CN105783739B - A kind of measurement method of alternately increment type measurement micro-displacement sensor - Google Patents
A kind of measurement method of alternately increment type measurement micro-displacement sensor Download PDFInfo
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- CN105783739B CN105783739B CN201610335155.XA CN201610335155A CN105783739B CN 105783739 B CN105783739 B CN 105783739B CN 201610335155 A CN201610335155 A CN 201610335155A CN 105783739 B CN105783739 B CN 105783739B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of measurement method of alternately increment type measurement micro-displacement sensor, which includes laser beam, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one, photodetector two and processing system.With the sensor, detection reflecting mirror is constantly reflected among stationary mirror disposed in parallel and mobile mirror by laser beam, finally it is irradiated on two groups of photodetectors, change the spacing of stationary mirror and mobile mirror, the reflection path of laser beam can be changed, three exploring blocks on every group of photodetector repeatedly incude laser beam, processing system senses that the spacing between the number of laser beam and photosensitive sequence and exploring block handles to obtain a detection range value according to every group of exploring block, processing system can calculate the true change value of stationary mirror Yu mobile mirror spacing by this detection range value, the sensor structure is simple, measurement is reliable, precision is higher, it is easily achieved batch micro operations.
Description
Technical field
The present invention relates to Technology of Precision Measurement and instrument field, in particular to a kind of alternately increment type measures micro-displacement sensing
Device and measurement method.
Background technique
Displacement sensor is a kind of common geometry quantity sensor, in aerospace, industrial production, machine-building and army
Thing science etc. has extensive use in many fields.There are many kinds of the measurement methods of displacement, logical compared with thin tail sheep (such as less than 1cm)
Strain-type, inductance type, differential transformer type, eddy current type, Hall sensor are commonly used to detect, biggish displacement (such as larger than 1cm)
The sensing technologies such as inductosyn, grating, capacitive grating, magnetic grid are commonly used to measure.Wherein grating sensor easily realizes number because having
Change, precision high (resolution ratio is highest at present can reach nanoscale), strong antijamming capability, there is no artificial error in reading, installation side
Just, using it is reliable the advantages that, obtain increasingly extensive application in machine tooling, the detection industries such as instrument.
Grating sensor refers to the sensor using the measurement displacement of grating Moire fringe principle.Grating is in one piece of strip
Optical glass ruler or metal scale on intensive equidistant parallel groove, incisure density is 10~100 lines per millimeters.By grating shape
At Moire fringe there is optical amplifier effect and error average effect, thus measurement accuracy can be improved.
Grating sensor causes its measurement accuracy to be difficult have promotion again since the physical structure of photoetching process limits, can not
The demand for meeting higher and higher measurement accuracy, there is an urgent need to develop a kind of structure is simple, the higher sensor of precision.
Summary of the invention
It is an object of the invention to: for existing grating sensor of the existing technology due to the physics knot of photoetching process
Structure limitation, causes its measurement accuracy to be difficult have promotion again, is unable to satisfy the above-mentioned deficiency of demand of higher and higher measurement accuracy, mentions
For a kind of alternately increment type measurement micro-displacement sensor and measurement method, the sensor structure is simple, is suitable for measured object position
The measurement of variation is moved, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations.
To achieve the goals above, the technical solution adopted by the present invention are as follows:
A kind of alternately increment type measurement micro-displacement sensor, including laser beam, stationary mirror, mobile mirror, detection
Reflecting mirror, photodetector one, photodetector two and processing system, the photodetector one are equipped with the detection of constant spacing
Component one, exploring block two and exploring block three, the exploring block three are set to the exploring block one and exploring block two
Any position between straight line line, the photodetector two are equipped with exploring block four, five and of exploring block of constant spacing
Exploring block six, the exploring block six are set to any position between the exploring block four and the straight line line of exploring block five
It sets, the stationary mirror is arranged in parallel with mobile mirror and can relatively move, and the stationary mirror and movement are anti-
The detection reflecting mirror, photodetector one and photodetector two is arranged in the one end for penetrating mirror, and the laser beam is arranged in the other end,
The photodetector one and photodetector two are set to the detection reflecting mirror two sides, and the laser beam is incident on the fixation
On reflecting mirror, the detection reflecting mirror, the spy are incident on after the stationary mirror and mobile mirror alternating reflex
Survey reflecting mirror and the laser beam be reflected into the photodetector one or photodetector two, and by the exploring block one,
Exploring block two, exploring block three, exploring block four, exploring block five or exploring block six incude, the processing system communication
The photodetector one and photodetector two are connected, and for counting the exploring block one, exploring block two, probe portion
Part three, exploring block four, exploring block five and exploring block six incude the laser beam number and photosensitive sequence.
Since the exploring block one, exploring block two and exploring block three have a fixed spacing, the exploring block four,
Exploring block five and exploring block six have fixed spacing, by the exploring block one, exploring block two, exploring block three,
Exploring block four, exploring block five and exploring block six incude the number of the laser beam, and according to the photosensitive sequence of exploring block
Judge the direction of motion of the mobile mirror relative to the stationary mirror, institute's metering number is added according to the direction of motion
Subtract processing.
