CN112857351B - Double-ring type micromechanical gyroscope structure with wide range and high precision - Google Patents
Double-ring type micromechanical gyroscope structure with wide range and high precision Download PDFInfo
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- CN112857351B CN112857351B CN202110403924.6A CN202110403924A CN112857351B CN 112857351 B CN112857351 B CN 112857351B CN 202110403924 A CN202110403924 A CN 202110403924A CN 112857351 B CN112857351 B CN 112857351B
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The invention particularly relates to a double-ring type micromechanical gyroscope structure with wide range and high precision. The problem that the existing micro-mechanical vibration gyro cannot have both wide range and high precision is solved. A dual-ring type micromechanical gyroscope structure with wide range and high precision comprises a glass substrate, a resonator part and an electrode part; the resonance part comprises circular ring-shaped inner layer resonance mass, circular ring-shaped outer layer resonance mass, a cylindrical central anchor point, eight block-shaped peripheral anchor points, eight spoke-shaped inner elastic support suspension beams and eight spoke-shaped outer elastic support suspension beams; the electrode part comprises four arc inner layer driving modal displacement measuring electrodes, four arc outer layer driving modal displacement measuring electrodes, four arc inner layer detection modal displacement measuring electrodes, four arc outer layer detection modal displacement measuring electrodes, eight pairs of arc inner layer control electrodes and eight pairs of arc outer layer control electrodes. The invention is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like.
Description
Technical Field
The invention relates to a micromechanical vibration gyroscope, in particular to a double-ring type micromechanical gyroscope structure with wide range and high precision.
Background
The micromechanical vibration gyroscope is an angular velocity sensitive device based on the Coriolis effect, has the advantages of small volume, light weight, low power consumption, long service life, batch production, low price and the like, is widely applied to the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like, and has extremely wide application prospect. The specific working principle of the micromechanical vibrating gyroscope is as follows: when no angular velocity is input, the harmonic oscillator of the micromechanical vibration gyro works in a driving mode, and the output of the micromechanical vibration gyro is zero. When the angular speed is input, the harmonic oscillator of the micromechanical vibration gyroscope works in the detection mode, and the micromechanical vibration gyroscope detects the input angular speed in real time. However, practice shows that the existing micromechanical vibration gyroscope cannot have both large range and high precision due to the limitation of the geometrical structure of the harmonic oscillator and the structure of the electrode. Therefore, a double-ring type micro-mechanical gyroscope structure with wide range and high precision is needed to be invented, so that the problem that the existing micro-mechanical vibration gyroscope cannot have both wide range and high precision is solved.
Disclosure of Invention
The invention provides a double-ring type micro-mechanical gyroscope structure with wide range and high precision, aiming at solving the problem that the existing micro-mechanical vibratory gyroscope cannot have both wide range and high precision.
The invention is realized by adopting the following technical scheme:
a dual-ring type micromechanical gyroscope structure with wide range and high precision comprises a glass substrate, a resonator part and an electrode part;
the resonance part comprises circular ring-shaped inner layer resonance mass, circular ring-shaped outer layer resonance mass, a cylindrical central anchor point, eight block-shaped peripheral anchor points, eight spoke-shaped inner elastic support suspension beams and eight spoke-shaped outer elastic support suspension beams;
the electrode part comprises four arc inner layer driving modal displacement measuring electrodes, four arc outer layer driving modal displacement measuring electrodes, four arc inner layer detection modal displacement measuring electrodes, four arc outer layer detection modal displacement measuring electrodes, eight pairs of arc inner layer control electrodes and eight pairs of arc outer layer control electrodes;
the annular inner layer resonance mass and the annular outer layer resonance mass are both placed on the upper surface of the glass substrate, and the center line of the annular inner layer resonance mass and the center line of the annular outer layer resonance mass are superposed with each other;
the cylindrical central anchor point is bonded on the upper surface of the glass substrate and is positioned in the inner cavity of the annular inner layer resonance mass; the central line of the cylindrical central anchor point and the central line of the annular inner layer resonance mass are superposed with each other;
the eight block-shaped peripheral anchor points are all bonded on the upper surface of the glass substrate and are all positioned outside the circular outer layer resonance mass; the eight block-shaped peripheral anchor points are symmetrically distributed around the central line of the cylindrical central anchor point;
the eight spoke-shaped inner elastic support suspension beams are all positioned between the cylindrical central anchor point and the annular inner layer resonance mass, and are symmetrically distributed around the central line of the cylindrical central anchor point;
each spoke-shaped inner elastic support suspension beam is composed of a first straight beam section, a first S-shaped beam section and a second straight beam section; the tail end of the first straight beam section is fixed with the outer side face of the cylindrical central anchor point; the tail end of the first S-shaped beam section is fixed with the head end of the first straight beam section; the tail end of the second straight beam section is fixed with the head end of the first S-shaped beam section; the head end of the second straight beam section is fixed with the inner side surface of the annular inner layer resonance mass;
the eight spoke-shaped outer elastic support suspension beams are correspondingly positioned between the annular outer layer resonance mass and the eight block-shaped peripheral anchor points one by one, and are symmetrically distributed around the central line of the cylindrical central anchor point;
