CN117308906A - Novel triaxial silicon micro-gyroscope - Google Patents
Novel triaxial silicon micro-gyroscope Download PDFInfo
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- CN117308906A CN117308906A CN202311299272.1A CN202311299272A CN117308906A CN 117308906 A CN117308906 A CN 117308906A CN 202311299272 A CN202311299272 A CN 202311299272A CN 117308906 A CN117308906 A CN 117308906A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 15
- 239000010703 silicon Substances 0.000 title claims abstract description 15
- 239000011521 glass Substances 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 230000008878 coupling Effects 0.000 claims description 129
- 238000010168 coupling process Methods 0.000 claims description 129
- 238000005859 coupling reaction Methods 0.000 claims description 129
- 239000003990 capacitor Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 description 51
- 238000005452 bending Methods 0.000 description 10
- 230000005284 excitation Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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Abstract
The invention relates to a triaxial gyroscope, in particular to a novel triaxial silicon micro-gyroscope. The invention solves the problems of low measurement precision and high production cost of the existing triaxial gyroscope. A novel triaxial silicon micro gyroscope comprises a glass substrate, a harmonic oscillator part and an electrode part; the harmonic oscillator part comprises a cylindrical central anchor point, four groups of square anchor points A and four pairs of square anchor points B; the cylindrical central anchor point, the four groups of square anchor points A and the four pairs of square anchor points B are all bonded on the upper surface of the glass substrate; the electrode part comprises four pairs of arc electrodes A, four arc electrodes B, four pairs of arc electrodes C, four arc electrodes D and four rectangular electrodes; four pairs of arc electrodes A, four arc electrodes B, four pairs of arc electrodes C and four arc electrodes D are all bonded on the upper surface of the glass substrate; four rectangular electrodes are sputtered on the upper surface of the glass substrate. The invention is suitable for the high-precision tip fields such as military navigation, deep space exploration and the like.
Description
Technical Field
The invention relates to a triaxial gyroscope, in particular to a novel triaxial silicon micro-gyroscope.
Background
The three-axis gyroscope is a core sensitive device of an inertial navigation system, can simultaneously measure angular velocity input in the directions of an x axis, a y axis and a z axis, is widely applied to the fields of high precision tips such as military navigation, deep space exploration and the like, and has extremely wide application prospects. Existing triaxial gyroscopes are mainly divided into two categories: one type is an assembled three-axis gyroscope (assembled by three single-axis gyroscopes), which is limited by an assembly process and has the problem of low measurement accuracy. Another class is monolithic integrated three-axis gyroscopes, which suffer from the following problems: firstly, complete decoupling of each driving and detecting direction cannot be realized, so that coupling errors among modes are large, and the measuring precision is low. Secondly, the structure and the processing technology are complex, which makes mass production difficult, and thus, the production cost is high. Based on the above, it is necessary to invent a novel triaxial silicon micro-gyroscope to solve the problems of low measurement accuracy and high production cost of the existing triaxial gyroscope.
Disclosure of Invention
The invention provides a novel triaxial silicon micro-gyroscope for solving the problems of low measurement precision and high production cost of the existing triaxial gyroscope.
