CN107356854A - The light intensity caliberating device and method of single photon photoelectric device - Google Patents
The light intensity caliberating device and method of single photon photoelectric device Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
- G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/08—Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/08—Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
- G01J2001/083—Testing response of detector
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Abstract
Present disclose provides a kind of light intensity caliberating device of single photon photoelectric device and method, light source produces laser；Decay laser caused by attenuation light source, and the laser after decay is converted to the light beam of free space；When single photon photoelectric device is aligned with the light-beam position that decay light path is sent and is irradiated by light beam, the number of photons on single photon photoelectric device is target light subnumber.Light intensity caliberating device can reach very high stated accuracy without superhigh precision optical device；Contactless demarcation at a distance can be carried out to single photon photoelectric device；Switching ensure that very high repeatable accuracy without regulated attenuator between monochromatic light beamlet and strong light light beam.
Description
Technical field
The disclosure belongs to the testing field of high sensitivity photoelectric device, is related to the light intensity caliberating device of single photon photoelectric device
And method.
Background technology
Single photon photoelectric device photomultiplier, single-photon avalanche diode, single photon camera etc., in life now
Produce it is living in extensive application always.
, it is necessary to use single photon light path generally when carrying out the test job of single photon photoelectric device, that is, using single
Individual photon irradiation is on device photosurface.Traditional single photon light path implementation is to be radiated at using the small light spot of a focusing
On device photosurface, then demarcated with high-precision a light power meter and attenuator, such implementation is deposited
In following shortcoming：
(1) energy of single photon it is extremely low, it is necessary to luminous power in respect of high measurement accuracy (generally to reach-
120dBm), the light power meter of high measurement accuracy is with high costs；
(2) number of photons is demarcated as after single photon magnitude, it is desirable to uses very inconvenient, it is necessary to adjust again if strong light
Attenuator；
(3) small light spot focusing requirement optical lens is close apart from object under test photosurface, easily cause contact cause it is to be measured
Physical damage or dirty；
(4) conventional apparatus repeatable accuracy is not high, and the number of photons precision that each regulated attenuator can reach all is not quite similar.
The content of the invention
(1) technical problems to be solved
The disclosure is directed to the application background of single photon photoelectric device test job, proposes a kind of light of single photon photoelectric device
Strong caliberating device and method.Single photon demarcation can be carried out with device under test so that incide the light on device under test photosurface
Subnumber is single photon magnitude.This apparatus structure is simple, is easy to rebuild, it is not necessary to the instrument and element of high precision (costliness).Make
The number of photons degree of accuracy obtained with the device normalization is high, and repeatable accuracy is high, and scaling method is simple and easy.To single photon phototube
The test job of part is of great advantage.
(2) technical scheme
Present disclose provides a kind of light intensity caliberating device of single photon photoelectric device, including：Light source, for producing laser；
Decay light path, for the laser caused by light source of decaying, and the laser after decay is converted to the light beam of free space；Its
In, when single photon photoelectric device is aligned with the light-beam position that decay light path is sent and is irradiated by light beam, the single photon photoelectricity
Number of photons on device is target light subnumber.
In some embodiments of the present disclosure, the decay light path includes：First damping assemblies, the second damping assemblies and
Three damping assemblies, wherein：First damping assemblies, for once being decayed to the laser caused by light source；Described
Two damping assemblies, including weak optical system for testing and strong optical system for testing, the weak optical system for testing are used to carry out the laser once decayed
Secondary extinction；3rd damping assemblies, for gating strong one of the optical system for testing and weak optical system for testing, and to one
The laser of secondary decay or secondary extinction is further decayed.
In some embodiments of the present disclosure, first damping assemblies are adjustable attenuator, and it connects light by optical fiber
Source；Second damping assemblies include fiber optic splitter and fixed attenuator, and described fiber optic splitter one end connects institute through optical fiber
Adjustable attenuator is stated, the other end connects the fixed attenuator and directly output through optical fiber, is correspondingly formed weak test respectively respectively
Light path and strong optical system for testing；The fiber optic splitter, for the laser once decayed to be divided into two-way, wherein laser is by institute all the way
State strong optical system for testing directly to export, another way laser exports after the weak optical system for testing secondary extinction；The 3rd decay group
Part includes photoswitch and optical fiber collimator；Described photoswitch one end connects one of strong optical system for testing or weak optical system for testing,
The other end connects the optical fiber collimator；The photoswitch, for selecting the strong optical system for testing and weak optical system for testing wherein
Laser is exported to optical fiber collimator all the way；The optical fiber collimator, for the laser in optical fiber to be converted to the height of free space
This light beam；The single photon photoelectric device is positioned over the spot center of Gaussian beam.
