CN208483806U - A kind of high-accuracy alignment device of view-based access control model system - Google Patents
A kind of high-accuracy alignment device of view-based access control model system Download PDFInfo
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- CN208483806U CN208483806U CN201820993375.6U CN201820993375U CN208483806U CN 208483806 U CN208483806 U CN 208483806U CN 201820993375 U CN201820993375 U CN 201820993375U CN 208483806 U CN208483806 U CN 208483806U
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Abstract
The utility model relates to precision machinery and electronic technology technical fields, specifically disclose a kind of high-accuracy alignment device of view-based access control model system, including vibration-damped table, precision to bit platform and vision inspection apparatus；The precision includes moving platform, fixed platform and driving mechanism to bit platform；The moving platform is set to the top of fixed platform；Moving platform is parallel to each other with fixed platform；Guiding mechanism is provided between the fixed platform and moving platform；The vision inspection apparatus includes industrial camera, light source and camera support；The bottom of the camera support is installed in vibration-damped table, and top is equipped with industrial camera and light source.The utility model is assisted by vision system, closed-loop control is to bit platform, avoid as there is certain part size mismachining tolerance, mechanism rigging error, movement clearance error and controller driving error in platform and caused by contraposition it is accurate low, it is ensured that contraposition pose practical to bit platform is highly consistent with object pose.
Description
Technical field
The utility model relates to precision machinery and electronic technology fields, and in particular to a kind of view-based access control model system it is high-accuracy
Alignment device.
Background technique
Currently, being constantly progressive and develop with science and technology, robot technology becomes productivity and science and technology in industry
Horizontal standard, high-accuracy technique of counterpoint as having significant representative high sophisticated technology in current robotic technology field,
It is the key core technologies in the fields such as micromachine, Ultra-precision Turning, nanotechnology and semiconductor, is widely applied to LCD
Liquid crystal display, network printing equipment show mounting technology (SMT) and IC manufacturing etc., but among these it is most of also
It is manually to complete, the required accuracy is very high, so not only operating difficulties, but also efficiency is lower, is far from satisfying modern industry
Automation requires degree.
In order to improve product processing quality, accelerates contraposition efficiency, need a high-accuracy alignment device.Well known contraposition dress
It sets and mostly uses XY θ serial mechanism and UVW plane-parallel type to bit platform, XY θ serial mechanism is since own institutions limit, and there are errors
It is cumulative, and UVW aligning accuracy is then relatively high.But these assist most of bit platform without vision system, opened loop control pair
Bit platform, or contraposition degree is observed by eyes, can not accurately determine whether are contraposition pose practical to bit platform and object pose
Unanimously, actually since there are certain part size mismachining tolerance, mechanism rigging error, movement clearance error and controls for platform
Device drives error, this to be extremely difficult to object pose to bit platform, greatly limits the contraposition essence to bit platform
Degree.In addition, extraneous vibration facter also results in the position deviation to bit platform.
Utility model content
In view of this, it is necessary to for above-mentioned problem, propose a kind of high-accuracy alignment device of view-based access control model system, with
Solve the disadvantage in above-mentioned background technique.
