A7 B7 1231272_/〇〇8 五、發明說明（丨） 本發明是關於一種壓電噴墨頭的製造方法，特別是關 於一種利用曝光顯影技術來製作壓電噴墨頭之墨腔與噴嘴 的方法。 傳統噴墨列印技術之主要運作原理分爲兩類：熱泡式 (Thermal bubble)噴墨列印技術及壓電式(piezoelectric)噴墨 列印技術。熱泡式噴墨列印技術乃利用加熱器將墨水瞬間 氣化，產生高壓氣泡推動墨水由噴嘴射出；此型由於製造 成本低，業己由HP及CANON成功地商業化，產生世界 上非常大的噴墨印表機市埸；但由於其高溫氣化之運作原 理使得適用墨水（主要是水系溶劑）之選擇性低，因而衍伸 之應用領域有限。 經濟部智慧財產局員工消費合作社印製 壓電式噴墨列印技術係利用壓電致動片因施加電壓產 生形變’擠壓液體產生高壓而將液體噴出。相對於熱泡式 噴墨列印技術，壓電式噴墨列印技術具有下列優點：壓電 式噴墨列印技術之墨水不會因爲高溫氣化產生化學變化， 影響顏色品質之狀況；且由於不需使用反覆高熱應力，故 具有極佳的耐久性。壓電式噴墨列印技術所使用之壓電陶 瓷反應速度快，可提升列印速度，而熱泡式噴墨列印技術 則會受到熱傳導速度之限制。壓電式噴墨列印技術容易控 制液滴之大小，可提升列印品質。 第1A圖爲習知一個傳統壓電式噴墨頭之側面結構 圖。傳統壓電噴墨頭的製造流程是利用陶瓷厚膜(thick film) 製程形成具有上電極層11a、壓電致動片層12a、下電極 層Ub和上壁保護層12b(ceramic)的壓電致動片 3 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公》) _ A7 B7 1231272 6395twf.doc/008 五、發明說明（>) (actuator)、墨腔壁13、與墨腔底膜14等陶瓷厚膜生胚（green tape)，再依照一定順序將不同層的陶瓷厚膜生胚壓合黏著 在一起之後進行陶瓷結構燒結。例如EPSON公司所生產 之壓電式噴墨頭。 第1B圖爲該傳統壓電式噴墨頭之俯視結構圖。該圖 §兌明一種傳統噴墨頭之透明俯視圖，其中墨水腔17爲唷 墨頭之墨水儲存區，其儲存了自進墨口 15吸取至墨水腔π 之墨水，墨水腔17中之墨水可以藉由壓電致動片層之變 形，將墨水由出墨口 16噴出。 在上述方法中，由於噴墨頭製程中所有的元件結構均 利用陶瓷厚膜製程分別製造完成之後，再進行對位壓合黏 結。由於噴墨頭的尺寸相當小，要求的精密度非常高，因 此這種對位壓合組裝非常不容易，致使不良率提升，並增 加製程時間和製造成本。 而且在對位壓合組裝完畢之後必須進行陶瓷結構的燒 結，由於噴墨頭的結構複雜，在燒結的時候往往會因爲陶 瓷收縮不均勻而造成應力破壞，因此產品的良率很低。 本發明的目的是提供一種直接對位成形的方法來取代 上述利用陶瓷厚I吴壓合黏結的方法，並去除上述陶瓷結構 燒結的步驟。以解決組裝不易及燒結所造成的應力破壞問 題，使得產品良率提升，簡化製程並降低製作成本。 根據本發明之上述目的，提出一種壓電噴墨頭之製 程，首先提供在基底上形成多個金屬上電極。接著於基底 與金屬上電極之上形成壓電致動片層，然後於壓電致動片 4 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） II訂·！丨丨丨丨-* (請先閱讀背面之注意事項、寫本頁) 丨f—»1裝 爭項再填寫太 經濟部智慧財產局員工消費合作社印製 1231272 6395twf.doc/008 五、發明說明（i) 層上形成金屬下電極。接著，形成第一感光性高分子膜於 具有上下電極層的壓電致動片層之上，並定義出墨腔壁圖 案，而形成多個墨腔壁。最後，形成第二感光性高分子膜 於墨腔壁之上，並定義出多個進出墨口圖案，而形成墨腔 底膜，以製得一體成形之壓電噴墨頭，而達到提升成品的 良率、降低製程之時間與製作成本之目的。 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂，下文特舉一較佳實施例，並配合所附圖式，作詳 細說明如下： 圖式之簡單說明 第1A圖繪示一種傳統壓電式噴墨頭之側面結構示意 圖。 第1B圖繪示一種傳統壓電式噴墨頭之俯視結構示意 圖。 第2圖至第6圖繪示一種依照本發明之一較佳實施例 的壓電噴墨頭之製程結構示意圖。 經濟部智慧財產局員工消費合作社印製 第7圖繪示一種依照本發明之一較佳實施例的壓電噴 墨頭之俯視結構示意圖 圖式之標記說明 11a，21a :上電極 11 b、21 b :下電極 12a、22a :壓電致動片層 12b :上壁保護層 13，23 :墨腔壁 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) 1231272 五、發明說明（4 ) 14，24 :墨腔底膜 15，25 :進墨口 16，26 :出墨口 17，27 :墨水腔 28 :進出墨口 20 :基底 實施例 第2圖至第6圖繪示一種依照本發明之一較佳實施例 的壓電噴墨頭之製程結構圖。參照第2圖所示，首先’提 供基底20(如矽晶片或陶瓷片），再於所提供的基底20上’ 利用網版印刷的方式，形成多個上電極21a(參照第3圖所 示）。其中上電極21a之材質包括銅（Cu)、金（Au)、銀 (Ag)、鉑（Pt)、鈀（Pd)、其合金或其他導電材料’又’ 上電極21a之形狀、數量與尺寸皆視所欲形成之噴墨頭需 求而有所變化。 另外也可以利用物理氣相沈積法（Physical Vapor Deposition)化學氣相沈積法或化學鍍膜方式，其中物理 氣相沈積法包括濺鍍（Sputter)或蒸鍍（Evaporator)，而 經濟部智慧財產局員工消費合作社印製 化學鍍膜方式包括電鏟或無電鍍。在所提供的基底20上， 形成一層金屬層（該金屬層材質包括銅、金、銀、舶或鈀） 並移除部分金屬層以形成多個上電極21a (參照第3圖所 示），又，上電極21a之形狀、數量與尺寸皆視所欲形成 之噴墨頭需求而有所變化。 接著，參照第4圖所示，在基底20與上電極21a之 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1231272 A7 B7 6395twf.doc/008 五、發明說明（ο 上，形成壓電致動片層22。壓電致動片層22的形成方式 包括利用傳統薄膜旋塗法、網版印刷或括刀成形（Doctor Blading) ’又壓電致動片層22之材質包括陶瓷壓電材料或 壓電高分子。其中壓電高分子包括聚二氟乙烯 (Poly(Vinylidene Fluoride)，PVDF )。陶瓷壓電材料包 括鉛銷鈦摻合物(lead zirconate titanate j PZT) ° 於壓電致動片層22上，利用與上電極21a相同之形 成方式，形成多個下電極21b(參照第3圖所示），下電極21b 之材質包括銅、金、銀、鉛、鈀、其合金或其他導電材料， 下電極21b的形狀、數量與尺寸可與上電極21a的形狀、 數量與尺寸相對應或不同。 接著’參照第5圖所示，形成第一感光性高分子於壓 電致動片層22與下電極21b之上，之後利用曝光顯影的 方式，在第一感光性高分子中形成具多個墨水腔之墨腔壁 23。其中第一感光性高分子膜在曝光前之厚度包括l〇//m 至1000//m左右。每一個墨水腔圖案均爲一個墨水腔27， 每個墨水腔27之底部分別圍繞著一個下電極21b、一個上 電極21a及部分壓電致動片層22，墨水腔27之四周邊壁 爲部份墨腔壁23所構成。 經濟部智慧財產局員工消費合作社印製 接著’參照第6圖所示，形成第二感光性高分子薄膜 於墨腔壁23之上，之後利用曝光顯影的方式或是雷射加 工的方式，於第二感光性高分子薄膜上形成具有多個進墨 口 25和多個出墨口 26之墨腔底膜24。其中每一個進墨口 25之口徑範圍包括50//m至1000//m左右，而每一個出 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐) 1231272 A7 6395twf.doc/008 ___________B7______ 五、發明說明（6) 墨口 26之口徑範圍則包括10# m至100//m左右。 最後，參照第7圖所示，其繪示本發明之一較佳實施 例的壓電噴墨頭之俯視結構示意圖。每一個墨水腔27之 頂部均由包括有一個進墨口 25與一個出墨口 26之部份墨 腔底膜24所構成。 