CN209923427U - Tool for replacing clamping point of plum-blossom graphite boat piece - Google Patents
Tool for replacing clamping point of plum-blossom graphite boat piece Download PDFInfo
- Publication number
- CN209923427U CN209923427U CN201920720671.3U CN201920720671U CN209923427U CN 209923427 U CN209923427 U CN 209923427U CN 201920720671 U CN201920720671 U CN 201920720671U CN 209923427 U CN209923427 U CN 209923427U
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- rod
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 65
- 239000010439 graphite Substances 0.000 title claims abstract description 65
- 230000005540 biological transmission Effects 0.000 claims abstract description 53
- 239000004795 extruded polystyrene foam Substances 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 4
- 230000008859 change Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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Abstract
The utility model provides a tool for replacing the clamping point of a plum-blossom graphite boat piece, which comprises a connecting frame and a clamping point aligning strip; the middle part of the connecting frame is provided with a transmission device, and the transmission device consists of a transmission gear, a driving gear and an anti-skid pin rod; the clamping point aligning strip consists of a transverse adjusting strip, a point unloading device and a point loading device. The gear ratio of drive gear and driving gear is 3: 1, make the loading and unloading operation that the chucking point was accomplished to pushing down length and the pressure of control power pole that operating personnel can be accurate, the difficult problem of mastering of dynamics of control press installation chucking point when solving current graphite boat chucking point and changing, the device realizes two sets of chucking point loading and unloading operation simultaneously through the up-and-down motion of control carousel control power pole, this operating means is simple convenient, the work efficiency of the device has accelerated six times than the work efficiency of current change mode, the loaded down with trivial details trouble problem of technology is changed to current graphite boat chucking point of solution.
Description
Technical Field
The utility model belongs to the technical field of the graphite boat piece stuck point is changed, more specifically says, in particular to plum blossom graphite boat piece stuck point is changed and is used frock.
Background
When a silicon wafer is subjected to a surface coating process, the silicon wafer which is not coated needs to be inserted into a wafer carrier of vacuum coating equipment adopting a plasma enhanced chemical vapor deposition method, at present, the wafer carrier usually adopts a graphite boat, and the specific operation process is as follows: inserting the silicon wafer into a graphite boat, positioning the graphite boat on the graphite boat through a graphite boat clamping point, then placing the graphite boat carrying the silicon wafer into vacuum coating equipment by a plasma enhanced chemical vapor deposition method, and coating the silicon wafer by adopting a plasma enhanced chemical vapor deposition method process. In order to fix the silicon wafer in the graphite boat, the graphite boat piece of the graphite boat is provided with a clamping point for fixing the silicon wafer, and the clamping point is abraded to a certain extent in the inserting and taking process of the silicon wafer, so that the clamping point needs to be replaced periodically, the good state of the graphite boat is ensured, and the film coating quality of the silicon wafer is further ensured.
If the application number is: CN201811068745.6 patent, discloses an automatic graphite boat stuck point replacing machine mold, because the mold of the automatic graphite boat stuck point replacing machine comprises the upper mold component, the middle mold component and the lower mold component, when in use, the graphite boat of which the stuck point is to be replaced is placed in the graphite boat carrying platform on the middle mold component, the upper mold component unloads the old stuck point by utilizing the upper mold unloading point column arranged on the upper mold component, the automatic positioning device has the advantages that the automation degree is high, the operation is simple and convenient, the working efficiency is high, the replacement quality is high, the clamping points cannot be damaged, the product percent of pass is improved, the labor intensity of operators is relieved, the working space and the working environment are improved, and the application prospect is wide.
The conventional graphite boat stuck point replacement operation method comprises the following steps: the graphite boat clamping points need to use a simple manual press, an operator sits in front of a press surface and places graphite boat sheets on a platform of the manual press, then 24 clamping points of the graphite boat are sequentially unloaded by the manual press, the operator places the clamping points to be replaced with new clamping points on corresponding clamping holes after the graphite boat clamping points are unloaded, a left hand of a small wing holds a right hand to rotate the press downwards, the hand needs to hold the pressing force, if the used force is too large, the graphite boat and the clamping points are crushed, if the used force is too small, the pressing is not in place, after the clamping points of one graphite boat sheet are pressed, the next graphite boat clamping points are continuously replaced, one graphite boat consists of 27 graphite boats, usually, a plurality of graphite boat clamping points need to be replaced in one day, the operation of the operator is complicated, the production progress is slow because the graphite boat clamping points are not replaced in time, generally, the situation that the graphite boat sheets are damaged due to progress or the clamping points are not pressed in place is very many, causing damage or falling off in the process of manufacturing the silicon chip and influencing the product quality.
