CN116147599B - Four-mass full-differential double-shaft MEMS gyroscope - Google Patents
Four-mass full-differential double-shaft MEMS gyroscope Download PDFInfo
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The invention discloses a four-mass full-differential double-shaft MEMS gyroscope, which comprises a substrate layer and a device layer structure, wherein the device layer structure comprises a driving double-end supporting beam, a driving frame, a Goldmos mass block, a driving coupling supporting beam, a driving coupling folding beam, an X-axis detection double-end supporting beam, a Z-axis detection frame, a Z-axis detection truss, a Z-axis detection coupling beam, a Z-axis detection frame fulcrum, a push-pull driving force system, a driving end differential detection output signal system, an X-axis differential detection output signal system, a Z-axis differential detection output signal system and a Z-axis detection output closed-loop control signal system. The invention has the following advantages and effects: the problem of coupling error between two shafts of the double-shaft MEMS gyroscope is solved, and the influence on the accuracy of the gyroscope is avoided; the detection sensitivity of the double-shaft gyroscope is improved, so that the measurement accuracy of the gyroscope is improved; the problem of the biax gyroscope is inconsistent in work precision is solved, and the method can be widely applied to the high-end field.
Description
Technical Field
The invention relates to the field of gyroscopes, in particular to a four-mass fully-differential double-shaft MEMS gyroscope.
Background
With the continuous development of MEMS manufacturing technology, the market is focusing on biaxial or multiaxial MEMS gyroscopes, and in particular, in the fields of industrial control, navigation, aerospace and special military applications, the demand for high-precision biaxial MEMS gyroscopes is increasing.
In the prior art, the motion sensitive structure part of the biaxial MEMS gyroscope is mainly divided into two types, one type is that the motion sensitive structure is composed of two independent X-axis gyroscopes and Z-axis gyroscopes, and the other type is that the angular velocity measurement of the X-axis gyroscopes and the Z-axis gyroscopes is realized through the same set of driving devices.
However, there are problems that the first type of structural motion module has coupling errors, which can affect the accuracy improvement of the gyroscope. The second type of structure is usually in a double-mass block mode, although the structure is decoupled, the sensitivity is low, and in actual work, the problem of uncoordinated detection precision of the angular speeds of the X axis and the Z axis exists in the two types of structures, so that the application prospect of the two types of structures in a medium-high precision market environment is seriously hindered.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a four-mass fully-differential double-shaft MEMS gyroscope which has high detection sensitivity and can meet the effect of meeting the coordination and consistency problem of the double-shaft gyroscope on the working precision.
The technical aim of the invention is realized by the following technical scheme: a four-mass fully differential dual-axis MEMS gyroscope comprising:
comprises a substrate layer, wherein the material is silicon;
the device layer structure is made of silicon and is fixed on the substrate layer through corresponding anchor points,
the device layer structure comprises a driving double-end supporting beam, a driving frame, a Goldmos mass block, a driving coupling fixed supporting beam, a driving coupling folding beam, an X-axis detection double-end supporting beam, a Z-axis detection frame, a Z-axis detection truss, a Z-axis detection coupling beam and a Z-axis detection frame fulcrum;
one end of the driving double-end supporting beam is connected with an anchor point and is fixed on the substrate layer, the other end of the driving double-end supporting beam is connected with the driving frame, one end of the X-axis detection double-end supporting beam is connected with the driving frame, the other end of the X-axis detection double-end supporting beam is connected with the Gong's mass block, one end of the driving coupling double-end supporting beam is connected with the Gong's mass block, the other end of the driving coupling double-end supporting beam is connected with the Z-axis detection truss, and the other end of the Z-axis detection truss is connected with the Z-axis detection frame;
the two ends of the Z-axis detection coupling beam are respectively connected with the left and right Z-axis detection frames and used for modal separation of the Z-axis detection frames, and the two ends of the driving coupling folding beam are respectively connected with the left and right driving frames, so that the two connected driving frames move in the same direction during operation;
the Coriolis mass block is simultaneously X-axis detection loop mass, the driving frame and the Coriolis mass block together form the driving loop mass, the structure is symmetrical about a Y axis, the Z-axis detection frame and the Coriolis mass block together form the Z-axis detection loop mass, the structure is symmetrical about an X axis, and meanwhile, the whole double-axis MEMS gyroscope structure is designed in a full decoupling way;
the device layer structure further includes:
the system comprises a push-pull driving force system, a driving end differential detection output signal system, an X-axis differential detection output signal system, a Z-axis differential detection output signal system and a Z-axis detection output closed-loop control signal system;
the push-pull driving force system provides push-pull driving force for the biaxial MEMS gyroscope, the driving end differential detection output signal system provides differential detection output signals for the driving end of the biaxial MEMS gyroscope, the X-axis differential detection output signal system provides X-axis differential detection output signals for the biaxial MEMS gyroscope so as to detect X-axis angular velocity, the Z-axis differential detection output signal system provides Z-axis differential detection output signals for the biaxial MEMS gyroscope so as to detect Z-axis angular velocity, and the Z-axis detection output closed-loop control signal system provides Z-axis detection output closed-loop control signals for the biaxial MEMS gyroscope.
