CN103808967A - Imaging system of atomic force microscope on the basis of quartz tuning fork probe - Google Patents
Imaging system of atomic force microscope on the basis of quartz tuning fork probe Download PDFInfo
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- CN103808967A CN103808967A CN201410060481.5A CN201410060481A CN103808967A CN 103808967 A CN103808967 A CN 103808967A CN 201410060481 A CN201410060481 A CN 201410060481A CN 103808967 A CN103808967 A CN 103808967A
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Abstract
The invention discloses an imaging system of an atomic force microscope (AFM) on the basis of a quartz tuning fork probe. An AFM controller in the system is respectively connected with a graphic display, a piezoelectric ceramic tube scanner, a drive circuit of a stepping motor, a feedback signal detection circuit and a scanning control signal processing circuit through wire cables so as to achieve transmission of electrical signals, a probe limiting seat is installed on a sample table, a round mounting table is mounted above the probe limiting seat, and the piezoelectric ceramic tube scanner, a displacement adjusting component and a circuit mounting box which is supported by four supporting columns are installed on the round mounting table. By means of the imaging system of the AFM on the basis of the quartz tuning fork probe, a student can know basic working principles of the AFM and operating steps of the imaging system, and the imaging system can be used for observing a microstructure of a sample. During an experiment, the student can measure force sensor--quartz tuning fork probe damping coefficient of the imaging system and observe bistable state phenomena to further understand AFM force action mechanism and parameter setting.
Description
Technical field
The present invention relates to a kind of experimental apparatus, more particularly, refer to a kind of imaging system of the atomic force microscope based on quartz tuning-fork probe.
Background technology
1986, Binnig and Quate invented atomic force microscope (Atomic Force Microscope, AFM).Atomic force microscope is to utilize a superfine needle point pointwise to survey sample surfaces, in the time that the distance of needle point and sample surfaces reaches nanoscale, probe can be subject to the interaction force of sample to its generation, by the detection of this acting force being obtained to the pattern information of sample.By with the combination of various modern technology, atomic force microscope not only becomes one of microscope that resolution is the highest in the world, and be can be in vacuum, atmosphere and liquid environment to sample carry out nanometer resolution imaging, possess nano-manipulation and assembling ability, can measure the little strong microcosmic surface analytical instrument of one to pN magnitude acting force.At present, atomic force microscope is widely used in material science, the hot fields such as biotechnology and survey of deep space.
The experimental apparatus of existing atomic force microscope mostly only has illustrative experiment content, and the operation more complicated of business atomic force microscope instrument, expensive.Student need to train the longer time just can carry out independent operation, is difficult to allow the principle of work of student's fast understanding atomic force microscope, and experimental cost is also higher.Based on the vacancy aspect atomic force microscope experiment, and in order to allow student that atomic force microscope principle is further learnt, to be understood and grasped, make student observe sample micromechanism by practical operation experimental facilities, and in order to facilitate student to operate, reduce experimental cost etc., need to improve the experiment instrument of existing atomic force microscope.
At number of patent application CN201110358206.8, on November 11 2013 applying date, disclosing denomination of invention is a kind of fifth overtone imaging system based on rapping mode atomic force microscopy.Shown in Figure 1, this system includes AFM controller 1, graphic alphanumeric display 2, scanner 3, sample stage 4, cantilever 5, needle point 51, AFM probe excitation device 6, laser instrument 7, photoelectricity four-quadrant receiver 8, lock-in amplifier 11, the second function generator 12 and the first function generator 13.
Summary of the invention
The object of this invention is to provide a kind of imaging system of the atomic force microscope based on quartz tuning-fork probe, the imaging system of this atomic force microscope is by changing structure and the scanner scan mode of probe, save driver unit, photoelectricity four-quadrant receiver, laser instrument to probe, thereby reduced the complexity of the imaging system of the atomic force microscope of the present invention's design.
The present invention is a kind of imaging system of the atomic force microscope based on quartz tuning-fork probe, and this system includes AFM controller (1), graphic alphanumeric display (2), piezoelectric ceramics tube scanner (3), sample stage (4), quartz tuning-fork probe (5); It is characterized in that: also include feedback signal testing circuit (61), scan control signal treatment circuit (62) and displacement adjusting part;
Displacement adjusting part includes stepper motor (51), stepper motor driving circuit, circuit install bin (52), driving member (53), support member (54), probe limit base (55), the first keeper (57A), the second keeper (57B), circular mounting platform (58); Stepper motor driving circuit, feedback signal testing circuit (61), scan control signal treatment circuit (62) are installed in circuit install bin (52);
The first keeper (57A) includes the first leading screw (57A1), the first screw set (57A2), the first snap ring (57A3) and the first point contact ball body (57A4).It is upper that the first screw set (57A2) is socketed in the first leading screw (57A1), and the first snap ring (57A3) is threaded in the outside of the first screw set (57A2), has inserted the first point contact ball body (57A4) in the counter sink of the bottom of the first leading screw (57A1).The first screw set (57A2) is arranged in the first countersunk head through hole (55D) of probe limit base (55), and the first snap ring (57A3) is positioned at the below of circular mounting platform (58).
The second keeper (57B) includes the second leading screw (57B1), the second screw set (57B2), the second snap ring (57B3) and contacts spheroid (57B4) with second point.It is upper that the second screw set (57B2) is socketed in the second leading screw (57B1), and the second snap ring 57B3 is threaded in the outside of the second screw set (57B2), inserted second point contact spheroid (57B4) in the counter sink of the bottom of the second leading screw (57B1).The second screw set (57B2) is arranged in the second countersunk head through hole (55D) of probe limit base (55), and the second snap ring (57B3) is positioned at the below of circular mounting platform (58).