In some embodiments of the present disclosure, in addition to D translation platform, optical fiber collimator and the single photon phototube
One of them of part is fixed thereon, and realizes the alignment of the Gaussian beam and single photon photoelectric device.
In some embodiments of the present disclosure, in addition to：Light power meter and beam quality analysis instrument；When measuring beam intensity
When, the light power meter is located at the outlet side of optical fiber collimator, for measuring beam intensity；When the spot size of measuring beam
When, free space light path of the beam quality analysis instrument between optical fiber collimator and single photon photoelectric device, for surveying
Measure the spot size of light beam.
In some embodiments of the present disclosure, in addition to signal pickup assembly, the single photon photoelectric device is connected, is used for
Gather the electric signal of the single photon photoelectric device output.
In some embodiments of the present disclosure, the D translation platform and optical fiber collimator of the 3rd damping assemblies use up spy
Pin replaces.
In some embodiments of the present disclosure, the light source uses pulse laser or continuous light laser.
Present disclose provides a kind of light intensity scaling method of single photon photoelectric device, and it utilizes above-mentioned light intensity caliberating device pair
Single photon photoelectric device is demarcated, including：By the attenuation coefficient regulation of adjustable attenuator to minimum, strong optical system for testing is gated,
Measure the light intensity of optical fiber collimator output end；Single photon photoelectric device is located at the spot center of Gaussian beam, it is accurate to calculate optical fiber
The target light intensity of straight device output end；Weak optical system for testing is gated, measures the light intensity of optical fiber collimator output end, and obtains strong test light
Road and the beam intensity ratio of weak optical system for testing；Strong optical system for testing is gated, adjusts the attenuation coefficient of adjustable attenuator, makes optical fiber collimator defeated
The light intensity for going out end is target light intensity and the product of beam intensity ratio；And the weak optical system for testing of gating, the light intensity of optical fiber collimator output are
Target light intensity.
In some embodiments of the present disclosure, the spot center for making single photon photoelectric device be located at Gaussian beam, meter
Calculating the target light intensity of optical fiber collimator output end includes：By adjusting D translation platform, single photon photoelectric device is set to be in Gauss
The spot center of light beam；By the diameter of beam quality analysis instrument measurement hot spot, the optical intensity density peak value 1/e of the hot spot2Place
Diameter of a circle is spot diameter；The target light intensity of optical fiber collimator output end is calculated by following formula：
Wherein, A is the target light intensity of optical fiber collimator output end；S is the photosurface area of single photon photoelectric device；λ is
Optical maser wavelength；D is the spot diameter that beam quality analysis instrument measures；F is the pulse recurrence frequency of laser, when the laser is company
During continuous light, f=1；H is planck constant；C is the light velocity；When the laser is pulsed light, μ is that monochromatic light is incided in each pulse
The average photon number of sub-light electrical part, when the laser is continuous light, μ is to incide putting down for single photon photoelectric device each second
Equal number of photons.
(3) beneficial effect
It can be seen from the above technical proposal that the light intensity caliberating device and method of the single photon photoelectric device of the disclosure have
Following beneficial effect：
(1) light intensity caliberating device is made up of reference instrument, without special superhigh precision optical device, but can be reached very
High stated accuracy, the relative error of usual number of photons is 4% or so.
(2) light intensity caliberating device can carry out contactless demarcation at a distance to single photon photoelectric device.
(3) photoswitch of light intensity caliberating device can toggle between strong optical system for testing and weak optical system for testing, in list
Switching ensure that very high repeatable accuracy without regulated attenuator between photon light beam and strong light light beam.
(4) test job on probe station can be realized by D translation platform and optical fiber collimator being substituted for into light probe,
Batch jobs can be carried out to multiple single photon photoelectric devices.
(5) substantial amounts of single-photon avalanche diode test experiments have been carried out using the light intensity caliberating device, experimental result is
The research and development of single-photon avalanche diode provide good directive function.
Brief description of the drawings
Fig. 1 is the structural representation of the light intensity caliberating device of embodiment of the present disclosure single photon photoelectric device.