The invention is realized by adopting the following technical scheme:
a novel triaxial silicon micro gyroscope comprises a glass substrate, a harmonic oscillator part and an electrode part;
the harmonic oscillator part comprises a cylindrical central anchor point, four groups of square anchor points A and four pairs of square anchor points B;
the cylindrical central anchor point, the four groups of square anchor points A and the four pairs of square anchor points B are all bonded on the upper surface of the glass substrate;
each group of square anchor points A comprises four square anchor points A which are arranged in a rectangular array; the four groups of square anchor points A are symmetrically distributed around the central line of the cylindrical central anchor point;
each pair of square anchor points B comprises two square anchor points B which are symmetrically distributed along the tangential direction; four pairs of square anchor points B are symmetrically distributed around the central line of the cylindrical central anchor point;
four middle-shaped coupling beams A are connected to the side face of the cylindrical central anchor point; the four middle-shaped coupling beams A are symmetrically distributed around the central line of the cylindrical central anchor point;
the ends of the four middle-shaped coupling beams A are commonly connected with a circular frame;
the inner side surface of the annular frame is connected with four middle-shaped coupling beams B; the four middle-shaped coupling beams B are symmetrically distributed around the central line of the cylindrical central anchor point, and the four middle-shaped coupling beams B and the four middle-shaped coupling beams A are equidistantly staggered around the central line of the cylindrical central anchor point;
the end part of each middle-shaped coupling beam B is connected with a rectangular outer layer frame; the four rectangular outer frames are symmetrically distributed around the central line of the cylindrical central anchor point, and the four rectangular outer frames and the four Chinese character 'zhong' shaped coupling beams A are equidistantly staggered around the central line of the cylindrical central anchor point;
two U-shaped coupling beams A which are symmetrically distributed along the tangential direction are connected between each rectangular outer layer frame and the corresponding two Chinese character 'zhong' -shaped coupling beams A, and the two U-shaped coupling beams A are a pair; four pairs of U-shaped coupling beams A are symmetrically distributed around the central line of the cylindrical central anchor point;
four U-shaped coupling beams B which are arranged in a rectangular array are connected to the inner side surface of each rectangular outer layer frame, and the four U-shaped coupling beams B are in a group; the four groups of U-shaped coupling beams B are symmetrically distributed around the central line of the cylindrical central anchor point, and the end parts of the four groups of U-shaped coupling beams B are connected to the side surfaces of the four groups of square anchor points A in a one-to-one correspondence manner;
the inner side surface of each rectangular outer frame is connected with two H-shaped coupling beams A which are symmetrically distributed along the radial direction, and the two H-shaped coupling beams A are a pair; four pairs of H-shaped coupling beams A are symmetrically distributed around the central line of the cylindrical central anchor point;
the end parts of each pair of H-shaped coupling beams A are commonly connected with a rectangular inner layer frame; the four rectangular inner layer frames are symmetrically distributed around the central line of the cylindrical central anchor point, and the four rectangular inner layer frames and the four Chinese character 'zhong' shaped coupling beams A are equidistantly staggered around the central line of the cylindrical central anchor point;
four middle-shaped coupling beams C which are arranged in a rectangular array are connected to the inner side surface of each rectangular inner layer frame, and the four middle-shaped coupling beams C are in a group; the four groups of the medium-shaped coupling beams C are symmetrically distributed around the central line of the cylindrical central anchor point;
the ends of the font coupling beams C in each group are commonly connected with a rectangular mass block; the four rectangular mass blocks are symmetrically distributed around the central line of the cylindrical central anchor point, and the four rectangular mass blocks and the four medium-shaped coupling beams A are equidistantly staggered around the central line of the cylindrical central anchor point;
two H-shaped coupling beams B which are symmetrically distributed along the tangential direction are connected to the side surface of each rectangular mass block, and the two H-shaped coupling beams B are a pair; the four pairs of H-shaped coupling beams B are symmetrically distributed around the central line of the cylindrical central anchor point, and the end parts of the four pairs of H-shaped coupling beams B are connected to the side surfaces of the four pairs of square anchor points B in a one-to-one correspondence manner;
the electrode part comprises four pairs of arc electrodes A, four arc electrodes B, four pairs of arc electrodes C, four arc electrodes D and four rectangular electrodes;
four pairs of arc electrodes A, four arc electrodes B, four pairs of arc electrodes C and four arc electrodes D are all bonded on the upper surface of the glass substrate; the four rectangular electrodes are all sputtered on the upper surface of the glass substrate;
the four pairs of arc electrodes A are symmetrically distributed on two sides of the four medium-shaped coupling beams A in a one-to-one correspondence manner, and the outer side surfaces of the four pairs of arc electrodes A and the inner side surface of the annular frame jointly form four pairs of micro capacitors A; four pairs of micro capacitors A are symmetrically distributed around the central line of the cylindrical central anchor point;
the middle points of the four arc electrodes B are opposite to the four Chinese character 'zhong' shaped coupling beams A one by one, and the inner side surfaces of the four arc electrodes B and the outer side surfaces of the circular ring-shaped frame jointly form four micro capacitors B; the four micro capacitors B are symmetrically distributed around the central line of the cylindrical central anchor point;
the four pairs of arc electrodes C are symmetrically distributed on two sides of the four middle-shaped coupling beams B in a one-to-one correspondence manner, and the outer side surfaces of the four pairs of arc electrodes C and the inner side surface of the annular frame jointly form four pairs of micro capacitors C; four pairs of micro capacitors C are symmetrically distributed around the central line of the cylindrical central anchor point;
the middle points of the four arc electrodes D are opposite to the four middle-shaped coupling beams B one by one, and the inner side surfaces of the four arc electrodes D and the outer side surfaces of the circular ring-shaped frame form four micro capacitors D together; the four micro capacitors D are symmetrically distributed around the central line of the cylindrical central anchor point;
the four rectangular electrodes are coaxially arranged below the four rectangular mass blocks in a one-to-one correspondence manner, and the side lengths of the four rectangular electrodes are smaller than the side lengths of the four rectangular mass blocks in a one-to-one correspondence manner; the upper surfaces of the four rectangular electrodes and the lower surfaces of the four rectangular mass blocks form four micro capacitors E in one-to-one correspondence; the four micro-capacitors E are symmetrically distributed around the center line of the cylindrical center anchor point.
