CN205619889U - Novel micro displacement sensor is measured to increment formula in turn - Google Patents
Novel micro displacement sensor is measured to increment formula in turn Download PDFInfo
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- CN205619889U CN205619889U CN201620460632.0U CN201620460632U CN205619889U CN 205619889 U CN205619889 U CN 205619889U CN 201620460632 U CN201620460632 U CN 201620460632U CN 205619889 U CN205619889 U CN 205619889U
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Abstract
The utility model discloses a novel micro displacement sensor is measured to increment formula in turn, including between laser beam, two speculums, photoelectric detector no. 1, photoelectric detector no. 2 and processing system. Utilize this sensor, constantly reflect among two speculums of a set of parallel arrangement through the laser beam, finally shine on two sets of photoelectric detector, change the interval of two speculums, can change the reflection path of laser beam promptly, three detection device on every photoelectric detector of group responds to the laser beam many times, processing system senses the inferior scalar sum sensitization order of laser beam according to every detection device of group and the interval processing between detection device obtains a detection range value, this detection range value is greater than two reflection mirror spacing's true change value far away, processing system can calculate two reflection mirror spacing's true change value through this detection range value, the sensor has the advantages of simple structure, measure reliably, the precision is higher, easily realize batch manufacture.
Description
Technical field
This utility model relates to Technology of Precision Measurement and instrument field, particularly to the novel alternately increment type of one
Measure micro-displacement sensor.
Background technology
Displacement transducer is a kind of conventional geometric sense sensor, at Aero-Space, commercial production, machine
Make and a lot of fields such as military science have and use widely.The metering system of displacement has a variety of, relatively
Thin tail sheep (such as less than 1cm) is generally with strain-type, inductance type, differential transformer type, eddy current type, Hall
Sensor detects, and inductosyn, grating, appearance grid, magnetic are commonly used in bigger displacement (such as larger than 1cm)
The sensing technologies such as grid are measured.Wherein grating sensor because of have easily realize digitized, precision height (divide at present
What resolution was the highest can reach nanoscale), capacity of resisting disturbance is strong, do not have artificial error in reading, easy for installation,
Use the advantages such as reliable, the industry such as machine tooling, instrumentation obtains increasingly extensive application.
Grating sensor refers to the sensor using grating Moire fringe principle to measure displacement.Grating is at one piece
The most parallel intensive groove on the optical glass chi of strip or metal scale, incisure density is 10～100
Lines per millimeter.The Moire fringe formed by grating has optical amplifier effect and an error average effect, thus energy
Improve certainty of measurement.
Grating sensor limits due to the physical arrangement of photoetching process, causes its certainty of measurement to be difficult to there is lifting again,
Cannot meet the demand of the highest certainty of measurement, in the urgent need to a kind of simple in construction of exploitation, precision is higher
Sensor.
Utility model content
The purpose of this utility model is: for prior art exist existing grating sensor due to photoetching work
The physical arrangement of skill limits, and causes its certainty of measurement to be difficult to there is lifting again, it is impossible to meet the highest measurement
The above-mentioned deficiency of demand of precision, it is provided that a kind of novel alternately increment type measures micro-displacement sensor and measuring method,
This sensor construction is simple, it is adaptable to the measurement of testee change in displacement, measures reliable, and precision is higher,
It is easily achieved batch micro operations.
To achieve these goals, the technical solution adopted in the utility model is:
A kind of novel alternately increment type measures micro-displacement sensor, including laser beam, stationary mirror, movement
Reflecting mirror, detection reflecting mirror, photodetector one, photodetector two and processing system, described smooth electrical resistivity survey
Survey device one and be provided with the exploring block one of constant spacing, exploring block two and exploring block three, described exploring block
Three are located at the optional position between described exploring block one and the straight line line of exploring block two, described smooth electrical resistivity survey
Survey device two and be provided with the exploring block four of constant spacing, exploring block five and exploring block six, described exploring block
Six are located at the optional position between described exploring block four and the straight line line of exploring block five, described fixing anti-
Penetrate mirror and mobile mirror be arranged in parallel and can relative movement, described stationary mirror and mobile mirror
One end described detection reflecting mirror, photodetector one and photodetector two are set, the other end arranges described
Laser beam, described detection reflecting mirror both sides are located at by described photodetector one and photodetector two, described sharp
Light beam incides on described stationary mirror, after described stationary mirror with mobile mirror alternating reflex
Inciding described detection reflecting mirror, described laser beam is reflexed to described photodetector by described detection reflecting mirror
One or photodetector two, and by described exploring block one, exploring block two, exploring block three, probe portion
Part four, exploring block five or exploring block six sense, and described processing system communicates to connect described photodetector
One and photodetector two, and be used for adding up described exploring block one, exploring block two, exploring block three,
Exploring block four, exploring block five and exploring block six sense the number of times of described laser beam and photosensitive order.
Owing to described exploring block one, exploring block two and exploring block three have fixing spacing, described detection
Parts four, exploring block five and exploring block six have fixing spacing, by described exploring block one, detection
Parts two, exploring block three, exploring block four, exploring block five and exploring block six sense described laser beam
Number of times, and judge that described mobile mirror is relative to described stationary mirror according to the photosensitive order of exploring block
The direction of motion, according to the direction of motion, institute's metering number is carried out plus-minus process.