另外在本發明中所使用之感光性高分子膜之材質包括 乾膜光阻、液態光阻、正光阻、負光阻、感光性之聚醯亞 胺（Polyimide)或感光性之環氧樹脂（Epoxy)。其中乾膜 光阻包括有一層保護膜、10// m至200/z m之感光性高分 子層與一層底膜。使用時，先去除底膜後，再將乾膜光阻 之具有感光性高分子層之一側貼附於基底30或墨腔底膜 24之上。之後，利用一 UV光進行曝光後剝除保護膜，並 顯影形成所需的圖案，而完成感光性高分子膜之製備。 另外液態光阻爲具有「可流動性」之液態感光性高分 子劑，利用塗佈方式形成於基底30或墨腔底膜24之上， 之後利用一 UV光源進行顯影並顯影形成所需圖案，完成 感光性高分子膜之製備。 經濟部智慧財產局員工消費合作社印製 由上述本發明較佳實施例可知，本發明具有以下之特 徵：在完成壓電致動片層製備後，墨腔壁、墨腔底膜等製 程都可以利用感光性高分子以曝光顯影的方式逐一製得一 體成形之噴墨頭，其製程時間將比傳統之製程時間迅速， 且所使用之設備成本與人力成本將會明顯的降低，而成品 的良率亦能有所提升。 雖然本發明已以一較佳實施例揭露如上，然其並非用 8 本紙張尺度適用中國國家標準（CNS)A4規格（21G X 297公釐) ' 一 1231272 A7 6395tWf-d〇C/〇Q8_E_ 五、發明說明) 以限定本發明，任何熟習此技藝者，在不脫離本發明之精 神和範圍內，當可作各種之更動與潤飾。 經濟部智慧財產局員工消費合作社印製 π裝--------訂---------. (請先閱讀背面之注意事項寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）A7 B7 1231272_ / 〇〇8 V. Description of the invention (丨) The present invention relates to a method for manufacturing a piezoelectric inkjet head, in particular to a method for manufacturing an ink cavity and a nozzle of a piezoelectric inkjet head by using exposure and development technology. . The main operating principles of traditional inkjet printing technology are divided into two categories: thermal bubble inkjet printing technology and piezoelectric inkjet printing technology. Thermal bubble inkjet printing technology uses a heater to instantaneously vaporize the ink, generating high-pressure bubbles to push the ink out of the nozzle; this type has been successfully commercialized by HP and CANON due to its low manufacturing cost, resulting in a very large world Of inkjet printers; however, due to its high temperature gasification operation principle, the selectivity of applicable inks (mainly water-based solvents) is low, so its application fields are limited. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economics Piezoelectric inkjet printing technology uses a piezoelectric actuator to deform the applied voltage to produce a deformation 'that squeezes the liquid to generate high pressure and eject the liquid. Compared with the thermal bubble inkjet printing technology, the piezoelectric inkjet printing technology has the following advantages: the ink of the piezoelectric inkjet printing technology does not cause chemical changes due to high temperature gasification and affect the color quality; and Because it does not need to use repeated high thermal stress, it has excellent durability. Piezoelectric ceramics used in piezoelectric inkjet printing technology have fast response speeds, which can increase printing speed, while thermal bubble inkjet printing technology is limited by the speed of heat conduction. Piezo inkjet printing technology is easy to control the droplet size, which can improve the printing quality. Fig. 1A is a side structural view of a conventional piezoelectric inkjet head. The manufacturing process of a conventional piezoelectric inkjet head is to form a piezoelectric film having an upper electrode layer 11a, a piezoelectric actuation sheet layer 12a, a lower electrode layer Ub, and an upper wall protective layer 12b (ceramic) using a ceramic thick film process. Actuator 3 ^ Paper size applies Chinese National Standard (CNS) A4 specification (210 X 297) "_ A7 B7 1231272 6395twf.doc / 008 V. Description of the invention (actuator), ink chamber wall 13, and The ceramic thick film green tape such as the ink chamber bottom film 14 is then pressed and adhered to the ceramic thick film green embryos of different layers according to a certain sequence, and then the ceramic structure is sintered. For example, a piezoelectric inkjet head manufactured by EPSON. FIG. 