When the device works, four pairs of arc electrodes A and four arc electrodes B are used as z-axis detection electrodes. Four pairs of micro-capacitors A and four micro-capacitors B are used as z-axis detection capacitances. The first pair of arc electrodes C, the third pair of arc electrodes C, the first arc electrode D and the third arc electrode D are all used as driving mode excitation electrodes. The first pair of micro-capacitors C, the third pair of micro-capacitors C, the first micro-capacitor D and the third micro-capacitor D are all used as driving mode excitation capacitances. The second pair of arc electrodes C, the fourth pair of arc electrodes C, the second arc electrode D and the fourth arc electrode D are all used as driving mode feedback electrodes. The second pair of micro-capacitors C, the fourth pair of micro-capacitors C, the second micro-capacitor D and the fourth micro-capacitor D are all used as driving mode feedback capacitors. The first rectangular mass block and the third rectangular mass block are used as x-axis detection mass blocks. The first rectangular electrode and the third rectangular electrode are used as x-axis detection electrodes. The first and third micro-capacitors E, E are both used as x-axis detection capacitances. The second rectangular mass block and the fourth rectangular mass block are used as y-axis detection mass blocks. The second rectangular electrode and the fourth rectangular electrode are used as y-axis detection electrodes. The second and fourth micro-capacitors E and E are used as y-axis detection capacitances. Twelve z-axis detection electrodes, six driving mode excitation electrodes, six driving mode feedback electrodes, two x-axis detection electrodes and two y-axis detection electrodes are all connected with a control system through metal wires.
The specific working process is as follows: the control system generates a path of driving voltage signal which is transmitted to the six driving mode excitation capacitors through the metal wires, so that the annular frame maintains four-antinode vibration with the annular wave number of 2 under the action of electrostatic force. In the vibration process, the control system measures the displacement of the circular ring-shaped frame in real time through six driving mode feedback capacitors and controls driving voltage signals in real time according to measurement results, so that on one hand, the displacement amplitude of the circular ring-shaped frame is kept constant, and on the other hand, the circular ring-shaped frame vibrates on the resonance frequency point of the circular ring-shaped frame. When no angular velocity is input, the annular frame is excited by the six driving mode excitation capacitors to make four antinode bending vibration in the driving mode. At this time, the two x-axis detection mass blocks, the two x-axis detection electrodes, the two y-axis detection mass blocks and the two y-axis detection electrodes are located at the antinode of the four-antinode bending vibration, the twelve z-axis detection electrodes are located at the node of the four-antinode bending vibration, the plate distances of the two x-axis detection capacitors, the plate distances of the two y-axis detection capacitors and the plate distances of the twelve z-axis detection capacitors are all kept unchanged, and the capacities of the two x-axis detection capacitors, the two y-axis detection capacitors and the twelve z-axis detection capacitors are all kept unchanged. At this point, the output of the present invention is zero. When angular velocity input exists in the x-axis direction, the annular frame still uses a driving mode to do four-antinode bending vibration in the plane, the two x-axis detection mass blocks, the two x-axis detection electrodes, the two y-axis detection mass blocks and the two y-axis detection electrodes are still positioned at the antinode of the four-antinode bending vibration, the twelve z-axis detection electrodes are still positioned at the node of the four-antinode bending vibration, but the two x-axis detection mass blocks do out-of-plane movement (the movement directions of the two x-axis detection mass blocks are opposite), so that the distance between polar plates of the two x-axis detection capacitors is changed, and the capacity of the two x-axis detection capacitors