CN205374010U - Optical element transmission reflectivity measurement appearance - Google Patents
Optical element transmission reflectivity measurement appearance Download PDFInfo
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- CN205374010U CN205374010U CN201620028828.2U CN201620028828U CN205374010U CN 205374010 U CN205374010 U CN 205374010U CN 201620028828 U CN201620028828 U CN 201620028828U CN 205374010 U CN205374010 U CN 205374010U
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- optical element
- lock
- laser
- photodiode
- amplifier
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Abstract
The utility model provides an optical element transmission reflectivity measurement appearance, the utility model discloses a chopper is to laser signal modulate after beam splitting Prism divide into reference light and incident light, the incident light shines optical element and produces transmitted light and reverberation, photodiode gathers the reference light, transmitted light and reverberation signal convert the signal of telecommunication into, the signal of telecommunication gets into lock -in amplifier after preamplifier amplifies, the DC voltage that lock -in amplifier output and light intensity were directly proportional, the DC voltage that transmitted light and reverberation correspond is compared with the DC voltage that the reference light corresponds, obtain optical element's transmission rate and reflectivity. The utility model discloses a set up the optical standard piece, rectify measuring apparatu signal amplifying unit's the magnification. The utility model discloses simple structure, convenient to use, the especially suitable great size optical element's of on line measurement transmission rate and reflectivity.
Description
Technical field
This utility model belongs to instrumental science field, is specifically related to a kind of optical element Transflective rate measuring instrument.
Background technology
High power laser light is used widely in many high-technology fields, is the key areas that the present age, various countries were competitively studied.Along with the development of High-power Laser Technologies, the particularly development of inertial confinement fusion system, the power density born required by optical system unit device is more and more higher.
In device of high power laser, an important feature is numerous heavy caliber and the employing of high precision optical element, such as amplification used in laser amplifier and focusing and modulation crystal etc..The transmitance of these optical elements and reflectance greatly affect the loss in Laser Transmission process and focusing, and such as reflectance is too high, be just very easy to produce ghost luminous point, other element in device is caused damage.In use, it is also the important indicator evaluating optical element film coated quality that overwhelming majority surface both passes through coating film treatment, optical transmittance and reflectance to massive optics.
When high flux laser aid high flux runs, if optical element surface leaves any dirt, blasting property evaporating after absorbing laser, cause glass or coated surface damage, reduce the damage threshold of optical element, this requires that optical element has significantly high cleanliness factor.The transmitance of optical element is also the important indicator weighing optical element surface cleanliness factor.
Currently, measuring the transmission of optical element and the key instrument of reflectance is spectrophotometer, this apparatus measures result is accurate, and can measure the optical element transmitance at certain wave band.But spectrophotometer is generally adopted photomultiplier tube adds the technological means of integrating sphere, photomultiplier tube needs to use in dark environment, cause this instrument can only measure the transmitance of optical element of reduced size, and be not suitable for measuring the optical element of large-size (side to light is long-pending more than 200 × 200mm), especially can not realize on-line measurement.
Summary of the invention
The technical problems to be solved in the utility model is to provide a kind of optical element Transflective rate measuring instrument.
Optical element Transflective rate measuring instrument of the present utility model, including laser instrument, chopper, spectroscope, photodiode I, photodiode II, photodiode III, preamplifier I, preamplifier II, preamplifier III, lock-in amplifier I, lock-in amplifier II, lock-in amplifier III, optical element fixture, optical standard sheet and computer；
The continuous laser that described laser instrument sends is modulated into pulse laser through chopper, pulse laser after modulation is divided into, through spectroscope, the two bundle of pulsed laser that energy is identical, one bundle of pulsed laser is received and converted to the signal of telecommunication by photodiode I, the signal of telecommunication amplifies through preamplifier I and after the amplification again of lock-in amplifier I, is transmitted directly to computer；
Another bundle of pulsed laser direct irradiation is being positioned on the optical element to be measured on optical element fixture, and then produce transmitted pulse laser and reflected impulse laser, reflected impulse laser therein is received and converted to the signal of telecommunication by photodiode II, preamplifier II receives the signal of telecommunication of photodiode II generation and is amplified, and the signal of telecommunication after amplification is directly passed to computer after lock-in amplifier II；Transmitted pulse laser is received and is converted into the signal of telecommunication by photodiode III, and preamplifier III receives the signal of telecommunication of photodiode III generation and is amplified, and the signal of telecommunication after amplification is directly delivered to computer through lock-in amplifier III after again amplifying；
Described optical element fixture is for being installed optical element to be measured and optical standard sheet, and optical standard sheet is used for the demarcation before measurement optical element to be measured to each amplifying unit amplification of instrument.
