CN202667918U - Pulse laser etching reel-to-reel soft conducting film device - Google Patents

Pulse laser etching reel-to-reel soft conducting film device Download PDF

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Publication number
CN202667918U
CN202667918U CN 201220266396 CN201220266396U CN202667918U CN 202667918 U CN202667918 U CN 202667918U CN 201220266396 CN201220266396 CN 201220266396 CN 201220266396 U CN201220266396 U CN 201220266396U CN 202667918 U CN202667918 U CN 202667918U
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China
Prior art keywords
conductive film
flexible conductive
laser
volume
roll
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Expired - Lifetime
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CN 201220266396
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Chinese (zh)
Inventor
赵裕兴
狄建科
张伟
益凯劼
张子国
蔡仲云
闫华
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JIANGYIN DELI LASER EQUIPMENT CO Ltd
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JIANGYIN DELI LASER EQUIPMENT CO Ltd
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Priority to CN 201220266396 priority Critical patent/CN202667918U/en
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Publication of CN202667918U publication Critical patent/CN202667918U/en
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Abstract

The utility model relates to a pulse laser etching reel-to-reel soft conducting film device, wherein laser emitted by a laser device (1) passes through an optical shutter (2), a 1/2 wave plate (3) and a Glan prism (4) in sequence and then is emitted into a beam expanding mirror (5) for coaxial beam expansion, the laser subjected to beam expansion and collimation by the beam expanding mirror (5) reaches a full back lens (6) and is emitted into a vibration mirror system (7) after being reflected by the full back lens (6), and the laser emitted out from the vibration mirror system (7) passes through a telecentric field lens (8) and is focused on soft conducting film which is absorbed on a vacuum absorption platform (13) and used as workpiece to be machined. The pulse laser etching reel-to-reel soft conducting film device is adapted to production requirements, reduces production processes, increases work efficiency, and saves production cost.

