CN1408548A - Piezoelectric ink jet printing head and its producing method - Google Patents
Piezoelectric ink jet printing head and its producing method Download PDFInfo
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- CN1408548A CN1408548A CN 01131354 CN01131354A CN1408548A CN 1408548 A CN1408548 A CN 1408548A CN 01131354 CN01131354 CN 01131354 CN 01131354 A CN01131354 A CN 01131354A CN 1408548 A CN1408548 A CN 1408548A
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Abstract
The piezoelectric ink jet printing head has one notched metal layer to replace normal ceramic vibrating layer and ink cavity layer to avoid the stress destruction caused by high temperature sintering. The producing electroplating and micro-etching process includes forming one notched metal layer on a substrate, removing the substrate, forming the lower electrode layer and one figured piezoelectric layer, forming the upper electrode layer, adhering one jet hole sheet to the second surface of the metal layer to constitute one ink cavity together with the notch.
Description
Technical field
The present invention relates to a kind of piezoelectric ink jet head and manufacture method thereof, particularly a kind ofly replace known ceramic thick film, in order to the vibration level that forms piezoelectric ink jet head and the structure and the manufacture method thereof of black chamber layer with metal level with groove.
Background technology
The groundwork principle of traditional inkjet technology can be divided into thermal bubble type (Thermalbubble) and piezoelectric type (Piezoelectric).The Thermal Bubble Ink-jet Printer printing technique is to utilize heater (Heater) with ink moment gasification, produces high pressure bubble promotion ink and is penetrated by nozzle.Because the manufacturing cost of Thermal Bubble Ink-jet Printer printhead is lower, industry is own by HP and successfully commercialization of CANON, and forms sizable ink-jet printer market.But, make the application of its extension limited because the operation principle of its high-temperature gasification makes that suitable ink (mainly being water solvent) selectivity is low.
The piezoelectric ink jet printing technique is to utilize piezoelectric ceramics (Piezoelectric ceramic) to produce distortion because of applying voltage, and extruding liquid produces high pressure liquid is sprayed.With respect to the Thermal Bubble Ink-jet Printer printhead, piezoelectric ink jet head has following advantage: the ink of piezoelectric ink jet head can not influence the situation of quality of colour because of high-temperature gasification generation chemical change; Owing to need not use high thermal stress repeatedly, so have splendid durability; The reaction speed of the employed piezoelectric ceramics of piezoelectric ink jet head is fast, can improve print speed, and the Thermal Bubble Ink-jet Printer printhead then can be subjected to the restriction of heat conduction velocity; Piezoelectric ink jet head is a deflection of controlling piezoelectric ceramics by the size of control voltage, and then the size of control ink droplet, can improve the quality of printing.
Fig. 1 is the generalized section of known a kind of piezoelectric ink jet head.The manufacture method of conventional piezoelectric formula ink jet-print head 100 be utilize that ceramic thick film (thick film) manufacture method forms have upper electrode layer 102 (upper electrode layer), piezoelectric layer 104 (piezoelectriclayer), lower electrode layer 107 (lower electrode layer), vibration level 108 (vibratinglayer), black chamber layer 110, and ceramic thick film such as bottom film of ink cavity 112 give birth to embryo (green tape), and, carry out the high temperature sintering of ceramic structure again according to after in proper order the living embryo pressing of the ceramic thick film of different layers being adhered together.The piezoelectric ink jet head produced of EPSON company for example.
Please equally with reference to figure 1, the operation principle of piezoelectric ink jet head 100 is to apply voltages to piezoelectric layer 104 by upper electrode layer 102 and lower electrode layer 107, because the material of piezoelectric layer 104 is a piezoelectric ceramics (piezoelectric ceramic), so piezoelectric layer 104 can be subjected to the influence of voltage and produce short time set, and come processing vibration layer 108 by this short time set, with the ink in the extruded ink water cavity 114 (pressure chamber), and from ink outlet port 116 the ink high-pressure injection is gone out to form ink droplet, form picture and text and arrive paper surface.
