CN2867287Y - Non-contact type surface topographic measuring instrument based on vertical displacement scanning - Google Patents
Non-contact type surface topographic measuring instrument based on vertical displacement scanning Download PDFInfo
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- CN2867287Y CN2867287Y CN 200620200063 CN200620200063U CN2867287Y CN 2867287 Y CN2867287 Y CN 2867287Y CN 200620200063 CN200620200063 CN 200620200063 CN 200620200063 U CN200620200063 U CN 200620200063U CN 2867287 Y CN2867287 Y CN 2867287Y
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- vertical displacement
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Abstract
The utility model discloses a non-contact surface profilometer based on vertical displacement scan. It is a closed-loop controlled apparatus comprising non-contact optical displacement sensor, three-dimensional vertical displacement scan workbench and digital servo focusing device. The focusing object lens is fixed in place and the measurement is performed by the movable workbench, increasing the measurement accuracy, and simultaneously the interference stripe is formed by grating diffraction. The measurement data of displacement of the workbench in vertical direction is obtained according to the change in phase displacement of the interference stripe. The utility model has advantages of high accuracy, rapid, large-range and non-contact measurement, and high price-performance ratio. It can be used to carry out two- or three-dimensional overall measurement of features for surfaces (including size, shape, waviness, surface roughness) of different textures.
Description
Technical field
The utility model relates to a kind of contactless surface topography measuring instrument based on vertical displacement scanning, belongs to the measurement mechanism technical field.
Background technology
At present according to optics automatic focus probe method principle, produced object surface appearance non-cpntact measurement device has had some commercial prods to emerge, the series of products such as UBF60 of UBM company for example, but for the existing non-cpntact measurement device that utilizes optics automatic focus probe method principle to make, all there are some common problems in they:
(1) the sustained vibration meeting of voice coil motor itself causes corresponding measuring error in the measuring process;
(2) voice coil motor is generally to be fixing by reed, and the swing of reed can cause the nonlinearity erron of measurement;
(3) for not with the voice coil motor of metering system, the kinematic accuracy of voice coil motor is limited by its calibrating method, and general calibrating method is difficult to make voice coil motor to reach nano level kinematic accuracy;
(4) for the voice coil motor of being with metering system, because the measurement range of the correspondence of inductance metering system only is ± 100 μ m, so be difficult to realize large range measuring.
Above-mentioned several problems have reflected some common defectives of these devices, make the application of this sampling device be subjected to certain limitation.
Summary of the invention
The purpose of this utility model is to provide a kind of function strong, and the contactless surface topography measuring instrument based on vertical displacement scanning of high performance-price ratio is realized high resolving power, wide range and high-precision measurement.
Structure of the present utility model is, it comprises optical displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo focalizer, the optical displacement sensor that is used to survey focus error signal is installed in the top of three-dimensional perpendicular displacement scanning workbench, the focus error signal input digit servo-focus device of optical displacement sensor, the digital servo focalizer outputs control signals to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, on three-dimensional perpendicular displacement scanning workbench, be provided with and be used for the diffraction grating displacement transducer that the perpendicular displacement to worktable scans and gathers, the computing machine in the signal input digit servo-focus device of diffraction grating displacement transducer.
Above-mentioned contactless surface topography measuring instrument based on vertical displacement scanning, optical displacement sensor is by photodetector (1), beam splitter prism (2), coupling object lens (3), semiconductor laser (4), lens (5), polarization spectroscope (6), 1/4 slide (7) and focusing objective len (8) are formed, be provided with lens (5) successively between semiconductor laser (4) and the three-dimensional perpendicular displacement scanning workbench, polarization spectroscope (6), the focusing objective len (8) of 1/4 slide (7) and fixed position, be provided with coupling object lens (3) in polarization spectroscope (6) side, beam splitter prism (2), beam splitter prism (2) the separately position of irradiate light is respectively equipped with photodetector (1), the signal input digit servo-focus device of photodetector (1).
Above-mentioned contactless surface topography measuring instrument based on vertical displacement scanning, three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (14) and diffraction grating displacement transducer (11); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (14), and the vertical displacement scanning worktable is provided with diffraction grating displacement transducer (11).
Above-mentioned contactless surface topography measuring instrument based on vertical displacement scanning, the vertical displacement scanning worktable is made up of oblique mechanism (13), piezoelectric ceramics (12) and worktable (10); The oblique mechanism of translator (13) is installed on the X-Y worktable (14), and oblique mechanism (13) top is provided with piezoelectric ceramics (12), and piezoelectric ceramics (12) top is the worktable (10) of place work piece (9).