As a kind of increment type displacement transducer, on described photodetector one (or photodetector two)
Described exploring block one (or exploring block two or exploring block three or exploring block four or detection
Parts five or exploring block six) first sense described laser beam, then and described laser beam is next time by institute
State exploring block one (or exploring block two or exploring block three or exploring block four or exploring block
Five or exploring block six) correspondence senses and is designated as an increment number, described processing system is according to described increment
Number and described exploring block one (or exploring block two or exploring block three or exploring block four or visit
Survey parts five or exploring block six) sensing number of times calculate and obtain described stationary mirror and mobile mirror
The probe value principal part of relative displacement, the most described processing system is by described photodetector one (or light electrical resistivity survey
Survey device two) as host computer detector, described photodetector two (or photodetector one) is as auxiliary
Calculating detector, described laser beam is finally detected parts sensing, this exploring block and described exploring block one
(or exploring block two or exploring block three or exploring block four or exploring block five or probe portion
Part six) distance as the auxiliary portion of probe value, described probe value principal part and the auxiliary portion of probe value constitute described fixing anti-
Penetrating the probe value of mirror and mobile mirror relative displacement, described processing system is according to described in described probe value correspondence
Stationary mirror and the true relative shift of mobile mirror.
The novel alternately increment type of one described in the utility model is used to measure micro-displacement sensor, by described
Laser beam constantly reflects among mobile mirror at one group of described stationary mirror be arrangeding in parallel, finally shines
It is mapped on two groups of photodetectors, changes the spacing of described stationary mirror and mobile mirror, i.e. can change
The reflection path of described laser beam, often three exploring blocks on group photodetector repeatedly sense described laser
Bundle, described processing system according to often organize exploring block sense the number of times of described laser beam and photosensitive order and
Spacing between exploring block processes and obtains a detection range value, and this detection range value is far longer than described solid
Determine the true change value of reflecting mirror and mobile mirror spacing, described processing system can by this detection away from
Distance values calculates the true change value of described stationary mirror and mobile mirror spacing, this sensor construction
Simply, during measurement, after fixing to described mobile mirror and testee connection, described testee occurs
During change in displacement, described stationary mirror can be made accordingly to produce change with the spacing of mobile mirror, pass through
Measure the spacing changing value of described stationary mirror and mobile mirror, described testee can be back-calculated to obtain
Shift value, it is applicable to the measurement of described testee change in displacement, measures reliable, and precision is higher, easily
In realizing batch micro operations.
Preferably, described exploring block three is located at the straight line line of described exploring block one and exploring block two
Midpoint, described exploring block six is located at the midpoint of the straight line line of described exploring block four and exploring block five.
Preferably, described mobile mirror is provided with the rigid connector for connecting testee, mobile described
Testee, drives described mobile mirror, changes the reflection path of described laser beam, described process system
System is according to described exploring block one, exploring block two, exploring block three, exploring block four, exploring block five
The number of times of described laser beam and photosensitive order, and described exploring block one, detection is sensed with exploring block six
The relevant spacing of parts two, exploring block three, exploring block four, exploring block five and exploring block six draws
One probe value, and calculate the displacement of corresponding described testee.
Use this structure to arrange, when described testee moves, drive connected described movement anti-
Penetrating mirror and produce movement simultaneously, change the spacing of described mobile mirror and stationary mirror, described movement is anti-
Penetrate the described laser beam before and after mirror is subjected to displacement and be irradiated to the reflection path on described stationary mirror not for the first time
Can change, the shift value of the most described mobile mirror of shift value of final described testee is reflected to photoelectricity
On detector, this frame mode changing described mobile mirror displacement can make described processing system
Processing Algorithm is simplified, and simplifies sensor construction, it is easy to manufacture and use simultaneously.
Preferably, described laser beam reflexes on described detection reflecting mirror through described stationary mirror, described spy
Surveying reflecting mirror to be reflexed on described photodetector one by described laser beam, described laser beam is anti-through described movement
Penetrating mirror and reflex on described detection reflecting mirror, described laser beam is reflexed to described photoelectricity by described detection reflecting mirror
On detector two.
Use this structure to arrange, it is possible to make described mobile mirror during being subjected to displacement, described photoelectricity
Detector one only measures the described laser beam of described stationary mirror reflection, and described photodetector two is only measured
The described laser beam of described mobile mirror reflection, it is to avoid described laser beam occurs reflection same with direct projection at edge
Time exist cause measurement interference.
Preferably, the lasing light emitter for launching described laser beam is also included.
As it is further preferred that also include housing, described lasing light emitter, stationary mirror, mobile mirror,
Detection reflecting mirror, photodetector one and photodetector two are respectively positioned in described housing, form read head,
Described read head is provided with installing hole or stickers.
Using this structure to arrange, described read head is easy to the parts with described testee or geo-stationary
Adaptation, clamping or stickup, easy disassembly.
Preferably, described mobile mirror is rigidly connected at least one connector, and described connector is rigid member,
Described connector stretches out outside described read head.
Preferably, described photodetector one also includes at least one exploring block seven, described exploring block seven
It is located at the optional position between described exploring block one and the straight line line of exploring block two, described electric explorer
Two also include that at least one exploring block eight, described exploring block eight are located at described exploring block four and probe portion
Optional position between the straight line line of part five.