In the manufacture method of known conventional piezoelectric formula ink jet-print head,, after other device all completes with ceramic thick film technology, carry out the high temperature sintering of contraposition pressing bonding and ceramic structure again except that upper electrode layer, lower electrode layer adopt the metal.Yet the manufacture method of conventional piezoelectric formula ink jet-print head has following shortcoming:
(1) because the physical dimension of piezoelectric ink jet head is quite little, and its structure has higher precision, thereby the disqualification rate that carries out contraposition pressing bonding between each layer ceramic thick film is improved relatively;
(2) because the structure of piezoelectric ink jet head is quite complicated, when high temperature sintering,, causes the stress rupture of internal structure, thereby the disqualification rate of finished product is improved relatively often because the amount of contraction of ceramic material is inhomogeneous;
(3) because the structure of piezoelectric ink jet head is quite complicated, can be when high temperature sintering because the amount of contraction of ceramic material is inhomogeneous, the fine and close more piezoelectric ink jet head of structural design will be caused, the qualification rate of its finished product is low more, thereby can't increase density between the ink jet-print head, and the resolution ratio of restriction inkjet printing.
Summary of the invention
The objective of the invention is to solve the above problems, a kind of piezoelectric ink jet head and manufacture method thereof are provided.To electroplate the mode of (electroplate) and little shadow (photolithography), etching (etching), formation one has the metal level of groove, in order to replace known vibration level and the black chamber layer made from ceramic material, so can improve product qualified rate and processing precise degree, and then reduce manufacturing cost.
Based on purpose of the present invention, the present invention proposes a kind of piezoelectric ink jet head, at least include a first metal layer, it has first and corresponding second, and one second metal level is disposed on second of the first metal layer, and has at least one slotted eye, second of itself and the first metal layer constitutes a groove, and a lower electrode layer is disposed on first of the first metal layer, one piezoelectric layer of patterning then is disposed on the lower electrode layer, the position of the position respective slot of piezoelectric layer wherein, and a upper electrode layer of patterning is formed on the piezoelectric layer, and a spray nozzle sheet is disposed on second metal level, wherein spray nozzle sheet and the first metal layer and second metal level constitute an inking chamber, and spray nozzle sheet has at least one spray orifice, and it communicates with inking chamber.Wherein, piezoelectric ink jet head also includes a passivation layer, and configuration is between lower electrode layer and the first metal layer, and the material of passivation layer comprises passive metal or insulating materials.
The piezoelectric ink jet head that the present invention is corresponding above-mentioned, a kind of manufacture method of piezoelectric ink jet head is proposed, one substrate at first is provided, and form the first metal layer on substrate, wherein the first metal layer has first and corresponding second, and substrate is positioned on first of the first metal layer.Then form one second metal level on second of the first metal layer, wherein second metal level has at least one slotted eye, and second of itself and the first metal layer constitutes a groove.Then remove substrate again, and form a lower electrode layer on first of the first metal layer.A piezoelectric layer that then forms patterning on lower electrode layer, the position of the position respective slot of piezoelectric layer wherein.A upper electrode layer that then forms patterning is on piezoelectric layer.At last, dispose a spray nozzle sheet on second metal level, wherein spray nozzle sheet and the first metal layer and second metal level constitute an inking chamber, and spray nozzle sheet has at least one spray orifice, and it communicates with inking chamber.Wherein, after removing substrate, also comprise forming a passivation layer on first of the first metal layer, and between lower electrode layer and the first metal layer, and the material of passivation layer comprises passive metal or insulating materials.
Based on purpose of the present invention, the present invention proposes a kind of piezoelectric ink jet head, comprises at least equally: a metal level, have first and corresponding second, and having at least one groove, its further groove is depressed in second of metal level, and the degree of depth of groove is slightly less than metal layer thickness approximately; One lower electrode layer is formed on first of metal level; One piezoelectric layer of patterning is formed on the lower electrode layer, wherein the position of the position respective slot of piezoelectric layer; One upper electrode layer of patterning is formed on the piezoelectric layer; And a spray nozzle sheet, be disposed on second of metal level, wherein spray nozzle sheet and metal level constitute an inking chamber, and spray nozzle sheet has at least one spray orifice, and it communicates with inking chamber.Wherein, piezoelectric ink jet head also includes a passivation layer, and configuration is between lower electrode layer and metal level, and the material of passivation layer comprises passive metal or insulating materials.