To achieve the above object, the utility model takes technical solution below:
A kind of high-accuracy alignment device of view-based access control model system includes: vibration-damped table, accurate fills to bit platform and vision-based detection
It sets；The precision includes moving platform, fixed platform and driving mechanism to bit platform；The moving platform is set to the top of fixed platform；It is dynamic
Platform is parallel to each other with fixed platform；Guiding mechanism is provided between the fixed platform and moving platform；The vision inspection apparatus packet
Include industrial camera, light source and camera support；The bottom of the camera support is installed in vibration-damped table, the top installation of camera support
There are industrial camera and light source；
The guiding mechanism includes three sets of guidance sets；
The guidance set includes that first straight line motion guide element, second straight line motion guide element and rotary motion are led
To element, the guide direction of first straight line motion guide element and the guide direction of second straight line motion guide element are mutually hung down
Directly, and the fixing piece in first straight line motion guide element is connected with the movable part of second straight line motion guide element, and first
Movable part in linear movement guide element is connected by rotary motion director element with moving platform, and rotary motion director element can
Make moving platform relative to the axial line rotation of the movable part wraparound transhipment action-oriented element of first straight line motion guide element, revolution
The axial line of motion guide element is parallel with Z-direction, and the fixing piece of second straight line motion guide element is connected with fixed platform；
Wherein the rotary motion director element in a set of guidance set is connected with the geometric center of moving platform, and this is oriented to
The second straight line motion guide that first straight line motion guide element in component makees X to guiding, in this guidance set to moving platform
Element makees Y-direction guiding to moving platform, and driving mechanism has three sets, wherein a set of driving mechanism drives this second straight line motion guide member
The movable part of part is moved along Y-direction, and then moving platform is driven to move along Y-direction；
Rotary motion director element in other two sets of guidance sets is connected with moving platform respectively, and this two rotary motion
Symmetrical centre central symmetry of the director element about moving platform, the first straight line motion guide element pair in this two sets of guidance sets
Moving platform makees Y-direction guiding, and the second straight line motion guide element in this two sets of guidance sets makees X to guiding to moving platform, and
Other two sets of driving mechanisms respectively drive the movable part of a second straight line motion guide element along X to moving, and then drive dynamic flat
Platform is along X to moving；
The fixed platform and vision inspection apparatus are all installed in vibration-damped table, the vision-based detection part position of vision inspection apparatus
Above moving platform.
Further, the driving mechanism includes controller, servo motor and transmission mechanism；Controller is watched by control
Motor driven transmission mechanism is taken, so that accurate do to bit platform along the direction X, Y, θ be made to move accordingly.
Further, the vision inspection apparatus further includes scaling board；Scaling board is set on moving platform.
Further, the guiding mechanism further includes having two sets of guidance sets, the rotary motion in this two sets of guidance sets
Director element is connected with moving platform respectively, and symmetrical centre center pair of this two rotary motions director element about moving platform
Claim, the first straight line motion guide element in this two sets of guidance sets makees Y-direction guiding to moving platform, in this two sets of guidance sets
Second straight line motion guide element makees X to guiding to moving platform.
Further, the first straight line motion guide element and second straight line motion guide element are rolling linear guide
The movable part of pair, first straight line motion guide element and second straight line motion guide element is the cunning in linear rolling guide
The fixing piece of block, first straight line motion guide element and second straight line motion guide element is leading in linear rolling guide
Rail, rotary motion director element are to intersect ball collar, and the outer ring for intersecting ball collar is connected with moving platform, intersects ball collar
Inner ring be connected with the movable part of first straight line motion guide element.
Further, the transmission mechanism includes ball wire bar pair, connecting plate and two bearing blocks；
Lead screw both ends in the ball wire bar pair, which are respectively rotated with a bearing block, to be connected；
The servo motor is connect by shaft coupling with lead screw；
One end of the connecting plate is connected with the nut in ball wire bar pair, the other end and first straight line motion guide element
Sliding block be connected, servo motor drives lead screw rotation, and then moves along a straight line on guide rail with movable slider.
Further, multiple location holes are opened up on the fixed platform, vibration-damped table is equipped with corresponding number of with location hole
Positioning pin, and positioning pin is inserted in corresponding positioning hole.
Further, the camera support includes two camera vertical support frame components and camera crossbeam；The camera crossbeam
Both ends be respectively arranged in the tops of two camera vertical support frame components；The bottom of two camera vertical support frame components is fixedly mounted
In in vibration-damped table and being located at the accurate two sides to bit platform.
Further, the camera support further includes manual slide unit, link block and phase machine clamp；The phase machine clamp passes through
Link block is installed on a side of manual slide unit, and the other side of manual slide unit is installed on camera crossbeam；The phase machine clamp
For mounting industrial camera and keep industrial camera perpendicular with moving platform；Manual slide unit is used to adjust the space bit of industrial camera
It sets.
Further, the camera vertical support frame component includes camera support vertical section bars and camera support pedestal；It is described
Camera support vertical section bars are installed on camera support pedestal, and camera support pedestal is fixedly installed in vibration-damped table.
