CN100457339C - Continuous production apparatus for nano metal powder - Google Patents

Continuous production apparatus for nano metal powder Download PDF

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CN100457339C
CN100457339C CNB2006100976103A CN200610097610A CN100457339C CN 100457339 C CN100457339 C CN 100457339C CN B2006100976103 A CNB2006100976103 A CN B2006100976103A CN 200610097610 A CN200610097610 A CN 200610097610A CN 100457339 C CN100457339 C CN 100457339C
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powder
nano
gathering
chamber
plasma
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CN101015861A (en
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吴建明
张振忠
赵芳霞
刘静远
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KUNSHAN MIYOU INDUSTRIAL Co Ltd
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KUNSHAN MIYOU INDUSTRIAL Co Ltd
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Abstract

The invention discloses a nanometer metal powder continuous producing device, comprising a vacuum measuring aerating system, a plasma/sensitive heating evaporating powder preparing system, a particle controlling system, a nanometer metal powder cyclone grading collecting system, a nanometer powder catching collecting system, a gas cooling circulating system, a water cooling circulating system, an electric controlling detecting system, a metal nanometer powder inactivating system and a powder vacuum packing storing system. The invention has high vacuum and three-gun structure, uses plasma constant-weight packing storing device, and plasma/electromagnetic sensitive evaporation or the like to realize continuous production of nanometer metal powder, change gas component and flux or the like.

Description

Continuous production apparatus for nano metal powder
Technical field
The present invention relates to the technology of preparing of a kind of nano metal powder, nano metal compound and cladding nanometer metal-powder, be specially a kind of industrialization production equipment of nano metal.
Background technology
Metal nano powder is meant the metallic particles polycrystalline material of diameter of particle at 1~100nm, and it belongs to the zero-dimension nano material, and its atom is different from the identical metallic of chemical composition with electronic structure.Because the peculiar physics of metal nano material, chemical effect, make it show the power that a series of and common polycrystal and amorphous powder material have essential distinction, magnetic, light,, sound, performance such as photocatalysis and chemical catalysis, thereby can be used in battery widely, ceramic capacitor, large scale integrated circuit, catalyst, magnetic rheological liquid, stealthy absorbing material, lubriation material, the high-performance magnetism recording materials, aspects such as high-performance polishing material and various nanocomposite additives, feasible preparation to the metal nano powder material, structure, performance and application study thereof become material science research in recent years and industrialization focus.The technology of preparing of metal nanoparticle is the key of nano materials research, development and application, the preparation method of the metallic nano-particle of being developed at present has tens kinds, but aspect high-quality metal nano powder prepares, the industrialization direction of comparatively generally acknowledging remains vapor phase method and electrochemical deposition method at present, comparatively speaking, because the nano-powder that the gas evaporation condensation method is prepared has the purity height, characteristics such as particle shape is good, particle size distribution is narrow, range of application is wide, easy dispersion, therefore, the maximum still high vacuum gas evaporation condensation method of industrialization production application at present.But existing both at home and abroad gas evaporation method metal nano powder industrialization equipment also seldom, and produce mostly and research equipment all exists and prepares low, the problems such as productive rate is low, cost height of material degree of purity.From relevant patent documentation and non-patent literature analysis both at home and abroad at present, the latest development trend of metal nano powder technology of preparing is: purity height, particle surface cleaning; Shape of particle, particle diameter and size distribution can be controlled; The particle aggregation tendency is little; Collect easily; Heat endurance is preferably arranged; Easily preserve; The production efficiency height, productive rate, output are big etc.
CN2712505 discloses a kind of device with plasma production nano metal powder, and this device comprises vacuum chamber, plasma generating device, powder gathering-device, circulating water system and control system etc.Its advantage is simple in structure, easy to operate, to the geometry of raw material metal without limits, and does not produce waste material.But this equipment vacuum is low, and capacity usage ratio is low, and production diameter of particle distribution is wide.
CN2629878, a kind of equipment for preparing nano metal powder is disclosed, this device comprises reactor and is located at the plasma gun on its top, it is characterized in that described plasma gun is the untransferable arc type, be provided with axial passage in it, there is the meal outlet in close plasma gun exit the sidewall top, and reactor and filters gatherer forms interior logical inert gas by pipe closed circuit.That its advantage is is simple in structure, control easily, production cost is low, but this equipment productive rate is low, capacity usage ratio is low, is difficult to realize that the powder continuity produces.