The laser that described laser instrument produces is continuous light, and output is less than or equal to 20 milliwatts.
Described photodiode I, photodiode II are identical with the model of photodiode III.
Described lock-in amplifier I, lock-in amplifier II are identical with the model of lock-in amplifier III.
The reflectance of described optical standard sheet is less than or equal to 4%.
The work process of this optical element Transflective rate measuring instrument of the present utility model is as follows:
A. lock-in amplifier I, lock-in amplifier II and lock-in amplifier III power on；
B. preamplifier I, preamplifier II and preamplifier III power on；
C. chopper powers on；
D. computer is opened；
E. optical standard sheet is placed on optical element fixture；
F. laser instrument is opened；
G. rectify an instrument according to optical standard sheet, amplification A1, A2 and the A3 of reference light after being corrected, transmission light and reflection three passage amplifying units of light.
H. laser instrument is closed；
I. take optical standard sheet away, place optical element to be measured；
J. laser instrument is opened；
K. output DC voltage respectively V1, V2 and the V3 of lock-in amplifier I, lock-in amplifier II and lock-in amplifier III, the absorbance calculating optical element to be measured is T=A1 × V2/A2 × V1, reflectance R=A1 × V3/A3 × V1；
L. the power supply of each element is closed.
The amplification of measuring instrument, by arranging Transflective rate rate standard film, is corrected by optical element Transflective rate measuring instrument of the present utility model.This optical element Transflective rate measuring instrument of the present utility model has simple in construction, easy to use, it is suitable for measuring transmission and the reflectance of large-size optical element, because light source part and probe portion are to separate, therefore can when not using optical element fixture, realize on-line measurement, without by optical element undercarriage.
Accompanying drawing explanation
Fig. 1 is the theory structure schematic diagram of optical element Transflective rate measuring instrument of the present utility model；
In figure, 1. laser instrument 2. chopper 3. spectroscope 4. photodiode I 5. photodiode II 6. photodiode III 7. preamplifier I 8. preamplifier II 9. preamplifier III 10. lock-in amplifier I 11. lock-in amplifier II 12. lock-in amplifier III 13. optical element fixture 14. optical standard sheet 15. computer.
Detailed description of the invention
This this utility model is illustrated below in conjunction with drawings and Examples.
Embodiment 1
Referring to Fig. 1, optical element Transflective rate measuring instrument of the present utility model, including laser instrument 1, chopper 2, spectroscope 3, photodiode I 4, photodiode II 5, photodiode III 6, preamplifier I 7, preamplifier II 8, preamplifier III 9, lock-in amplifier I 10, lock-in amplifier II 11, lock-in amplifier III 12, optical element fixture 13, optical standard sheet 14 and computer 15；
The continuous laser that described laser instrument 1 sends is modulated into pulse laser through chopper 2, pulse laser after modulation is divided into, through spectroscope 3, the two bundle of pulsed laser that energy is identical, one bundle of pulsed laser is received and converted to the signal of telecommunication by photodiode I 4, the signal of telecommunication amplifies through preamplifier I 7 and after the amplification again of lock-in amplifier I 10, is transmitted directly to computer 15；
Another bundle of pulsed laser direct irradiation is being positioned on the optical element to be measured on optical element fixture 13, and then produce transmitted pulse laser and reflected impulse laser, reflected impulse laser therein is received and converted to the signal of telecommunication by photodiode II 5, preamplifier II 8 receives the signal of telecommunication of photodiode II 5 generation and is amplified, and the signal of telecommunication after amplification is directly passed to computer 15 after lock-in amplifier II 11；
Transmitted pulse laser is received and is converted into the signal of telecommunication by photodiode III 6, and preamplifier III 9 receives the signal of telecommunication of photodiode III 6 generation and is amplified, and the signal of telecommunication after amplification is directly delivered to computer 15 through lock-in amplifier III 12 after again amplifying.
Described optical element fixture 13 is for being installed optical element to be measured and optical standard sheet 14, and optical standard sheet 14 is used for the demarcation before measurement optical element to be measured to each amplifying unit amplification of instrument.
The laser that described laser instrument 1 produces is continuous light, and output is less than or equal to 20 milliwatts.
Described photodiode I 4, photodiode II 5 are identical with the model of photodiode III 6.
Described lock-in amplifier I 10, lock-in amplifier II 11 are identical with the model of lock-in amplifier III 12.
The reflectance of described optical standard sheet 14 is equal to 4%.