each spoke-shaped outer elastic support suspension beam is composed of a third straight beam section, a second S-shaped beam section and a fourth straight beam section; the tail end of the third straight beam section is fixed with the outer side surface of the circular outer layer resonance mass; the tail end of the second S-shaped beam section is fixed with the head end of the third straight beam section; the tail end of the fourth straight beam section is fixed with the head end of the second S-shaped beam section; the head end of the fourth straight beam section is fixed with the inner side surface of the corresponding block-shaped peripheral anchor point;
the four arc-shaped inner layer driving modal displacement measuring electrodes and the four arc-shaped inner layer detection modal displacement measuring electrodes are all bonded on the upper surface of the glass substrate, and the four arc-shaped inner layer driving modal displacement measuring electrodes and the four arc-shaped inner layer detection modal displacement measuring electrodes are all positioned between the circular ring-shaped inner layer resonance mass and the circular ring-shaped outer layer resonance mass; the four arc-shaped inner layer driving mode displacement measuring electrodes and the four arc-shaped inner layer detection mode displacement measuring electrodes are symmetrically distributed around the central line of the cylindrical central anchor point and are arranged in a staggered mode; the middle points of the four arc inner layer driving modal displacement measuring electrodes are directly opposite to the head end of the first second straight beam section, the head end of the third second straight beam section, the head end of the fifth second straight beam section and the head end of the seventh second straight beam section; the middle points of the four arc inner layer detection mode displacement measurement electrodes are opposite to the head end of the second straight beam section, the head end of the fourth straight beam section, the head end of the sixth straight beam section and the head end of the eighth straight beam section one by one; the inner side surfaces of the four arc-shaped inner-layer driving mode displacement measuring electrodes and the outer side surface of the circular inner-layer resonance mass form four micro capacitors together; the inner side surfaces of the four arc-shaped inner-layer detection mode displacement measurement electrodes and the outer side surface of the circular ring-shaped inner-layer resonance mass form four micro capacitors together;
the four arc-shaped outer layer driving modal displacement measuring electrodes and the four arc-shaped outer layer detection modal displacement measuring electrodes are all bonded on the upper surface of the glass substrate, and the four arc-shaped outer layer driving modal displacement measuring electrodes and the four arc-shaped outer layer detection modal displacement measuring electrodes are all positioned between the circular ring-shaped inner layer resonance mass and the circular ring-shaped outer layer resonance mass; the four arc-shaped outer layer driving mode displacement measuring electrodes and the four arc-shaped outer layer detection mode displacement measuring electrodes are symmetrically distributed around the central line of the cylindrical central anchor point and are arranged in a staggered mode; the middle points of the four arc-shaped outer layer driving modal displacement measuring electrodes are opposite to the tail end of the first third straight beam section, the tail end of the third straight beam section, the tail end of the fifth third straight beam section and the tail end of the seventh third straight beam section one by one; the middle points of the four arc-shaped outer layer detection mode displacement measurement electrodes are opposite to the tail ends of the second third straight beam section, the fourth third straight beam section, the sixth third straight beam section and the eighth third straight beam section one by one; the outer side surfaces of the four arc-shaped outer layer driving mode displacement measuring electrodes and the inner side surface of the circular outer layer resonance mass form four micro capacitors together; the outer side surfaces of the four arc-shaped outer layer detection mode displacement measurement electrodes and the inner side surface of the circular outer layer resonance mass form four micro capacitors together;
eight pairs of arc inner layer control electrodes are all bonded on the upper surface of the glass substrate and are all positioned between the cylindrical central anchor point and the circular ring-shaped inner layer resonance mass; eight pairs of arc inner layer control electrodes are symmetrically distributed around the center line of the cylindrical center anchor point, and the eight pairs of arc inner layer control electrodes are symmetrically distributed on two sides of the eight second straight beam sections in a one-to-one correspondence manner; the outer side surfaces of the eight pairs of arc inner layer control electrodes and the inner side surface of the circular ring-shaped inner layer resonance mass form eight pairs of micro capacitors together; four pairs of micro capacitors corresponding to the positions of the four arc-shaped inner layer driving mode displacement measuring electrodes are used as four pairs of inner layer driving mode exciting capacitors, and four pairs of micro capacitors corresponding to the positions of the four arc-shaped inner layer detection mode displacement measuring electrodes are used as four pairs of inner layer detection mode force feedback capacitors;
eight pairs of arc outer layer control electrodes are all bonded on the upper surface of the glass substrate and are positioned outside the circular outer layer resonance mass; eight pairs of arc-shaped outer layer control electrodes are symmetrically distributed around the center line of the cylindrical center anchor point, and the eight pairs of arc-shaped outer layer control electrodes are symmetrically distributed on two sides of the eight third straight beam sections in a one-to-one correspondence manner; the inner side surfaces of the eight pairs of arc-shaped outer layer control electrodes and the outer side surface of the circular outer layer resonance mass form eight pairs of micro capacitors together; four pairs of micro capacitors corresponding to the positions of the four arc-shaped outer layer driving mode displacement measuring electrodes are used as four pairs of outer layer driving mode exciting capacitors, and four pairs of micro capacitors corresponding to the positions of the four arc-shaped outer layer detection mode displacement measuring electrodes are used as four pairs of outer layer detection mode force feedback capacitors.