A kind of spy as increment type displacement sensor, on the photodetector one (or photodetector two)
Survey component one (either exploring block two or exploring block three or exploring block four or exploring block five or exploring block
Six) sense the laser beam first, then the laser beam next time by the exploring block one (or exploring block two or
Person's exploring block three or exploring block four or exploring block five or exploring block six) corresponding sense be denoted as an increment
Number, the processing system according to the incremental number and the exploring block one (either exploring block two or exploring block three or
Person's exploring block four or exploring block five or exploring block six) induction number calculate and obtain the stationary mirror and move
The probe value principal part of dynamic reflecting mirror relative displacement, while the processing system is by (or the photodetection of the photodetector one
Device two) it is used as host computer detector, the photodetector two (or photodetector one) is used as auxiliary calculating detector, described
Laser beam is finally detected component induction, the exploring block and exploring block one (either exploring block two or the probe portion
Part three or exploring block four or exploring block five or exploring block six) distance as the auxiliary portion of probe value, the detection
Value principal part and the auxiliary portion of probe value constitute the probe value of the stationary mirror Yu mobile mirror relative displacement, the processing system
The true relative shift of the stationary mirror and mobile mirror is corresponded to according to the probe value.
It is flat at one group by the laser beam using a kind of alternately increment type measurement micro-displacement sensor of the present invention
The stationary mirror of row setting is constantly reflected among mobile mirror, is finally irradiated on two groups of photodetectors, is changed
Become the spacing of the stationary mirror and mobile mirror, i.e., can change the reflection path of the laser beam, every group of photodetection
Three exploring blocks on device repeatedly incude the laser beam, and the processing system senses described sharp according to every group of exploring block
Spacing between the number of light beam and photosensitive sequence and exploring block handles to obtain a detection range value, this detection range value
It is far longer than the true change value of the stationary mirror Yu mobile mirror spacing, the processing system can be visited by this
Distance value is surveyed to calculate the true change value of the stationary mirror Yu mobile mirror spacing, the sensor structure is simple,
When measurement, after the mobile mirror is fixedly connected with testee, when the testee is subjected to displacement variation, accordingly
The spacing of the stationary mirror and mobile mirror can be made to generate variation, reflected by measuring the stationary mirror and movement
The spacing changing value of mirror, can be back-calculated to obtain the shift value of the testee, and it is suitable for the testee change in displacement
Measurement, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations.
Preferably, the exploring block three is set to the midpoint of the straight line line of the exploring block one and exploring block two,
The exploring block six is set to the midpoint of the straight line line of the exploring block four and exploring block five.
Preferably, the mobile mirror is equipped with the rigid connector for connecting testee, the mobile measured object
Body drives the mobile mirror, changes the reflection path of the laser beam, the processing system is according to the exploring block
One, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six incude time of the laser beam
It is several with photosensitive sequence and the exploring block one, exploring block two, exploring block three, exploring block four, exploring block five and
The related spacing of exploring block six obtains a probe value, and calculates the displacement of the corresponding testee.
Drive the mobile mirror connected to it same when the testee is mobile using this structure setting
When generate movement, change the spacing of the mobile mirror and stationary mirror, the mobile mirror is subjected to displacement front and back
The laser beam reflection path that is irradiated on the stationary mirror will not change for the first time, the final testee
Shift value, that is, mobile mirror shift value is reflected on photodetector, and this changes the mobile mirror position
The frame mode of shifting can simplify the Processing Algorithm of the processing system, while simplify sensor structure, it is easily fabricated with
It uses.
Preferably, the laser beam is reflected on the detection reflecting mirror through the stationary mirror, the detection reflection
The laser beam is reflected on the photodetector one by mirror, and the laser beam is reflected into the spy through the mobile mirror
It surveys on reflecting mirror, the laser beam is reflected on the photodetector two by the detection reflecting mirror.
Using this structure setting, it can make the mobile mirror during being subjected to displacement, the photodetector
One only measures the laser beam of the stationary mirror reflection, and it is anti-that the photodetector two only measures the mobile mirror
The laser beam penetrated avoids the laser beam from occurring to measure interference caused by reflection is existed simultaneously with direct projection at edge.
Preferably, further include laser source for emitting the laser beam.
As it is further preferred that further including shell, the laser source, stationary mirror, mobile mirror, detection are reflected
Mirror, photodetector one and photodetector two are respectively positioned in the shell, form reading head, and the reading head is equipped with mounting hole
Or stickers.
Using this structure setting, the reading head be convenient for the testee or opposing stationary members fits,
Clamping is pasted, easy disassembly.
Preferably, a mobile mirror rigid connection at least connector, the connector are rigid member, the company
Fitting stretches out outside the reading head.
Preferably, the photodetector one further includes at least one exploring block seven, and the exploring block seven is set to institute
Any position between exploring block one and the straight line line of exploring block two is stated, the photodetector two further includes at least one
A exploring block eight, the exploring block eight are set to any between the exploring block four and the straight line line of exploring block five
Position.
