CN203949628U - A kind of two-dimentional self-calibration reference points detection alignment system - Google Patents
A kind of two-dimentional self-calibration reference points detection alignment system Download PDFInfo
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- CN203949628U CN203949628U CN201420308219.3U CN201420308219U CN203949628U CN 203949628 U CN203949628 U CN 203949628U CN 201420308219 U CN201420308219 U CN 201420308219U CN 203949628 U CN203949628 U CN 203949628U
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Abstract
A kind of two-dimentional self-calibration reference points detection alignment system, comprises that zero signal reads instrument, two-dimentional work bench, grating scale auxiliary calibration plate, read head test section, measuring basis frame; Grating scale auxiliary calibration plate comprises X, the Y-direction grating scale with zero mark point; Read head test section comprises grating ruler reading head and mounting bracket; This alignment system detects alignment principles based on grating scale and zero signal detection principle realizes gauge point aligning.Read head, by detecting zero mark point signal on grating scale auxiliary calibration plate, is transferred to zero signal by signal and reads instrument, and two-dimentional work bench records the position coordinates of self and signal is transferred to zero signal and reads instrument simultaneously, obtains zero mark point position coordinates.The utility model can be used in two-dimentional self-calibration technology, realizes nanometer resolution and alignment precision; It is little that signal is read time delay, can be applied to worktable dynamically, demarcate at a high speed; One-piece construction is relatively simple, and cost performance is high, insensitive to environment.
Description
Technical field
The utility model relates to a kind of alignment system, particularly a kind of two-dimentional self-calibration reference points detection alignment system of detecting.
Background technology
Ultra precise workbench is more and more extensive in the application in precision engineering field, require also more and more higher to the measuring accuracy of multidimensional worktable, at ultraprecise manufacture field (as high-end litho machine), its multidimensional measure precision often needs to reach even Subnano-class of nanoscale.For the problem of calibrating of ultra precise workbench measuring system, the development of self-calibration technology has brought new solution.Wherein, the aided measurement device of self-calibrating method based on adopting gauge point precision to demarcate object lower than quilt is as medium, by this aided measurement device, obtain and the measurement data of different positions and pose is compared, eliminate the impact of this aided measurement device gauge point positional precision, and then obtain the calibration function of precision stage, realize the demarcation of ultra precise workbench systematic error.
Meanwhile, optical grating measuring system is widely used in numerous electromechanical equipments as the typical displacement transducer of one.The measuring principle of optical grating measuring system is mainly based on Moire fringe principle and diffraction interference principle.Optical grating measuring system based on Moire fringe principle becomes the first-selection of numerous electromechanical equipment displacement measurements as many merits such as a kind of full-fledged displacement transducer are long with its range finding, cost is low, be easy to debug.Along with the development of grating scale in commercial Application, its precision can reach nanometer scale at present, and minimum resolution can reach 1.25nm, is more satisfactory measuring sensor.
For the aided measurement device using in traditional self-calibration scheme, be an optical flat with grid groove, in self-calibration process, need to utilize optical microscope measuring system this optical flat to be carried out to detection and the aligning of gauge point.This scheme all has exposure in many patent papers, and the optical flat that the size that for example American scholar Ye uses in research paper " An exact algorithm forself-calibration of precision metrology stages " is 100 × 100mm is as aided measurement device; Tsing-Hua University's patent documentation 200510011385.2 (open day is on September 4th, 2005), utilizes a kind of grid glass plate to do aided measurement device, and completes the self-calibration of XY two-dimentional work bench; The scholar Hu of Tsing-Hua University, in article " A holistic self-calibration algorithm for X – Y precision metrology systems ", mention, in two-dimentional work bench self-calibration process, use the aided measurement device of being made by chromium plating quartz glass plate or chromium plating K9 glass plate, and in conjunction with optical microscope, optical flat has been carried out to gauge point and aim at detection.The scheme using in above document, all relates to the use of optical microscope and imageing sensor, and this Scheme Characteristics is technology comparative maturity, and the degree of modularity is higher, and alignment result is directly perceived.But this scheme exists obvious drawback and deficiency, be only 100nm left and right because optical device used is subject to the restriction of optical diffraction limit, the highest alignment precision, this has affected the effect of final self-calibration to a great extent; Secondly, owing to adopting optical microscope to coordinate imageing sensor to do detection system, relate to a large amount of view data and process problem, cause signals collecting frequency lower, only can carry out in this case static alignment, be difficult to aim at and demarcate in working table movement process, this causes to a great extent, and self-calibration process time is long, inefficiency; Moreover, owing to adopting the equipment such as optical microscope and imageing sensor, certainly will bring problem and the high problem of system complexity that cost is high; And this scheme can be subject to certain environmental impact, so higher to the requirement of working environment.
