CN204495287U - A kind of position transducer based on fiber array and reflective digital scrambler - Google Patents
A kind of position transducer based on fiber array and reflective digital scrambler Download PDFInfo
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- CN204495287U CN204495287U CN201520175596.9U CN201520175596U CN204495287U CN 204495287 U CN204495287 U CN 204495287U CN 201520175596 U CN201520175596 U CN 201520175596U CN 204495287 U CN204495287 U CN 204495287U
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- fiber array
- reflective digital
- digital scrambler
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- position transducer
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Abstract
A kind of position transducer based on fiber array and reflective digital scrambler, comprise housing, the sensor unit being arranged at the signal processing unit outside housing and being arranged on housing, described sensor unit comprises I/O optical fiber, fiber array is popped one's head in, reflective digital scrambler, horizontal slide rail and connecting link, described I/O optical fiber one end connection signal processing unit, one end connecting fiber array probe, described fiber array is popped one's head in and is installed on housing and stretches into housing cavity, reflective digital scrambler is provided with immediately below fiber array probe, reflective digital scrambler be installed on reflective digital scrambler can be made to move back and forth horizontal slide rail on, the connecting link that described horizontal slide rail and one end are stretched out outside housing is connected, realize reflective digital scrambler move by measured object is connected with connecting link.Position transducer of the present utility model has that range is large, noncontact, numeral exports, precision is high, cost is low, reliability is high, sensor unit is without the need to power supply, be suitable for telemeasurement, electromagnetic interference (EMI), the rugged surroundings such as inflammable and explosive, hot and humid, solve the deficiency of existing fiber displacement transducer very well, there is again the advantage of the optical fiber sensing technology that other displacement transducer does not possess simultaneously, have broad application prospects.
Description
Technical field
The utility model belongs to position transducer, Fibre Optical Sensor field, relates to a kind of position transducer based on fiber array and reflective digital scrambler.
Background technology
Displacement/position transducer detects the important sensor of a class of length fundamental physical quantity, is widely applied, has huge market.Displacement transducer comprises linear displacement transducer and angular displacement sensor two class, can mutually change for two kinds.According to the size measuring range, displacement transducer can be divided into minute displacement sensor and large displacement sensor.Minute displacement sensor comprise strain-type, condenser type, inductance type,
differential transformerformula, eddy current type,
hall elementformulas etc., large displacement sensor comprises
inductosynformula, raster pattern, capacitance-grid type, magnetic-grid-type, laser displacement sensor, magnetostrictive displacement sensor and potentiometric displacement transducer etc.
Grating displacement transducer because of its there is digitizing, precision is high, antijamming capability is strong, do not have artificial reading
error, easy for installation, use reliable etc.
advantage,
latheprocessing,
detectorobtain increasingly extensive application in the industries such as table, but its cost is high.
Potentiometric displacement transducer have structure simple, output signal the advantages such as large, easy to use, cheap, application is widely.It converts mechanical shift to resistance linear with it or voltage output by potentiometer element, and the implementation of potentiometer element has conductive plastic resistance film, wire resistor, metallic glass uranium resistance, metal film etc.For realizing the potentiometer that measurement displacement object designs, require between change in displacement and resistance variations, have to determine a relation, this is subject to the impact of brush and resistive element contact condition, especially there are wearing and tearing, high-speed motion is beated and humidity is brought impact, creates a lot of integrity problems.
Magnetostrictive displacement sensor utilizes magnetostriction principle, intersected generation strain-pulse signal by two different magnetic fields comes measuring position exactly, the actual displacement value of detected product is measured by the absolute position of detected activity magnet ring non-contactly, high precision and the high reliability of this sensor are widely used, but it also exists the high deficiency of cost.
Laser displacement sensor can the change such as position, displacement of accurate non-cpntact measurement testee, be mainly used in detect thing displacement,
thickness, vibration, the geometric sense such as distance, diameter measurement.According to measuring principle, laser displacement sensor principle is divided into laser triangulation and return laser beam mensuration, laser triangulation is generally applicable to high precision, short-range measurement, and laser measurement analyzes rule for telemeasurement, and measuring accuracy is low relative to laser triangulation.The cost of laser displacement sensor is general also higher.
From 20 century 70 mid-terms, due to passive, the long range propagation characteristic of Fibre Optical Sensor, measurand is had no effect, electromagnetism interference, have high temperature resistant, high pressure resistant, anticorrosive, normally can work under the rugged surroundings such as poisonous, nuclear radiation, Optical Fiber Transmission bandwidth, dynamic range is large, the feature that Fibre Optical Sensor profile is tiny, and is widely used, especially power at non-transformer, remote sensing remote measurement, electromagnetic interference (EMI), the rugged surroundings such as inflammable and explosive, hot and humid have huge technical advantage, become the optical fibre displacement sensor that a class is important.