The present invention may be further configured in a preferred example to: the push-pull driving force system comprises a driving positive electrode comb tooth pair and a driving negative electrode comb tooth pair, wherein the driving positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the driving negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, and electrodes respectively corresponding to and connected with the driving positive electrode comb tooth pair and the driving negative electrode comb tooth pair form a group of differential capacitor electrodes which are symmetrically distributed on the left side and the right side of the driving structure respectively and are symmetrical about a Y axis.
The present invention may be further configured in a preferred example to: the driving positive electrode comb teeth are provided with N pairs which are designed for variable area comb teeth, and the driving negative electrode comb teeth are provided with N pairs which are designed for variable area comb teeth.
The present invention may be further configured in a preferred example to: the driving end differential detection output signal system comprises a driving detection positive electrode comb tooth pair and a driving detection negative electrode comb tooth pair, wherein the driving detection positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the driving detection negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, and electrodes respectively corresponding to and connected with the driving detection positive electrode comb tooth pair and the driving detection negative electrode comb tooth pair form a group of differential capacitance electrodes which are symmetrically distributed on the left side and the right side of the structure respectively and are symmetrical about a Y axis.
The present invention may be further configured in a preferred example to: the driving detection positive electrode comb teeth are provided with N pairs, and are designed for variable area comb teeth, and the driving detection negative electrode comb teeth are provided with N pairs, and are designed for variable area comb teeth.
The present invention may be further configured in a preferred example to: the X-axis differential detection output signal system comprises an X-axis detection positive electrode and an X-axis detection negative electrode, wherein the X-axis detection positive electrode is designed on the substrate layer, the X-axis detection negative electrode is also designed on the substrate layer, the X-axis detection positive electrode is of a plate electrode structure, forms a variable gap plate capacitor with the Coriolis mass block to form an X-axis capacitance detection positive electrode, forms a variable gap plate capacitor with the Coriolis mass block to form an X-axis capacitance detection negative electrode, and forms a group of full differential capacitance electrodes with the X-axis capacitance detection negative electrode, and is symmetrically distributed on the left side and the right side of the whole structure respectively and symmetrical about a Y axis.
The present invention may be further configured in a preferred example to: the Z-axis differential detection output signal system comprises a Z-axis detection positive electrode comb tooth pair and a Z-axis detection negative electrode comb tooth pair, wherein the Z-axis detection positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the Z-axis detection negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, and electrodes respectively corresponding to and connected with the Z-axis detection negative electrode comb tooth pair form a group of differential capacitance electrodes which are symmetrically distributed on the left side and the right side of the whole structure and are symmetrical with respect to an X axis.
The present invention may be further configured in a preferred example to: the Z-axis detection positive electrode comb teeth are provided with N pairs, and are designed for variable-gap comb teeth, and the Z-axis detection negative electrode comb teeth are provided with N pairs, and are designed for variable-gap comb teeth.
The present invention may be further configured in a preferred example to: the Z-axis detection output closed-loop control signal system comprises a Z-axis detection feedback positive electrode comb tooth pair and a Z-axis detection feedback negative electrode comb tooth pair, wherein the Z-axis detection feedback positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the Z-axis detection feedback negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, and electrodes respectively and correspondingly connected with the Z-axis detection feedback negative electrode comb tooth pair form a group of differential capacitor electrodes which are respectively and symmetrically distributed on the left side and the right side of the whole structure and are symmetrical about an X axis.
