CN201016702Y - Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same - Google Patents
Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same Download PDFInfo
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- CN201016702Y CN201016702Y CNU2006202009590U CN200620200959U CN201016702Y CN 201016702 Y CN201016702 Y CN 201016702Y CN U2006202009590 U CNU2006202009590 U CN U2006202009590U CN 200620200959 U CN200620200959 U CN 200620200959U CN 201016702 Y CN201016702 Y CN 201016702Y
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Abstract
The utility model discloses a two-dimensional displacement sensor and a large-range surface topography measuring device; the utility model comprises a fixing bracket (1); the fixing bracket (1) is connected with a movable bracket (3) by parallel reeds (2); a horizontal displacement sensor (11) is equipped between the two brackets and the movable bracket (3) is equipped with a lever (5); one end of the lever (5) is fixed with a contact pin (6) and a vertical displacement sensor (8) is equipped between the other end of the lever (5) and the movable bracket (3). When a main sensor measuring contract pin of the utility model is displaced vertically, an auxiliary sensor can detect the horizontal displacement of the contact pin to make the contact pin sweep across the steep contour surface. The utility model has the steep contour surface which can make the contact pin smoothly sweep across; the utility model can implement large-range and high-precision measurement on various complicated surfaces with small measuring error. Therefore, the utility model is fit for measuring various complicated surface contours.
Description
Technical field
The utility model relates to a kind of two-dimension displacement sensor of large-measuring range surface figure measurement and large-measuring range surface figure measuring device of application of being used for, and belongs to the measurement mechanism technical field.
Background technology
The displacement transducer that uses in present widely used contact surface topography surveying instrument mostly is traditional one dimension displacement sensor, it is the displacement on the energy measurement vertical direction only, can not detect the resistance that contact pilotage is run in the horizontal direction, when the surface measurements pattern, exist certain limitation.This limitation is mainly reflected in: in large-measuring range surface figure is measured, when running into precipitous contour surface, the measurement contact pin of this one dimension displacement sensor can not streak contour surface smoothly, so it can not measure step, groove and deep camber contour surface because the resistance of horizontal direction is too big; In addition, in measuring process, contact pilotage and lever will rotate around balance pivot all the time, when range increases or during the big rise and fall of measured surface, can have bigger nonlinear measurement sum of errors ergometry inevitably, and the big more nonlinear measurement sum of errors of range ergometry is just big more.Therefore, adopt the contact pilotage of the surveying instrument of traditional one dimension displacement sensor can not streak precipitous surface smoothly, also can't take into account measuring accuracy and range well simultaneously.
Summary of the invention
The purpose of this utility model is: provide a kind of measurement contact pin can streak precipitous surface smoothly, therefore can carry out the two-dimension displacement sensor of wide range and high-acruracy survey and the large-measuring range surface figure measuring device of application to various complex surfaces, to overcome the deficiencies in the prior art.
Two-dimension displacement sensor of the present utility model, it comprises fixed support (1), upward be connected with movable support (3) at fixed support (1) by parallel spring (2), between fixed support (1) and the movable support (3) horizontal displacement sensors (11) is installed, movable support (3) is gone up balance pivot (4) is installed, balance pivot (4) is gone up lever (5) is installed, one end of lever (5) is contact pilotage (6) fixedly, between the other end of lever (5) and the movable support (3) perpendicular displacement sensor (8) is installed.
Above-mentioned two-dimension displacement sensor, the structure of perpendicular displacement sensor (8) comprises magnetic core (9) and telefault (10), magnetic core (9) is fixed on the right-hand member of lever (5), and telefault (10) is fixed on the movable support (3), and magnetic core (9) places in the telefault (10).
Above-mentioned two-dimension displacement sensor, the structure of horizontal displacement sensors (11) comprises magnetic core (12) and telefault (13), magnetic core (12) is fixed on the fixed support (1), and telefault (13) is fixed on the movable support (3), and ((12) place in the telefault (13) magnetic core.
Above-mentioned two-dimension displacement sensor is equipped with spring (7) between movable support (3) and lever (5).