Therefore, in view of the above, research and improvement are made for the existing structure and defects, and a tool for replacing the stuck point of the quincunx graphite boat piece is provided, so as to achieve the purpose of higher practical value.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a plum blossom graphite boat piece stuck point is more changed and is used frock to the difficult problem of mastering of dynamics when solving current graphite boat stuck point change complex in technology trouble, control press installation stuck point.
The utility model discloses plum blossom graphite boat piece stuck point is changed and is used purpose and efficiency of frock, is reached by following concrete technological means:
a tool for replacing clamping points of a quincunx graphite boat piece comprises a boat piece placing support, a boat piece pushing plate, a transmission cylinder, a connecting frame, a tension spring, a fixed shell, a power rod, clamping point aligning strips, a control rotary disc and a base plate; the boat sheet pushing plate is inserted into the slot in the boat sheet placing support in an interference manner; the transmission cylinder is movably connected in the round hole in the middle of the boat sheet placing support; the cross rod at the bottom end of the connecting frame is fixedly connected to the middle part of the bottom surface of the boat sheet placing support; the middle part of the connecting frame is provided with a transmission device, and the transmission device consists of a transmission gear, a driving gear and an anti-skid pin rod; the transmission gear is movably connected to one side of the transmission device through a pin rod; the driving gear is movably connected below the transmission gear in the transmission device through an anti-skid pin rod, and the transmission gear is meshed with the gear teeth of the driving gear; one end of the tension spring is fixedly connected to the bottom surface of the end part of the cross rod at the top of the connecting frame, and the other end of the tension spring is fixedly connected to the top of the vertical rod of the power rod; the fixed shell is screwed on the outer side of the transmission device in the middle of the connecting frame through screws; the power rod consists of a flat plate and a vertical rod, and the vertical rod is fixedly connected to the middle of the top surface of the flat plate; the clamping point alignment strip consists of a transverse adjusting strip, a point unloading device and a point loading device, and the point unloading device and the point loading device are inserted in a sliding groove of the transverse adjusting strip; the control turntable is inserted at one end of the anti-skid pin rod in an interference manner; the backing plate is placed in the groove in the middle of the boat sheet placing support.
Furthermore, gear teeth are arranged on the side face of the vertical rod of the power rod and meshed with the gear teeth of the transmission gear, and the gear ratio of the transmission gear to the driving gear is 3: 1.
Furthermore, the point unloading device is in a conical shape with a thick upper part and a thin lower part, and the point loading device is in a circular table shape with a thin upper part and a thick lower part.
Furthermore, a gear rack is arranged at the bottom of the boat sheet push plate, and gear teeth of the gear rack are meshed with gear teeth of a gear in the middle of the transmission cylinder.
Furthermore, the insertion parts of the anti-skid pin rod, the driving gear and the control turntable are designed to be square rods.
Furthermore, the middle part of the transverse adjusting strip of the clamping point aligning strip is provided with an inverted convex sliding groove, and the two sides of the flat plate of the power rod are provided with strip-shaped sliding grooves.
Furthermore, the base plate is made of extruded polystyrene foam.
Compared with the prior art, the utility model discloses following beneficial effect has:
firstly, the gear ratio of drive gear and driving gear is 3: 1, make operating personnel can be accurate control power lever push down length and pressure accomplish the loading and unloading operation of stuck point, extruded polystyrene foam is chooseed for use to the backing plate, this material is comparatively soft and has certain hardness, protected graphite boat piece when the operation process of stuck point loading and unloading and reduced the unexpected condition emergence of damaging of graphite boat piece, the accuracy nature of controlling and the protectiveness to graphite boat piece have been improved to the device, the difficult problem of mastering of dynamics of control press installation stuck point when solving current graphite boat stuck point and changing.