The present invention may be further configured in a preferred example to: the Z-axis detection feedback positive electrode comb teeth are provided with N pairs, and are designed for variable-gap comb teeth, and the Z-axis detection feedback negative electrode comb teeth are provided with N pairs, and are designed for variable-gap comb teeth.
In summary, the invention has the following beneficial effects:
1. the problem of coupling error between two shafts of the double-shaft MEMS gyroscope is solved, and the influence on the accuracy of the gyroscope is avoided;
2. the detection sensitivity of the double-shaft gyroscope is improved, so that the measurement accuracy of the gyroscope is improved;
3. the problem of inconsistent working accuracy of the double-shaft gyroscope is solved, and the double-shaft gyroscope can be widely applied to high-end fields such as industry, aviation, military and the like;
4. the whole structure has the advantages of easy realization of processing difficulty, small chip size, mass production and low cost.
Drawings
FIG. 1 is a schematic structural view of an embodiment;
FIG. 2 is a schematic diagram of the movement of the structure under actuation;
FIG. 3 is a schematic diagram of an embodiment when measuring the X-axis;
fig. 4 is a schematic diagram of an embodiment when measuring the Z axis.
Reference numerals: 1. a substrate layer; 2. a first anchor point; 3. driving the double-end clamped beam; 4. a driving frame; 5. driving the coupling clamped beam; 6. detecting the double-end clamped beam on the X axis; 7. a second anchor point; 8. driving the negative electrode comb teeth pair; 9. a third anchor point; 10. driving the positive electrode comb teeth pair; 11. a fourth anchor point; 12. driving and detecting the positive electrode comb tooth pair; 13. a fifth anchor point; 14. driving and detecting a negative electrode comb tooth pair; 15. a coriolis mass; 16. a Z-axis detection frame; 17. detecting the coupling beam by a Z axis; 18. detecting a frame fulcrum by a Z axis; 19. z-axis detection truss; 20. driving the coupling folding beam; 21. a sixth anchor point; 22. detecting a negative electrode comb tooth pair by a Z axis; 23. a seventh anchor point; 24. z-axis detection feedback negative electrode comb tooth pairs; 25. an eighth anchor point; 26. detecting a positive electrode comb tooth pair by a Z axis; 27. a ninth anchor point; 28. z-axis detection feedback positive electrode comb tooth pairs; 29. detecting a negative electrode on the X axis; 30. the positive electrode was detected on the X-axis.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, a four-mass fully differential biaxial MEMS gyroscope comprises a substrate layer 1 and a device layer structure, wherein the substrate layer 1 and the device layer structure are made of silicon, and the device layer structure is fixed on the substrate layer 1 through corresponding anchor points.
As shown in fig. 1, 2, 3 and 4, the device layer structure includes a driving double-end supporting beam 3, a driving frame 4, a coriolis mass 15, a driving coupling supporting beam 5, a driving coupling folding beam 20, an X-axis detecting double-end supporting beam 6, a Z-axis detecting frame 16, a Z-axis detecting truss 19, a Z-axis detecting coupling beam 17 and a Z-axis detecting frame fulcrum 18.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, one end of the driving double-end clamped beam 3 is connected with the first anchor point 2 and is fixed on the substrate layer 1, the other end is connected with the driving frame 4, one end of the X-axis detection double-end clamped beam 6 is connected with the driving frame 4, the other end is connected with the coriolis mass 15, one end of the driving coupling clamped beam 5 is connected with the coriolis mass 15, the other end is connected with the Z-axis detection truss 19, and the other end of the Z-axis detection truss 19 is connected with the Z-axis detection frame 16.
As shown in fig. 1, 2, 3 and 4, two ends of the Z-axis detection coupling beam 17 are respectively connected with the left and right Z-axis detection frames 16 for modal separation of the Z-axis detection frames 16, and two ends of the driving coupling folding beam 20 are respectively connected with the left and right driving frames 4, so that the two driving frames 4 connected during operation move in the same direction
As shown in fig. 1, 2, 3 and 4, the coriolis mass 15 is an X-axis detection loop mass at the same time, the driving frame 4 and the coriolis mass 15 together form a driving loop mass and are symmetrical about a Y-axis, the Z-axis detection frame 16 and the coriolis mass 15 together form a Z-axis detection loop mass and are symmetrical about an X-axis, and the whole dual-axis MEMS gyroscope structure is a fully decoupled design.
