and yoke are constituteed, and magnet steel group is connected with the yoke through magnetic force, and the magnetic circuit module includes a yoke, and magnet steel group includes five not equidistance and parallel arrangement's magnet steel, and the magnetic pole of magnet steel sets up in a staggered way.
Preferably, the magnetic circuit module further comprises a mounting flange, an anode is arranged on the outer side of the top of the mounting flange, a cathode is located between the two anodes, a target is arranged on the inner side of the magnetic circuit module, and the target is located on the upper side of the magnet.
Preferably, the bottom of the target is provided with a cooling water channel, the bottom of the mounting flange is provided with a water inlet pipe and a water outlet pipe, and the water inlet pipe is communicated with the cooling water channel of the water outlet pipe.
Preferably, a water-stop plate is arranged between the target material and the cooling water channel.
Preferably, the mounting flange is provided with an insulating plate, and the cathode is fixed on the insulating plate.
Preferably, the mounting flange is provided with a flange water pipe along the length direction thereof.
Preferably, the volume of the second magnetic steel is smaller than that of the first magnetic steel, the side second magnetic steels on the two sides are positioned on the outer sides of the tops of the corresponding first magnetic steels, and the second magnetic steel in the middle is positioned in the center of the tops of the corresponding first magnetic steels.
Compared with the prior art, the utility model discloses following beneficial effect has: the magnetic circuit structure provided by the utility model enables the cathode surface to have more magnetic field components parallel to the target material, and can etch the target surface in a larger area, thereby improving the utilization rate of the target material and effectively saving materials; the service life of a single target is prolonged, the target can be prevented from being frequently replaced, the times of opening the vacuum chamber are reduced, the production continuity is ensured, the working efficiency is improved, and the cleanliness of products can be improved. In addition, the cathode ensures the magnetic field intensity on the surface of the target while providing more parallel magnetic field components through the matching of five magnetic steels, can effectively sputter magnetic conductive materials or thicker targets, widens the application field of products, and also effectively improves the sputtering efficiency.
Drawings
Fig. 1 is a schematic structural view of a cathode.
Fig. 2 is a schematic diagram of the target consumption structure in the present application.
Fig. 3 is a schematic structural diagram of a cathode in the prior art.
Fig. 4 is a schematic diagram of a target consumption structure in the prior art.
Fig. 5 is a schematic structural diagram of the present invention.
The names of the parts corresponding to the reference numbers in the drawings are as follows: the magnetic circuit module comprises a magnetic yoke 1, a magnetic steel 2, a magnetic steel group 21, magnetic steel 3, a mounting flange 4, an anode 5, a magnetic circuit module 6, a target material 7, a water-stop plate 8, a cooling water channel 9, a flange water pipe 10, a water inlet pipe 11 and a water outlet pipe 11.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
The utility model provides a high target utilization rate's negative pole of high field intensity, as shown in fig. 1 and fig. 2, the core part is magnetic circuit module 5 that magnet steel group 2 and yoke 1 are constituteed, magnet steel group 2 is connected with yoke 1 through magnetic force, magnetic circuit module 5 includes a yoke 1, magnet steel group 2 includes five not equidistance and parallel arrangement's magnet steel 21, magnet steel 21's magnetic pole sets up in a staggered way, the magnetic pole at five magnet steel 21 tops is N, S, N, S, N in proper order promptly.
Still include mounting flange 3, the top outside of mounting flange 3 is equipped with positive pole 4, and magnetic circuit module 5 is located between two positive poles 4, and the inboard of magnetic circuit module 5 is equipped with target 6, and target 6 is located the upside of magnet. An insulating plate is arranged on the mounting flange 3, and the magnetic circuit module 5 is fixed on the insulating plate. The mounting flange 3 is provided with a flange water pipe 9 along the length direction.
The bottom of the target 6 is provided with a cooling water channel 8, the bottom of the mounting flange 3 is provided with a water inlet pipe 10 and a water outlet pipe 11, and the water inlet pipe 10 is communicated with the cooling water channel 8 of the water outlet pipe 11. A water-stop plate 7 is arranged between the target material 6 and the cooling water channel 8.
The present invention also contemplates various changes and modifications that fall within the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a high field strength high target utilization rate's negative pole, includes magnet steel group (2) and yoke (1), and magnet steel group (2) are connected its characterized in that through magnetic force and yoke (1): the magnetic circuit module (5) comprises a magnetic yoke (1), the magnetic steel group (2) comprises five magnetic steels (21) which are not equidistant and are arranged in parallel, and magnetic poles of the magnetic steels (21) are arranged in a staggered mode.
2. The high-field high-target-utilization cathode according to claim 1, wherein: still include mounting flange (3), the top outside of mounting flange (3) is equipped with positive pole (4), and magnetic circuit module (5) are located between two positive poles (4), and the inboard of magnetic circuit module (5) is used for installing target (6), and the upside in magnet is installed in target (6).
3. The high-field high-target-utilization cathode according to claim 2, wherein: the cooling water channel (8) is further included, a water inlet pipe (10) and a water outlet pipe (11) are arranged at the bottom of the mounting flange (3), and the water inlet pipe (10) is communicated with the cooling water channel (8) of the water outlet pipe (11).
4. The high-field high-target-utilization cathode according to claim 3, wherein: a water-stop plate (7) is arranged between the target material (6) and the cooling water channel (8).
5. The high-field high-target-utilization cathode according to claim 2, wherein: an insulating plate is arranged on the mounting flange (3), and the magnetic circuit module (5) is fixed on the insulating plate.
6. The high-field high-target-utilization cathode according to claim 2, wherein: a flange water pipe (9) is arranged on the mounting flange (3) along the length direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920349203.XU CN209974873U (en) | 2019-03-19 | 2019-03-19 | Cathode with high field intensity and high target utilization rate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920349203.XU CN209974873U (en) | 2019-03-19 | 2019-03-19 | Cathode with high field intensity and high target utilization rate |
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| CN209974873U true CN209974873U (en) | 2020-01-21 |
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| CN201920349203.XU Active CN209974873U (en) | 2019-03-19 | 2019-03-19 | Cathode with high field intensity and high target utilization rate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735821A (en) * | 2019-03-19 | 2019-05-10 | 杭州朗为科技有限公司 | A kind of cathode of high field intensity high target utilization ratio |
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2019
- 2019-03-19 CN CN201920349203.XU patent/CN209974873U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735821A (en) * | 2019-03-19 | 2019-05-10 | 杭州朗为科技有限公司 | A kind of cathode of high field intensity high target utilization ratio |
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