CN201200981Y - 一种多级干式真空泵的清洗装置 - Google Patents
一种多级干式真空泵的清洗装置 Download PDFInfo
- Publication number
- CN201200981Y CN201200981Y CNU2008200133658U CN200820013365U CN201200981Y CN 201200981 Y CN201200981 Y CN 201200981Y CN U2008200133658 U CNU2008200133658 U CN U2008200133658U CN 200820013365 U CN200820013365 U CN 200820013365U CN 201200981 Y CN201200981 Y CN 201200981Y
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- vacuum pump
- dry vacuum
- gas piping
- mass flow
- cleaning device
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2008200133658U CN201200981Y (zh) | 2008-06-06 | 2008-06-06 | 一种多级干式真空泵的清洗装置 |
Applications Claiming Priority (1)
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CNU2008200133658U CN201200981Y (zh) | 2008-06-06 | 2008-06-06 | 一种多级干式真空泵的清洗装置 |
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CN201200981Y true CN201200981Y (zh) | 2009-03-04 |
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CNU2008200133658U Expired - Lifetime CN201200981Y (zh) | 2008-06-06 | 2008-06-06 | 一种多级干式真空泵的清洗装置 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130019900A1 (en) * | 2011-07-19 | 2013-01-24 | Multivac Sepp Haggenmuller Gmbh & Co. Kg | Cleaning method and system for a vacuum pump |
CN105649953A (zh) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | 一种用于多级干式真空泵的气路*** |
CN112705538A (zh) * | 2020-12-04 | 2021-04-27 | 浙江银轮机械股份有限公司 | 罗茨泵和螺杆泵真空机组清洗组件 |
CN114593036A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 一种用于多级干式真空泵的气路分配*** |
CN114962269A (zh) * | 2021-02-26 | 2022-08-30 | 中国科学院微电子研究所 | 真空泵及真空泵*** |
CN116428155A (zh) * | 2023-04-13 | 2023-07-14 | 北京通嘉宏瑞科技有限公司 | 泵体清扫***及泵体清扫控制方法 |
-
2008
- 2008-06-06 CN CNU2008200133658U patent/CN201200981Y/zh not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130019900A1 (en) * | 2011-07-19 | 2013-01-24 | Multivac Sepp Haggenmuller Gmbh & Co. Kg | Cleaning method and system for a vacuum pump |
CN105649953A (zh) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | 一种用于多级干式真空泵的气路*** |
CN112705538A (zh) * | 2020-12-04 | 2021-04-27 | 浙江银轮机械股份有限公司 | 罗茨泵和螺杆泵真空机组清洗组件 |
CN114593036A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 一种用于多级干式真空泵的气路分配*** |
CN114962269A (zh) * | 2021-02-26 | 2022-08-30 | 中国科学院微电子研究所 | 真空泵及真空泵*** |
CN116428155A (zh) * | 2023-04-13 | 2023-07-14 | 北京通嘉宏瑞科技有限公司 | 泵体清扫***及泵体清扫控制方法 |
CN116428155B (zh) * | 2023-04-13 | 2024-03-22 | 北京通嘉宏瑞科技有限公司 | 泵体清扫***及泵体清扫控制方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: CAS SHENYANG SCIENTIFIC INSTRUMENTS CO., LTD. Free format text: FORMER NAME: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S |
|
CP03 | Change of name, title or address |
Address after: Hunnan Shenyang 110197 Liaoning province Xinyuan street, No. 1 Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Shanghai Kai Kai Vacuum Technology Co., Ltd. Assignor: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Contract record no.: 2016210000006 Denomination of utility model: Cleaner of multilevel dry-type vacuum pump Granted publication date: 20090304 License type: Exclusive License Record date: 20160203 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
CX01 | Expiry of patent term |
Granted publication date: 20090304 |
|
CX01 | Expiry of patent term |