CN105910537A - Novel symmetric small measurement range displacement sensor and measuring method - Google Patents
Novel symmetric small measurement range displacement sensor and measuring method Download PDFInfo
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- CN105910537A CN105910537A CN201610513478.3A CN201610513478A CN105910537A CN 105910537 A CN105910537 A CN 105910537A CN 201610513478 A CN201610513478 A CN 201610513478A CN 105910537 A CN105910537 A CN 105910537A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention discloses a novel symmetric small measurement range displacement sensor and a measuring method. The sensor comprises a laser beam, a fixed reflecting mirror, a movable reflecting mirror, a double mirror, a photoelectric detector and a processing system. By applying the sensor, the laser beam is divided into two beams which are respectively reflected to one position on the photoelectric detector at a corresponding side, the space between the fixed reflecting mirror and the movable reflecting mirror is changed, then a reflection path of the laser beam can be changed, the laser beam is finally irradiated to another position of the corresponding photoelectric detector, the processing system calculates according to the two groups of two different positions and obtains two detection distance values which are much larger than real change value of the space between the fixed reflecting mirror and the movable reflecting mirror, and the processing system can calculate the real change value of the space between the fixed reflecting mirror and the movable reflecting mirror according to the average value of the two detection distance values. The sensor disclosed by the invention is simple in structure, applicable to measurement when displacement of an object is continuously changed, reliable in measurement and relatively high in accuracy, and batch manufacturing can be easily realized.
Description
Technical field
The present invention relates to a kind of Technology of Precision Measurement and instrument field, particularly to a kind of Novel symmetrical in a small amount
Journey displacement transducer and measuring method.
Background technology
Displacement transducer is a kind of conventional geometric sense sensor, at Aero-Space, commercial production, machine
Make and a lot of fields such as military science have and use widely.The metering system of displacement has a variety of, relatively
Thin tail sheep (such as less than 1cm) is generally with strain-type, inductance type, differential transformer type, eddy current type, Hall
Sensor detects, and inductosyn, grating, appearance grid, magnetic are commonly used in bigger displacement (such as larger than 1cm)
The sensing technologies such as grid are measured.Wherein grating sensor because of have easily realize digitized, precision height (divide at present
What resolution was the highest can reach nanoscale), capacity of resisting disturbance is strong, do not have artificial error in reading, easy for installation,
Use the advantages such as reliable, the industry such as machine tooling, instrumentation obtains increasingly extensive application.
Grating sensor refers to the sensor using grating Moire fringe principle to measure displacement.Grating is at one piece
The most parallel intensive groove on the optical glass chi of strip or metal scale, incisure density is 10～100
Lines per millimeter.The Moire fringe formed by grating has optical amplifier effect and an error average effect, thus energy
Improve certainty of measurement.
Grating sensor limits due to the physical arrangement of photoetching process, causes its certainty of measurement to be difficult to carry again
Rise, it is impossible to meet the demand of the highest certainty of measurement, in the urgent need to a kind of simple in construction of exploitation, precision
Higher sensor.
Summary of the invention
It is an object of the invention to overcome the existing grating sensor in the presence of prior art due to photoetching work
The physical arrangement of skill limits, and causes its certainty of measurement to be difficult to there is lifting again, it is impossible to meet the highest measurement
The above-mentioned deficiency of demand of precision, it is provided that a kind of Novel symmetrical small-range displacement transducer and measuring method, should
Sensor construction is simple, it is adaptable to testee displacement continually varying is measured, and measures reliable, and precision is higher,
It is easily achieved batch micro operations.
In order to realize foregoing invention purpose, the invention provides techniques below scheme:
A kind of Novel symmetrical small-range displacement transducer, including be arrangeding in parallel and the adjustable fixation reflex of spacing
Mirror and mobile mirror and processing system, described stationary mirror and mobile mirror two ends are symmetrical arranged two
Individual photodetector, is provided with double mirror between described stationary mirror and mobile mirror, described fixing anti-
Penetrating mirror and be provided with through hole, the one laser beam through described through hole incides described double mirror, by described double
Being separated into the two described laser beams of bundle after reflecting mirror reflection, two restraint described laser beam incides described stationary mirror
On, after described stationary mirror and mobile mirror alternating reflex, shine respectively described in corresponding side
On photodetector sensed, described processing system is used for processing each described photodetector and receives correspondence
The positional information of described laser beam.