CNM850, disclose a kind of industrialization and produced the generation chamber of ultramicron, it comprises generation chamber, bipolar electrode, friction feeding case, its advantage is to generate the indoor two pairs of electrodes that are equipped with, the equipped friction feeding case in the outside that generates the chamber, and the powder productive rate can improve 1 times, can produce continuously, its weak point is: the charging aperture of friction feeding mechanism adopts conventional seals, and does not have the difference air extractor, thereby causes joint portion gas leakage between two charge bars to influence the purity and the performance of Nano metal powder.In addition, traditional arc gum can only move up and down, and can not circumferentially swing, and causes arc gum can not scan whole metal bath, and its device of adjusting arc length up and down is a lever, and arc length constantly changes makes the arc burning instability; The forced draft cycling mechanism adopts common cushion rubber to carry out sealing, because being with axle, sealing closely cooperates, and motor revolution height, quick abrasion, its life-span only is 50~60 hours, and can not guarantee air-tightness.In addition, this equipment use raw metal can only be for bar-shaped.
CN2578021Y and CN02144881.7 disclose a kind of continuous production equipment of nano metal, to be that powder process is indoor be equipped with two pairs of electrodes to the advantage of this equipment, the equipped friction feeding case in the outside that generates the chamber, the powder productive rate can improve 1 times, can produce continuously, and it is bad to have overcome in the conventional art air-tightness, Nano metal powder purity difference and arc burning instability problem.But this equipment use raw metal can only be for bar-shaped, and the plant capacity utilization rate is lower in addition.
CN1382547A and CN2488622Y disclose a kind of production Nano metal powder device, this equipment adopts Medium frequency induction and plasma composite evaporation to prepare Nano metal powder, and be provided with particle controller, feeding device, it has knot. and advantages such as structure is simple, output is big, the easy control of granularity are adapted at industrial promoting the use of.But this equipment adopts transferred-arc plasma heating, striking inconvenience, powder process room temperature height, and the particle coarsening rate is fast, thermograde is less during the particle condensation, is difficult to prepare the following metal-powder of 100nm.
CN2439920Y discloses a kind of metallic nano powder preparation equipment by electric arc method, the advantage of this equipment is that the raw metal geometry is unrestricted, no waste material, easy for operation, but this equipment exists problems such as vacuum is low, productive rate is low, capacity usage ratio is low, metal-powder is easily piled up in cooler.
CN2661343 discloses a kind of dual-purpose type metallic nano powder preparation equipment by electric arc method, it is actually the improvement to CN2439920Y equipment, its advantage is to have increased the metal bar material continuous feeding, also used high voltagehigh frequency arc initiation device and computer automation monitoring system, but still problem such as unresolved equipment vacuum is low, productive rate is low, capacity usage ratio is low, metal-powder is easily piled up in cooler.
CN2538456 discloses a kind of two cold continous way metallic nano powder preparation equipment, this equipment further increases pair of electrodes on the basis of CN2661343, productive rate improves, preparation powder kind increases, but problem such as also unresolved equipment vacuum is low, capacity usage ratio is low, metal-powder is easily piled up in cooler.
The common issue with that above all devices also exists is all not adopt the online hierarchy system of metal nano powder, does not consider the passivation and the vacuum storage problem of preparation metal-powder.
Comprehensive above the analysis can be found, at present domesticly relevantly produces, problems such as research equipment does not all solve high-quality, high yield fully, low-cost height.And from relevant patent documentation and non-patent literature analysis both at home and abroad at present, desire to overcome the above problems, corresponding preparation equipment must satisfy following the requirement: have high vacuum; Many preparation principles compound (as plasma-electromagnetic induction composite evaporation etc.); The multiple gun structure; Can produce continuously; Device fabrication technological parameter adjustable extent is wide, can realize the preparation of many kinds, multi-series metal nano powder; Capacity usage ratio is high.
Summary of the invention
In order to overcome above-mentioned defective, the invention provides a kind of continuous production apparatus for nano metal powder, this continuous production apparatus for nano metal powder can be produced continuously, complex energy utilization rate height, preparation cost is low and constant product quality.
