CN114018145A - Wide-range two-dimensional micro-displacement sensor - Google Patents

Wide-range two-dimensional micro-displacement sensor Download PDF

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Publication number
CN114018145A
CN114018145A CN202111317294.7A CN202111317294A CN114018145A CN 114018145 A CN114018145 A CN 114018145A CN 202111317294 A CN202111317294 A CN 202111317294A CN 114018145 A CN114018145 A CN 114018145A
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China
Prior art keywords
lever
sensor
fulcrum
reed
movable support
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Pending
Application number
CN202111317294.7A
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Chinese (zh)
Inventor
邹华东
陈广胜
李祖明
刘京苑
林勇强
张志田
李蓝天
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Qingyuan Polytechnic
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Qingyuan Polytechnic
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Priority to CN202111317294.7A priority Critical patent/CN114018145A/en
Publication of CN114018145A publication Critical patent/CN114018145A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention discloses a wide-range two-dimensional micro-displacement sensor which comprises a contact pin, a fulcrum, coils and a movable support, wherein the movable support is installed at the top of the fulcrum, a reed is installed at the top of the movable support, a fixed support is installed at the top of the reed, a stress sensor is installed on the outer wall of the reed, a lever is installed on the outer wall of the fulcrum, the contact pin is installed at the bottom of the lever, a magnetic core is installed at the top of the lever, a return spring is installed at the top of the lever and located on one side of the magnetic core, and two groups of coils are installed at one end of the fixed support. The sensor can measure micro displacement and can perform bidirectional detection, when the contact pin is subjected to vertical displacement, the lever rotates around the fulcrum, the magnetic core and the coil are subjected to displacement, when the contact pin is stressed in the horizontal direction, the reed connected with the movable support is subjected to deformation displacement, and the resistance value of the resistance strain gauge is changed, so that the sensor can complete bidirectional detection.

Description

Wide-range two-dimensional micro-displacement sensor
Technical Field
The invention relates to the technical field, in particular to a wide-range two-dimensional micro-displacement sensor.
Background
In the mechanical manufacturing industries of automobiles and parts thereof, bearings, internal combustion engines, textile machinery and the like, a large number of complex parts have the requirement of high-precision measurement, such as the measurement of diameters, surface roughness and form and position errors of raceways and box bodies of automobile bearings, and the traditional surface morphology and roughness measuring instrument cannot adapt to the dynamic continuous absolute measurement of special-shaped curved surfaces with large curvature, long channels and the like in a large range and cannot meet the requirement of high-precision and large-curvature detection of cam shapes, bearing apertures, gear involutes and the like.
The existing device has the following defects:
on one hand, the measurement mode of the sensors adopts a single-sensor structure, so that the true large-range measurement cannot be completed, and the measurement precision is difficult to ensure; on the other hand, due to the adoption of the lever measuring structure, when the rotation angle of the lever is too large, the difference between the actual contact point of the probe and the measured point is large, and real surface information cannot be reflected, so that the research on the surface morphology of a large-range micro-displacement sensor applied to a complex part is very necessary.
Disclosure of Invention
The present invention is directed to a wide-range two-dimensional micro-displacement sensor, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a large-range two-dimensional micro-displacement sensor comprises a fulcrum, wherein a movable support is mounted at the top of the fulcrum, the length of the movable support is 50-100MM, the width of the movable support is 30-45MM, and the fulcrum is a rotating shaft.
Preferably, the top of the movable support is provided with a reed, the top of the reed is provided with a fixed support, the length of the reed is 2-6MM, the length of the fixed support is 3-7MM, and the width of the fixed support is 4-6 MM.
Preferably, the outer wall of the reed is provided with a stress sensor, the outer wall of the fulcrum is provided with a lever, and the length of the lever is 100MM and 300 MM.
Preferably, the bottom of the lever is provided with a contact pin, the top of the lever is provided with a magnetic core, the length of the contact pin is 30-70MM, and the diameter of the magnetic core is 1-4 MM.
Preferably, a return spring is mounted at the top of the lever and is positioned on one side of the magnetic core, and the length of the return spring is 1-3 MM.
Preferably, the top of the return spring is provided with a fixing plate, one end of the fixing plate is provided with two groups of coils, and the number of turns of the coils is 80-100.
Compared with the prior art, the invention has the beneficial effects that:
the invention can measure micro displacement and can carry out bidirectional detection, when the contact pin has vertical displacement, the lever rotates around the fulcrum, the magnetic core and the coil have displacement, when the contact pin is stressed in the horizontal direction, the reed connected with the movable support has deformation displacement, and the resistance value of the resistance strain gauge changes, so the sensor can finish bidirectional detection.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 and 3 are schematic diagrams of the contact pin through-pit of the present invention.