Secondly, the clamping point alignment strip of the device can simultaneously carry out loading and unloading operations of two groups of clamping points, the distance between each point loading device and each point unloading device can be controlled by the inverted convex grooves of the transverse adjusting strips according to the positions of the clamping points, the distance between the two groups of clamping points is adjusted by the strip-shaped sliding grooves of the flat plate to align the clamping point positions of the graphite boat sheets at the bottom, the two groups of clamping points can be simultaneously loaded and unloaded by controlling the vertical movement of the power rod by the control turntable, the inner graphite boat sheets can be continuously pushed to the right to the proper positions to continuously carry out the replacement of the residual clamping points after the replacement of the two groups of clamping points is finished by controlling the boat sheet push plate by the transmission cylinder, the operation mode is simple and convenient, and compared with the original mode that the single clamping point is replaced one by one, the working efficiency of the device is accelerated by six times compared with the working efficiency of the existing replacement mode, and the design solves the problem that the replacement, the working efficiency is improved.
Furthermore, the anti-slip pin rod, the driving gear and the control turntable are connected in a square shape, when the anti-slip pin rod is controlled by the control turntable to drive the driving gear to rotate, the driving gear cannot be damaged due to insufficient clamping point loading and unloading pressure or graphite boat pieces caused by slippage and idling, and the stability of the device is improved.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of the transmission device of the present invention.
Fig. 3 is a schematic structural view of the power rod and the locking point alignment strip of the present invention.
Fig. 4 is a schematic structural view of the boat sheet placing support of the present invention.
Fig. 5 is a schematic structural view of the driving cylinder and the anti-slip pin rod of the present invention.
Fig. 6 is an enlarged schematic structural view of a portion a of the present invention.
Fig. 7 is an enlarged schematic structural diagram of the part B of the present invention.
In the drawings, the corresponding relationship between the component names and the reference numbers is as follows:
1. the boat sheet placing support; 2. a boat sheet pushing plate; 3. a transmission cylinder; 4. a connecting frame; 5. a tension spring; 6. fixing the housing; 7. a power rod; 8. the clamping points are aligned with the strips; 9. a control dial; 10. a base plate; 401. a transmission gear; 402. a driving gear; 403. an anti-skid pin; 701. a flat plate; 702. a vertical rod; 801. a lateral adjustment bar; 802. a point unloading device; 803. installing a point device;
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example (b):
as shown in figures 1 to 7:
the utility model provides a plum blossom graphite boat piece stuck point replacement tool, which comprises a boat piece placing support 1, a boat piece push plate 2, a transmission cylinder 3, a connecting frame 4, a tension spring 5, a fixed shell 6, a power rod 7, a stuck point alignment strip 8, a control turntable 9 and a backing plate 10; the boat sheet pushing plate 2 is inserted into the slot in the boat sheet placing support 1 in an interference manner; the transmission cylinder 3 is movably connected in a circular hole in the middle of the boat sheet placing support 1; the cross rod at the bottom end of the connecting frame 4 is fixedly connected to the middle part of the bottom surface of the boat sheet placing support 1; the middle part of the connecting frame 4 is provided with a transmission device, and the transmission device consists of a transmission gear 401, a driving gear 402 and an anti-skid pin 403; the transmission gear 401 is movably connected to one side of the transmission device through a pin rod; the driving gear 402 is movably connected below the transmission gear 401 in the transmission device through an anti-skid pin 403, and gear teeth of the transmission gear 401 and the driving gear 402 are meshed with each other; one end of the tension spring 5 is fixedly connected to the bottom surface of the end part of the cross rod at the top of the connecting frame 4, and the other end of the tension spring 5 is fixedly connected to the top of the vertical rod 702 of the power rod 7; the fixed shell 6 is screwed on the outer side of the transmission device in the middle of the connecting frame 4; the power rod 7 consists of a flat plate 701 and a vertical rod 702, and the vertical rod 702 is fixedly connected to the middle of the top surface of the flat plate 701; the clamping point alignment strip 8 consists of a transverse adjusting strip 801, a point unloading device 802 and a point loading device 803, and the point unloading device 802 and the point loading device 803 are inserted into a sliding groove of the transverse adjusting strip 801; the control turntable 9 is inserted into one end of the anti-skid pin rod 403 in an interference manner; the backing plate 10 is placed in a groove in the middle of the boat sheet placing support 1.