Wherein, described double mirror uses existing structure, i.e. has two reflecting mirrors (primary mirror, secondary mirror) to form.
Using a kind of Novel symmetrical small-range displacement transducer of the present invention, described laser beam is described
It is divided into two bundle laser beams after double mirror reflection and reflexes to respectively on the described photodetector of corresponding side
One position, changes the spacing of described stationary mirror and mobile mirror, i.e. can change described laser beam
Reflection path, is finally irradiated to another position on the described photodetector of correspondence, described processing system root
Obtaining two groups of detection range values according to these two groups of different two position calculation, these two groups of detection range values are the biggest
In described stationary mirror and the true change value of mobile mirror spacing, described processing system can pass through this
Two groups of detection range values calculate two groups of shift values of described mobile mirror and average, and average with this
Being worth the shift value as described testee, this sensor construction is simple, it is adaptable to testee displacement is continuous
The measurement of change, measures reliable, and precision is higher, it is easy to accomplish batch micro operations.
Preferably, the range of institute's displacement sensors is 0-1um.
Preferably, described mobile mirror connects testee, mobile described testee, drives described shifting
Dynamic reflecting mirror, changes the reflection path of the two described laser beams of bundle, and described processing system is anti-according to described movement
The every Shu Suoshu laser beam sensing of two on corresponding described photodetector position respectively before and after penetrating mirror displacement
The spacing put, calculates two groups of shift values of described mobile mirror and averages, and making with this meansigma methods
Shift value for described testee.
Preferably, described photodetector uses a kind of photoelectric device to light spot position sensitivity, permissible
Measure the rectangle device of the one-dimensional coordinate of luminous point.Such as, photodetector may select one-dimensional linear light electrical resistivity survey
Survey device (abbreviation one-dimensional PSD), it is possible to be chosen to two dimensional surface photodetector (abbreviation Two-dimensional PSD).
Preferably, institute's displacement sensors also includes the lasing light emitter for launching described laser beam, described laser
Source is positioned at described stationary mirror side.
As it is further preferred that also include housing, described lasing light emitter, stationary mirror, mobile mirror,
Double mirror and two photodetectors are respectively positioned in described housing, form read head, and described read head is provided with
Installing hole or stickers.
Using this structure to arrange, described read head is easy to the parts with described testee or geo-stationary
Adaptation, clamping or stickup, easy disassembly.
Preferably, described mobile mirror connects at least one connector, and described connector is rigid member, institute
State connector to stretch out outside described read head.
Preferably, described lasing light emitter, stationary mirror, mobile mirror, double mirror and two light electrical resistivity surveys
The position surveying device is the most adjustable.
Preferably, described laser beam path is perpendicular to described stationary mirror and incides institute through described through hole
State on double mirror.
Present invention also offers the measuring method of a kind of Novel symmetrical small-range displacement transducer, including as with
Upper arbitrary described New Displacement Transducer, it is characterised in that its measuring method comprises the following steps:
A, described mobile mirror is connected on testee；
B, described laser beam incide on described double mirror through described through hole, formed two bundles from institute
Stating laser beam, every Shu Suoshu laser beam incides on described stationary mirror respectively, it is assumed that two restraint described laser
The angle of incidence of bundle is respectively θ and γ, and every Shu Suoshu laser beam is through described stationary mirror and mobile mirror
Continuous reflection after be irradiated to correspondence described photodetector on position one；
C, mobile described testee, driving described mobile mirror, displacement value is X, the most corresponding
The reflection path change of described laser beam, when described testee stops mobile, corresponding described laser beam
Incide position two on the described photodetector of correspondence；
D, described processing system according to position one described in two groups and distance values Y of position two and the value of Y ',
Calculate the value of two groups of corresponding displacement value X and X ' of described mobile mirror and average, to obtain final product
Value to the displacement value X of described testee.