The utility model has the following beneficial effects:
The utility model is assisted by vision system, and closed-loop control avoids since there are certain zero for platform bit platform
Part dimensioned error, mechanism rigging error, movement clearance error and controller driving error and caused by contraposition it is accurate low
The case where, it is ensured that contraposition pose practical to bit platform is that height is consistent with object pose.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of the utility model；
Fig. 2 is the accurate stereoscopic schematic diagram to bit platform of the utility model；
Fig. 3 is the stereoscopic schematic diagram of the vision inspection apparatus of the utility model；
Fig. 4 is the accurate structural schematic diagram to bit platform of the utility model；
Fig. 5 is the structural schematic diagram of the guidance set of the utility model；
Description of symbols:
10, vibration-damped table；20, precision is to bit platform；30, vision inspection apparatus；2, moving platform；1, fixed platform；301, industrial
Camera；302, light source；303, camera support；3, guidance set；4, first straight line motion guide element；5, second straight line movement is led
To element；6, rotary motion director element；8, fixing piece；7, movable part；92, servo motor；93, transmission mechanism；310, it demarcates
Plate；931, ball wire bar pair；933, bearing block；3034, camera vertical support frame component；3035, camera crossbeam；3031, sliding manually
Platform；3032, link block；3033, phase machine clamp；30211, camera support vertical section bars；30212, camera support pedestal.
Specific embodiment
To keep the purpose of this utility model, technical solution and advantage clearer, implement below in conjunction with the utility model
Example further clearly and completely describes the technical solution of the utility model work.It should be noted that described embodiment
Only the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, ability
It is practical new to belong to this for domain those of ordinary skill every other embodiment obtained without making creative work
The range of type protection.
It is to be appreciated that the orientation or positional relationship of the instructions such as term " on ", "lower", "front", "rear", "left", "right"
To be based on the orientation or positional relationship shown in the drawings, it is merely for convenience of describing the present invention and simplifying the description, without referring to
Show or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot manage
Solution is limitations of the present invention.
The terms such as " first ", " second ", " third ", " the 4th " are used for description purposes only, and should not be understood as instruction or dark
Show relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second ", " are defined as a result,
Three ", " the 4th " feature can explicitly or implicitly include one or more of the features.
Embodiment
As shown in figure 1, figure 2, figure 3, figure 4 and figure 5, a kind of high-accuracy alignment device of view-based access control model system includes: vibration-damped table
10, precision is to bit platform 20 and vision inspection apparatus 30；The precision includes moving platform 2, fixed platform 1 and driving to bit platform 20
Mechanism；The moving platform 2 is set to the top of fixed platform 1；Moving platform 2 is parallel to each other with fixed platform 1；The fixed platform 1 is put down with dynamic
Guiding mechanism is provided between platform 2；The vision inspection apparatus 30 includes industrial camera 301, light source 302 and camera support 303；
The bottom of the camera support 303 is installed in vibration-damped table 10, and the top of camera support 303 is equipped with industrial camera 301 and light
Source 302；
The guiding mechanism includes three sets of guidance sets 3；
The guidance set 3 includes first straight line motion guide element 4, second straight line motion guide element 5 and revolution fortune
Action-oriented element 6, the guide direction of first straight line motion guide element 4 and the guide direction of second straight line motion guide element 5
It is mutually perpendicular to, and the movable part 7 of the fixing piece 8 in first straight line motion guide element 4 and second straight line motion guide element 5
It is connected, the movable part 7 in first straight line motion guide element 4 is connected by rotary motion director element 6 with moving platform 2, is turned round
Motion guide element 6 can make movable part 7 wraparound transhipment action-oriented member of the moving platform 2 relative to first straight line motion guide element 4
The axial line of part 6 rotates, and the axial line of rotary motion director element 6 is parallel with Z-direction, and second straight line motion guide element 5 is consolidated
Determine part 8 to be connected with fixed platform 1；
Wherein the rotary motion director element 6 in a set of guidance set 3 is connected with the geometric center of moving platform 2, and this
The second straight line that first straight line motion guide element 4 in guidance set 3 makees X to guiding, in this guidance set 3 to moving platform 2