The lateral surface of the vertical rod 702 of the power rod 7 is provided with gear teeth, the gear teeth are meshed with the gear teeth of the transmission gear 401, the gear ratio of the transmission gear 401 to the driving gear 402 is 3: 1, as shown in fig. 6, an operator can accurately control the pressing length and pressure of the power rod 7 to complete the assembling and disassembling operation of the clamping point, and the controllability of the device is improved.
The point unloading device 802 is in a conical shape with a thick upper part and a thin lower part, and the point installing device 803 is in a circular truncated cone shape with a thin upper part and a thick lower part, as shown in the attached drawing 3, the design enables the point unloading device 802 to be capable of dismantling clamping points in different apertures, the point installing device 803 can extrude and fix the clamping points with different apertures without damaging graphite boat sheets, and the adaptability of the device is improved.
Wherein, the bottom of boat piece push pedal 2 is equipped with the rack and pinion, and the teeth of a cogwheel of rack and pinion and the mutual interlock of the teeth of a cogwheel of the gear of transmission cylinder 3 middle part, as shown in figure 7, after a set of stuck point loading and unloading is accomplished, only need to rotate transmission cylinder 3 can control boat piece push pedal 2 and continue to push in the graphite boat piece and reach appointed loading and unloading position, avoided artificial transport, improved the convenience that uses the device to remove graphite boat piece.
The insertion part of the anti-skid pin 403, the driving gear 402 and the control dial 9 is designed as a square rod, as shown in fig. 5, the driving gear 402 is not slipped and idled due to the design, and the stability of the device is improved.
Wherein, the horizontal regulation strip 801 middle part that the strip 8 was adjusted to the stuck point is equipped with "protruding" shape spout of falling, the both sides of the flat board 701 of power pole 7 are equipped with the bar spout, as shown in fig. 3, horizontal regulation strip 801, unload some ware 802 and dress point ware 803 accessible select suitable fixed position to satisfy the dismantlement installation to the stuck point of different intervals, have improved the practicality of the device.
Wherein, the backing plate 10 chooses for use extruded polystyrene foam, and this material has certain hardness, and the stuck point of dismantlement can imbed the inside backing plate 10 and can not collapse and take off, and backing plate 10 has also played the supporting role to the inside graphite boat piece of boat piece push pedal 2, has protected graphite boat piece can not damage.
The specific use mode and function of the embodiment are as follows:
in the utility model, the graphite boat piece is placed at one side of the boat piece push plate 2 and is positioned at the upper part of the boat piece placing support 1, the fixed positions of the point unloading device 802, the point loading device 803 and the horizontal adjusting bar 801 are adjusted according to the position of the clamping point of the graphite boat piece, the fixed positions of the horizontal adjusting bar 801 and the strip-shaped chute of the flat plate 701 are adjusted according to the distance between the two clamping point groups, after the alignment is completed, the transmission cylinder 3 is rotated to ensure that the boat piece push plate 2 pushes the graphite boat piece to move to the lower part of the power rod 7 and align the clamping point, the rotary control dial 9 is rotated, under the combined action of the antiskid pin rod 403, the driving gear 402 and the transmission gear 401, the vertical rod 702 drives the flat plate 701 to move downwards, the point unloading device 802 below removes the clamping point below, after the removal is completed, the vertical rod 702 resets under the action of the tension spring 5, the transmission cylinder 3 is rotated again to ensure that the graphite piece moves inwards to the lower part of the, at this time, the lower part of the point assembling device 803 corresponds to the disassembled point clamping hole, a new clamping point is placed on the clamping point hole, the control rotary disc 9 is rotated, the point disassembling device 802 on the left side disassembles the lower clamping point, the point assembling device 803 on the right side installs the new clamping point on the lower side, the vertical rod 702 resets under the action of the tension spring 5 after the operation is completed, and the clamping point can be disassembled and replaced for the whole graphite boat piece by repeating the steps.
