CN201017175Y - Large damping precision flexible supporting mechanism - Google Patents
Large damping precision flexible supporting mechanism Download PDFInfo
- Publication number
- CN201017175Y CN201017175Y CNU200720067425XU CN200720067425U CN201017175Y CN 201017175 Y CN201017175 Y CN 201017175Y CN U200720067425X U CNU200720067425X U CN U200720067425XU CN 200720067425 U CN200720067425 U CN 200720067425U CN 201017175 Y CN201017175 Y CN 201017175Y
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- support mechanism
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Abstract
The utility model provides a large-damping exact and soft supporting mechanism which consists of a soft block noumenon and a large-damping rubber body. One group of vertical elastic gemel is respectively arranged near two ends of the soft block noumenon, which is transversely prongs the soft block noumenon. A through groove is opened at the middle of the soft block noumenon face. A pair of lateral elastic gemels is arranged at two sides of the soft block noumenon. A middle elastic gemel is also arranged between the through groove and each lateral elastic gemel. The large-damping rubber boy is contained inside the through groove and is impacted and fixed by a front baffle and a backboard. The damping of the soft supporting mechanism is large, which not only can effectively reduce and eliminate a low-frequency vibration toward a field lens but also has a micro-adjusting flexibility of five directions and can avoid an occurrence of over-constraint when installing the field lens, thus a high-frequency vibration towards the field lens is effectively filtered. With compact structure, high reliability and strong adaptability, the soft supporting mechanism can satisfy the working requirement of precision equipments such as a Bumping lithography machine etc.
Description
Technical field
The utility model relates to the accurate flexible support mechanism of the flexible support mechanism of lithographic equipment in the semiconductor applications, particularly a kind of big damping.
Background technology
Photoetching is a very important procedure in the semiconductor fabrication process, and characteristic line breadth is one of important indicator of photoetching, and the characteristic line breadth that reduces photoetching can effectively improve the integrated level of IC circuit.But the factor of effect characteristics live width is many and complicated, and one of them potential bottleneck is exactly little vibration of projection objective.And the principal element that causes the little vibration of projection objective has: the scan action power of foundation vibration, motion platform (stepping of work stage and mask platform and scanning in the system), the vibration of the inner world (the gentle film of gas-liquid pipeline) and the random noise in the external world etc.
Usually the basic way that solves little vibration problem of high-precision device is to manage device is kept apart with the installation ground, the vibration in the external world is imported by ground avoiding, and causes the vibration of device.U.S. Pat 5,953,105 (the days for announcing: on September 14th, 1999), US6,038, on March 14th, 2000) and US5 the 013 (day for announcing:, 187,519 (the days for announcing: be to adopt following method on February 16th, 1993): projection objective is installed on the main substrate, main substrate is suspended on the basic framework by vibration isolation system, vibration isolation system is with main substrate, the objective system and the external world keep apart the inner world of formation, vibration isolator by ACTIVE CONTROL carries out vibration damping and vibration isolation, thereby effectively isolate and vibration that the scan action power of foundation vibration and work stage and mask platform eliminated causes is imported projection objective into by main substrate, little vibration problem of objective lens optical system is improved and reduces.But above patent all adopts the world, the inside one isolation damper at object lens place, and little vibration problem of the projection objective that causes because of the random noise in the disturbance in the inner worlds of object lens (the gentle film of gas-liquid pipeline) and the external world is not effectively solved.
U.S. Pat 6,791, the 664 (days for announcing: used the back-up block of simple steel compliant mechanism on September 14th, 2004) as object lens.In order to prevent that object lens position from constraint taking place, on back-up block, be processed with the flexible hinge structure that designs according to principle of dynamics, thereby make global stiffness and the relevant resonance frequency of complete machine that object lens suspend can both be limited in certain scope.But, because can rising object lens, this steel flexible support mechanism supports and positioning action, therefore the rigidity to two degree of freedom relating to z and Rx direction is bigger, can't passively regulate.Therefore under the corresponding modality-specific, cause that object lens can't obtain effective vibration damping in little vibration of this both direction.In addition, because the damping of steel flexible block is very little, for low-frequency vibration (less than 500Hz), effectiveness in vibration suppression is very undesirable.For the photoetching process of characteristic line breadth smaller or equal to 100nm, the exposure system of litho machine requires work stage (comprising mask platform) to be no more than 2nm with respect to the positioning error of projection objective, therefore, the steel supporting mechanism of original low resistance is difficult to realize the stability indicator of object lens needs.To this, patent US6,791,664 take piezoelectric ceramics actuator and piezoelectric sensor are implanted method in the steel back-up block as one, vibration signal according to detected piezoelectric sensor, the damping ratio of back-up block is adjusted in stretching of control piezoelectric ceramics actuator, realizes the active damping of object lens.By this vibration damping mode, making at the main low frequency modal of object lens---the relative damping of " operating rod " mode brings up to 16% by original 0.2%, can reduce vibration amplitude effectively and reach 86%.But improve also little simultaneously at the effectiveness in vibration suppression of " pendulum model " mode.And the technical scheme that adopts U.S. Patent Publication has reduced the support stiffness of flexible supporting block; The active damping mode of piezoelectric ceramics needs to adopt the controller of specific control algolithm to control, and has strengthened the complexity that realizes; During piezoelectric ceramics action simultaneously, the slight changing of the relative positions takes place and produces the serviceable life that lateral shear power can reduce piezoelectric actuator in the piezoelectric ceramics upper and lower surface, and influences its long term operation stability and reliability.