Consider drawback and the limitation of technique scheme, seek a kind of grating scale that utilizes as the reference points detection alignment system of measuring testing tool, this alignment system can be realized the reference points detection of two-dimentional self-calibration and aim at; This alignment system detection technique maturation, environmental sensitivity are low, and it is even higher that resolution and precision can reach nanoscale; Detection signal is easy to process, and it is little that signal is read time delay, can be applied to worktable dynamically, demarcate at a high speed; Simultaneously this detection system also have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.Adopt the reference points detection alignment device of this detection alignment system as two-dimentional self-calibration, can effectively reduce the deficiency of traditional optical detection alignment system in self-calibration application, make self-calibration effect promoting.This reference points detection alignment system also can be applicable to other need to aim at the equipment detecting, as three coordinate measuring machine, semiconductor detection etc.
Utility model content
Consider drawback and the limitation of technique scheme, the purpose of this utility model is to seek a kind of grating scale that utilizes as the reference points detection alignment system of measuring testing tool, aims at the reference points detection of realizing two-dimentional self-calibration; Make detection signal be easy to process, it is little that signal is read time delay, can be applied to worktable dynamically, demarcate at a high speed; Make simultaneously this detection system have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.
The technical solution of the utility model is as follows:
A kind of two-dimentional self-calibration reference points detection alignment system, is characterized in that: comprise that zero signal reads instrument, grating scale auxiliary calibration plate, read head test section and measuring basis frame; Described grating scale auxiliary calibration plate is provided with directions X conduit, Y-direction conduit, indicate the directions X grating scale of zero mark point and indicate the Y-direction grating scale of zero mark point; The directions X grating scale that indicates zero mark point is arranged on respectively in directions X conduit and Y-direction conduit with the Y-direction grating scale that indicates zero mark point; Between conduit, be parallel to each other in the same way and spacing equate; Described read head test section comprises directions X the first grating ruler reading head and Y-direction the first grating ruler reading head; Described zero signal reads instrument and two-dimentional work bench interconnects by signal wire; Described grating scale auxiliary calibration plate is positioned on two-dimentional work bench, three angles of scaling board are respectively by the first limited block, the second limited block, the 3rd limited block is fixed on two-dimentional work bench, and the both sides at the 4th angle of scaling board are fixed by the first datum strip and the second datum strip that are arranged on two-dimentional work bench respectively; Directions X first grating ruler reading head of described read head test section is arranged on by the first mounting bracket on the face of measuring basis frame directions X one side; Y-direction the first grating ruler reading head is arranged on by the second mounting bracket on the face of measuring basis frame Y-direction one side; Described measuring basis frame is arranged on the portal frame of two-dimentional work bench.
Technical characterictic of the present utility model is also: described read head test section also comprises directions X the second grating ruler reading head and Y-direction the second grating ruler reading head; Wherein directions X the second grating ruler reading head is arranged on by the 3rd mounting bracket on the face of measuring basis frame directions X opposite side; Y-direction the second grating ruler reading head is arranged on the face of measuring basis frame Y-direction opposite side by the 4th mounting bracket.
It is the high-speed, multi-path grating signal disposal system based on FPGA that zero signal described in the utility model reads instrument.