The large-measuring range surface figure measuring device of application two-dimension displacement sensor of the present utility model, two-dimension displacement sensor (14) is installed on the column (25), column (25) is fixed on the base (19), at base (19) but on be provided with the vertical scanning worktable (23) of level and vertical moving, vertical scanning worktable (23) is gone up place work piece (24); Two-dimension displacement sensor (14), vertical scanning worktable (23) connect computing machine (15) by telemetry circuit (16).
The large-measuring range surface figure measuring device of application two-dimension displacement sensor of the present utility model, the structure of vertical scanning worktable (23) comprise X-Y worktable (18), oblique mechanism (20), piezoelectric ceramic actuator (21) and worktable (17); The oblique mechanism of translator (20) is installed on the X-Y worktable (18), oblique mechanism (20) top is provided with piezoelectric ceramic actuator (21), piezoelectric ceramic actuator (21) top is worktable (17), is provided with diffraction grating displacement transducer (22) on piezoelectric ceramic actuator (21).
Two-dimension displacement sensor of the present utility model, be to pass through movable parallel spring structure (fixed support by master reference (perpendicular displacement sensor) and aiding sensors (horizontal displacement sensors), movable support and the parallel spring that they are linked together) combine, in the displacement of master reference measurement contact pin vertical direction, aiding sensors (horizontal displacement sensors) can detect the horizontal-shift of contact pilotage, in measuring process, when contact pilotage is run into precipitous contour surface, the resistance of horizontal direction can cause the zero shift of aiding sensors generation inductance, if this zero shift amount surpasses one setting value, the vertical scanning worktable will descend, up to the side-play amount of contact pilotage less than setting value, thereby make contact pilotage in each sampling interval, can both successfully streak precipitous contour surface.So just reduced owing to lever departs from the measurement principle error that bring the equilibrium position; In addition, the zero shift amount of sensors inductance always is returned within the zero-bit setting value, and sensors inductance is always operating near the linear zone of zero-bit, departs from the nonlinearity erron that zero-bit is brought thereby reduced inductance greatly.Thereby can measure various complex surface profiles, have more measurement parameter.Compare with prior art, the utlity model has and can make contact pilotage streak precipitous contour surface smoothly, various complex surfaces are carried out wide range and high-acruracy survey, advantage such as measuring error is little is suitable for the measurement of various complex surface profiles.
Description of drawings
Accompanying drawing 1 is the structural representation of the utility model two-dimension displacement sensor;
Accompanying drawing 2 is the structural representation of the utility model large-measuring range surface figure measuring device;
Description of symbols in the accompanying drawing: fixed support (1), parallel spring (2), movable support (3), balance pivot (4), lever (5), contact pilotage (6), spring (7), perpendicular displacement sensor (8), magnetic core (9), telefault (10), horizontal displacement sensors (11), magnetic core (12), telefault (13), two-dimension displacement sensor (14), computing machine (15), telemetry circuit (16), worktable (17), X-Y worktable (18), base (19), oblique mechanism (20), piezoelectric ceramic actuator (21), diffraction grating displacement transducer (22), vertical scanning worktable (23), workpiece (24), column (25), Z direction servomotor (26).
Embodiment
Embodiment of the present utility model.Make fixed support 1, be connected with movable support 3 at fixed support 1 by parallel spring 2, the two ends up and down of movable support 3 adopt parallel spring 2 to connect respectively, form a bascule that is similar to parallelogram with fixed support 1 and movable support 3, between fixed support 1 and movable support 3, horizontal displacement sensors 11 is installed, balance pivot 4 is installed on movable support 3, lever 5 is installed on the balance pivot 4, one end of lever 5 is contact pilotage 6 fixedly, between the other end of lever (5) and the movable support (3) perpendicular displacement sensor (8) is installed, mounting spring 7 between movable support 3 and lever 5 obtains two-dimension displacement sensor 14.
In two-dimension displacement sensor 14, perpendicular displacement sensor 8 is master references, by its searching surface pattern fluctuations of (being the Z direction) (this variation can cause contact pilotage generation perpendicular displacement) in vertical direction, the structure of perpendicular displacement sensor 8 comprises magnetic core 9 and telefault 10, magnetic core 9 is fixed on the right-hand member of lever 5, telefault 10 is fixed on the movable support 3, and magnetic core 9 places on the symmetric position of telefault 10 centres.And horizontal displacement sensors 11 is aiding sensors, it comprises magnetic core 12 and telefault 13 structure of horizontal displacement sensors 11, magnetic core 12 is fixed on the fixed support 1, and telefault 13 is fixed on the movable support 3, and magnetic core 12 places on the symmetric position of telefault 10 centres.