When the device works, the four arc inner layer driving modal displacement measuring electrodes, the four arc outer layer driving modal displacement measuring electrodes, the four arc inner layer detection modal displacement measuring electrodes, the four arc outer layer detection modal displacement measuring electrodes, the eight pairs of arc inner layer control electrodes and the eight pairs of arc outer layer control electrodes are connected with a control system through metal wires.
The specific working process is as follows: the control system respectively generates two paths of driving voltage signals: the first path of driving voltage signal is transmitted to the four pairs of inner-layer driving mode exciting capacitors through the metal conducting wires, so that the circular ring-shaped inner-layer resonance mass can simultaneously maintain the four-antinode vibration of the circular ring with the wave number of 2 under the action of electrostatic force. In the vibration process, the displacement of the annular inner layer resonance mass is measured by the four arc-shaped inner layer driving modal displacement measuring electrodes in real time, and the measurement result is transmitted to the control system in real time through the metal lead. The control system controls the first path of driving voltage signal in real time according to the measurement result, so that on one hand, the displacement amplitude of the circular ring-shaped inner layer resonance mass is kept constant, and on the other hand, the circular ring-shaped inner layer resonance mass vibrates on the resonance frequency point. The second path of driving voltage signal is transmitted to the four pairs of outer layer driving mode exciting capacitors through the metal conducting wires, so that the circular outer layer resonance mass can simultaneously maintain the four-antinode vibration of the circular wave number of 2 under the action of electrostatic force. In the vibration process, the four arc-shaped outer layer driving modal displacement measuring electrodes measure the displacement of the resonance mass of the circular outer layer in real time, and the measurement result is transmitted to the control system in real time through the metal lead. And the control system controls the second path of driving voltage signal in real time according to the measurement result, so that the displacement amplitude of the circular outer layer resonance mass keeps constant on one hand, and the circular outer layer resonance mass vibrates on the resonance frequency point of the circular outer layer resonance mass on the other hand.
When no angular velocity is input, the annular inner layer resonance mass is excited by the four inner layer drive mode excitation capacitors to perform in-plane four-antinode bending vibration in the drive mode, at the moment, the four arc inner layer detection mode displacement measurement electrodes are located at nodes of the four-antinode bending vibration, and the four arc inner layer detection mode displacement measurement electrodes do not generate detection voltage signals. Meanwhile, the circular outer layer resonance mass is excited by the four pairs of outer layer driving mode exciting capacitors to perform four-antinode bending vibration in the surface in a driving mode, at the moment, the four arc outer layer detection mode displacement measurement electrodes are located at nodes of the four-antinode bending vibration, and no detection voltage signal is generated by the four arc outer layer detection mode displacement measurement electrodes. At this time, the output of the present invention is zero.
When an angular velocity is input, the annular inner layer resonance mass conducts four-antinode bending vibration in the plane in a detection mode under the coupling effect of Cogowski force, at the moment, the four arc-shaped inner layer detection mode displacement measurement electrodes are located at antinodes of the four-antinode bending vibration, all the four arc-shaped inner layer detection mode displacement measurement electrodes generate detection voltage signals, and the detection voltage signals are related to the input angular velocity. Meanwhile, the annular outer layer resonance mass conducts four-antinode bending vibration in the surface in a detection mode under the action of Cogowski force coupling, at the moment, the four arc outer layer detection mode displacement measurement electrodes are located at antinodes of the four-antinode bending vibration, all the four arc outer layer detection mode displacement measurement electrodes generate detection voltage signals, and the detection voltage signals are related to the input angular velocity.
