CN1611361A - Piezoelectric ink-jet head and its manufacturing method - Google Patents
Piezoelectric ink-jet head and its manufacturing method Download PDFInfo
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- CN1611361A CN1611361A CN 200310103613 CN200310103613A CN1611361A CN 1611361 A CN1611361 A CN 1611361A CN 200310103613 CN200310103613 CN 200310103613 CN 200310103613 A CN200310103613 A CN 200310103613A CN 1611361 A CN1611361 A CN 1611361A
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Abstract
The present invention relates to a piezoelectric ink gun and its making method. It is characterized by that on the substrate material with groove a piezoelectric actuating structure is formed, and said making method includes the following steps: firstly, forming lower electrode layer in bottom portion of the groove of the substrate material, adopting screen printing mode to print piezoelectric layer on the surface of lower electrode layer, placing piezoelectric layer in said groove, then making upper electrode layer on the piezoelectric layer surface, so that it can utilize the groove structure design of substrate material to control the screen-printed piezoelectric layer pattern form and can utilize the groove structure to reduce the thickness of vibration board of piezoelectric actuating region so as to increase the piezoelectric actuating quantity.
Description
Technical field
The present invention relates to a kind of ink gun and manufacture method thereof, relate in particular to a kind of piezoelectric ink-jet head and manufacture method thereof.
Background technology
The major technique that is applied to the ink jet-print head of computer peripheral equipment at present is a piezoelectric ink jet seal head, and piezo-activator is to utilize piezoelectric ceramics because of applying the mechanism that voltage produces deformation, and extruding liquid produces high pressure and liquid is sprayed.Because piezoelectric ceramics has the advantages such as size that reaction speed is controlled drop soon and easily, can promote print speed and quality.
The piezo-activator production method of piezoelectric ink-jet head on the market is nothing more than being to utilize modes such as wire mark, strip, gel and electricity slurry deposition, wherein the strip technology is to use the scraper manufacturing process, the material that will have piezoelectric properties, by a certain percentage with hybrid modulation form slurry (Slurry) such as glass powder, organic binder (Binder), plasticiser (Plasticizer) and solvents, then this slurry is utilized scraper (Doctor Blade) evenly to spread upon on the carrier film, along with the volatilization of solvent, the piezoelectric powder is tightly packed and form to give birth to the embryo strip.Then through cutting, sintering and connect the piezo-activator that electrode just forms individual layer, bigger by the size of the made piezoelectric structure of strip technology, drive the difficult control of character order of accuarcy with higher voltage.
The fabrography cost is low and quite ripe, still outmatches thin film techniques such as sol-gal process (Sol-Gel) and electricity slurry deposition in the application of making on the piezoelectric ink-jet head at present.The wire mark manufacture method of piezoelectric ink-jet head is that upper electrode layer, piezoelectric layer and lower electrode layer are printed on the oscillating plate successively, and not only manufacture process is controlled easily, also can reach required piezoelectric layer thickness easily.As film-forming methods such as electricity slurry deposition or sol-gal processes, the piezoelectric membrane thickness that can reach is limited, with very small of the displacement of the piezo-activator of these manufacture method mades.Make displacement meet the requirement of piezoelectric ink-jet head, piezoelectric membrane thickness need reach tens of microns, utilizes film-forming method not meet economic benefit through piling up many times.
Though it is more favourable than other technology that fabrography is applied to piezoelectric ink-jet head, yet when making the piezoelectric structure of less live width, will be subjected to the restriction of factors such as wire mark board precision and web plate precision, cause the situation of wire mark size distortion easily with the wire mark manufacture method.The viscosity of conduction or piezoelectricity slurry control simultaneously also can influence the quality of printing, and then has changed the piezoelectric properties of piezoelectric structure.The oscillating plate thickness actuator displacement amount that deformation is caused for piezoelectric structure has relative relation in addition, when oscillating plate thickness is too thick, will make the actuator displacement quantity not sufficient, even can't reach the pressure that drop is sprayed, so that influence print quality, when but oscillating plate thickness was too thin, its structural strength was not enough again.Because market is more and more higher to the requirement of print quality and ink-jet resolution, how to improve the thickness of wire mark quality and suitable adjustment oscillating plate, become the important topic of current urgent need research.
Summary of the invention
Shortcoming in view of prior art, the invention provides a kind of piezoelectric ink-jet head and manufacture method thereof, control wire mark pattern form afterwards by the groove structure design of base material, and utilize groove structure to reduce the oscillating plate thickness in piezoelectric actuated zone, increase piezoelectric actuated amount.