The impact of tiny tactile state, especially exists and uses the existing a kind of reflective optical fiber displacement sensor of fine receiver, and its ultimate principle is the light intensity analog-modulated type optical fibre displacement sensor that the reflective light intensity received based on fibre-optical probe changes with distance.Usually, sensor comprises light launching fiber and receives optical fiber, and when fibre-optical probe is close to reflecting surface, the light intensity that reception optical fiber receives is zero.Along with fibre-optical probe is from the increase of reflecting surface distance, the light intensity that reception optical fiber receives increases gradually, and the distance again with both after arriving maximum of points increases and reduces.After obtaining voltage and the relation of distance, just distance can be become to show voltage transitions by the process of single-chip microcomputer.The general range of these optical fibre displacement sensors is less, and be vulnerable to the impact of light source intensity change, analog output, measuring accuracy is not high.
The another kind of photoelectric displacement sensor based on reflective encode grating, its formation comprises light source, collimation lens, imaging len, indication grating (transmission-type), key light grid (reflective gratings) and light activated element.Its principle of work is that the light that light source sends becomes directional light after lens, directional light is through shining on key light grid after indication grating, indication grating picture images on indication grating face by key light grid, indication grating picture and key light grid overlap formation Moire fringe, and Moire fringe is imaged on light activated element by imaging len.When key light grid move, indication grating picture will move thereupon, and Moire fringe will in cyclical variation, and the electric current now on light activated element also in cyclomorphosis, just will can draw the corner of key light grid relative to indication grating through signal transacting and after calculating.This kind of displacement transducer optical system is complicated, comprises the optical grating pair of key light grid and indication grating, collimation imaging len, and the device such as light activated element, and complex structure, installs inconvenience.
Summary of the invention
The utility model is for the deficiencies in the prior art, range is large, noncontact, numeral exports, precision is high, cost is low to provide one to have, reliability is high, sensor unit is without the need to power supply, be suitable for telemeasurement, electromagnetic interference (EMI), the rugged surroundings such as inflammable and explosive, hot and humid, solve the deficiency of existing fiber displacement transducer very well, there is again the position transducer based on fiber array and reflective digital scrambler of the optical fiber sensing technology that other displacement transducers do not possess simultaneously.
For realizing the utility model object, provide following technical scheme: a kind of position transducer based on fiber array and reflective digital scrambler, it is characterized in that comprising housing, the sensor unit being arranged at the signal processing unit outside housing and being arranged on housing, described sensor unit comprises I/O optical fiber, fiber array is popped one's head in, reflective digital scrambler, horizontal slide rail and connecting link, described I/O optical fiber one end connection signal processing unit, one end connecting fiber array probe, described fiber array is popped one's head in and is installed on housing and stretches into housing cavity, reflective digital scrambler is provided with immediately below fiber array probe, reflective digital scrambler be installed on reflective digital scrambler can be made to move back and forth horizontal slide rail on, the connecting link that described horizontal slide rail and one end are stretched out outside housing is connected, realize reflective digital scrambler move by measured object is connected with connecting link.
As preferably, described fiber array probe is vertical with reflective digital scrambler or closely vertically to arrange, and gap is several microns of extremely hundreds of microns.
As preferably, described I/O optical fiber is single mode or multi-mode communication optical fiber.
As preferably, described fiber array probe is made up of the ribbon fiber be fixed in equally spaced V-type or U-type groove, or directly uses ribbon fiber, and fiber end face carries out polishing, chamfered.
As preferably, described signal processing unit comprises semiconductor laser, multi-path light detector, optical branching device, one group of Y shape fiber optic splitter and treatment circuit, and the common port of Y shape fiber optic splitter is popped one's head in fiber array and is connected.
As preferably, reflective digital scrambler comprises substrate, and the edge of substrate is provided with the protection convex body of 0 to 100 micron height, substrate is provided with staggered high light reflectivity rate region and light reflectivity region.
As preferably, described light reflectivity region is transmitance region, light absorption district or light diffuse reflection district.
As preferably, substrate is silicon substrate, glass substrate, ceramic substrate or metal substrate.
As preferably, the optical fiber arrangement direction of ribbon fiber and parallel with the separatrix in light reflectivity region or the angled θ in high light reflectivity rate region of reflective digital scrambler.
When optical fibre displacement sensor works, Ray Of Light shines reflective digital scrambler by input optical fibre from fiber array probe, popping one's head in corresponding according to now reflective digital scrambler and fiber array is high light reflectivity rate region or light reflectivity region, represent binary encoded location information 1 or 0 from the light signal of reflective digital scrambler reflected light fibre array probe, this information is transferred to signal processing unit demodulation process by output optical fibre.When testee drives reflective digital scrambler to move continuously by connecting link, fiber array probe reads one group of continuous print binary digital encoding information from reflective digital scrambler, by signal processing unit demodulation process, thus obtain testee position and change in location, and then measure ohject displacement.