Above-mentioned contactless surface topography measuring instrument based on vertical displacement scanning, the digital servo focalizer is made up of optical displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), computing machine (20), driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (18) and X-Y direction motor-drive circuit (19); The input end of computing machine (20) connects the output terminal of optical displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (20) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (18) and X-Y direction motor-drive circuit (19).
Above-mentioned contactless surface topography measuring instrument based on vertical displacement scanning, diffraction grating displacement transducer (11) is made up of reflection grating (21), right-angle prism (22), photelectric receiver (23) and He-Ne laser instrument (24), reflection grating (21) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (24) is installed in reflection grating (21) the place ahead, two right-angle prisms (22) are located at 45 degree positions, reflection grating (21) both sides respectively, and reflection grating (21) the place ahead also is provided with photelectric receiver (23).
The utility model is made up of non-contact optical displacement transducer, three-dimensional perpendicular displacement scanning workbench and digital servo focalizer, and has made up the contactless surface topography measurement mechanism of whole closed-loop control jointly with other assemblies.The focus servosystem structure that is different from the employing voice coil motor in traditional optics automatic focus detection system, the utility model is with the focusing objective len stationkeeping, computing machine removes to drive worktable to realize the servo motion of vertical displacement scanning according to focus error signal control piezoelectric ceramics and motor, make incident beam converge on the measured workpiece surface all the time and focus error signal is approximately zero, improved the precision of measuring, adopt optical grating diffraction to obtain interference fringe simultaneously, obtain the measurement data of worktable vertical direction displacement by phase shift variations to interference fringe, improved measuring accuracy greatly, such as the grating constant of selecting is 1/1200mm, when interference fringe changes one-period, the grating amount of movement is 1/4800mm, is 200nm, through twice diffraction, and to signal 20 segmentations, final measurement data can reach the resolution of 5nm.Therefore the utility model adopts the defective that voice coil motor brought owing to avoided traditional focus to survey in the quasi-instrument, thereby has really realized the non-cpntact measurement of high precision, wide range, and has the advantages that speed is fast, cost performance is high.The utility model can to overall size, shape, waviness and the surfaceness of different materials member two, the 3 D non-contacting type composite measurement, comprise arbitrary surface topography measurement, sphere and aspherical profile measurement etc., also can carry out non-cpntact measurement the physical dimension of MEMS, shape, vibration etc.
Description of drawings
Accompanying drawing 1 is a structural representation of the present utility model;
Accompanying drawing 2 is a measurement schematic flow sheet of the present utility model;
Accompanying drawing 3 is the structural representation of diffraction grating displacement transducer.
Embodiment
Embodiment of the present utility model.As shown in Figure 1, measuring instrument of the present utility model mainly comprises optical displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo focalizer three parts, optical displacement sensor is used for surveying in measuring process by the caused focus error signal of surface of the work, be installed in three-dimensional perpendicular displacement scanning workbench the top, the focus error signal input digit servo-focus device of optical displacement sensor; Place the workpiece that needs measurement above the three-dimensional perpendicular displacement scanning workbench; The digital servo focalizer is used for record, handle each data, and according to the data output control signal that obtains to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, thereby the motion that drives three-dimensional perpendicular displacement scanning workbench makes the focus error signal of optical displacement sensor be approximately zero, the diffraction grating displacement transducer is installed on three-dimensional perpendicular displacement scanning workbench, the diffraction grating displacement transducer is used for the perpendicular displacement of worktable is scanned and gathers, and the computing machine in the signal input digit servo-focus device of diffraction grating displacement transducer is handled the back as measurement result.
The optical displacement sensor that present embodiment adopts is made up of photodetector (1), beam splitter prism (2), coupling object lens (3), semiconductor laser (4), lens (5), polarization spectroscope (6), 1/4 slide (7) and focusing objective len (8), semiconductor laser (4) is a DA650-1-5 N-type semiconductor N laser instrument, wavelength is 650nm, physical dimension is Φ 11 * 60mm, and power is 1mW.Be provided with the focusing objective len (8) of lens (5), polarization spectroscope (6), 1/4 slide (7) and fixed position between semiconductor laser (4) and the three-dimensional perpendicular displacement scanning workbench successively, be provided with coupling object lens (3), beam splitter prism (2) in polarization spectroscope (6) side, beam splitter prism (2) the separately position of irradiate light is separately installed with photodetector (1), the signal input digit servo-focus device of photodetector (1).