1B is a top structural view of the conventional piezoelectric inkjet head. The figure § shows the transparent top view of a conventional inkjet head, in which the ink chamber 17 is an ink storage area of the inkjet head, which stores the ink sucked from the ink inlet 15 to the ink chamber π, and the ink in the ink chamber 17 can be The ink is ejected from the ink outlet 16 by the deformation of the piezoelectrically actuated sheet. In the above method, since all the element structures in the inkjet head manufacturing process are separately manufactured by the ceramic thick film manufacturing process, the alignment compression bonding is performed. Because the size of the inkjet head is relatively small, the required precision is very high, so this kind of alignment press-fit assembly is very difficult, which leads to an increase in the defective rate, and increases the process time and manufacturing cost. Moreover, the ceramic structure must be sintered after the alignment and compression assembly is completed. Due to the complicated structure of the inkjet head, stress failure is often caused by uneven shrinkage of the ceramic during sintering, so the yield of the product is very low. An object of the present invention is to provide a method of direct alignment forming instead of the above-mentioned method of using ceramic thick I and Wu pressure bonding and removing the step of sintering the above-mentioned ceramic structure. In order to solve the problem of stress damage caused by difficult assembly and sintering, the product yield is improved, the manufacturing process is simplified, and the manufacturing cost is reduced. According to the above object of the present invention, a process of a piezoelectric inkjet head is proposed. First, a plurality of metal upper electrodes are formed on a substrate. Next, a piezoelectric actuating sheet is formed on the substrate and the upper metal electrode, and then on the piezoelectric actuating sheet. 4 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) II. Order!丨 丨 丨 丨-* (Please read the notes on the back and write this page first) 丨 f— »1 Fill in the content and then fill it out Printed by the Intellectual Property Bureau Employee Consumption Cooperative of the Ministry of Economic Affairs 1231272 6395twf.doc / 008 5. Description of the invention (I) A metal lower electrode is formed on the layer. Next, a first photosensitive polymer film is formed on the piezoelectric actuation sheet layer having upper and lower electrode layers, and an ink chamber wall pattern is defined to form a plurality of ink chamber walls. Finally, a second photosensitive polymer film is formed on the wall of the ink chamber, and a plurality of ink inlet and outlet patterns are defined to form a bottom film of the ink chamber, so as to obtain an integrally formed piezoelectric inkjet head, thereby improving the finished product. The purpose is to reduce the yield of the process, reduce the time and cost of the process. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below in conjunction with the accompanying drawings for detailed description as follows: Brief Description of the Drawings Figure 1A A schematic side view of a conventional piezoelectric inkjet head is shown. FIG. 1B is a schematic plan view of a conventional piezoelectric inkjet head. FIG. 2 to FIG. 6 are schematic diagrams showing a process structure of a piezoelectric inkjet head according to a preferred embodiment of the present invention. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 7 shows a schematic plan view of a piezoelectric inkjet head according to a preferred embodiment of the present invention. Marking description of the diagrams 11a, 21a: upper electrodes 11 b, 21 b: Lower electrodes 12a, 22a: Piezoelectric actuating sheet layer 12b: Upper wall protective layer 13, 23: Ink cavity wall 5 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 1231272 V. Description of the Invention (4) 14, 24: Ink chamber bottom film 15, 25: Ink inlet port 16, 26: Ink outlet port 17, 27: Ink chamber 28: In and out port 20: Base embodiment 2 to 6 A process structure diagram of a piezoelectric inkjet head according to a preferred embodiment of the present invention is shown. Referring to FIG. 2, first “provide a substrate 20 (such as a silicon wafer or a ceramic wafer), and then on the provided substrate 20” to form a plurality of upper electrodes 21 a by screen printing (refer to FIG. 3). ). The material of the upper electrode 21a includes copper (Cu), gold (Au), silver (Ag), platinum (Pt), palladium (Pd), its alloy, or other conductive materials. The shape, quantity, and size of the upper electrode 21a It all changes depending on the needs of the inkjet heads to be formed. In addition, physical vapor deposition (Physical Vapor Deposition) chemical vapor deposition or chemical plating can also be used. The physical vapor deposition method includes sputtering or evaporation, and employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer cooperatives print chemical coatings including electric shovel or electroless plating. Forming a metal layer (the material of the metal layer includes copper, gold, silver, copper or palladium) on the provided substrate 20 and removing a part of the metal layer to form a plurality of upper electrodes 21a (see FIG. 3), In addition, the shape, number, and size of the upper electrodes 21a may vary depending on the requirements of the inkjet head to be formed. Next, referring to Figure 4, the paper size of the substrate 20 and the upper electrode 21a-6 is in accordance with the Chinese National Standard (CNS) A4 (210 X 297 mm) 1231272 A7 B7 6395twf.doc / 008 5. Description of the invention ( ο, the piezoelectric actuation sheet layer 22 is formed. The formation method of the piezoelectric actuation sheet layer 22 includes the use of a conventional thin film spin coating method, screen printing, or doctor blading ('Doctor Blading)' and the piezoelectric actuation sheet layer 22 The material includes ceramic piezoelectric material or piezoelectric polymer. The piezoelectric polymer includes Poly (Vinylidene Fluoride), PVDF. The ceramic piezoelectric material includes lead zirconate titanate j PZT. ) ° On the piezoelectric actuation sheet layer 22, a plurality of lower electrodes 21b are formed in the same manner as the upper electrode 21a (see FIG. 3). The material of the lower electrode 21b includes copper, gold, silver, and lead. , Palladium, its alloy, or other conductive materials, the shape, number, and size of the lower electrode 21b may correspond to or differ from the shape, number, and size of the upper electrode 21a. Then, referring to FIG. 5, a first photosensitivity is formed. The molecules in the piezoelectrically actuated sheet 22 and Above the electrode 21b, an ink chamber wall 23 having a plurality of ink chambers is formed in the first photosensitive polymer by way of exposure and development. The thickness of the first photosensitive polymer film before exposure includes 10 // m to about 1000 // m. Each ink chamber pattern is an ink chamber 27, and the bottom of each ink chamber 27 surrounds a lower electrode 21b, an upper electrode 21a, and a part of the piezoelectric actuation sheet layer 22, respectively. The four peripheral walls of the cavity 27 are formed by part of the ink cavity wall 23. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and then 'refer to FIG. 6', a second photosensitive polymer film is formed on the ink cavity wall 23. Then, an ink cavity bottom film 24 having a plurality of ink inlet ports 25 and a plurality of ink outlet ports 26 is formed on the second photosensitive polymer film by using an exposure development method or a laser processing method. The caliber range of the ink port 25 includes about 50 // m to 1000 // m, and each of the 7 paper sizes applies to the Chinese National Standard (CNS) A4 (210 x 297 mm) 1231272 A7 6395twf.doc / 008 ___________B7______ V. Description of the Invention (6) Mokou 26 The caliber range includes about 10 # m to 100 // m. Finally, referring to FIG. 7, it shows a schematic plan view of a piezoelectric inkjet head according to a preferred embodiment of the present invention. Each ink chamber 27 The top part is composed of a part of the ink chamber bottom film 24 including an ink inlet 25 and an ink outlet 26. In addition, the materials of the photosensitive polymer film used in the present invention include dry film photoresist and liquid Photoresist, positive photoresist, negative photoresist, photosensitive polyimide or photosensitive epoxy. The dry film photoresist includes a protective film, a photosensitive polymer layer of 10 // m to 200 / z m, and a base film. In use, after removing the base film, one side of the photosensitive polymer layer of the dry film photoresist is attached to the base 30 or the ink chamber base film 24. After that, the protective film is peeled off after exposure with a UV light, and developed to form a desired pattern to complete the preparation of the photosensitive polymer film. In addition, the liquid photoresist is a liquid photosensitive polymer agent having "flowability", which is formed on the substrate 30 or the ink chamber bottom film 24 by a coating method, and then developed by a UV light source and developed to form a desired pattern. The preparation of the photosensitive polymer film is completed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs According to the above-mentioned preferred embodiments of the present invention, it can be known that the present invention has the following characteristics: After the piezoelectric actuated sheet is prepared, the ink cavity wall, ink cavity bottom film, and other processes can Using the photosensitive polymer to make one-piece inkjet heads one by one by exposure and development, the process time will be faster than the traditional process time, and the cost of equipment and labor will be significantly reduced. The rate can also be improved. Although the present invention has been disclosed as above with a preferred embodiment, it does not use 8 paper sizes to apply the Chinese National Standard (CNS) A4 specification (21G X 297 mm) ′ -1231272 A7 6395tWf-d〇C / 〇Q8_E_ 5 (Explanation of the invention) To limit the present invention, anyone skilled in the art can make various modifications and retouches without departing from the spirit and scope of the present invention. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -------- Order ---------. (Please read the precautions on the back to write this page) This paper size applies to Chinese national standards (CNS) A4 size (210 X 297 mm)