Using this structure setting, since it is desired that judging the direction of displacement of the testee, photodetector is at least needed
Three exploring blocks could distinguish the direction of displacement of the testee in measurement process, while the laser beam finally stops
In the exploring block one and this closed interval of exploring block two or the exploring block four and this closed zone of exploring block five
In, the exploring block one or exploring block two or exploring block three or exploring block four or exploring block five or exploring block
After six last times sense the laser beam, the small quantity inspection that the laser beam moves again does not measure needs and ignores, described
At least one complementary described exploring block seven is set between exploring block one and the straight line line of exploring block two, described
At least one complementary described exploring block eight, Neng Gouxi are set between exploring block four and the straight line line of exploring block five
Change the surveying range of the exploring block one and exploring block two and the measurement zone of the exploring block four and exploring block five
Between, the final negligible amount of the laser beam will be smaller, can be further improved the measurement accuracy of institute's displacement sensors.
Preferably, the exploring block one, exploring block two, exploring block three, exploring block four, exploring block five, spy
Surveying component six, exploring block seven and exploring block eight is a kind of photosensitive photoelectric device, can be measured with the presence or absence of light.
Preferably, the laser source, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and photoelectricity
The position of detector two is adjustable.
Preferably, the range of institute's displacement sensors is 0-1mm.
The present invention also provides a kind of measurement methods of alternately increment type measurement micro-displacement sensor, including such as any of the above
The displacement sensor, measurement method the following steps are included:
A, testee is fixedly connected on the mobile mirror；
B, emit one laser beam, the laser beam is incident at a certain angle on the stationary mirror, it is assumed that described
Incidence angle is θ, and the laser beam is by being irradiated to the detection after the continuous reflection of the stationary mirror and mobile mirror
On reflecting mirror, and it is reflected on the photodetector one or photodetector two；
C, the mobile testee drives the mobile mirror while movement, while the reflex circuit of the laser beam
Diameter variation, the laser beam is by the exploring block one, exploring block two and the exploring block three on the photodetector one
Induction is incuded by the exploring block four, exploring block five and the exploring block six on the photodetector two, described
When testee stops mobile, the processing system counts the exploring block one, exploring block two, exploring block three, detection
Component four, exploring block five and exploring block six sense between the number of the laser beam and photosensitive sequence and each exploring block
Spacing, obtain the shift value and direction of displacement of the testee.
Using a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, the mobile reflection
Mirror is fixedly connected with the testee, and the positional relationship of remaining part remains unchanged, and the laser beam is with angle θ in institute
It states on stationary mirror, is then finally irradiated on the photodetector one or photodetector two by multiple reflections, moved
The testee is moved, the reflection path of the laser beam changes, when the testee stops mobile, the processing system root
Incude according to the exploring block one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six
Detection range value and described is obtained to the spacing between the number and photosensitive sequence and each exploring block of the laser beam
The direction of displacement of testee, this detection range value are far longer than the true of the stationary mirror and mobile mirror spacing
Change value, the processing system can be calculated between the stationary mirror and mobile mirror by this detection range value
Away from true change value, the measurement method is simple, reliable, easy to operate, and can be improved displacement measurement accuracy, can be used for pair
The increment type change in displacement of the testee measures.
Preferably, institute's location is carried out according to the counting sequence of the exploring block one, exploring block two and exploring block three
The judgement for moving direction, if counting sequence is followed successively by the exploring block one, exploring block three and exploring block two, institute's location
Moving direction is close to the direction of the stationary mirror, if counting sequence is followed successively by the exploring block two, exploring block three
With exploring block one, then measured displacement direction is the direction far from the stationary mirror.
Preferably, institute's location is carried out according to the counting sequence of the exploring block four, exploring block five and exploring block six
The judgement for moving direction, if counting sequence is followed successively by the exploring block four, exploring block six and exploring block five, institute's location
Moving direction is close to the direction of the stationary mirror, if counting sequence is followed successively by the exploring block five, exploring block six
With exploring block four, then measured displacement direction is the direction far from the stationary mirror.