Circular mounting platform (58) is provided with the 4th countersunk head through hole (58A), the 5th countersunk head through hole (58B), view window (58C), the first positioning chamber (58D), the second positioning chamber (58F), threaded hole (58H).The center of the first positioning chamber (58D) is provided with the first through hole (58E).The center of the second positioning chamber (58F) is provided with the second through hole (58G).On view window (58C), glass is installed.The lower end of the outer sleeve (53A) in driving member (53) is installed in the first positioning chamber (58D), the 3rd screw set (53B) in driving member (53) is installed in first through hole (58E) of the first positioning chamber (58D).Piezoelectric ceramics tube scanner (3) is installed on the second positioning chamber (58F), and the output terminal of piezoelectric ceramics tube scanner (3) is connected with upper end ceramic body (3A) through after the second through hole (58G).The first screw set (57A2) in the first keeper (57A) is installed in the 4th countersunk head through hole (58A), the second screw set (57B2) in the second keeper (57B) is installed in the 5th countersunk head through hole (58B).On 4 threaded holes (58H), be connected with one end of support member (54).Driving member (53) is for driving the adjusting of circular mounting platform (58) in Z-direction.
Driving member (53) includes outer sleeve (53A), the 3rd screw set (53B), the 3rd snap ring (53C), thirdly contacts spheroid (53D), the 3rd leading screw (53E), inner sleeve (53F), pin (53G).
Leading screw (53E) is provided with leading screw section (53E1) and joint (53E2), the bottom of leading screw (53E) is provided with countersunk head circular hole, this countersunk head circular hole is for set-point contact spheroid (53D), leading screw section (53E1) is moved thereon for screw set (53B), joint (53E2) is provided with through hole (53E3), this through hole (53E3) passes for pin (53G), be placed in the first fluting (53F1) of inner sleeve (53F) through one end of the pin (53G) after through hole (53E3), be placed in the second fluting (53F2) of inner sleeve (53F) through the other end of the pin (53G) after through hole (53E3).
The upper end of inner sleeve (53F) is provided with counter sink and through hole, this counter sink is used for placing the output shaft of stepper motor (52), through hole is used for pressing closer nail (53H) and passes, the one end that presses closer nail (53H) holds out against on the output shaft of stepper motor (52), realizes the locking of the output shaft of inner sleeve (53F) and stepper motor (52) by pressing closer nail (53H).The cylindrical shell of inner sleeve (53F) is provided with the first fluting (53F1) and the second fluting (53F2), and the first fluting (53F1) is for placing one end of pin (53G), and the second fluting (53F2) is for placing the other end of pin (53G).
Probe limit base (55) is provided with the first blind hole (55A), the second blind hole (55B), the 3rd blind hole (55C), the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F), opening spacing hole (55G).The first blind hole (55A) is for placing the first keeper (57A), and the second blind hole (55B) is for placing the second keeper (57B), and the 3rd blind hole (55C) is for placing the thirdly contact spheroid (53D) of driving member (53).Opening spacing hole (55G) is located for inserting quartz tuning-fork probe (5), limits the range of movement of piezoelectric ceramics tube scanner (3) drive quartz tuning-fork probe (5) by opening spacing hole (55G).To place screw to realize the installation with sample stage (4) by probe limit base (55) at the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F) respectively.
The advantage that the present invention is based on the imaging system of the atomic force microscope of quartz tuning-fork probe is:
1. adopt quartz tuning-fork probe not only to save exciting bank but also no longer need additional pick-up unit, reducing the complexity of system.
2. the imaging system of the present invention's design has reduced the application of device, laser instrument, photoelectricity four-quadrant receiver.
3. adopt four points of piezoelectric ceramic tubes as three-dimensional scanner, have advantages of that volume is little, sweep limit is large and resonant frequency is high.
4. how much symmetrical structure designs that scanner are placed in to probe geometric center, can reduce the impact of probe thermal drift on scanner.
5. probe adopts supported at three point location, can reduce the requirement to processing technology, can avoid again the mechanical drift causing because of self design or manufacturing deficiency.
6. adopt circuit form to realize detecting from perception of spacing between needle point and sample, simple in structure, volume is little, low in energy consumption.
7. by the controller of full digital closed loop control system constituting atom force microscope, guarantee the reliability of system.
8. by the combining with teaching of soft and hardware, effectively reduced instruction cost.
Accompanying drawing explanation
Fig. 1 is the disclosed structural drawing of fifth overtone imaging system based on rapping mode atomic force microscopy.
Fig. 2 is the structural drawing of the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe of designing of the present invention.
Fig. 3 is the structural drawing of the probe mechanism part that designs of the present invention.
Fig. 3 A is the structural drawing of facing of Fig. 3.
Fig. 3 B is the structural drawing at another visual angle of probe mechanism part of designing of the present invention.
Fig. 3 C is piezoelectric ceramics tube scanner and motor-driven structural drawing in the probe mechanism part that designs of the present invention.
Fig. 3 D is the structural drawing of piezoelectric ceramics tube scanner and Piezoelectric Ceramic in the probe mechanism part that designs of the present invention.
Fig. 3 E is the structural drawing of Piezoelectric Ceramic and quartz tuning-fork probe in the probe mechanism part that designs of the present invention.
Fig. 3 F is another visual angle structural drawing of Piezoelectric Ceramic and quartz tuning-fork probe in the probe mechanism part that designs of the present invention.
Fig. 3 G is the structural drawing of circular mounting platform in the probe mechanism part that designs of the present invention.
Fig. 3 H is the structural drawing of driving member in the probe mechanism part that designs of the present invention.
Fig. 3 I is the exploded view of driving member in the probe mechanism part that designs of the present invention.
Fig. 3 J is the structural drawing of the first keeper in the probe mechanism part that designs of the present invention.
Fig. 3 K is the structural drawing of the second keeper in the probe mechanism part that designs of the present invention.
Fig. 4 is the imaging interface that is applicable to atomic force microscope.