Fig. 2 is the flow chart of the light intensity scaling method of embodiment of the present disclosure single photon photoelectric device.
Embodiment
For the purpose, technical scheme and advantage of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the disclosure is further described.
The embodiment of the present disclosure provides a kind of light intensity caliberating device of single photon photoelectric device.As shown in figure 1, light intensity is demarcated
Device includes light source, decay light path, light power meter and beam quality analysis instrument.Single photon photoelectric device is single in the present embodiment
Photon avalanches diode SPAD (Single Photon Avalanche Diode), demarcation of the SPAD as light intensity caliberating device
Object.
Light source is used to produce laser.
Decay light path is used for laser caused by light source of decaying, and the laser after decay is converted to the light beam of free space.
SPAD is attenuated the light beam irradiation that light path sends, while SPAD photosurfaces are located at the center of beam and focus, on SPAD
Number of photons be target light subnumber.
Because the attenuation multiple that the light intensity demarcation of single photon photoelectric device needs exceeds well over the dynamic model of normal light power meter
Enclose, so the decay light path of the disclosure includes the first damping assemblies, the second damping assemblies and the 3rd damping assemblies.
Wherein, the first damping assemblies include adjustable attenuator, and it connects light source by optical fiber.
Second damping assemblies include fiber optic splitter and fixed attenuator, and fiber optic splitter one end is declined through optical fiber connection is adjustable
Subtract device, the other end is connected attenuator and the first output end respectively through optical fiber, and fixed attenuator connects second through optical fiber
Output end.What it is including fixed attenuator is weak optical system for testing all the way, and what it is without fixed attenuator is strong optical system for testing all the way.
3rd damping assemblies are Gauss light alignment, including photoswitch and optical fiber collimator.Photoswitch one end connection the
The first output end and the second output end of two damping assemblies, other end connection optical fiber collimator.
SPAD and optical fiber collimator position face.When carrying out light intensity demarcation to single photon photoelectric device, light power meter is set
The outlet side of optical fiber collimator is placed in, beam quality analysis instrument is arranged at the free space light path between optical fiber collimator and SPAD
In；After light intensity is demarcated, light power meter and beam quality analysis instrument are removed from above-mentioned position respectively, to avoid blocking light beam
It is irradiated to single photon photoelectric device.
The light intensity caliberating device of the present embodiment, the laser that light source is sent once are decayed after adjustable attenuator, then via
Fiber optic splitter is divided into two-way, all the way laser secondary extinction after fixed attenuator, and another way laser directly exports.
Photoswitch select strong optical system for testing and weak optical system for testing wherein laser is exported to optical fiber collimator all the way.Optical fiber is accurate
Straight device is converted to the laser in optical fiber the Gaussian beam of free space.
SPAD is positioned over the spot center of Gaussian beam, and its photosurface is perpendicular to Gaussian beam, and plane where photosurface
Cut the area of photosurface of the area much larger than SPAD of the Gaussian spot obtained by Gaussian beam.The present embodiment can also include connection
SPAD signal pickup assembly, for gathering the electric signal of SPAD outputs.
Wherein, the 3rd damping assemblies can also include D translation platform, and for fixing optical fiber collimator, D translation platform can
To move freely, change the position of optical fiber collimator by adjusting D translation platform, so as to adjust Gaussian beam and SPAD
Relative position, realize Gaussian beam and SPAD alignment.In the present embodiment, it can also be that optical fiber collimator keeps fixing, SPAD
D translation platform is fixed on, changes SPAD position by adjusting D translation platform, realizes Gaussian beam and SPAD alignment.
In addition, the D translation platform and optical fiber collimator of the 3rd damping assemblies can also be replaced with light probe.
Light power meter is used for measuring beam intensity, the luminous power of more than 30dB dynamic range under preferably same shelves range
Meter.Beam quality analysis instrument is used for the spot size of measuring beam, preferably measures spot size precision and reaches micron (μm) magnitude
Beam quality analysis instrument.In the light intensity calibration process of single photon photoelectric device, when need measuring beam intensity and measurement light
During the spot size of beam, light power meter and beam quality analysis instrument are placed in the free space light path at optical fiber collimator rear, surveyed
Remove from free space light path after amount, thus light path will not be had an impact in measurement.
Disclosure light path major part is optic fibre light path, has only used freedom when being irradiated to SPAD after optical fiber collimator
Space optical path, using optic fibre light path is easy to duplication, anti-interference is higher, the direction of propagation is controllable, while eliminate light path alignment
Trouble.
