CN204216013U - A kind of hold down gag and there is the equipment for Heating Processing of this hold down gag - Google Patents
A kind of hold down gag and there is the equipment for Heating Processing of this hold down gag Download PDFInfo
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- CN204216013U CN204216013U CN201420652645.9U CN201420652645U CN204216013U CN 204216013 U CN204216013 U CN 204216013U CN 201420652645 U CN201420652645 U CN 201420652645U CN 204216013 U CN204216013 U CN 204216013U
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- hopper
- hold down
- down gag
- telescopic shaft
- compacting part
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Abstract
The utility model relates to and is fixed technical field, provides a kind of hold down gag and has the equipment for Heating Processing of this hold down gag.Described hold down gag comprises cylinder and compacting part; Wherein, described cylinder comprises cylinder body and stretches out the telescopic shaft outside cylinder body; Described compacting part is fixedly connected with described telescopic shaft; Described compacting part rotates around telescopic shaft, to realize the evolution of compacting part under telescopic shaft rotation drives; Described compacting part does rectilinear motion, to realize the compression of compacted object and to loosen along with described telescopic shaft.Described hold down gag is used in equipment for Heating Processing, when silicon chip is sent in the process of mainframe box, can ensure to open in hopper lid process, the reliable and nonvoluntary play of the position stability of hopper, thus there is good positional precision, and contribute to the smooth opening of stocker lid.In addition, in silicon slice transmission course, keep hopper all the time with mainframe box positiver sealing, thus ensure that the microenvironment in mainframe box is not destroyed.
Description
Technical field
The utility model relates to and is fixed technical field, particularly relates to a kind of hold down gag and has the equipment for Heating Processing of this hold down gag.
Background technology
In semiconductor vertical thermal-processing device, hopper storage device is used for depositing and transmitting hopper, and wherein hopper is the box of a sealing, and inside holds silicon chip.The Main Function of the inner microenvironment of mainframe box is the picking and placeing and storing of silicon chip before and after technique, therefore needs microenvironment inner sealing to ensure that its cleanliness factor and oxygen content control.
Refer to Fig. 1, this figure is the structural relation schematic diagram between a kind of mainframe box of providing of prior art and hopper.
Hopper 101 storage device and mainframe box 102 are the two large box-type parts be docking together, and have window between the two, are convenient to chip transmission.When not transmitting silicon chip, the window's position is closed; During transmission silicon chip, window is opened.General, silicon chip is positioned in hopper 101, and multiple hopper 101 is placed on the different storage locations of hopper 101 storage device inside respectively.Before carrying out transmission technique, the hopper 101 stored in hopper 101 storage device is under the effect of horizontal stand, deliver to the window's position of hopper 101 storage device and mainframe box 102 junction, after hopper lid is opened, the silicon chip in hopper 101 is just taken out by manipulator 103 and is placed on technique boat 104.Due to the sealing of microenvironment inside will be ensured, before opening window, hopper 101 is placed on the horizontal stand before window, the sealing ring 105 that window place is arranged and the outer rim fluid-tight engagement of hopper 101 opening part, then utilize the unlocking mechanism on window to open hopper lid, carry out after lid is removed getting silicon chip operation.Now, mainframe box 102 just forms a confined space be communicated with hopper 101 box.
The unlocking mechanism that window is arranged need ensure there is good positional precision with the opening and closing device on hopper lid, thus by the smooth opening of hopper lid; Hopper lid smooth surface, in order to remove hopper lid, window is provided with Acetabula device, and has alignment pin to match with the location hole on hopper lid, to guarantee to carry out vacuum pumping smoothly, hopper lid is adsorbed on sucker and removes.Realize sealing for ensureing that sealing ring that the outer rim of hopper opening part can be arranged with window place engages smoothly, ensure positional accuracy when stocker lid is opened and removed simultaneously, prevent hopper from moving, shake, need badly and a kind of hold down gag is provided, hopper is fixed on assigned address so that the transmission of sealing and silicon chip.
Utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model is exactly how to provide a kind of hold down gag, hopper is fixed on assigned address so that the transmission of sealing and silicon chip.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of hold down gag, for being sent in the process of mainframe box by silicon chip, makes the position stability of hopper reliable;
Comprise cylinder and compacting part;
Wherein, described cylinder comprises cylinder body and stretches out the telescopic shaft outside cylinder body;
Described cylinder body is stationary parts, and described telescopic shaft is the moving component of cylinder, does rectilinear motion and rotation when cylinder starts;
Described compacting part is fixedly connected with described telescopic shaft;
Described compacting part rotates around telescopic shaft, to realize the location of compacting part under telescopic shaft rotation drives;
Described compacting part does rectilinear motion, to realize the compression of compacted object and to loosen along with described telescopic shaft.
Preferably, described compacting part is compressor arm; Described compressor arm is parallel to described telescopic shaft, and is fixed by connecting rod and telescopic shaft.
Preferably, between described compressor arm and connecting rod, link position is adjustable, adjustable with the thrust realizing hold down gag.
Preferably, the end face of described compressor arm is provided with cushion pad, for cushioning the pressure to compacted object.
Preferably, described connecting rod is fixed by retention mechanism and described telescopic shaft and compacting part;
Described retention mechanism is screw or bolt.
The utility model provides a kind of semiconductor vertical thermal-processing device, comprises mainframe box and the hopper storage device of docking;
The joint of described mainframe box and described hopper storage device is provided with sealed window, and described window can be opened as required or close;
Described hopper storage device comprises horizontal stand, for carrying the hopper including detachable lid, and described hopper is transported to sealed window position;
Described semiconductor vertical thermal-processing device also comprises hold down gag described in the utility model;
Described hold down gag is positioned near described sealed window, and for after described hopper transport puts in place, apply thrust to the marginal texture of described hopper, described thrust is perpendicular to the plane at sealed window place.
Preferably, described semiconductor vertical thermal-processing device also comprises controller, for controlling the direction of motion of the telescopic shaft of described cylinder, thus realizes the compression of hold down gag and loosens.
Preferably, described sealed window is square window; Described hold down gag is four, is arranged in the both sides of described sealed window;
Described sealed window is provided with sealing ring.
Preferably, described hold down gag is connected with transducer, after hopper compresses, have signal feedback, passes sheet action to carry out next step.
Preferably, described mainframe box is provided with Acetabula device and unlocking mechanism;
Described unlocking mechanism, for dismantling the lid on described hopper, makes annexation between lid and hopper parent remove;
Described Acetabula device for adsorbing described lid, and drives lid to leave described hopper parent.
(3) beneficial effect
The technical solution of the utility model has the following advantages: cylinder starts, and telescopic shaft rotation also does rectilinear motion relative to cylinder body, drives compacting part to do circular motion around telescopic shaft, does rectilinear motion simultaneously together with telescopic shaft.When compacting part rotates around telescopic shaft, achieve the location of compacting part; When compacting part does rectilinear motion, now compacting part changes relative to the distance of compacted object, thus realizes compressing and loosening.Described hold down gag is used for silicon chip is sent in the process of mainframe box, fixing hopper.Now, only need the direction of motion of telescopic shaft in control cylinder, the compression of hopper can be realized and loosen thus ensure the positiver sealing between hopper and sealed window, thus make cleanliness factor that microenvironment inner sustain is high and lower oxygen content.In addition, the adjustment of thrust can be realized by the position relationship between adjustment compressor arm and connecting rod, thus the thrust of hold down gag when controlling sealing.
In another preferred version of the present utility model, described hold down gag is used in semiconductor vertical thermal-processing device.And preferably adopt four hold down gag clamping hoppers.Now, hopper position stability is reliable, can ensure to pass the fail safe of getting sheet.In addition, hold down gag is connected with transducer, and hopper has signal feedback after compressing, thus can carry out next step biography sheet action.Thus, open the lid of hopper at unlocking mechanism, and when Acetabula device carries out vacuumizing action, decrease the vibration of hopper, thus ensure the sealing property of hopper and sealed window further.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1: the structural relation schematic diagram between a kind of mainframe box that prior art provides and hopper;
Fig. 2: the structural representation of the joint of the mainframe box that the utility model provides and hopper storage device;
Fig. 3: the structural representation of a kind of hold down gag that the utility model provides;
Fig. 4: the using state schematic diagram of the hold down gag that the utility model provides;
In figure: 1: hold down gag; 11: cylinder body; 12: telescopic shaft; 13: connecting rod; 14: compressor arm; 15: cushion pad; 16: retention mechanism;
2: sealed window; 3: horizontal stand; 4: sealing ring; 5: unlocking mechanism; 6: Acetabula device; 7: hopper.