The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
Claims (7)
1. The utility model provides a plum blossom graphite boat piece stuck point is changed and is used frock which characterized in that: the tool for replacing the stuck point of the plum graphite boat piece comprises a boat piece placing support (1), a boat piece pushing plate (2), a transmission cylinder (3), a connecting frame (4), a tension spring (5), a fixed shell (6), a power rod (7), a stuck point aligning strip (8), a control turntable (9) and a base plate (10); the boat sheet pushing plate (2) is inserted into a slot in the boat sheet placing support (1) in an interference manner; the transmission cylinder (3) is movably connected in a circular hole in the middle of the boat sheet placing support (1); the cross rod at the bottom end of the connecting frame (4) is fixedly connected to the middle part of the bottom surface of the boat sheet placing support (1); the middle part of the connecting frame (4) is provided with a transmission device, and the transmission device consists of a transmission gear (401), a driving gear (402) and an anti-skid pin rod (403); the transmission gear (401) is movably connected to one side of the transmission device through a pin rod; the driving gear (402) is movably connected below the transmission gear (401) in the transmission device through an anti-skid pin rod (403), and gear teeth of the transmission gear (401) and the driving gear (402) are meshed with each other; one end of the tension spring (5) is fixedly connected to the bottom surface of the end part of the cross rod at the top of the connecting frame (4), and the other end of the tension spring (5) is fixedly connected to the top of the vertical rod (702) of the power rod (7); the fixed shell (6) is screwed on the outer side of the transmission device in the middle of the connecting frame (4) through screws; the power rod (7) consists of a flat plate (701) and a vertical rod (702), and the vertical rod (702) is fixedly connected to the middle of the top surface of the flat plate (701); the clamping point alignment strip (8) consists of a transverse adjusting strip (801), a point unloading device (802) and a point loading device (803), and the point unloading device (802) and the point loading device (803) are inserted into a sliding groove of the transverse adjusting strip (801); the control turntable (9) is inserted at one end of the anti-skid pin rod (403) in an interference manner; the backing plate (10) is placed in a groove in the middle of the boat sheet placing support (1).
2. The tool for replacing the stuck point of the quincunx graphite boat piece as claimed in claim 1, wherein: gear teeth are arranged on the side face of the vertical rod (702) of the power rod (7), the gear teeth are meshed with the gear teeth of the transmission gear (401), and the gear ratio of the transmission gear (401) to the driving gear (402) is 3: 1.
3. The tool for replacing the stuck point of the quincunx graphite boat piece as claimed in claim 1, wherein: the point unloading device (802) is in a conical shape with a thick upper part and a thin lower part, and the point loading device (803) is in a circular table shape with a thin upper part and a thick lower part.
4. The tool for replacing the stuck point of the quincunx graphite boat piece as claimed in claim 1, wherein: the bottom of the boat sheet push plate (2) is provided with a gear rack, and the gear teeth of the gear rack are meshed with the gear teeth of the gear in the middle of the transmission cylinder (3).
5. The tool for replacing the stuck point of the quincunx graphite boat piece as claimed in claim 1, wherein: the insertion parts of the anti-skid pin rod (403), the driving gear (402) and the control turntable (9) are designed to be square rods.
6. The tool for replacing the stuck point of the quincunx graphite boat piece as claimed in claim 1, wherein: the middle of a transverse adjusting strip (801) of the clamping point aligning strip (8) is provided with an inverted convex sliding groove, and the two sides of a flat plate (701) of the power rod (7) are provided with strip-shaped sliding grooves.
7. The tool for replacing the stuck point of the quincunx graphite boat piece as claimed in claim 1, wherein: the backing plate (10) is made of extruded polystyrene foam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920720671.3U CN209923427U (en) | 2019-05-20 | 2019-05-20 | Tool for replacing clamping point of plum-blossom graphite boat piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920720671.3U CN209923427U (en) | 2019-05-20 | 2019-05-20 | Tool for replacing clamping point of plum-blossom graphite boat piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209923427U true CN209923427U (en) | 2020-01-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920720671.3U Expired - Fee Related CN209923427U (en) | 2019-05-20 | 2019-05-20 | Tool for replacing clamping point of plum-blossom graphite boat piece |
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| Country | Link |
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| CN (1) | CN209923427U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113061874A (en) * | 2021-03-16 | 2021-07-02 | 湖南华鑫晶造电气科技有限公司 | Automatic loading and unloading device for graphite boat stuck points |
-
2019
- 2019-05-20 CN CN201920720671.3U patent/CN209923427U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113061874A (en) * | 2021-03-16 | 2021-07-02 | 湖南华鑫晶造电气科技有限公司 | Automatic loading and unloading device for graphite boat stuck points |
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