This structure is used to arrange, since it is desired that judge the direction of displacement of described testee, photodetector
At least need three exploring blocks could distinguish the direction of displacement of described testee, institute simultaneously during measuring
State laser beam and eventually settle at described exploring block one and this closed interval of exploring block two or described probe portion
In part four and this closed interval of exploring block five, described exploring block one or exploring block two or exploring block three
Or after exploring block four or exploring block five or exploring block six sense described laser beam for the last time, described
The inspection of small quantity that laser beam moves again does not measures needs and ignores, at described exploring block one and exploring block two
At least one complementary described exploring block seven is set between straight line line, in described exploring block four and spy
Survey and between the straight line line of parts five, at least one complementary described exploring block eight is set, it is possible to refinement institute
State exploring block one and the surveying range of exploring block two and described exploring block four and the survey of exploring block five
Amount interval, the final negligible amount of described laser beam will be less, can improve institute's displacement sensors further
Certainty of measurement.
Preferably, described exploring block one, exploring block two, exploring block three, exploring block four, detection
Parts five, exploring block six, exploring block seven and exploring block eight are a kind of photosensitive photoelectric device,
Can measure and whether there is light.
Preferably, described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror, photodetection
The position of device one and photodetector two is the most adjustable.
Preferably, the range of institute's displacement sensors is 0-1mm.
This utility model additionally provides a kind of novel alternately increment type and measures the measuring method of micro-displacement sensor,
Including the displacement transducer as described in any of the above, its measuring method comprises the following steps:
A, testee is fixedly connected on described mobile mirror；
B, transmitting one laser beam, described laser beam is incident on described stationary mirror at a certain angle, false
If described angle of incidence is θ, described laser beam is after the continuous reflection of described stationary mirror and mobile mirror
It is irradiated on described detection reflecting mirror, and is reflected on described photodetector one or photodetector two；
C, mobile described testee, drive described mobile mirror to move simultaneously, the most described laser beam
Reflection path changes, and described laser beam is by the described exploring block one on described photodetector one, probe portion
Part two and exploring block three sense or by the described exploring block four on described photodetector two, probe portion
Part five and exploring block six sense, and when described testee stops mobile, described processing system adds up described spy
Survey parts one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six
Sense the spacing between the number of times of described laser beam and photosensitive order and each exploring block, draw described tested
The shift value of object and direction of displacement.
A kind of novel alternately increment type described in the utility model is used to measure the measurement side of micro-displacement sensor
Method, described mobile mirror is fixing connects described testee, and the position relationship of remaining part keeps constant,
Described laser beam, is then finally irradiated by multiple reflections with angle θ on described stationary mirror
On described photodetector one or photodetector two, mobile described testee, described laser beam anti-
Penetrate path change, when described testee stops mobile, described processing system according to described exploring block one,
Exploring block two, exploring block three, exploring block four, exploring block five and exploring block six sense described
Spacing between the number of times of laser beam and photosensitive order and each exploring block draws a detection range value and institute
Stating the direction of displacement of testee, this detection range value is far longer than described stationary mirror and mobile reflection
The true change value of mirror spacing, described processing system can calculate described solid by this detection range value
Determining the true change value of reflecting mirror and mobile mirror spacing, this measuring method is simple, reliable, easy to operate,
And displacement measurement accuracy can be improved, can be used for the increment type change in displacement of described testee is surveyed
Amount.
Preferably, carry out according to the counting sequence of described exploring block one, exploring block two and exploring block three
The judgement in measured displacement direction, if counting sequence is followed successively by described exploring block one, exploring block three and visits
Survey parts two, then measured displacement direction is the direction close to described stationary mirror, if counting sequence is successively
For described exploring block two, exploring block three and exploring block one, then measured displacement direction is away from described solid
Determine the direction of reflecting mirror.
Preferably, carry out according to the counting sequence of described exploring block four, exploring block five and exploring block six
The judgement in measured displacement direction, if counting sequence is followed successively by described exploring block four, exploring block six and visits
Survey parts five, then measured displacement direction is the direction close to described stationary mirror, if counting sequence is successively
For described exploring block five, exploring block six and exploring block four, then measured displacement direction is away from described solid
Determine the direction of reflecting mirror.
