CN1518213A - 表面声波器件及其制造方法 - Google Patents
表面声波器件及其制造方法 Download PDFInfo
- Publication number
- CN1518213A CN1518213A CNA2004100033660A CN200410003366A CN1518213A CN 1518213 A CN1518213 A CN 1518213A CN A2004100033660 A CNA2004100033660 A CN A2004100033660A CN 200410003366 A CN200410003366 A CN 200410003366A CN 1518213 A CN1518213 A CN 1518213A
- Authority
- CN
- China
- Prior art keywords
- acoustic wave
- surface acoustic
- mounting substrate
- chip mounting
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/12—Layered products comprising a layer of synthetic resin next to a fibrous or filamentary layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/058—Holders; Supports for surface acoustic wave devices
- H03H9/059—Holders; Supports for surface acoustic wave devices consisting of mounting pads or bumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
- B32B27/322—Layered products comprising a layer of synthetic resin comprising polyolefins comprising halogenated polyolefins, e.g. PTFE
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02897—Means for compensation or elimination of undesirable effects of strain or mechanical damage, e.g. strain due to bending influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
- H03H9/1071—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/02—Coating on the layer surface on fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/26—Polymeric coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2262/00—Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
- B32B2262/02—Synthetic macromolecular fibres
- B32B2262/0246—Acrylic resin fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2327/00—Polyvinylhalogenides
- B32B2327/12—Polyvinylhalogenides containing fluorine
- B32B2327/18—PTFE, i.e. polytetrafluoroethylene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2571/00—Protective equipment
- B32B2571/02—Protective equipment defensive, e.g. armour plates, anti-ballistic clothing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (26)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003018777 | 2003-01-28 | ||
JP018777/2003 | 2003-01-28 | ||
JP377893/2003 | 2003-11-07 | ||
JP2003377893A JP4177233B2 (ja) | 2003-01-28 | 2003-11-07 | 弾性表面波デバイス及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1518213A true CN1518213A (zh) | 2004-08-04 |
CN1518213B CN1518213B (zh) | 2010-04-14 |
Family
ID=33032125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2004100033660A Expired - Fee Related CN1518213B (zh) | 2003-01-28 | 2004-01-21 | 表面声波器件及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7002282B2 (zh) |
JP (1) | JP4177233B2 (zh) |
KR (1) | KR100614542B1 (zh) |
CN (1) | CN1518213B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101192816B (zh) * | 2006-11-28 | 2010-06-23 | 富士通媒体部品株式会社 | 制造声波器件的方法 |
CN101868915B (zh) * | 2007-11-28 | 2013-11-06 | 株式会社村田制作所 | 弹性波装置 |
US9264014B2 (en) | 2013-07-29 | 2016-02-16 | Shunsin Technology (Zhong Shan) Limited | Package structure for duplexer, method of manufacturing the same and electronic device with the same |
CN106067457A (zh) * | 2016-08-11 | 2016-11-02 | 苏州日月新半导体有限公司 | 集成电路封装体及其制造方法与所使用的封装基板 |
CN106921357A (zh) * | 2017-02-28 | 2017-07-04 | 宜确半导体(苏州)有限公司 | 声波设备及其晶圆级封装方法 |
CN109103328A (zh) * | 2018-03-23 | 2018-12-28 | 北京航天微电科技有限公司 | 一种声表面波芯片及其制作方法 |
CN111490743A (zh) * | 2020-05-22 | 2020-08-04 | 北京超材信息科技有限公司 | 一种终端saw滤波器制作方法 |
CN113210240A (zh) * | 2021-03-23 | 2021-08-06 | 魔音智芯科技(深圳)有限公司 | 一种双面叉指换能器的兰姆波器件及其制备方法 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005099088A1 (en) * | 2004-03-26 | 2005-10-20 | Cypress Semiconductor Corp. | Integrated circuit having one or more conductive devices formed over a saw and/or mems device |
JP2006135771A (ja) * | 2004-11-08 | 2006-05-25 | Renesas Technology Corp | 電子部品モジュール |
DE102005028906A1 (de) * | 2005-06-22 | 2006-12-28 | Giesecke & Devrient Gmbh | Vorrichtung für die Prüfung von Banknoten |
JP2007081613A (ja) * | 2005-09-13 | 2007-03-29 | Seiko Epson Corp | 弾性表面波デバイス及びその製造方法 |
JP4535286B2 (ja) * | 2006-03-31 | 2010-09-01 | Tdk株式会社 | 弾性表面波素子および当該素子を備えた弾性表面波装置 |