Under the working state of the detection open loop, on one hand, the control system calculates the input angular velocity in real time according to detection voltage signals generated by the four arc-shaped inner-layer detection mode displacement measurement electrodes, on the other hand, calculates the input angular velocity in real time according to detection voltage signals generated by the four arc-shaped outer-layer detection mode displacement measurement electrodes (when the input angular velocity is small, the circular ring-shaped outer-layer resonance mass is used as a high-precision gyroscope, so that the control system outputs a high-precision angular velocity calculation result, the circular ring-shaped inner-layer resonance mass is used as a wide-range gyroscope, so that when the input angular velocity is large, the input angular velocity exceeds the range of the circular ring-shaped outer-layer resonance mass, so that the angular velocity calculation result output by the control system is in a saturation state, and the circular ring-shaped inner-layer resonance mass is used as the wide-range gyroscope, so that the control system outputs a wide-range angular velocity calculation result).
Further, under the working state of a detection closed loop, the control system can also calculate the vibration amplitude of the annular inner layer resonance mass in real time according to detection voltage signals generated by the four arc-shaped inner layer detection modal displacement measurement electrodes, generate a first path of control signal in real time according to the calculation result, and transmit the first path of control signal to the four pairs of inner layer detection modal force feedback capacitors in real time through the metal lead, so that a detection feedback electrostatic force is formed, and the force acts on the annular inner layer resonance mass to counteract the coriolis force, so that the vibration amplitude of the annular inner layer resonance mass is reduced to the minimum, and the precision and other parameters of the annular inner layer resonance mass are improved. Meanwhile, the control system can also calculate the vibration amplitude of the annular outer layer resonance mass in real time according to detection voltage signals generated by the four arc-shaped outer layer detection modal displacement measurement electrodes, generate a second path of control signals in real time according to the calculation result, and transmit the second path of control signals to the four pairs of outer layer detection modal force feedback capacitors in real time through metal wires, so that detection feedback electrostatic force is formed, the force acts on the annular outer layer resonance mass to counteract CoMP force, the vibration amplitude of the annular outer layer resonance mass is reduced to the minimum, and the precision and other parameters of the annular outer layer resonance mass are improved.
Based on the process, the double-ring type micromechanical gyroscope structure with wide range and high precision has the following advantages by adopting a brand new structure: firstly, the invention adopts the annular outer layer resonance mass as a high-precision gyroscope (the vibration mass is large, and the Coriolis force is large when the angular velocity is input), and adopts the annular inner layer resonance mass as a wide-range gyroscope (the vibration mass is small, and the Coriolis force is small when the angular velocity is input), thereby having both large range and high precision. Secondly, the harmonic oscillator adopts a double-ring structure, the annular inner layer resonance mass and the annular outer layer resonance mass can simultaneously maintain four-antinode vibration, the annular inner layer resonance mass and the annular outer layer resonance mass respectively have own modal resonance frequency, the modal resonance frequency and the modal resonance frequency are not interfered with each other, and the two independent gyro structures are adopted, so that the whole structure can have both wide range and high precision. Thirdly, the working modes of the capacitor electrodes are flexible, and the working functions of the electrodes (including the functions of completing the motion displacement detection, the electrostatic force driving, the resonance mode frequency adjustment, the orthogonal correction and the like of the circular resonance mass) can be configured according to different working requirements.
The invention has reasonable structure and ingenious design, effectively solves the problem that the existing micromechanical vibrating gyroscope cannot have both wide range and high precision, and is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a partial structural schematic diagram of the present invention.
In the figure: 11-circular ring-shaped inner layer resonance mass, 12-circular ring-shaped outer layer resonance mass, 21-cylindrical central anchor point, 22-block-shaped peripheral anchor point, 31-spoke-shaped inner side elastic support suspension beam, 32-spoke-shaped outer side elastic support suspension beam, 41-arc-shaped inner layer driving mode displacement measuring electrode, 42-arc-shaped outer layer driving mode displacement measuring electrode, 51-arc-shaped inner layer detection mode displacement measuring electrode, 52-arc-shaped outer layer detection mode displacement measuring electrode, 61-arc-shaped inner layer control electrode, 62-arc-shaped outer layer control electrode, 31 a-first straight beam section, 31 b-first S-shaped beam section, 31 c-second straight beam section, 32 a-third straight beam section, 32 b-second S-shaped beam section and 32 c-fourth straight beam section.