In sum, owing to have employed technique scheme, the beneficial effects of the utility model are:
1, the novel alternately increment type of one described in the utility model is used to measure micro-displacement sensor, by institute
State laser beam constantly to reflect among mobile mirror, finally at one group of described stationary mirror be arrangeding in parallel
It is irradiated on two groups of photodetectors, changes the spacing of described stationary mirror and mobile mirror, i.e. can change
Becoming the reflection path of described laser beam, often three exploring blocks on group photodetector repeatedly sense described sharp
Light beam, described processing system according to often group exploring block sense the number of times of described laser beam and photosensitive order with
And the spacing between exploring block processes and obtains a detection range value, this detection range value is far longer than described
Stationary mirror and the true change value of mobile mirror spacing, described processing system can be detected by this
Distance value calculates the true change value of described stationary mirror and mobile mirror spacing, and this sensor is tied
Structure is simple, and during measurement, after fixing to described mobile mirror and testee connection, described testee is sent out
During raw change in displacement, described stationary mirror can be made accordingly to produce change with the spacing of mobile mirror, logical
Cross the spacing changing value measuring described stationary mirror with mobile mirror, described measured object can be back-calculated to obtain
The shift value of body, it is applicable to the measurement of described testee change in displacement, measures reliable, and precision is higher,
It is easily achieved batch micro operations；
2, the novel alternately increment type of one described in the utility model is used to measure micro-displacement sensor, described shifting
Dynamic reflecting mirror is provided with the rigid connector for connecting testee, the feelings of the position relationship of remaining part
Under condition, make described testee be subjected to displacement, drive described mobile mirror to be subjected to displacement, use this knot
Structure is arranged, and when described testee moves, drives connected described mobile mirror to produce shifting simultaneously
Dynamic, change the spacing of described mobile mirror and stationary mirror, before described mobile mirror is subjected to displacement
After described laser beam be for the first time irradiated to the reflection path on described stationary mirror and will not change, final institute
The shift value of the most described mobile mirror of shift value stating testee is reflected on photodetector, this
Only changing the frame mode of described mobile mirror displacement can make the Processing Algorithm of described processing system simple
Change, simplify sensor construction, it is easy to manufacture and use simultaneously；
3, use the novel alternately increment type of one described in the utility model to measure micro-displacement sensor, also include
Housing, described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and
Photodetector two is respectively positioned in described housing, forms read head, and described read head is provided with installing hole or stickup
Part, uses this structure to arrange, and described read head is easy to the parts with described testee or geo-stationary
Adaptation, clamping or stickup, easy disassembly；
4, the novel alternately increment type of one described in the utility model is used to measure micro-displacement sensor, described light
Electric explorer one also includes that at least one exploring block seven, described exploring block seven are located at described exploring block one
And the optional position between the straight line line of exploring block two, described electric explorer two also includes that at least one is visited
Surveying parts eight, described exploring block eight is located between described exploring block four and the straight line line of exploring block five
Optional position, use this structure to arrange, since it is desired that judge the direction of displacement of described testee, light
Electric explorer at least needs three exploring blocks could distinguish the displacement side of described testee during measuring
To, the most described laser beam eventually settle at described exploring block one and this closed interval of exploring block two or
In described exploring block four and this closed interval of exploring block five, described exploring block one or exploring block two or
Exploring block three or exploring block four or exploring block five or exploring block six sense described laser for the last time
Shu Hou, the small quantity inspection that described laser beam moves again does not measures needs and ignores, in described exploring block one and spy
Survey, between the straight line line of parts two, at least one complementary described exploring block seven is set, in described detection
At least one complementary described exploring block eight is set between the straight line line of parts four and exploring block five,
Described exploring block one and the surveying range of exploring block two and described exploring block four and detection can be refined
The surveying range of parts five, the final negligible amount of described laser beam will be less, can improve institute's rheme further
The certainty of measurement of displacement sensor；
5, a kind of novel alternately increment type described in the utility model is used to measure the measurement side of micro-displacement sensor
Method, described mobile mirror is fixing connects described testee, and the position relationship of remaining part keeps constant,
Described laser beam, is then finally irradiated by multiple reflections with angle θ on described stationary mirror
On described photodetector one or photodetector two, mobile described testee, described laser beam anti-
Penetrate path change, when described testee stops mobile, described processing system according to described exploring block one,
Exploring block two, exploring block three, exploring block four, exploring block five and exploring block six sense described
Spacing between the number of times of laser beam and photosensitive order and each exploring block draws a detection range value and institute
Stating the direction of displacement of testee, this detection range value is far longer than described stationary mirror and mobile reflection
The true change value of mirror spacing, described processing system can calculate described solid by this detection range value
Determining the true change value of reflecting mirror and mobile mirror spacing, this measuring method is simple, reliable, easy to operate,
And displacement measurement accuracy can be improved, can be used for the increment type change in displacement of described testee is surveyed
Amount.
Accompanying drawing explanation
Fig. 1 is the principle side that a kind of novel alternately increment type described in the utility model measures micro-displacement sensor
View；
Fig. 2 is the structure side that a kind of novel alternately increment type described in the utility model measures micro-displacement sensor
View；
Fig. 3 is that a kind of novel alternately increment type described in the utility model is measured when micro-displacement sensor is measured
Side view.
Labelling in figure: 1-lasing light emitter, 11-laser beam, 2-stationary mirror, 3-mobile mirror, 31-connects
Part, 4-detects reflecting mirror, 5-photodetector one, 51-exploring block one, 52-exploring block two, and 53-detects
Parts three, 6-photodetector two, 61-exploring block four, 62-exploring block five, 63-exploring block six, 7-
Read head, 8-testee.
Detailed description of the invention
Below in conjunction with the accompanying drawings, this utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And embodiment, this utility model is further elaborated.Should be appreciated that described herein specifically
Embodiment, only in order to explain this utility model, is not used to limit this utility model.
Embodiment 1
As Figure 1-3, the novel alternately increment type of one described in the utility model measures micro-displacement sensor,
Including laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1,
Photodetector 26 and processing system.
Described photodetector 1 is provided with the exploring block 1 of constant spacing, exploring block 2 52 and detection
Parts 3 53, described exploring block 3 53 is located at described exploring block 1 and the straight line of exploring block 2 52
Optional position between line, described photodetector 26 is provided with the exploring block 4 61 of constant spacing, visits
Surveying parts 5 62 and exploring block 6 63, described exploring block 6 63 is located at described exploring block 4 61 and visits
Surveying the optional position between the straight line line of parts 5 62, described stationary mirror 2 is flat with mobile mirror 3
Row arrange and can relative movement, described stationary mirror 2 arranges described with one end of mobile mirror 3
Detection reflecting mirror 4, photodetector 1 and photodetector 26, the other end arranges described laser beam 11,
Described photodetector 1 and photodetector 26 are located at described detection reflecting mirror 4 both sides, described laser
Bundle 11 incides on described stationary mirror 2, through described stationary mirror 2 with mobile mirror 3 alternately
Inciding described detection reflecting mirror 4 after reflection, described laser beam 11 is reflexed to institute by described detection reflecting mirror 4
State photodetector 1 or photodetector 26, and by described exploring block 1, exploring block 2 52,
Exploring block 3 53, exploring block 4 61, exploring block 5 62 or exploring block 6 63 sensing, described place
Reason system communicates to connect described photodetector 1 and photodetector 26, and is used for adding up described probe portion
Part 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and spy
Survey parts 6 63 and sense the number of times of described laser beam 11 and photosensitive order.