As shown in fig. 1, 2, 3 and 4, the device layer structure further includes a push-pull driving force system, a driving end differential detection output signal system, an X-axis differential detection output signal system, a Z-axis differential detection output signal system and a Z-axis detection output closed-loop control signal system.
As shown in fig. 1, 2, 3 and 4, the push-pull driving force system provides push-pull driving force for the dual-axis MEMS gyroscope, the driving end differential detection output signal system provides differential detection output signals for the driving end of the dual-axis MEMS gyroscope, the X-axis differential detection output signal system provides X-axis differential detection output signals for the dual-axis MEMS gyroscope to detect the angular velocity of the X-axis, the Z-axis differential detection output signal system provides Z-axis differential detection output signals for the dual-axis MEMS gyroscope to detect the angular velocity of the Z-axis, and the Z-axis detection output closed-loop control signal system provides Z-axis detection output closed-loop control signals for the dual-axis MEMS gyroscope.
As shown in fig. 1, 2, 3 and 4, the push-pull driving force system includes a driving positive electrode comb pair 10 and a driving negative electrode comb pair 8, the driving positive electrode comb pair 10 is fixed on the substrate layer 1 through a corresponding third anchor point 9, and the driving negative electrode comb pair 8 is fixed on the substrate layer 1 through a corresponding second anchor point 7. The driving positive electrode comb teeth pair 10 is provided with N pairs, and is designed for variable area comb teeth, and the driving negative electrode comb teeth pair 8 is provided with N pairs, and is designed for variable area comb teeth. The electrodes respectively and correspondingly connected with the driving positive electrode comb tooth pair 10 and the driving negative electrode comb tooth pair 8 form a group of differential capacitance electrodes which are respectively and symmetrically distributed on the left side and the right side of the driving structure and are symmetrical about the Y axis.
As shown in fig. 1, 2, 3 and 4, the driving end differential detection output signal system includes a driving detection positive electrode comb tooth pair 12 and a driving detection negative electrode comb tooth pair 14, where the driving detection positive electrode comb tooth pair 12 is fixed on the substrate layer 1 through a corresponding fourth anchor point 11, and the driving detection negative electrode comb tooth pair 14 is fixed on the substrate layer 1 through a corresponding fifth anchor point 13. The driving detection positive electrode comb teeth pair 12 is provided with N pairs, and is designed for variable area comb teeth, and the driving detection negative electrode comb teeth pair 14 is provided with N pairs, and is designed for variable area comb teeth. The electrodes of the driving detection positive electrode comb tooth pair 12 and the driving detection negative electrode comb tooth pair 14, which are respectively and correspondingly connected, form a group of differential capacitance electrodes which are respectively and symmetrically distributed on the left side and the right side of the structure and are symmetrical about the Y axis.
As shown in fig. 1, 2, 3 and 4, the X-axis differential detection output signal system includes an X-axis detection positive electrode 30 and an X-axis detection negative electrode 29, where the X-axis detection positive electrode 30 is designed on the substrate layer 1, the X-axis detection negative electrode 29 is also designed on the substrate layer 1, the X-axis detection positive electrode 30 is a plate electrode structure, forms a variable gap plate capacitor with the coriolis mass 15, forms an X-axis capacitance detection positive electrode, the X-axis detection negative electrode 29 is a plate electrode structure, forms a variable gap plate capacitor with the coriolis mass 15, forms an X-axis capacitance detection negative electrode, and the X-axis capacitance detection positive electrode and the X-axis capacitance detection negative electrode are symmetrically distributed on the left and right sides of the whole structure, and are symmetrical about the Y-axis.