Motion guide element 5 makees Y-direction guiding to moving platform 2, and driving mechanism has three sets, wherein a set of driving mechanism drives this second straight line
The movable part 7 of motion guide element 5 is moved along Y-direction, and then moving platform 2 is driven to move along Y-direction；
Rotary motion director element 6 in other two sets of guidance sets 3 is connected with moving platform 2 respectively, and this two revolution
Symmetrical centre central symmetry of the motion guide element 6 about moving platform 2, the first straight line movement in this two sets of guidance sets 3 are led
Y-direction guiding is made to moving platform 2 to element 4, the second straight line motion guide element 5 in this two sets of guidance sets 3 makees moving platform 2
X is to guiding, and other two sets of driving mechanisms respectively drive the movable part 7 of a second straight line motion guide element 5 along X to shifting
It is dynamic, and then drive moving platform 2 along X to moving；
The fixed platform 1 and vision inspection apparatus 30 are all installed in vibration-damped table 10, the vision inspection of vision inspection apparatus 30
It surveys part and is located at 2 top of moving platform；
The driving mechanism includes controller, servo motor 92 and transmission mechanism 93；Controller passes through control servo electricity
92 drive transmission device 93 of machine, so that accurate do to bit platform 20 along the direction X, Y, θ be made to move accordingly；
The vision inspection apparatus 30 further includes scaling board 310；Scaling board 310 is set on moving platform 2；
The guiding mechanism further includes having two sets of guidance sets 3, the rotary motion director element in this two sets of guidance sets 3
6 are connected with moving platform 2 respectively, and this symmetrical centre central symmetry of two rotary motions director element 6 about moving platform 2, this
First straight line motion guide element 4 in two sets of guidance sets 3 makees Y-direction guiding to moving platform 2, in this two sets of guidance sets 3
Second straight line motion guide element 5 makees X to guiding to moving platform 2；
The first straight line motion guide element 4 and second straight line motion guide element 5 are linear rolling guide, first
The movable part 7 of linear movement guide element 4 and second straight line motion guide element 5 is the sliding block in linear rolling guide, the
The fixing piece 8 of one linear movement guide element 4 and second straight line motion guide element 5 is the guide rail in linear rolling guide,
Rotary motion director element 6 is to intersect ball collar, and the outer ring for intersecting ball collar is connected with moving platform 2, intersects ball collar
Inner ring be connected with the movable part 7 of first straight line motion guide element 4；
The transmission mechanism 93 includes ball wire bar pair 931, connecting plate and two bearing blocks 933；
Lead screw both ends in the ball wire bar pair 931, which are respectively rotated with a bearing block 933, to be connected；
The servo motor 92 is connect by shaft coupling with lead screw；
One end of the connecting plate is connected with the nut in ball wire bar pair 931, the other end and first straight line motion guide
The sliding block of element 4 is connected, and servo motor 92 drives lead screw rotation, and then moves along a straight line on guide rail with movable slider；
Open up multiple location holes on the fixed platform 1, vibration-damped table 10 be equipped with the corresponding number of positioning pin of location hole,
And positioning pin is inserted in corresponding positioning hole；
The camera support 303 includes two camera vertical support frame components 3034 and camera crossbeam 3035；Camera crossbeam
3035 both ends are respectively arranged in the top of two camera vertical support frame components 3034；Two camera vertical support frame components 3034
Bottom is fixedly installed in vibration-damped table 10 and is located at the accurate two sides to bit platform 20；
The camera support 303 further includes manual slide unit 3031, link block 3032 and phase machine clamp 3033；Phase machine clamp
3033 are installed on a side of manual slide unit 3031 by link block 3032, and the other side of manual slide unit 3031 is installed on camera
On crossbeam 3035；Phase machine clamp 3033 is for mounting industrial camera 301 and keeps industrial camera 301 and moving platform 2 perpendicular；Hand
Dynamic slide unit 3031 is used to adjust the spatial position of industrial camera 301；
The camera vertical support frame component 3034 includes camera support vertical section bars 30211 and camera support pedestal 30212；
Camera support vertical section bars 30211 are installed on camera support pedestal 30212, and camera support pedestal 30212, which is fixedly installed in, to be subtracted
It shakes on platform 10.
The vision inspection apparatus obtains the accurate actual motion pose to bit platform 20 by industrial camera 301, compares
Deviation between attained pose and object pose.
