CN207409466U - A kind of graphite boat piece and graphite boat - Google Patents
A kind of graphite boat piece and graphite boat Download PDFInfo
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- CN207409466U CN207409466U CN201721332043.5U CN201721332043U CN207409466U CN 207409466 U CN207409466 U CN 207409466U CN 201721332043 U CN201721332043 U CN 201721332043U CN 207409466 U CN207409466 U CN 207409466U
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- boat piece
- graphite boat
- silicon chip
- graphite
- adsorption hole
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Abstract
The utility model discloses a kind of graphite boat piece and graphite boats, the graphite boat piece includes boat piece body, multiple silicon chip carrying positions are provided on the boat piece body, on boat piece body stuck point is provided on the outside of silicon chip carrying position, adsorption hole is provided on the silicon chip carrying position, the aperture of the adsorption hole is 1.8 2.2mm.The utility model solves the problems, such as that adhesive force is larger between existing graphite boat both sides silicon chip and boat piece by the way that the aperture of adsorption hole is arranged to 1.8 2.2mm.
Description
Technical field
The utility model is related to technical field of solar cell manufacturing, and in particular to a kind of graphite boat piece and graphite boat.
Background technology
Graphite boat is for a kind of silicon chip film-coated device for providing carrier.Existing graphite boat includes multiple graphite boat pieces, often
A graphite boat piece is equipped with multiple carrying positions, and carrying position coordinates with silicon chip size, is used to support silicon chip.
In silicon chip film-coated process, when the automation of silicon chip automatic loading and unloading takes piece, adhesive force between graphite boat both sides silicon chip and boat piece
It is larger, take during piece often occur taking not occur as.
Utility model content
The purpose of this utility model is to provide a kind of graphite boat pieces, solve to paste between existing graphite boat both sides silicon chip and boat piece
The problem of larger with joint efforts.
In addition, originally it is that utility model also provides a kind of graphite boat made of above-mentioned graphite boat piece.
The utility model is achieved through the following technical solutions：
A kind of graphite boat piece including boat piece body, is provided with multiple silicon chip carrying positions, boat piece body on the boat piece body
On be provided with stuck point on the outside of silicon chip carrying position, be provided with adsorption hole, the aperture of the adsorption hole on the silicon chip carrying position
For 1.8-2.2mm.
In the prior art, adsorption hole side size is 1mm, and under vacuo, smaller aperture can generate larger adsorption capacity,
Cause between graphite boat both sides silicon chip and boat piece that adhesive force is larger, take during piece often occur taking not occur as.
Applicant is improved the aperture of adsorption hole, does not have from the aperture of 1-2.5mm from above-mentioned technical problem is solved
Interval 0.2mm is tested, and finally found that, the aperture of adsorption hole is arranged to 1.8-2.2mm, be not in often to go out when taking piece
Now take do not occur as, while can avoid the problem that aperture it is excessive caused by absorption it is unstable.
The utility model is improved by the aperture to adsorption hole, and the aperture of adsorption hole is arranged to 1.8-2.2mm, solution
Determined the problem of adhesive force is larger between existing graphite boat both sides silicon chip and boat piece, often occur taking not when taking piece occur as.
Further, the aperture of adsorption hole is 2.0mm.
Applicant is found by experiment that, the aperture of adsorption hole is arranged to 2.0mm, best results.
Further, 3 adsorption holes are provided on silicon chip carrying position.
Further, 3 adsorption holes are arranged in up-side down triangle.
Above-mentioned setting has good absorption stability.
Further, triangle is equilateral triangle.
Further, stuck point is provided with 3, and 3 stuck points are distributed in 3 different outsides of silicon chip carrying position.
Further, multiple grooves are provided on boat piece body, the silicon chip carrying position and stuck point are arranged in groove.
The setting of the groove can avoid boat piece body from shifting when in use, and silicon chip can be avoided to protrude from
Boat piece body is conducive to protect silicon chip.
Further, the consistency of thickness of the depth of groove and silicon chip.
A kind of graphite boat, including above-mentioned graphite boat piece.
Further, graphite boat includes multiple boat piece bodies, and the multiple boat piece body is arranged in parallel, the multiple boat piece
It is connected between body by ceramic tube.
The utility model compared with prior art, has the following advantages and advantages：
The utility model is improved by the aperture to adsorption hole, and the aperture of adsorption hole is arranged to 1.8-2.2mm, solution
Determined the problem of adhesive force is larger between existing graphite boat both sides silicon chip and boat piece, often occur taking not when taking piece occur as.
Description of the drawings
Attached drawing described herein is used for providing further understanding the utility model embodiment, forms the one of the application
Part does not form the restriction to the utility model embodiment.In the accompanying drawings：
Fig. 1 is the structure diagram of graphite boat piece；
Fig. 2 is the structure diagram of graphite boat.
Mark and corresponding parts title in attached drawing：
1- boat piece bodies, 2- silicon chips carrying position, 3- stuck points, 4- adsorption holes, 5- ceramic tubes.
Specific embodiment
For the purpose of this utility model, technical solution and advantage is more clearly understood, with reference to embodiment and attached drawing,
The utility model is described in further detail, and the exemplary embodiment and its explanation of the utility model are only used for explaining this
Utility model is not intended to limit the scope of the present invention.