Light source can use pulse laser or continuous light laser.When from repetition rate 10MHz pulse laser
Device, or 10MHz single photon each second continuous light laser, it is necessary to which the laser that is sent to light source carries out 90dB attenuation multiples
Decay, can just ensure that single photon is incident on SPAD photosurfaces.The preferred adjustable extent 0-30dB's of adjustable attenuator is adjustable
Attenuator；The attenuator of the preferred 30dB attenuation multiples of fixed attenuator.
The Mira900 of Coherent companies can be selected in the light source of the disclosure, and adjustable attenuator selects the DD- of Dicon companies
100, fiber optic splitter selects the FC830-50B-FC of Thorlabs companies, and fixed attenuator selects 30dB fibre optic attenuators, light
Switch selects AC Photonics company MS2-2, and optical fiber collimator selects the CFS18-850 of Thorlabs companies, D translation
Platform selects Newport companies 9067-XYZ-L-V-M, spy of the light power meter from the PM200 collocation S130VC of Thorlabs companies
Head, beam quality analysis instrument select the BC106N of Thorlabs companies.Fiber selection H1780 or 780HP, it is 850nm wave bands
Single-mode fiber, the wavelength of the laser used is then 850nm.
Another embodiment of the disclosure provides a kind of light intensity scaling method of single photon photoelectric device, and it utilizes above-mentioned implementation
The light intensity caliberating device of example is demarcated to SPAD.
As shown in Fig. 2 first, the attenuation coefficient regulation of adjustable attenuator is gated into strong optical system for testing to minimum, photoswitch,
Measure the light intensity of optical fiber collimator output end.
By the attenuation coefficient regulation of adjustable attenuator to minimum, its laser intensity exported reaches maximum, photoswitch gating
Strong optical system for testing, the laser of strong optical system for testing transport to light collimator, and optical fiber collimator converts laser light into free space
Gaussian beam, the light intensity of optical fiber collimator output end is measured using light power meter.The Gaussian beam is the strong Gauss of decay very little
Light beam, it can be that its attenuation coefficient is adjusted into zero that the attenuation coefficient of adjustable attenuator, which is adjusted to minimum,.
Secondly, the position between SPAD and optical fiber collimator is adjusted, SPAD is located at the spot center of Gaussian beam, is calculated
The target light intensity of optical fiber collimator output end.
Because the section of Gaussian beam is Gaussian spot, height is obtained by the fitting to beam quality analysis instrument measurement result
The distribution of this hot spot.Gaussian spot irradiates SPAD to be measured, and the light intensity of SPAD photosurfaces is multiplied by Gauss equal to the area of photosurface
Optical intensity density of the hot spot in photosurface.
Due to the light intensity of the electric signal direct ratio and its photosurface of SPAD outputs, first by adjusting D translation platform, work as letter
During the electric signal maximum that number harvester collects, now SPAD is in the spot center of Gaussian beam.
Spot diameter D is measured by beam quality analysis instrument again, optical intensity density of the hot spot at a diameter of D is that peak light intensity is close
The 1/e of degree2
The target light intensity A of optical fiber collimator output end is calculated finally by following formula：
Wherein, A is the total light intensity of the target light intensity, i.e. free space beam of optical fiber collimator output end；S is that SPAD is photosensitive
Face area；λ is optical maser wavelength；D is the spot diameter that beam quality analysis instrument measures；F is laser pulse repetition frequency, for even
Continuous light, f=1；H is planck constant；C is the light velocity；When light source send be pulse laser when, μ be each pulse incide
SPAD average photon number, when light source send be continuous laser when, μ is to incide SPAD average photon number each second, is
SPAD intrinsic parameter.
In order to ensure the precision of (1) formula, SPAD photosurfaces are preferably circular, and meet that d/D ＜ 0.07, d are that SPAD is photosensitive
Face, then the error of (1) formula is below 1%.The target light intensity is usually light source intensity decay 50dB magnitude.
Then, photoswitch gates weak optical system for testing, measures the light intensity of optical fiber collimator output end, and obtains strong optical system for testing
With the beam intensity ratio of weak optical system for testing.
