CN202181347U - 改进真空镀膜机传动机构 - Google Patents
改进真空镀膜机传动机构 Download PDFInfo
- Publication number
- CN202181347U CN202181347U CN2011202660224U CN201120266022U CN202181347U CN 202181347 U CN202181347 U CN 202181347U CN 2011202660224 U CN2011202660224 U CN 2011202660224U CN 201120266022 U CN201120266022 U CN 201120266022U CN 202181347 U CN202181347 U CN 202181347U
- Authority
- CN
- China
- Prior art keywords
- ring
- time
- outer shroud
- swinging strut
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011202660224U CN202181347U (zh) | 2011-07-26 | 2011-07-26 | 改进真空镀膜机传动机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011202660224U CN202181347U (zh) | 2011-07-26 | 2011-07-26 | 改进真空镀膜机传动机构 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202181347U true CN202181347U (zh) | 2012-04-04 |
Family
ID=46174390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011202660224U Expired - Fee Related CN202181347U (zh) | 2011-07-26 | 2011-07-26 | 改进真空镀膜机传动机构 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202181347U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150258561A1 (en) * | 2014-03-11 | 2015-09-17 | Nalux Co., Ltd. | Deposition apparatus and tray holder |
CN106048550A (zh) * | 2015-04-16 | 2016-10-26 | 纳卢克斯株式会社 | 蒸镀装置及包含基于蒸镀装置的成膜工序的制造方法 |
CN106148897A (zh) * | 2015-04-17 | 2016-11-23 | 纳卢克斯株式会社 | 蒸镀装置和托盘保持件 |
-
2011
- 2011-07-26 CN CN2011202660224U patent/CN202181347U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150258561A1 (en) * | 2014-03-11 | 2015-09-17 | Nalux Co., Ltd. | Deposition apparatus and tray holder |
US9861996B2 (en) * | 2014-03-11 | 2018-01-09 | Nalux Co., Ltd. | Deposition apparatus and tray holder |
CN106048550A (zh) * | 2015-04-16 | 2016-10-26 | 纳卢克斯株式会社 | 蒸镀装置及包含基于蒸镀装置的成膜工序的制造方法 |
CN106048550B (zh) * | 2015-04-16 | 2020-03-17 | 纳卢克斯株式会社 | 蒸镀装置及包含基于蒸镀装置的成膜工序的制造方法 |
CN106148897A (zh) * | 2015-04-17 | 2016-11-23 | 纳卢克斯株式会社 | 蒸镀装置和托盘保持件 |
CN106148897B (zh) * | 2015-04-17 | 2019-10-29 | 纳卢克斯株式会社 | 蒸镀装置和托盘保持件 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN202181347U (zh) | 改进真空镀膜机传动机构 | |
CN102560432B (zh) | 一种基片承载装置及应用该装置的基片处理设备 | |
CN110396671B (zh) | 一种高通量制备多组分均匀薄膜材料的装置和方法 | |
CN208593780U (zh) | 一种片料连续翻转分路机构 | |
CN102899618A (zh) | 改进真空镀膜机传动机构 | |
CN206089796U (zh) | 用于pvd加工的挂具 | |
CN108950509A (zh) | 一种行星式三级齿轮传动刀片夹具装置 | |
CN202181340U (zh) | 真空镀膜机转动机构 | |
CN202499902U (zh) | 可实现自动翻转的基片架 | |
US20120097106A1 (en) | Physical vapor deposition device for coating workpiece | |
CN204589295U (zh) | 可调变角度的镀膜装置 | |
US20120090541A1 (en) | Workpiece carrier and deposition device having same | |
US20050263078A1 (en) | Drive mechanism for a vacuum treatment apparatus | |
CN211497775U (zh) | 一种用于卧式真空镀膜机的工件安装机构 | |
CN102899617A (zh) | 真空镀膜机转动机构 | |
CN202187056U (zh) | 真空镀膜装置的改良结构 | |
CN208038542U (zh) | 一种金属手机外壳的真空镀膜机 | |
CN106086783A (zh) | 一种遮挡装置及其遮挡方法和蒸镀*** | |
CN206635398U (zh) | 一种热蒸发镀膜机 | |
CN101353778B (zh) | 溅镀式镀膜装置及镀膜方法 | |
CN115724178A (zh) | 一种包装罐生产自动化输送机械 | |
CN203641407U (zh) | 真空离子镀膜机多级传动装置 | |
CN206127414U (zh) | 一种真空镀膜***及其柔性产品光学镀膜工装 | |
CN203360562U (zh) | 一种具有双旋转机构的oled镀膜机 | |
CN108456863B (zh) | 一种风镜自动旋转镀膜伞架 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: HUAIAN YULIN METAL TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: YULIN VEHICLE FITTINGS (KUNSHAN) CO., LTD. Effective date: 20140828 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 215325 SUZHOU, JIANGSU PROVINCE TO: 223300 HUAIAN, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140828 Address after: 223300 No. 267 Qianjiang Road, Huaiyin District, Jiangsu, Huaian Patentee after: Huaian Yulin Metal Technology Co., Ltd. Address before: Suzhou City, Jiangsu province 215325 town Kunshan City Zhaofeng Road No. 8 Patentee before: Yulin Auto Accessories (Kunshan) Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120404 Termination date: 20160726 |