4 parallel springs 2 are formed a bascule that is similar to parallelogram with fixed support 1 and movable support 3 respectively, fixed support 1 is equivalent to the fixed edge of parallelogram, movable support 3 then is equivalent to parallelogram active edges (relative with fixed edge), and 4 parallel springs 2 connect the four edges of parallelogram flexibly.When perpendicular displacement took place contact pilotage 6, lever 5 just rotated around balance pivot 4, thus the relative motion that magnetic core 9 is taken place with respect to coil 10; And when contact pilotage 6 occurred level displacements, movable support 3 can be made horizontal hunting at directions X by four reeds 2 are whole, thus the relative motion that magnetic core 12 is taken place with respect to coil 13.The effect of spring 7 is to make that contact pilotage 6 can fully contact with measured workpiece 24 surface profiles all the time in measuring process.
Two-dimension displacement sensor 14 is installed on the column 25, and column 25 is fixed on the base 19, but is provided with the vertical scanning worktable 23 of level and vertical moving on base 19, and place work piece 24 on the vertical scanning worktable 23; Two-dimension displacement sensor 14, vertical scanning worktable 23 connect computing machine 15 by telemetry circuit 16.The structure of vertical scanning worktable 23 comprises X-Y worktable 18, oblique mechanism 20, piezoelectric ceramic actuator 21 and worktable 17; The oblique mechanism 20 of translator is installed on the X-Y worktable 18, oblique mechanism 20 tops are provided with piezoelectric ceramic actuator 21, piezoelectric ceramic actuator 21 tops are worktable 17, the diffraction grating displacement transducer 22 that is used for surveying work platform 17 shift lengths is installed on piezoelectric ceramic actuator 21, and diffraction grating displacement transducer 22 connects telemetry circuit 16 and computing machine 15.
Principle of work of the present utility model, when workpiece 24 is measured, workpiece 24 is placed on the vertical scanning worktable 23, X-Y worktable 18 drive vertical scanning work 23 in the horizontal direction on (directions X) one by one sampling interval (two sampled points are spacing on directions X between this) move, at this moment the fluctuating of workpiece 24 contour surfaces can cause that the contact pilotage 6 of two-dimension displacement sensor 14 moves up and down, the magnetic core 9 of lever 5 and perpendicular displacement sensor 8 will rotate around balance pivot 4, simultaneously perpendicular displacement sensor 8 will produce a zero shift amount, and this zero shift amount is just sent into computing machine 15 after by the A/D circuit conversion of telemetry circuit 16 and handled.According to this zero shift amount, the Z direction servomotor of piezoelectric ceramic actuator 21 and oblique mechanism 20 26 drives vertical scanning worktable 23 and is in vertical motion, and guarantees that lever 5 gets back to the equilibrium position at each sampled point all the time.Whether whether lever 5 gets back to the equilibrium position is determined less than the zero-bit setting value by the zero shift amount, and the zero-bit setting value requires the different different values that are set at according to different measuring accuracy.Generally speaking, require the zero-bit setting value to be set at 1 μ m, 10 μ m and 100 μ m respectively for high, medium and low measuring accuracy.
When contact pilotage 6 runs into precipitous contour surface, (being directions X) can run into bigger resistance in the horizontal direction, if the inductance zero shift signal that resistance causes surpasses a zero-bit setting value, horizontal displacement sensors 11 sends a signal to computing machine 15, computing machine 15 can descend by control vertical scanning worktable 23, up to the zero shift amount less than the zero-bit setting value, thereby make contact pilotage 6 streak precipitous contour surface smoothly, so horizontal displacement sensors 11 is equivalent to a force transducer, guarantee that resistance that contact pilotage 6 is subjected to can be not excessive and can not continue paddling and avoid causing error.
In measuring process, the shift value of perpendicular displacement scanning workbench 23 under diffraction grating displacement transducer 22 real time record, the signal input computing machine 15 of diffraction grating displacement transducer 23 is handled the measurement result of back as workpiece 24 surface topographies.