Keep adjustable attenuator attenuation coefficient minimum, switch photoswitch, photoswitch gates weak optical system for testing, weak optical system for testing
Laser transport to light collimator, optical fiber collimator converts laser light into the Gaussian beam of free space, uses light power meter
The light intensity of optical fiber collimator output end is measured, and obtains the beam intensity ratio of strong optical system for testing and weak optical system for testing, is designated as Rbw。
Switch photoswitch, photoswitch gates strong optical system for testing, adjusts the attenuation coefficient of adjustable attenuator, use light power meter
The light intensity of optical fiber collimator output end is measured, the light intensity for making optical fiber collimator output end is ARbw。
Finally, photoswitch is switched, photoswitch gates weak optical system for testing, and the light intensity of optical fiber collimator output is target light intensity A.
Because the light intensity difference R by force between optical system for testing and weak optical system for testingbwTimes, so being switched to after weak test beams
The light intensity of optical fiber collimator output is target light intensity A, then according to (1) formula, it is target average photon to be irradiated to SPAD number of photons
Number μ.
The light intensity caliberating device and method are used to research and develop single-photon avalanche diode, and light intensity caliberating device is by reference instrument
Composition, without special superhigh precision optical device, but can reach very high stated accuracy, the relative error of usual number of photons
For 4% or so.The light intensity caliberating device can carry out contactless demarcation at a distance to single photon photoelectric device.Light intensity is demarcated
The photoswitch of device can toggle between strong optical system for testing and weak optical system for testing, monochromatic light beamlet and strong light light beam it
Between switching without regulated attenuator, ensure that very high repeatable accuracy.D translation platform and optical fiber collimator are substituted for into light to visit
Pin can realize the test job on probe station, can carry out batch jobs to multiple single photon photoelectric devices.Use the light
Strong caliberating device has carried out substantial amounts of single-photon avalanche diode test experiments, and experimental result is ground for single-photon avalanche diode
Hair provides good directive function.
Describe light intensity caliberating device and method by taking SPAD as an example above, but this be it is exemplary, what the disclosure was directed to
Test object not limited to this, it will be appreciated by those skilled in the art that it equally can enter rower to other single photon photoelectric devices
It is fixed.
So far, the present embodiment is described in detail combined accompanying drawing.According to above description, those skilled in the art
There should be clear understanding to the disclosure.
It should be noted that in accompanying drawing or specification text, the implementation that does not illustrate or describe is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, above-mentioned definition to each element and not only limiting
Various concrete structures, shape or the mode mentioned in embodiment, those of ordinary skill in the art can be carried out simply more to it
Change or replace, such as：
(1) direction term mentioned in embodiment, such as " on ", " under ", "front", "rear", "left", "right" etc., only it is ginseng
The direction of accompanying drawing is examined, is not used for limiting the protection domain of the disclosure；
(2) consideration that above-described embodiment can be based on design and reliability, the collocation that is mixed with each other uses or and other embodiment
Mix and match uses, i.e., the technical characteristic in different embodiments can freely form more embodiments.
Particular embodiments described above, the purpose, technical scheme and beneficial effect of the disclosure are carried out further in detail
Describe in detail bright, should be understood that the specific embodiment that the foregoing is only the disclosure, be not limited to the disclosure, it is all
Within the spirit and principle of the disclosure, any modification, equivalent substitution and improvements done etc., the guarantor of the disclosure should be included in
Within the scope of shield.
Claims (10)
1. a kind of light intensity caliberating device of single photon photoelectric device, including：
Light source, for producing laser；
Decay light path, for the laser caused by light source of decaying, and the laser after decay is converted to the light beam of free space；
Wherein, when single photon photoelectric device is aligned with the light-beam position that decay light path is sent and is irradiated by light beam, the monochromatic light
Number of photons on sub-light electrical part is target light subnumber.
2. light intensity caliberating device as claimed in claim 1, the decay light path includes：First damping assemblies, the second decay group
Part and the 3rd damping assemblies, wherein：
First damping assemblies, for once being decayed to the laser caused by light source；
Second damping assemblies, including weak optical system for testing and strong optical system for testing, the weak optical system for testing are used for once decaying
Laser carry out secondary extinction；
3rd damping assemblies, for gating strong one of the optical system for testing and weak optical system for testing, and to once declining
Subtract or the laser of secondary extinction is further decayed.