The present invention for the technical scheme that solves its technical problem and adopt is: a kind of continuous production apparatus for nano metal powder mainly obtains measuring system, gas charging system, plasma/eddy-current heating composite evaporation pulverized coal preparation system, particle control system, the cyclone classified gathering system of nano metal powder, nano-powder capture and gathering system, the big air quantity gas cooled circulatory system, water-cooling circulating system, electrical control and pressure monitoring system, metal nano powder passivation system and powder Vacuum Package by vacuum and stocking system is formed;
Wherein, plasma/eddy-current heating composite evaporation pulverized coal preparation system, particle control system, the cyclone classified gathering system of nano metal powder, nano-powder capture and gathering system is connected in series successively communicates, big air quantity gas cooled circulatory system outlet is connected with plasma/eddy-current heating composite evaporation pulverized coal preparation system air quantity inlet communicate, big air quantity gas cooled circulatory system inlet exports to be connected with nano-powder capture and gathering system air quantity and communicates;
Vacuum obtains that measuring system is mainly regulated by vacuum measurement and vaccum-pumping equipment is formed, and gas charging system mainly is made up of many gas circuits gas desiccant dehumidification, flow measurement, gas charging system can be respectively to multiple powder process production usefulness gas (as, Ar, H 2, He, CH 4, N 2, NH 3) and powder passivation gas (as, Ar, N 2, O 2) carry out that desiccant dehumidification, flow of aerating air are measured and control;
Vacuum obtain measuring system, gas charging system join with plasma/eddy-current heating composite evaporation pulverized coal preparation system, particle control system, the cyclone classified gathering system of nano metal powder, nano-powder capture and gathering system, metal nano powder passivation system and powder Vacuum Package stocking system respectively (be in these systems vacuum and desired gas charging quantity respectively by vacuum obtain measuring system, gas charging system is controlled);
Electrical control and pressure monitoring system control vacuum obtain the work of measuring system, gas charging system, plasma/eddy-current heating composite evaporation pulverized coal preparation system, particle control system, the cyclone classified gathering system of nano metal powder, nano-powder capture and gathering system, the big air quantity gas cooled circulatory system, water-cooling circulating system, metal nano powder passivation system and powder Vacuum Package and stocking system;
Water-cooling circulating system captures with plasma/eddy-current heating composite evaporation pulverized coal preparation system, particle control system, the cyclone classified gathering system of nano metal powder, nano-powder respectively and the cooling device of gathering system is connected;
Metal nano powder passivation system and powder Vacuum Package and stocking system are all independent in addition to be placed;
The signal that vacuum measurement is regulated passes to electrical control and pressure monitoring system, and electrical control and pressure monitoring system ensure that each system keeps set condition work;
Further technical scheme of the present invention is:
Described vaccum-pumping equipment is connected in series successively by mechanical pump, lobe pump and turbomolecular pump, and (final vacuum can reach 6.0 * 10 to obtain high vacuum -4Pa), guarantee the production requirement of high purity metal nano powder, in addition, for the production of nano metal compound provides condition; Turbomolecular pump is connected with the particle control system by transition conduit and communicates, wherein the infinitely variable speeds lobe pump vacuum reach set index after, the double gas circulation power source of doing the big air quantity gas cooled circulatory system.Can be provided with mechanical pump, turbomolecular pump quick replacement device again, and a standby replaceable mechanical pump of cover and a turbomolecular pump.
