CN105056646A - Automatic dust collector for vacuum tail gas of monocrystal silicon growing furnace - Google Patents
Automatic dust collector for vacuum tail gas of monocrystal silicon growing furnace Download PDFInfo
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- CN105056646A CN105056646A CN201510448267.1A CN201510448267A CN105056646A CN 105056646 A CN105056646 A CN 105056646A CN 201510448267 A CN201510448267 A CN 201510448267A CN 105056646 A CN105056646 A CN 105056646A
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- main tank
- hairbrush
- tank body
- growing furnace
- automatic dust
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Abstract
The invention discloses an automatic dust collector for vacuum tail gas of a monocrystal silicon growing furnace. The automatic dust collector comprises a main tank, a main tank top cover, a hairbrush fixing rack, a hairbrush, a screw rod lifter, an inlet and outlet pipeline assembly and a gas storage tank, wherein a filtering tank internally includes a filter core and hairbrush, the main tank top cover is provided with a hairbrush rotating mechanism, a top cover lifting mechanism includes the screw rod lifter and a lifting frame, the main tank is connected with the screw rod lifter, the screw rod lifter is connected with the lifting frame, the lifting frame is connected with the main tank top cover, the gas storage tank is connected with a pulse valve, the pulse valve is connected with the main tank through a corrugated pipe, a gas outlet interface in the inlet and outlet pipeline assembly is connected with a vacuum pump, and an emergency interface is connected with a standby automatic ash-removing and dedusting tank. According to the invention, the hairbrush in the furnace carries out intermittent rotary movement to clean dust on the surface of the filter core; gas in the gas storage tank is used to blow the filter core in the dedusting tank; and since hairbrush cleaning and blowing cleaning are carried out simultaneously, the automatic dust collector has the advantages of thorough cleaning, high efficiency, a high automation degree of cleaning, convenience in operation and safety in usage.
Description
[technical field]
The present invention relates to the environmental protection of monocrystalline silicon growing equipment, energy-saving field, particularly monocrystalline silicon growing furnace vacuum tail gas processing technology field.
[background technology]
Monocrystalline silicon growing furnace is a kind of in vacuum and inert gas (argon gas is main) environment, with graphite heater by polycrystalline material fusings such as polysilicons, with the equipment of Grown by CZ Method dislocation-free monocrystalline.Current monocrystalline silicon growing furnace, in long brilliant process, can produce dust and carbon monoxide particle in stove.In order to ensure vacuum in monocrystal growing furnace, needing to access vacuum pump evacuation, entering in air after the tail gas access oil mist separator filtration of generation.In vacuum pump evacuation process; in furnace gas, a large amount of dust and carbon monoxide particle can directly suck in vavuum pump; dust mixes with the lubricating oil in vavuum pump; cause vavuum pump lubrication failure, if oil change not in time, vavuum pump can be caused to damage; but oil change is frequent; not only serious waste of resources, and increase crystal pulling cost, affect production efficiency.Current settling mode is between vacuum pump body with single crystal growing furnace, be connected a dust removal and filtration tank.Dust removal and filtration tank includes filter core, and gas can filter a large amount of dust by filter core.But dust can be attached on filter core, filter core can be made very soon to block, cause monocrystalline furnace pressure sharply to raise simultaneously, thus impact is produced.Therefore, workman frequent manual unlocking can filter stove, takes out filter core, clears up the dust be attached on filter core.This process need manual operation, not only consuming timely affects operating efficiency, and increases a lot of additional effort power.
[summary of the invention]
Object of the present invention solves problems of the prior art exactly, a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus is provided, can allow vavuum pump in the process vacuumized, filter out dust in furnace gas, also can be attached to dust on filter element of duster by Automatic clearance simultaneously.Improve yield rate, while reducing labour cost, improve production efficiency greatly.
For achieving the above object, the present invention proposes a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus, composition comprises main tank body, main tank body upper cover, hairbrush fixed mount, hairbrush, screw mandrel lifter, hoisting frame, import and export conduit assembly, air accumulator; Described main tank body is covered with actuating unit, and this mechanism comprises motor, magnetic shaft coupling.Motor is connected by Timing Belt with magnetic shaft coupling, and magnetic shaft coupling is connected with main tank body upper cover, and magnetic shaft coupling main shaft directly stretches in dedusting tank and is connected with hairbrush fixed mount, and hairbrush is arranged on hairbrush fixed mount; Described screw mandrel lifter is connected with main tank body, and hoisting frame is connected with screw mandrel lifter, and main tank body upper cover is connected with hoisting frame; Described air accumulator is connected with pulse valve, is connected between pulse valve with main tank body by bellows; Described import and export conduit assembly comprises intake interface, interface of giving vent to anger, emergent interface for subsequent use, stop valve, and intake interface is connected with single crystal growing furnace, and interface of giving vent to anger is connected with vavuum pump.