Owing to described exploring block 1, exploring block 2 52 and exploring block 3 53 have fixing spacing,
Described exploring block 4 61, exploring block 5 62 and exploring block 6 63 have fixing spacing, by described
Exploring block 1, exploring block 2 52 and exploring block 3 53 sense the number of times of described laser beam 11, or
Exploring block 4 61, exploring block 5 62 and exploring block 6 63 described in person sense the secondary of described laser beam 11
Number, and judge the described the most described stationary mirror of mobile mirror 32 according to the photosensitive order of exploring block
The direction of motion, carries out plus-minus process according to the direction of motion to institute's metering number.
As a kind of increment type displacement transducer, described photodetector 1 (or photodetector 2 6)
On described exploring block 1 (or exploring block 2 52 or exploring block 3 53 or exploring block
4 61 or exploring block 5 62 or exploring block 6 63) first sense described laser beam 11, then
Described laser beam 11 is next time by described exploring block 1 (or exploring block 2 52 or exploring block
3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63) correspondence senses note
Being an increment number, described processing system is according to described increment number and described exploring block 1 (or detection
Parts 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or detection
Parts 6 63) sensing number of times calculate and obtain described stationary mirror 2 and mobile mirror 3 relative displacement
Probe value principal part, the most described processing system is by described photodetector 1 (or photodetector 2 6)
As host computer detector, described photodetector 26 (or photodetector 1) is visited as auxiliary calculating
Surveying device, described laser beam 11 is finally detected parts sensing, this exploring block and described exploring block 1
(or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62
Or exploring block 6 63) distance as the auxiliary portion of probe value, described probe value principal part and probe value auxiliary portion structure
Becoming the probe value of described stationary mirror 2 and mobile mirror 3 relative displacement, described processing system is according to institute
State the true relative shift of the corresponding described stationary mirror 2 of probe value and mobile mirror 3.
The novel alternately increment type of one described in the utility model is used to measure micro-displacement sensor, by described
Laser beam 11 constantly reflects among mobile mirror 3 at one group of described stationary mirror 2 be arrangeding in parallel,
Finally it is irradiated on two groups of photodetectors, changes the spacing of described stationary mirror 2 and mobile mirror 3,
I.e. can change the reflection path of described laser beam 11, often three exploring blocks on group photodetector are repeatedly felt
Answering described laser beam 11, described processing system senses the number of times of described laser beam 11 according to often group exploring block
With the spacing between photosensitive order and exploring block processes and obtains a detection range value, this detection range value
It is far longer than the true change value of described stationary mirror 2 and mobile mirror 3 spacing, described processing system
The true of described stationary mirror 2 and mobile mirror 3 spacing can be calculated by this detection range value
Real change value, this sensor construction is simple, during measurement, is fixed with testee by described mobile mirror 3
After connection, when described testee is subjected to displacement change, described stationary mirror 2 can be made accordingly with mobile
The spacing of reflecting mirror 3 produces change, by measuring the spacing of described stationary mirror 2 and mobile mirror 3
Changing value, can be back-calculated to obtain the shift value of described testee, and it is applicable to described testee displacement and becomes
The measurement changed, measures reliable, and precision is higher, it is easy to accomplish batch micro operations.
Embodiment 2
As Figure 1-3, the novel alternately increment type of one described in the utility model measure micro-displacement sensor with
And testee 8, described sensor includes laser beam 11, stationary mirror 2, mobile mirror 3, detection
Reflecting mirror 4, photodetector 1, photodetector 26 and processing system.
Described testee 8 is fixing connects described mobile mirror 3, and described photodetector 1 is provided with fixing
The exploring block 1 of spacing, exploring block 2 52 and exploring block 3 53, described exploring block 3 53 sets
Optional position between described exploring block 1 and the straight line line of exploring block 2 52, described photoelectricity
Detector 26 is provided with the exploring block 4 61 of constant spacing, exploring block 5 62 and exploring block 6 63,
Described exploring block 6 63 is located between described exploring block 4 61 and the straight line line of exploring block 5 62
Optional position, described stationary mirror 2 and mobile mirror 3 be arranged in parallel and can relative movement, institute
The one end stating stationary mirror 2 and mobile mirror 3 arranges described detection reflecting mirror 4, photodetector 1
With photodetector 26, the other end arranges described laser beam 11, described photodetector 1 and light electrical resistivity survey
Surveying device 26 and be located at described detection reflecting mirror 4 both sides, described laser beam 11 incides described stationary mirror 2
On, incide described detection reflecting mirror 4 through described stationary mirror 2 after mobile mirror 3 alternating reflex,
Described laser beam 11 is reflexed to described photodetector 1 or photodetector two by described detection reflecting mirror 4
6, and by described exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61,
Exploring block 5 62 or exploring block 6 63 sensing, described processing system communicates to connect described photodetector
One 5 and photodetector 26, and be used for adding up described exploring block 1, exploring block 2 52, detection
Parts 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense described laser beam 11
Number of times and photosensitive order, mobile described testee 8, drive described mobile mirror 3, change described
The reflection path of laser beam 11, described processing system according to described exploring block 1, exploring block 2 52,
Exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense described laser
The number of times of bundle 11 and described exploring block 1, exploring block 2 52, exploring block 3 53, probe portion
The relevant spacing of part 4 61, exploring block 5 62 and exploring block 6 63 draws a probe value, and calculates
The displacement of corresponding described testee 8.