Fig. 5 A is the schematic diagram of stepper motor driving circuit of the present invention.
Fig. 5 B is the circuit theory diagrams of feedback signal testing circuit of the present invention.
Fig. 5 C is X-axis control section circuit theory diagrams in scan control signal treatment circuit of the present invention.
Fig. 5 D is Y-axis control section circuit theory diagrams in scan control signal treatment circuit of the present invention.
Fig. 5 E is Z axis control section circuit theory diagrams in scan control signal treatment circuit of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
The imaging system of the atomic force microscope based on quartz tuning-fork probe of the present invention design, is in order to allow ultimate principle and the application of students atomic force microscope, to improve student experimenting manipulative ability simultaneously, and Enhancement test effect and the instruments used for education that design.The imaging system of the atomic force microscope based on quartz tuning-fork probe that student designs by practical operation the present invention, can scan the surface topography map of the sample 4A obtaining on sample stage 4.Atomic force microscope plays an important role in the surface structure and the character that characterize material, and student is very helpful to scientific research study from now on by this experiment.
Shown in Figure 2, the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe of the present invention's design, this system includes AFM controller 1, graphic alphanumeric display 2, piezoelectric ceramics tube scanner 3, sample stage 4, quartz tuning-fork probe 5, feedback signal testing circuit 61, scan control signal treatment circuit 62 and displacement adjusting part.
(1) AFM controller 1
Shown in Figure 2, AFM controller 1 first aspect output drive signal M
1after being applied on piezoelectric ceramics tube scanner 3 and stepper motor, indirectly-acting, on quartz probe 5, vibrates quartz probe 5 under resonant frequency; The pattern information electric signal D that second aspect receiving feedback signals testing circuit 61 is exported
61; The third aspect is according to pattern information electric signal D
61carry out PID computing, obtain motion state and drive signal FM
1, this motion state drives signal FM
1after scanner control signal treatment circuit 62, scanner control signal treatment circuit 62 is controlled the X-axis to piezoelectric ceramics tube scanner 3, Y-axis, Z axis respectively, exports X-axis and drives signal MX, Y-axis to drive signal MY, Z axis to drive signal MZ; Fourth aspect is in a cyclic process, by pattern information electric signal D
61be converted to graphical information shows in real time in graphic alphanumeric display 2.
That in the present invention, AFM controller 1 adopts is the PC104 single board computer 104-1541CLDN (B) of Yanxiang Intelligent Technology Co., Ltd and the data collecting card PM511PU of Beijing Zhong Taiyanchuan Science and Technology Ltd..104-1541CLDN (B) plate carries GX1CPU, and dominant frequency 300MHZ supports 256MB sdram memory, with VGA display interface.PM511PU has 16 road A/D ALT-CH alternate channels, 4 road D/A passages, 24 road programmable switch amount input and output and No. 3 counter passages.
(2) graphic alphanumeric display 2
In the present invention, graphic alphanumeric display 2 is for being shown as the result of picture.In the present invention, what graphic alphanumeric display 2 adopted is the OPTIPLEX desktop computer of DELL company.As shown in Figure 4, software program is general conventional imaging processing software at the software program interface demonstrating in graphic alphanumeric display 2.
(3) piezoelectric ceramics tube scanner 3
In the present invention, the outer cover 3C of piezoelectric ceramics tube scanner 3 is arranged in the second positioning chamber 58F of circular mounting platform 58.The X-axis of piezoelectric ceramics tube scanner 3 is the length direction of sample stage 4, and the Y-axis of piezoelectric ceramics tube scanner 3 is the Width of sample stage 4, and the Z axis of piezoelectric ceramics tube scanner 3 is the thickness direction of sample stage 4, and is also the direction that needle point contacts with sample.On the bottom ceramic body 3B of piezoelectric ceramics tube scanner 3, be vertically installed with the web member 5A of quartz tuning-fork probe 5.
In the present invention, piezoelectric ceramics tube scanner 3 adopts the piezoelectric actuator of the P-153.10H model of PI company production.
(4) sample stage 4
In the present invention, sample stage 4 is for carrying sample 4A.In order to prevent conduction, be separately installed with rubber footing 41 at sample stage 4 bottoms four jiaos.
(5) displacement adjusting part
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, displacement adjusting part includes stepper motor 51, stepper motor driving circuit, circuit install bin 52, driving member 53, support member 54, probe limit base 55, the first keeper 57A, the second keeper 57B, circular mounting platform 58.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, stepper motor driving circuit, feedback signal testing circuit 61 and scan control signal treatment circuit 62 are arranged in circuit install bin 52.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, circuit install bin 52 is hollow box body structure, and feedback signal testing circuit 61 and scan control signal treatment circuit 62 are installed in case.The base plate of circuit install bin 52 supports by 4 support members 54, and makes the base plate of circuit install bin 52 and circular mounting platform 58 keep certain spacing.One end of 4 support members 54 is arranged on the base plate of circuit install bin 52, and the other end of 4 support members 54 is arranged on circular mounting platform 58.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 J, the first keeper 57A includes the first leading screw 57A1, the first screw set 57A2, the first snap ring 57A3 and the first point contact ball body 57A4.It is upper that the first screw set 57A2 is socketed in the first leading screw 57A1, and the first snap ring 57A3 is threaded in the outside of the first screw set 57A2, has inserted the first point contact ball body 57A4 in the counter sink of the bottom of the first leading screw 57A1.The first screw set 57A2 is arranged in the first countersunk head through hole 55D of probe limit base 55, and the first snap ring 57A3 is positioned at the below of circular mounting platform 58.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 K, the second keeper 57B includes the second leading screw 57B1, the second screw set 57B2, the second snap ring 57B3 contacts spheroid 57B4 with second point.It is upper that the second screw set 57B2 is socketed in the second leading screw 57B1, and the second snap ring 57B3 is threaded in the outside of the second screw set 57B2, inserted second point contact spheroid 57B4 in the counter sink of the bottom of the second leading screw 57B1.The second screw set 57B2 is arranged in the second countersunk head through hole 55D of probe limit base 55, and the second snap ring 57B3 is positioned at the below of circular mounting platform 58.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 G, circular mounting platform 58 is provided with the 4th countersunk head through hole 58A, the 5th countersunk head through hole 58B, view window 58C, the first positioning chamber 58D, the second positioning chamber 58F, threaded hole 58H.The first positioning chamber 58D center is provided with the first through hole 58E.The second positioning chamber 58F center is provided with the second through hole 58G.On view window 58C, glass is installed.The lower end of outer sleeve 53A in driving member 53 is installed in the first positioning chamber 58D, the 3rd screw set 53B in driving member 53 is installed in the first through hole 58E of the first positioning chamber 58D.On the second positioning chamber 58F, piezoelectric ceramics tube scanner 3 is installed, and the output terminal of piezoelectric ceramics tube scanner 3 is connected with upper end ceramic body 3A through after the second through hole 58G.The first screw set 57A2 in the first keeper 57A is installed in the 4th countersunk head through hole 58A, the second screw set 57B2 in the second keeper 57B is installed in the 5th countersunk head through hole 58B.On 4 threaded hole 58H, be connected with one end of support member 54.Driving member 53 is for driving the adjusting of circular mounting platform 58 in Z-direction.