In the figure: 1. a stylus; 2. a lever; 3. a fulcrum; 4. a return spring; 5. a magnetic core; 6. a coil; 7. a reed; 8. a stress sensor; 9. fixing a bracket; 10. the support can be moved.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example 1: referring to fig. 1, an embodiment of the present invention: a large-range two-dimensional micro-displacement sensor comprises a contact pin 1, a fulcrum 3, coils 6 and a movable support 10, wherein the movable support 10 is installed at the top of the fulcrum 3, a reed 7 is installed at the top of the movable support 10, a fixed support 9 is installed at the top of the reed 7, a stress sensor 8 is installed on the outer wall of the reed 7, a lever 2 is installed on the outer wall of the fulcrum 3, the contact pin 1 is installed at the bottom of the lever 2, a magnetic core 5 is installed at the top of the lever 2, a return spring 4 is installed at the top of the lever 2, the return spring 4 is located on one side of the magnetic core 5, a fixed plate is installed at the top of the return spring 4, and two groups of coils 6 are installed at one end of the fixed plate;
the sensor mainly comprises an inductive displacement sensor and a force sensor, wherein the inductive micro-displacement sensor in the vertical direction is a main sensor and is responsible for detecting and indicating the fluctuation change of the morphology in the vertical direction, the force sensor is an auxiliary sensor, when the contact pin 1 meets large resistance (meets a steep pit) in the horizontal direction, the reed 7 deforms, the stress sensor 8 detects the resistance change after deformation, the resistance change is converted into a stress value through a processing circuit, when the value exceeds a set threshold value, a computer controls a scanning workbench to descend to enable the contact pin 1 to smoothly pass through the steep pit, the inductive displacement sensor and the force sensor are both arranged on a movable support 10, the movable support 10 and a fixed support 9 are connected together through a deformable reed 7, when the contact pin 1 vertically displaces, the lever 2 rotates around a fulcrum 3, and the magnetic core 5 displaces with a coil 6, contact pilotage 1 is when the horizontal direction atress, the reed 7 that movable support 10 connects takes place deformation displacement, stress sensor 8's resistance changes, this sensor can accomplish the detection of bi-directional like this, inductance sensor mainly is responsible for measuring the fluctuation and the displacement of Z direction in addition, strain sensor mainly lies in, when meetting the tremble hole, because the deformation of roof beam obtains corresponding signal, and then send the signal for the computer by processing apparatus, the computer is from top to bottom according to signal adjustment workstation for the probe goes out the tremble hole.
Example 2: a wide-range two-dimensional micro-displacement sensor comprises a fulcrum 3, wherein a movable support 10 is mounted at the top of the fulcrum 3, the length of the movable support is 50MM, the width of the movable support is 30MM, and the fulcrum 3 rotates a shaft.
The movable support 10 is provided with a reed 7 at the top, a fixed support 9 is arranged at the top of the reed 7, the length of the reed 7 is 2MM, the length of the fixed support 9 is 3MM, and the width of the fixed support 9 is 4 MM.
The stress sensor 8 is installed on the outer wall of the reed 7, the lever 2 is installed on the outer wall of the fulcrum 3, and the length of the lever 2 is 100 MM.
The bottom of the lever 2 is provided with a contact pin 1, the top of the lever 2 is provided with a magnetic core 5, the length of the contact pin is 30MM, and the diameter of the magnetic core 5 is 1 MM.
Reset spring 4 is installed at the top of lever 2, and reset spring 4 is located one side of magnetic core 5, reset spring 4's length is 1 MM.
The fixed plate is installed at the top of reset spring 4, and two sets of coils 6 are installed to the one end of fixed plate, the number of turns of coil 6 is 80 circles.
The sensor mainly comprises an inductive displacement sensor and a force sensor, wherein the inductive micro-displacement sensor in the vertical direction is a main sensor and is responsible for detecting and indicating the fluctuation change of the morphology in the vertical direction, the force sensor is an auxiliary sensor, when the contact pin 1 meets large resistance (meets a steep pit) in the horizontal direction, the reed 7 deforms, the stress sensor 8 detects the resistance change after deformation, the resistance change is converted into a stress value through a processing circuit, when the value exceeds a set threshold value, a computer controls a scanning workbench to descend to enable the contact pin 1 to smoothly pass through the steep pit, the inductive displacement sensor and the force sensor are both arranged on a movable support 10, the movable support 10 and a fixed support 9 are connected together through a deformable reed 7, when the contact pin 1 vertically displaces, the lever 2 rotates around a fulcrum 3, and the magnetic core 5 displaces with a coil 6, contact pilotage 1 is when the horizontal direction atress, the reed 7 that movable support 10 connects takes place deformation displacement, stress sensor 8's resistance changes, this sensor can accomplish the detection of bi-directional like this, inductance sensor mainly is responsible for measuring the fluctuation and the displacement of Z direction in addition, strain sensor mainly lies in, when meetting the tremble hole, because the deformation of roof beam obtains corresponding signal, and then send the signal for the computer by processing apparatus, the computer is from top to bottom according to signal adjustment workstation for the probe goes out the tremble hole.
