CN206876728U - Producing device for the extraordinary probe of needlepoint type scanning micro-measurement apparatus - Google Patents
Producing device for the extraordinary probe of needlepoint type scanning micro-measurement apparatus Download PDFInfo
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- CN206876728U CN206876728U CN201720540407.2U CN201720540407U CN206876728U CN 206876728 U CN206876728 U CN 206876728U CN 201720540407 U CN201720540407 U CN 201720540407U CN 206876728 U CN206876728 U CN 206876728U
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- positioner
- wire
- probe
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- measurement apparatus
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Abstract
A kind of producing device of extraordinary probe for needlepoint type scanning micro-measurement apparatus, including base, support post, tungsten filament positioner, installation base plate and electrolytic cell positioner, two support posts being parallel to each other and electrolytic cell positioner are vertically and fixedly provided with base, the top of two support posts is fixed with installation base plate, and wire positioner is housed on installation base plate；It is further equipped with electrolysis power and control device.The utility model realizes the displacement for accurately controlling the wire for preparing probe；Accurately detection and control are carried out to electrochemical reaction state and terminal.With low cost, accurately all kinds of profiles with special appearance of batch making the advantages of.
Description
Technical field
A kind of extraordinary scanning probe manufacturing device is the utility model is related to, is mainly used in scanning of the processing with special appearance
Probe, available for scanning probe microscopy, AFM, PSTM and other it is based on needle point scanning expanding type
Super-resolution imaging system, Near-Field Radar Imaging and spectroscopic system, confocal opticses microscopic mechanism, micro electronmechanical integral measuring with sensing etc. neck
Domain.
Background technology
In scanning probe microscopy, AFM, PSTM and other it is based on needle point scanning expanding type
Super-resolution imaging system, Near-Field Radar Imaging and spectroscopic system, confocal opticses microscopic mechanism, micro electronmechanical integral measuring with sensing etc. neck
In domain, scanning probe is core component.The material for being usually used in preparing scanning probe has tungsten filament, spun gold, filamentary silver, platinumiridio, gold
The intensity of hard rock, silicon, CNT etc., wherein tungsten filament, rigidity, electric conductivity and thermal conductivity are preferable.The method for preparing tungsten filament probe
There are chemical or electrochemistry etch, polishing, polishing processes, mechanical shearing method, photo-engraving process, means of electron beam deposition, ion beam milling
Cut method, etching deposit method etc..
It is undesirable using the result of detection acquired by tapered probe and precision for some special type measurements.If probe shape
Shape carries out special design, such as has calabash shaped profile rather than traditional cone or pyramid profile, can be taken in detection
Obtain higher precision, larger range of measurement result.
The existing method and apparatus controlled variable using electrochemical erosion method making probe is few, it is difficult to accurately controls wire
With the start and stop of the relative position and electrochemical reaction of electrolyte solution, so be difficult to exactly, automatically control probe table
Facial contour.It is only applicable to make tapered probe mostly.Limit the low cost of extraordinary probe, high accuracy, batch making and make
Use scope.
The content of the invention
In consideration of it, scan micro- survey it is necessory to provide a kind of needlepoint type that is used for simple, easily controllable, that cost is low of technique
The producing device of the extraordinary probe of device is measured, realizes controllable preparation special type probe.
The technical solution of the utility model is：A kind of making dress of abnormity scanning probe for scanning probe microscopy
Put, it is characterised in that including base, support post, wire positioner, installation base plate and electrolytic cell positioner, the bottom of at
Two support posts being parallel to each other and electrolytic cell positioner are vertically and fixedly provided with seat, the top of two support posts is fixed with
One piece of installation base plate, wire positioner is housed on the installation base plate；It is further equipped with electrolysis power and is electrolysed for controlling
The control device of power supply decomposition voltage or size of current and wire positioner.
Described wire positioner includes controllable step-by-step movement straight-line displacement motor, motor fixed rack, displacement platform and resisted
Support frame, linear displacement guide rail, transition supporting plate, piezoelectric actuator, single shaft circular arc type flexible hinge and high rigidity level board are shaken,
Controllable step-by-step movement straight-line displacement motor is secured in place to the top of moving stage seismic support frame with motor fixed rack, linear displacement is led
Rail is secured in place the bottom of moving stage seismic support frame；The facade of the transition supporting plate of L-shaped is fixed on linear displacement guide rail, by can
Control the driving transition supporting plate upper and lower displacement of step-by-step movement straight-line displacement motor；Piezoelectricity is installed on the horizontal plane of the transition supporting plate to promote
Dynamic device, the middle part of high rigidity level board is connected to the top of the horizontal plane of the transition supporting plate by single shaft circular arc type flexible hinge
End, one end of the high rigidity level board and the bottom of piezoelectric actuator connect；It is equipped with and is used in the other end of high rigidity level board
The geometrical clamp of fixed probe wire.