Detailed Description
A dual-ring type micromechanical gyroscope structure with wide range and high precision comprises a glass substrate, a resonator part and an electrode part;
the resonance part comprises a circular ring-shaped inner layer resonance mass 11, a circular ring-shaped outer layer resonance mass 12, a cylindrical central anchor point 21, eight block-shaped peripheral anchor points 22, eight spoke-shaped inner elastic support suspension beams 31 and eight spoke-shaped outer elastic support suspension beams 32;
the electrode part comprises four arc-shaped inner layer driving modal displacement measuring electrodes 41, four arc-shaped outer layer driving modal displacement measuring electrodes 42, four arc-shaped inner layer detection modal displacement measuring electrodes 51, four arc-shaped outer layer detection modal displacement measuring electrodes 52, eight pairs of arc-shaped inner layer control electrodes 61 and eight pairs of arc-shaped outer layer control electrodes 62;
the annular inner layer resonance mass 11 and the annular outer layer resonance mass 12 are both placed on the upper surface of the glass substrate, and the center line of the annular inner layer resonance mass 11 and the center line of the annular outer layer resonance mass 12 are overlapped;
the cylindrical central anchor point 21 is bonded on the upper surface of the glass substrate, and the cylindrical central anchor point 21 is positioned in the inner cavity of the annular inner layer resonance mass 11; the central line of the cylindrical central anchor point 21 and the central line of the circular ring-shaped inner layer resonance mass 11 are superposed with each other;
the eight block-shaped peripheral anchor points 22 are all bonded on the upper surface of the glass substrate, and the eight block-shaped peripheral anchor points 22 are all located outside the circular outer layer resonance mass 12; the eight block-shaped peripheral anchor points 22 are symmetrically distributed around the central line of the cylindrical central anchor point 21;
the eight spoke-shaped inner elastic support suspension beams 31 are all positioned between the cylindrical central anchor point 21 and the circular ring-shaped inner layer resonance mass 11, and the eight spoke-shaped inner elastic support suspension beams 31 are symmetrically distributed around the central line of the cylindrical central anchor point 21;
each spoke-shaped inner elastic support suspension beam 31 is composed of a first straight beam section 31a, a first S-shaped beam section 31b and a second straight beam section 31 c; the tail end of the first straight beam section 31a is fixed with the outer side surface of the cylindrical central anchor point 21; the tail end of the first S-shaped beam section 31b is fixed with the head end of the first straight beam section 31 a; the tail end of the second straight beam section 31c is fixed with the head end of the first S-shaped beam section 31 b; the head end of the second straight beam section 31c is fixed with the inner side surface of the circular ring-shaped inner layer resonance mass 11;
the eight spoke-shaped outer elastic support suspension beams 32 are correspondingly positioned between the circular outer layer resonance mass 12 and the eight block-shaped peripheral anchor points 22 one by one, and the eight spoke-shaped outer elastic support suspension beams 32 are symmetrically distributed around the central line of the cylindrical central anchor point 21;
each spoke-shaped outer elastic support suspension beam 32 is composed of a third straight beam section 32a, a second S-shaped beam section 32b and a fourth straight beam section 32 c; the tail end of the third straight beam section 32a is fixed with the outer side surface of the circular outer layer resonance mass 12; the tail end of the second S-shaped beam section 32b is fixed with the head end of the third straight beam section 32 a; the tail end of the fourth straight beam section 32c is fixed with the head end of the second S-shaped beam section 32 b; the head end of the fourth straight beam section 32c is fixed with the inner side surface of the corresponding block-shaped peripheral anchor point 22;
four arc-shaped inner layer driving mode displacement measuring electrodes 41 and four arc-shaped inner layer detection mode displacement measuring electrodes 51 are all bonded on the upper surface of the glass substrate, and the four arc-shaped inner layer driving mode displacement measuring electrodes 41 and the four arc-shaped inner layer detection mode displacement measuring electrodes 51 are all positioned between the circular ring-shaped inner layer resonance mass 11 and the circular ring-shaped outer layer resonance mass 12; the four arc-shaped inner layer driving mode displacement measuring electrodes 41 and the four arc-shaped inner layer detection mode displacement measuring electrodes 51 are symmetrically distributed around the central line of the cylindrical central anchor point 21 and are arranged in a staggered manner; the middle points of the four arc inner layer driving mode displacement measuring electrodes 41 are directly opposite to the head end of the first second straight beam section 31c, the head end of the third second straight beam section 31c, the head end of the fifth second straight beam section 31c and the head end of the seventh second straight beam section 31 c; the middle points of the four arc inner layer detection mode displacement measurement electrodes 51 are directly opposite to the head end of the second straight beam section 31c, the head end of the fourth straight beam section 31c, the head end of the sixth straight beam section 31c and the head end of the eighth straight beam section 31 c; the inner side surfaces of the four arc-shaped inner-layer driving mode displacement measuring electrodes 41 and the outer side surface of the circular inner-layer resonance mass 11 jointly form four micro capacitors; the inner side surfaces of the four arc-shaped inner-layer detection mode displacement measurement electrodes 51 and the outer side surface of the circular ring-shaped inner-layer resonance mass 11 jointly form four micro capacitors;