Use the measuring method of a kind of Novel symmetrical small-range displacement transducer of the present invention, described shifting
Dynamic reflecting mirror connects described testee, and the position relationship of remaining part keeps constant, a branch of described laser beam
It is incident on described double mirror and is divided into the two described laser beams of bundle, then two restraint described laser beam by repeatedly
Reflection is respectively radiated to position one on the described photodetector of correspondence, and mobile described testee obtains described
Displacement value X, the reflection path change of every Shu Suoshu laser beam, when described testee stops mobile, often
Shu Suoshu laser beam irradiation is to position two on corresponding described photodetector, and described processing system is according to two groups
Two different described positions one and described distance values Y of position two and the value of Y ', be calculated described quilt
Survey the value of displacement value X described in two groups of object and average, and using this meansigma methods as described measured object
The shift value of body, simultaneously in described step c, the reflection path of described laser beam is at described photodetector
Above sweeping back and forth continuously, described photodetector detects sweeping interval, when described testee stops mobile,
Even if before and after displacement, described laser beam irradiation is parallel to the outgoing beam on described photodetector, described process
The described sweeping interval that system still can detect according to described photodetector, calculates described movement anti-
Penetrate the value of the described displacement value X of mirror, the value of the described displacement value X of the most described testee, this survey
Metering method is simple, reliable, easy to operate, and can improve displacement measurement accuracy, can be used for described quilt
Survey ohject displacement disposably to change or the measurement of continuous increment type change in displacement.
Preferably, in described step b or step c, the position of each described photodetector and length
Can be calculated by the incidence angle θ (γ) of corresponding described laser beam and obtain so that every Shu Suoshu laser beam exists
In the range of the reflection light of described stationary mirror marginal point is incident on the described photodetector measurement of correspondence,
To described position one or described position two, direct light is incident on outside described photodetector measurement scope, false
If described stationary mirror is L with the distance of symmetrically arranged two described photodetectors, the most described light
The length of electric explorer is equal to 2 × L/tan θ (2 × L/tan γ), for ensureing the anti-of described stationary mirror marginal point
In the range of penetrating the described photodetector measurement that light is incident on correspondence, direct light is incident on the described photoelectricity of correspondence
Outside detector measurement scope, i.e. anti-to incident illumination with described stationary mirror for symmetrical described photodetector
Penetrate direction and carry out micrometric displacement.
Preferably, in described step b, use the described double mirror that reflection angle is consistent, will incide
Its a branch of described laser beam reflexes to described in two of the two described laser beams of bundle on described stationary mirror
The value of incidence angle θ and γ is equal.
Preferably, when each described mobile mirror displacement value X in described step c keeps fixed value,
If distance values Y (Y ') needing corresponding described position one and position two is the biggest, by described step b
In the incident angle θ (γ) of each described laser beam turn down or increase all described stationary mirrors and shifting
The length of dynamic reflecting mirror.
Adopting in this way, the value of described incidence angle θ (γ) is the least or reflecting mirror (includes described fixing anti-
Penetrate mirror and mobile mirror) length is the longest, the probe value of the described displacement value X obtained, the most described spacing
The magnification level of value Y (Y ') is the biggest, and described processing system is according to the value of described distance values Y (Y ')
The precision of the value of calculated described displacement value X is higher.
In sum, owing to have employed technique scheme, the invention has the beneficial effects as follows:
1, a kind of Novel symmetrical small-range displacement transducer of the present invention, described laser beam quilt are used
It is divided into two bundle laser beams after the reflection of described double mirror and reflexes to the described photodetection of corresponding side respectively
A position on device, changes the spacing of described stationary mirror and mobile mirror, i.e. can change described laser
The reflection path of bundle, is finally irradiated to another position on the described photodetector of correspondence, described process system
System obtains two groups of detection range values according to these two groups of different two position calculation, and these two groups of detection range values are remote
Much larger than described stationary mirror and the true change value of mobile mirror spacing, described processing system can be led to
Cross these two groups of detection range values calculate two groups of shift values of described mobile mirror and average, and with this
Meansigma methods is as the shift value of described testee, and this sensor construction is simple, it is adaptable to testee displacement