Described electrolytic cell positioner includes U-tube, U-tube fixed plate and Two-dimensional Position moving stage, the bottom of Two-dimensional Position moving stage
Face is arranged on described base, and U-tube fixed plate is fixed in Two-dimensional Position moving stage, and U-tube is fixed in U-tube fixed plate.
Described control device includes controller, data collecting card, Driver Card, voltage amplifier, electronic switch and taken
Sample resistance, one end of Driver Card, voltage amplifier and sample resistance, and the control terminal of electronic switch are adopted by data respectively
The distinct interface of truck is connected with controller, and the other end of the Driver Card is connected with linear stepping motor；The voltage amplifier
The other end be connected with described piezoelectric ceramics；The both ends of the electronic switch are connected on described electrolysis power, tungsten filament and negative electrode
Electric power loop in；The other end of the sample resistance is connected with the negative electrode.
The utility model beneficial effect is：The extraordinary probe of preparation has special topographical profiles, available for scanning probe
It is microscope, AFM, PSTM and other super-resolution imaging systems based on needle point scanning expanding type, near
Field imaging and spectroscopic system, confocal opticses microscopic mechanism, micro electronmechanical integral measuring and sensing etc., can be obviously improved detectable signal
Quality and measurement stability, repeatability and reproducibility.It is simple in construction, it is easy to use, it is cheap, easily implement.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of extraordinary probe preparation facilities provided by the utility model；
Fig. 2 is the dimensional structure diagram of wire positioner in Fig. 1；
Fig. 3 is the dimensional structure diagram of electrolytic cell positioner in Fig. 1；
Fig. 4 is the composition block diagram of control device in Fig. 1；
Fig. 5 is the implementing procedure figure of extraordinary probe manufacturing method provided by the utility model.
Embodiment
Referring to Fig. 1, the utility model is a kind of preparation of the extraordinary probe for needlepoint type scanning micro-measurement apparatus
Device, including base 1, support post 2, wire positioner 3, installation base plate 4 and electrolytic cell positioner 6, on base 1
Two support posts being parallel to each other 2 and electrolytic cell positioner 6 are vertically and fixedly provided with, the top of two support posts 2 is fixed with
One piece of installation base plate 4, wire positioner 3 is housed on the installation base plate 4；It is further equipped with electrolysis power B and for controlling
Electrolysis power switchs（Also it can adjust the size of Faradaic current or voltage）And the control device A of wire positioner 3.Can be
The relative both sides of the base 1 are provided with the handle 5 for being used for manually carrying.
Referring to Fig. 2, described wire positioner 3 includes controllable step-by-step movement straight-line displacement motor 31, motor is fixed
Support 32, displacement platform seismic support frame 33, linear displacement guide rail 34, transition supporting plate 35, piezoelectric actuator 36, single shaft circular arc type
Flexible hinge 37 and high rigidity level board 38, controllable step-by-step movement straight-line displacement motor 31 is secured in place with motor fixed rack 32
The top of moving stage seismic support frame 33, linear displacement guide rail 34 are secured in place the bottom of moving stage seismic support frame 33；The transition of L-shaped
The facade of supporting plate 35 is fixed on linear displacement guide rail 34, and transition supporting plate is driven by controllable step-by-step movement straight-line displacement motor 31
35 upper and lower displacements；Piezoelectric actuator 36 is installed on the horizontal plane of the transition supporting plate 35, the middle part of high rigidity level board 38 leads to
Cross the top that single shaft circular arc type flexible hinge 37 is connected to the horizontal plane of the transition supporting plate 35, the one of the high rigidity level board 38
End is connected with the bottom of piezoelectric actuator 36；The fixation for being used for fixing wire 39 is housed in the other end of high rigidity level board 38
Folder.The present embodiment is preferentially using tungsten filament as the wire being electrolysed.