four arc-shaped outer layer driving mode displacement measuring electrodes 42 and four arc-shaped outer layer detection mode displacement measuring electrodes 52 are all bonded on the upper surface of the glass substrate, and the four arc-shaped outer layer driving mode displacement measuring electrodes 42 and the four arc-shaped outer layer detection mode displacement measuring electrodes 52 are all positioned between the circular ring-shaped inner layer resonance mass 11 and the circular ring-shaped outer layer resonance mass 12; the four arc-shaped outer layer driving mode displacement measuring electrodes 42 and the four arc-shaped outer layer detection mode displacement measuring electrodes 52 are symmetrically distributed around the central line of the cylindrical central anchor point 21 and are arranged in a staggered manner; the middle points of the four arc-shaped outer layer driving mode displacement measuring electrodes 42 are directly opposite to the tail end of the first third straight beam section 32a, the tail end of the third straight beam section 32a, the tail end of the fifth third straight beam section 32a and the tail end of the seventh third straight beam section 32 a; the positions of the middle points of the four arc-shaped outer-layer detection mode displacement measurement electrodes 52 are directly opposite to the tail ends of the second third straight beam section 32a, the fourth third straight beam section 32a, the sixth third straight beam section 32a and the eighth third straight beam section 32a one by one; the outer side surfaces of the four arc-shaped outer layer driving mode displacement measuring electrodes 42 and the inner side surface of the circular outer layer resonance mass 12 form four micro capacitors together; the outer side surfaces of the four arc-shaped outer layer detection mode displacement measurement electrodes 52 and the inner side surface of the circular outer layer resonance mass 12 form four micro capacitors together;
eight pairs of arc inner layer control electrodes 61 are all bonded on the upper surface of the glass substrate, and the eight pairs of arc inner layer control electrodes 61 are all positioned between the cylindrical central anchor point 21 and the circular ring-shaped inner layer resonance mass 11; eight pairs of arc inner control electrodes 61 are symmetrically distributed around the center line of the cylindrical central anchor point 21, and the eight pairs of arc inner control electrodes 61 are symmetrically distributed on two sides of the eight second straight beam sections 31c in a one-to-one correspondence manner; the outer side surfaces of the eight pairs of arc-shaped inner layer control electrodes 61 and the inner side surface of the circular inner layer resonance mass 11 form eight pairs of micro capacitors together; four pairs of micro capacitors corresponding to the positions of the four arc-shaped inner layer driving mode displacement measuring electrodes 41 are used as four pairs of inner layer driving mode exciting capacitors, and four pairs of micro capacitors corresponding to the positions of the four arc-shaped inner layer detection mode displacement measuring electrodes 51 are used as four pairs of inner layer detection mode force feedback capacitors;
eight pairs of arc outer layer control electrodes 62 are all bonded on the upper surface of the glass substrate, and the eight pairs of arc outer layer control electrodes 62 are all positioned outside the circular outer layer resonance mass 12; eight pairs of arc outer layer control electrodes 62 are symmetrically distributed around the center line of the cylindrical central anchor point 21, and the eight pairs of arc outer layer control electrodes 62 are symmetrically distributed on two sides of the eight third straight beam sections 32a in a one-to-one correspondence manner; the inner side surfaces of the eight pairs of arc-shaped outer layer control electrodes 62 and the outer side surface of the circular outer layer resonance mass 12 form eight pairs of micro capacitors together; four pairs of micro capacitors corresponding to the positions of the four arc-shaped outer layer driving mode displacement measuring electrodes 42 are used as four pairs of outer layer driving mode exciting capacitors, and four pairs of micro capacitors corresponding to the positions of the four arc-shaped outer layer detection mode displacement measuring electrodes 52 are used as four pairs of outer layer detection mode force feedback capacitors.
The height of the annular inner layer resonance mass 11, the height of the annular outer layer resonance mass 12, the height of the eight spoke-shaped inner elastic support suspension beams 31 and the height of the eight spoke-shaped outer elastic support suspension beams 32 are all consistent; the eight block-shaped peripheral anchor points 22 are of uniform size; the sizes of the eight spoke-shaped inner elastic support suspension beams 31 and the sizes of the eight spoke-shaped outer elastic support suspension beams 32 are consistent; the sizes of the four arc-shaped inner layer driving mode displacement measuring electrodes 41 and the sizes of the four arc-shaped inner layer detection mode displacement measuring electrodes 51 are consistent; the sizes of the four arc-shaped outer layer driving mode displacement measuring electrodes 42 and the sizes of the four arc-shaped outer layer detection mode displacement measuring electrodes 52 are consistent; the eight pairs of arc inner layer control electrodes 61 have the same size; the eight pairs of arc-shaped outer layer control electrodes 62 are of uniform size.