Description

A kind of device of pulse laser etching volume to volume flexible conductive film
Technical field
The utility model relates to a kind of device of pulse laser etching volume to volume flexible conductive film, belongs near field optic, electronic touch designing technique and laser micro-machining technology field.
Background technology
The former material of traditional touch-screen flexible conductive film is web-like, can process but the laser-induced thermal etching equipment on the market needs conducting film to cut into fixed dimension, and this kind mode is come the increase of equipment cost and the increase of production stage to producing tape, and production efficiency is lower.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency, the device of the pulse laser etching volume to volume flexible conductive film that provides a kind of and adapt to Production requirement, reduce production process, increase production efficiency, save production cost.
The purpose of this utility model is achieved in that a kind of device of pulse laser etching volume to volume flexible conductive film, described device includes laser instrument, optical gate, 1/2 wave plate, Glan prism, beam expanding lens, eyeglass is all-trans, galvanometer system and psychological field mirror far away, the laser that described laser instrument sends is successively through optical gate, inject beam expanding lens behind 1/2 wave plate and the Glan prism light beam is carried out coaxial expanding, laser behind the beam expanding lens beam-expanding collimation arrives the eyeglass that is all-trans, laser behind the lens reflecting that is all-trans is injected galvanometer system, the laser that penetrates galvanometer system through focus on behind the psychological field mirror far away be adsorbed on the vacuum absorbing platform as to be processed flexible conductive film on; Described flexible conductive film is wound on the film transmission system, described volume film transmission system includes let off roll and the wind-up roll that is symmetrical set, flexible conductive film one end is wound on the let off roll, the other end is wound on the wind-up roll, the flexible conductive film that is positioned at let off roll and wind-up roll flattens and is adsorbed on the vacuum absorbing platform, and be positioned to press on the flexible conductive film of let off roll and wind-up roll and be equipped with hold down gag, and the top of flexible conductive film is provided with a CCD contraposition observing system.
The device of a kind of pulse laser etching of the utility model volume to volume flexible conductive film, the both sides, top of described flexible conductive film are respectively arranged with dust-precipitating system and scavenger system.
The device of a kind of pulse laser etching of the utility model volume to volume flexible conductive film, described laser instrument is the high-frequency short-pulse laser.
The device of a kind of pulse laser etching of the utility model volume to volume flexible conductive film, described laser instrument, galvanometer system and volume film transmission system all link to each other with industrial computer by communication system.
Compared with prior art, the beneficial effects of the utility model are:
The utility model is by using high-frequency short-pulse laser as lasing light emitter, conducting film in the different touch-screen products is carried out laser-induced thermal etching, conducting film is gasified under the effect of high-frequency short pulse solid state laser and reach the purpose of ablation, by the disposable etching of finishing these conductive film materials of high accuracy CCD contraposition, the dust that produces processes touch-screen electronic product pollution-free, that linearity is stable, function is intact through special scavenger system and large flow laying dust system control of dust.Cooperate automatically coiled material system, reaching the minimizing manufacturing procedure, the effect of rapid processing.
Description of drawings
Fig. 1 is the structural representation of the device of a kind of pulse laser etching of the utility model volume to volume flexible conductive film.
Wherein:
Laser instrument 1, optical gate 2,1/2 wave plate 3, Glan prism 4, beam expanding lens 5, the eyeglass 6 that is all-trans, galvanometer system 7, psychological field mirror 8 far away, CCD contraposition observing system 9, dust-precipitating system 10, scavenger system 11, hold down gag 12, to be processed 13, industrial computer 14, communication system 15, volume film transmission system 16, vacuum absorbing platform 17.
The specific embodiment
Referring to Fig. 1, the utility model relates to a kind of device of pulse laser etching volume to volume flexible conductive film, described device includes laser instrument 1, optical gate 2,1/2 wave plate 3, Glan prism 4, beam expanding lens 5, eyeglass 6 is all-trans, galvanometer system 7 and psychological field mirror 8 far away, the laser that described laser instrument 1 sends is through optical gate 2 gauge tap light, specifically can be controlled by the software control induced signal opening and closing of optical gate 2, thereby realize the external control laser switch of laser instrument 1, behind the optical gate 2 control laser beams through 1/2 wave plate 3, regulate 1/2 wave plate and cooperate Glan prism 4 can realize that the certain limit internal power is adjustable, provide very large facility to the selection of laser power; Then carry out coaxial expanding by 5 pairs of light beams of beam expanding lens, improve the angle of divergence of beam propagation on the one hand, thereby reach the purpose of beam path alignment; On the one hand, laser beams coaxial is expanded in addition, so that the rear hot spot of focusing and depth of focus are less, thereby realize the purpose of laser stabilization etching; Light beam arrives the eyeglass 6 that is all-trans behind beam expanding lens 5 beam-expanding collimations, makes laser all reflex to galvanometer system 7 and is cooperating psychological field mirror 8 far away can control accurately Laser Focusing to as on to be processed 13 the flexible conductive film, makes its etch effect better stable;
Wherein, flexible conductive film is wound on the film transmission system 16, described volume film transmission system 16 includes let off roll and the wind-up roll that is symmetrical set, flexible conductive film one end is wound on the let off roll, the other end is wound on the wind-up roll, the flexible conductive film that is positioned at let off roll and wind-up roll flattens and to be adsorbed on the vacuum absorbing platform 17, and is positioned to press on the flexible conductive film of let off roll and wind-up roll and is equipped with hold down gag 12 so that flexible conductive film when launching its flatness better; Described laser instrument 1, galvanometer system 7 and volume film transmission system 16 all link to each other with industrial computer 14 by communication system 15;
Simultaneously, the top of described flexible conductive film is provided with a CCD contraposition observing system 9, and the both sides, top of described flexible conductive film are respectively arranged with dust-precipitating system 10 and scavenger system 11.
The lithographic method of the device of a kind of pulse laser etching of the utility model volume to volume flexible conductive film, the method includes following steps:
The laser that step 1, laser instrument 1 send behind beam expanding lens 5 collimator and extenders, focuses on by galvanometer system 7 and the psychological field mirror far away 8 with less focal length behind 1/2 wave plate 3 and Glan prism 4 more again, makes focal beam spot at 5um~20um;
Step 2, flexible conductive film is adsorbed on the vacuum absorbing platform 17,
Step 3, carry out CCD location; Utilization has the CCD contraposition observing system 9 that CCD grabs the target function automatically, only need in software, to set up for the first time template, the figure that imports sample target position in bitmap layer target position and the platform coordinate is arranged one by one is corresponding, and follow-up same batch products is directly grabbed target automatically can finish the location;
Step 4: when laser carries out etching according to design configuration, open simultaneously the dust-precipitating system 10 and the scavenger system 11 that are arranged at as the both sides, top of to be processed 13 flexible conductive film, guarantee that the dust that etching produces all sucks in the dust-precipitating system 10;
Step 5: be rotated by synchronous machine drives let off roll and wind-up roll, so that the flexible conductive film that processes through above-mentioned steps is wound up on the wind-up roll, simultaneously, need next section flexible conductive film of processing to move on the vacuum absorbing platform 17, carry out subsequently step 3 and step 4, until the whole etchings of compliant conductive film coiled material of reeling on the let off roll are complete.