The fine motion up and down of high rigidity level board 38 is controlled by piezoelectric actuator 36（It is axle with single shaft circular arc type flexible hinge 37
Lower swing in the heart, there is small deflection, can ignore）, so as to control the microdisplacement of wire 39.The core of piezoelectric actuator 36
Center portion part is piezoelectric ceramics, is made up of lead zirconate titanate.
Referring to Fig. 3, described electrolytic cell positioner 6 includes U-tube 61, U-tube fixed plate 62 and Two-dimensional Position moving stage
63, the bottom surface of Two-dimensional Position moving stage 63 is arranged on described base 1, and U-tube fixed plate 62 is fixed in Two-dimensional Position moving stage 63, U
Type pipe 61 is fixed in U-tube fixed plate 62.
Referring to Fig. 4, described control device include controller, data collecting plate card, Driver Card, voltage amplifier,
The control terminal of electronic switch and sample resistance, one end of Driver Card, voltage amplifier and sample resistance, and electronic switch point
It is not connected by the distinct interface of data collecting plate card with controller, the other end of the Driver Card and controllable step-by-step movement straight line position
Motor 31 is moved to connect；The other end of the voltage amplifier is connected with described piezoelectric actuator 36；The both ends string of the electronic switch
It is associated in the electric power loop that described electrolysis power B, wire 39 and negative electrode 7 form；The other end of the sample resistance and the moon
Pole connects.Controller can use single-chip microcomputer, PLC or PC, and the present embodiment is preferentially using PC as controller.
Described electronic switch is by a rising edge flip-flops and two（Or one）Field-effect（Crystal）Pipe forms, rising edge
The triggering end of trigger is connected with data collecting plate card, and the output end of rising edge flip-flops and the grid of field-effect transistor connect
Connect, the source electrode and drain series of the field-effect transistor are in electric power loop.Equipped with the electricity needed for electrochemical reaction in U-tube 61
Electrolyte solution.
Application method of the present utility model is described as follows：
Step S1, a certain amount of mixed solution that can form stable liquid-liquid interface is injected in U-tube 61.This implementation
Scheme is using carbon tetrachloride as lower floor's organic solvent, and sodium hydroxide is as upper strata electrolyte solution.
Step S2, makes wire be connected with electronic switch（Such as the FET and rising edge flip-flops in Fig. 4, by controlling
Device controls its break-make, is not limited to this structure, belongs to routine techniques）.In the high rigidity level board 38 of wire positioner 3
It is upper installation wire 39, it be vertical direction to make wire 39, and be located at the Single port of U-tube 61 in electrolyte solution liquid level it
On.
Step S3, make platinumiridio silk（Negative electrode）7 are connected with control device A, platinumiridio silk 7 is immersed in U-tube 61
In electrolyte solution in middle another port.
Step S4, open electrolysis power B.
Step S5, controllable step-by-step movement straight-line displacement motor 31 slowly at the uniform velocity move down, and driving wire 39 is slow at the uniform velocity
Move down.When wire 39 touches electrolyte solution, controller detects the mutation of sample resistance both ends electric current, and remembers
The position L1 of record now controllable step-by-step movement straight-line displacement motor output end movement.
Step S6, the setting value L2 in controller, the controllable output end of step-by-step movement straight-line displacement motor 31 continues downward
Displacement L2.Now the lower end of wire 39 is immersed in electrolyte solution, and electrochemical corrosion starts.
Step S7, after electrochemical corrosion 1-30 clocks, at the upper surface of electrolyte solution, wire 39, which disconnects, forms probe
Needle point.Controller is with the voltage at 250KHz frequency collection sample resistance both ends, and voltage data is mutated when being disconnected with wire
At time point of the time point as cut-out electronic switch, stop electrochemical reaction.
Step S8, the setting value L3 in controller, controllable step-by-step movement straight-line displacement motor 31 drive wire 39 to
Lower movement, makes wire probe tip section be completely immersed in the carbon tetrachloride of lower floor.
Step S9, open electrolysis power B, the center section of wire 39（Part more than needle point）The quilt in electrolyte solution
Electrolysis；And tip portion is not electrolysed because immersing in carbon tetrachloride.Controller controls piezoelectric actuator 36, according to default journey
Sequence controls the micro-displacement of wire 39, modifies the shape of probe side wall, makes it have the smooth gourd shape projection of a section surface,
The length of this section of gourd shape projection is set between 10 μm of -1mm as needed.