The novel alternately increment type of one described in the utility model is used to measure micro-displacement sensor, described movement
Reflecting mirror 3 is fixing connects described testee 8, in the case of the position relationship of remaining part, makes described
Testee 8 is subjected to displacement, and drives described mobile mirror 3 to be subjected to displacement, uses this structure to arrange,
When described testee 8 moves, drive connected described mobile mirror 3 to produce movement simultaneously,
Changing the spacing of described mobile mirror 3 and stationary mirror 2, described mobile mirror 3 is subjected to displacement
The reflection path that described laser beam 11 front and back is irradiated on described stationary mirror 2 for the first time will not change,
The shift value of the most described mobile mirror of shift value 3 of final described testee 8 is reflected to photodetection
On device, this frame mode changing the displacement of described mobile mirror 3 can make the place of described processing system
Adjustment method is simplified, and simplifies sensor construction, it is easy to manufacture and use simultaneously.
Embodiment 3
As Figure 1-3, the novel alternately increment type of one described in the utility model measure micro-displacement sensor with
And testee 8, described sensor includes lasing light emitter 1, laser beam 11, stationary mirror 2, mobile reflection
Mirror 3, detection reflecting mirror 4, photodetector 1, photodetector 26 and processing system, also include shell
Body and connector 31.
Described laser beam 11 is obtained by lasing light emitter 1 transmitting, described lasing light emitter 1, stationary mirror 2, shifting
Dynamic reflecting mirror 3, detection reflecting mirror 4, photodetector 1 and photodetector 26 are respectively positioned on described housing
In, forming read head 7, described read head 7 is provided with installing hole or stickers, and described mobile mirror 3 connects
Described connector 31, described connector 31 is rigid member, and described connector 31 stretches out outside described read head 7
Portion connect described testee 8, described photodetector 1 be provided with constant spacing exploring block 1,
Exploring block 2 52 and exploring block 3 53, described exploring block 3 53 is located at described exploring block 1 He
Optional position between the straight line line of exploring block 2 52, described photodetector 26 is provided with constant spacing
Exploring block 4 61, exploring block 5 62 and exploring block 6 63, described exploring block 6 63 is located at institute
State the optional position between the straight line line of exploring block 4 61 and exploring block 5 62, described fixation reflex
Mirror 2 and mobile mirror 3 be arranged in parallel and can relative movement, described stationary mirror 2 is anti-with mobile
The one end penetrating mirror 3 arranges described detection reflecting mirror 4, photodetector 1 and photodetector 26, another
End arranges described laser beam 11, and it is anti-that described detection is located at by described photodetector 1 and photodetector 26
Penetrating mirror 4 both sides, described laser beam 11 incides on described stationary mirror 2, through described stationary mirror
2 incide described detection reflecting mirror 4 after mobile mirror 3 alternating reflex, and described detection reflecting mirror 4 is by institute
State laser beam 11 and reflex to described photodetector 1 or photodetector 26, and by described exploring block
One 51, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 or detection
Parts 6 63 sense, and described processing system communicates to connect described photodetector 1 and photodetector 26,
And be used for adding up described exploring block 1, exploring block 2 52, exploring block 3 53, exploring block four
61, exploring block 5 62 and exploring block 6 63 sense the number of times of described laser beam 11 and photosensitive order, move
Dynamic described testee 8, drives described mobile mirror 3, changes the reflection path of described laser beam 11,
Described processing system is according to described exploring block 1, exploring block 2 52, exploring block 3 53, probe portion
Part 4 61, exploring block 5 62 and exploring block 6 63 sense the number of times of described laser beam 11 and described spy
Survey parts 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62
Draw a probe value with the relevant spacing of exploring block 6 63, and calculate the position of corresponding described testee 8
Move.
Use the novel alternately increment type of one described in the utility model to measure micro-displacement sensor, also include shell
Body, described lasing light emitter 1, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector
1 and photodetector 26 be respectively positioned in described housing, formed read head 7, described read head 7 is provided with peace
Dress hole or stickers, uses this structure to arrange, described read head 7 be easy to described testee 8 or
The members fits of geo-stationary, clamping or stickup, easy disassembly；Described detection reflecting mirror 4, energy are set simultaneously
Enough making described mobile mirror 3 during being subjected to displacement, described photodetector 1 is only measured described solid
Determining the described laser beam 11 of reflecting mirror 2 reflection, described mobile mirror only measured by described photodetector 26
The described laser beam 11 of 3 reflections, it is to avoid described laser beam 11 occurs at edge to reflect to exist with direct projection to make simultaneously
The measurement interference become.
Embodiment 4
As Figure 1-3, the novel alternately increment type of one described in the utility model measure micro-displacement sensor with
And testee 8, described sensor includes lasing light emitter 1, laser beam 11, stationary mirror 2, mobile reflection
Mirror 3, detection reflecting mirror 4, photodetector 1, photodetector 26 and processing system, also include shell
Body and connector 31.
