CN202181347U

CN202181347U - Improved transmission mechanism of vacuum coating machine

Info

Publication number: CN202181347U
Application number: CN2011202660224U
Authority: CN
Inventors: 黄水祥
Original assignee: YULIN AUTO ACCESSORIES (KUNSHAN) CO Ltd
Current assignee: Huaian Yulin Metal Technology Co., Ltd.
Priority date: 2011-07-26
Filing date: 2011-07-26
Publication date: 2012-04-04
Anticipated expiration: 2021-07-26

Abstract

The utility model relates to an improved transmission mechanism of a vacuum coating machine, which comprises a first rotating support, a second rotating support and a motor, wherein the motor drives the second rotating support and the first rotating support to rotate back and forth. The first rotating support and the second rotating support are positioned in a vacuum chamber. The first rotating support comprises a first upper inner ring, a first upper outer ring, a plurality of spokes and a first lower ring, two ends of the spokes are respectively connected with the first upper inner ring and the first upper outer ring, and the spokes are radially distributed. The first upper outer ring and the first lower ring are connected and fixed through a plurality paralleled vertical rods. The second rotating support comprises a second upper ring and a second lower ring, and the second upper ring and the second lower ring are connected and fixed through a plurality of second vertical rods. The second lower ring is provided with arc-shaped holes, through which the corresponding first vertical rods can conveniently penetrate. A plurality of trays capable of fixing coating workpieces are arranged between the first upper inner ring and the first upper outer ring, and the trays are rotatably fixed between the first upper inner ring and the first upper outer ring through center shafts. The corresponding ends of central rotating shafts on the trays and the second upper ring are respectively provided with racks and pinions which are mutually engaged.

Description

Improve the vacuum plating unit transmission rig

Technical field

The utility model belongs to vacuum coating film equipment, particularly a kind of processing units of realizing evaporation coating through conversion film-coating workpiece position.

Background technology

Vacuum plating is meant and need under higher vacuum, carries out plated film, specifically comprises many types, comprises vacuum ionic evaporation, magnetron sputtering, and the MBE molecular beam epitaxy, PLD laser splash depositions etc. are a variety of, and main thought is to be divided into two kinds of evaporation and sputters.

For evaporation coating, generally be that the heating target makes surface component be evaporated out with atomic group or ionic species, and be deposited in substrate (or claiming workpiece) surface, form film through film process.Thickness evenness and component uniformity depend primarily on: the lattice match degree of workpiece material and target; Workpiece surface temperature; Target evaporation power and speed; Plated film vacuum tightness; Plated film time and thickness size.When having adjusted workpiece coating temperature and vacuum tightness; And behind the target evaporation conditions; Just need be according to the workpiece particular requirement; Need the biography mechanism through reasonable setting come conversion film-coating workpiece position continuously, just can guarantee the workpiece coating quality, especially for the particularly important that seems of the large-scale workpiece like automotive hub and so on.

The utility model content

In order to overcome above-mentioned defective, the utility model provides a kind of improvement vacuum plating unit transmission rig, reaches workpiece plated film uniformity coefficient through continuous adjustment film-coating workpiece position, has improved efficient.

The utility model for the technical scheme that solves its technical problem and adopt is: a kind of improvement vacuum plating transmission rig; Comprise first swinging strut, second swinging strut and can drive the motor that related this first swinging strut of this second swinging strut back and forth rotates; This first, second swinging strut is positioned at vacuum chamber; This vacuum chamber is made up of base and the dome cover that is installed on this base, wherein:

1) this first runing rest comprise be fixed in this dome cover top turning cylinder first in ring, be positioned at this on first ring peripheral first on outer shroud, two ends be connected to this a plurality of spokes of outer shroud and distribution radially and encircling for first time on ring and first on first; This is connected and fixed by a plurality of first parallel up-and-down rods between outer shroud and this first time ring on first; To the inward flange that should encircle for first time, this base is provided with a plurality of rollers that this time ring rotates of being convenient to;

2) this second runing rest comprise be positioned at this on first outer shroud peripheral second on ring; And the second time ring that is positioned at this first time ring top; This on second ring be connected and fixed by the many second parallel up-and-down rods between encircling with this second time; To should many first up-and-down rods; Be respectively equipped with on this second time ring and be convenient to a plurality of arcuate sockets that first up-and-down rod passes, and also be respectively equipped with roller and the chute of being convenient to slide between this first time ring and this second time ring;

3) this also is provided with the pallet of a plurality of fixedly film-coating workpieces on first on ring and first between outer shroud; These a plurality of pallets respectively through the hub rotational fixation in this on first on the ring and first between the outer shroud, and encircle on central rotating shaft corresponding end and this second on this pallet and also be respectively equipped with intermeshing rack and pinion.