Being placed on optical table by optical element Transflective rate measuring instrument of the present utility model, laser instrument adopts output wavelength to be the green (light) laser of 532nm.Open computer after powering on to successively lock-in amplifier I 10, lock-in amplifier II 11, lock-in amplifier III 12, preamplifier I 7, preamplifier II 8, preamplifier III 9 and chopper；Laser works and stable after, the amplification according to each amplifying unit of the transmission of optical standard sheet and Planar mirror；Close lasing light emitter and take optical standard sheet away, place optical element K9 glass to be measured, incident laser and K9 glass surface angle at 45 °, after reopening laser instrument, DC voltage according to the output of lock-in amplifier I, lock-in amplifier II and lock-in amplifier III, calculating transmission and the reflectance of optical element to be measured, recording absorbance is 91.523%, and reflectance is 1.029%.
Embodiment 2
Embodiment 2 is essentially identical with the embodiment of embodiment 1, differs primarily in that one reflectance 3.5% optical standard sheet 14 of replacing is for measuring absorbance and the reflectance of optical element to be measured.
This utility model is not limited to above-mentioned detailed description of the invention, and person of ordinary skill in the field, from above-mentioned design, without performing creative labour, done all conversion, all falls within this protection domain of the present utility model.
Claims (5)
1. an optical element Transflective rate measuring instrument, it is characterized in that, including laser instrument (1), chopper (2), spectroscope (3), photodiode I (4), photodiode II (5), photodiode III (6), preamplifier I (7), preamplifier II (8), preamplifier III (9), lock-in amplifier I (10), lock-in amplifier II (11), lock-in amplifier III (12), optical element fixture (13), optical standard sheet (14) and computer (15)；
The continuous laser that described laser instrument (1) sends is modulated into pulse laser through chopper (2), pulse laser after modulation is divided into, through spectroscope (3), the two bundle of pulsed laser that energy is identical, one bundle of pulsed laser is received and converted to the signal of telecommunication by photodiode I (4), the signal of telecommunication amplifies through preamplifier I (7) and after the amplification again of lock-in amplifier I (10), is transmitted directly to computer (15)；
Another bundle of pulsed laser direct irradiation is on the optical element to be measured being positioned on optical element fixture (13), and then produce transmitted pulse laser and reflected impulse laser, reflected impulse laser therein is received and converted to the signal of telecommunication by photodiode II (5), preamplifier II (8) receives the signal of telecommunication that produces of photodiode II (5) and is amplified, and the signal of telecommunication after amplification is directly passed to computer (15) after lock-in amplifier II (11)；Transmitted pulse laser is received by photodiode III (6) and is converted into the signal of telecommunication, preamplifier III (9) receives the signal of telecommunication that produces of photodiode III (6) and is amplified, and the signal of telecommunication after amplification is directly delivered to computer (15) through lock-in amplifier III (12) after again amplifying；
Described optical element fixture (13) is for being installed optical element to be measured and optical standard sheet (14), and optical standard sheet (14) is used for the demarcation before measurement optical element to be measured to each amplifying unit amplification of instrument.
2. optical element Transflective rate measuring instrument according to claim 1, it is characterised in that the laser that described laser instrument (1) produces is continuous laser, and output is less than or equal to 20 milliwatts.
3. optical element Transflective rate measuring instrument according to claim 1, it is characterised in that described photodiode I (4), photodiode II (5) are identical with the model of photodiode III (6).
4. optical element Transflective rate measuring instrument according to claim 1, it is characterised in that described lock-in amplifier I (10), lock-in amplifier II (11) are identical with the model of lock-in amplifier III (12).
5. optical element Transflective rate measuring instrument according to claim 1, it is characterised in that the reflectance of described optical standard sheet (14) is less than or equal to 4%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620028828.2U CN205374010U (en) | 2016-01-13 | 2016-01-13 | Optical element transmission reflectivity measurement appearance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620028828.2U CN205374010U (en) | 2016-01-13 | 2016-01-13 | Optical element transmission reflectivity measurement appearance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205374010U true CN205374010U (en) | 2016-07-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620028828.2U Withdrawn - After Issue CN205374010U (en) | 2016-01-13 | 2016-01-13 | Optical element transmission reflectivity measurement appearance |
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| CN (1) | CN205374010U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105510005A (en) * | 2016-01-13 | 2016-04-20 | 中国工程物理研究院激光聚变研究中心 | Measuring instrument for transmittance and reflectivity of optical element |
-
2016
- 2016-01-13 CN CN201620028828.2U patent/CN205374010U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105510005A (en) * | 2016-01-13 | 2016-04-20 | 中国工程物理研究院激光聚变研究中心 | Measuring instrument for transmittance and reflectivity of optical element |
| CN105510005B (en) * | 2016-01-13 | 2019-01-15 | 中国工程物理研究院激光聚变研究中心 | A kind of optical element Transflective rate measuring instrument |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160706 Effective date of abandoning: 20190111 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160706 Effective date of abandoning: 20190115 |