The ring-shaped inner layer resonance mass 11, the ring-shaped outer layer resonance mass 12, the cylindrical central anchor point 21, the eight block-shaped peripheral anchor points 22, the eight spoke-shaped inner side elastic support suspension beams 31 and the eight spoke-shaped outer side elastic support suspension beams 32 are all formed by processing monocrystalline silicon wafers, and the ring-shaped inner layer resonance mass 11, the ring-shaped outer layer resonance mass 12, the cylindrical central anchor point 21, the eight block-shaped peripheral anchor points 22, the eight spoke-shaped inner side elastic support suspension beams 31 and the eight spoke-shaped outer side elastic support suspension beams 32 are manufactured into a whole by adopting a bulk silicon processing technology.
The area of the inner side surface of each arc-shaped inner layer driving mode displacement measuring electrode 41 is equal to the sum of the areas of the outer side surfaces of a pair of corresponding arc-shaped inner layer control electrodes 61; the inner side surface area of each arc-shaped inner layer detection mode displacement measurement electrode 51 is equal to the sum of the outer side surface areas of the corresponding pair of arc-shaped inner layer control electrodes 61; the area of the outer side surface of each arc-shaped outer layer driving mode displacement measuring electrode 42 is equal to the sum of the areas of the inner side surfaces of the corresponding pair of arc-shaped outer layer control electrodes 62; the outer side surface area of each arc-shaped outer layer detection mode displacement measuring electrode 52 is equal to the sum of the inner side surface areas of the corresponding pair of arc-shaped outer layer control electrodes 62. In operation, the design can realize the function interchange of the measuring electrode and the control electrode.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that these are by way of example only, and that the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the spirit and scope of the invention, and these changes and modifications are within the scope of the invention.
Claims (4)
1. A have wide range and high accuracy dicyclo-type micromechanical gyroscope structure concurrently, its characterized in that: comprises a glass substrate, a resonator portion, and an electrode portion;
the resonance part comprises a circular ring-shaped inner layer resonance mass (11), a circular ring-shaped outer layer resonance mass (12), a cylindrical central anchor point (21), eight block-shaped peripheral anchor points (22), eight spoke-shaped inner elastic support suspension beams (31) and eight spoke-shaped outer elastic support suspension beams (32);
the electrode part comprises four arc inner layer driving modal displacement measuring electrodes (41), four arc outer layer driving modal displacement measuring electrodes (42), four arc inner layer detection modal displacement measuring electrodes (51), four arc outer layer detection modal displacement measuring electrodes (52), eight pairs of arc inner layer control electrodes (61) and eight pairs of arc outer layer control electrodes (62);
the annular inner layer resonance mass (11) and the annular outer layer resonance mass (12) are both placed on the upper surface of the glass substrate, and the center line of the annular inner layer resonance mass (11) and the center line of the annular outer layer resonance mass (12) are superposed with each other;
the cylindrical central anchor point (21) is bonded on the upper surface of the glass substrate, and the cylindrical central anchor point (21) is positioned in the inner cavity of the annular inner layer resonance mass (11); the central line of the cylindrical central anchor point (21) and the central line of the annular inner layer resonance mass (11) are superposed with each other;
the eight block-shaped peripheral anchor points (22) are all bonded on the upper surface of the glass substrate, and the eight block-shaped peripheral anchor points (22) are all positioned outside the circular outer layer resonance mass (12); the eight block-shaped peripheral anchor points (22) are symmetrically distributed around the central line of the cylindrical central anchor point (21);
the eight spoke-shaped inner elastic support suspension beams (31) are all positioned between the cylindrical central anchor point (21) and the circular ring-shaped inner layer resonance mass (11), and the eight spoke-shaped inner elastic support suspension beams (31) are symmetrically distributed around the central line of the cylindrical central anchor point (21);
each spoke-shaped inner elastic support suspension beam (31) is composed of a first straight beam section (31 a), a first S-shaped beam section (31 b) and a second straight beam section (31 c); the tail end of the first straight beam section (31 a) is fixed with the outer side surface of the cylindrical central anchor point (21); the tail end of the first S-shaped beam section (31 b) is fixed with the head end of the first straight beam section (31 a); the tail end of the second straight beam section (31 c) is fixed with the head end of the first S-shaped beam section (31 b); the head end of the second straight beam section (31 c) is fixed with the inner side surface of the circular inner layer resonance mass (11);
the eight spoke-shaped outer elastic support suspension beams (32) are located between the annular outer layer resonance mass (12) and the eight block-shaped peripheral anchor points (22) in a one-to-one correspondence mode, and the eight spoke-shaped outer elastic support suspension beams (32) are symmetrically distributed around the center line of the cylindrical central anchor point (21);