The manufacture method of piezoelectric ink-jet head of the present invention, step includes: a base material is provided, and its upper surface has more than one groove; Bottom portion of groove at the base material upper surface forms lower electrode layer; At lower electrode layer surface printing piezoelectric layer, piezoelectric layer is contained in the groove with the screen painting mode; This piezoelectric layer of sinter molding; Form upper electrode layer in piezoelectric layer surface; At last, at the lower surface moulding China ink chamber and the spray nozzle sheet of base material, its black chamber and spray nozzle sheet are corresponding to the groove location of base material upper surface.Wherein electrode layer can be silver, silver and conductive materials such as palladium, gold or platinum, form through methods such as wire mark, strip, gel and electricity slurry depositions, piezoelectric layer then can be that the slurry that any piezoelectric is modulated forms through printing, as zinc oxide (ZnO), lead titanates (PbTiO
3) or lead zirconate titanate (Pb (ZrxTi
1-x) O
3, PZT) etc., the thickness of electrode layer and piezoelectric layer is adjusted according to different needs.Base material is intended for oscillating plate, and its material can be silicon wafer materials such as ceramic materials such as zirconia, aluminium oxide, silicon, silica, silicon nitride.In addition, in the above-mentioned steps, also comprise the step of attenuate base material, be that integral thickness with base material is ground to required size, because piezoelectric layer is to be contained in the groove, thereby the base material thickness of its piezoelectric layer below can effectively reduce and increases piezoelectric actuated amount, and does not influence whole structural strength.
Cooperate said method, the present invention also comprises a kind of piezo actuator, is as oscillating plate with base material, the base material upper surface has more than one groove, form lower electrode layer at its bottom portion of groove, then have piezoelectric layer on the lower electrode layer surface, piezoelectric layer surface is then piled up upper electrode layer.In addition again at the lower surface of base material in conjunction with black chamber and spray nozzle sheet, must notice that its black chamber and spray nozzle sheet correspondence in the groove location of base material upper surface, just form piezoelectric ink-jet head.
For purpose of the present invention, structural feature and function thereof are had further understanding, be described in detail as follows below in conjunction with accompanying drawing.
Description of drawings
Figure 1A to Fig. 1 F is the making schematic flow sheet of first embodiment of the invention;
Fig. 2 is the schematic diagram of second embodiment of the invention;
Fig. 3 is the cross-sectional view of application examples of the present invention.
The specific embodiment
Disclosed piezoelectric ink-jet head of the present invention and manufacture method thereof are to control wire mark pattern form afterwards by the groove structure design of base material, and cooperate the mode of screen painting to make the piezoelectric layer structure that printing once just can provide the piezoelectric layer adequate thickness.
Arrive Fig. 1 F with reference to Figure 1A successively, Figure 1A is the making schematic flow sheet of first embodiment of the invention to Fig. 1 F.
Shown in Figure 1A, at first, form more than one groove 110 at the upper surface of base material 100 with etching mode.Its etching mode can be dry-etching, electric paste etching or Wet-type etching etc.
Shown in Figure 1B, at the bottom deposit lower electrode layer 111 of groove 110.
Shown in Fig. 1 C, with the screen painting mode at lower electrode layer 111 surface printing piezoelectric layers 112, make piezoelectric layer 112 be contained in groove 110,, and carry out sintering and come moulding piezoelectric layer 112 because the capillary slurry of piezoelectric layer 112 that concerns can spread out stream formation arch form structure.Because the pattern form of piezoelectric layer 112 is decided by the groove 110 of base material 100, so only need utilize web plate aperture and web plate to the distance of base material to control the amount of piezoelectricity slurry, just can adjust the thickness of piezoelectric layer 112.
Shown in Fig. 1 D, form upper electrode layer 113 on piezoelectric layer 112 surfaces.Its upper electrode layer 113 can be silver, silver and conductive materials such as palladium, gold or platinum with lower electrode layer 111, forms by methods such as wire mark, strip, gel and electricity slurry depositions.
Shown in Fig. 1 E,, the integral thickness of base material 100 is ground to required size from base material 100 lower surface attenuate base materials 100 thickness.Through this step by base material 100 lower surface thickness thinnings, the base material thickness that comprises the below, piezoelectric actuated zone of upper electrode layer 113, piezoelectric layer 112 and lower electrode layer 111 will reduce and not influence the structural thickness of integral body, the integral thickness of base material 100 is about 525 microns to 550 microns, and the thickness at base material groove 110 places is about 5 to 50 microns.