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 H, Fig. 3 I, driving member 53 includes outer sleeve 53A, the 3rd screw set 53B, the 3rd snap ring 53C, thirdly contacts spheroid 53D, the 3rd leading screw 53E, inner sleeve 53F, pin 53G.
Leading screw 53E is provided with leading screw section 53E1 and joint 53E2, the bottom of leading screw 53E is provided with countersunk head circular hole, this countersunk head circular hole is for set-point contact spheroid 53D, leading screw section 53E1 moves thereon for screw set 53B, joint 53E2 is provided with through hole 53E3, this through hole 53E3 passes for pin 53G, is placed in the first fluting 53F1 of inner sleeve 53F through the one end of the pin 53G after through hole 53E3, is placed in the second fluting 53F2 of inner sleeve 53F through the other end of the pin 53G after through hole 53E3.
The upper end of inner sleeve 53F is provided with counter sink and through hole, this counter sink is for placing the output shaft of stepper motor 52, through hole is used for pressing closer nail 53H and passes, the one end that presses closer nail 53H holds out against on the output shaft of stepper motor 52, realizes the locking of the output shaft of inner sleeve 53F and stepper motor 52 by pressing closer nail 53H.The cylindrical shell of inner sleeve 53F is provided with the first fluting 53F1 and the second fluting 53F2, first fluting 53F1 one end for placing pin 53G, and the second fluting 53F2 is for placing the other end of pin 53G.
Being assembled into of driving member 53: the output shaft of stepper motor 52 is connected with the upper end of inner sleeve 53F by pressing closer nail 53H, pin 53G passes after the through hole 53E3 on leading screw 53E, and leading screw 53E is placed in to inner sleeve 53F, and the two ends of pin 53G are placed in the first fluting 53F1 and the second fluting 53F2, screw set 53B is socketed on leading screw section 53E1, the outside of screw set 53B with snap ring 53C for being threaded, snap ring 53C is placed in the below of circular mounting platform 58, and outer sleeve 53A is socketed in the outside of inner sleeve 53F.One end of outer sleeve 53A is connected with the housing of stepper motor 52, the other end of outer sleeve 53A be arranged in the first positioning chamber 58D of circular mounting platform 58, in the first through hole 58E of circular mounting platform 58, screw set 53B is installed.One end of point contact ball body 53D is deployed in the second blind hole 55C of probe limit base 55, and the other end of point contact ball body 53D is placed in the countersunk head circular hole of bottom of leading screw 53E.
The drive connection of driving member 53 is: under the driving of stepper motor 52, inner sleeve 53F rotates, leading screw 53E is servo-actuated simultaneously, screw set 53B moves along Z-direction (being the thickness direction of sample) on leading screw 53E, because screw set 53B is fixedly mounted in the first through hole 58E of circular mounting platform 58, circular mounting platform 58 moves along Z-direction (being the thickness direction of sample).
Shown in Fig. 3, Fig. 3 A, Fig. 3 B, Fig. 3 C, Fig. 3 D, probe limit base 55 is provided with the first blind hole 55A, the second blind hole 55B, the 3rd blind hole 55C, the first countersunk head through hole 55D, the second countersunk head through hole 55E, the 3rd countersunk head through hole 55F, opening spacing hole 55G.The first blind hole 55A is used for placing the first keeper 57A, and the second blind hole 55B is used for placing the second keeper 57B, and the 3rd blind hole 55C is for placing the thirdly contact spheroid 53D of driving member 53.Opening spacing hole 55G place is used for inserting quartz tuning-fork probe 5, is limited piezoelectric ceramics tube scanner 3 and driven the range of movement of quartz tuning-fork probe 5 by opening spacing hole 55G.To place screw to realize the installation with sample stage 4 by probe limit base 55 at the first countersunk head through hole 55D, the second countersunk head through hole 55E, the 3rd countersunk head through hole 55F respectively.