Example 3: a wide-range two-dimensional micro-displacement sensor comprises a fulcrum 3, wherein a movable support 10 is mounted at the top of the fulcrum 3, the length of the movable support is 60MM, the width of the movable support is 35MM, and the fulcrum 3 rotates a shaft.
The movable support 10 is provided with a reed 7 at the top, a fixed support 9 is arranged at the top of the reed 7, the length of the reed 7 is 3MM, the length of the fixed support 9 is 3MM, and the width of the fixed support 9 is 5 MM.
The stress sensor 8 is installed on the outer wall of the reed 7, the lever 2 is installed on the outer wall of the fulcrum 3, and the length of the lever 2 is 150 MM.
The bottom of the lever 2 is provided with a contact pin 1, the top of the lever 2 is provided with a magnetic core 5, the length of the contact pin is 35MM, and the diameter of the magnetic core 5 is 2 MM.
Reset spring 4 is installed at the top of lever 2, and reset spring 4 is located one side of magnetic core 5, reset spring 4's length is 1 MM.
The fixed plate is installed at the top of reset spring 4, and two sets of coils 6 are installed to the one end of fixed plate, the number of turns of coil 6 is 95 circles.
The sensor mainly comprises an inductive displacement sensor and a force sensor, wherein the inductive micro-displacement sensor in the vertical direction is a main sensor and is responsible for detecting and indicating the fluctuation change of the morphology in the vertical direction, the force sensor is an auxiliary sensor, when the contact pin 1 meets large resistance (meets a steep pit) in the horizontal direction, the reed 7 deforms, the stress sensor 8 detects the resistance change after deformation, the resistance change is converted into a stress value through a processing circuit, when the value exceeds a set threshold value, a computer controls a scanning workbench to descend to enable the contact pin 1 to smoothly pass through the steep pit, the inductive displacement sensor and the force sensor are both arranged on a movable support 10, the movable support 10 and a fixed support 9 are connected together through a deformable reed 7, when the contact pin 1 vertically displaces, the lever 2 rotates around a fulcrum 3, and the magnetic core 5 displaces with a coil 6, contact pilotage 1 is when the horizontal direction atress, the reed 7 that movable support 10 connects takes place deformation displacement, stress sensor 8's resistance changes, this sensor can accomplish the detection of bi-directional like this, inductance sensor mainly is responsible for measuring the fluctuation and the displacement of Z direction in addition, strain sensor mainly lies in, when meetting the tremble hole, because the deformation of roof beam obtains corresponding signal, and then send the signal for the computer by processing apparatus, the computer is from top to bottom according to signal adjustment workstation for the probe goes out the tremble hole.
Example 4: a wide-range two-dimensional micro-displacement sensor comprises a fulcrum 3, wherein a movable support 10 is mounted at the top of the fulcrum 3, the length of the movable support is 90M, the width of the movable support is 45MM, and the fulcrum 3 rotates a shaft.
The movable support 10 is provided with a reed 7 at the top, a fixed support 9 is arranged at the top of the reed 7, the length of the reed 7 is 5MM, the length of the fixed support 9 is 5MM, and the width of the fixed support 9 is 6 MM.
The stress sensor 8 is installed on the outer wall of the reed 7, the lever 2 is installed on the outer wall of the fulcrum 3, and the length of the lever 2 is 200 MM.
The bottom of the lever 2 is provided with a contact pin 1, the top of the lever 2 is provided with a magnetic core 5, the length of the contact pin is 45MM, and the diameter of the magnetic core 5 is 4 MM.
Reset spring 4 is installed at the top of lever 2, and reset spring 4 is located one side of magnetic core 5, reset spring 4's length is 3 MM.
The fixed plate is installed at the top of reset spring 4, and two sets of coils 6 are installed to the one end of fixed plate, the number of turns of coil 6 is 90 circles.