The utility model content
The purpose of this utility model is to provide a kind of big damping flexible support mechanism between object lens and main substrate, the object lens high order mode vibration shape is carried out vibration damping and elimination, and the random noise that it is primarily aimed at the disturbance in the inner worlds of object lens (the gentle film of gas-liquid pipeline) and the external world causes that little vibration of object lens carries out vibration damping and weakening.
For reaching above-mentioned purpose, the utility model provides a kind of big damping accurate flexible support mechanism, it is made up of flexible block body and big damping rubber body, place, the close two ends up and down of described flexible block body is provided with one group of vertical elastic hinge that laterally runs through the flexible block body respectively, the middle part in flexible block body front has groove, both sides are provided with a pair of lateral elasticity hinge, also be provided with a middle part elastic hinge between groove and each the lateral elasticity hinge, described big damping rubber body is installed with in groove, and is fixed by forward and backward plate washer.
In the accurate flexible support mechanism of above-mentioned big damping, described flexible block body is a rectangular parallelepiped body of stainless steel.
In the accurate flexible support mechanism of above-mentioned big damping, the vertical slit of described lateral elasticity hinge is communicated with the slit of middle part elastic hinge.
In the accurate flexible support mechanism of above-mentioned big damping, described big damping rubber body section shape is with the shape of groove, and volume is slightly larger than the volume of groove.
In the accurate flexible support mechanism of above-mentioned big damping, described middle part elastic hinge is provided with a pair of through hole near an end of groove, the front and back plate washer is pressed abd fixed on big damping rubber body in the groove by clamping screw, nut, and described screw passes the through hole and the nut lock of middle part elastic hinge.
In the accurate flexible support mechanism of above-mentioned big damping, described flexible block bodies top has a shoulder hole, the middle part of described big damping rubber body has a waist typed through hole vertically, and shoulder hole is connected by a bolt with waist typed through hole and tightens by the screw thread of shoulder hole bottom.
In the accurate flexible support mechanism of above-mentioned big damping, described flexible block bodies top is symmetrically distributed with two threaded holes, and vertical elastic hinge and threaded hole intersection have two through holes.
In the accurate flexible support mechanism of above-mentioned big damping, described flexible block body bottom equidistantly is distributed with four groups of eight threaded holes.
The utility model makes it compared with prior art owing to adopted above-mentioned technical scheme, has following advantage and good effect:
1. the utility model compact conformation, reliability height, adaptability is strong, has the distinguishing feature of big damping, has Rx simultaneously, Ry, Rz, x, the fine-tuning capability of five degree of freedom of y, and at z to having certain support stiffness;
2. because this flexible support mechanism has the fine setting flexibility of five positions, in the time of can avoiding object lens to install restricted problem took place, thereby filtered the dither of object lens effectively;
3. the characteristics that have big damping because of it so can carry out vibration damping and elimination to the low-frequency vibration of object lens effectively, satisfy the job requirement of precision equipments such as Bumping litho machine.
Description of drawings
The concrete structure of the accurate flexible support mechanism of big damping of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the vibration absorber of projection objective;
Fig. 2 is the main vibration modes synoptic diagram of the object lens of flexible block support;
Fig. 3 is the front view of the utility model flexible block body;
Fig. 4 is the side view of the utility model flexible block body;
Fig. 5 is the assembling synoptic diagram of the accurate flexible support mechanism of big damping.
Embodiment
Below will be described in further detail the accurate flexible support mechanism of big damping of the present utility model.