Described plasma/eddy-current heating composite evaporation pulverized coal preparation system is made of powder process chamber, six cover direct-current plasma heating sources, three cover arc gums, charging mechanism, manipulator, water-cooled evaporator crucible, Frequency Induction Heating source, coil and powder cleaning package system; The locular wall of powder process chamber is the double-layer stainless steel wall, the space is that cooling device communicates with water-cooling circulating system in the double-layer stainless steel wall, six cover direct-current plasma heating sources are connected with three cover arc gums by cable and hf arc starter, for the corresponding cover arc gum of per two cover direct-current plasma heating sources connects, three cover arc gums are stretched in the powder process chamber by top, powder process chamber, charger is fixedly arranged on top, powder process chamber, between charger and water-cooled evaporator crucible or charging scffold slideway is set, like this charger can be by slideway respectively to the water-cooled evaporator crucible or charging scffold is conveying powdered or the reguline metal material (usually is provided with slideway between charger and charging scffold, like this charger at first by slideway to charging scffold conveying powdered or reguline metal material, thereby it is evenly reinforced), manipulator is arranged at powder process chamber sidewall, manipulator can with water-cooled evaporator crucible co-altitude charging scffold on metalliferous material dial in easily in the water-cooled evaporator crucible, this water-cooled evaporator crucible is built in that powder process is indoor to be connected with direct-current plasma heating source anode by external electrode, the output in Frequency Induction Heating source is connected with coil input end by powder process chamber sidewall intake, the water-cooled evaporator crucible places coil, to realize plasma/induction composite evaporation mode, the powder process chamber is provided with the air quantity inlet, and described air quantity inlet is the air quantity inlet of plasma/eddy-current heating composite evaporation pulverized coal preparation system; Per two cover direct-current plasma heating sources can be realized the power stack by electric-control system combination in parallel, can the separate unit power supply also can two cover combination parallel connections power simultaneously, can increase substantially the adjustable extent and the evaporation productive rate of evaporation of metal power; Every arc gum can evaporate different or same metal separately, also can evaporate same water-cooled evaporator crucible metal simultaneously by three arc gums.The water-cooled evaporator crucible can in time be changed according to production requirement; Powder cleaning package system is installed in bottom, powder process chamber, is convenient to capture the residual powder of powder process chamber interior.
The particle control system is by the particle control room, air-flow powder guide plate and air current spray nozzle are formed, air-flow powder guide plate is located in the particle control room, be used to regulate powder flight path and powder flight time, the air current spray nozzle arrival end is connected with gas charging system, the air current spray nozzle port of export is opened on the particle control room, the material inlet in particle control room is connected with plasma/eddy-current heating composite evaporation pulverized coal preparation system material outlet and communicates, the material outlet in particle control room is connected with the material inlet of the cyclone classified gathering system of nano metal powder and communicates, tube wall in the particle control room is the double-layer stainless steel wall, the space communicates with water-cooling circulating system as cooling device in this double-layer stainless steel wall, the internal diameter of particle control system and length can require to adjust according to production target, and in time change.
The cyclone classified gathering system of described nano metal powder mainly is connected in series up and down to communicate with the vacuum collecting chamber that contains two gloves by cyclone classified chamber to be formed, utilize low pressure, the classification principle of little air quantity nano metal powder and designing, material is entered in the vacuum collecting chamber that contains two gloves by cyclone classified chamber and waits to enter metal nano powder passivation system 50 as semi-finished product behind the powder gathering-device, the locular wall of cyclone classified chamber is the double-layer stainless steel wall, the space is that cooling device communicates with water-cooling circulating system in the double-layer stainless steel wall, cyclone classified chamber material inlet, material outlet is the material inlet of the cyclone classified gathering system of nano metal powder, material outlet also captures with particle control system material outlet and nano-powder respectively and the gathering system material inlet is connected, and (material inlet that is the cyclone classified gathering system of nano metal powder is connected with particle control system material outlet, the material outlet of the cyclone classified gathering system of nano metal powder captures with nano-powder and the gathering system material inlet is connected), the separable collection 15~50nm of this hierarchy system granule nano metal powder, cyclone classified indoor wall is equipped with rotatable rubbing property scraping plates system, rotatable rubbing property scraping plates system is made up of stepless speed-change motor and scraper plate, the output of stepless speed-change motor and the input of scraper plate are affixed, scraper plate is in cyclone classified indoor, scrapes powder and falls into vacuum powder gathering-device.