As shown in fig. 1, 2, 3 and 4, the Z-axis differential detection output signal system includes a Z-axis detection positive electrode comb pair 26 and a Z-axis detection negative electrode comb pair 22, where the Z-axis detection positive electrode comb pair 26 is fixed on the substrate layer 1 by a corresponding eighth anchor point 25, and the Z-axis detection negative electrode comb pair 22 is fixed on the substrate layer 1 by a corresponding sixth anchor point 21. The Z-axis detection positive electrode comb teeth pair 26 is provided with N pairs, and is designed for variable-gap comb teeth, and the Z-axis detection negative electrode comb teeth pair 22 is provided with N pairs, and is designed for variable-gap comb teeth. The electrodes respectively and correspondingly connected with the pair of Z-axis detection positive electrode comb teeth 26 and the pair of Z-axis detection negative electrode comb teeth 22 form a group of differential capacitance electrodes which are respectively and symmetrically distributed on the left side and the right side of the whole structure and are symmetrical about the X-axis.
As shown in fig. 1, 2, 3 and 4, the Z-axis detection output closed-loop control signal system includes a Z-axis detection feedback positive electrode comb pair 28 and a Z-axis detection feedback negative electrode comb pair 24, where the Z-axis detection feedback positive electrode comb pair 28 is fixed on the substrate layer 1 by a corresponding ninth anchor point 27, and the Z-axis detection feedback negative electrode comb pair 24 is fixed on the substrate layer 1 by a corresponding seventh anchor point 23. The Z-axis detection feedback positive electrode comb teeth pair 28 is provided with N pairs, and is designed for variable-gap comb teeth, and the Z-axis detection feedback negative electrode comb teeth pair 24 is provided with N pairs, and is designed for variable-gap comb teeth. The electrodes respectively and correspondingly connected with the pair of Z-axis detection feedback positive electrode comb teeth 28 and the pair of Z-axis detection feedback negative electrode comb teeth 24 form a group of differential capacitance electrodes which are respectively and symmetrically distributed on the left side and the right side of the whole structure and are symmetrical about the X-axis.
The working principle of the double-shaft MEMS gyroscope is as follows:
the MEMS gyroscope mainly works based on the Golgi force effect, firstly, a driving structure is enabled to keep constant amplitude and constant frequency oscillation through a gyroscope driving loop, when external angular velocity acts, the structure generates the Golgi force under the effect, so that the MEMS gyroscope detection structure generates micro displacement, corresponding capacitance change is further caused, and capacitance detection is completed through an external interface circuit, so that angular velocity measurement is finally achieved.
As shown in fig. 2, when the external X-axis angular velocity is input, the coriolis mass 15 in the MEMS gyroscope structure will be subjected to coriolis force, so that the coriolis mass 15 generates out-of-plane micro-displacement.
As shown in fig. 3, a corresponding capacitance change is caused between the positive and negative detection electrodes of the X-axis, and the capacitance detection is completed through an external interface circuit, so that the measurement of the angular velocity of the X-axis is realized.
When the external Z-axis angular velocity is input, the Goldrake mass 15 in the MEMS gyroscope structure is also subjected to the Goldrake force, so that the Goldrake mass 15 generates in-plane micro-displacement, and the Z-axis detection frame generates butterfly wing type motion under the action of the Goldrake force.
As shown in FIG. 4, the Z-axis detection positive electrode comb teeth pair and the Z-axis detection negative electrode comb teeth pair distributed on the Z-axis detection frame are further driven to generate in-plane torsion, corresponding capacitance changes are caused between the Z-axis positive detection electrode and the Z-axis negative detection electrode, and capacitance detection is completed through an external interface circuit, so that measurement of the Z-axis angular velocity is realized.
When the X-axis angular velocity is detected, the structure adopts a four-mass block out-of-plane fully differential detection mode, so that most common-mode interference noise is eliminated, and meanwhile, compared with the sensitivity and the signal-to-noise ratio of an X-axis gyroscope device with a double-mass block structure, the sensitivity and the signal-to-noise ratio of the X-axis gyroscope device are improved by 1 time.
When the Z-axis angular velocity is detected, the structure adopts an in-plane four-mass-block torsion type full-differential framework, so that full-differential quasi-three-dimensional motion of the whole structure of the Z-axis MEMS gyroscope is formed, the total motion inertia of any in-plane proportional superposition direction at any moment is always zero, the full-directional vibration isolation decoupling of the Z-axis MEMS gyroscope to the surrounding environment is realized, and the effects of typical interferences such as temperature, environmental impact, vibration and the like on the accuracy of the gyroscope are comprehensively and effectively restrained.