Continually varying is measured, and measures reliable, and precision is higher, it is easy to accomplish batch micro operations；
2, use a kind of Novel symmetrical small-range displacement transducer of the present invention, also include housing,
Described lasing light emitter, stationary mirror, mobile mirror, double mirror and two photodetectors are respectively positioned on institute
Stating in housing, form read head, described read head is provided with installing hole or stickers, uses this structure to arrange,
Described read head is easy to and described testee or the members fits of geo-stationary, clamping or stickup, convenient
Dismounting；
3, the measuring method of a kind of Novel symmetrical small-range displacement transducer of the present invention, institute are used
Stating mobile mirror and connect described testee, the position relationship of remaining part keeps constant, a branch of described sharp
Light beam is incident on described double mirror and is divided into the two described laser beams of bundle, and then the two described laser beams of bundle pass through
Multiple reflections is respectively radiated to position one on the described photodetector of correspondence, and mobile described testee obtains
Described displacement value X, the reflection path change of every Shu Suoshu laser beam, when described testee stops mobile,
Every Shu Suoshu laser beam irradiation is to position two on corresponding described photodetector, and described processing system is according to two
Organize the described position one of different two and described distance values Y of position two and the value of Y ', be calculated described
The value of displacement value X described in two groups of testee is also averaged, and using this meansigma methods as described tested
The shift value of object, simultaneously in described step c, the reflection path of described laser beam is in described photodetection
Sweeping back and forth continuously on device, described photodetector detects sweeping interval, and described testee stops mobile
Time, even if described laser beam irradiation is parallel to the outgoing beam on described photodetector before and after displacement, described
The described sweeping interval that processing system still can detect according to described photodetector, calculates described shifting
The value of the described displacement value X of dynamic reflecting mirror, the value of the described displacement value X of the most described testee,
This measuring method is simple, reliable, easy to operate, and can improve displacement measurement accuracy, can be used for institute
State testee displacement disposably to change or the measurement of continuous increment type change in displacement；
4, the measuring method of a kind of Novel symmetrical small-range displacement transducer of the present invention is used,
The value of incidence angle θ (γ) described in described step b is the least or reflecting mirror (include described stationary mirror with
Mobile mirror) length is the longest, the probe value of the described displacement value X obtained, the most described distance values Y
The magnification level of (Y ') is the biggest, and described processing system calculates according to the value of described distance values Y (Y ')
The precision of the value of the described displacement value X obtained is higher.
Accompanying drawing explanation
Fig. 1 is the principle schematic of a kind of Novel symmetrical small-range displacement transducer of the present invention；
Fig. 2 is the partial enlarged drawing of Fig. 1；
Fig. 3 is the structural representation of a kind of Novel symmetrical small-range displacement transducer of the present invention；
Fig. 4 is schematic diagram during a kind of Novel symmetrical small-range displacement sensor of the present invention；
Fig. 5 be a kind of Novel symmetrical small-range displacement transducer photoelectric probe position of the present invention with
The schematic diagram of length.
Labelling in figure: 1-lasing light emitter, 11-laser beam, 111-position one, 112-position two, 2-fixation reflex
Mirror, 21-through hole, 3-mobile mirror, 31-connector, 4-photodetector, 5-read head, 6-measured object
Body, 7-double mirror.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, the present invention is described in further detail.But should be by
This is interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to below example, all real based on present invention institute
Existing technology belongs to the scope of the present invention.
Embodiment 1
As Figure 1-5, a kind of Novel symmetrical small-range displacement transducer of the present invention, including putting down
Row is arranged and the adjustable stationary mirror of spacing 2 and mobile mirror 3 and processing system.
Described stationary mirror 2 and mobile mirror 3 two ends are symmetrical arranged two photodetectors 4, described
Being provided with double mirror 7 between stationary mirror 2 and mobile mirror 3, described stationary mirror 2 is provided with
Through hole 21, the one laser beam 11 through described through hole 21 incides described double mirror 7, by described double
Being separated into the two described laser beams of bundle 11 after reflecting mirror 7 reflection, two restraint described laser beam 11 incides described solid
Determine on reflecting mirror 2, after described stationary mirror 2 and mobile mirror 3 alternating reflex, outgoing respectively
On photodetector 4 described in corresponding side sensed, described processing system is used for processing each described photoelectricity
Detector 4 receives the positional information of the described laser beam 11 of correspondence.
Wherein, described double mirror 7 uses existing structure, i.e. has two reflecting mirrors (primary mirror, secondary mirror) group
Become.