Described nano-powder capture and gathering system are composed in series up and down with the vacuum collecting chamber that contains two gloves by powder dust trapping chamber and communicate, material is entered in the vacuum collecting chamber that contains two gloves by powder dust trapping chamber and waits to enter the metal nano powder passivation system as semi-finished product behind the powder gathering-device, the locular wall of powder dust trapping chamber is the double-layer stainless steel wall, the space is that cooling device communicates with water-cooling circulating system in the double-layer stainless steel wall, the inner cover cloth-bag type of installing of powder dust trapping chamber filters receipts powder device, powder dust trapping chamber internal face is equipped with rotatable rubbing property scraping plates system, rotatable rubbing property scraping plates system is by stepless speed-change motor, scraper plate is formed, stepless speed-change motor is located at powder dust trapping chamber top, the output of stepless speed-change motor and the input of scraper plate are affixed, powder is scraped in the rotation of control scraping plates system, scrape powder and fall into vacuum powder gathering system, cloth-bag type filters receipts powder device and is provided with regularly percussion vibration device, be used to realize separating of recyclegas and powder, this nano-powder capture and gathering system in powder dust trapping chamber material inlet, air quantity outlet respectively with the cyclone classified gathering system of nano metal powder in cyclone classified chamber material outlet (being the air quantity outlet simultaneously) and big air quantity gas cooled circulatory system air quantity inlet be connected and communicate that (promptly powder dust trapping chamber material inlet is connected with cyclone classified chamber material outlet in the cyclone classified gathering system of nano metal powder and communicates in this nano-powder capture and the gathering system, the air quantity outlet of powder dust trapping chamber enters the mouth to be connected with big air quantity gas cooled circulatory system air quantity and communicates in this nano-powder capture and the gathering system.)。
Cyclone classified gathering system of described nano metal powder and nano-powder capture and the bottom surface of gathering system is provided with support, be convenient to move, be respectively equipped with dismountable top cover above the cyclone classified chamber of the cyclone classified gathering system of this nano metal powder and above the powder dust trapping chamber of nano-powder capture and gathering system, so that system is cleaned respectively.
Do not use the axial fan system that adopts usually in the existing equipment in the big air quantity gas cooled circulatory system, but adopt big air quantity, variable ratio frequency changer pump (being lobe pump) to send the forced draft circulatory system, be connected with the frozen water air cooling heat exchanger between variable ratio frequency changer pump and powder capture and gathering system, the employing of this system can reduce to evaporate the holdup time of powder in high-temperature region, powder process chamber on the one hand significantly, thereby reduce to prepare the powder granularity size, because gas temperature is constant, guaranteed the stability of the powder quality of production in the continuous flow procedure on the other hand; In addition, the variable ratio frequency changer pumping forced draft circulatory system increases than the reliability and stability of traditional axial fan system.
Water-cooling circulating system is by the water inlet water knockout drum, and valve and flexible pipe are formed, and are used for the cooling to each system, and water flow relay is housed on the water route, in case lack of water or current deficiency will cut off the electricity supply, to prevent device damage.
Metal nano powder passivation system and powder Vacuum Package and stocking system are mainly used in and finish high pure metal nano powder post-processed and quantitatively encapsulation and storage of product, are provided with the connecting interface with the subsequent product production equipment.Wherein, the metal nano powder passivation system can form the passivating film of one deck anoxybiotic at the extexine of high pure metal nano powder, and this layer passivating film can prevent oxidized in natural environment, the burning of high pure metal nano powder, and part prevents the reunion of high pure metal nano powder.Passivation system and powder Vacuum Package and stocking system and the high-quality metal nano powder of the present invention prepare the equipment use that matches, and it is reasonable, easy to operate to have a production procedure, characteristics such as production operation safe coefficient height.
Electrical control of the present invention, monitoring system are mainly used in adjusting and the monitoring of controlling vacuum acquisition and measurement, gas cooled circulatory system running parameter and flouring technology parameter, also can regulate and make up control separately to many plasma electrical sources.
The invention has the beneficial effects as follows:
(1) condition of high vacuum degree, three rifle structures, modify the preparation of shape nano-powder for high uniformity composite nano metallic body, alloy nano powder and shell and established research basis and working condition, improved the scope of application and the market competitiveness of the metal nano powder of producing greatly, the proposition of this structure also provides condition for the dilatation of production line;
(2) adopt up-to-date plasma electrical source combination technique, can effectively solve domestic current industrialization production line and rely on the present situation of using external import high power plasma power supply, reduced investment significantly with the production scale production line.Also solved the production problem that on a production line, can realize the multi-series product simultaneously;
(3) according to the different metal characteristics, on a production line, adopt different structure particle control system, can effectively solve the production problem of many kinds, many particle size ranges metal nano powder;
(4) introduce the nano-powder hierarchy system, can further reduce the particle size distribution of producing metal nano powder, improve the quality of products;
(5) adopt big air quantity, variable ratio frequency changer pumping forced draft cooling recirculation system, further reduced the particle size distribution of producing metal nano powder, guaranteed the stability of the powder quality of production in the continuous production;
(6) production line of being developed has been considered passivation, vacuum storage and the equipment and problems such as being connected of subsequent product production equipment of metal nano powder, for the industrialization production of follow-up high-tech product provides convenience;
(7) using plasma/induction composite evaporation and special evaporation crucible technology have further improved the capacity usage ratio of equipment, reduce preparation cost;
(8) owing in powder process chamber, particle classifying system and powder capture and gathering system, all be provided with powder cleaning, gathering-device, can reduce device interior kish powder significantly, for the condition (existence of kish powder can cause inflammable, explosive) that provides is provided in the safety operation of equipment.