Shown in Fig. 1 F, at last, form black chamber 120 and spray nozzle sheet 130 is combined into the piezoelectric ink jet header structure at the lower surface of base material 100, groove 110 positions that its black chamber 120 and spray nozzle sheet 130 need corresponding to base material 100 upper surfaces, the surface of groove 110 bottoms from bottom to top is followed successively by lower electrode layer 111, piezoelectric layer 112 and upper electrode layer 113.The mode that its black chamber 120 and spray nozzle sheet 130 can utilize thick film to pile up is made, or is produced on the base material 100 in direct etched mode.
As shown in Figure 2, it is the schematic diagram of second embodiment of the invention, after finishing the piezoelectric actuation structure that upper electrode layer 113, piezoelectric layer 112 and lower electrode layer 111 formed, directly carrying out etching in the appropriate location of base material 100 lower surfaces forms black chamber 120, and then combines with spray nozzle sheet 130 in addition.
In order to illustrate in greater detail the present invention, as shown in Figure 3, it is for the cross-sectional view of application examples of the present invention, it is structure of arrays for piezoelectric ink-jet head, its ink gun is made up of fluidic structures 200 and a plurality of piezo actuator, and fluidic structures 200 includes black chamber 220 and the spray nozzle sheet 230 with a plurality of spray orifices, and spray orifice is to be connected in black chamber 220 one by one, make fluid enter black chamber 220 and bestow pressure, flow out by spray orifice then by piezo actuator.The vibration base material 100 of piezo actuator combines with fluidic structures 200, and the fluid that flows into black chamber 220 is exerted pressure, and it is flowed out by spray orifice.Wherein, the vibration base material 100 of piezo actuator, its upper surface have more than one groove 110, form lower electrode layer 111 in groove 110 bottoms, then have piezoelectric layer 112 on lower electrode layer 111 surfaces, and then pile up on piezoelectric layer 112 surfaces upper electrode layer 113.In this application examples, each piezo-activator is the mechanical deformation that is produced by piezoelectric layer 112, and then promotion vibration base material 100 is exerted pressure to the fluid that flows into black chamber 220.
Though preferred embodiment of the present invention discloses as mentioned above; yet it is not to be used for limiting scope of the present invention; any those of ordinary skill in the art; without departing from the spirit and scope of the present invention; can do some suitable change and retouching, therefore scope of patent protection of the present invention should be as the criterion with the determined scope of claims.
The drawing reference numeral explanation
100 base materials
110 grooves
111 lower electrode layers
112 piezoelectric layers
113 upper electrode layers
120 black chambeies
130 spray nozzle sheets
200 fluidic structures
220 black chambeies
230 spray nozzle sheets
Claims (11)
1. the manufacture method of a piezoelectric ink-jet head is characterized in that, step includes:
One base material is provided, and the upper surface of described base material has more than one groove;
Form a lower electrode layer at described bottom portion of groove;
With the screen painting mode at described lower electrode layer surface printing one piezoelectric layer, in the described ccontainingly groove of piezoelectric layer;
The described piezoelectric layer of sinter molding;
Form a upper electrode layer in described piezoelectric layer surface; And
At the lower surface moulding one black chamber and a spray nozzle sheet of described base material, described black chamber and described spray nozzle sheet are corresponding to the groove location of described base material upper surface.
2. the manufacture method of piezoelectric ink-jet head as claimed in claim 1 is characterized in that, and is described with the step of screen painting mode at described lower electrode layer surface printing one piezoelectric layer, is to choose the slurry that a piezoelectric modulates to print described piezoelectric layer.
3. the manufacture method of piezoelectric ink-jet head as claimed in claim 2 is characterized in that, described piezoelectric is to be selected from zinc oxide (ZnO), lead titanates (PbTiO
3) and lead zirconate titanate (Pb (ZrxTi
1-x) O
3, PZT) one of them.
4. the manufacture method of piezoelectric ink-jet head as claimed in claim 1 is characterized in that, the thickness of described base material groove is about 5 to 50 microns.
5. the manufacture method of piezoelectric ink-jet head as claimed in claim 1 is characterized in that, described method also comprises the step of the described base material of an attenuate, is ground to required size with the thickness with described base material.