Difference from Example 3 is, described photodetector 1 also includes at least one exploring block
Seven, described exploring block seven is located between described exploring block 1 and the straight line line of exploring block 2 52
Optional position, described electric explorer 26 also includes at least one exploring block eight, described exploring block eight
It is located at the optional position between described exploring block 4 61 and the straight line line of exploring block 5 62.
As a kind of preferred version of the present embodiment, between described exploring block 3 53 and exploring block 1
It is provided with a described exploring block seven, between described exploring block 3 53 and exploring block 2 52, is provided with another
Individual described exploring block seven；A described spy it is provided with between described exploring block 6 63 and exploring block 4 61
Survey parts eight, between described exploring block 6 63 and exploring block 5 62, be provided with another described exploring block
Eight.
The novel alternately increment type of one described in the utility model is used to measure micro-displacement sensor, described photoelectricity
Detector 1 also includes that at least one exploring block seven, described exploring block seven are located at described exploring block one
Optional position between 51 and the straight line line of exploring block 2 52, described electric explorer 26 also includes at least
One exploring block eight, described exploring block eight is located at described exploring block 4 61 and exploring block 5 62
Optional position between straight line line, uses this structure to arrange, since it is desired that judge described testee 8
Direction of displacement, photodetector at least need three exploring blocks could measure during distinguish described tested
The direction of displacement of object 8, the most described laser beam 11 eventually settles at described exploring block 1 and detection
In this closed interval of parts 2 52 or described exploring block 4 61 and this closed interval of exploring block 5 62,
Described exploring block 1 or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or detection
After parts 5 62 or exploring block 6 63 sense described laser beam 11 for the last time, described laser beam 11
The small quantity inspection moved again does not measures needs and ignores, at described exploring block 1 and exploring block 2 52
At least one complementary described exploring block seven is set between straight line line, described exploring block 4 61 He
At least one complementary described exploring block eight is set between the straight line line of exploring block 5 62, it is possible to thin
Change described exploring block 1 and the surveying range of exploring block 2 52 and described exploring block 4 61 and visit
Surveying the surveying range of parts 5 62, the final negligible amount of described laser beam 11 will be less, can carry further
The certainty of measurement of high institute displacement sensors.
Embodiment 5
As Figure 1-3, a kind of novel alternately increment type described in the utility model measures micro-displacement sensor
Measuring method, including such as the displacement transducer in embodiment 4, its measuring method comprises the following steps:
A, testee 8 is fixedly connected on described mobile mirror 3；
B, transmitting one laser beam 11, described laser beam 11 is incident on described stationary mirror at a certain angle
On 2, it is assumed that described angle of incidence is θ, described laser beam 11 is through described stationary mirror 2 and mobile reflection
It is irradiated to after the continuous reflection of mirror 3 on described photodetector 1 or photodetector 26；
C, mobile described testee 8, drive described mobile mirror 3 to move, the most described laser simultaneously
The reflection path change of bundle 11, described laser beam 11 is by the described probe portion on described photodetector 1
Part 1, exploring block 2 52 and exploring block 3 53 sense or by described photodetector 26
Described exploring block 4 61, exploring block 5 62 and exploring block 6 63 sensing, described testee 8 stops
Time the most mobile, described processing system statistics described exploring block 1, exploring block 2 52, exploring block three
53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense the secondary of described laser beam 11
Spacing between several and photosensitive orders and each exploring block, draws shift value and the position of described testee 8
Move direction.
A kind of novel alternately increment type described in the utility model is used to measure the measurement side of micro-displacement sensor
Method, described mobile mirror 3 is fixing connects described testee 8, and the position relationship of remaining part keeps constant,
Described laser beam 11 on described stationary mirror 2, then passes through multiple reflections final with angle θ
It is irradiated on described photodetector 1 or photodetector 26, mobile described testee 8, described sharp
The reflection path change of light beam 11, when described testee 8 stops mobile, described processing system is according to described
Exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block five
62 and exploring block 6 63 sense between the number of times of described laser beam 11 and photosensitive order and each exploring block
Spacing draw a detection range value and the direction of displacement of described testee 8, this detection range value
It is far longer than the true change value of described stationary mirror 2 and mobile mirror 3 spacing, described processing system
The true of described stationary mirror 2 and mobile mirror 3 spacing can be calculated by this detection range value
Real change value, this measuring method is simple, reliable, easy to operate, and can improve displacement measurement accuracy,
Can be used for the increment type change in displacement of described testee 8 is measured.
As a kind of preferred version of the present embodiment, according to described exploring block 1, exploring block 2 52 and
The counting sequence of exploring block 3 53 carries out the judgement in measured displacement direction, if counting sequence is followed successively by described
Exploring block 1, exploring block 3 53 and exploring block 2 52, then measured displacement direction is close to described
The direction of stationary mirror 2, if counting sequence is followed successively by described exploring block 2 52, exploring block 3 53
With exploring block 1, then measured displacement direction is the direction away from described stationary mirror 2.
As a kind of preferred version of the present embodiment, according to described exploring block 4 61, exploring block 5 62 and
The counting sequence of exploring block 6 63 carries out the judgement in measured displacement direction, if counting sequence is followed successively by described
Exploring block 4 61, exploring block 6 63 and exploring block 5 62, then measured displacement direction is close to described
The direction of stationary mirror 2, if counting sequence is followed successively by described exploring block 5 62, exploring block 6 63
With exploring block 4 61, then measured displacement direction is the direction away from described stationary mirror 2.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model,
All any amendment, equivalent and improvement etc. made within spirit of the present utility model and principle, all should
Within being included in protection domain of the present utility model.