The piezoelectric ink jet head that the present invention is corresponding above-mentioned, also propose a kind of manufacture method of piezoelectric ink jet head, a substrate at first is provided, and form a metal level on substrate, wherein metal level has first and corresponding second, and substrate is positioned on first of metal level.Then remove the part metals layer, to form at least one groove, its further groove is depressed in second of metal level, and the degree of depth of groove is slightly less than metal layer thickness approximately.Then remove substrate, and form a lower electrode layer on first of metal level.A piezoelectric layer that then forms patterning on lower electrode layer, the position of the position respective slot of piezoelectric layer wherein.A upper electrode layer that then forms patterning is on piezoelectric layer.At last, dispose a spray nozzle sheet on second of metal level, wherein spray nozzle sheet and metal level constitute an inking chamber, and spray nozzle sheet has at least one spray orifice, and it communicates with inking chamber.Wherein, after removing substrate, also comprise forming a passivation layer on first of the first metal layer, and the material of passivation layer comprises passive metal or insulating materials.
The present invention is electroplating and the mode of lithography, to utilize metal material to replace known ceramic material, in order to structures such as the vibration level that forms ink jet-print head and black chamber layers.Because the thermal conductivity and the ductility of metal all are better than pottery, so can improve known ink jet-print head when high temperature sintering, the phenomenon of stress rupture takes place in its internal structure easily.So as to raising product qualified rate and processing precise degree, and then reduce manufacturing cost.
Description of drawings
Fig. 1 is the generalized section of known a kind of piezoelectric ink jet head;
Fig. 2 A～2D is the section flow chart of manufacture method of the piezoelectric ink jet head of embodiments of the invention;
Fig. 3 A～3D is first kind of section flow chart that forms the metal level of Fig. 2 B of embodiments of the invention;
Fig. 4 A～4D is second kind of section flow chart that forms the metal level of Fig. 2 B of the embodiment of the invention;
Fig. 5 is the generalized section of the piezoelectric ink jet head with passivation layer of embodiments of the invention.
Figure acceptance of the bid note is respectively:
100: piezoelectric ink jet head 102: upper electrode layer
104: piezoelectric layer 107: lower electrode layer
108: vibration level 110: black chamber layer
112: bottom film of ink cavity 114: inking chamber
116: ink outlet port 200: piezoelectric ink jet head
202,302,402: substrate
204,304,404: metal level
205: the first 206: the second
207,307,407: the first metal layer
208,308,408: the second metal levels
210,310,410: groove 212: the passive metal layer
214: piezoelectric layer 216: upper electrode layer
218: spray nozzle sheet 220: inking chamber
222: spray orifice 324,424: photoresist layer
526: passivation layer
The specific embodiment
Please successively with reference to figure 2A～2D, be the section flow chart of manufacture method of the piezoelectric ink jet head of embodiments of the invention.At first, shown in Fig. 2 A, one substrate 202 is provided, its material for example is a silicon, pottery and metal or the like, and to electroplate the mode of (electroplate), form a metal level 204 (metal layer) on substrate 202, then again with little shadow (photolithography), the mode of etching (etching), remove part metals layer 204, to form a groove 210, its further groove 210 is sunk into second 206 of metal level 204, it should be noted that groove 210 is formed in the mode that etches partially (half etching), so it does not run through metal level 204 fully, make the smaller approximately thickness with metal level 204 of the degree of depth of groove 210, and metal level 204 is divided into a first metal layer 207 and one second metal level 208.Wherein, the effect of the first metal layer 207 is identical with the vibration level of known Fig. 1 108, and the groove 210 that the first metal layer 207 and second metal level 208 are constituted is then as the part-structure of the inking chamber 114 of known Fig. 1.