As the further improvement of the utility model, this motor drives related this first swinging strut of this second swinging strut and back and forth rotates through being tight with at the driving rolls of this second time ring preglabellar field.

As the further improvement of the utility model, these a plurality of spokes be uniformly distributed in this on first in outer shroud on the ring and first, these a plurality of pallets lay respectively at this encircle on first, on first between outer shroud and adjacent two spokes.

As the further improvement of the utility model, this driving rolls is fixed in the upper end of a coupling shaft, and this base is fixed at this coupling shaft middle part and the lower end stretches out in this base, and drives and rotate through being installed on this outside motor of this vacuum chamber.

As the further improvement of the utility model, this driving rolls is a gear, this second time the ring preglabellar field be provided with can with the annular rack of this toothing, this motor is a step motor.

The useful technique effect of the utility model is: said first swinging strut can freely rotate around this dome cover top rotation axis; A plurality of pallets in this first swinging strut can center on separately, and hub freely overturns; And said second swinging strut is provided with roller and the chute being convenient to slide between encircling with this second time through this first time ring and is supported in this first swinging strut; A plurality of second up-and-down rods in this second swinging strut pass the arcuate socket on first time ring in this first swinging strut respectively simultaneously; Like this when second up-and-down rod when arcuate socket one end rotates the arcuate socket the other end; This second swinging strut just drives this first swinging strut to begin to rotate; And on this pallet on central rotating shaft corresponding end and this second ring also be respectively equipped with intermeshing rack and pinion; Realized that thus this second swinging strut will begin prior to a beat of this first swinging strut to rotate, the gap of this beat makes corresponding pallet do once freely to overturn, and workpiece obtains sufficient plated film processing on the pallet thereby be fixed in.

Description of drawings

Fig. 1 is the axial sectional view of the utility model;

Fig. 2 is the A-A sectional view of the utility model.

Contrast above accompanying drawing, make supplementary notes as follows:

1---base 15---tooth bar

Second time ring of 2---dome covers 16---

4---rollers 17---, second up-and-down rod

5---first time ring 18---arcuate socket

6---first up-and-down rod 21---driving rolls

9---ring 22 on first---motor

10---outer shroud 24 on first---coupling shaft

11---pallet 25---spoke

13---gear 27---conductive trough

14---encircling 28 on second---rotation axis

Embodiment

In conjunction with Fig. 1 and Fig. 2, below further describe:

A kind of improvement vacuum plating transmission rig; Comprise first swinging strut, second swinging strut and can drive the motor 22 that related this first swinging strut of this second swinging strut back and forth rotates; This first, second swinging strut is positioned at vacuum chamber; This vacuum chamber is made up of base 1 and the dome cover 2 that is installed on this base, wherein:

1) this first swinging strut comprise be fixed in these dome cover 2 top rotation axiss 28 first in ring 9, be positioned at this on first ring 9 peripheral first on outer shroud 10, two ends be connected to this outer shroud 10 equally distributed radially a plurality of spokes 25 and encircle 5 first time also on ring 9 and first on first; This is connected through a plurality of first parallel up-and-down rods 6 between outer shroud 10 and this first time ring on first fixes; To the preglabellar field that should encircle for first time, this base is provided with a plurality of rollers 4 of being convenient to this first time ring 5 rotations;

2) this second runing rest comprise be positioned at this on first outer shroud 10 peripheral second on encircle 14; And the second time ring 16 that is positioned at this first time ring 5 tops; This on second ring 14 be connected and fixed by the many second parallel up-and-down rods 17 between encircling 16 with this second time; To should many first up-and-down rods 6; Be respectively equipped with on this second time ring 16 and be convenient to a plurality of arcuate sockets 18 that first up-and-down rod 6 passes, and also be respectively equipped with roller and the chute of being convenient to slide between this first time ring 5 and this second time ring 16;

3) this also is provided with the pallet 11 of a plurality of fixedly film-coating workpieces on first on ring 9, first between outer shroud 10 and adjacent two spokes 25; These a plurality of pallets respectively through the hub rotational fixation in this on first on the ring 9 and first between the outer shroud 10, and the central rotating shaft corresponding end is encircled 14 with this on second and also is respectively equipped with intermeshing tooth bar 15 and gear 13 on this pallet 11.