In a word, this equipment has solved the continuous production problem of high-quality, high yield nano metal powder and complex energy utilization rate height, low, the constant product quality of preparation cost substantially.
Description of drawings
Fig. 1 looks schematic diagram for present device horizontal layout master;
Fig. 2 is a present device horizontal layout schematic top plan view.
Among the figure:
The 1-turbomolecular pump; The 3-air-flow distributor;
The 4-vacuum measurement is regulated;
6-particle control transition chamber; The 7-arc gum;
The 8-charging mechanism; 9-water-cooled evaporation crucible;
11-powder cleaning glove box
The 12-observation window; The 13-particle controller;
The 14-slide valve; The 15-butterfly valve;
The 16-transition conduit; Rotatable the rubbing property scraping plates system of 17-;
18-powder gathering-device; The 23-conveyance conduit;
19-contains the vacuum collecting chamber of two gloves; 21-powder dust trapping chamber;
The 22-cloth-bag type filters receives the powder device;
27-lobe pump (being the big air quantity lobe pump of variable ratio frequency changer);
26-gas circulation pipeline (the frozen water air cooling heat exchanger is housed);
31-powder passivation chamber; 32-powder Vacuum Package and apotheca;
10-plasma/eddy-current heating composite evaporation pulverized coal preparation system;
20-particle control system;
The cyclone classified gathering system of 30-nano metal powder;
The 40-nano-powder captures and gathering system;
50-metal nano powder passivation system;
60-powder Vacuum Package and stocking system.
The specific embodiment
Embodiment 1: table 1 is the preparation experiment result of present device nanometer Ni powder, compares with legacy equipment, and the maximum yield of single rifle nano-nickel powder has improved 25 times.
The preparation experiment result of table 1 nanometer Ni powder
Figure C20061009761000181
Embodiment 2: table 2 is the preparation experiment result of present device nano Cu powder, compares with legacy equipment, and the maximum yield of single rifle copper nanoparticle has improved 204.7 times.
The preparation experiment result of table 2 nano Cu powder
Figure C20061009761000191
Embodiment 3: the high evenly preparation of simple substance mixing nanometer copper nickel composite granule, and according to following technological parameter: H 2/ Ar=2/8, pressure=0.06MPa, electric current: 350A (the nickel utmost point) and 300A (copper-base), the productive rate of two prepared Cu of rifle, Ni composite powder is 75.1g/h, the average grain diameter that makes powder is 54nm.
The instantiation of present device is also a lot, gives unnecessary details no longer one by one at this.
The course of work of the present invention is: open electrical control and pressure monitoring system:
1. metal material is put into raw material storage device and cold-crucible, the operating room is purified, and sealing, vacuum obtains measuring system work to setting vacuum (2 * 10 -3Pa) stop after;
2. gas charging system work charges into selected gas and (charges into Ar gas and H 2Gas to 0.1~0.9 atmospheric pressure), after setting pressure, keep;
3. open cycle cooling water system, open the forced draft circulating cooling system, open the medium frequency induction power supply in plasma/eddy-current heating composite evaporation pulverized coal preparation system, electric arc then ignites between each water-cooled evaporator crucible negative electrode and anode, under the effect of high-temperature electric arc and induction composite evaporation, metal is fusing and evaporation formation metal vapors rapidly, run into the cryogenic gas that brings by the forced draft circulating cooling system in the steam uphill process, chilling forms nano particle, and is recycled gas rapidly and brings to particle control room in the particle control system, cyclone classified chamber in the cyclone classified gathering system of nano metal powder, powder dust trapping chamber in nano-powder capture and the gathering system; In the cyclone classified gathering system of nano metal powder, there is partial material after cyclone classified chamber enters powder gathering-device the vacuum collecting chamber that contains two gloves, to wait to enter the metal nano powder passivation system as semi-finished product, nano-powder capture and gathering system in material wait to enter the metal nano powder passivation system as semi-finished product enter powder gathering-device in the vacuum collecting chamber that contains two gloves by powder dust trapping chamber after, after powder Vacuum Package and stocking system are stand-by as finished product.Water-cooling circulating system plays cooling effect therebetween, and big air quantity gas cooled circulatory system convey materials effect has cooling effect concurrently.