Step S10, controller disconnect electrolysis power B, and wire 39 is lifted out electrolyte by control stepper motor 31.Extremely
This, the making of extraordinary probe terminates.
In addition, those skilled in the art can also do other changes in the utility model spirit, certainly, these are according to this reality
The change made of new spirit, all should be within the scope of the utility model be claimed.
Claims (4)
1. it is a kind of for needlepoint type scanning micro-measurement apparatus extraordinary probe producing device, it is characterised in that including base,
Support post, wire positioner, installation base plate and electrolytic cell positioner, two are vertically and fixedly provided with base and is mutually put down
Capable support post and electrolytic cell positioner, the top of two support posts is fixed with one piece of installation base plate, in the installation base
Wire positioner is housed on plate；Be further equipped with electrolysis power and for control electrolysis power decomposition voltage or size of current with
And the control device of wire positioner.
2. the producing device of the extraordinary probe according to claim 1 for needlepoint type scanning micro-measurement apparatus, it is special
Sign is that described wire positioner includes controllable step-by-step movement straight-line displacement motor, motor fixed rack, displacement platform antidetonation
Support frame, linear displacement guide rail, transition supporting plate, piezoelectric actuator, single shaft circular arc type flexible hinge and high rigidity level board, use
Controllable step-by-step movement straight-line displacement motor is secured in place the top of moving stage seismic support frame, linear displacement guide rail by motor fixed rack
It is secured in place the bottom of moving stage seismic support frame；The facade of the transition supporting plate of L-shaped is fixed on linear displacement guide rail, by controllable
Step-by-step movement straight-line displacement motor drives transition supporting plate upper and lower displacement；Installed on the horizontal plane of the transition supporting plate piezoelectric actuated
Device, the middle part of high rigidity level board are connected to the top of the horizontal plane of the transition supporting plate by single shaft circular arc type flexible hinge,
One end of the high rigidity level board and the bottom of piezoelectric actuator connect；It is equipped with the other end of high rigidity level board and is used to fix
The geometrical clamp of probe wire.
3. the producing device of the extraordinary probe according to claim 2 for needlepoint type scanning micro-measurement apparatus, it is special
Sign is that described electrolytic cell positioner includes U-tube, U-tube fixed plate and Two-dimensional Position moving stage, the bottom surface of Two-dimensional Position moving stage
On described base, U-tube fixed plate is fixed in Two-dimensional Position moving stage, and U-tube is fixed in U-tube fixed plate.
4. the producing device of the extraordinary probe according to claim 3 for needlepoint type scanning micro-measurement apparatus, it is special
Sign is that described control device includes controller, data collecting card, Driver Card, voltage amplifier, electronic switch and sampling
Resistance, one end of Driver Card, voltage amplifier and sample resistance, and the control terminal of electronic switch pass through data acquisition respectively
The distinct interface of card is connected with controller, and the other end of the Driver Card is connected with linear stepping motor；The voltage amplifier
The other end is connected with described piezoelectric ceramics；The both ends of the electronic switch are connected on described electrolysis power, tungsten filament and negative electrode
In electric power loop；The other end of the sample resistance is connected with the negative electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720540407.2U CN206876728U (en) | 2017-05-16 | 2017-05-16 | Producing device for the extraordinary probe of needlepoint type scanning micro-measurement apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720540407.2U CN206876728U (en) | 2017-05-16 | 2017-05-16 | Producing device for the extraordinary probe of needlepoint type scanning micro-measurement apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN206876728U true CN206876728U (en) | 2018-01-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720540407.2U Expired - Fee Related CN206876728U (en) | 2017-05-16 | 2017-05-16 | Producing device for the extraordinary probe of needlepoint type scanning micro-measurement apparatus |
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| Country | Link |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107102174A (en) * | 2017-05-16 | 2017-08-29 | 中国计量科学研究院 | A kind of preparation method for the extraordinary probe that micro-measurement apparatus is scanned for needlepoint type |
-
2017
- 2017-05-16 CN CN201720540407.2U patent/CN206876728U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107102174A (en) * | 2017-05-16 | 2017-08-29 | 中国计量科学研究院 | A kind of preparation method for the extraordinary probe that micro-measurement apparatus is scanned for needlepoint type |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180112 Termination date: 20210516 |
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| CF01 | Termination of patent right due to non-payment of annual fee |