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
1, with a kind of alternately increment type measurement micro-displacement sensor of the present invention, by the laser beam at one group
The stationary mirror disposed in parallel is constantly reflected among mobile mirror, is finally irradiated on two groups of photodetectors,
Change the spacing of the stationary mirror and mobile mirror, i.e., can change the reflection path of the laser beam, every group of photoelectricity is visited
Three exploring blocks surveyed on device repeatedly incude the laser beam, and the processing system senses described according to every group of exploring block
Spacing between the number of laser beam and photosensitive sequence and exploring block handles to obtain a detection range value, this detection range
Value is far longer than the true change value of the stationary mirror Yu mobile mirror spacing, and the processing system can pass through this
Detection range value calculates the true change value of the stationary mirror Yu mobile mirror spacing, sensor structure letter
Singly, when measurement, after the mobile mirror is fixedly connected with testee, when the testee is subjected to displacement variation, phase
The meeting answered makes the spacing of the stationary mirror and mobile mirror generate variation, by measuring the stationary mirror and movement
The spacing changing value of reflecting mirror, can be back-calculated to obtain the shift value of the testee, and it is suitable for testee displacements
The measurement of variation, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations；
2, with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the mobile mirror, which is equipped with, to be used
In the case where the rigid connector of connection testee, the position relationship of remaining part, the testee occurs
Displacement, drives the mobile mirror to be subjected to displacement, using this structure setting, when the testee is mobile, drive with
Its described mobile mirror connected generates movement simultaneously, changes the spacing of the mobile mirror and stationary mirror, institute
It states mobile mirror and is subjected to displacement the laser beam of front and back and be irradiated to reflection path on the stationary mirror for the first time not
It can change, shift value, that is, mobile mirror shift value of the final testee is reflected on photodetector,
This frame mode for changing the mobile mirror displacement can simplify the Processing Algorithm of the processing system, simultaneously
Simplify sensor structure, easily fabricated and use；
It 3, further include shell with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the laser
Source, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and photodetector two are respectively positioned on the shell
It is interior, formed reading head, the reading head be equipped with mounting hole or stickers, using this structure setting, the reading head be convenient for
The testee or opposing stationary members fits, clamping or stickup, easy disassembly；
4, with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the photodetector one is also wrapped
Include at least one exploring block seven, the exploring block seven be set to the exploring block one and exploring block two straight line line it
Between any position, the photodetector two further includes at least one exploring block eight, and the exploring block eight is set to described
Any position between exploring block four and the straight line line of exploring block five, using this structure setting, since it is desired that judgement
The direction of displacement of the testee, photodetector at least need three exploring blocks that could distinguish the quilt in measurement process
The direction of displacement of object is surveyed, while the laser beam eventually settles at the exploring block one and this closed interval of exploring block two
Or in the exploring block four and this closed interval of exploring block five, the exploring block one or exploring block two or probe portion
After part three or exploring block four or exploring block five or six last time of exploring block sense the laser beam, the laser beam
The small quantity inspection moved again does not measure needs and ignores, and is arranged between the exploring block one and the straight line line of exploring block two
At least one complementary exploring block seven is arranged between the exploring block four and the straight line line of exploring block five
At least one complementary exploring block eight, can refine the surveying range of the exploring block one and exploring block two with
And the surveying range of the exploring block four and exploring block five, the final negligible amount of the laser beam will be smaller, can be into one
Step improves the measurement accuracy of institute's displacement sensors；
5, with a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, the movement is anti-
It penetrates mirror and is fixedly connected with the testee, the positional relationship of remaining part remains unchanged, and the laser beam is existed with angle θ
On the stationary mirror, then finally it is irradiated on the photodetector one or photodetector two by multiple reflections,
The mobile testee, the reflection path variation of the laser beam, when the testee stops mobile, the processing system
Felt according to the exploring block one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six
The spacing that should be arrived between the number of the laser beam and photosensitive sequence and each exploring block obtains a detection range value and institute
The direction of displacement of testee is stated, this detection range value is far longer than the true of the stationary mirror and mobile mirror spacing
Real change value, the processing system can calculate the stationary mirror and mobile mirror by this detection range value
The true change value of spacing, the measurement method is simple, reliable, easy to operate, and can be improved displacement measurement accuracy, can be used for
The increment type change in displacement of the testee is measured.
Detailed description of the invention
Fig. 1 is the schematic side view that a kind of alternately increment type of the present invention measures micro-displacement sensor；
Fig. 2 is the structural side view that a kind of alternately increment type of the present invention measures micro-displacement sensor；
Fig. 3 is side view when a kind of alternately increment type of the present invention measures micro-displacement sensor measurement.
Marked in the figure: 1- laser source, 11- laser beam, 2- stationary mirror, 3- mobile mirror, 31- connector, 4- are visited
Survey reflecting mirror, 5- photodetector one, 51- exploring block one, 52- exploring block two, 53- exploring block three, 6- photodetection
Device two, 61- exploring block four, 62- exploring block five, 63- exploring block six, 7- reading head, 8- testee.
Specific embodiment
With reference to the accompanying drawing, the present invention is described in detail.
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
Embodiment 1
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention, including laser beam 11,
Stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1, photodetector 26 and processing system.
The photodetector 1 is equipped with exploring block 1, exploring block 2 52 and the exploring block three of constant spacing
53, the exploring block 3 53 is set to any position between the exploring block 1 and the straight line line of exploring block 2 52
It sets, the photodetector 26 is equipped with exploring block 4 61, exploring block 5 62 and the exploring block 6 63 of constant spacing, institute
It states exploring block 6 63 and is set to any position between the exploring block 4 61 and the straight line line of exploring block 5 62, it is described
Stationary mirror 2 is arranged in parallel with mobile mirror 3 and can relatively move, the stationary mirror 2 and mobile mirror 3
One end the detection reflecting mirror 4, photodetector 1 and photodetector 26, the other end setting laser beam are set
11, the photodetector 1 and photodetector 26 are set to 4 two sides of detection reflecting mirror, and the laser beam 11 is incident on
On the stationary mirror 2, it is anti-that the detection is incident on after the stationary mirror 2 and 3 alternating reflex of mobile mirror
Mirror 4 is penetrated, the laser beam 11 is reflected into the photodetector 1 or photodetector 26 by the detection reflecting mirror 4, and
By the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 or detection
Component 6 63 incudes, and the processing system communicates to connect the photodetector 1 and photodetector 26, and for counting
The exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and probe portion
The number of the induction of part 6 63 laser beam 11 and photosensitive sequence.
