CN102722015A - Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element - Google Patents
Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element Download PDFInfo
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- CN102722015A CN102722015A CN2012102067473A CN201210206747A CN102722015A CN 102722015 A CN102722015 A CN 102722015A CN 2012102067473 A CN2012102067473 A CN 2012102067473A CN 201210206747 A CN201210206747 A CN 201210206747A CN 102722015 A CN102722015 A CN 102722015A
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Abstract
The invention relates to a micro adjusting device for three degrees of freedom Z, tip and tilt of an optical element, belonging to the field of assembly, adjustment and compensation of a deep ultraviolet projection lithography lens. In order to solve the problem of high-precision adjustment of the three degrees of freedom Z, tip and tilt of the optical element of the lithography projection lens, the micro adjusting device comprises a lens frame, a lens tube, three branched movement chains and three pairs of double-capacitance sensors, wherein the lens frame is connected with the lens tube through the branched movement chains; each branched movement chain is composed of a flexible spherical hinge, a driver and a single-shaft flexible hinge, the driver is positioned under the flexible spherical hinge, and the single-shaft flexible hinge is positioned under the driver; the three branched movement chains are uniformly distributed along a circumferential direction at intervals of 120 degrees; an upper electrode plate and a lower electrode plate of each pair of double-capacitance sensors are fixedly arranged on the lens frame and the lens tube respectively; and the three pairs of double-capacitance sensors are uniformly distributed along the circumferential direction at intervals of 120 degrees. Based on a 3-RPS (Range Positioning System) mechanism, the micro adjusting device can realize the precise micro-adjustment of the three degrees of freedom Z, tip and tilt of the optical element.
Description
Technical field
The invention belongs to deep UV projection photoetching objective lens and debug compensation and functional compensation field, be specifically related to a kind of optical element Z, tip, tilt Three Degree Of Freedom jog adjustment device.
Background technology
The projection lithography equipment is the key equipment in the large scale integrated circuit manufacturing process; Improving constantly along with integrated circuit live width fine degree in recent years; The resolution of projection optics equipment also improves gradually, and the ArF excimer laser projection lithography of wavelength 193.368nm equipment has become the main flow equipment that 90nm, 65nm and 45nm node integrated circuit are made at present.
In the assembling process of light projection photoetching objective lens; For obtaining the good optical performance need the various aberrations of optical system are compensated, thus correspondingly need be, adjust around X axle inclination tip with around Y axle inclination tilt to the Z axial displacement of some responsive optical element.Simultaneously light projection photoetching objective lens in use because the inner environment change of object lens, the situation such as variation of converted products, also need correspondingly be adjusted the Z axial displacement of some inner responsive optical element of object lens, around X axle inclination tip with around Y axle inclination tilt.
Summary of the invention
The present invention is for solving photoetching projection objective lens optical element Z, tip, tilt Three Degree Of Freedom high precision adjustment problem; Propose the flexible jog adjustment device of a kind of optical element, be particularly useful for the fine motion adjustment of optical lens in the deep UV projection object lens based on the 3-RPS parallel institution.
Lens Z in the photoetching projection objective lens of the present invention, tip, tilt Three Degree Of Freedom adjusting gear comprise picture frame, lens barrel, three movement branched chain and three pairs of two capacitive transducers; Said picture frame is connected through three movement branched chain with lens barrel; Said each movement branched chain is formed by flexible ball pivot, driver and single shaft flexible hinge, driver be positioned at flexible ball pivot below, the single shaft flexible hinge is positioned at below the driver, three movement branched chain along circumferentially at interval 120 ° evenly distribute; The electric pole plate and the lower electrode plate of every pair of two capacitive transducers are separately fixed on picture frame and the lens barrel, and three pairs of two capacitive transducers circumferentially evenly distribute for 120 ° at the interval.
Beneficial effect of the present invention: optical element Z of the present invention, tip, tilt Three Degree Of Freedom adjusting gear, have the ability of real-time adjustment, can satisfy optical system debug in the process with the optical system course of work in adjustment; The present invention is based on the 3-RPS parallel institution, adopted piezoelectric actuator as driver element, the compliant motion chain that flexible hinge is formed is as gear unit, and capacitive transducer can be realized the high precision adjustment location of optical element as the position probing feedback unit.