Claims (8)

1. a continuous production apparatus for nano metal powder is characterized in that: be made up of vacuum acquisition measuring system, gas charging system, plasma/eddy-current heating composite evaporation pulverized coal preparation system (10), particle control system (20), the cyclone classified gathering system of nano metal powder (30), nano-powder capture and gathering system (40), the big air quantity gas cooled circulatory system, water-cooling circulating system, electrical control and pressure monitoring system, metal nano powder passivation system (50) and powder Vacuum Package and stocking system (60);
Wherein, plasma/eddy-current heating composite evaporation pulverized coal preparation system (10), particle control system (20), the cyclone classified gathering system of nano metal powder (30), nano-powder capture and gathering system (40) are connected in series successively and communicate;
Big air quantity gas cooled circulatory system outlet is connected with the air quantity inlet of plasma/eddy-current heating composite evaporation pulverized coal preparation system communicate, big air quantity gas cooled circulatory system inlet exports to be connected with nano-powder capture and gathering system air quantity and communicates;
Vacuum acquisition measuring system regulates (4) by vacuum measurement and vaccum-pumping equipment is formed, gas charging system is made up of many gas circuits gas desiccant dehumidification, flow measurement, and vacuum obtains measuring system, gas charging system and joins with plasma/eddy-current heating composite evaporation pulverized coal preparation system (10), particle control system (20), the cyclone classified gathering system of nano metal powder (30), nano-powder capture and gathering system (40), metal nano powder passivation system (50) and powder Vacuum Package and stocking system (60) respectively;
Electrical control and pressure monitoring system control vacuum obtain measuring system, gas charging system, plasma/eddy-current heating composite evaporation pulverized coal preparation system (10), particle control system (20), the cyclone classified gathering system of nano metal powder (30), nano-powder captures and the work of gathering system (40), the big air quantity gas cooled circulatory system, water-cooling circulating system, metal nano powder passivation system and powder Vacuum Package and stocking system;
Water-cooling circulating system captures with plasma/eddy-current heating composite evaporation pulverized coal preparation system (10), particle control system (20), the cyclone classified gathering system of nano metal powder (30), nano-powder respectively and the cooling device of gathering system (40) is connected;
Metal nano powder passivation system (50) and powder Vacuum Package and stocking system (60) are all independent in addition to be placed.
2. continuous production apparatus for nano metal powder according to claim 1, it is characterized in that: described vaccum-pumping equipment is connected in series successively by mechanical pump, lobe pump (27) and turbomolecular pump (1), and turbomolecular pump (1) is connected with the particle control system by transition conduit and communicates.
3. continuous production apparatus for nano metal powder according to claim 1 is characterized in that: described plasma/eddy-current heating composite evaporation pulverized coal preparation system mainly is made of powder process chamber, six cover direct-current plasma heating sources, three cover arc gums, charging mechanism, manipulator, water-cooled evaporator crucible, Frequency Induction Heating source, coil and powder cleaning package system; The locular wall of powder process chamber is the double-layer stainless steel wall, the space communicates with water-cooling circulating system as cooling device in the double-layer stainless steel wall, six cover direct-current plasma heating sources are connected with three cover arc gums by cable and hf arc starter, for the corresponding cover arc gum of per two cover direct-current plasma heating sources connects, three cover arc gums are stretched in the powder process chamber by top, powder process chamber, charger is fixedly arranged on top, powder process chamber, between charger and charging scffold slideway is set, this water-cooled evaporator crucible is built in that powder process is indoor to be connected with direct-current plasma heating source anode by external electrode, the output in Frequency Induction Heating source is connected with coil input end by powder process chamber sidewall intake, the water-cooled evaporator crucible places coil, the powder process chamber is provided with the air quantity inlet, and described air quantity inlet is the air quantity inlet of plasma/eddy-current heating composite evaporation pulverized coal preparation system.