Since the exploring block 1, exploring block 2 52 and exploring block 3 53 have fixed spacing, the detection
Component 4 61, exploring block 5 62 and exploring block 6 63 have fixed spacing, pass through the exploring block 1, exploring block
2 52 and exploring block 3 53 incude the number or the exploring block 4 61,5 62 and of exploring block of the laser beam 11
Exploring block 6 63 incudes the number of the laser beam 11, and judges the mobile mirror 3 according to the photosensitive sequence of exploring block
The direction of motion of the relatively described stationary mirror 2 carries out plus-minus processing to institute's metering number according to the direction of motion.
It is described on the photodetector 1 (or photodetector 2 6) as a kind of increment type displacement sensor
Exploring block 1 (either exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62
Or 63) exploring block 6 senses the laser beam 11 first, then the laser beam 11 is next time by the exploring block
One 51 (either exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or detections
63) corresponding sense is denoted as an incremental number to component 6, and the processing system is according to the incremental number and the exploring block one
51 (either exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or probe portions
The induction number of part 6 63) calculates the probe value principal part for obtaining the stationary mirror 2 and 3 relative displacement of mobile mirror, together
Shi Suoshu processing system regard the photodetector 1 (or photodetector 2 6) as host computer detector, the photoelectricity
Detector 26 (or photodetector 1) is used as auxiliary calculating detector, and finally detected component incudes the laser beam 11,
The exploring block and exploring block one 51 (either exploring block 2 52 or the exploring block 3 53 or exploring block 4 61
Either the distance of exploring block 5 62 or exploring block 6 63) is as the auxiliary portion of probe value, the probe value principal part and probe value
Auxiliary portion constitutes the probe value of the stationary mirror 2 and 3 relative displacement of mobile mirror, and the processing system is according to the detection
The true relative shift of the value corresponding stationary mirror 2 and mobile mirror 3.
With a kind of alternately increment type measurement micro-displacement sensor of the present invention, by the laser beam 11 at one group
It is constantly reflected among the stationary mirror 2 disposed in parallel and mobile mirror 3, is finally irradiated to two groups of photodetectors
On, change the spacing of the stationary mirror 2 with mobile mirror 3, i.e., can change the reflection path of the laser beam 11, every group
Three exploring blocks on photodetector repeatedly incude the laser beam 11, and the processing system is according to every group of exploring block sense
The spacing that should be arrived between the number and photosensitive sequence and exploring block of the laser beam 11 handles to obtain a detection range value, this
A detection range value is far longer than the true change value of the stationary mirror 2 and 3 spacing of mobile mirror, the processing system
The true change value that the stationary mirror 2 and 3 spacing of mobile mirror can be calculated by this detection range value, should
Sensor structure is simple, and when measurement, after the mobile mirror 3 is fixedly connected with testee, the testee occurs
When change in displacement, the stationary mirror 2 and the spacing of mobile mirror 3 can be made to generate variation accordingly, by described in measurement
The spacing changing value of stationary mirror 2 and mobile mirror 3, can be back-calculated to obtain the shift value of the testee, be applicable in
In the measurement of the testee change in displacement, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations.
Embodiment 2
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention and testee 8,
The sensor includes laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1, photoelectricity
Detector 26 and processing system.
The testee 8 is fixedly connected with the mobile mirror 3, and the photodetector 1 is equipped with constant spacing
Exploring block 1, exploring block 2 52 and exploring block 3 53, the exploring block 3 53 are set to the exploring block 1
Any position between the straight line line of exploring block 2 52, the photodetector 26 are equipped with the probe portion of constant spacing
Part 4 61, exploring block 5 62 and exploring block 6 63, the exploring block 6 63 are set to the exploring block 4 61 and detection
Any position between the straight line line of component 5 62, the stationary mirror 2 are arranged in parallel with mobile mirror 3 and can
The detection reflecting mirror 4, photodetector 1 is arranged in one end of relative movement, the stationary mirror 2 and mobile mirror 3
With photodetector 26, the laser beam 11 is arranged in the other end, and the photodetector 1 and photodetector 26 are set to institute
Detection 4 two sides of reflecting mirror are stated, the laser beam 11 is incident on the stationary mirror 2, by the stationary mirror 2 and shifting
It is incident on the detection reflecting mirror 4 after dynamic 3 alternating reflex of reflecting mirror, the laser beam 11 is reflected by the detection reflecting mirror 4
The photodetector 1 or photodetector 26, and by the exploring block 1, exploring block 2 52, exploring block three
53, exploring block 4 61, exploring block 5 62 or exploring block 6 63 incude, and the processing system communicates to connect the photoelectricity and visits
Survey device 1 and photodetector 26, and for count the exploring block 1, exploring block 2 52, exploring block 3 53,
Exploring block 4 61, the number of exploring block 5 62 and the induction of exploring block 6 63 laser beam 11 and photosensitive sequence, it is mobile
The testee 8 drives the mobile mirror 3, changes the reflection path of the laser beam 11, the processing system root
According to the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and detection
Component 6 63 incude the laser beam 11 number and the exploring block 1, exploring block 2 52, exploring block 3 53,
Exploring block 4 61, exploring block 5 62 spacing related to exploring block 6 63 obtain a probe value, and calculate corresponding institute
State the displacement of testee 8.
