CN1364339A - 谐振器结构和包括这种谐振器结构的滤波器 - Google Patents
谐振器结构和包括这种谐振器结构的滤波器 Download PDFInfo
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- CN1364339A CN1364339A CN00810575.8A CN00810575A CN1364339A CN 1364339 A CN1364339 A CN 1364339A CN 00810575 A CN00810575 A CN 00810575A CN 1364339 A CN1364339 A CN 1364339A
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
谐振器结构的区域 | 色散类型 | 设计规则 |
区域1 | I | ωc1>ωc3 |
区域1 | II | ωc1<ωc3 |
区域2 | I | ωc2<ωc3 |
区域2 | II | ωc2>ωc3 |
图中的部分截面 | 8a | 8b | 8c | 8d | 8e | 8f | |
区域1中的色散 | I | I | II | II | I | II | |
区域2中的色散 | I | II | I | II | II | I | |
区域3中的色散 | I | I | I | I | I | I | |
区域1中的α | 10-8 | 10-8 | 10-8 | 10-8 | 10-8 | 10-8 | s2/m2rad2 |
区域2中的α | 10-8 | 10-8 | 10-8 | 10-8 | 10-8 | 10-8 | s2/m2rad2 |
区域3中的α | 10-8 | 10-8 | 10-8 | 10-8 | 10-8 | 10-8 | s2/m2rad2 |
ωC,1 | 6.05 | 6.05 | 5.95 | 5.95 | 6.03 | 5.93 | 109rad/s |
ωC,2 | 5.93 | 6.03 | 5.93 | 6.03 | 6.05 | 5.95 | 109rad/s |
ωC,3 | 6.00 | 6.00 | 6.00 | 6.00 | 6.00 | 6.00 | 109rad/s |
k1 | j77621 | j77621 | j77298 | j77298 | j60075 | j91384 | 1/m |
k2 | 91384 | 60075 | 91384 | 60075 | 77621 | 77298 | 1/m |
k3 | 0 | 0 | 0 | 0 | 0 | 0 | 1/m |
W2(n=0) | 7.7 | 15.2 | 7.7 | 15.2 | 8.5 | 11.2 | μm |
W2(n=1) | 42.1 | 67.5 | 42.1 | 67.4 | 49.0 | 51.9 | μm |
区域 | 1 | 2 | 3 | 4 | 5 |
顶部电极Al(nm) | 0 | 500 | 400 | 500 | 0 |
压电层ZnO(nm) | 2200 | 2200 | 2200 | 2200 | 2200 |
底部电极Mo(nm) | 400 | 400 | 400 | 400 | 400 |
承托层SiO2(nm) | 500 | 500 | 500 | 500 | 500 |
区域宽度(μm) | 40 | 4.29 | 250 | 4.29 | 40 |
截止频率fc(MHz) | 1059.94 | 973.48 | 990.90 | 973.48 | 1059.94 |
电极 | 无 | 有 | 无 | 有 | 无 |
Q值 | 1000 | 1000 | 1000 | 1000 | 1000 |
Claims (35)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI991619A FI107660B (fi) | 1999-07-19 | 1999-07-19 | Resonaattorirakenne |
FI991619 | 1999-07-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1364339A true CN1364339A (zh) | 2002-08-14 |
CN1183669C CN1183669C (zh) | 2005-01-05 |
Family
ID=8555088
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00810575.8A Expired - Lifetime CN1183669C (zh) | 1999-07-19 | 2000-06-29 | 谐振器结构和包括这种谐振器结构的滤波器 |
CN00810665.7A Expired - Lifetime CN1201486C (zh) | 1999-07-19 | 2000-07-18 | 谐振器结构和具有这样的谐振器结构的滤波器 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00810665.7A Expired - Lifetime CN1201486C (zh) | 1999-07-19 | 2000-07-18 | 谐振器结构和具有这样的谐振器结构的滤波器 |
Country Status (8)
Country | Link |
---|---|
US (2) | US6812619B1 (zh) |
EP (3) | EP2782250A1 (zh) |
JP (2) | JP3735777B2 (zh) |
CN (2) | CN1183669C (zh) |
AU (2) | AU5687800A (zh) |
DE (1) | DE60042486D1 (zh) |
FI (1) | FI107660B (zh) |
WO (2) | WO2001006647A1 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102223142A (zh) * | 2011-08-13 | 2011-10-19 | 张�浩 | 声波谐振器 |
US8487719B2 (en) | 2008-04-29 | 2013-07-16 | Triquint Semiconductor, Inc. | Bulk acoustic wave resonator |