As preferably, be connected between described magnetic shaft coupling with main tank body upper cover by sealing ring, magnetic shaft coupling inside is contactless connection, effectively prevents dedusting tank vacuum leak.
As preferably, described hairbrush fixed rack structure is that trisection is evenly separated, and 3 hairbrush are arranged on fixed mount respectively, can adjust up and down before and after the position of hairbrush.
As preferably, described bellows directly passes into filter core inside, uninterruptedly to be exitted winding-up by pulse valve.
As preferably, described main tank body is provided with dust cleaning outlet, and this outlet is positioned at main tank body lower end, and quantity is at least two.
As preferably, described main tank body is provided with watch window, and this window is positioned in the middle part of main tank body and bottom, and 4 homogeneous phases are to being interspersed, and watch window is 4.
As preferably, described import and export conduit assembly is provided with secondary emergency exit, escape hatch can with automatic ash removing dedusting tank for subsequent use.
As preferably, open corresponding stop valve in described import and export conduit assembly, single crystal growing furnace can directly be connected with vavuum pump.
Beneficial effect of the present invention: the present invention automatically can complete dust-filtering and whole process is safeguarded in filter core cleaning.When vacuum pump work, monocrystalline furnace gas can pass through Automatic clearance dedusting tank, can adhere to a large amount of dust in the process of the filter element filtering in dedusting tank, and the hairbrush at this moment in stove can do intermittent rotary motion, cleaning dust on filter element surface.After monocrystalline silicon growing furnace quits work, with the filter core in the Gas injection dedusting tank in air accumulator, reach the effect of cleaning filter core further.Carry out with hairbrush and liquid honing, thoroughly, cleaning efficiency is high, and the automaticity of cleaning operation is high, easy to operate, use safety in cleaning simultaneously.
Feature of the present invention and advantage will be executed example by real main tank body and be described in detail by reference to the accompanying drawings.
[accompanying drawing explanation]
Fig. 1 is the structural representation of a kind of monocrystalline silicon growing furnace vacuum tail gas of the present invention automatic dust removing apparatus;
Fig. 2 is the internal structure schematic diagram of a kind of monocrystalline silicon growing furnace vacuum tail gas of the present invention automatic dust removing apparatus;
Fig. 3 is the partial structurtes schematic diagram of a kind of monocrystalline silicon growing furnace vacuum tail gas of the present invention automatic dust removing apparatus;
In figure: the main tank body of 1-, 2-main tank body upper cover, 3-motor, 4-Timing Belt, 5-magnetic shaft coupling, 6-hoisting frame, 7-screw mandrel lifter, 8-watch window, 9-dust cleaning outlet, 10-air accumulator, 11-air accumulator, 12-pulse valve, 13-import and export conduit assembly, 14-bellows, 15-intake interface, 16-stop valve, 17-emergent interface for subsequent use, 18-filter core, 19-hairbrush, 20-hairbrush fixed mount, 21-magnetic shaft coupling main shaft
[detailed description of the invention]
Consult Fig. 1, Fig. 2, Fig. 3, the present invention includes main tank body 1, main tank body upper cover 2, hoisting frame 6, screw mandrel lifter 7, air accumulator 11, import and export conduit assembly 13, hairbrush 19, hairbrush fixed mount 20; Described main tank body upper cover 2 is provided with actuating unit, and this mechanism comprises motor 3, magnetic shaft coupling 5.Motor 3 is connected by Timing Belt 4 with magnetic shaft coupling 5, and magnetic shaft coupling 5 is connected with main tank body upper cover 2, and magnetic shaft coupling main shaft 21 directly stretches in tank and is connected with hairbrush fixed mount 20, and hairbrush 19 is arranged on hairbrush fixed mount 20 respectively; Described screw mandrel lifter 7 is connected with main tank body 1, and hoisting frame 6 is connected with screw mandrel lifter 7, and main tank body upper cover 2 is connected with hoisting frame 6; Described air accumulator 11 is connected with pulse valve 12, is connected between pulse valve 12 with main tank body 1 by bellows 14; Described import and export conduit assembly comprises intake interface 15, interface 10 of giving vent to anger, emergent interface 17 for subsequent use, stop valve 16, and intake interface 15 is connected with single crystal growing furnace, and interface 10 of giving vent to anger is connected with vavuum pump.