WO2008078898A1 (en) * | 2006-12-22 | 2008-07-03 | Lg Innotek Co., Ltd | High frequency module and manufacturing method thereof |
US7726184B2 (en) * | 2007-12-28 | 2010-06-01 | Honeywell International Inc. | Surface acoustic wave sensor and package |
JP2009194091A (ja) * | 2008-02-13 | 2009-08-27 | Seiko Instruments Inc | 電子部品、電子機器、及びベース部材製造方法 |
CN101692441B (zh) * | 2009-04-16 | 2012-04-11 | 旭丽电子(广州)有限公司 | 一种印刷电路板封装结构 |
US20110075392A1 (en) | 2009-09-29 | 2011-03-31 | Astec International Limited | Assemblies and Methods for Directly Connecting Integrated Circuits to Electrically Conductive Sheets |
US20120314390A1 (en) * | 2010-03-03 | 2012-12-13 | Mutual-Tek Industries Co., Ltd. | Multilayer circuit board |
US8384269B2 (en) * | 2010-10-20 | 2013-02-26 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Electrostatic bonding of a die substrate to a package substrate |
JP2012151698A (ja) * | 2011-01-19 | 2012-08-09 | Taiyo Yuden Co Ltd | 弾性波デバイス |
WO2013031602A1 (ja) | 2011-09-02 | 2013-03-07 | 株式会社村田製作所 | 回路モジュール及び複合回路モジュール |
CN109904148B (zh) * | 2018-12-26 | 2023-07-04 | 天津大学 | 具有集成电路模块和声波滤波器模块的柔性*** |
US11784625B2 (en) * | 2019-12-11 | 2023-10-10 | Guangdong Institute Of Semiconductor Industrial Technology | Packaging method and package structure for filter chip |
WO2023017825A1 (ja) * | 2021-08-11 | 2023-02-16 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
CN115628765B (zh) * | 2022-10-27 | 2023-11-07 | 中船重工安谱(湖北)仪器有限公司 | 声表面波测量装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07264000A (ja) * | 1994-03-16 | 1995-10-13 | Fujitsu Ltd | 弾性表面波フィルタ素子及びそれをパッケージングして成る弾性表面波フィルタ |
JPH07336186A (ja) | 1994-06-06 | 1995-12-22 | Matsushita Electric Ind Co Ltd | 面実装型弾性表面波素子 |
JP3577913B2 (ja) * | 1997-02-27 | 2004-10-20 | セイコーエプソン株式会社 | 半導体装置、およびこれを具備する電子機器 |
US6321444B1 (en) * | 2000-04-11 | 2001-11-27 | Japan Radio Co., Ltd. | Method of making surface acoustic wave device |
JP3860364B2 (ja) * | 1999-08-11 | 2006-12-20 | 富士通メディアデバイス株式会社 | 弾性表面波装置 |
-
2003
- 2003-11-07 JP JP2003377893A patent/JP4177233B2/ja not_active Expired - Fee Related
-
2004
- 2004-01-21 CN CN2004100033660A patent/CN1518213B/zh not_active Expired - Fee Related
- 2004-01-27 US US10/764,480 patent/US7002282B2/en not_active Expired - Fee Related
- 2004-01-27 KR KR1020040004889A patent/KR100614542B1/ko not_active IP Right Cessation
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101192816B (zh) * | 2006-11-28 | 2010-06-23 | 富士通媒体部品株式会社 | 制造声波器件的方法 |
CN101868915B (zh) * | 2007-11-28 | 2013-11-06 | 株式会社村田制作所 | 弹性波装置 |
US9264014B2 (en) | 2013-07-29 | 2016-02-16 | Shunsin Technology (Zhong Shan) Limited | Package structure for duplexer, method of manufacturing the same and electronic device with the same |
CN106067457A (zh) * | 2016-08-11 | 2016-11-02 | 苏州日月新半导体有限公司 | 集成电路封装体及其制造方法与所使用的封装基板 |
CN106921357A (zh) * | 2017-02-28 | 2017-07-04 | 宜确半导体(苏州)有限公司 | 声波设备及其晶圆级封装方法 |
CN109103328A (zh) * | 2018-03-23 | 2018-12-28 | 北京航天微电科技有限公司 | 一种声表面波芯片及其制作方法 |
CN111490743A (zh) * | 2020-05-22 | 2020-08-04 | 北京超材信息科技有限公司 | 一种终端saw滤波器制作方法 |
CN111490743B (zh) * | 2020-05-22 | 2023-06-06 | 北京超材信息科技有限公司 | 一种终端saw滤波器制作方法 |
CN113210240A (zh) * | 2021-03-23 | 2021-08-06 | 魔音智芯科技(深圳)有限公司 | 一种双面叉指换能器的兰姆波器件及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
US20040227431A1 (en) | 2004-11-18 |
JP4177233B2 (ja) | 2008-11-05 |
US7002282B2 (en) | 2006-02-21 |
CN1518213B (zh) | 2010-04-14 |
JP2004254287A (ja) | 2004-09-09 |
KR100614542B1 (ko) | 2006-08-25 |
KR20040069272A (ko) | 2004-08-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TAIYO YUDEN CO., LTD. Free format text: FORMER OWNER: FUJITSU MEDIA DEVICES LTD Effective date: 20101201 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: KANAGAWA PREFECTURE, JAPAN TO: TOKYO, JAPAN |
|
TR01 | Transfer of patent right |
Effective date of registration: 20101201 Address after: Tokyo, Japan, Japan Patentee after: Taiyo Yuden Co., Ltd. Address before: Kanagawa Patentee before: Fujitsu Media Devices Ltd |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100414 Termination date: 20120121 |