With a kind of alternately increment type measurement micro-displacement sensor of the present invention, the mobile mirror 3 is fixed to be connected
It connects the testee 8, in the case where the position relationship of remaining part, is subjected to displacement the testee 8, drive institute
It states mobile mirror 3 to be subjected to displacement, institute connected to it is driven when the testee 8 is mobile using this structure setting
It states mobile mirror 3 while generating movement, change the spacing of the mobile mirror 3 and stationary mirror 2, the movement is anti-
The reflection path that 11 first time of the laser beam penetrated before and after mirror 3 is subjected to displacement is irradiated on the stationary mirror 2 will not change
Becoming, shift value, that is, mobile mirror 3 shift value of the final testee 8 is reflected on photodetector, this
Kind, which only changes the frame mode that the mobile mirror 3 is displaced, can simplify the Processing Algorithm of the processing system, simultaneously
Simplify sensor structure, easily fabricated and use.
Embodiment 3
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention and testee 8,
The sensor includes laser source 1, laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector
One 5, photodetector 26 and processing system further include shell and connector 31.
The laser beam 11 by laser source 1 transmitting obtains, the laser source 1, stationary mirror 2, mobile mirror 3,
Detection reflecting mirror 4, photodetector 1 and photodetector 26 are respectively positioned in the shell, form reading head 7, the reading
First 7 are equipped with mounting hole or stickers, and the mobile mirror 3 connects the connector 31, and the connector 31 is rigid member, institute
It states connector 31 and stretches out testee 8 described in 7 external connection of reading head, the photodetector 1 is equipped with constant spacing
Exploring block 1, exploring block 2 52 and exploring block 3 53, the exploring block 3 53 be set to the exploring block one
Any position between 51 and the straight line line of exploring block 2 52, the photodetector 26 are equipped with the detection of constant spacing
Component 4 61, exploring block 5 62 and exploring block 6 63, the exploring block 6 63 are set to the exploring block 4 61 and visit
Any position between the straight line line of component 5 62 is surveyed, the stationary mirror 2 is arranged in parallel with mobile mirror 3 and energy
The detection reflecting mirror 4, photodetector one is arranged in one end of enough relative movements, the stationary mirror 2 and mobile mirror 3
5 and photodetector 26, the laser beam 11 is arranged in the other end, and the photodetector 1 and photodetector 26 are set to
4 two sides of detection reflecting mirror, the laser beam 11 are incident on the stationary mirror 2, by the stationary mirror 2 with
The detection reflecting mirror 4 is incident on after 3 alternating reflex of mobile mirror, the detection reflecting mirror 4 reflects the laser beam 11
To the photodetector 1 or photodetector 26, and by the exploring block 1, exploring block 2 52, exploring block
3 53, exploring block 4 61, exploring block 5 62 or exploring block 6 63 incude, and the processing system communicates to connect the photoelectricity
Detector 1 and photodetector 26, and for counting the exploring block 1, exploring block 2 52, exploring block three
53, exploring block 4 61, the number of exploring block 5 62 and the induction of exploring block 6 63 laser beam 11 and photosensitive sequence, are moved
The testee 8 is moved, the mobile mirror 3 is driven, changes the reflection path of the laser beam 11, the processing system
According to the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and visit
Survey number and the exploring block 1, exploring block 2 52, exploring block three that component 6 63 incudes the laser beam 11
53, exploring block 4 61, exploring block 5 62 spacing related to exploring block 6 63 obtain a probe value, and calculate correspondence
The displacement of the testee 8.
It further include shell with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the laser source
1, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1 and photodetector 26 are respectively positioned on described
In shell, reading head 7 is formed, the reading head 7 is equipped with mounting hole or stickers, using this structure setting, the reading head 7
Convenient for the testee 8 or opposing stationary members fits, clamping or stickup, easy disassembly；The spy is set simultaneously
Reflecting mirror 4 is surveyed, can make the mobile mirror 3 during being subjected to displacement, the photodetector 1 only measures described solid
Determine the laser beam 11 of the reflection of reflecting mirror 2, the photodetector 26 only measures the described of the reflection of mobile mirror 3
Laser beam 11 avoids the laser beam 11 from occurring to measure interference caused by reflection is existed simultaneously with direct projection at edge.
Embodiment 4
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention and testee 8,
The sensor includes laser source 1, laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector
One 5, photodetector 26 and processing system further include shell and connector 31.
Difference from Example 3 is that the photodetector 1 further includes at least one exploring block seven, described
Exploring block seven is set to any position between the exploring block 1 and the straight line line of exploring block 2 52, the photoelectricity
Detector 26 further includes at least one exploring block eight, and the exploring block eight is set to the exploring block 4 61 and probe portion
Any position between the straight line line of part 5 62.
As a kind of preferred embodiment of the present embodiment, one is equipped between the exploring block 3 53 and exploring block 1
The exploring block seven is equipped with another described exploring block seven between the exploring block 3 53 and exploring block 2 52；Institute
It states and is equipped with an exploring block eight between exploring block 6 63 and exploring block 4 61, the exploring block 6 63 and detection
Another described exploring block eight is equipped between component 5 62.
