CN206740608U - A kind of positioning and clamping device for the detection of optical material sub-surface damage - Google Patents
A kind of positioning and clamping device for the detection of optical material sub-surface damage Download PDFInfo
- Publication number
- CN206740608U CN206740608U CN201720511323.6U CN201720511323U CN206740608U CN 206740608 U CN206740608 U CN 206740608U CN 201720511323 U CN201720511323 U CN 201720511323U CN 206740608 U CN206740608 U CN 206740608U
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- China
- Prior art keywords
- sample
- connecting rod
- detection
- housing
- optical material
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Abstract
A kind of positioning and clamping device for the detection of optical material sub-surface damage, including housing and connecting rod, housing are fixed on base, and housing both sides are provided with rectangular channel, and enclosure interior is provided with spring；Connecting rod is placed on spring through rectangular channel, and connecting rod one end is provided with pointer, and the other end is provided with sample chuck；Housing top surface is provided with screwed hole, and bolt depression bar is pressed on connecting rod by screwed hole.The position of corrosive liquid, the immersion depth of Control Assay and intrusion time are immersed by clamping screw adjusting sample, if being had the sample of dry corrosion step, is easy to sample sub-surface damage to detect.The corrosion sample obtained using the utility model, can obtain the surface topography of each corrosion period, and avoid repeated detection error, improve the precision of optical material sub-surface damage detection.
Description
Technical field
The utility model belongs to special fixture technical field, be related to it is a kind of for optical material sub-surface damage detection determine
Position clamping device.
Background technology
Optical material has been widely used in the fields such as laser technology, photoelectric communication, Aero-Space and national defense industry at present.
However, the surface of optical material and sub-surface quality restrict its use quality and life-span in the related art, especially sub- table
The presence of surface damage has a strong impact on the coating quality, laser damage threshold and key mechanics intensity of optical element.Therefore, sub-surface
The accurate detection of damage turns into the key of optical element not damaged processing.
Optical material sub-surface damage, which detects currently used technology, includes damaging detection technique and lossless decomposition skill
Art.Wherein, damage information is directly perceived, precision is higher and abundant in content because it has the advantages that to obtain for damaging detection technique, into
The necessary technology means of new sub-surface detection technique are damaged and verified for detection continuity.Damaging detection technique mainly includes
Section microscopy, angle polishing method (method containing MRF) and chemical method for etching.Section microscopy and angle polishing method can only
The depth of sub-surface Crack Damage layer is detected, and chemical method for etching can detect whole damage layer depth (including crackle layer and deformation
Layer).
Chemical method for etching is typically integrally to immerse sample in corrosive liquid, by the quality of sample in cooling water of units of measurement time or
Person's thickness change, the time of matrix is eroded to the flex point moment definition of corrosion rate, and then determine sub-surface damage depth.Should
Method is primarily present following three defects：(1) need high-precision step instrument or electronic analytical balance repeatedly to measure sample change, survey
Try less efficient and be easily introduced measurement error；(2) it is larger to corrode contact area, corrosive liquid concentration may be changed, and then influence
Measuring accuracy；(3) specimen surface pattern after corroding every time can not be kept.
Utility model content
In order to overcome the shortcomings of current method for chemially etching detection optical material sub-surface damage, the utility model provides
A kind of positioning and clamping device for the detection of optical material sub-surface damage.
Technical scheme is used by the utility model solves its technical problem：
A kind of positioning and clamping device for the detection of optical material sub-surface damage, including housing and connecting rod, housing are fixed
On base, housing both sides are provided with rectangular channel, and enclosure interior is provided with spring；Connecting rod is placed on spring through rectangular channel, connecting rod one
End is provided with pointer, and the other end is provided with sample chuck；Housing top surface is provided with screwed hole, and bolt depression bar is pressed in connecting rod by screwed hole
On.
Scale is provided with the rectangular channel of the housing both sides.
The connecting rod is provided with the blind hole for bolt depression bar.
The side of the sample chuck is provided with the hold-down bolt for being used for fixing sample.
The beneficial effects of the utility model are that the depth of corrosive liquid is immersed by bolt depression bar adjusting sample, is controlled simultaneously
The immersion depth of sample and intrusion time, and then multiple corrosion steps are obtained on specimen surface, test optical material sub-surface
Damage, while retain the surface topography of each corrosion period, multiple measurement error is avoided, improves measuring accuracy.
