CN105510005A - Measuring instrument for transmittance and reflectivity of optical element - Google Patents
Measuring instrument for transmittance and reflectivity of optical element Download PDFInfo
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- CN105510005A CN105510005A CN201610019864.7A CN201610019864A CN105510005A CN 105510005 A CN105510005 A CN 105510005A CN 201610019864 A CN201610019864 A CN 201610019864A CN 105510005 A CN105510005 A CN 105510005A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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Abstract
The invention provides a measuring instrument for the transmittance and reflectivity of an optical element. After a laser signal is modulated by adopting a light chopping device, the laser signal is divided into reference light and incident light through a light splitting prism; transmission light and reflected light are generated by irradiating the optical element through the incident light; reference light, transmission light and reflected light signals are acquired by a photodiode and then are converted into electric signals; after the electric signals are amplified by a pre-amplifier, the electric signals enter a lock-in amplifier; direct-current voltage which forms a direct proportion with light intensity is output by the lock-in amplifier, and direct-current voltage which corresponds to the transmission light and the reflected light is compared with direct-current voltage corresponding to the reference light so as to obtain the transmittance and reflectivity of the optical element. By arranging an optical standard sheet, amplifying times of a signal amplification unit of the measuring instrument are corrected. The measuring instrument provided by the invention is simple in structure and convenient to use, and is particularly suitable for online measurement of the transmittance and reflectivity of optical elements with relatively large sizes.
Description
Technical field
The invention belongs to instrumental science field, be specifically related to a kind of optical element Transflective rate measuring instrument.
Background technology
High power laser light is used widely in many high-technology fields, is the key areas that contemporary various countries are competitively studied.Along with the development of High-power Laser Technologies, the particularly development of inertial confinement fusion system, the power density of bearing required by optical system unit device is more and more higher.
In device of high power laser, an important feature is the employing of numerous heavy caliber and high precision optical element, as amplification used in laser amplifier and focusing and modulation crystal etc.The transmitance of these optical elements and reflectivity greatly affect loss in Laser Transmission process and focusing, and such as reflectivity is too high, are just very easy to produce terrible luminous point, cause damage to other element in device.In use, most surface is all through coating film treatment, and optical transmittance and reflectivity are also the important indicators evaluating optical element film coated quality for massive optics.
When high flux laser aid high flux runs, if optical element surface leaves any dirt, can blasting property evaporate after absorbing laser, cause glass or coated surface damage, reduce the damage threshold of optical element, this requires that optical element has very high cleanliness factor.The transmitance of optical element is also weigh an important indicator of optical element surface cleanliness factor.
Current, the key instrument measuring the transmittance and reflectance rate of optical element is spectrophotometer, and this apparatus measures result is accurate, and can measure the transmitance of optical element at certain wave band.But spectrophotometer generally adopts photomultiplier to add the technological means of integrating sphere, photomultiplier needs to use in the environment of dark, cause this instrument can only measure the transmitance of the optical element of reduced size, and be not suitable for the optical element measuring large-size (side to light is long-pending is greater than 200 × 200mm), especially can not realize on-line measurement.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of optical element Transflective rate measuring instrument.
Optical element Transflective rate measuring instrument of the present invention, comprises laser instrument, chopper, spectroscope, photodiode I, photodiode II, photodiode III, prime amplifier I, prime amplifier II, prime amplifier III, lock-in amplifier I, lock-in amplifier II, lock-in amplifier III, optical element jig, optical standard sheet and computing machine;
The continuous laser that described laser instrument sends is modulated into pulse laser through chopper, pulse laser after modulation is divided into the identical two bundle of pulsed laser of energy through spectroscope, one bundle of pulsed laser is received by photodiode I and is converted to electric signal, electric signal through prime amplifier I amplify and lock-in amplifier I amplification again after, be directly transferred to computing machine;
Another bundle of pulsed laser direct irradiation is being positioned on the optical element to be measured on optical element jig, and then produce transmitted pulse laser and reflected impulse laser, reflected impulse laser is wherein received by photodiode II and is converted to electric signal, prime amplifier II receives the electric signal of photodiode II generation and amplifies, and the electric signal after amplification is directly passed to computing machine after lock-in amplifier II; Transmitted pulse laser is received by photodiode III and is converted into electric signal, and prime amplifier III receives the electric signal of photodiode III generation and amplifies, and the electric signal after amplification is directly delivered to computing machine through lock-in amplifier III after again amplifying;
Described optical element jig is used for optical element to be measured and the optical standard sheet of being installed, and optical standard sheet is used for the demarcation to each amplifying unit enlargement factor of instrument before measuring optical element to be measured.