This motor 22 is through being tight with at the driving rolls 21 of this second time ring 16 preglabellar fields; Driving related this first swinging strut of this second swinging strut back and forth rotates; This driving rolls 21 is fixed in the upper end of a coupling shaft 24, and this base 1 is fixed at these coupling shaft 24 middle parts and the lower end stretches out in this base, and drives and rotate through being installed on this outside motor 22 of this vacuum chamber; Rotate in order more accurately to control this swinging strut; This driving rolls 21 is a gear, this second time the ring 16 preglabellar fields be provided with can with the annular rack of this toothing, this motor 22 is a step motor.

In order to accomplish vacuum plating processing, this dome cover sidepiece also must be provided with the hermatic door of being convenient to load and unload film-coating workpiece, in addition; This base is provided with target and heating arrangements; This heating arrangements is for placing the conductive trough 27 of this target, and this conductive trough is installed on fixed support on this base, and draw behind this vacuum chamber through two current conducting rods these conductive trough both sides; Be connected with supply transformer secondary winding two ends respectively; Need vaccum-pumping equipment and film-coating workpiece is preheated equipment in the said in addition vacuum chamber, all these are the necessary technique means of vacuum plating, also are the known technology of insider; Not the technological innovation of the utility model, do not describe in detail inferior.

Claims

1. one kind is improved the vacuum plating unit transmission rig; Comprise first swinging strut, second swinging strut and can drive the motor (22) that related this first swinging strut of this second swinging strut back and forth rotates; This first, second swinging strut is positioned at vacuum chamber; This vacuum chamber is made up of base (1) and the dome cover (2) that is installed on this base, it is characterized in that: wherein:

1) this first runing rest comprise be fixed in this dome cover (2) top turning cylinder (28) first in ring (9), be positioned at this on first ring (9) peripheral first on outer shroud (10), two ends be connected to this outer shroud (10) a plurality of spokes (25) of distribution and encircle (5) first time radially also on ring (9) and first on first; This is connected and fixed by a plurality of parallel first up-and-down rods (6) between outer shroud (10) and this first time ring on first; To the inward flange that should encircle for first time, this base is provided with a plurality of rollers (4) that this first time ring (5) rotates of being convenient to;

2) this second runing rest comprise be positioned at this on first outer shroud (10) peripheral second on ring (14) and second time ring (16) of being positioned at this first time ring (5) top; This on second ring (14) be connected and fixed by many parallel second up-and-down rods (17) with encircling between (16) for this second time; To should many first up-and-down rods (6); Be respectively equipped with on this second time ring (16) and be convenient to a plurality of arcuate sockets (18) that first up-and-down rod (6) passes, and also be respectively equipped with roller and the chute of being convenient to slide between this first time ring (5) and this second time ring (16);

3) this also is provided with the pallet (11) of a plurality of fixedly film-coating workpieces on first on ring (9) and first between outer shroud (10); These a plurality of pallets respectively through the hub rotational fixation in this on first on the ring (9) and first between the outer shroud (10), and encircle (14) on central rotating shaft corresponding end and this second on this pallet (11) and also be respectively equipped with intermeshing tooth bar (15) and gear (13).

2. improvement vacuum plating unit transmission rig according to claim 1 is characterized in that: this motor (22) drives related this first swinging strut of this second swinging strut and back and forth rotates through being tight with at the driving rolls (21) of this second time ring (16) preglabellar field.

3. improvement vacuum plating unit transmission rig according to claim 1 and 2; It is characterized in that: these a plurality of spokes (25) be uniformly distributed in this on first in outer shroud (10) on the ring (9) and first, these a plurality of pallets (11) lay respectively at this and encircle on first between outer shroud (10) on (9), first and adjacent two spokes (25).

4. improvement vacuum plating unit transmission rig according to claim 3; It is characterized in that: this driving rolls (21) is fixed in the upper end of a coupling shaft (24); This base (1) is fixed at this coupling shaft (24) middle part and the lower end stretches out in this base, and drives and rotate through being installed on outside this motor (22) of this vacuum chamber.

5. improvement vacuum plating unit transmission rig according to claim 4 is characterized in that: this driving rolls (21) is a gear, this second time the ring (16) preglabellar field be provided with can with the annular rack of this toothing, this motor (22) is a step motor.