CN206910990U - A kind of vacuum cleaning equipment for monocrystal growing furnace - Google Patents
A kind of vacuum cleaning equipment for monocrystal growing furnace Download PDFInfo
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- CN206910990U CN206910990U CN201720120657.0U CN201720120657U CN206910990U CN 206910990 U CN206910990 U CN 206910990U CN 201720120657 U CN201720120657 U CN 201720120657U CN 206910990 U CN206910990 U CN 206910990U
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- deduster
- dust
- growing furnace
- tank body
- cloth bag
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
- B01D46/023—Pockets filters, i.e. multiple bag filters mounted on a common frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
- B01D46/04—Cleaning filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/44—Auxiliary equipment or operation thereof controlling filtration
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
Abstract
The utility model discloses a kind of vacuum cleaning equipment for monocrystal growing furnace, it is arranged between single crystal furnace vacuum pipeline and vavuum pump, caused volatile matter during crystal pulling can effectively be filtered, realize online ash removal, the pollution of vacuum oil is reduced, greatly extends the stream time of vavuum pump so as to extend single crystal growing furnace continuous operating time.Cleaner filter efficiency >=99.99% of the present utility model for monocrystal growing furnace, monocrystalline dust is carried out primary filter by anti-burning cooler, easy firing dust filtration efficiency can be reached more than 95%, maintain easily maintenance door, the maintenance cost at scene can be saved；And the impurity such as phosphorus, sulphur, charcoal, female in monocrystalline silicon gas can be effectively removed, so as to improve purity of monocrystalline silicon, oil sealing oil consumption is reduced, makes vacuum system not by dust and solid particle pollution and damage.
Description
Technical field
The utility model belongs to Environmental-protecting dust-removing technical field, and in particular to a kind of vacuum cleaning for monocrystal growing furnace is set
Standby, it is applied to the dedusting to monocrystal growing furnace caused single crystal growing furnace dust in process of production.
Background technology
In today of photovoltaic technology rapid development, the solar cell produced using silicon single crystal can be directly solar energy
Luminous energy is converted into, realizes the beginning for green energy resource revolution of marching toward.Monocrystal growing furnace is single crystal growth equipment, with photovoltaic skill
The rapid development of art, the industry have also obtained development at full speed, and single crystal growth requirement is carried out in vacuum and inert gas.Very
Empty device should ensure that in body of heater thermal vacuum degree up to more than 5 × 1024mm mercury column.If use inert gas as protective gas, stove
The upper and lower gas port being designed with into outlet of body.During growing single crystals, vacuumize and vacuum plant injection inert gas after all need to be equipped with
Dust arrester.The deduster integrated use centrifugal force, inertial collision, contact detention, Blang spread this several dust removal mechanism, will be single
The Sheng ash that crystalline flour dirt is collected into cleaner is indoor.
There is no deduster, only oil pump vaccum-pumping equipment, each vacuum in the production technology of monocrystalline silicon growing furnace at present
Oil pump can all cause 10% or so oil loss, while also need often to change oil sealing oil and ensure the quality of production.Such as taken out using dry pump
Vacuum equipment, vacuum dust will enter abrased gear in pump internal gear, the serious service life for reducing dry pump.Which results in
The decline of production efficiency and the raising of maintenance cost.People want to use a kind of single crystal growing furnace cleaner, deposited first in monocrystalline dust
In SiO2、AL2O3, simple substance P, MgO, Fe2O3Etc. inflammability dust, when equipment downtime overhauls, dust is easily caused to meet air fast
Fast oxidizing fire, secondly, for monocrystalline dust particle mean size at 5 μm or so, dust granules are relatively viscous, are easily sticked on cloth bag, therefore general
Logical bag-type dust equipment is extremely difficult to the dust removal requirement of monocrystal growing furnace.
To the requirement of monocrystal growing furnace deduster in industry：The dust circulation of deduster at normal atmospheric pressure is not less than
200L/S, cloth bag filter core dust removal and filtration efficiency >=99.99%, possesses on-line automatic deashing function, and single stove is effective in deashing process
Run time about >=400H vacuum system of single-crystal furnace no pressure fluctuation 13Torr ± 1, throttle valve opening is abnormal≤55%；Therefore it is real
The cleaner of stove is produced with a kind of new suitable monocrystalline, is the knotty problem of current domestic monocrystalline silicon production stove dedusting.
Utility model content
In order to solve the above problems, the utility model people passes through more secondary designs and research, it is proposed that one kind is used for monocrystalline and given birth to
The vacuum cleaning equipment of long stove, it belongs to domestic initiation, solves monocrystal growing furnace caused single crystal growing furnace powder in process of production
Destruction of the dirt to production equipments such as follow-up vavuum pumps, saves large number quipments maintenance cost.
According to technology contents of the present utility model, there is provided a kind of vacuum cleaning equipment for monocrystal growing furnace, it is installed
Between single crystal furnace vacuum pipeline and vavuum pump, caused volatile matter during crystal pulling can be effectively filtered, realizes online ash removal, dropped
The pollution of low vacuum oil, the stream time of vavuum pump is greatly extended so as to extend single crystal growing furnace continuous operating time.