is changed. At this time, the control system can calculate the angular velocity input in the x-axis direction by detecting the capacities of the two x-axis detection capacitors. When angular velocity is input in the y-axis direction, the annular frame still uses a driving mode to do four-antinode bending vibration in the plane, the two x-axis detection mass blocks, the two x-axis detection electrodes, the two y-axis detection mass blocks and the two y-axis detection electrodes are still positioned at the antinode of the four-antinode bending vibration, the twelve z-axis detection electrodes are still positioned at the node of the four-antinode bending vibration, but the two y-axis detection mass blocks do out-of-plane movement (the movement directions of the two y-axis detection mass blocks are opposite), so that the distance between polar plates of the two y-axis detection capacitors is changed, and the capacity of the two y-axis detection capacitors is changed. At this time, the control system can calculate the angular velocity input in the y-axis direction by detecting the capacities of the two y-axis detection capacitances. When the angular velocity is input in the z-axis direction, the annular frame is subjected to four-antinode bending vibration in the plane by using a detection mode under the action of the coupling of the Coriolis force. At this time, the two x-axis detection mass blocks, the two x-axis detection electrodes, the two y-axis detection mass blocks and the two y-axis detection electrodes are located at the nodes of the four-antinode flexural vibration, and the twelve z-axis detection electrodes are located at the antinodes of the four-antinode flexural vibration, so that the plate distances of the twelve z-axis detection capacitors are changed, and therefore the capacity of the twelve z-axis detection capacitors is changed. At this time, the control system can calculate the angular velocity input in the z-axis direction by detecting the capacity of the twelve z-axis detection capacitances.
Based on the above process, compared with the existing triaxial gyroscope, the novel triaxial silicon micro-gyroscope provided by the invention has the advantages that the input of angular velocities in the directions of an x axis, a y axis and a z axis is simultaneously measured by adopting a brand new structure, and the novel triaxial silicon micro-gyroscope has the following advantages: 1. compared with the existing assembled triaxial gyroscope, the invention adopts a monolithic integrated structure, so that the monolithic integrated structure is not limited by an assembly process, and the measurement accuracy is effectively improved. 2. Compared with the existing monolithic integrated triaxial gyroscope, the invention has the following advantages: firstly, the invention realizes the complete decoupling of each driving and detecting direction, thereby effectively reducing the coupling error between each mode and effectively improving the measuring precision. Secondly, the structure and the processing technology of the invention are simpler, so that the invention can realize mass production, thereby effectively reducing the production cost.
The three-axis gyroscope has reasonable structure and ingenious design, effectively solves the problems of low measurement precision and high production cost of the existing three-axis gyroscope, and is suitable for the high-precision tip fields such as military navigation and deep space exploration.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic perspective view of a glass substrate and four rectangular electrodes in the present invention.
Fig. 3 is a schematic plan view of a resonator portion and an electrode portion in the present invention.
Fig. 4 is a schematic view of a part of the structure of fig. 3.
In the figure: 1-glass substrate, 201-cylindrical center anchor, 202-square anchor a, 203-square anchor B, 204-middle-shaped coupling beam a, 205-circular ring frame, 206-middle-shaped coupling beam B, 207-rectangular outer frame, 208-U-shaped coupling beam a, 209-U-shaped coupling beam B, 210-H-shaped coupling beam a, 211-rectangular inner frame, 212-middle-shaped coupling beam C, 213-rectangular mass, 214-H-shaped coupling beam B, 301-arc electrode a, 302-arc electrode B, 303-arc electrode C, 304-arc electrode D, 305-rectangular electrode.