Embodiment
Below in conjunction with drawings and Examples, execution mode of the present utility model is described in further detail.Following examples for illustration of the utility model, but can not be used for limiting scope of the present utility model.
Without loss of generality, in present embodiment with semiconductor vertical thermal-processing device for object is described.Should be appreciated that hold down gag that the application provides is applicable to carry out between any mainframe box and hopper storage device the occasion of chip transmission, and to be not limited in semiconductor vertical thermal-processing device between mainframe box and hopper storage device.
In description of the present utility model, it should be noted that, term " on ", the orientation of the instruction such as D score, "front", "rear", "left", "right" " just ", negation or position relationship be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of the device of instruction or hint indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
Refer to Fig. 2, this figure is the structural representation of the mainframe box of the semiconductor vertical thermal-processing device that this programme provides and the joint of hopper storage device.
This programme provides a kind of semiconductor vertical thermal-processing device, comprises mainframe box and the hopper storage device of docking.Wherein, the joint of described mainframe box and described hopper storage device is provided with sealed window 2, and described window can be opened as required or close.Described sealed window 2 can for general window mouth being arranged the form of sealing ring 4.Described hopper storage device comprises horizontal stand 3, for carrying the hopper 7 including detachable lid, and described hopper 7 is transported to sealed window position, " described hopper 7 is transported to sealed window position " herein and refers to and hopper 7 is tentatively put in place, outer rim and the sealed window 2 of its fixing described lid form preliminary to coordinate or close, as long as facilitate the compression work of follow-up hold down gag 1.It should be noted that, the accuracy tentatively put in place to make hopper, preferably alignment pin being set on described sealed window 2, and location hole is set on hopper lid, by the cooperation in pin and hole, realize the location of hopper 7.
Combine closely with sealed window 2 to make described hopper 7, and ensure that the action of the lid of follow-up unlatching hopper 7 can not cause adverse effect to described combination, thus realizing positiver sealing, this programme is provided with hold down gag 1 near sealed window 2, please refer to Fig. 3.Described in described hold down gag 1, hold down gag comprises cylinder and compacting part.Wherein, described cylinder comprises cylinder body 11 and the telescopic shaft 12 stretched out outside cylinder body.Described cylinder body 11 is stationary parts, and described telescopic shaft 12 is the moving component of cylinder, does rectilinear motion and rotation when cylinder starts.Described compacting part is fixedly connected with described telescopic shaft 12, preferably adopts connecting rod 13 to connect.Described compacting part rotates around telescopic shaft 12, to realize the location of compacting part under telescopic shaft 12 rotation drives; Described compacting part does rectilinear motion, to realize the compression of compacted object and to loosen along with described telescopic shaft 12.To it should be noted that described in this programme " near " refer to and ensure that hold down gag can realize the scope of its object, before also namely cylinder starts, compacting part keeps static, and now it can not hinder hopper 7 near sealing forms; After hopper puts in place, now start cylinder, telescopic shaft 12 rotation drive compacting part rotate, thus make compacting part near hopper and sidewall, and the rectilinear motion of telescopic shaft 12 drives compacting part rectilinear motion, thus compacting part is made to compress the marginal texture of hopper.
It is worth mentioning that, in this programme, semiconductor vertical thermal-processing device can also comprise controller, for controlling the direction of motion of telescopic shaft in described cylinder, telescopic shaft 12 rotation or opposing cylinder 11 is driven to do rectilinear motion, thus drive compacting part, complete compression, loosening up, thus realize the compression of hopper 7 and loosen.In addition, hold down gag is connected with transducer, and hopper has signal feedback after compressing, thus can carry out next step biography sheet action.