Three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (14) and diffraction grating displacement transducer (11); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (14) of co-baseplane motion, and diffraction grating displacement transducer (11) is installed on the vertical displacement scanning worktable.Vertical displacement scanning worktable and X-Y worktable (14) are finished the three-dimensional displacement of workpiece (9), the vertical moving distance of diffraction grating displacement transducer (11) measuring vertical displacement scanning workbench.The vertical displacement scanning worktable of present embodiment is made up of oblique mechanism (13), piezoelectric ceramics (12) and worktable (10); It divides thick, smart two-stage drive, and thick the driving finished by oblique mechanism (13) and servomotor thereof, and the inclined-plane gradient of oblique mechanism (13) is 1: 10, screw mandrel pitch is 1mm, servomotor is exported 10000 pulse/commentaries on classics, and then per step perpendicular displacement amount is 10nm, and stroke is designed to 10mm.Oblique mechanism (13) is installed on the X-Y worktable (14); Smart two-stage drive is finished by piezoelectric ceramics (12), and its design runlength is 30 μ m; Piezoelectric ceramics (12) is installed in oblique mechanism (13) top, and piezoelectric ceramics (12) top is the worktable (10) of place work piece (9).
The digital servo focalizer is made up of optical displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), computing machine (20), driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (18) and X-Y direction motor-drive circuit (19); The input end of computing machine (20) connects the output terminal of optical displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (20) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (18) and X-Y direction motor-drive circuit (19); Computing machine (20) is handled the signal from photodetector (1) and diffraction grating displacement transducer (11), and the motor of control and drive pressure electroceramics (12), oblique mechanism (13) and X-Y worktable (14) realizes that automatic digital servo focuses on.
Diffraction grating displacement transducer (11) is made up of reflection grating (21), right-angle prism (22), photelectric receiver (23) and He-Ne laser instrument (24), reflection grating (21) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (24) is installed in the place ahead of reflection grating (21), two right-angle prisms (22) are installed in 45 degree positions, reflection grating (21) both sides respectively, photelectric receiver (23) is also installed in reflection grating (21) the place ahead, and photelectric receiver (23) connects diffraction grating displacement transducer signal treatment circuit (16).
During work, workpiece (9) is placed on that worktable (10) is gone up and with the surface of semiconductor laser (4) emitted laser irradiation workpiece (9), the laser that reflects projects on two groups of electric explorers (1) after beam splitter prism (2) divides by coupling object lens (3) meeting coalescence.The difference of two groups of photodetectors (1) receiving light power signal is the focusing difference signal.Computing machine (2) drives worktable (10) to realize the servo motion of vertical displacement scanning according to focus error signal, makes incident beam converge on the surface of measured workpiece (9) all the time and focus error signal is approximately zero, makes measuring error reach minimum like this; Diffraction grating displacement transducer (11) scanning and the vertical moving distance of gathering the vertical displacement scanning worktable, this signal is delivered to computing machine (20) through diffraction grating displacement transducer signal treatment circuit (16), is a vertical direction coordinate that collects.By travelling table, detect workpiece (9) with respect under the last different X -Z coordinate of worktable (10), the measurement data of a plurality of coordinates of repeated acquisition can obtain measurement result through computing machine (20) through surface profile evaluation software processes.
Displacement for accurate measurement worktable (10), on three-dimensional perpendicular displacement scanning workbench, reflection grating is installed, laser incides reflection grating, behind diffraction of reflection grating, form+1 grade and-1 grade of two bundle diffraction light, will+1 grade and-1 order diffraction light reflected back grating and converge at another point on the grating by the right-angle prism that places both sides, behind the secondary diffraction, will on the photodetector of placing perpendicular to Y-axis, form interference fringe; When worktable (10) vertical movement, will cause the phase shift of interference fringe, can obtain the displacement data of workpiece (9) by the variation of surveying striped.Grating move d/4 apart from the time, the striped phase shift is 2 π, promptly changes one-period.The grating that native system adopts, its grating constant is 1/1200mm, so interference fringe is when changing one-period, the grating amount of movement is 1/4800mm, is 200nm, through twice diffraction, and to signal 20 segmentations, can reach the resolution of 5nm.
Claims (6)
1. contactless surface topography measuring instrument based on vertical displacement scanning, it comprises optical displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo focalizer, it is characterized in that: the optical displacement sensor that is used to survey focus error signal is installed in the top of three-dimensional perpendicular displacement scanning workbench, the focus error signal input digit servo-focus device of optical displacement sensor, the digital servo focalizer outputs control signals to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, on three-dimensional perpendicular displacement scanning workbench, be provided with and be used for the diffraction grating displacement transducer that the perpendicular displacement to worktable scans and gathers, the computing machine in the signal input digit servo-focus device of diffraction grating displacement transducer.