6. the manufacture method of piezoelectric ink-jet head as claimed in claim 1, it is characterized in that, in the lower surface moulding one black chamber of described base material and the step of a spray nozzle sheet, be to make described black chamber and described spray nozzle sheet and be combined in the lower surface of described base material with the thick film stack manner.
7. the manufacture method of piezoelectric ink-jet head as claimed in claim 1 is characterized in that, in the lower surface moulding one black chamber of described base material and the step of a spray nozzle sheet, is to make described black chamber and described spray nozzle sheet with etching mode at the lower surface of base material.
8. a piezoelectric ink-jet head is characterized in that, includes:
One piezo actuator comprises an oscillating plate, and described oscillating plate upper surface has more than one groove, has a lower electrode layer at described bottom portion of groove, then has a piezoelectric layer on described lower electrode layer surface, and then piling up in described piezoelectric layer surface has upper electrode layer;
One fluidic structures, it is the lower surface that is combined in described piezo actuator, described fluidic structures includes black chamber and an above spray orifice more than one, described black chamber and described spray nozzle sheet are corresponding to described groove location, spray orifice is connected in black chamber, and described black chamber is to be used for ccontaining fluid, and the oscillating plate of described piezo actuator is to combine with fluidic structures, the fluid that flows into black chamber is exerted pressure, fluid is flowed out by spray orifice.
9. the manufacture method of piezoelectric ink-jet head as claimed in claim 8 is characterized in that, and is described with the step of screen painting mode at described lower electrode layer surface printing one piezoelectric layer, chooses the slurry that a piezoelectric modulates and prints described piezoelectric layer.
10. the manufacture method of piezoelectric ink-jet head as claimed in claim 9 is characterized in that, described piezoelectric is to be selected from zinc oxide (ZnO), lead titanates (PbTiO
3) and lead zirconate titanate (Pb (ZrxTi
1-x) O
3, PZT) one of them.
11. the manufacture method of piezoelectric ink-jet head as claimed in claim 8 is characterized in that, the thickness of described base material groove is about 5 to 50 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310103613 CN1611361A (en) | 2003-10-31 | 2003-10-31 | Piezoelectric ink-jet head and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310103613 CN1611361A (en) | 2003-10-31 | 2003-10-31 | Piezoelectric ink-jet head and its manufacturing method |
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| CN1611361A true CN1611361A (en) | 2005-05-04 |
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| CN 200310103613 Pending CN1611361A (en) | 2003-10-31 | 2003-10-31 | Piezoelectric ink-jet head and its manufacturing method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7677707B2 (en) | 2006-02-17 | 2010-03-16 | Samsung Electro-Mechanics Co., Ltd. | Method of forming thick layer by screen printing and method of forming piezoelectric actuator of inkjet head |
| US20130257219A1 (en) * | 2012-04-02 | 2013-10-03 | Stmicroelectronics (Crolles 2) Sas | Energy harvesting device |
| WO2015039506A1 (en) * | 2013-09-17 | 2015-03-26 | 大连理工大学 | Method for manufacturing ink jet head and ink jet head |
| CN110642219A (en) * | 2019-09-18 | 2020-01-03 | 西安交通大学 | Beam film type PZT thin film piezoelectric array printing head and manufacturing method thereof |
-
2003
- 2003-10-31 CN CN 200310103613 patent/CN1611361A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7677707B2 (en) | 2006-02-17 | 2010-03-16 | Samsung Electro-Mechanics Co., Ltd. | Method of forming thick layer by screen printing and method of forming piezoelectric actuator of inkjet head |
| CN101024353B (en) * | 2006-02-17 | 2010-09-01 | 三星电机株式会社 | Method of forming piezoelectric actuator of inkjet head |
| US20130257219A1 (en) * | 2012-04-02 | 2013-10-03 | Stmicroelectronics (Crolles 2) Sas | Energy harvesting device |
| US9276503B2 (en) * | 2012-04-02 | 2016-03-01 | Stmicroelectronics (Crolles 2) Sas | Energy harvesting device |
| WO2015039506A1 (en) * | 2013-09-17 | 2015-03-26 | 大连理工大学 | Method for manufacturing ink jet head and ink jet head |
| US9776406B2 (en) | 2013-09-17 | 2017-10-03 | Dalian University Of Technology | Method for manufacturing ink jet head |
| CN110642219A (en) * | 2019-09-18 | 2020-01-03 | 西安交通大学 | Beam film type PZT thin film piezoelectric array printing head and manufacturing method thereof |
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