Shown in Fig. 2 B, remove substrate 202 for another example, and keep metal level 204 with groove 210.Afterwards, shown in Fig. 2 C, and form a lower electrode layer 212 (lowerelectrode layer) on first 205 of metal level 204 in the mode of electroplating, wherein the material of lower electrode layer 212 for example is the metal of good conductivity.Then, again in the mode of screen painting (screen printing), the piezoelectric layer 214 (piezoelectric layer) that forms a patterning is on lower electrode layer 212, and the position of the position respective slot 210 of the piezoelectric layer 214 of patterning.It should be noted that, the material of piezoelectric layer 214 is a piezoelectric ceramics (Piezoelectricceramic) normally, and the piezoelectric layer 214 on the first wire mark is ceramic thick film life embryos (green tape), must carry out high temperature sintering to it, is transformed into piezoelectric ceramics so that ceramic thick film is given birth to embryo.Wherein, the material of piezoelectric layer 214 comprise plumbous zirconium titanium admixture (lead zirconate titanate, PZT) or piezoelectric polymer, piezoelectric polymer comprise poly-difluoroethylene (Poly (VinylideneFluoride), PVDF).
After finishing the structure shown in Fig. 2 C, shown in Fig. 2 D, again in the mode of screen painting, a upper electrode layer 216 (upper electrode layer) that forms patterning is on piezoelectric layer 214, wherein the material of upper electrode layer 216 for example is the metal of good conductivity, and the position of the corresponding piezoelectric layer 214 in the position of upper electrode layer 216.The person of connecing, mode to fit again, one spray nozzle sheet 218 (nozzle plate) is disposed on second 206 of metal level 204, wherein spray nozzle sheet 218 sealing is at the opening of groove shown in Figure 2 210, and constitute the enclosed cavity structure of inking chambers 220 (pressure chamber) with the first metal layer 207 and second metal level 208, and spray nozzle sheet 218 also has one to several spray orifices 222 (nozzle), it communicates with inking chamber 220 respectively, in order to import and export, finish the making of piezoelectric ink jet head 200 at last as ink.It should be noted that, piezoelectric layer 214 is if adopt piezoelectric ceramics, thereby need carry out high temperature sintering the time, because spray nozzle sheet 218 is through after the high temperature sintering at piezoelectric layer 214, just configuration fits on the metal level 204, therefore the material of spray nozzle sheet 218 and need not be exotic material, and can be made by the material of metal or polymer (polymer).
The method of the metal level with groove 210 204 of first kind of formation Fig. 2 B of embodiments of the invention is as follows, please successively with reference to figure 3A～3D, is first kind of section flow chart that forms the metal level 204 of Fig. 2 B of embodiments of the invention.As shown in Figure 3A, at first provide a substrate 302, and form a first metal layer 307 on substrate 302 in the mode of electroplating.Shown in Fig. 3 B, in the mode of exposure imaging, form a patterned light blockage layer 324 on the first metal layer 307 for another example, wherein the thickness of photoresist layer 324 and distributed areas are identical with the degree of depth and the distributed areas of the groove 210 of Fig. 2 B respectively.Then, shown in Fig. 3 C, form one second metal level 308 on the first metal layer 307 in the mode of electroplating again.Afterwards, remove substrate 302 and patterned light blockage layer 324 again, can form the metal level 304 with groove 310 shown in Fig. 3 D, its structure is identical with the metal level 204 of Fig. 2 B.
The method of the metal level with groove 210 204 of second kind of formation Fig. 2 B of embodiments of the invention is as follows, please successively with reference to figure 4A～4D, is second kind of section flow chart that forms the metal level 204 of Fig. 2 of embodiments of the invention.Shown in Fig. 4 A, a substrate 402 at first is provided, and forms a metal level 404 on substrate 402 in the mode of electroplating.Then, shown in Fig. 4 B, form a patterned light blockage layer 424 on metal level 404 in the mode of exposure imaging, wherein the position of the groove 210 of second metal level 208 of the position corresponding diagram 2B of patterned light blockage layer 424.Then, shown in Fig. 4 C,, face the direction of substrate 402, remove part metals layer 404, make metal level 404 be distinguished into the first metal layer 407 and second metal level 408 again in etched mode.Afterwards, remove substrate 402 and photoresist layer 424, can form the metal level with groove 410 404 shown in Fig. 4 D, its structure is identical with the metal level 204 of Fig. 2 B.