Use a kind of Novel symmetrical small-range displacement transducer of the present invention, described laser beam 11 quilt
It is divided into two bundle laser beams 11 after the reflection of described double mirror 7 and reflexes to the described photoelectricity of corresponding side respectively
A position on detector 4, changes described stationary mirror 2 and the spacing of mobile mirror 3, i.e. can change
Become the reflection path of described laser beam 11, be finally irradiated on the described photodetector 4 of correspondence another
Position, described processing system obtains two groups of detection range values according to these two groups of different two position calculation, this
Two groups of detection range values are far longer than the true change of described stationary mirror 2 and mobile mirror 3 spacing
Value, described processing system can calculate two groups of described mobile mirror 2 by these two groups of detection range values
Shift value is also averaged, and using this meansigma methods as the shift value of described testee, this sensor construction
Simply, it is adaptable to testee displacement continually varying is measured, measuring reliable, precision is higher, it is easy to accomplish
Batch micro operations.
Embodiment 2
As Figure 1-5, a kind of Novel symmetrical small-range displacement transducer of the present invention and tested
Object 6, described sensor includes be arrangeding in parallel and the adjustable stationary mirror of spacing 2 and mobile mirror 3,
Processing system and housing.
The present embodiment institute displacement sensors also includes the lasing light emitter 1 for launching described laser beam 11, described
Stationary mirror 2 and mobile mirror 3 two ends are symmetrical arranged two photodetectors 4, described fixation reflex
Being provided with double mirror 7 between mirror 2 and mobile mirror 3, described lasing light emitter 1 is positioned at described stationary mirror
2 sides, described stationary mirror 2 is provided with through hole 21, through the one laser beam 11 of described through hole 21
Inciding described double mirror 7, described double mirror 7 uses existing structure, i.e. has two reflecting mirrors (main
Mirror, secondary mirror) composition, it is separated into the two described laser beams of bundle 11, two bundle institutes after being reflected by described double mirror 7
State laser beam 11 and incide on described stationary mirror 2, through described stationary mirror 2 and mobile reflection
After mirror 3 alternating reflex, shine on photodetector 4 described in corresponding side sensed respectively, described process
System receives the positional information of corresponding described laser beam 11 for processing each described photodetector 4,
Described lasing light emitter 1, stationary mirror 2, mobile mirror 3, double mirror 7 and two photodetectors 4
Being respectively positioned in described housing, form read head 5, described read head 5 is provided with installing hole or stickers, described
Mobile mirror 3 connects a connector 31, and described connector 31 is rigid member, described connector 31
Stretch out described read head 5 outside and connect described testee 6, mobile described testee 6, drive institute
State mobile mirror 3, change the reflection path of each described laser beam 11 of correspondence, described processing system
According to Shu Suoshu laser beam 11 every before and after the displacement of described mobile mirror 3 respectively at corresponding described smooth electrical resistivity survey
The spacing of two sensed positions on survey device 4, calculates two groups of shift values of described mobile mirror 3 and takes
Meansigma methods, and using this meansigma methods as the shift value of described testee 6.
The position of each described photodetector 4 can be by the incidence angle θ of described laser beam 11 with length
(γ) acquisition is calculated so that described laser beam 11 is incident at the reflection light of described stationary mirror 2 marginal point
In the range of described photodetector 4 is measured, obtain described position 1 or described position 2 112,
Direct light is incident on described photodetector 4 and measures outside scope, and as shown in Figure 4, wherein incidence angle θ is equal to
Angle of incidence γ, described stationary mirror 2 is L with the distance of described photodetector 4, the most described smooth electrical resistivity survey
The length surveying device 4 is incident on equal to 2 × L/tan θ, the reflection light for described stationary mirror 2 marginal point of guarantee
In the range of described photodetector 4 is measured, direct light is incident on described photodetector 4 and measures outside scope,
I.e. carry out microbit for symmetrical described photodetector 4 to incident illumination reflection direction with described stationary mirror 2
Move.
Use a kind of Novel symmetrical small-range displacement transducer of the present invention, also include housing, described
Lasing light emitter 1, stationary mirror 2, mobile mirror 3, double mirror 7 and two equal positions of photodetector 4
In described housing, forming read head 5, described read head 5 is provided with installing hole or stickers, uses this
Structure is arranged, and described read head 5 is easy to and described testee 6 or the members fits of geo-stationary, card
Connect or paste, easy disassembly.