In summary, the invention solves the problem of coupling error between two shafts of the gyroscope and improves the detection sensitivity of the dual-shaft gyroscope, and more importantly, the invention can meet the coordination and consistency problem of the dual-shaft gyroscope on the working precision.
The present invention is not limited by the specific embodiments, and modifications can be made to the embodiments without creative contribution by those skilled in the art after reading the present specification, but are protected by patent laws within the scope of claims of the present invention.
Claims (10)
1. A four-mass fully differential biaxial MEMS gyroscope characterized in that: comprising the following steps:
comprises a substrate layer (1) made of silicon;
the device layer structure is made of silicon and is fixed on the substrate layer (1) through corresponding anchor points,
the device layer structure comprises a driving double-end supporting beam (3), a driving frame (4), a Goldwire mass block (15), a driving coupling fixed supporting beam (5), a driving coupling folding beam (20), an X-axis detection double-end supporting beam (6), a Z-axis detection frame (16), a Z-axis detection truss (19), a Z-axis detection coupling beam (17) and a Z-axis detection frame fulcrum (18);
one end of the driving double-end supporting beam (3) is connected with the first anchor point (2) and fixed on the substrate layer (1), the other end of the driving double-end supporting beam is connected with the driving frame (4), one end of the X-axis detection double-end supporting beam (6) is connected with the driving frame (4), the other end of the X-axis detection double-end supporting beam is connected with the God's mass block (15), one end of the driving coupling supporting beam (5) is connected with the God's mass block (15), the other end of the driving coupling supporting beam is connected with the Z-axis detection truss (19), and the other end of the Z-axis detection truss (19) is connected with the Z-axis detection frame (16);
the two ends of the Z-axis detection coupling beam (17) are respectively connected with the left and right Z-axis detection frames (16) and used for enabling the Z-axis detection frames (16) to be separated in a modal mode, and the two ends of the driving coupling folding beam (20) are respectively connected with the left and right driving frames (4) so that the two connected driving frames (4) move in the same direction when in operation;
the Coriolis mass block (15) is simultaneously X-axis detection loop mass, the driving frame (4) and the Coriolis mass block (15) together form the driving loop mass, the structure is symmetrical about the Y-axis, the Z-axis detection frame (16) and the Coriolis mass block (15) together form the Z-axis detection loop mass, the structure is symmetrical about the X-axis, and meanwhile, the whole double-shaft MEMS gyroscope structure is of a full decoupling design;
the device layer structure further includes:
the system comprises a push-pull driving force system, a driving end differential detection output signal system, an X-axis differential detection output signal system, a Z-axis differential detection output signal system and a Z-axis detection output closed-loop control signal system;
the push-pull driving force system provides push-pull driving force for the biaxial MEMS gyroscope, the driving end differential detection output signal system provides differential detection output signals for the driving end of the biaxial MEMS gyroscope, the X-axis differential detection output signal system provides X-axis differential detection output signals for the biaxial MEMS gyroscope so as to detect X-axis angular velocity, the Z-axis differential detection output signal system provides Z-axis differential detection output signals for the biaxial MEMS gyroscope so as to detect Z-axis angular velocity, and the Z-axis detection output closed-loop control signal system provides Z-axis detection output closed-loop control signals for the biaxial MEMS gyroscope.
2. A four-mass fully differential dual-axis MEMS gyroscope as claimed in claim 1, wherein: the push-pull driving force system comprises a driving positive electrode comb tooth pair (10) and a driving negative electrode comb tooth pair (8), wherein the driving positive electrode comb tooth pair (10) is fixed on the substrate layer (1) through a corresponding third anchor point (9), the driving negative electrode comb tooth pair (8) is fixed on the substrate layer (1) through a corresponding second anchor point (7), and electrodes respectively and correspondingly connected with the driving positive electrode comb tooth pair (10) and the driving negative electrode comb tooth pair (8) form a group of differential capacitor electrodes which are respectively and symmetrically distributed on the left side and the right side of the driving structure and are symmetrical about a Y axis.
3. A four-mass fully differential dual-axis MEMS gyroscope as claimed in claim 2, wherein: the driving positive electrode comb teeth pair (10) is provided with N pairs, and is designed for variable area comb teeth, and the driving negative electrode comb teeth pair (8) is provided with N pairs, and is designed for variable area comb teeth.