Specifically, industrial camera 301 is adjusted in the micro movement of small range of X and Y-direction, really in the manual slide unit 3031
Protecting industrial camera 301 has suitable visual field, and light source 302, which circularizes, to be fixed near the camera lens of industrial camera 301, increases dynamic flat
The acquisition quality and pose accuracy of 2 image of platform.
Specifically, the vibration-damped table 10 uses marble platform, can effectively reduce external environmental noise and exterior vibration pair
Precision is influenced caused by 20 aligning accuracy of bit platform.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field
For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to
In the protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of high-accuracy alignment device of view-based access control model system characterized by comprising vibration-damped table (10), accurate contraposition are flat
Platform (20) and vision inspection apparatus (30)；The precision includes moving platform (2), fixed platform (1) and driving machine to bit platform (20)
Structure；The moving platform (2) is set to the top of fixed platform (1)；Moving platform (2) is parallel to each other with fixed platform (1)；The fixed platform
(1) guiding mechanism is provided between moving platform (2)；The vision inspection apparatus (30) includes industrial camera (301), light source
(302) and camera support (303)；The bottom of the camera support (303) is installed on vibration-damped table (10), camera support (303)
Top industrial camera (301) and light source (302) are installed；
The guiding mechanism includes three sets of guidance sets (3)；
The guidance set (3) includes first straight line motion guide element (4), second straight line motion guide element (5) and revolution
Motion guide element (6), guide direction and the second straight line motion guide element (5) of first straight line motion guide element (4)
Guide direction is mutually perpendicular to, and the fixing piece (8) in first straight line motion guide element (4) and second straight line motion guide member
The movable part (7) of part (5) is connected, and the movable part (7) in first straight line motion guide element (4) passes through rotary motion director element
(6) it is connected with moving platform (2), rotary motion director element (6) can make moving platform (2) relative to first straight line motion guide element
(4) movable part (7) wraparound transhipment action-oriented element (6) axial line rotation, the axial line of rotary motion director element (6) with
Z-direction is parallel, and the fixing piece (8) of second straight line motion guide element (5) is connected with fixed platform (1)；
Wherein the rotary motion director element (6) in a set of guidance set (3) is connected with the geometric center of moving platform (2), and
First straight line motion guide element (4) in this guidance set (3) makees X to guiding, in this guidance set (3) to moving platform (2)
Second straight line motion guide element (5) Y-direction guiding is made to moving platform (2), driving mechanism has three sets, wherein a set of driving mechanism
It drives the movable part (7) of this second straight line motion guide element (5) to move along Y-direction, and then moving platform (2) is driven to move along Y-direction；
Rotary motion director element (6) in other two sets of guidance sets (3) is connected with moving platform (2) respectively, and this twice
The symmetrical centre central symmetry of action-oriented element (6) about moving platform (2) is transported, first in this two sets of guidance sets (3) is straight
Line motion guide element (4) makees Y-direction guiding to moving platform (2), the second straight line motion guide member in this two sets of guidance sets (3)
Part (5) makees X to guiding to moving platform (2), and other two sets of driving mechanisms respectively drive a second straight line motion guide element
(5) movable part (7) to moving, and then drives moving platform (2) along X to moving along X；
The fixed platform (1) and vision inspection apparatus (30) are all installed on vibration-damped table (10), the view of vision inspection apparatus (30)
Feel that detection part is located above moving platform (2).
2. the high-accuracy alignment device of view-based access control model system according to claim 1, which is characterized in that the driving mechanism
Including controller, servo motor (92) and transmission mechanism (93)；Controller drives driver by control servo motor (92)
Structure (93), so that accurate do to bit platform (20) along the direction X, Y, θ be made to move accordingly.
3. the high-accuracy alignment device of view-based access control model system according to claim 1, which is characterized in that the vision-based detection
Device (30) further includes scaling board (310)；Scaling board (310) is set on moving platform (2).
4. the high-accuracy alignment device of view-based access control model system according to claim 1, which is characterized in that the guiding mechanism
Further include having two sets of guidance sets (3), the rotary motion director element (6) in this two sets of guidance sets (3) respectively with moving platform
(2) it is connected, and this symmetrical centre central symmetry of two rotary motions director element (6) about moving platform (2), this two sets guiding
First straight line motion guide element (4) in component (3) makees Y-direction guiding to moving platform (2), in this two sets of guidance sets (3)
Second straight line motion guide element (5) makees X to guiding to moving platform (2).