4. continuous production apparatus for nano metal powder according to claim 1, it is characterized in that: particle control system (20) is mainly by the particle control room, air-flow powder guide plate and air current spray nozzle are formed, air-flow powder guide plate is located in the particle control room, the air current spray nozzle arrival end is connected with gas charging system, the air current spray nozzle port of export is opened on the particle control room, the material inlet in particle control room is connected with plasma/eddy-current heating composite evaporation pulverized coal preparation system material outlet and communicates, the material outlet in particle control room is connected with the material inlet of the cyclone classified gathering system of nano metal powder and communicates, tube wall in the particle control room is the double-layer stainless steel wall, and the space communicates with water-cooling circulating system as cooling device in this double-layer stainless steel wall.
5. continuous production apparatus for nano metal powder according to claim 1, it is characterized in that: the cyclone classified gathering system of described nano metal powder mainly is connected in series up and down to communicate with the vacuum collecting chamber that contains two gloves by cyclone classified chamber to be formed, material waits to enter metal nano powder passivation system (50) as semi-finished product entered powder gathering-device in the vacuum collecting chamber that contains two gloves by cyclone classified chamber after, the locular wall of cyclone classified chamber is the double-layer stainless steel wall, the space communicates with water-cooling circulating system as cooling device in the double-layer stainless steel wall, cyclone classified chamber material inlet, material outlet is the material inlet of the cyclone classified gathering system of nano metal powder, material outlet captures with particle control system material outlet and nano-powder respectively and the gathering system material inlet is connected, cyclone classified indoor wall is equipped with rotatable rubbing property scraping plates system, rotatable rubbing property scraping plates system is made up of stepless speed-change motor and scraper plate, the output of stepless speed-change motor and the input of scraper plate are affixed, and scraper plate is in cyclone classified indoor.
6. continuous production apparatus for nano metal powder according to claim 1, it is characterized in that: described nano-powder capture and gathering system mainly are connected in series up and down to communicate with the vacuum collecting chamber that contains two gloves by powder dust trapping chamber to be formed, material is entered in the vacuum collecting chamber that contains two gloves by powder dust trapping chamber and waits to enter metal nano powder passivation system (50) as semi-finished product behind the powder gathering-device, the locular wall of powder dust trapping chamber is the double-layer stainless steel wall, the space communicates with water-cooling circulating system as cooling device in the double-layer stainless steel wall, the inner cover cloth-bag type of installing of powder dust trapping chamber filters receipts powder device, powder dust trapping chamber internal face is equipped with rotatable rubbing property scraping plates system, rotatable rubbing property scraping plates system is mainly by stepless speed-change motor, scraper plate is formed, stepless speed-change motor is located at powder dust trapping chamber top, the output of stepless speed-change motor and the input of scraper plate are affixed, cloth-bag type filters receipts powder device and is provided with regularly percussion vibration device, and powder dust trapping chamber is provided with material inlet, the air quantity outlet is as the material inlet of this nano-powder capture and gathering system, air quantity outlet respectively with the cyclone classified gathering system of nano metal powder in material outlet and big air quantity gas cooled circulatory system air quantity enter the mouth to be connected and communicate.
7. continuous production apparatus for nano metal powder according to claim 1, it is characterized in that: cyclone classified gathering system of described nano metal powder and nano-powder capture and the bottom surface of gathering system is located on the support, are respectively equipped with dismountable top cover above the cyclone classified chamber of the cyclone classified gathering system of this nano metal powder and above the powder dust trapping chamber of nano-powder capture and gathering system.
8. continuous production apparatus for nano metal powder according to claim 1 is characterized in that: the gas circulation pipeline that is connected between the variable frequency pump in the big air quantity gas cooled circulatory system and nano-powder capture and gathering system (40) is provided with the frozen water air cooling heat exchanger.
CNB2006100976103A 2006-11-09 2006-11-09 Continuous production apparatus for nano metal powder Expired - Fee Related CN100457339C (en)

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