The described vacuum cleaning equipment for monocrystal growing furnace includes deduster tank body, automatic ash removing device, deduster
Filter bag, anti-burning cooler, safeguard side enabling and control system；Deduster tank interior installs deduster filter cloth bag and oneself
Dynamic deashing device, and being capable of internally 2 pa condition of negative pressure long-time normal work；Deduster tank body tank base installs air inlet
Mouthful, top installation gas outlet, the dust that single crystal growing furnace discharges is filtered by deduster filter cloth bag, deduster filter cloth bag with it is automatic
Deashing device and connection, deduster filter cloth bag is shaken by switch board control successively, avoids running simultaneously and shadow is caused to furnace pressure
Ring, ensure that the normal growth of monocrystalline silicon.
Further, in the vacuum cleaning equipment for monocrystal growing furnace, 1, automatic ash removing device：For clearing up dedusting
The dust granules of device filter bag absorption, when magnet coil is powered, magnet coil produces electromagnetic force and deduster filter cloth bag is compressed,
Dust in deduster filter cloth bag is set to produce vibration；When the 2nd, powering off, electromagnetic force disappears, and spring handle iron-core coil retracts original position, shaken
Dynamic deduster filter cloth bag is stretched, and dust generation in deduster filter cloth bag is vibrated again；3rd, deduster filter bag：For mistake
Filter the dust of single crystal growing furnace discharge, PTFE overlay film deduster filter cloth bags, filter efficiency >=99.99%；4th, anti-burning cooler：Energy
Inflammability dust in enough collection conduits, prevents inflammability dust from entering in dedusting tank, prevents filter bag from burning, anti-burning cooler is adopted
Cooled down with labyrinth type dust, adsorb easy firing dust, prevent easy firing dust from entering in dedusting tank, easy firing dust filtration efficiency
Reach more than 95%；5th, side opening structure：Deduster filter cloth bag is changed for scene and deduster filter cloth bag checks deashing
Safeguard, maintain easily maintenance door；6th, control system：For controlling the normal operation of dust pelletizing system, to main frame magnet coil and certainly
Dynamic relief valve is controlled.
Preferably, it is cylinder type for the deduster tank body 1-1 in the vacuum cleaning equipment of monocrystal growing furnace, in tank
Body 1-1 bottom surface 1-7 is provided with four square lower margin 1-6, is to contain grey room 3-1 above the 1-7 of bottom surface, contains grey room 3-1 by deduster
Interior all dust collections are come in；Contain grey room 3-1 side walls and be provided with air inlet 1-2, air inlet 1-2 connection sizes and monocrystalline vacuum drying oven
Tube outlet is engaged, blending bolt 1-8 connections, and portion cleaning door 1-3, cleaning door 1-3 are set in another side wall for containing grey room 3-1
Side is attached with folding 1-9, is more convenient equipment deashing, and cleaning door 1-3 surroundings are with wing nut 1-10 tight, cleaning door
1 first in command 1-11 of welding on the left of 1-3, facilitates deashing, and cleaning door 1-3 and air inlet 1-2 and cleaning door 1-3 presss from both sides into 90 degree
Angle is designed, and it is to be used to install deduster mistake to have a card 3-2, card 3-2 between tank body 1-1 bottom and the grey room 3-1 of Sheng
Tank body 1-1 is divided into top filter chamber 3-3 and bottom Sheng Hui rooms 3-1, card 3-2 by the connector of filter cloth bag, card 3-2
Upper end is connected with deduster filter bag 3-4 lower ends, and gas outlet 1-4, gas outlet 1-4 positions are provided with the top of housing in air inlet
1-2 oblique upper, make air inlet more unobstructed with outlet, gas outlet 1-4 sizes are engaged with vacuum pump pipeline connection size, and use spiral shell
Bolt 1-8 connections, tank body 1-1 sides welding J-type hanger 1-15 facilitate equipment conveying and dismounting, flange 1- are provided with above tank body 1-1
Bolt 1-13 connections are used between 14 and upper lid 1-12, flange 1-14 and upper lid 1-12, pressure gauge 3-5 is provided with above upper lid 1-12,
Automatic decompression valve 3-6 etc., which is provided with, for real-time monitoring of tank body internal pressure, beside pressure gauge 3-5 ensures that equipment operates steadily, if
Standby overall operation is controlled by control system 1-5, has lacing wire 2-2 and lifting bolt 2-3 above upper lid 1-12.
Preferably, shaken for the automatic ash removing device inner chamber in the vacuum cleaning equipment of monocrystal growing furnace provided with plurality of electromagnetic
Dynamic device, electromagnetic vibrator inside principle use magnet coil 4-1 structures, produce suction principle by break-make coil, make coil iron
Core 4-4 can be a spring 4-3 that can be movable above coil internal activity, iron core 4-4, and iron core 4-4 bottoms connect one
Fixed with bolt 4-6 below root push rod 4-5, push rod 4-5, sealed above magnet coil 4-1 with end cap 4-7, end cap 4-7 surroundings are used
Tight, magnet coil 4-1 uses vacuum epoxy perfusion technique by bolt 4-8, coil insulation is reached H levels, pressure-resistant more than 2000V,
Coil is set to reach same vibration cleaning effect in 100 DEG C of working environments of operating temperature；When magnet coil 4-1 is not powered, set
Iron core can be removed hub of a spool position by the spring 4-3 on iron core 4-4, when magnet coil 4-1 will be powered, magnet coil production
Raw electromagnetic force spring 4-3 compressions, make iron core playback, being so connected to the push rod of iron core 4-4 bottoms will move down, bottom
Deduster filter cloth bag 3-4 is compressed, and during power-off, electromagnetic force is disappeared, and iron-core coil is retracted original position, vibrating dust remover by spring 4-3
Filter cloth bag is stretched, and dust in deduster filter cloth bag is produced vibration, is so made magnet coil cycled on and power off, back and forth
Motion, makes electromagnetism push rod perseveration, realizes the automatic ash removing function of deduster filter cloth bag.