In the present invention, lift or put down circular mounting platform 58 by manual adjustments the first keeper 57A, the second keeper 57B, realize quartz tuning-fork probe 5 coarse adjustment at Z-direction top offset apart from sample 4A.By stepper motor 51 and driving member 53 coordinate lift or put down circular mounting platform 58, realize quartz tuning-fork probe 5 accurate adjustment at Z-direction top offset apart from sample 4A.(6) quartz tuning-fork probe 5
Shown in Fig. 3 D, Fig. 3 E, Fig. 3 F, quartz tuning-fork probe 5 is selected both arms quartz tuning-fork, K-3 × 8 or K-2 × 6 wire type crystal resonator that Kai Qing Dongguang, Beijing electronics corporation produces.End at the upper cantilever 5B of quartz tuning-fork probe 5 is provided with needle point 5D, and the tip of upper needle point 5D upwards, and the end of the lower cantalever 5C of quartz tuning-fork probe 5 is provided with lower needle point 5E, and the tip of lower needle point 5E is downward.The link 5A of quartz tuning-fork probe 5 is bonded on the bottom ceramic body 3B of piezoelectric ceramics tube scanner 3.
Needle point (upper needle point 5D, lower needle point 5E) can be designed to pyramidal structure.The end of needle point contacts with sample.Needle point material selection tungsten filament.
In the present invention, quartz tuning-fork probe 5 is for the pattern information of perception sample to be scanned, and this pattern information detects through feedback signal testing circuit 61, thereby pattern information is converted to electric signal.Adopt quartz tuning-fork probe to detect for probe excitation and deformation as power sensor, detection signal passes to feedback controller after the amplification of feedback signal testing circuit and demodulation, and feedback controller carrys out alignment error signal minimum as far as possible by adjusting in real time piezoelectric ceramic tube.
(7) feedback signal testing circuit 61
Shown in Fig. 5 B, in the present invention, feedback signal testing circuit 61 includes current conversion voltage cell, signal amplification unit and root mean square arithmetic element; The pattern information sensing current signal M exporting from quartz tuning-fork probe 5
5 enter 2 pin of U11 chip (OPA27 operational amplifier chip), pattern information sensing current signal M
5be connected pattern information sensing current signal M with 6 pin through resistance R 12
5be connected connect-5V of the 4 pin power supply of U11 chip, connect+5V of the 7 pin power supply of U11 chip, 6 pin output voltage signal VM of U11 chip with 6 pin through capacitor C 32
5.6 pin of U11 chip are connected with 2 pin of U12 chip (OPA27 operational amplifier chip) through resistance R 13.
Voltage signal VM
5be connected voltage signal VM with 6 pin through resistance R 13, capacitor C 33
5be connected with 6 pin through resistance R 13, resistance R 15,3 pin of U12 chip are through resistance R 14 ground connection, connect-5V of the 4 pin power supply of U12 chip, connect+5V of the 7 pin power supply of U12 chip, 6 pin output amplification voltage signal AM of U12 chip
5.6 pin of U12 chip are connected with 15 pin of U10 chip (AD637 root mean square direct current conversion chip).
1 foot meridian capacitor C20 ground connection of U10 chip, 1 pin of U10 chip is connected with 11 pin through variable resistor R16,3 pin, 4 pin ground connection, 6 pin are connected with 11 pin, 10 foot meridian capacitor C17 are connected with 11 pin, connect-5V of 12 pin power supply, connect+5V of 13 pin power supply, 15 pin are connected with 6 pin of U12 chip, and 16 pin are connected with AFM controller 1.
In the present invention, feedback signal testing circuit 61 first aspects are for receiving the pattern information of the sample to be scanned that quartz probe 5 sensitivities arrive; Second aspect be by sensitivity to the pattern information of sample to be scanned amplify, ask root-mean-square value, output pattern information electric signal D
61.
(8) scan control signal treatment circuit 62
In the present invention, scan control signal treatment circuit 62 includes X-axis part control circuit, Y-axis part control circuit and Z axis part control circuit.
Shown in Fig. 5 C, the X-axis signal X_IN of X-axis part control circuit AFM controller output is connected to 3 pin of U1A chip (OP470 four-way operational amplifier chip) through resistance R 8, 3 foot meridian capacitor C3 ground connection of U1A chip, 2 pin are through resistance R 5 ground connection, 2 pin are connected with 1 pin through resistance R 1, connect+15V of 4 pin power supply, 4 foot meridian capacitor C1 ground connection, connect-15V of 11 pin power supply, 11 foot meridian capacitor C6 ground connection, 1 pin is connected with 13 pin of U1D chip (OP470 four-way operational amplifier chip) through resistance R 6, 13 pin are connected with 14 pin through resistance R 4, 12 pin are through resistance R 9 ground connection, 14 pin are connected with 1 pin of U2 chip (PA240 high voltage operational amplifier chip) through resistance R 7, 1 pin is connected with 5 pin through resistance R 2, 2 pin are through resistance R 11 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C2 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C7 ground connection, 6 foot meridian capacitor C4 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 10, 1 pin pin of U1A chip is connected with 1 pin of U3 chip (PA240 high voltage operational amplifier chip) through resistance R 14,1 pin is connected with 5 pin through resistance R 12,2 pin are through resistance R 16 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C8 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C11 ground connection, 6 foot meridian capacitor C9 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 15.
Shown in Fig. 5 D, the Y-axis signal Y_IN of Y-axis part control circuit AFM controller output is connected to 5 pin of U1B chip (OP470 four-way operational amplifier chip) through resistance R 24, 5 foot meridian capacitor C13 ground connection of U1B chip, 6 pin are through resistance R 21 ground connection, 6 pin are connected with 7 pin through resistance R 17, 7 pin are connected with 9 pin of U1C chip (OP470 four-way operational amplifier chip) through resistance R 22, 9 pin are connected with 8 pin through resistance R 20, 10 pin are through resistance R 25 ground connection, 8 pin are connected with 1 pin of U4 chip (PA240 high voltage operational amplifier chip) through resistance R 23, 1 pin is connected with 5 pin through resistance R 18, 2 pin are through resistance R 27 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C12 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C16 ground connection, 6 foot meridian capacitor C14 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 26, 7 pin of U1B chip are connected with 1 pin of U5 chip (PA240 high voltage operational amplifier chip) through resistance R 30,1 pin is connected with 5 pin through resistance R 28,2 pin are through resistance R 32 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C17 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C20 ground connection, 6 foot meridian capacitor C18 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 31.