Fig. 1 shows the position relation of projection objective 1, flexible support mechanism 4, main substrate 2 and active damping system 3.In the present embodiment, three flexible support mechanism 4 equal circumference are arranged between object lens 1 and the main substrate 2, and connect by mounting interface.Main substrate 2 and object lens 1 one are installed on the basic framework (not shown) by three groups of active damping systems 3.Projection objective 1 owing to adopted the steel flexible block to support, makes the object lens association go out two kinds of main relatively mode of oscillations of active low characteristic frequency when being connected with main substrate 2, and they are respectively " operating rod " mode and " pendulum model " mode, as shown in Figure 2.Fig. 2 left side be " operating rod " mode, refer to the relative main substrate of object lens, little commentaries on classics Rx and Ry take place near two transverse axis x axles of object lens installed surface and y axle; On the right of Fig. 2 is " pendulum model " mode, refers to small horizontal-shift Δ x and Δ y that the relative main substrate installed surface of object lens takes place, and " pendulum model " mode mainly is subject to the tangential rigidity of object lens back-up block; In addition, also have characteristic frequency, be meant along the small movements Δ z of Z-axis z axle and be the rotation Rz of rotating shaft with the z axle than two higher suspension mode.
Decay as early as possible and dissipation finishes for little the shaking that makes the corresponding two kinds of mode of object lens, need when appropriateness improves the vertical stiffness and tangential rigidity of flexible supporting block, increase the damping ratio of back-up block.The utility model is at Bumping step photo-etching machine (live width 2 μ m, unit alignment precision 500nm) a kind of settling mode has been proposed, promptly in high rigidity steel back-up block, process through the representative spring of dynamic analysis design and the microtexture of elastic hinge, in the groove that these run through, be filled with the rubber type of material of high damping simultaneously.The material of filling must meet the photoetching environmental requirement and have big damping, appropriate rigidity, good with the cohesiveness of back-up block material surface, adeciduate characteristics.
Consult Fig. 3 to Fig. 5, the accurate flexible support mechanism 4 of big damping of the present utility model mainly is made up of flexible block body 5 and big damping rubber body 21.Flexible block body 5 is a rectangular parallelepiped body of stainless steel, its place, close two ends up and down symmetric position respectively is provided with one group vertical elastic hinge 15, and laterally in flexible block body 5, form vertical elastic hinge district 14, the effect of these two groups of vertical elastic hinges 15 is: minor rotation Rx, Ry and displacement x, the Δ y of object lens 1 along x, y direction is provided.
The positive middle part of flexible block body 5 has the cross section and is similar to groove 8 to two " scissors " of opening, both sides are provided with a pair of lateral elasticity hinge 13, also be provided with a middle part elastic hinge 23 between groove 8 and each the lateral elasticity hinge 13, in present embodiment, the vertical slit of lateral elasticity hinge 13 is connected with the slit of middle part elastic hinge 23, form lateral elasticity hinge area 9, to play the effect of z to vibration damping.The cross sectional shape of big damping rubber body 21 is with the shape of groove 8, and volume is slightly larger than the volume of groove 8, thereby when it is installed with in groove 8, can fit tightly with groove 8.Middle part elastic hinge 23 also is provided with a pair of through hole 22 near an end of groove 8, forward and backward plate washer 17,19 is pressed abd fixed on big damping rubber body 21 in the groove 8 by clamping screw 20, nut 16, and screw 20 passes the through hole 22 and nut 16 lockings of middle part elastic hinge 23.
The top of flexible block body 5 is symmetrically distributed with two threaded holes 11, as the mounting interface of object lens 1, forms object lens mounting interface district 6.Because the aperture of threaded hole 11 is darker,, offer two through holes 25 in the threaded hole 11 and the intersection of vertical elastic hinge 15 for avoiding influencing the serviceability of vertical elastic hinge 15.Except two threaded holes 11, flexible block body 5 tops also have a shoulder hole 7, the middle part of big damping rubber body 21 vertically has a corresponding with it waist typed through hole 24, shoulder hole 7 is connected by a bolt 18 with waist typed through hole 24 and tightens by the screw thread of shoulder hole 7 bottoms, in order to from vertically compressing big damping rubber body 21, and realize the pretension of lateral elasticity hinge 13.By regulating the locking degree of bolt 18, can suitably regulate the z of this flexible support mechanism to rigidity.
The bottom of flexible block body 5 equidistantly is distributed with four groups of eight threaded holes 12, as with the mounting interface of main substrate 2, form main substrate mounting interface district 10.