Brief description of the drawings
The utility model is further described with specific embodiment below in conjunction with the accompanying drawings：
Fig. 1 is the positioning and clamping apparatus structure schematic diagram of optical material sub-surface damage described in the utility model detection；
Fig. 2 is the examination obtained using the positioning and clamping device of optical material sub-surface damage described in the utility model detection
Sample surface texture schematic diagram；
Wherein：1st, bolt depression bar；2nd, housing；3rd, pointer；4th, spring；5th, base；6th, connecting rod；7th, sample chuck；8th, compress
Bolt；9th, sample；10th, corrosive liquid.
Embodiment
Such scheme is described further below in conjunction with specific embodiment.
Embodiment：Present embodiment describes it is a kind of for optical material sub-surface damage detection positioning and clamping device, such as
Shown in Fig. 1, including housing 2 and connecting rod 6, housing 2 are fixed on base 5, and the both sides of housing 2 are provided with rectangular channel, and the inside of housing 2 is provided with
Spring 4；Connecting rod 6 is placed on spring 4 through rectangular channel, and the one end of connecting rod 6 is provided with pointer 3, and the other end is provided with sample chuck 7；Housing 2
Top surface is provided with screwed hole, and bolt depression bar 1 is pressed on connecting rod 6 by screwed hole.Scale is provided with the rectangular channel of the both sides of housing 6.Even
Bar 6 is provided with the blind hole for being used for positioning depression bar.The side of sample chuck 7 is provided with the hold-down bolt 8 for being used for fixing sample.
Sample 9 is fixed in the sample chuck 7 by the hold-down bolt 8.First, adjusted and tried by hold-down bolt 1
The position of sample 9, it is flushed with the surface of corrosive liquid 10, and record the scale value, define and be worth on the basis of the value；Then, continue to adjust
Section hold-down bolt 1 makes sample 9 immerse certain depth in corrosive liquid 10, records now scale value, obtains immersion depth L, Ruo Ganshi
Between after unclamp hold-down bolt 1 and make sample away from the surface of corrosive liquid 10, take out sample 9 and be cleaned by ultrasonic and be dried in vacuo, and remember
Record intrusion time T；Finally, clamping sample 9 again, makes the depth of invasion of sample increase L, invades the time using identical, repeats
Above-mentioned steps；Finally give with the step-like corrosion sample that some width are L, corrosion sample surface texture is as shown in Fig. 2 take
Go out sample to observe for sub-surface damage.
Claims (4)
1. a kind of positioning and clamping device for the detection of optical material sub-surface damage, including housing and connecting rod, it is characterised in that
Housing is fixed on base, and housing both sides are provided with rectangular channel, and enclosure interior is provided with spring；Connecting rod is placed in spring through rectangular channel
On, connecting rod one end is provided with pointer, and the other end is provided with sample chuck；Housing top surface is provided with screwed hole, and bolt depression bar passes through screwed hole
It is pressed on connecting rod.
2. a kind of positioning and clamping device for the detection of optical material sub-surface damage according to claim 1, its feature
It is, scale is provided with the rectangular channel of the housing both sides.
3. a kind of positioning and clamping device for the detection of optical material sub-surface damage according to claim 1, its feature
It is, the connecting rod is provided with the blind hole for bolt depression bar.
4. a kind of positioning and clamping device for the detection of optical material sub-surface damage according to claim 1, its feature
It is, the side of the sample chuck is provided with the hold-down bolt for being used for fixing sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720511323.6U CN206740608U (en) | 2017-05-04 | 2017-05-04 | A kind of positioning and clamping device for the detection of optical material sub-surface damage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720511323.6U CN206740608U (en) | 2017-05-04 | 2017-05-04 | A kind of positioning and clamping device for the detection of optical material sub-surface damage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206740608U true CN206740608U (en) | 2017-12-12 |
Family
ID=60564953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720511323.6U Expired - Fee Related CN206740608U (en) | 2017-05-04 | 2017-05-04 | A kind of positioning and clamping device for the detection of optical material sub-surface damage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206740608U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115116881A (en) * | 2022-08-25 | 2022-09-27 | 西安奕斯伟材料科技有限公司 | Method and system for measuring depth of damaged layer on surface of wafer |
-
2017
- 2017-05-04 CN CN201720511323.6U patent/CN206740608U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115116881A (en) * | 2022-08-25 | 2022-09-27 | 西安奕斯伟材料科技有限公司 | Method and system for measuring depth of damaged layer on surface of wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171212 Termination date: 20180504 |