2. the contactless surface topography measuring instrument based on vertical displacement scanning according to claim 1, it is characterized in that: optical displacement sensor is by photodetector (1), beam splitter prism (2), coupling object lens (3), semiconductor laser (4), lens (5), polarization spectroscope (6), 1/4 slide (7) and focusing objective len (8) are formed, be provided with lens (5) successively between semiconductor laser (4) and the three-dimensional perpendicular displacement scanning workbench, polarization spectroscope (6), the focusing objective len (8) of 1/4 slide (7) and fixed position, be provided with coupling object lens (3) in polarization spectroscope (6) side, beam splitter prism (2), beam splitter prism (2) the separately position of irradiate light is respectively equipped with photodetector (1), the signal input digit servo-focus device of photodetector (1).
3. the contactless surface topography measuring instrument based on vertical displacement scanning according to claim 1 is characterized in that: three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (14) and diffraction grating displacement transducer (11); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (14), and the vertical displacement scanning worktable is provided with diffraction grating displacement transducer (11).
4. the contactless surface topography measuring instrument based on vertical displacement scanning according to claim 3 is characterized in that: the vertical displacement scanning worktable is made up of oblique mechanism (13), piezoelectric ceramics (12) and worktable (10); The oblique mechanism of translator (13) is installed on the X-Y worktable (14), and oblique mechanism (13) top is provided with piezoelectric ceramics (12), and piezoelectric ceramics (12) top is the worktable (10) of place work piece (9).
5. the contactless surface topography measuring instrument based on vertical displacement scanning according to claim 1 is characterized in that: the digital servo focalizer is made up of optical displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), computing machine (20), driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (18) and X-Y direction motor-drive circuit (19); The input end of computing machine (20) connects the output terminal of optical displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (20) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (18) and X-Y direction motor-drive circuit (19).
6. the contactless surface topography measuring instrument based on vertical displacement scanning according to claim 1, it is characterized in that: diffraction grating displacement transducer (11) is made up of reflection grating (21), right-angle prism (22), photelectric receiver (23) and He-Ne laser instrument (24), reflection grating (21) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (24) is installed in reflection grating (21) the place ahead, two right-angle prisms (22) are located at 45 degree positions, reflection grating (21) both sides respectively, and reflection grating (21) the place ahead also is provided with photelectric receiver (23).
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200620200063 CN2867287Y (en) | 2006-01-24 | 2006-01-24 | Non-contact type surface topographic measuring instrument based on vertical displacement scanning |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200620200063 CN2867287Y (en) | 2006-01-24 | 2006-01-24 | Non-contact type surface topographic measuring instrument based on vertical displacement scanning |
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| CN2867287Y true CN2867287Y (en) | 2007-02-07 |
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| CN 200620200063 Expired - Fee Related CN2867287Y (en) | 2006-01-24 | 2006-01-24 | Non-contact type surface topographic measuring instrument based on vertical displacement scanning |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101625231B (en) * | 2009-04-14 | 2010-12-08 | 华中科技大学 | White light interference profile meter |
| CN101975559A (en) * | 2010-09-07 | 2011-02-16 | 天津大学 | System and method for testing microstructure based on nano measurement and oblique scanning white-light interferometry |
| CN104668312A (en) * | 2013-11-27 | 2015-06-03 | 通快机床两合公司 | Method for detecting overall dimension of platelike workpiece |
| CN108895991A (en) * | 2018-07-17 | 2018-11-27 | 上海宝钢工业技术服务有限公司 | Cold rolled sheet surface roughness detecting line sensor and system |
-
2006
- 2006-01-24 CN CN 200620200063 patent/CN2867287Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101625231B (en) * | 2009-04-14 | 2010-12-08 | 华中科技大学 | White light interference profile meter |
| CN101975559A (en) * | 2010-09-07 | 2011-02-16 | 天津大学 | System and method for testing microstructure based on nano measurement and oblique scanning white-light interferometry |
| CN101975559B (en) * | 2010-09-07 | 2012-01-11 | 天津大学 | System and method for testing microstructure based on nano measurement and oblique scanning white-light interferometry |
| CN104668312A (en) * | 2013-11-27 | 2015-06-03 | 通快机床两合公司 | Method for detecting overall dimension of platelike workpiece |
| CN108895991A (en) * | 2018-07-17 | 2018-11-27 | 上海宝钢工业技术服务有限公司 | Cold rolled sheet surface roughness detecting line sensor and system |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070207 Termination date: 20100224 |