Please refer to Fig. 2 D, when the material of piezoelectric layer 214 is piezoelectric ceramics, and need carry out high temperature sintering the time, molten metal layer 204 during for fear of high temperature sintering, and therefore, the material of metal level 204 must select fusing point greater than the metal more than 800 ℃.In addition, when forming metal level 204 in the mode of electroplating, the residual stress of metal level 204 inside causes structural stress rupture easily.Therefore, the metal that residual stress is little and ductility is good after the material of metal level 204 need be selected to electroplate.So the material of metal level 204 can comprise metals such as nickel (Ni), copper (Cu), palladium (Pd) and alloy thereof, or other conductive material.
Please be equally with reference to figure 2D, material employing piezoelectric ceramics when piezoelectric layer 214, and need carry out high temperature sintering the time, chemical reaction takes place in both under hot environment in order to avoid piezoelectric layer 214 and metal level 204, thereby the due piezoelectric property of destruction piezoelectric ceramics, the material of lower electrode layer 212 can be a passive metal, so as to separating metal level 204 and piezoelectric layer 214, simultaneously for avoiding lower electrode layer 212 to melt when the high temperature sintering, its fusing point also needs greater than 800 ℃, therefore, the material of lower electrode layer 212 can comprise gold (Au), silver (Ag), copper (Cu), platinum (Pt), palladium (Pd), metals such as its alloy, or other conductive material.
Please refer to Fig. 5, is the generalized section of the piezoelectric ink jet head with passivation layer of embodiments of the invention.Equally, during for fear of piezoelectric layer 214 in high temperature sintering, pass lower electrode layer 212 and react with metal level 204, therefore, after forming metal level 204, also comprise and form a passivation layer 526 on metal level 204, and between lower electrode layer 212 and metal level 204, in order to avoid piezoelectric layer 214 when the high temperature sintering, pass lower electrode layer 212 and react with metal level 204, wherein the material of passivation layer 526 comprises passive metal (inert metal), for example is gold, silver, copper, platinum, palladium, metals such as its alloy, and the material of passivation layer 526 also can comprise insulating materials, for example is silicon nitride, insulating materials such as silica and tantalum oxide.
According to feature of the present invention, the present invention replaces known ceramic material with metal, in order to form a metal level with groove, replace known vibration level and black chamber layer, and the use of minimizing ceramic material, because the thermal conductivity and the ductility of metal all are better than pottery, so can improve pottery when high temperature sintering, the phenomenon of the structure generation stress rupture of ink jet-print head.
According to feature of the present invention, the present invention is the inking chamber structure of making ink jet-print head in the mode of plating and lithography, so its precision size degree will be much larger than known with the precision size degree behind ceramic thick film contraposition pressing and the high temperature sintering, therefore, manufacture method of the present invention can further increase the density of ink jet-print head, to improve the resolution ratio of inkjet printing.
According to feature of the present invention, the present invention is with the material of passive metal as lower electrode layer, between metal level and the piezoelectric layer chemical change takes place, thereby has influence on the due piezoelectric property of piezoelectric layer when the high temperature sintering avoiding.
According to feature of the present invention, the present invention forms a passivation layer between lower electrode layer and metal level, avoiding when the high temperature sintering, piezoelectric layer pass lower electrode layer and with metal level generation chemical change, thereby have influence on the due piezoelectric property of piezoelectric layer.
In sum, the manufacture method of piezoelectric ink jet head of the present invention has following advantage:
(1) manufacture method of piezoelectric ink jet head of the present invention, be to replace known ceramic material with metal, to reduce the use of ceramic material, because the thermal conductivity and the ductility of metal all are better than pottery, so can improve pottery when high temperature sintering, the phenomenon of the internal structure generation stress rupture of ink jet-print head.
(2) manufacture method of piezoelectric ink jet head of the present invention, be with the inking chamber structure of electroplating and the mode of lithography is made ink jet-print head, so its precision will be higher than known precision with the inking chamber structure behind ceramic thick film contraposition pressing and the high temperature sintering, also therefore can further shorten the distance between the two adjacent ink outlet ports, to improve the resolution ratio of inkjet printing.
(3) manufacture method of piezoelectric ink jet head of the present invention is to form metal level in the mode of electroplating, because the electroplating cost of metal level is far below the contraposition pressing of known ceramic material and the cost of high temperature sintering, so can reduce the manufacturing cost of finished product.