5. the high-accuracy alignment device of view-based access control model system according to claim 1 or 4, which is characterized in that described first
Linear movement guide element (4) and second straight line motion guide element (5) are linear rolling guide, first straight line motion guide
The movable part (7) of element (4) and second straight line motion guide element (5) is the sliding block in linear rolling guide, first straight line
The fixing piece (8) of motion guide element (4) and second straight line motion guide element (5) is the guide rail in linear rolling guide,
Rotary motion director element (6) is to intersect ball collar, and the outer ring for intersecting ball collar is connected with moving platform (2), intersects ball
The inner ring of collar is connected with the movable part (7) of first straight line motion guide element (4).
6. the high-accuracy alignment device of view-based access control model system according to claim 2, which is characterized in that the transmission mechanism
It (93) include ball wire bar pair (931), connecting plate and two bearing blocks (933)；
Lead screw both ends in the ball wire bar pair (931), which are respectively rotated with a bearing block (933), to be connected；
The servo motor (92) is connect by shaft coupling with lead screw；
One end of the connecting plate is connected with the nut in ball wire bar pair (931), the other end and first straight line motion guide member
The sliding block of part (4) is connected, and servo motor (92) drives lead screw rotation, and then moves along a straight line on guide rail with movable slider.
7. the high-accuracy alignment device of view-based access control model system according to claim 1, which is characterized in that the fixed platform
(1) open up multiple location holes on, vibration-damped table (10) be equipped with the corresponding number of positioning pin of location hole, and positioning pin plugs
In corresponding positioning hole.
8. the high-accuracy alignment device of view-based access control model system according to claim 1, which is characterized in that the camera support
It (303) include two camera vertical support frame components (3034) and camera crossbeam (3035)；The both ends of the camera crossbeam (3035)
It is respectively arranged in the top of two camera vertical support frame components (3034)；The bottom of two camera vertical support frame components (3034) is solid
Dingan County is loaded on vibration-damped table (10) and is located at the accurate two sides to bit platform (20).
9. the high-accuracy alignment device of view-based access control model system according to claim 8, which is characterized in that the camera support
It (303) further include manual slide unit (3031), link block (3032) and phase machine clamp (3033)；The phase machine clamp (3033) passes through
Link block (3032) is installed on a side of manual slide unit (3031), and the other side of manual slide unit (3031) is installed on camera cross
On beam (3035)；Phase machine clamp (3033) is for mounting industrial camera (301) and keeps industrial camera (301) and moving platform (2)
It is perpendicular；Manual slide unit (3031) is used to adjust the spatial position of industrial camera (301).
10. the high-accuracy alignment device of view-based access control model system according to claim 8, which is characterized in that the camera hangs down
Straight bracket component (3034) includes camera support vertical section bars (30211) and camera support pedestal (30212)；The camera support
Vertical section bars (30211) are installed on camera support pedestal (30212), and camera support pedestal (30212) is fixedly installed in damping
On platform (10).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567375A (en) * | 2019-10-11 | 2019-12-13 | 哈尔滨理工大学 | Multi-workpiece parallel vision measurement precision sliding table |
| CN110645912A (en) * | 2019-10-11 | 2020-01-03 | 哈尔滨理工大学 | Machine vision panoramic measurement system and measurement method |
| CN111256743A (en) * | 2019-12-25 | 2020-06-09 | 苏州英诺威视图像有限公司 | XY platform calibration system |
-
2018
- 2018-06-26 CN CN201820993375.6U patent/CN208483806U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567375A (en) * | 2019-10-11 | 2019-12-13 | 哈尔滨理工大学 | Multi-workpiece parallel vision measurement precision sliding table |
| CN110645912A (en) * | 2019-10-11 | 2020-01-03 | 哈尔滨理工大学 | Machine vision panoramic measurement system and measurement method |
| CN111256743A (en) * | 2019-12-25 | 2020-06-09 | 苏州英诺威视图像有限公司 | XY platform calibration system |
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