Claims (6)
1. two-dimension displacement sensor, it comprises fixed support (1), it is characterized in that: go up at fixed support (1) and be connected with movable support (3) by parallel spring (2), between fixed support (1) and the movable support (3) horizontal displacement sensors (11) is installed, movable support (3) is gone up balance pivot (4) is installed, balance pivot (4) is gone up lever (5) is installed, one end of lever (5) is contact pilotage (6) fixedly, between the other end of lever (5) and the movable support (3) perpendicular displacement sensor (8) is installed.
2. two-dimension displacement sensor according to claim 1, it is characterized in that: the structure of perpendicular displacement sensor (8) comprises magnetic core (9) and telefault (10), magnetic core (9) is fixed on the right-hand member of lever (5), telefault (10) is fixed on the movable support (3), and magnetic core (9) places in the telefault (10).
3. two-dimension displacement sensor according to claim 1, it is characterized in that: the structure of horizontal displacement sensors (11) comprises magnetic core (12) and telefault (13), magnetic core (12) is fixed on the fixed support (1), telefault (13) is fixed on the movable support (3), and magnetic core (12) places in the telefault (13).
4. two-dimension displacement sensor according to claim 1 is characterized in that: between movable support (3) and lever (5) spring (7) is installed.
5. large-measuring range surface figure measuring device as the arbitrary described application two-dimension displacement sensor of claim 1～4, it is characterized in that: two-dimension displacement sensor (14) is installed on the column (25), column (25) is fixed on the base (19), at base (19) but on be provided with the vertical scanning worktable (23) of level and vertical moving, vertical scanning worktable (23) is gone up place work piece (24); Two-dimension displacement sensor (14), vertical scanning worktable (23) connect computing machine (15) by telemetry circuit (16).
6. the large-measuring range surface figure measuring device of application two-dimension displacement sensor according to claim 5 is characterized in that: the structure of vertical scanning worktable (23) comprises X-Y worktable (18), oblique mechanism (20), piezoelectric ceramic actuator (21) and worktable (17); The oblique mechanism of translator (20) is installed on the X-Y worktable (18), oblique mechanism (20) top is provided with piezoelectric ceramic actuator (21), piezoelectric ceramic actuator (21) top is worktable (17), is provided with diffraction grating displacement transducer (22) on piezoelectric ceramic actuator (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006202009590U CN201016702Y (en) | 2006-11-23 | 2006-11-23 | Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006202009590U CN201016702Y (en) | 2006-11-23 | 2006-11-23 | Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same |
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| CN201016702Y true CN201016702Y (en) | 2008-02-06 |
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| CNU2006202009590U Expired - Fee Related CN201016702Y (en) | 2006-11-23 | 2006-11-23 | Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183217A (en) * | 2011-03-17 | 2011-09-14 | 西安交通大学 | Arc contourgraph measuring head and measuring method thereof |
| CN108088359A (en) * | 2016-11-21 | 2018-05-29 | 清华大学 | Portable contourgraph and profile scan microscope and system |
| CN111745291A (en) * | 2019-03-27 | 2020-10-09 | 华北电力大学 | Novel surface planarization is restoreed device |
| CN114018145A (en) * | 2021-11-09 | 2022-02-08 | 清远职业技术学院 | Wide-range two-dimensional micro-displacement sensor |
-
2006
- 2006-11-23 CN CNU2006202009590U patent/CN201016702Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183217A (en) * | 2011-03-17 | 2011-09-14 | 西安交通大学 | Arc contourgraph measuring head and measuring method thereof |
| CN102183217B (en) * | 2011-03-17 | 2012-09-05 | 西安交通大学 | Arc contourgraph measuring head and measuring method thereof |
| CN108088359A (en) * | 2016-11-21 | 2018-05-29 | 清华大学 | Portable contourgraph and profile scan microscope and system |
| CN108088359B (en) * | 2016-11-21 | 2019-07-26 | 清华大学 | Portable contourgraph and profile scan microscope and system |
| CN111745291A (en) * | 2019-03-27 | 2020-10-09 | 华北电力大学 | Novel surface planarization is restoreed device |
| CN114018145A (en) * | 2021-11-09 | 2022-02-08 | 清远职业技术学院 | Wide-range two-dimensional micro-displacement sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080206 Termination date: 20101123 |