With a kind of alternately increment type measurement micro-displacement sensor of the present invention, the photodetector 1 is also wrapped
At least one exploring block seven is included, the exploring block seven is set to the exploring block 1 and the straight line of exploring block 2 52 connects
Any position between line, the photodetector 26 further include at least one exploring block eight, and the exploring block eight is set to
Any position between the exploring block 4 61 and the straight line line of exploring block 5 62, using this structure setting, because
Need to judge that the direction of displacement of the testee 8, photodetector at least need three exploring blocks could be in measurement process
Distinguish the direction of displacement of the testee 8, while the laser beam 11 eventually settles at the exploring block 1 and detection
In this closed interval of component 2 52 or the exploring block 4 61 and this closed interval of exploring block 5 62, the exploring block
1 or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63 most
After once sensing the laser beam 11 afterwards, the small quantity inspection that the laser beam 11 moves again does not measure needs and ignores, described
At least one complementary described exploring block seven is set between exploring block 1 and the straight line line of exploring block 2 52,
At least one complementary described exploring block is set between the exploring block 4 61 and the straight line line of exploring block 5 62
Eight, can refine the exploring block 1 and exploring block 2 52 surveying range and the exploring block 4 61 and detection
The surveying range of component 5 62, the final negligible amount of the laser beam 11 will be smaller, can be further improved the displacement sensing
The measurement accuracy of device.
Embodiment 5
As shown in Figure 1-3, a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, including
Such as the displacement sensor in embodiment 4, measurement method the following steps are included:
A, testee 8 is fixedly connected on the mobile mirror 3；
B, emit one laser beam 11, the laser beam 11 is incident at a certain angle on the stationary mirror 2, it is assumed that
The incidence angle is θ, and the laser beam 11 after the continuous reflection of the stationary mirror 2 and mobile mirror 3 by being irradiated to
On the photodetector 1 or photodetector 26；
C, the mobile testee 8 drives the mobile mirror 3 while movement, while the laser beam 11 is anti-
Path change is penetrated, the laser beam 11 is by the exploring block 1,2 52 and of exploring block on the photodetector 1
Exploring block 3 53 incudes or by the exploring block 4 61, exploring block 5 62 and the spy on the photodetector 26
It surveys component 6 63 to incude, when the testee 8 stops mobile, the processing system counts the exploring block 1, detection
Component 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense the laser beam
Spacing between 11 number and photosensitive sequence and each exploring block obtains shift value and the displacement side of the testee 8
To.
With a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, the mobile reflection
Mirror 3 is fixedly connected with the testee 8, and the positional relationship of remaining part remains unchanged, and the laser beam 11 is with angle θ
On the stationary mirror 2, the photodetector 1 or photodetector two are finally then irradiated to by multiple reflections
On 6, the reflection path of the mobile testee 8, the laser beam 11 changes, described when the testee 8 stops mobile
Processing system is according to the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block
5 62 and exploring block 6 63 sense that the spacing between the number and photosensitive sequence and each exploring block of the laser beam 11 obtains
The direction of displacement of a detection range value and the testee 8 out, it is anti-that this detection range value is far longer than the fixation
The true change value of mirror 2 Yu 3 spacing of mobile mirror is penetrated, the processing system can be calculated by this detection range value
The true change value of the stationary mirror 2 and 3 spacing of mobile mirror, the measurement method is simple, reliable, easy to operate, and
And can be improved displacement measurement accuracy, it can be used for measuring the increment type change in displacement of the testee 8.
As a kind of preferred embodiment of the present embodiment, according to the exploring block 1, exploring block 2 52 and probe portion
The counting sequence of part 3 53 carries out the judgement in measured displacement direction, if counting sequence is followed successively by the exploring block 1, visits
Component 3 53 and exploring block 2 52 are surveyed, then measured displacement direction is close to the direction of the stationary mirror 2, if counted suitable
Sequence is followed successively by the exploring block 2 52, exploring block 3 53 and exploring block 1, then measured displacement direction is far from described
The direction of stationary mirror 2.