Detailed Description
A novel triaxial silicon micro gyroscope comprises a glass substrate 1, a harmonic oscillator part and an electrode part;
the harmonic oscillator part comprises a cylindrical central anchor point 201, four groups of square anchor points A202 and four pairs of square anchor points B203;
the cylindrical central anchor point 201, four groups of square anchor points A202 and four pairs of square anchor points B203 are all bonded on the upper surface of the glass substrate 1;
each group of square anchor points A202 comprises four square anchor points A202 which are arranged in a rectangular array; four groups of square anchor points A202 are symmetrically distributed around the central line of the cylindrical central anchor point 201;
each pair of square anchor points B203 comprises two square anchor points B203 which are symmetrically distributed along the tangential direction; four pairs of square anchor points B203 are symmetrically distributed around the central line of the cylindrical central anchor point 201;
four Chinese character 'zhong' shaped coupling beams A204 are connected to the side face of the cylindrical central anchor point 201; four Chinese character 'zhong' shaped coupling beams A204 are symmetrically distributed around the central line of the cylindrical central anchor point 201;
the ends of the four middle-shaped coupling beams A204 are commonly connected with a circular frame 205;
four middle-shaped coupling beams B206 are connected to the inner side surface of the annular frame 205; the four middle-shaped coupling beams B206 are symmetrically distributed around the central line of the cylindrical central anchor point 201, and the four middle-shaped coupling beams B206 and the four middle-shaped coupling beams A204 are equidistantly staggered around the central line of the cylindrical central anchor point 201;
the end part of each middle-shaped coupling beam B206 is connected with a rectangular outer frame 207; the four rectangular outer frames 207 are symmetrically distributed around the central line of the cylindrical central anchor point 201, and the four rectangular outer frames 207 and the four Chinese character 'zhong' shaped coupling beams A204 are equidistantly staggered around the central line of the cylindrical central anchor point 201;
two U-shaped coupling beams A208 which are symmetrically distributed along the tangential direction are connected between each rectangular outer frame 207 and the corresponding two middle-shaped coupling beams A204, and the two U-shaped coupling beams A208 are a pair; four pairs of U-shaped coupling beams A208 are symmetrically distributed around the central line of the cylindrical central anchor point 201;
four U-shaped coupling beams B209 arranged in a rectangular array are connected to the inner side surface of each rectangular outer frame 207, and the four U-shaped coupling beams B209 are a group; the four groups of U-shaped coupling beams B209 are symmetrically distributed around the central line of the cylindrical central anchor point 201, and the end parts of the four groups of U-shaped coupling beams B209 are connected to the side surfaces of the four groups of square anchor points A202 in a one-to-one correspondence manner;
the inner side surface of each rectangular outer frame 207 is connected with two H-shaped coupling beams A210 which are symmetrically distributed along the radial direction, and the two H-shaped coupling beams A210 are a pair; four pairs of H-shaped coupling beams A210 are symmetrically distributed around the central line of the cylindrical central anchor point 201;
the ends of each pair of H-shaped coupling beams A210 are commonly connected with a rectangular inner layer frame 211; the four rectangular inner layer frames 211 are symmetrically distributed around the central line of the cylindrical central anchor point 201, and the four rectangular inner layer frames 211 and the four Chinese character 'zhong' shaped coupling beams A204 are equidistantly staggered around the central line of the cylindrical central anchor point 201;
four middle-shaped coupling beams C212 arranged in a rectangular array are connected to the inner side surface of each rectangular inner layer frame 211, and the four middle-shaped coupling beams C212 are in a group; the four groups of the medium-shaped coupling beams C212 are symmetrically distributed around the central line of the cylindrical central anchor point 201;
the ends of the font coupling beams C212 in each group are commonly connected with a rectangular mass block 213; the four rectangular mass blocks 213 are symmetrically distributed around the central line of the cylindrical central anchor point 201, and the four rectangular mass blocks 213 and the four medium-shaped coupling beams A204 are equidistantly staggered around the central line of the cylindrical central anchor point 201;