For the concrete form in the object lens mounting interface district 6 and the main substrate mounting interface district 10 of flexible support mechanism 4, can carry out appropriateness adjustment according to the concrete form of object lens 1, it is to the influence of the basic mode of object lens 1 and flexible support mechanism 4 and effectiveness in vibration suppression and little.
In sum, adopt the accurate flexible support mechanism 4 of big damping of the present utility model, can realize object lens at Rx, Ry, Rz, x, the fine setting of five degree of freedom of y, the mistake orientation problem when having avoided object lens to install can be filtered effectively to the dither of object lens.Because of each flexible block body 5 middle part is equipped with all compacted up and down big damping rubber body 21 in front and back, damping ratio significantly increases, and can carry out vibration damping and elimination to the low-frequency vibration of object lens effectively simultaneously.Pretension bolt 18 has the function that appropriateness is adjusted the vertical support stiffness of flexible block.Front and back two baffle plates 17,19 have the function that compresses and seal big damping rubber body 21.
Claims (13)
1. the accurate flexible support mechanism of one kind big damping, it is characterized in that: the described accurate flexible support mechanism of big damping (4) is made up of flexible block body (5) and big damping rubber body (21), place, the close two ends up and down of described flexible block body (5) is provided with one group of vertical elastic hinge (15) that laterally runs through flexible block body (5) respectively, the positive middle part of flexible block body (5) has groove (8), both sides are provided with a pair of lateral elasticity hinge (13), also be provided with a middle part elastic hinge (23) between groove (8) and each the lateral elasticity hinge (13), described big damping rubber body (21) is installed with in groove (8), and before passing through, back plate washer (17,19) be fixed.
2. the accurate flexible support mechanism of big damping as claimed in claim 1, it is characterized in that: described flexible block body (5) is a rectangular parallelepiped body of stainless steel.
3. the accurate flexible support mechanism of big damping as claimed in claim 1, it is characterized in that: the vertical slit of described lateral elasticity hinge (13) is communicated with the slit of middle part elastic hinge (23).
4. the accurate flexible support mechanism of big damping as claimed in claim 1 is characterized in that: the shape of the same groove of described big damping rubber body (21) cross sectional shape (8).
5. the accurate flexible support mechanism of big damping as claimed in claim 1, it is characterized in that: the volume of described big damping rubber body (21) is slightly larger than the volume of groove (8).
6. the accurate flexible support mechanism of big damping as claimed in claim 1, it is characterized in that: described middle part elastic hinge (23) is provided with a pair of through hole (22) near an end of groove (8).
7. the accurate flexible support mechanism of big damping as claimed in claim 6, it is characterized in that: described forward and backward plate washer (17,19) is pressed abd fixed on big damping rubber body (21) in the groove (8) by clamping screw (20), nut (16), and described screw (20) passes the through hole (22) and nut (16) locking of middle part elastic hinge (23).
8. the accurate flexible support mechanism of big damping as claimed in claim 1, it is characterized in that: described flexible block body (5) top has a shoulder hole (7).
9. the accurate flexible support mechanism of big damping as claimed in claim 8, it is characterized in that: the middle part of described big damping rubber body (21) has a waist typed through hole (24) vertically.
10. the accurate flexible support mechanism of big damping as claimed in claim 9, it is characterized in that: described shoulder hole (7) is connected by a bolt (18) with waist typed through hole (24) and tightens by the screw thread of shoulder hole (7) bottom.
11. the accurate flexible support mechanism of big damping as claimed in claim 1, it is characterized in that: described flexible block body (5) top is symmetrically distributed with two threaded holes (11).
12. the accurate flexible support mechanism of big damping as claimed in claim 11, it is characterized in that: described vertical elastic hinge (15) has two through holes (25) with threaded hole (11) intersection.