The sensor mainly comprises an inductive displacement sensor and a force sensor, wherein the inductive micro-displacement sensor in the vertical direction is a main sensor and is responsible for detecting and indicating the fluctuation change of the morphology in the vertical direction, the force sensor is an auxiliary sensor, when the contact pin 1 meets large resistance (meets a steep pit) in the horizontal direction, the reed 7 deforms, the stress sensor 8 detects the resistance change after deformation, the resistance change is converted into a stress value through a processing circuit, when the value exceeds a set threshold value, a computer controls a scanning workbench to descend to enable the contact pin 1 to smoothly pass through the steep pit, the inductive displacement sensor and the force sensor are both arranged on a movable support 10, the movable support 10 and a fixed support 9 are connected together through a deformable reed 7, when the contact pin 1 vertically displaces, the lever 2 rotates around a fulcrum 3, and the magnetic core 5 displaces with a coil 6, contact pilotage 1 is when the horizontal direction atress, the reed 7 that movable support 10 connects takes place deformation displacement, stress sensor 8's resistance changes, this sensor can accomplish the detection of bi-directional like this, inductance sensor mainly is responsible for measuring the fluctuation and the displacement of Z direction in addition, strain sensor mainly lies in, when meetting the tremble hole, because the deformation of roof beam obtains corresponding signal, and then send the signal for the computer by processing apparatus, the computer is from top to bottom according to signal adjustment workstation for the probe goes out the tremble hole.
The theory of operation, when contact pilotage 1 takes place vertical displacement, lever 2 rotates around fulcrum 3, take place the displacement between magnetic core 5 and coil 6, contact pilotage 1 is when the horizontal direction atress, reed 7 that movable support 10 connects takes place deformation displacement, the resistance of resistance foil gage changes, this sensor can accomplish the detection of bi-directional like this, in addition inductance sensor mainly is responsible for measuring the fluctuation and the displacement of Z direction, strain sensor mainly is used in and lies in, when meetting trembling the hole, because the deformation of roof beam obtains corresponding signal, and then send the signal by processing apparatus for the computer, the computer is from top to bottom according to signal adjustment workstation, make contact pilotage 1 walk out trembles the hole.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (6)

1. A wide-range two-dimensional micro-displacement sensor comprises a fulcrum (3), and is characterized in that: the top of the fulcrum (3) is provided with a movable support (10), the length of the movable support is 50-100MM, the width of the movable support is 30-45MM, and the fulcrum (3) rotates a shaft.
2. A wide-range two-dimensional micro-displacement sensor according to claim 1, wherein: the spring plate (7) is installed at the top of the movable support (10), the fixed support (9) is installed at the top of the spring plate (7), the length of the spring plate (7) is 2-6MM, the length of the fixed support (9) is 3-7MM, and the width of the fixed support (9) is 4-6 MM.
3. A wide-range two-dimensional micro-displacement sensor according to claim 1, wherein: the stress sensor (8) is installed on the outer wall of the reed (7), the lever (2) is installed on the outer wall of the fulcrum (3), and the length of the lever (2) is 100MM and 300 MM.
4. A wide-range two-dimensional micro-displacement sensor according to claim 1, wherein: the bottom of the lever (2) is provided with a contact pin (1), the top of the lever (2) is provided with a magnetic core (5), the length of the contact pin is 30-70MM, and the diameter of the magnetic core (5) is 1-4 MM.
5. A wide-range two-dimensional micro-displacement sensor according to claim 1, wherein: reset spring (4) are installed at the top of lever (2), and reset spring (4) are located one side of magnetic core (5), reset spring (4)'s length is 1-3 MM.
6. A wide-range two-dimensional micro-displacement sensor according to claim 1, wherein: the top of reset spring (4) is installed the fixed plate, and two sets of coils (6) are installed to the one end of fixed plate, the number of turns of coil (6) is 80-100 circles.
CN202111317294.7A 2021-11-09 2021-11-09 Wide-range two-dimensional micro-displacement sensor Pending CN114018145A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115415181A (en) * 2022-07-28 2022-12-02 中国电子科技集团公司第二十九研究所 Cam type screening tool for countersunk head rivet and using method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101029817A (en) * 2006-11-21 2007-09-05 贵州大学 Two-dimensional displacement sensor and applied large-measuring range surface figure measuring device
CN201016702Y (en) * 2006-11-23 2008-02-06 贵州大学 Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101029817A (en) * 2006-11-21 2007-09-05 贵州大学 Two-dimensional displacement sensor and applied large-measuring range surface figure measuring device
CN201016702Y (en) * 2006-11-23 2008-02-06 贵州大学 Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115415181A (en) * 2022-07-28 2022-12-02 中国电子科技集团公司第二十九研究所 Cam type screening tool for countersunk head rivet and using method
CN115415181B (en) * 2022-07-28 2024-04-23 中国电子科技集团公司第二十九研究所 Countersunk rivet cam type screening tool and use method

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