The directions X channel lengths of grating scale auxiliary calibration plate described in the utility model is 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0.3-0.8mm; Y-direction channel lengths is 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0-0.5mm; X, Y-direction conduit form the difference in height that the degree of depth is 0.2mm-0.4mm.
The Y-direction grating scale that indicates the directions X grating scale of zero mark point and indicate zero mark point described in the utility model, all adopting thickness is the one dimension reflection-type grating of 0.2mm-0.5mm, resolution is 1.25nm.
Grating ruler reading head the first mounting bracket described in the utility model, the second mounting bracket, the 3rd mounting bracket and the 4th mounting bracket (48) are L-type structure, are made up of alloy aluminum materials processing.
The profile of measuring basis frame described in the utility model is rectangular structure, is provided with many rows for regulating the installation adjustment hole of oneself height and horizontal level on the top of this measuring basis frame.
The two-dimentional self-calibration reference points detection of one provided by the utility model alignment system has the following advantages and high-lighting effect: this alignment system can be realized the reference points detection of two-dimentional self-calibration and aim at, overcome the shortcoming of traditional detection alignment system in self-calibration application, make worktable under dynamic, high-speed case, detect aligning, realize the demarcation of high-speed and high-efficiency, and detection signal is easy to process, and it is little that signal is read time delay; This alignment system detection technique maturation, environmental sensitivity are low, and it is even higher that resolution and precision can reach nanoscale; Simultaneously this detection system also have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.Adopt the reference points detection alignment device of this detection alignment system as two-dimentional self-calibration, can effectively reduce the deficiency of traditional optical detection alignment system in self-calibration application, self-calibration effect is significantly promoted.This reference points detection alignment system also can be applicable to other need to aim at the equipment detecting, as three coordinate measuring machine, semiconductor detection etc.
Brief description of the drawings
Fig. 1 is a kind of two-dimentional self-calibration reference points detection alignment system schematic diagram of the utility model.
Fig. 2 is the detection alignment modules schematic diagram of a kind of two-dimentional self-calibration reference points detection alignment system of the utility model.
Fig. 3 is that the utility model detection alignment modules aims at directions X and Y-direction the vertical view detecting.
Fig. 4 is auxiliary calibration plate described in the utility model and channel structure schematic diagram thereof.
Fig. 5 is the schematic diagram of the another kind of embodiment in read head of the present utility model test section.
In figure: 1-zero signal reads instrument, 2-two-dimentional work bench, 3-grating scale auxiliary calibration plate, 4-read head test section, 5-measuring basis frame; 31-indicate the directions X grating scale of zero mark point; 32-indicate the Y-direction grating scale of zero mark point; 33-directions X conduit, 34-Y-direction conduit, the 35-the first datum strip, the 36-the second datum strip, the 37-the first limited block, the 38-the second limited block, the 39-the three limited block; 41-directions X the first grating ruler reading head, the 42-the first mounting bracket, 43-Y-direction the first grating ruler reading head, the 44-the second mounting bracket; 45-directions X the second grating ruler reading head, the 46-the three mounting bracket, 47-Y-direction the second grating ruler reading head, the 48-the four mounting bracket.
Embodiment
Below in conjunction with accompanying drawing, structure of the present utility model, principle and embodiment are described in further detail.
Please refer to Fig. 1, Fig. 1 is a kind of two-dimentional self-calibration reference points detection alignment system schematic diagram of the utility model.As shown in Figure 1, this two dimension self-calibration reference points detection alignment system comprises: zero signal reads instrument 1, two-dimentional work bench 2, grating scale auxiliary calibration plate 3, read head test section 4, measuring basis frame 5.
Described zero signal reads instrument 1 and interconnects by signal wire with two-dimentional work bench 2; Described grating scale auxiliary calibration plate 3 comprises: directions X conduit 33, and Y-direction conduit 34, indicates the directions X grating scale 31 of zero mark point, indicate Y-direction grating scale 32, the first datum strip 35, the second datum strips 36 of zero mark point, the first limited block 37, the second limited block 38, the three limited blocks 39; Described read head test section 4 comprises: directions X the first grating ruler reading head 41, the first mounting brackets 42, Y-direction the first grating ruler reading head 43, the second mounting brackets 44; Described measuring basis frame 5 is arranged on the portal frame of two-dimentional work bench 2, has porous regulatory function is installed, and the installation site of Z-direction is provided.