Be connected by sealing ring between described magnetic shaft coupling 5 with main tank body upper cover 2, magnetic shaft coupling 5 inside is contactless connection, effectively prevents dedusting tank vacuum leak.Described hairbrush fixed mount 20 structure is that trisection is evenly separated, and 3 hairbrush 19 are arranged on hairbrush fixed mount 20 respectively, can adjust up and down before and after the position of hairbrush 19.Described main tank body 1 is provided with dust cleaning outlet 9, and this outlet is positioned at main tank body 1 lower end, and quantity is at least two.Described main tank body 1 is provided with watch window 6, and this window is positioned in the middle part of main tank body 1 and bottom, and 4 homogeneous phases are to being interspersed, and the quantity of watch window 8 is 4.Described import and export conduit assembly is provided with secondary emergency exit 17, secondary emergency exit 17 can with automatic ash removing dedusting tank for subsequent use.Open corresponding stop valve 16 in described import and export conduit assembly, single crystal growing furnace can directly be connected with vavuum pump.
The course of work of the present invention:
In the course of the work, air inlet connects 15 and connects single crystal growing furnace a kind of monocrystalline silicon growing furnace vacuum tail gas of the present invention automatic dust removing apparatus, and interface 10 of giving vent to anger is connected with vavuum pump.When growth furnace works, in order to keep vacuum in growth furnace, vavuum pump is started working, and now furnace gas filters through automatic ash removing dedusting tank, then enters vavuum pump.In this process, automatic ash removing dedusting tank inner filter core slowly can amass dust.At this moment motor 3 starts, and drive Timing Belt 4 to rotate, Timing Belt 4 drives magnetic shaft coupling 5 to rotate, and magnetic shaft coupling main shaft 21 is with electric brush fixed mount 20 interval at the uniform velocity to rotate.3 hairbrush 19 be now arranged on hairbrush fixed mount 20 start to against filter core 18 surface and rotate, and brush off a part of dust.After a shutdown, pulse valve 12 is started working, and filter core 17 inner surface to dedusting tank inside is made discontinuous and blown, further dust in cleaning filter core.Filter core 18 dust cleaning situation can be observed by watch window 8 in this process.When maintenance shut-downs, outlet 9 can be cleared up by dust and will fall into dust in stove and clean out.When tail gas automatic dust removing apparatus need after a long time use more renew cartridge 17 and hairbrush 19 time, can with artificial hand screw rod lifter 7, screw mandrel lifter 7 drives hoisting frame 6 to rise, hoisting frame 6 mentions main tank body upper cover 2, after lifting to certain altitude, the bolt can dismantled on hairbrush fixed mount 20, then rotates and upgrades after frame 6 avoids main tank body upper cover, can take out filter core 17 easily and change.Simultaneously also can take out hairbrush fixed mount 20, manually more Brusher being able to change bristles 19.
The present invention automatically can complete dust-filtering and whole process is safeguarded in filter core cleaning.When vacuum pump work, monocrystalline furnace gas can pass through Automatic clearance dedusting tank, can adhere to a large amount of dust in the process of the filter element filtering in dedusting tank, and the hairbrush at this moment in stove can do intermittent rotary motion, cleaning dust on filter element surface.After growth furnace quits work, with the filter core in the Gas injection dedusting tank in air accumulator, reach the effect of cleaning filter core further.Carry out with hairbrush and liquid honing, thoroughly, cleaning efficiency is high, and the automaticity of cleaning operation is high, easy to operate, use safety in cleaning simultaneously.
Above-described embodiment is to explanation of the present invention, is not limitation of the invention, anyly all belongs to protection scope of the present invention to the scheme after simple transformation of the present invention.
Claims (7)
1. a monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus, is characterized in that: comprise main tank body (1), main tank body upper cover (2), hoisting frame (6), screw mandrel lifter (7), air accumulator (11), import and export conduit assembly (13), hairbrush (19), hairbrush fixed mount (20); Described main tank body upper cover (2) is provided with actuating unit, this mechanism comprises motor (3), magnetic shaft coupling (5), motor (3) is connected by Timing Belt (4) with magnetic shaft coupling (5), magnetic shaft coupling (5) is connected with main tank body upper cover (2), magnetic shaft coupling main shaft (21) directly stretches in tank and is connected with hairbrush fixed mount (20), and hairbrush (19) is arranged on hairbrush fixed mount (20) respectively; Described main tank body (1) is connected with screw mandrel lifter (7), and hoisting frame (6) is connected with screw mandrel lifter (7), and main tank body upper cover (2) is connected with hoisting frame (6); Described air accumulator (11) is connected with pulse valve (12), is connected between pulse valve (12) with main tank body (1) by bellows (14); Described import and export conduit assembly comprises interface of giving vent to anger (10), intake interface (15), stop valve (16), emergent interface for subsequent use (17), intake interface (15) is connected with single crystal growing furnace, and interface of giving vent to anger (10) is connected with vavuum pump.
2. a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus as claimed in claim 1, it is characterized in that: be connected by sealing ring between described magnetic shaft coupling (5) with main tank body upper cover (2), magnetic shaft coupling (5) inside is contactless connection, effectively prevents automatic dust removing apparatus vacuum leak.