Description of drawings
Fig. 1 is optical element Z of the present invention, tip, tilt Three Degree Of Freedom jog adjustment device synoptic diagram.
Fig. 2 is a movement branched chain axonometric drawing of the present invention.
Fig. 3 is a movement branched chain front elevation of the present invention.
Fig. 4 is a fixedly synoptic diagram of of the present invention pair of capacitive transducer electric pole plate and picture frame.
Fig. 5 is a jog adjustment device inner structure synoptic diagram of the present invention.
Embodiment
In conjunction with accompanying drawing embodiment of the present invention is further specified.
As shown in Figure 1, optical element Z, tip, tilt Three Degree Of Freedom jog adjustment device comprise picture frame 1, lens barrel 2, three movement branched chain 3 and three pairs of two capacitive transducers 4.Fix through mode gluing or that trim ring compresses between optical element 5 and the picture frame 1, lens barrel 2 is connected through three movement branched chain 3 with picture frame 1.
As shown in Figures 2 and 3, each movement branched chain 3 is formed by the flexible ball pivot 3-1 on top, the driver 3-2 at middle part and single shaft flexible hinge 3-3 three parts of bottom, fixes through mode gluing or that be threaded between three parts.Said driver 3-2 can provide along the forward travel and the setback of movement branched chain 3 axial directions, and driver 3-2 can select piezoelectric actuator, the telescopic driver of magnetic hysteresis or pneumatic type driver etc. for use.Single shaft flexible hinge 3-3 can rotate around fixing turning axle, and its rotation is the tangential direction of movement branched chain place lens barrel 2.Flexible ball pivot 3-1 can be around three orthogonal axes rotations under its local coordinate system, and wherein the local coordinate system initial point is positioned at the geometric center place of flexible ball pivot 3-1, and Z ' direction of principal axis is the axis direction of flexible ball pivot 3-1.The flexible ball pivot 3-1 on movement branched chain 3 tops fixes through mode gluing or that be threaded with picture frame 1, and the single shaft flexible hinge 3-3 of movement branched chain 3 bottoms fixes through mode gluing or that be threaded with lens barrel 2.Three movement branched chain 3 are along circumferentially 120 ° of evenly distributions at interval.
Like Fig. 4 and shown in Figure 5, the every pair of two capacitive transducer 4 all contain over against an electric pole plate 4-1 and a lower electrode plate 4-2, electric pole plate 4-1 through screw retention on picture frame assembly 1, lower electrode plate 4-2 through screw retention on lens barrel 2.The electric pole plate 4-1 of three pairs of two capacitive transducers 4 and lower electrode plate 4-2 be respectively along picture frame assembly 1 and circumferentially 120 ° of evenly distributions at interval of lens barrel 2, and and adjacent movement branched chain between circumferential angle be 60 °.Circumferential 120 ° of three pairs of capacitive transducers 4 that are uniformly distributed with at interval; Be used for detecting in real time the fine motion adjustment amount of picture frame 1 optical element 5; And detection limit fed back to driver, detect the control closed loop thereby form, with the high precision fine motion adjustment of the Z that guarantees optical element 5, tip, tilt Three Degree Of Freedom.
When to optical element Z, tip, tilt Three Degree Of Freedom fine motion adjustment; The needed Z of known optical element is to amount of movement; And around the tilt quantity tip of X axle, around the tilt quantity tilt of Y axle; The Jacobian matrix of jog adjustment device according to the present invention; Can obtain the input displacement of three driver 3-2, the Jacobian matrix of wherein said jog adjustment device can confirm that external diameter of a circle, three single shaft flexible hinge 3-3 confirm that the length of external diameter of a circle, movement branched chain 3, the structural parameters such as angle that movement branched chain 3 is become with lens barrel 2 bottom surfaces confirm through three flexible ball pivot 3-1.