two H-shaped coupling beams B214 which are symmetrically distributed along the tangential direction are connected to the side surface of each rectangular mass block 213, and the two H-shaped coupling beams B214 are a pair; four pairs of H-shaped coupling beams B214 are symmetrically distributed around the central line of the cylindrical central anchor point 201, and the end parts of the four pairs of H-shaped coupling beams B214 are connected to the side surfaces of the four pairs of square anchor points B203 in a one-to-one correspondence manner;
the electrode part comprises four pairs of arc electrodes A301, four arc electrodes B302, four pairs of arc electrodes C303, four arc electrodes D304 and four rectangular electrodes 305;
four pairs of arc electrodes A301, four arc electrodes B302, four pairs of arc electrodes C303 and four arc electrodes D304 are all bonded on the upper surface of the glass substrate 1; four rectangular electrodes 305 are sputtered on the upper surface of the glass substrate 1;
the four pairs of arc electrodes A301 are symmetrically distributed on two sides of the four Chinese character 'zhong' shaped coupling beams A204 in a one-to-one correspondence manner, and the outer side surfaces of the four pairs of arc electrodes A301 and the inner side surface of the circular ring-shaped frame 205 jointly form four pairs of micro capacitors A; four pairs of micro capacitors A are symmetrically distributed around the central line of the cylindrical central anchor point 201;
the middle points of the four arc electrodes B302 are opposite to the four Chinese character 'zhong' shaped coupling beams A204 one by one, and the inner side surfaces of the four arc electrodes B302 and the outer side surfaces of the circular ring-shaped frame 205 jointly form four micro capacitors B; four micro-capacitors B are symmetrically distributed around the center line of the cylindrical center anchor point 201;
the four pairs of arc electrodes C303 are symmetrically distributed on two sides of the four middle-shaped coupling beams B206 in a one-to-one correspondence manner, and the outer side surfaces of the four pairs of arc electrodes C303 and the inner side surface of the circular frame 205 jointly form four pairs of micro capacitors C; four pairs of micro-capacitors C are symmetrically distributed around the central line of the cylindrical central anchor point 201;
the middle points of the four arc electrodes D304 are opposite to the four middle-shaped coupling beams B206 one by one, and the inner side surfaces of the four arc electrodes D304 and the outer side surface of the circular frame 205 jointly form four micro capacitors D; four micro-capacitors D are symmetrically distributed around the center line of the cylindrical center anchor 201;
the four rectangular electrodes 305 are coaxially arranged below the four rectangular mass blocks 213 in a one-to-one correspondence manner, and the side lengths of the four rectangular electrodes 305 are smaller than the side lengths of the four rectangular mass blocks 213 in a one-to-one correspondence manner; the upper surfaces of the four rectangular electrodes 305 and the lower surfaces of the four rectangular masses 213 form four micro capacitors E in one-to-one correspondence; four micro-capacitors E are symmetrically distributed about the centerline of the cylindrical center anchor 201.
The glass substrate 1 is square, and the central line of the glass substrate and the central line of the cylindrical central anchor point 201 are mutually coincident.
Distances are reserved between the four middle-shaped coupling beams A204 and the glass substrate 1, between the circular ring-shaped frame 205 and the glass substrate 1, between the four middle-shaped coupling beams B206 and the glass substrate 1, between the four rectangular outer layer frames 207 and the glass substrate 1, between the four pairs of U-shaped coupling beams A208 and the glass substrate 1, between the four groups of U-shaped coupling beams B209 and the glass substrate 1, between the four pairs of H-shaped coupling beams A210 and the glass substrate 1, between the four rectangular inner layer frames 211 and the glass substrate 1, between the four groups of middle-shaped coupling beams C212 and the glass substrate 1, between the four rectangular mass blocks 213 and the glass substrate 1, and between the four pairs of H-shaped coupling beams B214 and the glass substrate 1.
The glass substrate 1, the resonator portion, and the electrode portion are integrally manufactured by SOG process.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that these are by way of example only, and the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the principles and spirit of the invention, but such changes and modifications fall within the scope of the invention.