Shown in Fig. 5 E, Z axis part control circuit Z axis signal Z_IN is connected to 3 pin of U7 chip (OP37 operational amplifier chip) through resistance R 38, 2 pin are through resistance R 36 ground connection, 2 pin are connected with 6 pin through resistance R 33, connect+15V of 7 pin power supply, 7 foot meridian capacitor C21 ground connection, connect-15V of 4 pin power supply, 4 foot meridian capacitor C25 ground connection, 6 pin are connected with 1 pin of U6 chip (PA240 high voltage operational amplifier chip) through resistance R 37, 1 pin is connected with 5 pin through resistance R 34, 2 pin are through resistance R 40 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C22 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C26 ground connection, 6 foot meridian capacitor C23 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 39.
(9) stepper motor driving circuit
Shown in Fig. 5 A, stepper motor wire be connected to motor drive ic U14(A3967 stepper motor drive chip) 16, 21, 9, on 4 pin, connect after variable resistor R21+5V of the 1 pin power supply of motor drive ic U14, 1 pin is through variable resistor R21, resistance R 22 ground connection, 10 pin, 11 pin, 3 pin are connected with AFM controller 1, connect+5V of 22 pin power supply, 12 pin are connected with 2 pin of jumper terminal P2, 12 pin are through connect+5V of resistance R 23 power supply, 13 pin are connected with 4 pin of jumper terminal P2, 13 pin are through connect+5V of resistance R 24 power supply, 1 pin of jumper terminal P2 and 3 pin ground connection, 15 pin of motor drive ic U14 connect digitally, connect+5V of 24 pin power supply, 23 pin are through resistance R 17 ground connection, 23 foot meridian capacitor C2 ground connection, 2 pin are through resistance R 18 ground connection, 2 foot meridian capacitor C21 ground connection, 6 pin, 7 pin, 18 pin connect digitally, 19 pin ground connection, 8 pin connect digitally through resistance R 20, 17 pin connect digitally through resistance R 19, connect+15V of 5 pin power supply, 5 foot meridian capacitor C28 ground connection, 5 foot meridian capacitor C29 ground connection, connect+15V of 20 pin power supply, 20 foot meridian capacitor C28 ground connection, 20 foot meridian capacitor C29 ground connection, connect+5V of 14 pin power supply, 14 foot meridian capacitor C23 ground connection, 14 foot meridian capacitor C22 ground connection.
The installation of the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe of the present invention's design is closed and is: AFM controller 1 is connected with driving circuit, feedback signal testing circuit 61 and the scan control signal treatment circuit 62 of graphic alphanumeric display 2, piezoelectric ceramics tube scanner 3, stepper motor by cable respectively, realizes the transmission of electric signal;
Four angles of sample stage 4 bottoms are separately installed with rubber footing 41, and probe limit base 55 is installed on sample stage 4; Probe limit base 55 tops are circular mounting platforms 58, and piezoelectric ceramics tube scanner 3, displacement adjusting part are installed on circular mounting platform 58; Circuit install bin 52 is arranged on the top of circular mounting platform 58 by four support columns, the driving circuit of feedback signal testing circuit 61, scan control signal treatment circuit 62 and stepper motor is installed in circuit install bin 52.
The operating process of the imaging system of a kind of atomic force microscope based on quartz tuning-fork probe of the present invention's design is as follows:
1, check quartz tuning-fork probe 5, whether tip portion is lost;
2, sample is placed on to the correct position on sample stage 4;
3, coarse adjustment needle point displacement, the spacing between needle point and sample is at 0.5 centimetre to 1 centimetre, manual adjustments the first keeper 57A and the second keeper 57B;
4, turn on the power switch, make piezoelectric ceramics tube scanner 3 and driving member 53 enter duty;
5, open graphic alphanumeric display 2, the display interface (as shown in Figure 4) of application program for reference experiment, arranges range of scanned frequencies (19kHz is to 21kHz left and right), and frequency sweep obtains frequency sweep curve.
6, observe frequency sweep curve, frequency of operation is arranged on to the right side of the resonance peak of frequency sweep curve;
7, working point (being the reference value described in bistable state part, than little 1/3 left and right of current AD value) is set;
8, accurate adjustment needle point displacement, arranges the step-length of stepper motor, and needle point is contacted with sample;
9, piezoelectric ceramics tube scanner 3 starts scanning, obtains sample surfaces height shape appearance figure.
Claims (6)
1. an imaging system for the atomic force microscope based on quartz tuning-fork probe, this system includes AFM controller (1), graphic alphanumeric display (2), piezoelectric ceramics tube scanner (3), sample stage (4), quartz tuning-fork probe (5); It is characterized in that: also include feedback signal testing circuit (61), scan control signal treatment circuit (62) and displacement adjusting part;
Displacement adjusting part includes stepper motor (51), stepper motor driving circuit, circuit install bin (52), driving member (53), support member (54), probe limit base (55), the first keeper (57A), the second keeper (57B), circular mounting platform (58); Stepper motor driving circuit, feedback signal testing circuit (61), scan control signal treatment circuit (62) are installed in circuit install bin (52);
The first keeper (57A) includes the first leading screw (57A1), the first screw set (57A2), the first snap ring (57A3) and the first point contact ball body (57A4).It is upper that the first screw set (57A2) is socketed in the first leading screw (57A1), and the first snap ring (57A3) is threaded in the outside of the first screw set (57A2), has inserted the first point contact ball body (57A4) in the counter sink of the bottom of the first leading screw (57A1).The first screw set (57A2) is arranged in the first countersunk head through hole (55D) of probe limit base (55), and the first snap ring (57A3) is positioned at the below of circular mounting platform (58).