Embodiment 3
As Figure 1-5, a kind of Novel symmetrical small-range displacement transducer of the present invention, including putting down
Row is arranged and the adjustable stationary mirror of spacing 2 and mobile mirror 3 and processing system.
Being with the difference of embodiment 1, the center of described stationary mirror 2 is provided with through hole 21,
That is:
Described stationary mirror 2 and mobile mirror 3 two ends are symmetrical arranged two photodetectors 4, described
Being provided with double mirror 7 between stationary mirror 2 and mobile mirror 3, described stationary mirror 2 is with mobile
Reflecting mirror 3 Parallel Symmetric designs, and the center of described stationary mirror 2 is provided with through hole 21, through institute
The one laser beam 11 stating through hole 21 incides described double mirror 7, after being reflected by described double mirror 7
Being separated into the two described laser beams of bundle 11, two restraint described laser beam 11 incides on described stationary mirror 2,
After described stationary mirror 2 and mobile mirror 3 alternating reflex, shine respectively described in corresponding side
On photodetector 4 sensed, described processing system is used for processing each described photodetector 4 and receives
The positional information of corresponding described laser beam 11.
Wherein, described double mirror 7 uses existing structure, i.e. has two reflecting mirrors (primary mirror, secondary mirror) group
Become.
Use a kind of Novel symmetrical small-range displacement transducer of the present invention, described laser beam 11 quilt
It is divided into two bundle laser beams 11 after the reflection of described double mirror 7 and reflexes to the described photoelectricity of corresponding side respectively
A position on detector 4, changes described stationary mirror 2 and the spacing of mobile mirror 3, i.e. can change
Become the reflection path of described laser beam 11, be finally irradiated on the described photodetector 4 of correspondence another
Position, described processing system obtains two groups of detection range values according to these two groups of different two position calculation, this
Two groups of detection range values are far longer than the true change of described stationary mirror 2 and mobile mirror 3 spacing
Value, described processing system can calculate two groups of described mobile mirror 2 by these two groups of detection range values
Shift value is also averaged, and using this meansigma methods as the shift value of described testee, this sensor construction
Simply, it is adaptable to testee displacement continually varying is measured, measuring reliable, precision is higher, it is easy to accomplish
Batch micro operations.
Embodiment 4
As Figure 1-5, the measurement side of a kind of Novel symmetrical small-range displacement transducer of the present invention
Method, including the Novel symmetrical small-range displacement transducer as described in as arbitrary in embodiment 2 or 3, its measurement side
Method comprises the following steps:
A, described mobile mirror 3 is connected on testee 6；
B, described laser beam 11 incide on described double mirror 7 through described through hole 21, form two bundles
From described laser beam 11, every Shu Suoshu laser beam 11 incides on described stationary mirror 2 respectively,
Assuming that the angle of incidence of the two described laser beams 11 of bundle is respectively θ and γ, every Shu Suoshu laser beam 11 is through described
It is irradiated to after the continuous reflection of stationary mirror 2 and mobile mirror 3 on the described photodetector 4 of correspondence
Position 1；
C, mobile described testee 6, drive described mobile mirror 3, and displacement value is X, the most right
The reflection path change of the described laser beam 11 answered, when described testee 6 stops mobile, corresponding institute
State laser beam 11 and incide position 2 112 on the described photodetector 4 of correspondence；
D, described processing system are according to position 1 described in two groups and distance values Y of position 2 112 and Y '
Value, calculate the value of two groups of corresponding displacement value X and X ' of described mobile mirror 3 and be averaged
Value, i.e. obtains the value of the displacement value X of described testee 6.
As a preferred version of the present embodiment, in described step b or step c, each described light
The position of electric explorer 4 can be calculated by the incidence angle θ (γ) of corresponding described laser beam 11 with length
Obtain so that it is right that every Shu Suoshu laser beam 11 is incident at the reflection light of described stationary mirror 2 marginal point
In the range of the described photodetector 4 answered is measured, obtain described position one or described position two, direct light
It is incident on described photodetector 4 and measures outside scope, it is assumed that described stationary mirror 2 is with symmetrically arranged two
The distance of individual described photodetector 4 is L, and the length of the most described photodetector 4 is equal to 2 × L/tan θ
(2 × L/tan γ), for ensureing that the reflection light of described stationary mirror 2 marginal point is incident on the described photoelectricity of correspondence
In the range of detector 4 is measured, direct light is incident on the described photodetector 4 of correspondence and measures outside scope, i.e.