CN107592090A (zh) * | 2016-07-07 | 2018-01-16 | 三星电机株式会社 | 声波谐振器及其制造方法 |
WO2019141073A1 (zh) * | 2018-01-19 | 2019-07-25 | 武汉衍熙微器件有限公司 | 一种薄膜体声波谐振器 |
US10720900B2 (en) | 2016-07-07 | 2020-07-21 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method |
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- 2000-06-29 CN CN00810575.8A patent/CN1183669C/zh not_active Expired - Lifetime
- 2000-06-29 EP EP14167275.8A patent/EP2782250A1/en not_active Withdrawn
- 2000-06-29 US US10/031,579 patent/US6812619B1/en not_active Expired - Lifetime
- 2000-06-29 EP EP00942161.1A patent/EP1196990B1/en not_active Expired - Lifetime
- 2000-06-29 WO PCT/FI2000/000591 patent/WO2001006647A1/en active Application Filing
- 2000-07-18 DE DE60042486T patent/DE60042486D1/de not_active Expired - Lifetime
- 2000-07-18 EP EP00949512A patent/EP1196989B1/en not_active Expired - Lifetime
- 2000-07-18 JP JP2001510982A patent/JP3740061B2/ja not_active Expired - Lifetime
- 2000-07-18 US US10/031,533 patent/US6788170B1/en not_active Expired - Lifetime
- 2000-07-18 WO PCT/FI2000/000652 patent/WO2001006646A1/en active Search and Examination
- 2000-07-18 CN CN00810665.7A patent/CN1201486C/zh not_active Expired - Lifetime
- 2000-07-18 AU AU62844/00A patent/AU6284400A/en not_active Abandoned
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8487719B2 (en) | 2008-04-29 | 2013-07-16 | Triquint Semiconductor, Inc. | Bulk acoustic wave resonator |
CN102223142A (zh) * | 2011-08-13 | 2011-10-19 | 张�浩 | 声波谐振器 |
CN102223142B (zh) * | 2011-08-13 | 2019-09-10 | 张�浩 | 声波谐振器 |
CN107592090A (zh) * | 2016-07-07 | 2018-01-16 | 三星电机株式会社 | 声波谐振器及其制造方法 |
US10720900B2 (en) | 2016-07-07 | 2020-07-21 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method |
CN107592090B (zh) * | 2016-07-07 | 2020-12-29 | 三星电机株式会社 | 声波谐振器及其制造方法 |
WO2019141073A1 (zh) * | 2018-01-19 | 2019-07-25 | 武汉衍熙微器件有限公司 | 一种薄膜体声波谐振器 |
US11539340B2 (en) | 2018-01-19 | 2022-12-27 | Wuhan Yanxi Micro Components Co., Ltd. | Film bulk acoustic resonator |
Also Published As
Publication number | Publication date |
---|---|
WO2001006647A1 (en) | 2001-01-25 |
DE60042486D1 (de) | 2009-08-13 |
JP3740061B2 (ja) | 2006-01-25 |
WO2001006646A1 (en) | 2001-01-25 |
US6812619B1 (en) | 2004-11-02 |
EP1196990A1 (en) | 2002-04-17 |
JP2003505905A (ja) | 2003-02-12 |
EP2782250A1 (en) | 2014-09-24 |
US6788170B1 (en) | 2004-09-07 |
CN1183669C (zh) | 2005-01-05 |
FI107660B (fi) | 2001-09-14 |
CN1201486C (zh) | 2005-05-11 |
EP1196990B1 (en) | 2014-09-10 |
EP1196989B1 (en) | 2009-07-01 |
EP1196989A1 (en) | 2002-04-17 |
JP3735777B2 (ja) | 2006-01-18 |
AU5687800A (en) | 2001-02-05 |
JP2003505906A (ja) | 2003-02-12 |
FI991619A (fi) | 2001-01-20 |
AU6284400A (en) | 2001-02-05 |
CN1361939A (zh) | 2002-07-31 |
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