CN1271682C - 具有不同厚度栅极绝缘膜的半导体器件的制造方法 - Google Patents
具有不同厚度栅极绝缘膜的半导体器件的制造方法 Download PDFInfo
- Publication number
- CN1271682C CN1271682C CNB031553680A CN03155368A CN1271682C CN 1271682 C CN1271682 C CN 1271682C CN B031553680 A CNB031553680 A CN B031553680A CN 03155368 A CN03155368 A CN 03155368A CN 1271682 C CN1271682 C CN 1271682C
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- China
- Prior art keywords
- film
- oxide film
- thickness
- gate insulating
- natural oxide
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 229910052710 silicon Inorganic materials 0.000 claims description 32
- 239000010703 silicon Substances 0.000 claims description 32
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- 230000002411 adverse Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
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- 238000005121 nitriding Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823462—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/981—Utilizing varying dielectric thickness
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Formation Of Insulating Films (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP249205/2002 | 2002-08-28 | ||
JP2002249205A JP2004087960A (ja) | 2002-08-28 | 2002-08-28 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1494113A CN1494113A (zh) | 2004-05-05 |
CN1271682C true CN1271682C (zh) | 2006-08-23 |
Family
ID=32056390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031553680A Expired - Fee Related CN1271682C (zh) | 2002-08-28 | 2003-08-28 | 具有不同厚度栅极绝缘膜的半导体器件的制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6953727B2 (zh) |
JP (1) | JP2004087960A (zh) |
KR (1) | KR100908784B1 (zh) |
CN (1) | CN1271682C (zh) |
TW (1) | TWI223846B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103270580A (zh) * | 2010-12-16 | 2013-08-28 | 信越半导体股份有限公司 | 半导体晶片的洗净方法 |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7358198B2 (en) * | 2002-03-08 | 2008-04-15 | Kabushiki Kaisha Toshiba | Semiconductor device and method for fabricating same |
KR100442885B1 (ko) * | 2002-11-01 | 2004-08-02 | 삼성전자주식회사 | 반도체 소자의 다중 두께 게이트 유전층 제조 방법 |
US7273794B2 (en) | 2003-12-11 | 2007-09-25 | International Business Machines Corporation | Shallow trench isolation fill by liquid phase deposition of SiO2 |
US7084035B2 (en) * | 2004-04-13 | 2006-08-01 | Ricoh Company, Ltd. | Semiconductor device placing high, medium, and low voltage transistors on the same substrate |
US7323423B2 (en) * | 2004-06-30 | 2008-01-29 | Intel Corporation | Forming high-k dielectric layers on smooth substrates |
JP2006024605A (ja) * | 2004-07-06 | 2006-01-26 | Sanyo Electric Co Ltd | 半導体集積回路装置の製造方法 |
US7126172B2 (en) * | 2004-10-12 | 2006-10-24 | Freescale Semiconductor, Inc. | Integration of multiple gate dielectrics by surface protection |
JP2008166526A (ja) * | 2006-12-28 | 2008-07-17 | Spansion Llc | 半導体装置の製造方法 |
JP2008258349A (ja) * | 2007-04-04 | 2008-10-23 | Nec Electronics Corp | 半導体装置の製造方法 |
JP4421629B2 (ja) * | 2007-04-25 | 2010-02-24 | 株式会社東芝 | 半導体装置の製造方法 |
DE102007063270B4 (de) * | 2007-12-31 | 2011-06-01 | Amd Fab 36 Limited Liability Company & Co. Kg | Verfahren zur Verringerung zur Erzeugung von Ladungseinfangstellen in Gatedielektrika in MOS-Transistoren durch Ausführen einer Wasserstoffbehandlung |
TWI383457B (zh) * | 2008-03-20 | 2013-01-21 | Vanguard Int Semiconduct Corp | 半導體裝置的製造方法 |
US8008143B2 (en) * | 2009-12-30 | 2011-08-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method to form a semiconductor device having gate dielectric layers of varying thicknesses |
US9040393B2 (en) * | 2010-01-14 | 2015-05-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming semiconductor structure |
CN103119693B (zh) | 2010-08-20 | 2016-05-04 | 三菱瓦斯化学株式会社 | 晶体管的制造方法 |
CN102446754A (zh) * | 2010-10-11 | 2012-05-09 | 上海华虹Nec电子有限公司 | 一种消除磷硅玻璃初始氧化膜的方法 |