Preferably, it is used to filter monocrystalline fire grate for the deduster filter cloth bag in the vacuum cleaning equipment of monocrystal growing furnace
The dust gone out, deduster filter bag 3-4 use PTFE covering materials, and PTFE is polytetrafluoroethylene (PTFE)；Deduster filter cloth bag dedusting
The working mechanism of device is that ash-laden gas is filtered by filtering material, grit, filtering material trap coarse dust mainly by
Inertial collision acts on, and trapping grain dust is provided with mounting ring mainly by diffusion and sieving actoion, the top of deduster filter cloth bag
5-1, it is connected with equipment automatic ash removing device 2-1, lower end is provided with to look about and sealed with equipment card 3-2, makes deduster filter cloth bag
It is internal to form two cavitys with outside.
Preferably, for being circulated outside the cooler in the vacuum cleaning equipment of monocrystal growing furnace using water jacket 6-1 by chamber
Interior dust cooling, cooler integrally use cylindrical tank structure；Cooler tank body one end matches with single crystal growing furnace dust mouth pipeline
Close, interface bolt 6-6 connections, the other end installs a shoot door 6-3；Cooler tank interior uses labyrinth type filter core 6-
2, labyrinth type filter core 6-2 outside dimensions and cylindrical tank mates, during deashing, shoot door is opened, filter core is from shoot door 6-3 mouths
Take out, the easy firing dust that filter core adsorbs is cleaned out, prevent easy firing dust from entering in dedusting tank, shoot door 6-3 uses O
Type circle is sealed, and tank base support frame 6-4 structures are 2 channel-section steel structures erected, and cooler is fixed on the ground, gone out
Grey mouth 6-5 docks with the ash inlet of deduster tank body.
Preferably, the vacuum cleaning equipment for monocrystal growing furnace uses two groups of side enabling 7-1 structures, and side enabling 7-1 is
Circular configuration, with equipment tank body 1-1 related subgroups, it is symmetrically welded in cylinder 7-3 both sides, there are folding support frame 7-2, door-plate in side
On have two second in command 7-4, side enabling 7-1 surroundings are connected with bolt 7-5 with tank body.
Preferably, major loop and control loop are included for the control system in the vacuum cleaning equipment of monocrystal growing furnace,
Major loop passes through exchange afterwards by live three-phase alternating-current supply voltage by circuit breaker Q F1 main contacts, isolating transformer TC1
Contactor KM1, KM2, KM3 normally opened contact are connected to rectification module VC1, VC2, VC3 input, rectification module VC1, VC2,
VC3 exports DC voltage and powered to magnet exciting coil YA1, YA2, YA3；Control loop is by transformer TC1 secondary output ends through superfusion
It is divided into three tunnels after disconnected device FU1, the normally opened contact parallel connection of normally opened contact and KA1 through relay KA2 is followed by electromagnetic switch Y1；Through
It is divided into two tunnels after change-over switch SA1, all the way through button SB1, button SB2 with being connected relay after relay KA1 normally opened contact parallel connections
Device KA1 coil；Another way is through normally closed point of the relay KA1 normally opened contacts with collection control signal S1 and contact relay after opened point
KA2 coils.KM1 coil, 1# excitation run indicator HL2,2# is finally indicated by HL1, the 1# such as power supply instruction excitation all the way
Excitation operation KM2 coil, 2# excitation run indicator HL3,3# excitation operation KM3 coil and the operation instruction of 3# excitations
It is connected after lamp HL4 parallel connections with PLC.
Now compare prior art, the vacuum cleaning equipment that the utility model is used for monocrystal growing furnace has the following advantages that：
1st, it is compact-sized, floor space is small, easy for installation.Efficiency of dust collection is high, adapts to different air aspiration stage vacuums
It is required that dust containing capacity is big.
2nd, due to using plurality of electromagnetic vibrator, and shaken successively by switch board control, avoid running simultaneously to furnace pressure
Impact, ensure that the normal growth of monocrystalline silicon.
3rd, due to realizing the clear dirt of filter bag by mechanical shaking, intervened without ambient atmos, sealing property is preferable, can be in vacuum
Used under condition of negative pressure.
4th, magnet coil uses vacuum epoxy perfusion technique, coil insulation is reached H levels, pressure-resistant more than 2000V, normal line
Enclose service life more than 8 years.
5th, dust-removal cloth-bag uses PTFE covering materials, more than 240 degree of heatproof, overlay film ash not easy to stick, service life 2 years with
On.
6th, relief valve and central control system are chain, releasing pressure automatically, and slowly oxidation, effectively prevents cloth bag from burning.