3. a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus as claimed in claim 1, it is characterized in that: described hairbrush fixed mount (20) structure is that trisection is evenly separated, 3 hairbrush (19) are arranged on hairbrush fixed mount (20) respectively, can adjust up and down before and after the position of hairbrush (19).
4. a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus as claimed in claim 1, it is characterized in that: it is inner that described bellows (14) directly passes into filter core (18), control (12) by pulse valve and uninterruptedly to exit winding-up.
5. a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus as claimed in claim 1, it is characterized in that: described main tank body (1) is provided with dust cleaning outlet (9), this outlet is positioned at main tank body (1) lower end, and quantity is at least two.
6. a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus as claimed in claim 1, it is characterized in that: described main tank body (1) is provided with watch window (6), this window is positioned at main tank body (1) middle part and bottom, and 4 homogeneous phases are to being interspersed, and the quantity of watch window (8) is 4.
7. a kind of monocrystalline silicon growing furnace vacuum tail gas automatic dust removing apparatus as claimed in claim 1, it is characterized in that: described import and export conduit assembly is provided with secondary emergency exit (17), secondary emergency exit (17) can with automatic ash removing dedusting tank for subsequent use, open corresponding stop valve (16) in described import and export conduit assembly, single crystal growing furnace can directly be connected with vavuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510448267.1A CN105056646A (en) | 2015-07-28 | 2015-07-28 | Automatic dust collector for vacuum tail gas of monocrystal silicon growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510448267.1A CN105056646A (en) | 2015-07-28 | 2015-07-28 | Automatic dust collector for vacuum tail gas of monocrystal silicon growing furnace |
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| CN105056646A true CN105056646A (en) | 2015-11-18 |
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| CN201510448267.1A Pending CN105056646A (en) | 2015-07-28 | 2015-07-28 | Automatic dust collector for vacuum tail gas of monocrystal silicon growing furnace |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106669301A (en) * | 2016-09-13 | 2017-05-17 | 沈阳隆基电磁科技股份有限公司 | Vacuum dust removal equipment for single crystal growth furnace |
| CN107174872A (en) * | 2016-03-11 | 2017-09-19 | 刘佳承 | A kind of air filter |
| CN107213722A (en) * | 2017-06-08 | 2017-09-29 | 浙江晶盛机电股份有限公司 | Automatic dedusting filtering device |
| CN110359089A (en) * | 2019-07-24 | 2019-10-22 | 上海新昇半导体科技有限公司 | Dust tank, single crystal growth apparatus and method for monocrystal growth |
| CN110983430A (en) * | 2019-12-23 | 2020-04-10 | 大同新成新材料股份有限公司 | Growth equipment convenient to regulate and control for monocrystalline silicon and growth method thereof |
| EP4306683A1 (en) | 2022-07-13 | 2024-01-17 | Siltronic AG | Device for purifying waste gases from a crystal pulling system |
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| CN204865286U (en) * | 2015-07-28 | 2015-12-16 | 侯继伟 | Automatic dust collector of monocrystalline silicon growth stove vacuum tail gas |
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2015
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Patent Citations (8)
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| JPH0576803A (en) * | 1991-09-18 | 1993-03-30 | Daihen Corp | Cyclone type dust collector and dust collecting method |
| CN201551929U (en) * | 2009-11-26 | 2010-08-18 | 北京有色金属研究总院 | Tail gas self-purifying filter device for straight-pulling silicon single-crystal furnace |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107174872A (en) * | 2016-03-11 | 2017-09-19 | 刘佳承 | A kind of air filter |
| CN106669301A (en) * | 2016-09-13 | 2017-05-17 | 沈阳隆基电磁科技股份有限公司 | Vacuum dust removal equipment for single crystal growth furnace |
| CN107213722A (en) * | 2017-06-08 | 2017-09-29 | 浙江晶盛机电股份有限公司 | Automatic dedusting filtering device |
| CN110359089A (en) * | 2019-07-24 | 2019-10-22 | 上海新昇半导体科技有限公司 | Dust tank, single crystal growth apparatus and method for monocrystal growth |
| TWI762920B (en) * | 2019-07-24 | 2022-05-01 | 大陸商上海新昇半導體科技有限公司 | Dust container, apparatus and process of single crystal growth |
| CN110983430A (en) * | 2019-12-23 | 2020-04-10 | 大同新成新材料股份有限公司 | Growth equipment convenient to regulate and control for monocrystalline silicon and growth method thereof |
| EP4306683A1 (en) | 2022-07-13 | 2024-01-17 | Siltronic AG | Device for purifying waste gases from a crystal pulling system |
| WO2024012990A1 (en) | 2022-07-13 | 2024-01-18 | Siltronic Ag | Device for cleaning exhaust gases from a crystal growing system |
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