The laser that described laser instrument produces is continuous light, and output power is less than or equal to 20 milliwatts.
Described photodiode I, photodiode II are identical with the model of photodiode III.
Described lock-in amplifier I, lock-in amplifier II are identical with the model of lock-in amplifier III.
The reflectivity of described optical standard sheet is less than or equal to 4%.
The course of work of this optical element Transflective rate measuring instrument of the present invention is as follows:
A. lock-in amplifier I, lock-in amplifier II and lock-in amplifier III power on;
B. prime amplifier I, prime amplifier II and prime amplifier III power on;
C. chopper powers on;
D. computing machine is opened;
E. optical standard sheet is placed on optical element jig;
F. laser instrument is opened;
G. rectify an instrument according to optical standard sheet, obtain the enlargement factor A1 of reference light, transmitted light and reflected light three the passage amplifying units after correcting, A2 and A3.
H. laser instrument is closed;
I. take optical standard sheet away, place optical element to be measured;
J. laser instrument is opened;
K. the output DC voltage of lock-in amplifier I, lock-in amplifier II and lock-in amplifier III is respectively V1, V2 and V3, and the transmissivity calculating optical element to be measured is T=A1 × V2/A2 × V1, reflectivity R=A1 × V3/A3 × V1;
L. the power supply of each element is closed.
Optical element Transflective rate measuring instrument of the present invention, by arranging Transflective rate rate standard film, corrects the enlargement factor of measuring instrument.It is simple that this optical element Transflective rate measuring instrument of the present invention has structure, easy to use, be applicable to the transmittance and reflectance rate measuring large-size optical element, because the Lights section is separated with probe portion, therefore can when not using optical element jig, realize on-line measurement, and do not need optical element undercarriage.
Accompanying drawing explanation
Fig. 1 is the theory structure schematic diagram of optical element Transflective rate measuring instrument of the present invention;
In figure, 1. laser instrument 2. chopper 3. spectroscope 4. photodiode I 5. photodiode II 6. photodiode III 7. prime amplifier I 8. prime amplifier II 9. prime amplifier III 10. lock-in amplifier I 11. lock-in amplifier II 12. lock-in amplifier III 13. optical element jig 14. optical standard sheet 15. computing machine.
Embodiment
This present invention is illustrated below in conjunction with drawings and Examples.
Embodiment 1
See Fig. 1, optical element Transflective rate measuring instrument of the present invention, comprises laser instrument 1, chopper 2, spectroscope 3, photodiode I 4, photodiode II 5, photodiode III 6, prime amplifier I 7, prime amplifier II 8, prime amplifier III 9, lock-in amplifier I 10, lock-in amplifier II 11, lock-in amplifier III 12, optical element jig 13, optical standard sheet 14 and computing machine 15;
The continuous laser that described laser instrument 1 sends is modulated into pulse laser through chopper 2, pulse laser after modulation is divided into the identical two bundle of pulsed laser of energy through spectroscope 3, one bundle of pulsed laser is received by photodiode I 4 and is converted to electric signal, electric signal through prime amplifier I 7 amplify and lock-in amplifier I 10 amplification again after, be directly transferred to computing machine 15;
Another bundle of pulsed laser direct irradiation is being positioned on the optical element to be measured on optical element jig 13, and then produce transmitted pulse laser and reflected impulse laser, reflected impulse laser is wherein received by photodiode II 5 and is converted to electric signal, prime amplifier II 8 receives the electric signal of photodiode II 5 generation and amplifies, and the electric signal after amplification is directly passed to computing machine 15 after lock-in amplifier II 11;
Transmitted pulse laser is received by photodiode III 6 and is converted into electric signal, prime amplifier III 9 receives the electric signal of photodiode III 6 generation and amplifies, and the electric signal after amplification is directly delivered to computing machine 15 through lock-in amplifier III 12 after again amplifying.
Described optical element jig 13 is used for optical element to be measured and the optical standard sheet 14 of being installed, and optical standard sheet 14 is for the demarcation to each amplifying unit enlargement factor of instrument before measuring optical element to be measured.
The laser that described laser instrument 1 produces is continuous light, and output power is less than or equal to 20 milliwatts.
Described photodiode I 4, photodiode II 5 are identical with the model of photodiode III 6.
Described lock-in amplifier I 10, lock-in amplifier II 11 are identical with the model of lock-in amplifier III 12.
The reflectivity of described optical standard sheet 14 equals 4%.