7th, anti-burning cooler is cooled down using labyrinth type dust, and filter core can adsorb easy firing dust, prevent easy firing powder
Dirt enters in dedusting tank, and easy firing dust filtration efficiency reaches more than 95%, more effectively prevents cloth bag burning in advance, improves cloth bag
Service life.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is Fig. 1 side view；
Fig. 3 is Fig. 1 A-A sectional views；
Fig. 4 is the structural representation of deashing device；
Fig. 5 is the structural representation of filter cloth bag；
Fig. 6 is the structural representation of anti-burning cooler；
Fig. 7 is to safeguard the structural representation that side is opened the door；
Fig. 8 is dust cleaner control system figure；
Fig. 9 is deduster switch board structure chart.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only part of the embodiment of the present utility model, rather than all
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, belong to the scope of the utility model protection.Additionally, should not be by the utility model
Protection domain only limit to following concrete structures or part or design parameter.
The purpose of the utility model patent is to provide a kind of monocrystal growing furnace cleaner simple in construction, reasonable in design,
Between single crystal furnace vacuum pipeline and vavuum pump, caused volatile matter during crystal pulling can be effectively filtered, is realized online clear
Ash, reduces the pollution of vacuum oil, and the stream time for greatly extending vavuum pump continuously runs so as to extend single crystal growing furnace
Time, thus reduce equipment, time, cost of labor caused by frequently changing pumping fluid, dry pump gear etc..The utility model is adopted
Technical scheme is：Deduster mainly includes deduster tank body, automatic ash removing device, deduster filter bag, anti-burning cooling
Device, safeguard that side is opened the door, the part of control system six forms.Deduster tank interior installation deduster filter cloth bag, automatic ash removing dress
The part such as put, and can internally 2Pa long-times condition of negative pressure normal work；Tank base installs air inlet, top installation outlet
Mouthful, the dust that single crystal growing furnace discharges is filtered by deduster filter cloth bag, deduster filter cloth bag and automatic ash removing device and is connected,
Shaken successively by switch board control, avoid running simultaneously furnace pressure is impacted, ensure that the normal growth of monocrystalline silicon, controlled
System is used for the normal operation for controlling dust pelletizing system.
The utility model is simple in construction, reasonable in design, can effectively remove SiO in monocrystalline silicon gas2、AL2O3, simple substance P,
MgO、Fe2O3Deng dust, so as to improve purity of monocrystalline silicon, oil sealing oil consumption is reduced, makes vacuum system not by dust and solid particle
Pollution and damage, so as to reduce production cost.
Vacuum cleaning equipment of the present utility model for monocrystal growing furnace, including the tank body of negative pressure of vacuum can be born,
The bottom of tank body, which is provided with, contains grey room, contains grey room side wall and is provided with air inlet, portion's cleaning door is set in air inlet bottom, in tank interior
Card is housed, tank body is divided into top filter chamber and bottom Sheng Hui rooms, the card upper end and filtering by the card above air inlet
Cloth bag lower end is connected, and cloth bag upper end is connected with batch (-type) deashing device, and gas outlet, pressure gauge, automatic is provided with the top of housing
Relief valve etc. ensures that equipment operates steadily；It is characterized in：Plurality of electromagnetic vibrator, and shaken successively by switch board control, keep away
Exempt to run simultaneously and furnace pressure is impacted, ensure that the normal growth of monocrystalline silicon.PTFE overlay films dust-removal cloth-bag can ensure to ventilate
While amount, monocrystalline dust, filter efficiency >=99.99% are filtered well；Anti-burning cooler carries out monocrystalline dust primary
Filtering, easy firing dust filtration efficiency can be reached more than 95%, maintain easily maintenance door, can save scene maintenance into
This.Should.The utility model can effectively remove the impurity such as phosphorus, sulphur, charcoal, female in monocrystalline silicon gas, so as to improve purity of monocrystalline silicon,
Oil sealing oil consumption is reduced, makes vacuum system not by dust and solid particle pollution and damage.
Specifically, a kind of vacuum cleaning equipment for monocrystal growing furnace mainly includes deduster tank body, automatic ash removing fills
Put, deduster filter bag, anti-burning cooler, safeguard side open the door, the part of control system six composition.Deduster tank interior is installed
The parts such as deduster filter cloth bag, automatic ash removing device, and can internally 2Pa long-times condition of negative pressure normal work；Tank body bottom
Portion is installed by air inlet, top installation gas outlet, the dust discharged by deduster filter cloth bag filtering single crystal growing furnace, deduster filtering
Cloth bag and automatic ash removing device and it is connected, is shaken successively by switch board control, avoid running simultaneously furnace pressure is impacted, protects
The normal growth of monocrystalline silicon is demonstrate,proved, control system is used for the normal operation for controlling dust pelletizing system.
Further, the vacuum cleaning equipment for monocrystal growing furnace includes：
1) deduster tank body：Can be used in that the parts such as deduster filter cloth bag, automatic ash removing device are installed, and can be internally
2Pa long-time condition of negative pressure normal works；
2) automatic ash removing device：For clearing up the dust granules of filter cloth bag absorption, when magnet coil is powered, magnet coil
Produce electromagnetic force to compress dust-removal cloth-bag, dust in cloth bag is produced vibration；During power-off, electromagnetic force disappears, spring handle coil iron
Core retracts original position, and vibration cloth bag is stretched, and dust generation in cloth bag is vibrated again.Feature：Can be just in vacuum, negative pressure, zero-pressure
Often work.