In this programme, compacting part preferentially adopts compressor arm 14 form, and preferably installs cushion pad 15 in one end of compressor arm 14, plays cushioning effect when compressing.When hold down gag 1 carries out compression action by releasing orientation, the telescopic shaft 12 of cylinder rotates a certain angle, and make telescopic shaft 12 be in contraction state (herein contraction state refer to the length that expansion link 12 is exposed to cylinder body 11 outside shorten), connecting rod 13 one end and telescopic shaft 12 are fastenedly connected, the other end is connected with compressor arm 14, connecting rod 13 realizes the action rotating forward, compress under the drive of expansion link, as a, c action in Fig. 3.Otherwise, when hold down gag 1 becomes releasing orientation from impaction state, the telescopic shaft 12 reverse rotation certain angle of cylinder, and telescopic shaft 12 is ejected a segment distance, make it to be in elongation state, connecting rod 13, under telescopic shaft 12 drives, drives compressor arm 14 to realize rotating, unclamping action, as b, d action of Fig. 3.Certainly, the corresponding relation between the rotation of telescopic shaft and rectilinear motion might not as in embodiment, and the motion of telescopic shaft and the compression of hold down gag, the corresponding relation unclamping action also might not as embodiment.
In this programme, be connected with retention mechanism 16 between connecting rod 13 with compressor arm 14, preferably, adopt screw to connect.By the position of adjustment connecting rod 13 with compressor arm 14, the adjustment of thrust can be realized.
In this programme, preferably four hold down gags 1 are arranged in hopper 7 aperture position of hopper 7 storage device and mainframe box joint by different directions, refer to Fig. 2 and Fig. 4.Now, described sealed window 2 is preferably square window, is arranged in the both sides of described sealed window 2.Certainly, the shape of sealed window 2 is not limited to square, and both sides wherein can be arranged on left and right sides, also can be upper and lower both sides.In this situation, evenly hopper 7 can be pressed on fixed position, ensure that smooth joint of sealing ring 4 that the outer rim of hopper 7 opening part can be arranged with window place realizes sealing, ensure positional accuracy when hopper 7 lid is opened and removed simultaneously, prevent hopper 7 from moving, shaking.When realizing compressing action, preferential, make the action simultaneously of multiple hold down gag 1 energy, ensure uniformity and the reliability of pressuring action, prevent unbalance stress.The multiple hold down gags 1 of certain employing except four also can realize the compression of hopper 7.
Before described hopper 7 and sealed window 2 are combined closely and realized seal, sealed window 2 belongs to closed condition, thus the microenvironment in guarantee mainframe box is not subject to ectocine.When the compacted device 1 of hopper 7 compresses, and realize with the combining closely of sealed window 2 after, the induction installation now on semiconductor vertical thermal-processing device sends signal, so that follow-up opening encapsulation window 2, and opens hopper lid.Mainframe box is also provided with unlocking mechanism 5 and Acetabula device 6.What described unlocking mechanism 5 removed lid and hopper 7 parent is fixedly connected with relation, and then described sucker vacuumizes, and makes lid be adsorbed on described Acetabula device 6, under the drive of Acetabula device 6, is separated from hopper 7 parent.
It should be noted that " mainframe box is provided with unlocking mechanism 5 and Acetabula device 6 " mentioned in this programme, concrete form is provided with luffer boards preferably but not limited on the sealed window 2 of mainframe box, and unlocking mechanism 5 and Acetabula device 6 is fixed on luffer boards.
Above execution mode only for illustration of the utility model, but not to restriction of the present utility model.Although be described in detail the utility model with reference to embodiment, those of ordinary skill in the art is to be understood that, various combination, amendment or equivalent replacement are carried out to the technical solution of the utility model, do not depart from the spirit and scope of technical solutions of the utility model, all should be encompassed in the middle of right of the present utility model.
Claims (10)
1. a hold down gag, for being sent in the process of mainframe box by silicon chip, makes the position stability of hopper reliable;
It is characterized in that, described hold down gag comprises cylinder and compacting part;
Wherein, described cylinder comprises cylinder body and stretches out the telescopic shaft outside cylinder body;
Described cylinder body is stationary parts, and described telescopic shaft is the moving component of cylinder, does rectilinear motion and rotation when cylinder starts;
Described compacting part is fixedly connected with described telescopic shaft;
Described compacting part rotates around telescopic shaft, to realize the location of compacting part under telescopic shaft rotation drives;
Described compacting part does rectilinear motion, to realize the compression of compacted object and to loosen along with described telescopic shaft.
2. hold down gag according to claim 1, is characterized in that, described compacting part is compressor arm; Described compressor arm is parallel to described telescopic shaft, and is fixed by connecting rod and telescopic shaft.