Be placed on optical table by optical element Transflective rate measuring instrument of the present invention, laser instrument adopts output wavelength to be the green (light) laser of 532nm.Computing machine is opened after powering on to successively lock-in amplifier I 10, lock-in amplifier II 11, lock-in amplifier III 12, prime amplifier I 7, prime amplifier II 8, prime amplifier III 9 and chopper; Laser works also, after stablizing, demarcates the enlargement factor of each amplifying unit according to the transmittance and reflectance rate of optical standard sheet; Close lasing light emitter and take optical standard sheet away, place optical element K9 glass to be measured, incident laser and K9 glass surface angle at 45 °, after reopening laser instrument, according to the DC voltage that lock-in amplifier I, lock-in amplifier II and lock-in amplifier III export, calculate the transmittance and reflectance rate of optical element to be measured, recording transmissivity is 91.523%, and reflectivity is 1.029%.
Embodiment 2
Embodiment 2 is substantially identical with the embodiment of embodiment 1, and the key distinction is that replacing reflectivity 3.5% optical standard sheet 14 is for measuring transmissivity and the reflectivity of optical element to be measured.
The present invention is not limited to above-mentioned embodiment, and person of ordinary skill in the field is from above-mentioned design, and without performing creative labour, done all conversion, all drop within this protection scope of the present invention.
Claims (5)
1. an optical element Transflective rate measuring instrument, it is characterized in that, comprise laser instrument (1), chopper (2), spectroscope (3), photodiode I (4), photodiode II (5), photodiode III (6), prime amplifier I (7), prime amplifier II (8), prime amplifier III (9), lock-in amplifier I (10), lock-in amplifier II (11), lock-in amplifier III (12), optical element jig (13), optical standard sheet (14) and computing machine (15);
The continuous laser that described laser instrument (1) sends is modulated into pulse laser through chopper (2), pulse laser after modulation is divided into the identical two bundle of pulsed laser of energy through spectroscope (3), one bundle of pulsed laser is received by photodiode I (4) and is converted to electric signal, electric signal through prime amplifier I (7) amplify and lock-in amplifier I (10) amplification again after, be directly transferred to computing machine (15);
Another bundle of pulsed laser direct irradiation is being positioned on the optical element to be measured on optical element jig (13), and then produce transmitted pulse laser and reflected impulse laser, reflected impulse laser is wherein received by photodiode II (5) and is converted to electric signal, the electric signal that prime amplifier II (8) reception photodiode II (5) produces also amplifies, and the electric signal after amplification is directly passed to computing machine (15) after lock-in amplifier II (11); Transmitted pulse laser is received by photodiode III (6) and is converted into electric signal, the electric signal that prime amplifier III (9) reception photodiode III (6) produces also amplifies, and the electric signal after amplification is directly delivered to computing machine (15) through lock-in amplifier III (12) after again amplifying;
Described optical element jig (13) is used for optical element to be measured and the optical standard sheet (14) of being installed, and optical standard sheet (14) is for the demarcation to each amplifying unit enlargement factor of instrument before measuring optical element to be measured.
2. optical element Transflective rate measuring instrument according to claim 1, is characterized in that, the laser that described laser instrument (1) produces is continuous laser, and output power is less than or equal to 20 milliwatts.
3. optical element Transflective rate measuring instrument according to claim 1, is characterized in that, described photodiode I (4), photodiode II (5) are identical with the model of photodiode III (6).
4. optical element Transflective rate measuring instrument according to claim 1, is characterized in that, described lock-in amplifier I (10), lock-in amplifier II (11) are identical with the model of lock-in amplifier III (12).
