CN1193930C - 直接在基材上低温合成纳米碳管的方法 - Google Patents
直接在基材上低温合成纳米碳管的方法 Download PDFInfo
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- CN1193930C CN1193930C CNB021085439A CN02108543A CN1193930C CN 1193930 C CN1193930 C CN 1193930C CN B021085439 A CNB021085439 A CN B021085439A CN 02108543 A CN02108543 A CN 02108543A CN 1193930 C CN1193930 C CN 1193930C
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CNB021085439A CN1193930C (zh) | 2002-04-01 | 2002-04-01 | 直接在基材上低温合成纳米碳管的方法 |
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CNB021085439A CN1193930C (zh) | 2002-04-01 | 2002-04-01 | 直接在基材上低温合成纳米碳管的方法 |
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CN1448334A CN1448334A (zh) | 2003-10-15 |
CN1193930C true CN1193930C (zh) | 2005-03-23 |
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CNB021085439A Expired - Fee Related CN1193930C (zh) | 2002-04-01 | 2002-04-01 | 直接在基材上低温合成纳米碳管的方法 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4379247B2 (ja) * | 2004-04-23 | 2009-12-09 | 住友電気工業株式会社 | カーボンナノ構造体の製造方法 |
JP4604563B2 (ja) * | 2004-06-08 | 2011-01-05 | 住友電気工業株式会社 | カーボンナノ構造体の製造方法 |
GB0509499D0 (en) | 2005-05-11 | 2005-06-15 | Univ Surrey | Use of thermal barrier for low temperature growth of nanostructures using top-down heating approach |
CN100445202C (zh) * | 2005-08-26 | 2008-12-24 | 鸿富锦精密工业(深圳)有限公司 | 一种碳纳米管制造方法 |
CN101190786B (zh) * | 2006-11-22 | 2012-06-06 | 财团法人工业技术研究院 | 纳米金属粒子及其纳米碳管与其发光元件的制备方法 |
CN104979468A (zh) * | 2014-04-10 | 2015-10-14 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法 |
CN107119262A (zh) * | 2017-05-27 | 2017-09-01 | 华南理工大学 | 一种镍金属基体表面催化生长碳纳米管薄膜的方法 |
CN111943172A (zh) * | 2020-08-25 | 2020-11-17 | 天津大学 | 一种金属丝辅助化学气相沉积制备碳纳米管阵列的方法 |
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Effective date of registration: 20090320 Address after: Taipei city of Taiwan Province Patentee after: Institute for Information Industry Address before: No. four, Zhongxing Road, bamboo East Town, Taiwan County, Hsinchu Province, China, 195 Patentee before: Industrial Technology Research Institute |
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