Claims (4)
1. The utility model provides a novel triaxial silicon micro-gyroscope which characterized in that: comprises a glass substrate (1), a harmonic oscillator part and an electrode part;
the harmonic oscillator part comprises a cylindrical central anchor point (201), four groups of square anchor points A (202) and four pairs of square anchor points B (203);
the cylindrical central anchor point (201), the four groups of square anchor points A (202) and the four pairs of square anchor points B (203) are all bonded on the upper surface of the glass substrate (1);
each group of square anchor points A (202) comprises four square anchor points A (202) which are arranged in a rectangular array; four groups of square anchor points A (202) are symmetrically distributed around the central line of the cylindrical central anchor point (201);
each pair of square anchor points B (203) comprises two square anchor points B (203) which are symmetrically distributed along the tangential direction; four pairs of square anchor points B (203) are symmetrically distributed around the central line of the cylindrical central anchor point (201);
four Chinese character 'zhong' shaped coupling beams A (204) are connected to the side face of the cylindrical central anchor point (201); four Chinese character 'zhong' shaped coupling beams A (204) are symmetrically distributed around the central line of the cylindrical central anchor point (201);
the ends of the four middle-shaped coupling beams A (204) are commonly connected with a circular frame (205);
the inner side surface of the circular frame (205) is connected with four middle-shaped coupling beams B (206); the four middle-shaped coupling beams B (206) are symmetrically distributed around the central line of the cylindrical central anchor point (201), and the four middle-shaped coupling beams B (206) and the four middle-shaped coupling beams A (204) are equidistantly staggered around the central line of the cylindrical central anchor point (201);
the end part of each middle-shaped coupling beam B (206) is connected with a rectangular outer layer frame (207); the four rectangular outer frames (207) are symmetrically distributed around the central line of the cylindrical central anchor point (201), and the four rectangular outer frames (207) and the four Chinese character 'zhong' shaped coupling beams A (204) are equidistantly staggered around the central line of the cylindrical central anchor point (201);
two U-shaped coupling beams A (208) which are symmetrically distributed along the tangential direction are connected between each rectangular outer frame (207) and the corresponding two middle-shaped coupling beams A (204), and the two U-shaped coupling beams A (208) are in a pair; four pairs of U-shaped coupling beams A (208) are symmetrically distributed around the central line of the cylindrical central anchor point (201);
four U-shaped coupling beams B (209) which are arranged in a rectangular array are connected to the inner side surface of each rectangular outer frame (207), and the four U-shaped coupling beams B (209) are in a group; the four groups of U-shaped coupling beams B (209) are symmetrically distributed around the central line of the cylindrical central anchor point (201), and the end parts of the four groups of U-shaped coupling beams B (209) are connected to the side surfaces of the four groups of square anchor points A (202) in a one-to-one correspondence manner;
the inner side surface of each rectangular outer frame (207) is connected with two H-shaped coupling beams A (210) symmetrically distributed along the radial direction, and the two H-shaped coupling beams A (210) are a pair; four pairs of H-shaped coupling beams A (210) are symmetrically distributed around the central line of a cylindrical central anchor point (201);
the ends of each pair of H-shaped coupling beams A (210) are commonly connected with a rectangular inner layer frame (211); the four rectangular inner frames (211) are symmetrically distributed around the central line of the cylindrical central anchor point (201), and the four rectangular inner frames (211) and the four middle-shaped coupling beams A (204) are equidistantly staggered around the central line of the cylindrical central anchor point (201);
four middle-shaped coupling beams C (212) which are arranged in a rectangular array are connected to the inner side surface of each rectangular inner layer frame (211), and the four middle-shaped coupling beams C (212) are in a group; the four groups of the medium-shaped coupling beams C (212) are symmetrically distributed around the central line of the cylindrical central anchor point (201);
the ends of the font coupling beams C (212) in each group are commonly connected with a rectangular mass block (213); the four rectangular mass blocks (213) are symmetrically distributed around the central line of the cylindrical central anchor point (201), and the four rectangular mass blocks (213) and the four Chinese character 'zhong' shaped coupling beams A (204) are equidistantly staggered around the central line of the cylindrical central anchor point (201);