Claims (10)
1. a novel alternately increment type measures micro-displacement sensor, it is characterised in that include
Laser beam (11), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4), light electrical resistivity survey
Surveying device one (5), photodetector two (6) and processing system, described photodetector one (5) is provided with
The exploring block one (51) of constant spacing, exploring block two (52) and exploring block three (53), described
Exploring block three (53) is located at the straight line of described exploring block one (51) and exploring block two (52) even
Optional position between line, described photodetector two (6) is provided with the exploring block of constant spacing
Four (61), exploring block five (62) and exploring block six (63), described exploring block six (63) is located at
Optional position between described exploring block four (61) and the straight line line of exploring block five (62),
Described stationary mirror (2) and mobile mirror (3) be arranged in parallel and can relative movement, institute
The one end stating stationary mirror (2) and mobile mirror (3) arranges described detection reflecting mirror (4), light
Electric explorer one (5) and photodetector two (6), the other end arranges described laser beam (11), described
Photodetector one (5) and photodetector two (6) are located at described detection reflecting mirror (4) both sides, institute
State laser beam (11) and incide on described stationary mirror (2), through described stationary mirror (2)
With incide described detection reflecting mirror (4) after mobile mirror (3) alternating reflex, described detection is anti-
Penetrate mirror (4) and described laser beam (11) is reflexed to described photodetector one (5) or photodetector
Two (6), and by described exploring block one (51), exploring block two (52), exploring block three (53),
Exploring block four (61), exploring block five (62) or exploring block six (63) sensing, described process is
System communicates to connect described photodetector one (5) and photodetector two (6), and is used for adding up institute
State exploring block one (51), exploring block two (52), exploring block three (53), exploring block four (61),
Exploring block five (62) and exploring block six (63) sense the number of times of described laser beam (11) and photosensitive
Sequentially.
Displacement transducer the most according to claim 1, it is characterised in that described movement
Reflecting mirror (3) is provided with the rigid connector for connecting testee (8), mobile described measured object
Body (8), drives described mobile mirror (3), changes the reflection path of described laser beam (11),
Described processing system is according to described exploring block one (51), exploring block two (52), exploring block
Three (53), exploring block four (61), exploring block five (62) and exploring block six (63) sensing are described
The number of times of laser beam (11) and photosensitive order, and described exploring block one (51), exploring block
Two (52), exploring block three (53), exploring block four (61), exploring block five (62) and probe portion
The relevant spacing of part six (63) draws a probe value, and calculates corresponding described testee (8)
Displacement.
Displacement transducer the most according to claim 2, it is characterised in that described laser
Bundle (11) reflexes on described detection reflecting mirror (4) through described stationary mirror (2), and described detection is anti-
Penetrate mirror (4) to be reflexed to by described laser beam (11) on described photodetector one (5), described laser beam
(11) reflex on described detection reflecting mirror (4) through described mobile mirror (3), described detection reflection
Described laser beam (11) is reflexed on described photodetector two (6) by mirror (4).
Displacement transducer the most according to claim 2, it is characterised in that also include using
In the lasing light emitter (1) launching described laser beam (11).
Displacement transducer the most according to claim 4, it is characterised in that also include shell
Body, described lasing light emitter (1), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4),
Photodetector one (5) and photodetector two (6) are respectively positioned in described housing, form read head
(7)。
Displacement transducer the most according to claim 5, it is characterised in that described movement
Reflecting mirror (3) is rigidly connected at least one connector (31), and described connector (31) is rigid member,
It is outside that described connector (31) stretches out described read head (7).
Displacement transducer the most according to claim 1, it is characterised in that described photoelectricity
It is described that detector one (5) also includes that at least one exploring block seven, described exploring block seven are located at
Optional position between the straight line line of exploring block one (51) and exploring block two (52), described
Electric explorer two (6) also includes that at least one exploring block eight, described exploring block eight are located at institute
State the optional position between the straight line line of exploring block four (61) and exploring block five (62).
Displacement transducer the most according to claim 7, it is characterised in that described detection
Parts one (51), exploring block two (52), exploring block three (53), exploring block four (61), spy
It is a kind of right for surveying parts five (62), exploring block six (63), exploring block seven and exploring block eight
Light activated photoelectric device, can measure and whether there is light.
Displacement transducer the most according to claim 4, it is characterised in that described laser
Source (1), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4), photodetector
One (5) and the position of photodetector two (6) the most adjustable.
10. according to the arbitrary described displacement transducer of claim 1-9, it is characterised in that institute
The range of displacement sensors is 0-1mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620460632.0U CN205619889U (en) | 2016-05-19 | 2016-05-19 | Novel micro displacement sensor is measured to increment formula in turn |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783739A (en) * | 2016-05-19 | 2016-07-20 | 北方民族大学 | Novel alternative incremental sensor for measuring micrometric displacement and measuring method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783739A (en) * | 2016-05-19 | 2016-07-20 | 北方民族大学 | Novel alternative incremental sensor for measuring micrometric displacement and measuring method |
| CN105783739B (en) * | 2016-05-19 | 2019-02-26 | 北方民族大学 | A kind of measurement method of alternately increment type measurement micro-displacement sensor |
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