Please refer to Fig. 2, Fig. 2 is the detection alignment modules schematic diagram of a kind of two-dimentional self-calibration reference points detection alignment system of the utility model.Described grating scale auxiliary calibration plate 3 upper surfaces are carved with directions X conduit 33, and Y-direction conduit 34, is parallel to each other between conduit in the same way and spacing equates, are respectively used to install the directions X grating scale 31 that indicates zero mark point and the Y-direction grating scale 32 that indicates zero mark point; Be positioned on two-dimentional work bench 2, directions X is made benchmark by the first datum strip 35, and Y-direction is made benchmark by the second datum strip 36, and grating scale auxiliary calibration plate 3 remains three angles respectively by the first limited block 37, the second limited block 38, the three limited blocks 39 are done spacing being fixed on two-dimentional work bench 2; Directions X first grating ruler reading head 41 of described read head test section 4 is arranged on the first mounting bracket 42, and the first mounting bracket 42 is arranged on the face of directions X one side of measuring basis frame 5; Y-direction the first grating ruler reading head 43 is arranged on the second mounting bracket 44, and the second mounting bracket 44 is arranged on the face of Y-direction one side of measuring basis frame 5.
Please refer to Fig. 3, Fig. 3 is that the utility model detection alignment modules aims at directions X and Y-direction the vertical view detecting.It is the one dimension reflection-type grating of 0.2mm-0.5mm that the described directions X grating scale that indicates zero mark point 31 all adopts thickness range with the Y-direction grating scale 32 that indicates zero mark point, and resolution reaches as high as 1.25nm.Described grating ruler reading head the first mounting bracket 42, the second mounting bracket 44, be L-type structure, is made up of alloy aluminum materials processing.Described measuring basis frame 5 is alloy aluminum material, and its profile is rectangular structure, and upper end has many rows adjustment hole is installed, and while being arranged on two-dimentional work bench 2, height and horizontal level are adjustable.
Set forth measuring system principle in conjunction with Fig. 1, Fig. 2 and Fig. 3, described zero signal reads instrument 1 for the high-speed, multi-path grating signal disposal system based on FPGA, is connected respectively with Y-direction the first grating ruler reading head 43 with the first grating ruler reading head 41 of directions X in read head test section 4 by signal wire; When described two-dimentional work bench 2 moves in a certain gauge point position, directions X the first grating ruler reading head 41, be marked with the directions X grating scale 31 of zero mark point by detecting grating scale auxiliary calibration plate 3, obtain zero mark point signal, and this signal is transferred to zero signal reads instrument 1, simultaneously two-dimentional work bench 2 records this moment the X-axis position coordinates of self and signal is transferred to zero signal and reads instrument 1, obtains the position coordinates of this zero mark point X-axis; In like manner, when two-dimentional work bench 2 moves in respective markers point position, Y-direction the first grating ruler reading head 43, be marked with the Y-direction grating scale 32 of zero mark point by detecting grating scale auxiliary calibration plate 3, obtain zero mark point signal, and this signal is transferred to zero signal reads instrument 1, two-dimentional work bench 2 records this moment the Y-axis position coordinates of self and signal is transferred to zero signal and reads instrument 1 simultaneously, obtains the position coordinates of this zero mark point Y-axis.
In the time getting X, Y-axis coordinate information, complete the detection of a zero mark point on auxiliary calibration plate 3.Method, to the operation of residue gauge point, completes the detection to all gauge points, aligning and writing function in self-calibration process according to this.