Though the present invention with a preferred embodiment openly as above; but it is not in order to restriction protection scope of the present invention; any personnel that are familiar with this technology, change of being done and retouching without departing from the spirit and scope of the present invention all belongs to protection scope of the present invention.
Claims (60)
1. piezoelectric ink jet head is characterized in that: comprise at least:
One the first metal layer has one first and corresponding one second;
One second metal level is disposed on this second of this first metal layer, and has at least one slotted eye, constitutes a groove with this second of this first metal layer;
One lower electrode layer is disposed on this first of this first metal layer;
One piezoelectric layer of patterning is disposed on this lower electrode layer, and wherein the position of this piezoelectric layer is corresponding to the position of this groove;
One upper electrode layer of patterning is disposed on this piezoelectric layer;
One spray nozzle sheet is disposed on this second metal level, and wherein this spray nozzle sheet and the first metal layer and this second metal level constitute at least one inking chamber, and this spray nozzle sheet has at least one spray orifice, and this spray orifice communicates with this inking chamber.
2. piezoelectric ink jet head according to claim 1 is characterized in that: the material of this first metal layer comprise nickel, copper, palladium one of them.
3. piezoelectric ink jet head according to claim 1 is characterized in that: the material of this second metal level comprise nickel, copper, palladium one of them.
4. piezoelectric ink jet head according to claim 1 is characterized in that: the material of this lower electrode layer comprises passive metal.
5. piezoelectric ink jet head according to claim 1 is characterized in that: the material of this lower electrode layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
6. piezoelectric ink jet head according to claim 1 is characterized in that: also comprise a passivation layer, configuration is between this lower electrode layer and this first metal layer.
7. piezoelectric ink jet head according to claim 6 is characterized in that: the material of this passivation layer comprises passive metal.
8. piezoelectric ink jet head according to claim 6 is characterized in that: the material of this passivation layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
9. piezoelectric ink jet head according to claim 6 is characterized in that: the material of this passivation layer comprises insulating materials.
10. piezoelectric ink jet head according to claim 6 is characterized in that: the material of this passivation layer comprise silicon nitride, silica and tantalum oxide one of them.
11. piezoelectric ink jet head according to claim 1 is characterized in that: the material of this piezoelectric layer comprise plumbous titanium zirconium admixture and poly-difluoroethylene one of them.
12. piezoelectric ink jet head according to claim 1 is characterized in that: the material of this spray nozzle sheet comprise metal and polymer one of them.
13. the manufacture method of a piezoelectric ink jet head is characterized in that: comprise the following steps: at least
One substrate is provided;
Form a first metal layer on this substrate, wherein this first metal layer has one first and corresponding one second, and this substrate is positioned on this first of this first metal layer;
Form one second metal level on this second of this first metal layer, wherein this second metal level has at least one slotted eye, and this second of itself and this first metal layer constitutes a groove;
Remove this substrate;
Form a lower electrode layer on this first of this first metal layer;
A piezoelectric layer that forms patterning is on this lower electrode layer, and wherein the position of this piezoelectric layer is to position that should groove;
A upper electrode layer that forms patterning is on this piezoelectric layer;
Dispose a spray nozzle sheet on this second metal level, wherein this spray nozzle sheet and this first metal layer and this second metal level constitute at least one inking chamber, and this spray nozzle sheet has at least one spray orifice, and this spray orifice communicates with this inking chamber.
14. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the material of this substrate comprise silicon, pottery and metal one of them.
15. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the formation method of this first metal layer comprises plating.
16. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the material of this first metal layer comprise nickel, copper, palladium one of them.
17. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the formation method of this second metal level comprises plating.
18. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the material of this second metal level comprise nickel, copper, palladium one of them.
19. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the formation method of this lower electrode layer comprises screen painting.
20. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the formation method of this lower electrode layer comprises plating.
21. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the material of this lower electrode layer comprises passive metal.
22. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the material of this lower electrode layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
23. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: after removing this substrate, also comprise forming a passivation layer on this first of this first metal layer.
24. the manufacture method of piezoelectric ink jet head according to claim 23 is characterized in that: the material of this passivation layer comprises passive metal.
25. the manufacture method of piezoelectric ink jet head according to claim 23 is characterized in that: the material of this passivation layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
26. the manufacture method of piezoelectric ink jet head according to claim 23 is characterized in that: the material of this passivation layer comprises insulating materials.