Microbit is carried out for symmetrical described photodetector 4 to incident illumination reflection direction with described stationary mirror 2
Move.
As a preferred version of the present embodiment, in described step b, use the institute that reflection angle is consistent
State double mirror 7, a branch of described laser beam 11 inciding it is reflexed on described stationary mirror 2
The value of two two the described incidence angle θs restrainting described laser beam 11 and γ is equal.
As a preferred version of the present embodiment, when each described mobile mirror 3 in described step c
When displacement value X keeps fixed value, if needed between corresponding described position 1 and position 2 112
The biggest, by the incident angle θ (γ) of each described laser beam 11 in described step b away from value Y (Y ')
Turn down or increase all described stationary mirrors 2 and the length of mobile mirror 3, adopting in this way,
The value of described incidence angle θ (γ) is the least or reflecting mirror (includes described stationary mirror 2 and mobile mirror
3) length is the longest, the probe value of the described displacement value X obtained, the most described distance values Y (Y ')
Magnification level is the biggest, and described processing system is calculated described according to the value of described distance values Y (Y ')
The precision of the value of displacement value X is higher.
Use the measuring method of a kind of Novel symmetrical small-range displacement transducer of the present invention, described shifting
Dynamic reflecting mirror 3 connects described testee 6, and the position relationship of remaining part keeps constant, a branch of described sharp
Light beam 11 is incident on described double mirror 7 and is divided into the two described laser beams of bundle 11, and then two bundles are described swashs
Light beam 11 is respectively radiated to position 1 on the described photodetector 4 of correspondence by multiple reflections, mobile
Described testee 6 obtains described displacement value X, the reflection path change of every Shu Suoshu laser beam 11,
When described testee 6 stops mobile, every Shu Suoshu laser beam 11 is irradiated to the described photodetection of correspondence
Position 2 112 on device 4, described processing system is according to two groups of described positions of different two 1 and position
Described distance values Y of 2 112 and the value of Y ', be calculated displacement described in two groups of described testee 6
The value of value X is also averaged, and using this meansigma methods as the shift value of described testee 6, exists simultaneously
In described step c, the reflection path of described laser beam 11 carrys out flyback on described photodetector 4 continuously
Dynamic, described photodetector 4 detects sweeping interval, when described testee 6 stops mobile, even if position
The outgoing beam that after lead, described laser beam 11 is irradiated on described photodetector 4 is parallel, described process
The described sweeping interval that system still can detect according to described photodetector 4, calculates described movement
The value of the described displacement value X of reflecting mirror 3, the value of the described displacement value X of the most described testee 6,
This measuring method is simple, reliable, easy to operate, and can improve displacement measurement accuracy, can be used for institute
State testee 6 displacement disposably to change or the measurement of continuous increment type change in displacement.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all at this
Any amendment, equivalent and the improvement etc. made within bright spirit and principle, should be included in the present invention
Protection domain within.
Claims (10)
1. a Novel symmetrical small-range displacement transducer, it is characterised in that include parallel
Arrange and the adjustable stationary mirror of spacing (2) and mobile mirror (3) and processing system, institute
State stationary mirror (2) and mobile mirror (3) two ends be symmetrical arranged two photodetectors (4),
Double mirror (7) it is provided with between described stationary mirror (2) and mobile mirror (3), described fixing
Reflecting mirror (2) is provided with through hole (21), and the one laser beam (11) through described through hole (21) incides
Described double mirror (7), is separated into the two described laser beams of bundle after being reflected by described double mirror (7)
(11), the two described laser beam of bundles (11) incide on described stationary mirror (2), through described solid
After determining reflecting mirror (2) and mobile mirror (3) alternating reflex, shine respectively described in corresponding side
Photodetector (4) is upper sensed, and described processing system is used for processing each described photodetection
Device (4) receives the positional information of the described laser beam (11) of correspondence.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 1,
It is characterized in that, described mobile mirror (3) connects testee (6), mobile described measured object
Body (6), drives described mobile mirror (3), changes the reflex circuit of the described laser beam of two bundle (11)
Footpath, described processing system is according to Shu Suoshu laser beam every before and after described mobile mirror (3) displacement
(11) spacing of two sensed positions on corresponding described photodetector (4) respectively, calculates
Go out two groups of shift values of described mobile mirror (3) and average, and using this meansigma methods as
The shift value of described testee (6).