5. optical element Transflective rate measuring instrument according to claim 1, is characterized in that, the reflectivity of described optical standard sheet (14) is less than or equal to 4%.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610019864.7A CN105510005B (en) | 2016-01-13 | 2016-01-13 | A kind of optical element Transflective rate measuring instrument |
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| CN201610019864.7A CN105510005B (en) | 2016-01-13 | 2016-01-13 | A kind of optical element Transflective rate measuring instrument |
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| CN105510005A true CN105510005A (en) | 2016-04-20 |
| CN105510005B CN105510005B (en) | 2019-01-15 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441817A (en) * | 2016-11-04 | 2017-02-22 | 电子科技大学 | Comprehensive measurement device for measuring reflectivity/transmittance of optical components |
| CN112229605A (en) * | 2020-09-22 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Device and method for measuring reflectivity and transmissivity of optical component |
| CN114264453A (en) * | 2021-12-21 | 2022-04-01 | 电子科技大学 | Measuring method for improving reflectivity/transmissivity of high-precision optical element |
| WO2023154209A1 (en) * | 2022-02-10 | 2023-08-17 | Applied Materials, Inc. | High precision and high throughput measurement of percentage light loss of optical devices |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2338738Y (en) * | 1998-09-10 | 1999-09-15 | 中国人民解放军国防科学技术大学 | Equipment for measuring transmission rate and reflection rate for large sized optical elements |
| JPH11274606A (en) * | 1998-03-25 | 1999-10-08 | Laser Atom Separation Eng Res Assoc Of Japan | Apparatus for measuring ase component of laser beam |
| JP2003028716A (en) * | 2001-07-11 | 2003-01-29 | Canon Inc | Spectrometric instrument and method for spectrometric measurement |
| CN1804572A (en) * | 2006-01-23 | 2006-07-19 | 中国科学院光电技术研究所 | Measurement method for reflectivity of high-reflection mirror |
| AU2008331441A1 (en) * | 2007-12-05 | 2009-06-11 | The Australian National University | Spectroscopic detection system and method |
| CN102109414A (en) * | 2010-12-15 | 2011-06-29 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN202393582U (en) * | 2011-12-08 | 2012-08-22 | 广州标旗电子科技有限公司 | Reflectivity detector for optical element |
| CN102661855A (en) * | 2012-05-31 | 2012-09-12 | 上海理工大学 | Method and system for progressive additional lens detection based on optical coherence tomography |
| CN103105284A (en) * | 2013-01-14 | 2013-05-15 | 中国科学院光电技术研究所 | Lithography machine illuminating system optical module transmittance measuring device and method |
| CN105006738A (en) * | 2015-08-12 | 2015-10-28 | 广州安特激光技术有限公司 | Parallel connection end-pumped series amplifying high-power laser |
| CN205374010U (en) * | 2016-01-13 | 2016-07-06 | 中国工程物理研究院激光聚变研究中心 | Optical element transmission reflectivity measurement appearance |
-
2016
- 2016-01-13 CN CN201610019864.7A patent/CN105510005B/en not_active Expired - Fee Related
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11274606A (en) * | 1998-03-25 | 1999-10-08 | Laser Atom Separation Eng Res Assoc Of Japan | Apparatus for measuring ase component of laser beam |
| CN2338738Y (en) * | 1998-09-10 | 1999-09-15 | 中国人民解放军国防科学技术大学 | Equipment for measuring transmission rate and reflection rate for large sized optical elements |
| JP2003028716A (en) * | 2001-07-11 | 2003-01-29 | Canon Inc | Spectrometric instrument and method for spectrometric measurement |
| CN1804572A (en) * | 2006-01-23 | 2006-07-19 | 中国科学院光电技术研究所 | Measurement method for reflectivity of high-reflection mirror |
| AU2008331441A1 (en) * | 2007-12-05 | 2009-06-11 | The Australian National University | Spectroscopic detection system and method |
| CN102109414A (en) * | 2010-12-15 | 2011-06-29 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN202393582U (en) * | 2011-12-08 | 2012-08-22 | 广州标旗电子科技有限公司 | Reflectivity detector for optical element |
| CN102661855A (en) * | 2012-05-31 | 2012-09-12 | 上海理工大学 | Method and system for progressive additional lens detection based on optical coherence tomography |
| CN103105284A (en) * | 2013-01-14 | 2013-05-15 | 中国科学院光电技术研究所 | Lithography machine illuminating system optical module transmittance measuring device and method |
| CN105006738A (en) * | 2015-08-12 | 2015-10-28 | 广州安特激光技术有限公司 | Parallel connection end-pumped series amplifying high-power laser |
| CN205374010U (en) * | 2016-01-13 | 2016-07-06 | 中国工程物理研究院激光聚变研究中心 | Optical element transmission reflectivity measurement appearance |
Non-Patent Citations (1)
| Title |
|---|
| 张春香 等: "双光路自相关***透反射率的重复精度测试", 《中国激光》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441817A (en) * | 2016-11-04 | 2017-02-22 | 电子科技大学 | Comprehensive measurement device for measuring reflectivity/transmittance of optical components |
| CN112229605A (en) * | 2020-09-22 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Device and method for measuring reflectivity and transmissivity of optical component |
| CN114264453A (en) * | 2021-12-21 | 2022-04-01 | 电子科技大学 | Measuring method for improving reflectivity/transmissivity of high-precision optical element |
| WO2023154209A1 (en) * | 2022-02-10 | 2023-08-17 | Applied Materials, Inc. | High precision and high throughput measurement of percentage light loss of optical devices |
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| CN105510005B (en) | 2019-01-15 |
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