Please refer to Fig. 4, Fig. 4 is auxiliary calibration plate described in the utility model and conduit schematic diagram thereof.As shown in Figure 4, described grating scale auxiliary calibration plate 3 is alloy aluminum material, and on its front, directions X and Y-direction are processed with respectively the conduit for grating scale is installed, and described conduit is parallel to each other between in the same way and spacing equates; Wherein directions X conduit 33 length are 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0.3-0.8mm; Y-direction conduit 34 length are 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0-0.5mm; X, Y-direction conduit form the difference in height that the degree of depth is 0.2mm-0.4mm.
Please refer to Fig. 5, Fig. 5 is the another kind of read head of the utility model test section embodiment schematic diagram.The another kind of embodiment of described read head test section 4 comprises directions X the second grating ruler reading head 45 and Y-direction the second grating ruler reading head 47; Wherein directions X the second grating ruler reading head 45 is arranged on by the 3rd mounting bracket 46 on the face of directions X opposite side of measuring basis frame 5; Y-direction the second grating ruler reading head 47 is arranged on the face of Y-direction opposite side of measuring basis frame 5 by the 4th mounting bracket 48.
The measuring system providing in above-mentioned embodiment and organization plan can be realized the reference points detection of two-dimentional self-calibration and aim at; This alignment system detection technique maturation, environmental sensitivity are low, and it is even higher that resolution and precision can reach nanoscale; Detection signal is easy to process, and it is little that signal is read time delay, can be applied to worktable dynamically, demarcate at a high speed; Simultaneously this detection system also have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.Adopt the reference points detection alignment device of this detection alignment system as two-dimentional self-calibration, can effectively reduce the deficiency of traditional optical detection alignment system in self-calibration application, in self-calibration effect is greatly improved in precision, demarcate efficiency and be also significantly improved, can realize worktable high-speed and high-efficiency dynamic calibration.This reference points detection alignment system also can be applicable to such as precision machine tool, semiconductor detection etc. other and need to aim in the equipment detecting.
Claims (8)
1. a two-dimentional self-calibration reference points detection alignment system, is characterized in that: comprise that zero signal reads instrument (1), grating scale auxiliary calibration plate (3), read head test section (4) and measuring basis frame (5);
Described grating scale auxiliary calibration plate (3) is provided with directions X conduit (33), Y-direction conduit (34), indicate the directions X grating scale (31) of zero mark point and indicate the Y-direction grating scale (32) of zero mark point; The Y-direction grating scale (32) that indicates the directions X grating scale (31) of zero mark point and indicate zero mark point is arranged on respectively in directions X conduit (33) and Y-direction conduit (34); Between conduit, be parallel to each other in the same way and spacing equate; Described read head test section (4) comprises directions X the first grating ruler reading head (41) and Y-direction the first grating ruler reading head (43); Described zero signal reads instrument (1) and interconnects by signal wire with two-dimentional work bench (2);
Described grating scale auxiliary calibration plate (3) is positioned on two-dimentional work bench (2), three angles of scaling board are respectively by the first limited block (37), the second limited block (38), it is upper that the 3rd limited block (39) is fixed on two-dimentional work bench (2), and the both sides at the 4th angle of scaling board are fixed by the first datum strip (35) and the second datum strip (36) that are arranged on two-dimentional work bench (2) respectively;
Directions X first grating ruler reading head (41) of described read head test section (4) is arranged on by the first mounting bracket (42) on the face of measuring basis frame (5) directions X one side; Y-direction the first grating ruler reading head (43) is arranged on by the second mounting bracket (44) on the face of measuring basis frame (5) Y-direction one side; Described measuring basis frame (5) is arranged on the portal frame of two-dimentional work bench (2).
2. the two-dimentional self-calibration reference points detection of one according to claim 1 alignment system, is characterized in that: described read head test section (4) also comprises directions X the second grating ruler reading head (45) and Y-direction the second grating ruler reading head (47); Wherein directions X the second grating ruler reading head (45) is arranged on the face of measuring basis frame (5) directions X opposite side by the 3rd mounting bracket (46); Y-direction the second grating ruler reading head (47) is arranged on the face of measuring basis frame (5) Y-direction opposite side by the 4th mounting bracket (48).