4. A four-mass fully differential dual-axis MEMS gyroscope as claimed in claim 1, wherein: the driving end differential detection output signal system comprises a driving detection positive electrode comb tooth pair (12) and a driving detection negative electrode comb tooth pair (14), wherein the driving detection positive electrode comb tooth pair (12) is fixed on the substrate layer (1) through a corresponding fourth anchor point (11), the driving detection negative electrode comb tooth pair (14) is fixed on the substrate layer (1) through a corresponding fifth anchor point (13), and electrodes respectively correspondingly connected with the driving detection positive electrode comb tooth pair (12) and the driving detection negative electrode comb tooth pair (14) form a group of differential capacitance electrodes which are symmetrically distributed on the left side and the right side of the structure respectively and are symmetrical about a Y axis.
5. The four-mass fully differential dual-axis MEMS gyroscope of claim 4, wherein: the driving detection positive electrode comb teeth pair (12) is provided with N pairs, and is designed for variable area comb teeth, and the driving detection negative electrode comb teeth pair (14) is provided with N pairs, and is designed for variable area comb teeth.
6. A four-mass fully differential dual-axis MEMS gyroscope as claimed in claim 1, wherein: the X-axis differential detection output signal system comprises an X-axis detection positive electrode (30) and an X-axis detection negative electrode (29), wherein the X-axis detection positive electrode (30) is designed on the substrate layer (1), the X-axis detection negative electrode (29) is also designed on the substrate layer (1), the X-axis detection positive electrode (30) is of a flat plate electrode structure, forms a variable gap flat plate capacitor with the God's mass block (15) to form an X-axis capacitance detection positive electrode, forms a variable gap flat plate capacitor with the God's mass block (15), forms an X-axis capacitance detection negative electrode, and forms a group of full differential capacitance electrodes which are symmetrically distributed on the left side and the right side of the whole structure respectively and are symmetrical about a Y axis.
7. The four-mass fully differential dual-axis MEMS gyroscope of claim 6, wherein: the Z-axis differential detection output signal system comprises a Z-axis detection positive electrode comb tooth pair (26) and a Z-axis detection negative electrode comb tooth pair (22), wherein the Z-axis detection positive electrode comb tooth pair (26) is fixed on the substrate layer (1) through a corresponding eighth anchor point (25), the Z-axis detection negative electrode comb tooth pair (22) is fixed on the substrate layer (1) through a corresponding sixth anchor point (21), and electrodes respectively and correspondingly connected with the Z-axis detection positive electrode comb tooth pair (26) and the Z-axis detection negative electrode comb tooth pair (22) form a group of differential capacitor electrodes which are symmetrically distributed on the left side and the right side of the whole structure respectively and are symmetrical about an X axis.
8. The four-mass fully differential dual-axis MEMS gyroscope of claim 7, wherein: the Z-axis detection positive electrode comb teeth pair (26) is provided with N pairs, and is designed for variable-gap comb teeth, and the Z-axis detection negative electrode comb teeth pair (22) is provided with N pairs, and is designed for variable-gap comb teeth.
9. A four-mass fully differential dual-axis MEMS gyroscope as claimed in claim 1, wherein: the Z-axis detection output closed-loop control signal system comprises a Z-axis detection feedback positive electrode comb tooth pair (28) and a Z-axis detection feedback negative electrode comb tooth pair (24), wherein the Z-axis detection feedback positive electrode comb tooth pair (28) is fixed on the substrate layer (1) through a corresponding ninth anchor point (27), the Z-axis detection feedback negative electrode comb tooth pair (24) is fixed on the substrate layer (1) through a corresponding seventh anchor point (23), and electrodes respectively correspondingly connected with the Z-axis detection feedback positive electrode comb tooth pair (28) and the Z-axis detection feedback negative electrode comb tooth pair (24) form a group of differential capacitor electrodes which are respectively symmetrically distributed on the left side and the right side of the whole structure and are symmetrical about an X axis.
10. The four-mass fully differential dual-axis MEMS gyroscope of claim 9, wherein: the Z-axis detection feedback positive electrode comb teeth pair (28) is provided with N pairs, and is designed for variable-gap comb teeth, and the Z-axis detection feedback negative electrode comb teeth pair (24) is provided with N pairs, and is designed for variable-gap comb teeth.
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