3) filter cloth bag：For filtering the dust of single crystal growing furnace discharge, PTFE overlay films dust-removal cloth-bag can ensure throughput
Meanwhile monocrystalline dust, filter efficiency >=99.99% are filtered well.
4) anti-burning cooler：Can inflammability dust in collection conduit, prevent inflammability dust from entering in dedusting tank, prevent
Only filter bag is burnt, and anti-burning cooler is cooled down using labyrinth type dust, adsorbs easy firing dust, prevents easy firing dust enters from removing
In dirt tank, easy firing dust filtration efficiency reaches more than 95%, more effectively prevents cloth bag burning in advance, improves cloth bag and uses the longevity
Life.
5) side opening structure：Cloth bag is changed for scene and cloth bag checks that deashing is safeguarded, maintains easily maintenance door, Neng Goujie
Save the maintenance cost at scene.
6) control system：For controlling the normal operation of dust pelletizing system, main frame magnet coil and automatic decompression valve are carried out
Control.
Vacuum cleaning compact equipment, floor space of the present utility model for monocrystal growing furnace is small, easy for installation.
Efficiency of dust collection is high, adapts to the requirement of different air aspiration stage vacuums, dust containing capacity is big；Using plurality of electromagnetic vibrator, and pass through
Switch board control is shaken successively, avoids running simultaneously furnace pressure is impacted, ensure that the normal growth of monocrystalline silicon；Due to relying on
Mechanical shaking realizes the clear dirt of filter bag, is intervened without ambient atmos, sealing property is preferable, can be used under the conditions of negative pressure of vacuum；Electricity
Magnetic coil uses vacuum epoxy perfusion technique, coil insulation is reached H levels, pressure-resistant more than 2000V, normal coil service life 8
More than year；Dust-removal cloth-bag uses PTFE covering materials, more than 240 degree of heatproof, overlay film ash not easy to stick, service life more than 2 years；
Relief valve is chain with central control system, releasing pressure automatically, and slowly oxidation, effectively prevents cloth bag from burning；Anti-burning cooler uses labyrinth
Formula dust cools down, and filter core can adsorb easy firing dust, prevents easy firing dust from entering in dedusting tank, easy firing dust-filtering effect
Rate reaches more than 95%, more effectively prevents cloth bag burning in advance, improves cloth bag service life.
Now depending on accompanying drawing, explanation is expanded on further to the vacuum cleaning equipment of the present utility model for monocrystal growing furnace.
As shown in Figures 1 to 8, the utility model deduster structure：Including deduster tank body, automatic ash removing device, dedusting
Device filter bag, anti-burning cooler, safeguard that side is opened the door, the part of control system six forms.
Referring to shown in Fig. 1, Fig. 2, Fig. 3, deduster tank body tank body can be used in installing deduster filter cloth bag, automatic ash removing
The parts such as device, and can internally 2Pa long-times condition of negative pressure normal work, tank body 1-1 is cylinder type, in tank body 1-1
Bottom surface 1-7 four square lower margin 1-6 are installed, be to contain grey room 3-1 above the 1-7 of bottom surface, containing grey room 3-1 will own in deduster
Dust collection is come in, and when the latter same cleaning of monocrystalline blowing out, is contained grey room 3-1 side walls and is provided with air inlet 1-2, air inlet 1-2 connects
Mouth size is engaged with monocrystalline vacuum drying oven tube outlet, blending bolt 1-8 connections, and portion is set in another side wall for containing grey room 3-1
Cleaning door 1-3, cleaning door 1-3 sides are attached with folding 1-9, are more convenient equipment deashing, cleaning door 1-3 surrounding butterflies
Nut 1-10 1 first in command 1-11 of welding on the left of cleaning door 1-3, facilitates deashing, cleaning door 1-3 and air inlet 1-2 tightly
Designed with cleaning door 1-3 into 90 degree of angles, have a card 3-2, card 3- between tank body 1-1 bottom and the grey room 3-1 of Sheng
2 be the connector for installing dust-removal cloth-bag, and tank body 1-1 is divided into top filter chamber 3-3 and bottom Sheng Hui rooms by card 3-2
3-1, card 3-2 upper ends are connected with filter cloth bag 3-4 lower ends, and gas outlet 1-4, gas outlet 1-4 positions are provided with the top of housing
In air inlet 1-2 oblique upper, make air inlet more unobstructed with outlet, gas outlet 1-4 sizes match with vacuum pump pipeline connection size
Close, blending bolt 1-8 connections, tank body 1-1 sides welding J-type hanger 1-15 facilitates equipment conveying and dismounting, tank body 1-1 tops
Provided with flange 1-14 and upper lid 1-12, bolt 1-13 connections are used between flange 1-14 and upper lid 1-12, are provided with above upper lid 1-12
Pressure gauge 3-5, for real-time monitoring of tank body internal pressure, automatic decompression valve 3-6 etc. is provided with beside pressure gauge 3-5 and ensures equipment fortune
Row is steady, and equipment overall operation is controlled by control system 1-5, has lacing wire 2-2 and lifting bolt 2-3 above upper lid 1-12,
The maintenance of automatic ash removing device is lifted during for plant maintenance.