27. the manufacture method of piezoelectric ink jet head according to claim 23 is characterized in that: the material of this passivation layer comprise silicon nitride, silica and tantalum oxide one of them.
28. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the formation method of this piezoelectric layer comprises screen painting.
29. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the material of this piezoelectric layer comprise plumbous titanium zirconium admixture and poly-difluoroethylene one of them.
30. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the formation method of this upper electrode layer comprises screen painting.
31. the manufacture method of piezoelectric ink jet head according to claim 13 is characterized in that: the material of this spray nozzle sheet comprise metal and polymer one of them.
32. a piezoelectric ink jet head is characterized in that: comprise at least:
One metal level has one first and corresponding one second, and has at least one groove, and wherein this groove is depressed in this second of this metal level, and the degree of depth of this groove is slightly less than this metal layer thickness approximately;
One lower electrode layer is disposed on this first of this metal level;
One piezoelectric layer of patterning is disposed on this lower electrode layer, and wherein the position of this piezoelectric layer is to position that should groove;
One upper electrode layer of patterning is disposed on this piezoelectric layer;
One spray nozzle sheet is disposed on this second of this metal level, and wherein this spray nozzle sheet and metal level constitute an inking chamber, and this spray nozzle sheet has at least one spray orifice, and this spray orifice communicates with this inking chamber.
33. piezoelectric ink jet head according to claim 32 is characterized in that: the material of this metal level comprise nickel, copper, palladium one of them.
34. piezoelectric ink jet head according to claim 32 is characterized in that: the material of this lower electrode layer comprises passive metal.
35. piezoelectric ink jet head according to claim 32 is characterized in that: the material of this lower electrode layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
36. piezoelectric ink jet head according to claim 32 is characterized in that: also comprise a passivation layer, configuration is between this lower electrode layer and this metal level.
37. piezoelectric ink jet head according to claim 36 is characterized in that: the material of this passivation layer comprises passive metal.
38. piezoelectric ink jet head according to claim 36 is characterized in that: the material of this passivation layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
39. piezoelectric ink jet head according to claim 36 is characterized in that: the material of this passivation layer comprises insulating materials.
40. piezoelectric ink jet head according to claim 36 is characterized in that: the material of this passivation layer comprise silicon nitride, silica and tantalum oxide one of them.
41. piezoelectric ink jet head according to claim 32 is characterized in that: the material of this piezoelectric layer comprise plumbous titanium zirconium admixture and poly-difluoroethylene one of them.
42. piezoelectric ink jet head according to claim 32 is characterized in that: the material of this spray nozzle sheet comprise metal and polymer one of them.
43. the manufacture method of a piezoelectric ink jet head is characterized in that: comprise the following steps: at least
One substrate is provided;
Form a metal level on this substrate, wherein this metal level has one first and corresponding one second, and this substrate is positioned on this first of this metal level;
Remove this metal level of part, to form at least one groove, wherein this groove is depressed in this second of this metal level, and the degree of depth of this groove is slightly less than this metal layer thickness approximately;
Remove this substrate;
Form a lower electrode layer on this first of this metal level;
A piezoelectric layer that forms patterning is on this lower electrode layer, and wherein the position of this piezoelectric layer is to position that should groove;
A upper electrode layer that forms patterning is on this piezoelectric layer;
Dispose a spray nozzle sheet on this second of this metal level, wherein this spray nozzle sheet and this metal level constitute an inking chamber, and this spray nozzle sheet has at least one spray orifice, and this spray orifice communicates with this inking chamber.
44. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the material of this substrate comprise silicon, pottery and metal one of them.
45. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the formation method of this metal level comprises plating.
46. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the material of this metal level comprise nickel, copper, palladium one of them.
47. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the method that removes of this metal level of part comprises lithography.
48. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the formation method of this lower electrode layer comprises screen painting.
49. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the formation method of this lower electrode layer comprises plating.
50. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the material of this lower electrode layer comprises passive metal.
51. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the material of this lower electrode layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
52. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: after removing this substrate, also comprise forming a passivation layer on this first of this metal level.