3. the two-dimentional self-calibration reference points detection of one according to claim 1 and 2 alignment system, is characterized in that: described zero signal reads instrument (1) for the high-speed, multi-path grating signal disposal system based on FPGA.
4. the two-dimentional self-calibration reference points detection of one according to claim 1 and 2 alignment system, it is characterized in that: directions X conduit (33) length of described grating scale auxiliary calibration plate (3) is 50mm-150mm, width is 5mm-10mm, and the degree of depth is 0.3-0.8mm; Y-direction conduit (34) length is 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0-0.5mm; Directions X and Y-direction conduit form the difference in height that the degree of depth is 0.2mm-0.4mm.
5. the two-dimentional self-calibration reference points detection of one according to claim 1 and 2 alignment system, it is characterized in that: it is the one dimension reflection-type grating of 0.2mm-0.5mm that the described directions X grating scale (31) that indicates zero mark point and the Y-direction grating scale (32) that indicates zero mark point all adopt thickness, and resolution is 1.25nm.
6. the two-dimentional self-calibration reference points detection of one according to claim 1 alignment system, is characterized in that: described the first mounting bracket (42) and the second mounting bracket (44) are L-type structure, are made up of alloy aluminum materials processing.
7. the two-dimentional self-calibration reference points detection of one according to claim 2 alignment system, is characterized in that: described the 3rd mounting bracket (46) and the 4th mounting bracket (48) are L-type structure, are made up of alloy aluminum materials processing.
8. the two-dimentional self-calibration reference points detection of one according to claim 1 and 2 alignment system, it is characterized in that: the profile of described measuring basis frame (5) is rectangular structure, be provided with many rows on the top of this measuring basis frame for regulating the installation adjustment hole of oneself height and horizontal level.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019744A (en) * | 2014-06-10 | 2014-09-03 | 清华大学 | Two-dimension self-calibration gauge point detection alignment system |
| CN105414939A (en) * | 2015-12-01 | 2016-03-23 | 中国科学院深圳先进技术研究院 | Electrode wire threading device and method |
| CN108132058A (en) * | 2016-11-30 | 2018-06-08 | 北京航天计量测试技术研究所 | Digital Photogrammetric System on-line displacement measurement calibrates for error device and method |
| CN109631757A (en) * | 2018-12-13 | 2019-04-16 | 珠海博明软件有限公司 | A kind of grating scale scaling method, device and vision inspection apparatus |
| CN112846891A (en) * | 2019-11-28 | 2021-05-28 | 上海庆良电子有限公司 | External presetting device for product to be processed |
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2014
- 2014-06-10 CN CN201420308219.3U patent/CN203949628U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019744A (en) * | 2014-06-10 | 2014-09-03 | 清华大学 | Two-dimension self-calibration gauge point detection alignment system |
| CN105414939A (en) * | 2015-12-01 | 2016-03-23 | 中国科学院深圳先进技术研究院 | Electrode wire threading device and method |
| CN105414939B (en) * | 2015-12-01 | 2018-04-13 | 中国科学院深圳先进技术研究院 | A kind of wire electrode stringing device and method |
| CN108132058A (en) * | 2016-11-30 | 2018-06-08 | 北京航天计量测试技术研究所 | Digital Photogrammetric System on-line displacement measurement calibrates for error device and method |
| CN109631757A (en) * | 2018-12-13 | 2019-04-16 | 珠海博明软件有限公司 | A kind of grating scale scaling method, device and vision inspection apparatus |
| CN109631757B (en) * | 2018-12-13 | 2020-11-03 | 珠海博明软件有限公司 | Grating scale calibration method and device and visual detection device |
| CN112846891A (en) * | 2019-11-28 | 2021-05-28 | 上海庆良电子有限公司 | External presetting device for product to be processed |
| CN112846891B (en) * | 2019-11-28 | 2024-05-17 | 上海庆良电子有限公司 | Off-machine preset device for product to be processed |
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