As shown in figure 4, automatic ash removing device is used for the dust granules for clearing up filter cloth bag absorption, automatic ash removing device inner chamber
Provided with plurality of electromagnetic vibrator, principle uses magnet coil 4-1 structures inside electromagnetic vibrator, and suction is produced by break-make coil
Principle, allow iron-core coil 4-4 in coil internal activity, be above iron core 4-4 one can activity spring 4-3, iron core
4-4 bottoms connect a push rod 4-5, are fixed below push rod 4-5 with bolt 4-6, are sealed above magnet coil 4-1 with end cap 4-7,
For end cap 4-7 surroundings with bolt 4-8 tightly, magnet coil 4-1 uses vacuum epoxy perfusion technique, coil insulation is reached H levels, resistance to
More than 2000V is pressed, coil is reached same vibration cleaning effect in 100 DEG C of working environments of operating temperature；Magnet coil 4-1 does not have
When having energization, iron core can be removed hub of a spool position by the spring 4-3 being enclosed on iron core 4-4, when magnet coil 4-1 will be powered
When, magnet coil produces electromagnetic force spring 4-3 compression, iron core is playbacked, and the push rod for being so connected to iron core 4-4 bottoms will be to
Lower movement, bottom dust-removal cloth-bag 3-4 is compressed, during power-off, electromagnetic force is disappeared, and iron-core coil is retracted original position by spring 4-3, is vibrated
Cloth bag is stretched, and dust in cloth bag is produced vibration, is so made magnet coil cycled on and power off, move back and forth, push away electromagnetism
Bar perseveration, realize the automatic ash removing function of cloth bag.The characteristics of automatic ash removing device is：Without artificial, equipment is in vacuum, negative
Can normal work when pressure, zero-pressure.
As shown in figure 5, deduster filter cloth bag is used for the dust for filtering single crystal growing furnace discharge, filter cloth bag 5-2 uses PTFE
Covering material, PTFE are polytetrafluoroethylene (PTFE), also known as Teflon Teflons, are one of kinds of most significant end in bag type filtering material.
Polytetrafluoroethylene (PTFE) synthetic fibers filter bag is filter bag made of a kind of unique material, in 240 DEG C of continuous running temperature, moment
, can acid and alkali-resistance erosion under 260 DEG C of temperature conditionss.Polytetrafluoroethylene (PTFE) synthetic fibers filter bag self-lubricity is splendid, it is nonhygroscopic, can bear
Ultraviolet radiation.The corresponding material of overlay film on filter bag 5-2, a variety of mesh such as high temperature resistant, explosion-proof, fire prevention, Water-proof and oil-proof can be played
, overlay film ash not easy to stick；The intensive treatment measure such as heatproof, antistatic need to be passed through, to ensure its heatproof, stretch-proof vibratility
Energy；The working mechanism of sack cleaner is that ash-laden gas is filtered by filtering material, grit, filtering material trapping coarse grain
Dust acts on mainly by inertial collision, and trapping grain dust is provided with mounting ring mainly by diffusion and sieving actoion, the top of cloth bag
5-1, it is connected with equipment automatic ash removing device 2-1, lower end is provided with to look about and sealed with equipment card 3-2, makes inside cloth bag and outside
Form two cavitys.
As shown in fig. 6, anti-burning cooler can inflammability dust in collection conduit, prevent inflammability dust from entering dedusting
In tank, prevent filter bag from burning, intracavitary dust is cooled using water jacket 6-1 circulations outside cooler, cooler integrally uses cylinder
Shape tank structure, so it is easy to dust and is circulated in tank body, tank body one end is engaged with single crystal growing furnace dust mouth pipeline, and interface is used
Bolt 6-6 connections, the other end install a shoot door 6-3, and inside uses labyrinth type filter core 6-2, labyrinth type filter core 6-2 outside dimensions
With cylindrical tank mates, during deashing, shoot door is opened, filter core takes out from shoot door 6-3 mouths, by the inflammable of filter core absorption
Burn dust to clean out, prevent easy firing dust from entering in dedusting tank, shoot door 6-3 is sealed using O-ring, tank base
Support frame 6-4 structures are 2 channel-section steel structures erected, and cooler is fixed on the ground, ash hole 6-5 and deduster tank body
Ash inlet docking, easy firing dust filtration efficiency is reached more than 95%.
As shown in fig. 7, safeguarding that the structural representation to open the door side is used for scene replacing cloth bag and cloth bag checks that deashing is safeguarded, adopt
With two groups of side enabling 7-1 structures, enabling 7-1 in side is circular configuration, and equipment tank body 1-1 related subgroups, in cylinder 7-3 both sides pair
Claim welding, there is folding support frame 7-2 side, there is two second in command 7-4 on door-plate, side enabling 7-1 surroundings with bolt 7-5 with
Tank body connects, and when scene needs to carry out cloth bag to safeguard, the cloth bag of tank body both sides can be made to be easier to dismantle, side is opened the door 7-1
Open, only need 1 surfaceman scene to change dust-removal cloth-bag on the spot and safeguarded, save equipment time and personnel more than 60%.