two H-shaped coupling beams B (214) which are symmetrically distributed along the tangential direction are connected to the side surface of each rectangular mass block (213), and the two H-shaped coupling beams B (214) are a pair; four pairs of H-shaped coupling beams B (214) are symmetrically distributed around the central line of the cylindrical central anchor point (201), and the ends of the four pairs of H-shaped coupling beams B (214) are connected to the side surfaces of the four pairs of square anchor points B (203) in a one-to-one correspondence manner;
the electrode part comprises four pairs of arc electrodes A (301), four arc electrodes B (302), four pairs of arc electrodes C (303), four arc electrodes D (304) and four rectangular electrodes (305);
four pairs of arc electrodes A (301), four arc electrodes B (302), four pairs of arc electrodes C (303) and four arc electrodes D (304) are all bonded on the upper surface of the glass substrate (1); four rectangular electrodes (305) are sputtered on the upper surface of the glass substrate (1);
the four pairs of arc electrodes A (301) are symmetrically distributed on two sides of the four Chinese character 'zhong' shaped coupling beams A (204) in a one-to-one correspondence manner, and the outer side surfaces of the four pairs of arc electrodes A (301) and the inner side surface of the circular ring-shaped frame (205) jointly form four pairs of micro capacitors A; four pairs of micro capacitors A are symmetrically distributed around the central line of a cylindrical central anchor point (201);
the middle points of the four arc electrodes B (302) are opposite to the four Chinese character 'zhong' shaped coupling beams A (204), and the inner side surfaces of the four arc electrodes B (302) and the outer side surfaces of the circular ring-shaped frame (205) form four micro capacitors B together; four micro-capacitors B are symmetrically distributed around the central line of the cylindrical central anchor point (201);
four pairs of arc electrodes C (303) are symmetrically distributed on two sides of the four middle-shaped coupling beams B (206) in a one-to-one correspondence manner, and the outer side surfaces of the four pairs of arc electrodes C (303) and the inner side surface of the circular ring-shaped frame (205) jointly form four pairs of micro capacitors C; four pairs of micro capacitors C are symmetrically distributed around the central line of the cylindrical central anchor point (201);
the middle points of the four arc electrodes D (304) are opposite to the four middle-shaped coupling beams B (206) one by one, and the inner side surfaces of the four arc electrodes D (304) and the outer side surfaces of the circular ring-shaped frame (205) form four micro capacitors D together; four micro-capacitors D are symmetrically distributed around the central line of the cylindrical central anchor point (201);
the four rectangular electrodes (305) are coaxially arranged below the four rectangular mass blocks (213) in a one-to-one correspondence manner, and the side lengths of the four rectangular electrodes (305) are smaller than the side lengths of the four rectangular mass blocks (213) in a one-to-one correspondence manner; the upper surfaces of the four rectangular electrodes (305) and the lower surfaces of the four rectangular mass blocks (213) form four micro capacitors E in a one-to-one correspondence manner; four micro-capacitors E are symmetrically distributed about the centerline of the cylindrical center anchor point (201).
2. The novel triaxial silicon micro-gyroscope according to claim 1, characterized in that: the glass substrate (1) is square, and the central line of the glass substrate and the central line of the cylindrical central anchor point (201) are mutually coincident.
3. The novel triaxial silicon micro-gyroscope according to claim 1, characterized in that: distances are reserved between four middle-shaped coupling beams A (204) and the glass substrate (1), between the circular ring-shaped frame (205) and the glass substrate (1), between four middle-shaped coupling beams B (206) and the glass substrate (1), between four rectangular outer-layer frames (207) and the glass substrate (1), between four pairs of U-shaped coupling beams A (208) and the glass substrate (1), between four groups of U-shaped coupling beams B (209) and the glass substrate (1), between four pairs of H-shaped coupling beams A (210) and the glass substrate (1), between four rectangular inner-layer frames (211) and the glass substrate (1), between four groups of middle-shaped coupling beams C (212) and the glass substrate (1), between four rectangular mass blocks (213) and the glass substrate (1), and between four pairs of H-shaped coupling beams B (214) and the glass substrate (1).
4. The novel triaxial silicon micro-gyroscope according to claim 1, characterized in that: the glass substrate (1), the harmonic oscillator part and the electrode part are manufactured into a whole by adopting an SOG process.
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| CN202311299272.1A CN117308906A (en) | 2023-10-09 | 2023-10-09 | Novel triaxial silicon micro-gyroscope |
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