As a kind of preferred embodiment of the present embodiment, according to the exploring block 4 61, exploring block 5 62 and probe portion
The counting sequence of part 6 63 carries out the judgement in measured displacement direction, if counting sequence is followed successively by the exploring block 4 61, visits
Component 6 63 and exploring block 5 62 are surveyed, then measured displacement direction is close to the direction of the stationary mirror 2, if counted suitable
Sequence is followed successively by the exploring block 5 62, exploring block 6 63 and exploring block 4 61, then measured displacement direction is far from described
The direction of stationary mirror 2.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (8)
1. a kind of measurement method of alternately increment type measurement micro-displacement sensor, passes using a kind of alternately increment type measurement micro-displacement
Sensor, the displacement sensor include laser beam (11), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4), light
Electric explorer one (5), photodetector two (6) and processing system, the photodetector one (5) are equipped with the detection of constant spacing
Component one (51), exploring block two (52) and exploring block three (53), the exploring block three (53) are set to the exploring block
Any position between one (51) and the straight line line of exploring block two (52), between the photodetector two (6) is equipped with fixing
Away from exploring block four (61), exploring block five (62) and exploring block six (63), the exploring block six (63) is set to described
Any position between exploring block four (61) and the straight line line of exploring block five (62), the stationary mirror (2) and shifting
Dynamic reflecting mirror (3) are arranged in parallel and can relatively move, and the stationary mirror (2) and one end of mobile mirror (3) are set
The detection reflecting mirror (4), photodetector one (5) and photodetector two (6) are set, the laser beam is arranged in the other end
(11), the photodetector one (5) and photodetector two (6) are set to detection reflecting mirror (4) two sides, the laser beam
(11) it is incident on the stationary mirror (2), behind the stationary mirror (2) and mobile mirror (3) alternating reflex
It is incident on the detection reflecting mirror (4), the laser beam (11) is reflected into the photodetector by the detection reflecting mirror (4)
One (5) or photodetector two (6), and by the exploring block one (51), exploring block two (52), exploring block three (53),
Exploring block four (61), exploring block five (62) or exploring block six (63) induction, the processing system communicate to connect the light
Electric explorer one (5) and photodetector two (6), and for counting the exploring block one (51), exploring block two (52), visiting
It surveys component three (53), exploring block four (61), exploring block five (62) and exploring block six (63) and incudes the laser beam (11)
Number and photosensitive sequence, which is characterized in that its measurement method the following steps are included:
A, testee (8) is fixedly connected on the mobile mirror (3)；
B, emit one laser beam (11), the laser beam (11) is incident at a certain angle on the stationary mirror (2), false
If incidence angle is θ, the laser beam (11) after the continuous reflection of the stationary mirror (2) and mobile mirror (3) by shining
It is mapped to the detection reflecting mirror (4), is reflected into the photodetector one (5) or photodetection through the detection reflecting mirror (4)
On device two (6)；
C, the testee (8) is moved, the mobile mirror (3) is driven while being moved, while the laser beam (11)
Reflection path variation, the laser beam (11) is by the exploring block one (51) on the photodetector one (5), probe portion
Part two (52) and exploring block three (53) induction or by the photodetector two (6) the exploring block four (61),
Exploring block five (62) and exploring block six (63) induction, when the testee (8) stops mobile, the processing system statistics
The exploring block one (51), exploring block two (52), exploring block three (53), exploring block four (61), exploring block five
(62) and between exploring block six (63) senses between the number and photosensitive sequence and each exploring block of the laser beam (11)
Away from obtaining the shift value and direction of displacement of the testee (8).
2. the measurement method of displacement sensor according to claim 1, which is characterized in that according to the exploring block one
(51), the counting sequence of exploring block two (52) and exploring block three (53) carries out the judgement in measured displacement direction, if counted
Sequence is followed successively by the exploring block one (51), exploring block three (53) and exploring block two (52), then measured displacement direction is
Close to the direction of the stationary mirror (2), if counting sequence is followed successively by the exploring block two (52), exploring block three
(53) and exploring block one (51), then measured displacement direction is the direction far from the stationary mirror (2).
3. the measurement method of displacement sensor according to claim 1, which is characterized in that according to the exploring block four
(61), the counting sequence of exploring block five (62) and exploring block six (63) carries out the judgement in measured displacement direction, if counted
Sequence is followed successively by the exploring block four (61), exploring block six (63) and exploring block five (62), then measured displacement direction is
Close to the direction of the stationary mirror (2), if counting sequence is followed successively by the exploring block five (62), exploring block six
(63) and exploring block four (61), then measured displacement direction is the direction far from the stationary mirror (2).
4. the measurement method of displacement sensor according to claim 1, which is characterized in that described in laser beam (11) warp
Stationary mirror (2) is reflected on the detection reflecting mirror (4), and the detection reflecting mirror (4) reflects the laser beam (11)
Onto the photodetector one (5), the laser beam (11) is reflected into the detection reflecting mirror through the mobile mirror (3)
(4) on, the laser beam (11) is reflected on the photodetector two (6) by the detection reflecting mirror (4).
5. the measurement method of displacement sensor according to claim 1, which is characterized in that further include described sharp for emitting
The laser source (1) of light beam (11).
6. the measurement method of displacement sensor according to claim 5, which is characterized in that it further include shell, the laser
Source (1), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4), photodetector one (5) and photodetector two
(6) it is respectively positioned in the shell, is formed reading head (7).
7. the measurement method of displacement sensor according to claim 6, which is characterized in that the mobile mirror (3) is rigid
Property connect at least one connector (31), the connector (31) is rigid member, and the connector (31) stretches out the reading head
(7) external.
8. the measurement method of displacement sensor according to claim 1-7, which is characterized in that the photodetection
Device one (5) further includes at least one exploring block seven, and the exploring block seven is set to the exploring block one (51) and the spy
Survey any position between the straight line line of component three (53) or set on the exploring block two (52) and the exploring block
Any position between the straight line line of three (53), the photodetector two (6) further include at least one exploring block eight, institute
It states exploring block eight and is set to any position between the exploring block four (61) and the straight line line of the exploring block six (63)
Set or be set to any position between the exploring block five (62) and the straight line line of the exploring block six (63).
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Effective date of registration: 20221226 Address after: Unit C1-301, Artificial Intelligence Industrial Park, No. 88, Jinjihu Avenue, Suzhou Industrial Park, Jiangsu Province, 215000 Patentee after: Suzhou Zhijiang intelligent photoelectric Co.,Ltd. Address before: 750021 No. 204 Wenchang North Road, Xixia District, the Ningxia Hui Autonomous Region, Yinchuan Patentee before: BEIFANG MINZU University |
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