A kind of Novel symmetrical small-range displacement transducer the most according to claim 2,
It is characterized in that, also include the lasing light emitter (1) for launching described laser beam (11), described laser
Source (1) is positioned at described stationary mirror (2) side.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 3,
It is characterized in that, also including housing, described lasing light emitter (1), stationary mirror (2), movement are instead
Penetrate mirror (3), double mirror (7) and two photodetectors (4) to be respectively positioned in described housing, formed
Read head (5).
A kind of Novel symmetrical small-range displacement transducer the most according to claim 4,
It is characterized in that, described mobile mirror (3) connects at least one connector (31), described connection
Part (31) is rigid member, and it is outside that described connector (31) stretches out described read head (5).
A kind of Novel symmetrical small-range displacement transducer the most according to claim 4,
It is characterized in that, described lasing light emitter (1), stationary mirror (2), mobile mirror (3), double instead
The position penetrating mirror (7) and two photodetectors (4) is the most adjustable.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 1,
It is characterized in that, described laser beam (11) path orthogonal is in described stationary mirror (2) and through institute
State through hole (21) to incide on described double mirror (7).
8. a measuring method for Novel symmetrical small-range displacement transducer, including such as right
Require the arbitrary described New Displacement Transducer of 2-7, it is characterised in that its measuring method includes
Following steps:
A, described mobile mirror (3) is connected on testee (6)；
B, described laser beam (11) incide on described double mirror (7) through described through hole (21),
Formed two bundle from described laser beam (11), every Shu Suoshu laser beam (11) incides institute respectively
State on stationary mirror (2), it is assumed that two angle of incidence restrainting described laser beam (11) are respectively θ and γ,
Every Shu Suoshu laser beam (11) is continuous through described stationary mirror (2) and mobile mirror (3)
The upper position one (111) of described photodetector (4) of correspondence it is irradiated to after reflection；
C, mobile described testee (6), drive described mobile mirror (3), and displacement value is
X, the reflection path change of the most corresponding described laser beam (11), described testee (6) stops
Time the most mobile, corresponding described laser beam (11) incides on the described photodetector (4) of correspondence
Position two (112)；
D, described processing system are according to position described in two groups (111) and the spacing of position two (112)
The value of value Y and Y ', calculates two groups of corresponding displacement values of described mobile mirror (3)
The value of X and X ' is also averaged, and i.e. obtains the displacement value X's of described testee (6)
Value.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 8
Measuring method, it is characterised in that in described step b or step c, each described photoelectricity
The position of detector (4) can be by the angle of incidence meter of corresponding described laser beam (11) with length
Calculate and obtain so that every Shu Suoshu laser beam (11) is in the reflection of described stationary mirror (2) marginal point
In the range of light is incident on described photodetector (4) measurement of correspondence, obtain described position one (111)
Or described position two (112), direct light is incident on outside described photodetector (4) measurement scope.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 8
Measuring method, it is characterised in that in described step b, uses consistent described of reflection angle
Double mirror (7), reflexes to described fixation reflex by a branch of described laser beam (11) inciding it
Two described incidence angle θs of the two described laser beam of bundles (11) on mirror (2) and the value of γ are equal.
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| CN105910537B (en) | 2018-08-10 |
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Effective date of registration: 20191227 Address after: 225800, No. 6, No. 5, Anyi Industrial Park, Baoying County, Jiangsu, Yangzhou Patentee after: JIANGSU QIHAO PRECISION MACHINERY Co.,Ltd. Address before: 750021 No. 204, Wenchang North Street, Xixia District, the Ningxia Hui Autonomous Region, Yinchuan Patentee before: BEIFANG MINZU University |
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Address after: 225800 No.5 No.6 workshop, Anyi Industrial Park, Baoying County, Yangzhou City, Jiangsu Province Patentee after: Qihao Precision Machinery (Yangzhou) Co.,Ltd. Address before: 225800 No.5 No.6 workshop, Anyi Industrial Park, Baoying County, Yangzhou City, Jiangsu Province Patentee before: JIANGSU QIHAO PRECISION MACHINERY Co.,Ltd. |