Embodiment 1：
As shown in Figure 1, a kind of graphite boat piece, is provided with multiple silicon chips including boat piece body 1, on the boat piece body 1 and holds
Position 2 is carried, the outside for carrying position 2 on boat piece body 1 in silicon chip is provided with stuck point 3, and the stuck point 3 is provided with 3, and 3 stuck points 3 divide
Cloth is provided with adsorption hole 4, the silicon chip is carried on position 2 on the outside of 3 differences of silicon chip carrying position 2 on the silicon chip carrying position 2
It is provided with 3 adsorption holes, 4,3 adsorption holes 4 to arrange in up-side down triangle, the triangle is equilateral triangle, the adsorption hole 4
Aperture is 1.8mm.
Embodiment 2：
As shown in Figure 1, the present embodiment is based on embodiment 1, the aperture of the adsorption hole 4 is 2.2mm.
Embodiment 3：
As shown in Figure 1, the present embodiment is based on embodiment 1, the aperture of the adsorption hole 4 is 2.0mm.
Embodiment 4：
As shown in Figure 1, the present embodiment is provided with more based on any one of embodiment 1 to embodiment 3 on the boat piece body 1
A groove, the silicon chip carrying position 2 and stuck point 3 are arranged in groove, the depth of the groove and the consistency of thickness of silicon chip.
As shown in Figure 1 and Figure 2, a kind of graphite boat, it is described including embodiment 1 to any one of embodiment 4 graphite boat piece
Graphite boat includes multiple boat piece bodies 1, and the multiple boat piece body 1 is arranged in parallel, and passes through pottery between the multiple boat piece body 1
Porcelain tube 5 connects.
Above-described specific embodiment, the purpose of this utility model, technical solution and advantageous effect have been carried out into
One step is described in detail, it should be understood that the foregoing is merely specific embodiment of the present utility model, is not used to limit
Determine the scope of protection of the utility model, within the spirit and principle of the utility model, any modification for being made equally is replaced
It changes, improve, should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of graphite boat piece, which is characterized in that including boat piece body (1), multiple silicon chips are provided on the boat piece body (1)
It carries position (2), is provided with stuck point (3) on boat piece body (1) on the outside of silicon chip carrying position (2), the silicon chip is carried on position (2)
Adsorption hole (4) is provided with, the aperture of the adsorption hole (4) is 1.8-2.2mm.
2. a kind of graphite boat piece according to claim 1, which is characterized in that the aperture of the adsorption hole (4) is 2.0mm.
3. a kind of graphite boat piece according to claim 1, which is characterized in that be provided with 3 on silicon chip carrying position (2)
Adsorption hole (4).
4. a kind of graphite boat piece according to claim 3, which is characterized in that 3 adsorption holes (4) are arranged in up-side down triangle.
5. a kind of graphite boat piece according to claim 4, which is characterized in that the triangle is equilateral triangle.
6. a kind of graphite boat piece according to claim 1, which is characterized in that the stuck point (3) is provided with 3,3 stuck points
(3) 3 different outsides of silicon chip carrying position (2) are distributed in.
7. a kind of graphite boat piece according to claim 1, which is characterized in that be provided on the boat piece body (1) multiple
Groove, silicon chip carrying position (2) and stuck point (3) are arranged in groove.
8. a kind of graphite boat piece according to claim 7, which is characterized in that the depth of the groove and the thickness one of silicon chip
It causes.
9. a kind of graphite boat, which is characterized in that including any one of the claim 1-8 graphite boat pieces.
10. graphite boat according to claim 9, which is characterized in that the graphite boat includes multiple boat piece bodies (1), institute
It states multiple boat piece bodies (1) to be arranged in parallel, be connected between the multiple boat piece body (1) by ceramic tube (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721332043.5U CN207409466U (en) | 2017-10-16 | 2017-10-16 | A kind of graphite boat piece and graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721332043.5U CN207409466U (en) | 2017-10-16 | 2017-10-16 | A kind of graphite boat piece and graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207409466U true CN207409466U (en) | 2018-05-25 |
Family
ID=62319923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721332043.5U Active CN207409466U (en) | 2017-10-16 | 2017-10-16 | A kind of graphite boat piece and graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207409466U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110060951A (en) * | 2019-05-21 | 2019-07-26 | 常州时创能源科技有限公司 | One kind is silicon chip film-coated to use graphite boat |
-
2017
- 2017-10-16 CN CN201721332043.5U patent/CN207409466U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110060951A (en) * | 2019-05-21 | 2019-07-26 | 常州时创能源科技有限公司 | One kind is silicon chip film-coated to use graphite boat |
| CN110060951B (en) * | 2019-05-21 | 2024-02-13 | 常州时创能源股份有限公司 | Graphite boat for silicon wafer coating |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211011 Address after: 239300 Jingliu road and Weisan Road, Tianchang Economic Development Zone, Chuzhou City, Anhui Province Patentee after: ANHUI YING FA RUINENG TECHNOLOGY Co.,Ltd. Address before: 610000 Chengdu, Sichuan, China (Sichuan) free trade zone, 1 Print-Rite Road, Southwest Airport Economic Development Zone, Shuangliu District, Chengdu. Patentee before: SICHUAN YINGFA SOLAR ENERGY TECHNOLOGY Co.,Ltd. |