Claims (4)

1. the device of a pulse laser etching volume to volume flexible conductive film, it is characterized in that: described device includes laser instrument (1), optical gate (2), 1/2 wave plate (3), Glan prism (4), beam expanding lens (5), eyeglass (6) is all-trans, galvanometer system (7) and psychological field mirror (8) far away, the laser that described laser instrument (1) sends is successively through optical gate (2), inject beam expanding lens (5) behind 1/2 wave plate (3) and the Glan prism (4) light beam is carried out coaxial expanding, laser behind beam expanding lens (5) beam-expanding collimation arrives the eyeglass (6) that is all-trans, laser after the eyeglass that is all-trans (6) reflection is injected galvanometer system (7), and the laser that penetrates galvanometer system (7) is adsorbed on the upper flexible conductive film as to be processed (12) of vacuum absorbing platform (13) through focusing on behind the psychological field mirror (8) far away; Described flexible conductive film is wound on the film transmission system (16), described volume film transmission system (16) includes let off roll and the wind-up roll that is symmetrical set, flexible conductive film one end is wound on the let off roll, the other end is wound on the wind-up roll, the flexible conductive film that is positioned at let off roll and wind-up roll flattens and to be adsorbed on the vacuum absorbing platform (17), and the flexible conductive film top that is positioned at let off roll and wind-up roll is provided with a CCD contraposition observing system (9).
2. a kind of device of pulse laser etching volume to volume flexible conductive film as claimed in claim 1, it is characterized in that: the both sides, top of described flexible conductive film are respectively arranged with dust-precipitating system (10) and scavenger system (11).
3. a kind of device of pulse laser etching volume to volume flexible conductive film as claimed in claim 1, it is characterized in that: described laser instrument (1) is the high-frequency short-pulse laser.
4. such as the device of a kind of pulse laser etching volume to volume flexible conductive film as described in claim 1 or 2 or 3, it is characterized in that: described laser instrument (1), galvanometer system (7) and volume film transmission system (16) all link to each other with industrial computer (14) by communication system (15).
CN 201220266396 2012-06-07 2012-06-07 Pulse laser etching reel-to-reel soft conducting film device Expired - Lifetime CN202667918U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220266396 CN202667918U (en) 2012-06-07 2012-06-07 Pulse laser etching reel-to-reel soft conducting film device

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Application Number Priority Date Filing Date Title
CN 201220266396 CN202667918U (en) 2012-06-07 2012-06-07 Pulse laser etching reel-to-reel soft conducting film device

Publications (1)

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CN202667918U true CN202667918U (en) 2013-01-16

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102717191A (en) * 2012-06-07 2012-10-10 江阴德力激光设备有限公司 Device and method for pulse laser etching of roll-to-roll flexible conducting films
CN105313481A (en) * 2015-11-23 2016-02-10 深圳英诺激光科技有限公司 Transparent material laser-inducing wet process colorful marking device and method
CN108941930A (en) * 2018-08-09 2018-12-07 苏州千层茧农业科技有限公司 A kind of conductive film and preparation method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102717191A (en) * 2012-06-07 2012-10-10 江阴德力激光设备有限公司 Device and method for pulse laser etching of roll-to-roll flexible conducting films
CN102717191B (en) * 2012-06-07 2015-06-10 江阴德力激光设备有限公司 Device and method for pulse laser etching of roll-to-roll flexible conducting films
CN105313481A (en) * 2015-11-23 2016-02-10 深圳英诺激光科技有限公司 Transparent material laser-inducing wet process colorful marking device and method
CN108941930A (en) * 2018-08-09 2018-12-07 苏州千层茧农业科技有限公司 A kind of conductive film and preparation method thereof

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