US8633536B2 (en) | 2011-07-21 | 2014-01-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Gate dielectric of semiconductor device |
US9076889B2 (en) | 2011-09-26 | 2015-07-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Replacement gate semiconductor device |
US8518780B1 (en) * | 2012-04-13 | 2013-08-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fabrication methods of integrated semiconductor structure |
JP6157809B2 (ja) | 2012-07-19 | 2017-07-05 | 株式会社Screenホールディングス | 基板処理方法 |
US9048335B2 (en) | 2013-03-01 | 2015-06-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of fabricating multiple gate stack compositions |
CN104392919B (zh) * | 2014-11-19 | 2018-03-30 | 上海华力微电子有限公司 | Nmos器件的硅衬底表面的处理方法及nmos器件的制作方法 |
CN106373874A (zh) * | 2015-07-21 | 2017-02-01 | 北大方正集团有限公司 | 基于AlGaN/GaN HEMT的欧姆接触电极的制造方法 |
US10020304B2 (en) * | 2015-11-16 | 2018-07-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fin field effect transistor, semiconductor device and fabricating method thereof |
JP7111819B2 (ja) * | 2018-01-15 | 2022-08-02 | アプライド マテリアルズ インコーポレイテッド | 遠隔プラズマによる酸化へのアルゴン添加 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61193456A (ja) * | 1985-02-21 | 1986-08-27 | Toshiba Corp | 半導体素子の製造方法 |
JPH07131004A (ja) * | 1993-06-23 | 1995-05-19 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
JPH07335661A (ja) | 1994-06-03 | 1995-12-22 | Hitachi Ltd | シリコンウェハの製造方法およびそれを用いた半導体集積回路装置 |
JPH08321443A (ja) | 1995-05-25 | 1996-12-03 | Toshiba Microelectron Corp | 半導体装置の製造方法 |
JPH09232325A (ja) | 1996-02-26 | 1997-09-05 | Komatsu Electron Metals Co Ltd | シリコンウェーハの熱処理方法 |
US5989948A (en) * | 1997-09-22 | 1999-11-23 | Vlsi Technology, Inc. | Methods of forming pairs of transistors, and methods of forming pairs of transistors having different voltage tolerances |
JP4047492B2 (ja) * | 1998-06-25 | 2008-02-13 | 株式会社東芝 | Mis型半導体装置およびその製造方法 |
JP2000182574A (ja) | 1998-12-16 | 2000-06-30 | Japan Storage Battery Co Ltd | 非水電解質電池 |
JP4149095B2 (ja) * | 1999-04-26 | 2008-09-10 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
US6171911B1 (en) * | 1999-09-13 | 2001-01-09 | Taiwan Semiconductor Manufacturing Company | Method for forming dual gate oxides on integrated circuits with advanced logic devices |
US6258673B1 (en) * | 1999-12-22 | 2001-07-10 | International Business Machines Corporation | Multiple thickness of gate oxide |
JP3621321B2 (ja) * | 2000-01-17 | 2005-02-16 | Necエレクトロニクス株式会社 | 半導体装置とその製造方法 |
JP2001308198A (ja) * | 2000-04-27 | 2001-11-02 | Ricoh Co Ltd | 半導体装置及びその製造方法 |
JP2002009169A (ja) * | 2000-06-20 | 2002-01-11 | Nec Corp | 半導体装置とその製造方法 |
KR20020015875A (ko) * | 2000-08-23 | 2002-03-02 | 박종섭 | 반도체장치의 제조방법 |
JP3746669B2 (ja) * | 2000-10-17 | 2006-02-15 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
JP2002343879A (ja) * | 2001-05-15 | 2002-11-29 | Nec Corp | 半導体装置及びその製造方法 |
US6759302B1 (en) * | 2002-07-30 | 2004-07-06 | Taiwan Semiconductor Manufacturing Company | Method of generating multiple oxides by plasma nitridation on oxide |
-
2002
- 2002-08-28 JP JP2002249205A patent/JP2004087960A/ja active Pending
-
2003
- 2003-08-12 TW TW092122097A patent/TWI223846B/zh not_active IP Right Cessation
- 2003-08-21 US US10/604,846 patent/US6953727B2/en not_active Expired - Lifetime
- 2003-08-27 KR KR1020030059468A patent/KR100908784B1/ko active IP Right Grant
- 2003-08-28 CN CNB031553680A patent/CN1271682C/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103270580A (zh) * | 2010-12-16 | 2013-08-28 | 信越半导体股份有限公司 | 半导体晶片的洗净方法 |
CN103270580B (zh) * | 2010-12-16 | 2016-08-10 | 信越半导体股份有限公司 | 半导体晶片的洗净方法 |
Also Published As
Publication number | Publication date |
---|---|
US6953727B2 (en) | 2005-10-11 |
TW200406024A (en) | 2004-04-16 |
KR20040019949A (ko) | 2004-03-06 |
CN1494113A (zh) | 2004-05-05 |
US20040132253A1 (en) | 2004-07-08 |
KR100908784B1 (ko) | 2009-07-22 |
JP2004087960A (ja) | 2004-03-18 |
TWI223846B (en) | 2004-11-11 |
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