The beneficial effects of the utility model are:
One, non-cpntact measurement, optical fibre interrogation, the life-span is long, adapts to high-speed motion displacement measurement;
Two, safe and reliable, electrical isolation, electromagnetism interference, adapts to severe environment for use, easily realizes measured position remote monitor;
Three, structure is simple, cost is low, without complicated optical element as lens, only comprises fiber array and a blocks of reflecting digital encoder, is suitable for large application scope;
Four, fast response time, numeral export, without drift, high precision;
Five, high reliability, detachable, installs, easy to maintenance, and durability is high.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is reflective digital scrambler relative coding schematic diagram.
Fig. 3 is the angled θ schematic diagram of fiber array probe reflective digital scrambler.
Fig. 4 is reflective digital scrambler specific coding schematic diagram.
Embodiment
Embodiment 1: a kind of position transducer based on fiber array and reflective digital scrambler, comprise housing 1, the sensor unit 3 being arranged at the signal processing unit 2 outside housing 1 and being arranged on housing 1, described sensor unit 3 comprises I/O optical fiber 3.1, fiber array probe 3.2, reflective digital scrambler 3.3, horizontal slide rail 3.4 and connecting link 3.5, described I/O optical fiber 3.1 one end connection signal processing unit 2, one end connecting fiber array probe 3.2, described fiber array probe 3.2 to be installed on housing 1 and to stretch into housing 1 inner chamber, reflective digital scrambler 3.3 is provided with immediately below fiber array probe 3.2, reflective digital scrambler 3.3 be installed on it can be made to move back and forth horizontal slide rail 3.4 on, the connecting link 3.5 that horizontal slide rail 3.4 and one end are stretched out outside housing 1 is connected, realize reflective digital scrambler 3.3 move by measured object is connected with connecting link 3.5.Described fiber array probe 3.2 is vertical with reflective digital scrambler 3.3 to be arranged, and gap is 70 microns.Described I/O optical fiber 3.1 is Single mode communication optical fiber.Described fiber array probe 3.2 is made up of the ribbon fiber in U-type groove.Described signal processing unit 2 comprises semiconductor laser, multi-path light detector, optical branching device, one group of Y shape fiber optic splitter 2.1 and treatment circuit, and common port and the fiber array of Y shape fiber optic splitter 2.1 are popped one's head in and 3.2 to be connected.Reflective digital scrambler 3.3 comprises substrate 3.3.1, and the edge of substrate 3.3.1 is provided with convex body 3.3.2, substrate 3.3.1 is provided with staggered high light reflectivity rate region 3.3.3 and light reflectivity region 3.3.4, adopts relative coding.Described light reflectivity region 3.3.4 is light diffuse reflection district.Substrate 3.3.1 is silicon substrate.
The fibre bundle input port of light source input Y shape fiber optic splitter 2.1,3.2 incide reflective digital scrambler 3.3 through input optical fibre from fiber array probe, the reflected light back of reflective digital scrambler 3.3 returns described fiber array probe 3.2 thus the binary encoded location signal forming 0/1 sends to signal processing unit 2 demodulation process.When testee drives reflective digital scrambler 3.3 to move continuously by connecting link 3.5, fiber array probe 3.2 reads one group of continuous print binary-coded information from reflective digital scrambler 3.3, thus obtain testee relative position variable quantity, measure displacement.Wherein reflective digital scrambler 3.3 is divided into the coding of two row mutual dislocation, relative with two fiber array probes 3.2, judges testee moving direction, realize the accurate calculating to displacement by the binary-coded phase place Variation Features of two row.
Embodiment 2:
Reference example 1, unlike, reflective digital scrambler 3.3 substrate 3.3.1 adopts glass substrate; I/O optical fiber 3.1 is multimode optical fiber; Fiber array probe 3.2 and the angled θ of reflective digital scrambler 3.3; The light reflectivity region 3.3.4 of reflective digital scrambler 3.3 makes Transmission light.When working sensor, its reflective digital scrambler 3.3 only has a row binary coding, due to two fibre-optical probes 3.2 and the angled θ of reflective digital scrambler 3.3 of fiber array, the coded data that two fibre-optical probes 3.2 of fiber array read has different delay features when measured object different directions moves, thus judge measured object moving direction, thus can realize displacement Measurement accuracy.