53. the manufacture method according to the described piezoelectric ink jet head of claim 52 is characterized in that: the material of this passivation layer comprises passive metal.
54. the manufacture method according to the described piezoelectric ink jet head of claim 52 is characterized in that: the material of this passivation layer is to be selected from by gold, silver, copper, platinum, palladium, these alloy and these combination to be formed a kind of material in the group.
55. the manufacture method according to the described piezoelectric ink jet head of claim 52 is characterized in that: the material of this passivation layer comprises insulating materials.
56. the manufacture method according to the described piezoelectric ink jet head of claim 52 is characterized in that: the material of this passivation layer comprise silicon nitride, silica and tantalum oxide one of them.
57. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the formation method of this piezoelectric layer comprises screen painting.
58. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the material of this piezoelectric layer comprise plumbous titanium zirconium admixture and poly-difluoroethylene one of them.
59. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the formation method of this upper electrode layer comprises screen painting.
60. the manufacture method according to the described piezoelectric ink jet head of claim 43 is characterized in that: the material of this spray nozzle sheet comprise metal and polymer one of them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01131354 CN1408548A (en) | 2001-09-28 | 2001-09-28 | Piezoelectric ink jet printing head and its producing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01131354 CN1408548A (en) | 2001-09-28 | 2001-09-28 | Piezoelectric ink jet printing head and its producing method |
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| Publication Number | Publication Date |
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| CN1408548A true CN1408548A (en) | 2003-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 01131354 Pending CN1408548A (en) | 2001-09-28 | 2001-09-28 | Piezoelectric ink jet printing head and its producing method |
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| CN (1) | CN1408548A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1308147C (en) * | 2003-10-31 | 2007-04-04 | 飞赫科技股份有限公司 | Method for manufacturing ink-jet printing head |
| CN100336663C (en) * | 2003-10-31 | 2007-09-12 | 飞赫科技股份有限公司 | Piezoelectric ink-jet head and its manufacturing method |
| CN100376400C (en) * | 2003-12-16 | 2008-03-26 | 佳能株式会社 | Substrate for liquid discharge head, liquid discharge head using substrate for liquid discharge head and method of manufacturing the same |
| CN100376402C (en) * | 2003-07-15 | 2008-03-26 | 兄弟工业株式会社 | Liquid delivering apparatus and method of producing the same |
| CN103287102A (en) * | 2012-02-23 | 2013-09-11 | 珠海纳思达电子科技有限公司 | Ink-jet printer liquid nozzle |
| CN110265544A (en) * | 2019-06-24 | 2019-09-20 | 京东方科技集团股份有限公司 | Piezoelectric transducer and preparation method, the method and electronic equipment that carry out fingerprint recognition |
-
2001
- 2001-09-28 CN CN 01131354 patent/CN1408548A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100376402C (en) * | 2003-07-15 | 2008-03-26 | 兄弟工业株式会社 | Liquid delivering apparatus and method of producing the same |
| CN1308147C (en) * | 2003-10-31 | 2007-04-04 | 飞赫科技股份有限公司 | Method for manufacturing ink-jet printing head |
| CN100336663C (en) * | 2003-10-31 | 2007-09-12 | 飞赫科技股份有限公司 | Piezoelectric ink-jet head and its manufacturing method |
| CN100376400C (en) * | 2003-12-16 | 2008-03-26 | 佳能株式会社 | Substrate for liquid discharge head, liquid discharge head using substrate for liquid discharge head and method of manufacturing the same |
| CN103287102A (en) * | 2012-02-23 | 2013-09-11 | 珠海纳思达电子科技有限公司 | Ink-jet printer liquid nozzle |
| CN103287102B (en) * | 2012-02-23 | 2015-12-02 | 珠海赛纳打印科技股份有限公司 | ink-jet printer liquid nozzle |
| CN110265544A (en) * | 2019-06-24 | 2019-09-20 | 京东方科技集团股份有限公司 | Piezoelectric transducer and preparation method, the method and electronic equipment that carry out fingerprint recognition |
| US12016249B2 (en) | 2019-06-24 | 2024-06-18 | Boe Technology Group Co., Ltd. | Piezoelectric sensor and manufacturing method thereof, method for recognizing fingerprint, and electronic device |
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