The second keeper (57B) includes the second leading screw (57B1), the second screw set (57B2), the second snap ring (57B3) and contacts spheroid (57B4) with second point.It is upper that the second screw set (57B2) is socketed in the second leading screw (57B1), and the second snap ring 57B3 is threaded in the outside of the second screw set (57B2), inserted second point contact spheroid (57B4) in the counter sink of the bottom of the second leading screw (57B1).The second screw set (57B2) is arranged in the second countersunk head through hole (55D) of probe limit base (55), and the second snap ring (57B3) is positioned at the below of circular mounting platform (58).
Circular mounting platform (58) is provided with the 4th countersunk head through hole (58A), the 5th countersunk head through hole (58B), view window (58C), the first positioning chamber (58D), the second positioning chamber (58F), threaded hole (58H).The center of the first positioning chamber (58D) is provided with the first through hole (58E).The center of the second positioning chamber (58F) is provided with the second through hole (58G).On view window (58C), glass is installed.The lower end of the outer sleeve (53A) in driving member (53) is installed in the first positioning chamber (58D), the 3rd screw set (53B) in driving member (53) is installed in first through hole (58E) of the first positioning chamber (58D).Piezoelectric ceramics tube scanner (3) is installed on the second positioning chamber (58F), and the output terminal of piezoelectric ceramics tube scanner (3) is connected with upper end ceramic body (3A) through after the second through hole (58G).The first screw set (57A2) in the first keeper (57A) is installed in the 4th countersunk head through hole (58A), the second screw set (57B2) in the second keeper (57B) is installed in the 5th countersunk head through hole (58B).On 4 threaded holes (58H), be connected with one end of support member (54).Driving member (53) is for driving the adjusting of circular mounting platform (58) in Z-direction.
Driving member (53) includes outer sleeve (53A), the 3rd screw set (53B), the 3rd snap ring (53C), thirdly contacts spheroid (53D), the 3rd leading screw (53E), inner sleeve (53F), pin (53G).
Leading screw (53E) is provided with leading screw section (53E1) and joint (53E2), the bottom of leading screw (53E) is provided with countersunk head circular hole, this countersunk head circular hole is for set-point contact spheroid (53D), leading screw section (53E1) is moved thereon for screw set (53B), joint (53E2) is provided with through hole (53E3), this through hole (53E3) passes for pin (53G), be placed in the first fluting (53F1) of inner sleeve (53F) through one end of the pin (53G) after through hole (53E3), be placed in the second fluting (53F2) of inner sleeve (53F) through the other end of the pin (53G) after through hole (53E3).
The upper end of inner sleeve (53F) is provided with counter sink and through hole, this counter sink is used for placing the output shaft of stepper motor (52), through hole is used for pressing closer nail (53H) and passes, the one end that presses closer nail (53H) holds out against on the output shaft of stepper motor (52), realizes the locking of the output shaft of inner sleeve (53F) and stepper motor (52) by pressing closer nail (53H).The cylindrical shell of inner sleeve (53F) is provided with the first fluting (53F1) and the second fluting (53F2), and the first fluting (53F1) is for placing one end of pin (53G), and the second fluting (53F2) is for placing the other end of pin (53G).
Probe limit base (55) is provided with the first blind hole (55A), the second blind hole (55B), the 3rd blind hole (55C), the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F), opening spacing hole (55G).The first blind hole (55A) is for placing the first keeper (57A), and the second blind hole (55B) is for placing the second keeper (57B), and the 3rd blind hole (55C) is for placing the thirdly contact spheroid (53D) of driving member (53).Opening spacing hole (55G) is located for inserting quartz tuning-fork probe (5), limits the range of movement of piezoelectric ceramics tube scanner (3) drive quartz tuning-fork probe (5) by opening spacing hole (55G).To place screw to realize the installation with sample stage (4) by probe limit base (55) at the first countersunk head through hole (55D), the second countersunk head through hole (55E), the 3rd countersunk head through hole (55F) respectively.
2. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, it is characterized in that: lift or put down circular mounting platform 58 by manual adjustments the first keeper 57A, the second keeper 57B, realize quartz tuning-fork probe 5 coarse adjustment at Z-direction top offset apart from sample 4A.By stepper motor 51 and driving member 53 coordinate lift or put down circular mounting platform 58, realize quartz tuning-fork probe 5 accurate adjustment at Z-direction top offset apart from sample 4A.
3. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, is characterized in that the circuit principle structure of feedback signal testing circuit 61 is: the pattern information sensing current signal M exporting from quartz tuning-fork probe 5
5enter 2 pin of U11 chip (OPA27 operational amplifier chip), pattern information sensing current signal M
5be connected pattern information sensing current signal M with 6 pin through resistance R 12
5be connected connect-5V of the 4 pin power supply of U11 chip, connect+5V of the 7 pin power supply of U11 chip, 6 pin output voltage signal VM of U11 chip with 6 pin through capacitor C 32
5.6 pin of U11 chip are connected with 2 pin of U12 chip (OPA27 operational amplifier chip) through resistance R 13.
Voltage signal VM
5be connected voltage signal VM with 6 pin through resistance R 13, capacitor C 33
5be connected with 6 pin through resistance R 13, resistance R 15,3 pin of U12 chip are through resistance R 14 ground connection, connect-5V of the 4 pin power supply of U12 chip, connect+5V of the 7 pin power supply of U12 chip, 6 pin output amplification voltage signal AM of U12 chip
5.6 pin of U12 chip are connected with 15 pin of U10 chip (AD637 root mean square direct current conversion chip).
1 foot meridian capacitor C20 ground connection of U10 chip, 1 pin of U10 chip is connected with 11 pin through variable resistor R16,3 pin, 4 pin ground connection, 6 pin are connected with 11 pin, 10 foot meridian capacitor C17 are connected with 11 pin, connect-5V of 12 pin power supply, connect+5V of 13 pin power supply, 15 pin are connected with 6 pin of U12 chip, and 16 pin are connected with AFM controller 1.
4. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, is characterized in that the circuit principle structure of scan control signal treatment circuit 62 is: include X-axis part control circuit, Y-axis part control circuit and Z axis part control circuit;
The X-axis signal X_IN of X-axis part control circuit AFM controller output is connected to 3 pin of U1A chip (OP470 four-way operational amplifier chip) through resistance R 8, 3 foot meridian capacitor C3 ground connection of U1A chip, 2 pin are through resistance R 5 ground connection, 2 pin are connected with 1 pin through resistance R 1, connect+15V of 4 pin power supply, 4 foot meridian capacitor C1 ground connection, connect-15V of 11 pin power supply, 11 foot meridian capacitor C6 ground connection, 1 pin is connected with 13 pin of U1D chip (OP470 four-way operational amplifier chip) through resistance R 6, 13 pin are connected with 14 pin through resistance R 4, 12 pin are through resistance R 9 ground connection, 14 pin are connected with 1 pin of U2 chip (PA240 high voltage operational amplifier chip) through resistance R 7, 1 pin is connected with 5 pin through resistance R 2, 2 pin are through resistance R 11 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C2 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C7 ground connection, 6 foot meridian capacitor C4 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 10, 1 pin pin of U1A chip is connected with 1 pin of U3 chip (PA240 high voltage operational amplifier chip) through resistance R 14,1 pin is connected with 5 pin through resistance R 12,2 pin are through resistance R 16 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C8 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C11 ground connection, 6 foot meridian capacitor C9 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 15.
The Y-axis signal Y_IN of Y-axis part control circuit AFM controller output is connected to 5 pin of U1B chip (OP470 four-way operational amplifier chip) through resistance R 24, 5 foot meridian capacitor C13 ground connection of U1B chip, 6 pin are through resistance R 21 ground connection, 6 pin are connected with 7 pin through resistance R 17, 7 pin are connected with 9 pin of U1C chip (OP470 four-way operational amplifier chip) through resistance R 22, 9 pin are connected with 8 pin through resistance R 20, 10 pin are through resistance R 25 ground connection, 8 pin are connected with 1 pin of U4 chip (PA240 high voltage operational amplifier chip) through resistance R 23, 1 pin is connected with 5 pin through resistance R 18, 2 pin are through resistance R 27 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C12 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C16 ground connection, 6 foot meridian capacitor C14 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 26, 7 pin of U1B chip are connected with 1 pin of U5 chip (PA240 high voltage operational amplifier chip) through resistance R 30,1 pin is connected with 5 pin through resistance R 28,2 pin are through resistance R 32 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C17 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C20 ground connection, 6 foot meridian capacitor C18 are connected with 7 pin, and 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 31.
Z axis part control circuit Z axis signal Z_IN is connected to 3 pin of U7 chip (OP37 operational amplifier chip) through resistance R 38, 2 pin are through resistance R 36 ground connection, 2 pin are connected with 6 pin through resistance R 33, connect+15V of 7 pin power supply, 7 foot meridian capacitor C21 ground connection, connect-15V of 4 pin power supply, 4 foot meridian capacitor C25 ground connection, 6 pin are connected with 1 pin of U6 chip (PA240 high voltage operational amplifier chip) through resistance R 37, 1 pin is connected with 5 pin through resistance R 34, 2 pin are through resistance R 40 ground connection, connect+150V of 3 pin power supply, 3 foot meridian capacitor C22 ground connection, connect-150V of 4 pin power supply, 4 foot meridian capacitor C26 ground connection, 6 foot meridian capacitor C23 are connected with 7 pin, 5 pin are connected on piezoelectric ceramics tube scanner after resistance R 39.
5. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, the circuit principle structure that it is characterized in that stepper motor driving circuit is: stepper motor wire be connected to motor drive ic U14(A3967 stepper motor drive chip) 16, 21, 9, on 4 pin, connect after variable resistor R21+5V of the 1 pin power supply of motor drive ic U14, 1 pin is through variable resistor R21, resistance R 22 ground connection, 10 pin, 11 pin, 3 pin are connected with AFM controller 1, connect+5V of 22 pin power supply, 12 pin are connected with 2 pin of jumper terminal P2, 12 pin are through connect+5V of resistance R 23 power supply, 13 pin are connected with 4 pin of jumper terminal P2, 13 pin are through connect+5V of resistance R 24 power supply, 1 pin of jumper terminal P2 and 3 pin ground connection, 15 pin of motor drive ic U14 connect digitally, connect+5V of 24 pin power supply, 23 pin are through resistance R 17 ground connection, 23 foot meridian capacitor C2 ground connection, 2 pin are through resistance R 18 ground connection, 2 foot meridian capacitor C21 ground connection, 6 pin, 7 pin, 18 pin connect digitally, 19 pin ground connection, 8 pin connect digitally through resistance R 20, 17 pin connect digitally through resistance R 19, connect+15V of 5 pin power supply, 5 foot meridian capacitor C28 ground connection, 5 foot meridian capacitor C29 ground connection, connect+15V of 20 pin power supply, 20 foot meridian capacitor C28 ground connection, 20 foot meridian capacitor C29 ground connection, connect+5V of 14 pin power supply, 14 foot meridian capacitor C23 ground connection, 14 foot meridian capacitor C22 ground connection.
6. the imaging system of the atomic force microscope based on quartz tuning-fork probe according to claim 1, it is characterized in that: adopt quartz tuning-fork probe to detect for probe excitation and deformation as power sensor, detection signal passes to feedback controller after the amplification of feedback signal testing circuit and demodulation, and feedback controller carrys out alignment error signal minimum as far as possible by adjusting in real time piezoelectric ceramic tube.
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