Embodiment 3:
Reference example 1, unlike, reflective digital scrambler 3.3 adopts specific coding, and on it, multiple code channel uses reflected code coding, and the number of code channel is determined according to the measurement range of displacement.During working sensor, with embodiment 1 unlike, when testee drives reflective digital scrambler 3.3 to move by connecting link 3.5, to be popped one's head in the same number of fiber array of reflective digital scrambler 3.3 code channel by one group and 3.2 read one group of reflected code information from reflective digital scrambler 3.3, thus obtain the absolute position of testee.
Claims (9)
1. the position transducer based on fiber array and reflective digital scrambler, it is characterized in that comprising housing, the sensor unit being arranged at the signal processing unit outside housing and being arranged on housing, described sensor unit comprises I/O optical fiber, fiber array is popped one's head in, reflective digital scrambler, horizontal slide rail and connecting link, described I/O optical fiber one end connection signal processing unit, one end connecting fiber array probe, described fiber array is popped one's head in and is installed on housing and stretches into housing cavity, reflective digital scrambler is provided with immediately below fiber array probe, reflective digital scrambler be installed on reflective digital scrambler can be made to move back and forth horizontal slide rail on, the connecting link that described horizontal slide rail and one end are stretched out outside housing is connected, realize reflective digital scrambler move by measured object is connected with connecting link.
2. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 1, it is characterized in that described fiber array probe is vertical with reflective digital scrambler or closely vertically to arrange, gap is several microns of extremely hundreds of microns.
3. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 1, is characterized in that described I/O optical fiber is single mode or multi-mode communication optical fiber.
4. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 1, it is characterized in that described fiber array probe is made up of the ribbon fiber be fixed in equally spaced V-type or U-type groove, or directly using ribbon fiber, fiber end face carries out polishing, chamfered.
5. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 1, it is characterized in that described signal processing unit comprises semiconductor laser, multi-path light detector, optical branching device, one group of Y shape fiber optic splitter and treatment circuit, the common port of Y shape fiber optic splitter is popped one's head in fiber array and is connected.
6. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 1; it is characterized in that reflective digital scrambler comprises substrate; the edge of substrate is provided with the protection convex body of 0 to 100 micron height; substrate is provided with staggered high light reflectivity rate region and light reflectivity region, forms the numerical coding of position.
7. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 6, is characterized in that described light reflectivity region is transmitance region on substrate, light absorption district or light diffuse reflection district.
8. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 6, is characterized in that substrate is silicon substrate, glass substrate, ceramic substrate or metal substrate.
9. a kind of position transducer based on fiber array and reflective digital scrambler according to claim 4, is characterized in that parallel with the separatrix in light reflectivity region or the angled θ in high light reflectivity rate region of the optical fiber arrangement direction of ribbon fiber and reflective digital scrambler.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105258641A (en) * | 2015-03-27 | 2016-01-20 | 江苏森博传感技术有限公司 | Position sensor based on fiber array and reflection type digital encoder |
| CN106644038A (en) * | 2017-01-18 | 2017-05-10 | 山东大学 | MOEMS wireless vibration sensor based on comb grid and operation method thereof |
| CN107478157A (en) * | 2017-07-12 | 2017-12-15 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of digitally coded Optical displacement sensor |
| CN108534810A (en) * | 2018-03-07 | 2018-09-14 | 珠海格力节能环保制冷技术研究中心有限公司 | Photoelectric encoder and dynamic grating |
| CN108732416A (en) * | 2018-06-04 | 2018-11-02 | 西安交通大学 | A kind of MEMS micromirror high-pressure electrostatic sensor of front-end digital |
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2015
- 2015-03-27 CN CN201520175596.9U patent/CN204495287U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105258641A (en) * | 2015-03-27 | 2016-01-20 | 江苏森博传感技术有限公司 | Position sensor based on fiber array and reflection type digital encoder |
| CN106644038A (en) * | 2017-01-18 | 2017-05-10 | 山东大学 | MOEMS wireless vibration sensor based on comb grid and operation method thereof |
| CN106644038B (en) * | 2017-01-18 | 2023-08-18 | 山东大学 | MOEMS wireless vibration sensor based on comb-shaped grids and working method thereof |
| CN107478157A (en) * | 2017-07-12 | 2017-12-15 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of digitally coded Optical displacement sensor |
| CN108534810A (en) * | 2018-03-07 | 2018-09-14 | 珠海格力节能环保制冷技术研究中心有限公司 | Photoelectric encoder and dynamic grating |
| CN108732416A (en) * | 2018-06-04 | 2018-11-02 | 西安交通大学 | A kind of MEMS micromirror high-pressure electrostatic sensor of front-end digital |
| CN108732416B (en) * | 2018-06-04 | 2020-06-19 | 西安交通大学 | MEMS micro-mirror high-voltage electrostatic sensor with digital front end |
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