As shown in figure 8, the control system of deduster is used for the normal operation for controlling dust pelletizing system, including major loop and control
Loop, it is characterized in that：Major loop is passed through circuit breaker Q F1 main contacts, isolating transformer TC1 by live three-phase alternating-current supply voltage
Rectification module VC1, VC2, VC3 input, rectification mould are connected to by A.C. contactor KM1, KM2, KM3 normally opened contact afterwards
Block VC1, VC2, VC3 export DC voltage and powered to magnet exciting coil YA1, YA2, YA3；Control loop is defeated by TC1 level of transformer
Go out end and be divided into three tunnels after overcurrent fuse FU1, the normally opened contact parallel connection of normally opened contact and KA1 through relay KA2 is followed by electromagnetism
Switch Y1；It is divided into two tunnels after converted switch SA1, all the way after button SB1, button SB2 are in parallel with relay KA1 normally opened contacts
Connect relay KA1 coil；Another way is controlled through relay KA1 normally opened contacts with collection after signal S1 normally closed point and opened point
Contact relay KA2 coils.KM1 coil, the operation instruction of 1# excitations is finally indicated by HL1, the 1# such as power supply instruction excitation all the way
Lamp HL2,2# excitation operation KM2 coil, 2# excitation run indicator HL3,3# excitation operation KM3 coil and 3# excitations fortune
It is connected after row indicator lamp HL4 parallel connections with PLC.
As shown in figure 9, switch board operating process is as follows：The first step：Control the power supply indicator 9-2 on cabinet panel 9-1 bright,
1# excitations 9-3 is brought into operation simultaneously, that is, first group of magnet coil is started working, and iron-core coil shake, makes first group of dedusting
Cloth bag produces vibration cleaning, and 1# suction iron indicator lamps 9-4 is bright, and after continuously running 5 times, 1# excitations 9-3 inhales iron indicator lamp 9-4 and gone out, the
Two steps：Cross certain time 2# excitation 9-5 to bring into operation, that is, second group of magnet coil is started working, and iron-core coil shake, is made
Second group of dust-removal cloth-bag produces vibration cleaning, and 2# suction iron indicator lamps 9-6 is bright, and after continuously running 5 times, 2# excitations inhale iron indicator lamp 9-
6 go out；3rd step：Cross certain time 3# excitation 9-7 to bring into operation, that is, the 3rd group of magnet coil is started working, iron-core coil
Shake, the 3rd group of dust-removal cloth-bag is set to produce vibration cleaning, 3# suction iron indicator lamps 9-8 is bright, and after continuously running 5 times, 3# excitations inhale iron
Indicator lamp 9-8 goes out after certain time is spent, and circulates the above-mentioned course of work.3rd step：After deduster is stopped, automatic leakage
Pressure valve switchs 9-9 and central control system is chain, and releasing pressure automatically makes dust in deduster slowly aoxidize, and effectively prevents cloth bag from burning.
Above-mentioned all parts are made of the high material of corrosion-resistant, high temperature resistant, strength, integral device service life length.
Contrasted with common deduster, the deduster vibration frequency common first and purge mode easily cause dust-removal cloth-bag to block up
Plug, cause whole monocrystal growing furnace vacuum system choke valve to be opened greatly, reduce crystal pulling quality, secondly common deduster is directed to monocrystalline powder
Dirt does not have anti-burning function, easily causes deduster internal-combustion, reduces cloth bag service life.
More than, the only preferable embodiment of the utility model, but the scope of protection of the utility model is not limited to
In this, any one skilled in the art is in the technical scope that the utility model discloses, the change that can readily occur in
Change or replace, should all cover within the scope of protection of the utility model.Those skilled in the art is appreciated that not
In the case of the spirit and scope of the present utility model defined away from appended claims, it can be made in form and details each
The modification of kind various kinds.
Claims (9)
1. a kind of vacuum cleaning equipment for monocrystal growing furnace, it is characterised in that it includes deduster tank body, automatic ash removing dress
Put, deduster filter bag, anti-burning cooler, side opening structure and control system；Deduster tank interior installs deduster mistake
Filter cloth bag and automatic ash removing device, and being capable of internally 2 pa condition of negative pressure long-time normal work；Deduster tank body tank base
Air inlet, top installation gas outlet, the dust discharged by deduster filter cloth bag filtering single crystal growing furnace, deduster filter cloth are installed
Bag is connected with automatic ash removing device, shakes deduster filter cloth bag successively by switch board control.
2. the vacuum cleaning equipment according to claim 1 for monocrystal growing furnace, it is characterised in that deduster tank body
(1-1) is cylinder type, and in tank body (1-1) bottom surface, (1-7) is provided with four square lower margins (1-6), above bottom surface (1-7)
It is to contain grey room (3-1), contains grey room (3-1) and all dust collections in deduster are come in；Contain grey room (3-1) side wall and be provided with air inlet
Mouth (1-2), air inlet (1-2) connection size are engaged with monocrystalline vacuum drying oven tube outlet, blending bolt (1-8) connection, are being contained
Another side wall of grey room (3-1) sets portion's cleaning door (1-3), and cleaning door (1-3) side is attached with folding (1-9), deashing
Mouth (1-3) surrounding is with wing nut (1-10) tight, 1 first in command (1-11) of welding, cleaning door on the left of cleaning door (1-3)
(1-3) designs with air inlet (1-2) with cleaning door (1-3) into 90 degree of angles.