3. hold down gag according to claim 2, is characterized in that, between described compressor arm and connecting rod, link position is adjustable, adjustable with the thrust realizing hold down gag.
4. hold down gag according to claim 2, is characterized in that, the end face of described compressor arm is provided with cushion pad, for cushioning the pressure to compacted object.
5. hold down gag according to claim 2, is characterized in that, described connecting rod is fixed by retention mechanism and described telescopic shaft and compacting part;
Described retention mechanism is screw or bolt.
6. a semiconductor vertical thermal-processing device, comprises mainframe box and the hopper storage device of docking;
The joint of described mainframe box and described hopper storage device is provided with sealed window, and described window can be opened as required or close;
Described hopper storage device comprises horizontal stand, for carrying the hopper including detachable lid, and described hopper is transported to sealed window position;
It is characterized in that, described semiconductor vertical thermal-processing device also comprises the hold down gag in claim 1 to 5 described in any one;
Described hold down gag is positioned near described sealed window, and for after described hopper transport puts in place, apply thrust to the marginal texture of described hopper, described thrust is perpendicular to the plane at sealed window place.
7. semiconductor vertical thermal-processing device according to claim 6, is characterized in that, described semiconductor vertical thermal-processing device also comprises controller, for controlling the direction of motion of the telescopic shaft of described cylinder, thus realizes the compression of hold down gag and loosens.
8. semiconductor vertical thermal-processing device according to claim 6, is characterized in that, described sealed window is square window; Described hold down gag is four, is arranged in the both sides of described sealed window;
Described sealed window is provided with sealing ring.
9. semiconductor vertical thermal-processing device according to claim 6, is characterized in that, described hold down gag is connected with transducer, after hopper compresses, have signal feedback, passes sheet action to carry out next step.
10. semiconductor vertical thermal-processing device according to claim 6, is characterized in that, described mainframe box is provided with Acetabula device and unlocking mechanism;
Described unlocking mechanism, for dismantling the lid on described hopper, makes annexation between lid and hopper parent remove;
Described Acetabula device for adsorbing described lid, and drives lid to leave described hopper parent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420652645.9U CN204216013U (en) | 2014-11-04 | 2014-11-04 | A kind of hold down gag and there is the equipment for Heating Processing of this hold down gag |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420652645.9U CN204216013U (en) | 2014-11-04 | 2014-11-04 | A kind of hold down gag and there is the equipment for Heating Processing of this hold down gag |
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| Publication Number | Publication Date |
|---|---|
| CN204216013U true CN204216013U (en) | 2015-03-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420652645.9U Active CN204216013U (en) | 2014-11-04 | 2014-11-04 | A kind of hold down gag and there is the equipment for Heating Processing of this hold down gag |
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| CN (1) | CN204216013U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106409728A (en) * | 2016-10-31 | 2017-02-15 | 北京七星华创电子股份有限公司 | Sealing structure and semiconductor device |
| CN112053982A (en) * | 2020-09-23 | 2020-12-08 | 北京七星华创集成电路装备有限公司 | Storage box door opening device and semiconductor process equipment |
| CN112382597A (en) * | 2020-11-20 | 2021-02-19 | 北京七星华创集成电路装备有限公司 | Storage box conveying device |
-
2014
- 2014-11-04 CN CN201420652645.9U patent/CN204216013U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106409728A (en) * | 2016-10-31 | 2017-02-15 | 北京七星华创电子股份有限公司 | Sealing structure and semiconductor device |
| CN106409728B (en) * | 2016-10-31 | 2019-02-19 | 北京北方华创微电子装备有限公司 | A kind of sealing structure and a kind of semiconductor equipment |
| CN112053982A (en) * | 2020-09-23 | 2020-12-08 | 北京七星华创集成电路装备有限公司 | Storage box door opening device and semiconductor process equipment |
| CN112053982B (en) * | 2020-09-23 | 2022-04-05 | 北京七星华创集成电路装备有限公司 | Storage box door opening device and semiconductor process equipment |
| CN112382597A (en) * | 2020-11-20 | 2021-02-19 | 北京七星华创集成电路装备有限公司 | Storage box conveying device |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180319 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
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| TR01 | Transfer of patent right |