Claims (5)
1. optical element Z, tip, tilt Three Degree Of Freedom jog adjustment device; Comprise picture frame (1), lens barrel (2), three movement branched chain (3) and three pairs of two capacitive transducers (4); It is characterized in that said picture frame (1) is connected through three movement branched chain (3) with lens barrel (2); Said each movement branched chain (3) is formed by flexible ball pivot (3-1), driver (3-2) and single shaft flexible hinge (3-3); Driver (3-2) be positioned at flexible ball pivot (3-1) below; Single shaft flexible hinge (3-3) is positioned at below the driver (3-2), and three movement branched chain (3) are along circumferentially 120 ° of evenly distributions at interval; The electric pole plate (4-1) and the lower electrode plate (4-2) of every pair of two capacitive transducers (4) are separately fixed on picture frame (1) and the lens barrel (2), and three pairs of two capacitive transducers (4) circumferentially evenly distribute for 120 ° at the interval.
2. optical element Z according to claim 1, tip, tilt Three Degree Of Freedom jog adjustment device; It is characterized in that the mode through gluing or screw retention between flexible ball pivot (3-1), driver (3-2) and single shaft flexible hinge (3-3) three connects.
3. optical element Z according to claim 1, tip, tilt Three Degree Of Freedom jog adjustment device; It is characterized in that; Flexible ball pivot (3-1) is fixed through mode gluing or that be threaded with picture frame (1), and single shaft flexible hinge (3-3) is fixed through mode gluing or that be threaded with lens barrel (2).
4. optical element Z according to claim 1, tip, tilt Three Degree Of Freedom jog adjustment device is characterized in that, said movement branched chain (3) and two capacitive transducer (4) are circumferential 60 ° of staggered arranging at interval.
5. optical element Z according to claim 1, tip, tilt Three Degree Of Freedom jog adjustment device is characterized in that, fix through mode gluing or that trim ring compresses between optical element (5) and the picture frame (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102067473A CN102722015A (en) | 2012-06-21 | 2012-06-21 | Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102067473A CN102722015A (en) | 2012-06-21 | 2012-06-21 | Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element |
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| Publication Number | Publication Date |
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| CN102722015A true CN102722015A (en) | 2012-10-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012102067473A Pending CN102722015A (en) | 2012-06-21 | 2012-06-21 | Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element |
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| CN (1) | CN102722015A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239887A (en) * | 2018-11-28 | 2019-01-18 | 中国科学院长春光学精密机械与物理研究所 | Space optical remote sensor large-scale circular reflecting mirror flexible support structure |
| CN112034583A (en) * | 2020-08-25 | 2020-12-04 | 长春长光智欧科技有限公司 | High-integration complete machine device for microscope objective |
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| CN101004555A (en) * | 2006-01-16 | 2007-07-25 | 中国科学院电工研究所 | System for installing and adjusting adjustable reflection type optical object lens |
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| CN102279454A (en) * | 2011-07-27 | 2011-12-14 | 中国科学院长春光学精密机械与物理研究所 | Supporting device of lens in photoetching projection objective |
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2012
- 2012-06-21 CN CN2012102067473A patent/CN102722015A/en active Pending
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| CN101004555A (en) * | 2006-01-16 | 2007-07-25 | 中国科学院电工研究所 | System for installing and adjusting adjustable reflection type optical object lens |
| CN1828248A (en) * | 2006-04-18 | 2006-09-06 | 燕山大学 | Parellel 6-UPUR hexa-dimensional force-measuring platform |
| CN201017175Y (en) * | 2007-02-16 | 2008-02-06 | 上海微电子装备有限公司 | Large damping precision flexible supporting mechanism |
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| 颜石等: "《基于3-RPS空间并联机构的发动机支撑台架设计》", 《山东交通学院学报》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239887A (en) * | 2018-11-28 | 2019-01-18 | 中国科学院长春光学精密机械与物理研究所 | Space optical remote sensor large-scale circular reflecting mirror flexible support structure |
| CN109239887B (en) * | 2018-11-28 | 2020-06-02 | 中国科学院长春光学精密机械与物理研究所 | Flexible supporting structure for large circular reflector of space optical remote sensor |
| CN112034583A (en) * | 2020-08-25 | 2020-12-04 | 长春长光智欧科技有限公司 | High-integration complete machine device for microscope objective |
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Application publication date: 20121010 |