3. the vacuum cleaning equipment according to claim 2 for monocrystal growing furnace, it is characterised in that in tank body (1-1)
Bottom and contain between grey room (3-1) and have a card (3-2), card (3-2) is the company for installing deduster filter cloth bag
Tank body (1-1) is divided into top filter chamber (3-3) and bottom Sheng Hui rooms (3-1) by interface, the card (3-2), on card (3-2)
End is connected with deduster filter bag (3-4) lower end, is provided with gas outlet (1-4) on the top of housing, gas outlet (1-4) position is being entered
The oblique upper of gas port (1-2), gas outlet (1-4) size are engaged with vacuum pump pipeline connection size, and blending bolt (1-8) is even
Connect, tank body (1-1) side welding J-type hanger (1-15) facilitates equipment conveying and dismounting.
4. the vacuum cleaning equipment according to claim 1 for monocrystal growing furnace, it is characterised in that on tank body (1-1)
Side is provided with flange (1-14) and upper lid (1-12), is connected between flange (1-14) and upper lid (1-12) with bolt (1-13), upper lid
(1-12) is provided with pressure gauge (3-5) above, and pressure gauge (3-5) side ensures that equipment operates steadily provided with automatic decompression valve (3-6),
Equipment overall operation is controlled by control system (1-5), has lacing wire (2-2) and lifting bolt (2-3) above upper lid (1-12).
5. the vacuum cleaning equipment according to claim 1 for monocrystal growing furnace, it is characterised in that automatic ash removing device
Inner chamber is provided with plurality of electromagnetic vibrator, and magnet coil (4-1) structure is used inside electromagnetic vibrator, is one above iron core (4-4)
Individual spring (4-3) that can be movable, iron core (4-4) bottom connect a push rod (4-5), bolt (4-6) are used below push rod (4-5)
It is fixed, sealed above magnet coil (4-1) with end cap (4-7), end cap (4-7) surrounding is with bolt (4-8) tight.
6. the vacuum cleaning equipment according to claim 1 for monocrystal growing furnace, it is characterised in that deduster filter cloth
Bag is used for the dust for filtering single crystal growing furnace discharge, and deduster filter bag (3-4) uses PTFE covering materials；Deduster filter cloth bag
Top is provided with mounting ring (5-1), is connected with equipment automatic ash removing device (2-1), and lower end is close with equipment card (3-2) provided with looking about
Envelope, make to form two cavitys with outside inside deduster filter cloth bag.
7. the vacuum cleaning equipment according to claim 1 for monocrystal growing furnace, it is characterised in that adopted outside cooler
Circulated with water jacket (6-1) and intracavitary dust cools, cooler integrally uses cylindrical tank structure；Cooler tank body one end and list
Brilliant stove dust mouth pipeline is engaged, and interface is connected with bolt (6-6), and the other end installs a shoot door (6-3)；Cooler tank
Internal portion uses labyrinth type filter core (6-2), labyrinth type filter core (6-2) outside dimension and cylindrical tank mates；Shoot door (6-3)
Sealed using O-ring, tank base support frame (6-4) structure is 2 channel-section steel structures erected, is fixed on ground by cooler
On face, ash hole (6-5) docks with the ash inlet of deduster tank body.
8. the vacuum cleaning equipment according to claim 1 for monocrystal growing furnace, it is characterised in that it uses two groups of sides
Open the door (7-1) structure, side open the door (7-1) be circular configuration, and equipment tank body (1-1) related subgroup, in cylinder (7-3) both sides pair
Claim welding, there is folding support frame (7-2) side, there are two second in command (7-4) on door-plate, open the door (7-1) surrounding bolt for side
(7-5) is connected with tank body.
9. the vacuum cleaning equipment according to claim 1 for monocrystal growing furnace, it is characterised in that control system includes
Major loop and control loop, major loop are passed through circuit breaker Q F1 main contacts, isolating transformer by live three-phase alternating-current supply voltage
Rectification module VC1, VC2, VC3 input is connected to by A.C. contactor KM1, KM2, KM3 normally opened contact after TC1, it is whole
Flow module VC1, VC2, VC3 export DC voltage and powered to magnet exciting coil YA1, YA2, YA3；Control loop is by transformer TC1 times
Level output end is divided into three tunnels after overcurrent fuse FU1, and the normally opened contact parallel connection of normally opened contact and KA1 through relay KA2 is followed by
Electromagnetic switch Y1；It is divided into two tunnels after converted switch SA1, all the way through button SB1, button SB2 and relay KA1 normally opened contacts simultaneously
Relay KA1 coil is connected after connection；Normally closed point and opened point of the another way through relay KA1 normally opened contacts with collection control signal S1
Contact relay KA2 coils afterwards.
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| CN201621051324 | 2016-09-13 | ||
| CN2016210513249 | 2016-09-13 |
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| CN201710071972.3A Active CN106669301B (en) | 2016-09-13 | 2017-02-09 | Vacuum dust removal equipment for single crystal growth furnace |
| CN201720120657.0U Active CN206910990U (en) | 2016-09-13 | 2017-02-09 | A kind of vacuum cleaning equipment for monocrystal growing furnace |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710071972.3A Active CN106669301B (en) | 2016-09-13 | 2017-02-09 | Vacuum dust removal equipment for single crystal growth furnace |
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| Publication number | Publication date |
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| CN106669301A (en) | 2017-05-17 |
| CN106669301B (en) | 2022-06-07 |
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