3. light intensity caliberating device as claimed in claim 2,
First damping assemblies are adjustable attenuator, and it connects light source by optical fiber；
Second damping assemblies include fiber optic splitter and fixed attenuator, and described fiber optic splitter one end connects institute through optical fiber
Adjustable attenuator is stated, the other end connects the fixed attenuator and directly output through optical fiber, is correspondingly formed weak test respectively respectively
Light path and strong optical system for testing；The fiber optic splitter, for the laser once decayed to be divided into two-way, wherein laser is by institute all the way
State strong optical system for testing directly to export, another way laser exports after the weak optical system for testing secondary extinction；
3rd damping assemblies include photoswitch and optical fiber collimator；Described photoswitch one end connects strong optical system for testing or weak survey
One of light path is tried, the other end connects the optical fiber collimator；The photoswitch, for select the strong optical system for testing and
Weak optical system for testing wherein laser is exported to optical fiber collimator all the way；
The optical fiber collimator, for the laser in optical fiber to be converted to the Gaussian beam of free space；
The single photon photoelectric device is positioned over the spot center of Gaussian beam.
4. light intensity caliberating device as claimed in claim 2, in addition to D translation platform, optical fiber collimator and the monochromatic light sub-light
One of them of electrical part is fixed thereon, and realizes the alignment of the Gaussian beam and single photon photoelectric device.
5. light intensity caliberating device as claimed in claim 1, in addition to：Light power meter and beam quality analysis instrument, wherein：
When measuring beam intensity, the light power meter is located at the outlet side of optical fiber collimator, for measuring beam intensity；Work as survey
When measuring the spot size of light beam, freedom of the beam quality analysis instrument between optical fiber collimator and single photon photoelectric device
Space optical path, the spot size for measuring beam.
6. light intensity caliberating device as claimed in claim 1, in addition to signal pickup assembly, connect the single photon phototube
Part, for gathering the electric signal of the single photon photoelectric device output.
7. light intensity caliberating device as claimed in claim 4, the D translation platform and optical fiber collimator of the 3rd damping assemblies
Replaced with light probe.
8. light intensity caliberating device as claimed in claim 1, the light source uses pulse laser or continuous light laser.
9. a kind of light intensity scaling method of single photon photoelectric device, it utilizes the light intensity demarcation described in any one of claim 1 to 8
Device is demarcated to single photon photoelectric device, including：
By the attenuation coefficient regulation of adjustable attenuator to minimum, strong optical system for testing is gated, measures the light of optical fiber collimator output end
By force；
Single photon photoelectric device is located at the spot center of Gaussian beam, calculate the target light intensity of optical fiber collimator output end；
Gate weak optical system for testing, measure the light intensity of optical fiber collimator output end, and obtain strong optical system for testing and weak optical system for testing
Beam intensity ratio；
Strong optical system for testing is gated, adjusts the attenuation coefficient of adjustable attenuator, the light intensity for making optical fiber collimator output end is target light
By force with the product of beam intensity ratio；And
Weak optical system for testing is gated, the light intensity of optical fiber collimator output is target light intensity.
10. light intensity scaling method as claimed in claim 9, described single photon photoelectric device is located in the hot spot of Gaussian beam
The heart, calculating the target light intensity of optical fiber collimator output end includes：
By adjusting D translation platform, single photon photoelectric device is set to be in the spot center of Gaussian beam；
By the diameter of beam quality analysis instrument measurement hot spot, the optical intensity density peak value 1/e of the hot spot2The diameter of a circle at place is light
Spot diameter；
The target light intensity of optical fiber collimator output end is calculated by following formula：
<mrow>
<mi>A</mi>
<mo>=</mo>
<mfrac>
<mrow>
<msup>
<mi>&mu;&pi;D</mi>
<mn>2</mn>
</msup>
<mi>f</mi>
<mi>h</mi>
<mi>c</mi>
</mrow>
<mrow>
<mn>8</mn>
<mi>S</mi>
<mi>&lambda;</mi>
</mrow>
</mfrac>
</mrow>
Wherein, A is the target light intensity of optical fiber collimator output end；S is the photosurface area of single photon photoelectric device；λ is laser
Wavelength；D is the spot diameter that beam quality analysis instrument measures；F is the pulse recurrence frequency of laser, when the laser is continuous light
When, f=1；H is planck constant；C is the light velocity；When the laser is pulsed light, μ is that monochromatic light sub-light is incided in each pulse
The average photon number of electrical part, when the laser is continuous light, μ is the average light for inciding single photon photoelectric device each second
Subnumber.
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