13. the accurate flexible support mechanism of big damping as claimed in claim 1 is characterized in that: described flexible block body (5) bottom equidistantly is distributed with four groups eight threaded holes (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200720067425XU CN201017175Y (en) | 2007-02-16 | 2007-02-16 | Large damping precision flexible supporting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200720067425XU CN201017175Y (en) | 2007-02-16 | 2007-02-16 | Large damping precision flexible supporting mechanism |
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| Publication Number | Publication Date |
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| CN201017175Y true CN201017175Y (en) | 2008-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNU200720067425XU Expired - Lifetime CN201017175Y (en) | 2007-02-16 | 2007-02-16 | Large damping precision flexible supporting mechanism |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101515117B (en) * | 2008-02-21 | 2011-05-18 | Asml荷兰有限公司 | Lithographic apparatus having a chuck with a visco-elastic damping layer |
| CN102722015A (en) * | 2012-06-21 | 2012-10-10 | 中国科学院长春光学精密机械与物理研究所 | Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element |
| CN103047348A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Magnetic suspension vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
| CN103047351A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Magnetic suspension zero-stiffness vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane |
| CN103047356A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling |
| CN103062286A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Zero stiffness vibration isolator for flexible membrane angle decoupling and vibration isolation system formed by same |
| CN103062304A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Magnetic suspension zero stiffness vibration isolator and vibration isolation system for flexible membrane angle decoupling |
| CN103324032A (en) * | 2012-03-22 | 2013-09-25 | 上海微电子装备有限公司 | Polyhedron main substrate, manufacturing method and processing method thereof |
| CN104076612A (en) * | 2013-03-27 | 2014-10-01 | 上海微电子装备有限公司 | Flexible heavy load support device |
| CN107102518A (en) * | 2017-06-26 | 2017-08-29 | 中国科学技术大学 | The flexible platform that high accuracy applied to near-field scan photoetching is passively aligned |
| US10456882B2 (en) | 2017-10-20 | 2019-10-29 | Industrial Technology Research Institute | Fixture for thin-walled workpiece |
| CN114198389A (en) * | 2021-11-15 | 2022-03-18 | 哈尔滨工业大学 | Flexible hinge assembly for micro-rotation of workpiece table |
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2007
- 2007-02-16 CN CNU200720067425XU patent/CN201017175Y/en not_active Expired - Lifetime
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8928860B2 (en) | 2008-02-21 | 2015-01-06 | Asml Netherlands B.V. | Lithographic apparatus having a chuck with a visco-elastic damping layer |
| CN101515117B (en) * | 2008-02-21 | 2011-05-18 | Asml荷兰有限公司 | Lithographic apparatus having a chuck with a visco-elastic damping layer |
| CN103324032A (en) * | 2012-03-22 | 2013-09-25 | 上海微电子装备有限公司 | Polyhedron main substrate, manufacturing method and processing method thereof |
| CN102722015A (en) * | 2012-06-21 | 2012-10-10 | 中国科学院长春光学精密机械与物理研究所 | Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element |
| CN103047351B (en) * | 2012-12-19 | 2014-04-02 | 哈尔滨工业大学 | Magnetic suspension zero-stiffness vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane |
| CN103047348A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Magnetic suspension vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
| CN103062304A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Magnetic suspension zero stiffness vibration isolator and vibration isolation system for flexible membrane angle decoupling |
| CN103047356A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling |
| CN103047351A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Magnetic suspension zero-stiffness vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane |
| CN103047356B (en) * | 2012-12-19 | 2015-02-11 | 哈尔滨工业大学 | Electromagnetic damping zero-rigidity vibration isolator with flexible film for angular decoupling |
| CN103062286B (en) * | 2012-12-19 | 2014-10-29 | 哈尔滨工业大学 | Zero stiffness vibration isolator for flexible membrane angle decoupling and vibration isolation system formed by same |
| CN103062286A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Zero stiffness vibration isolator for flexible membrane angle decoupling and vibration isolation system formed by same |
| CN103047348B (en) * | 2012-12-19 | 2015-02-11 | 哈尔滨工业大学 | Magnetic suspension vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
| CN104076612A (en) * | 2013-03-27 | 2014-10-01 | 上海微电子装备有限公司 | Flexible heavy load support device |
| CN104076612B (en) * | 2013-03-27 | 2016-04-20 | 上海微电子装备有限公司 | Heavy load flexible supporting device |
| CN107102518A (en) * | 2017-06-26 | 2017-08-29 | 中国科学技术大学 | The flexible platform that high accuracy applied to near-field scan photoetching is passively aligned |
| US10456882B2 (en) | 2017-10-20 | 2019-10-29 | Industrial Technology Research Institute | Fixture for thin-walled workpiece |
| CN114198389A (en) * | 2021-11-15 | 2022-03-18 | 哈尔滨工业大学 | Flexible hinge assembly for micro-rotation of workpiece table |
| CN114198389B (en) * | 2021-11-15 | 2022-07-05 | 哈尔滨工业大学 | Flexible hinge assembly for micro-rotation of workpiece table |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080206 |
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| CX01 | Expiry of patent term |