each spoke-shaped outer elastic support suspension beam (32) is composed of a third straight beam section (32 a), a second S-shaped beam section (32 b) and a fourth straight beam section (32 c); the tail end of the third straight beam section (32 a) is fixed with the outer side surface of the circular outer layer resonance mass (12); the tail end of the second S-shaped beam section (32 b) is fixed with the head end of the third straight beam section (32 a); the tail end of the fourth straight beam section (32 c) is fixed with the head end of the second S-shaped beam section (32 b); the head end of the fourth straight beam section (32 c) is fixed with the inner side surface of the corresponding block-shaped peripheral anchor point (22);
four arc-shaped inner layer driving modal displacement measuring electrodes (41) and four arc-shaped inner layer detection modal displacement measuring electrodes (51) are all bonded on the upper surface of the glass substrate, and the four arc-shaped inner layer driving modal displacement measuring electrodes (41) and the four arc-shaped inner layer detection modal displacement measuring electrodes (51) are all positioned between the circular ring-shaped inner layer resonance mass (11) and the circular ring-shaped outer layer resonance mass (12); the four arc-shaped inner layer driving mode displacement measuring electrodes (41) and the four arc-shaped inner layer detection mode displacement measuring electrodes (51) are symmetrically distributed around the central line of the cylindrical central anchor point (21) and are arranged in a staggered mode; the middle points of the four arc inner layer driving modal displacement measuring electrodes (41) are directly opposite to the head end of the first second straight beam section (31 c), the head end of the third second straight beam section (31 c), the head end of the fifth second straight beam section (31 c) and the head end of the seventh second straight beam section (31 c) one by one; the middle points of the four arc inner layer detection mode displacement measurement electrodes (51) are directly opposite to the head end of a second straight beam section (31 c), the head end of a fourth second straight beam section (31 c), the head end of a sixth second straight beam section (31 c) and the head end of an eighth second straight beam section (31 c) one by one; the inner side surfaces of the four arc-shaped inner-layer driving mode displacement measuring electrodes (41) and the outer side surface of the circular inner-layer resonance mass (11) form four micro capacitors together; the inner side surfaces of the four arc-shaped inner-layer detection mode displacement measurement electrodes (51) and the outer side surface of the circular ring-shaped inner-layer resonance mass (11) form four micro-capacitors together;
four arc-shaped outer layer driving modal displacement measuring electrodes (42) and four arc-shaped outer layer detection modal displacement measuring electrodes (52) are all bonded on the upper surface of the glass substrate, and the four arc-shaped outer layer driving modal displacement measuring electrodes (42) and the four arc-shaped outer layer detection modal displacement measuring electrodes (52) are all positioned between the circular ring-shaped inner layer resonance mass (11) and the circular ring-shaped outer layer resonance mass (12); the four arc-shaped outer layer driving mode displacement measuring electrodes (42) and the four arc-shaped outer layer detection mode displacement measuring electrodes (52) are symmetrically distributed around the central line of the cylindrical central anchor point (21) and are arranged in a staggered mode; the middle points of the four arc-shaped outer layer driving modal displacement measuring electrodes (42) are opposite to the tail end of the first third straight beam section (32 a), the tail end of the third straight beam section (32 a), the tail end of the fifth third straight beam section (32 a) and the tail end of the seventh third straight beam section (32 a) one by one; the middle points of the four arc-shaped outer layer detection mode displacement measurement electrodes (52) are opposite to the tail end of a second third straight beam section (32 a), the tail end of a fourth third straight beam section (32 a), the tail end of a sixth third straight beam section (32 a) and the tail end of an eighth third straight beam section (32 a) one by one; the outer side surfaces of the four arc-shaped outer layer driving mode displacement measuring electrodes (42) and the inner side surface of the circular outer layer resonance mass (12) form four micro capacitors together; the outer side surfaces of the four arc-shaped outer layer detection mode displacement measurement electrodes (52) and the inner side surface of the circular outer layer resonance mass (12) form four micro capacitors together;
eight pairs of arc inner layer control electrodes (61) are all bonded on the upper surface of the glass substrate, and the eight pairs of arc inner layer control electrodes (61) are all positioned between the cylindrical central anchor point (21) and the circular ring-shaped inner layer resonance mass (11); eight pairs of arc inner layer control electrodes (61) are symmetrically distributed around the central line of the cylindrical central anchor point (21), and the eight pairs of arc inner layer control electrodes (61) are symmetrically distributed on two sides of the eight second straight beam sections (31 c) in a one-to-one correspondence manner; the outer side surfaces of the eight pairs of arc-shaped inner layer control electrodes (61) and the inner side surface of the circular ring-shaped inner layer resonance mass (11) form eight pairs of micro-capacitors; four pairs of micro capacitors corresponding to the positions of the four arc-shaped inner layer driving modal displacement measuring electrodes (41) are used as four pairs of inner layer driving modal excitation capacitors, and four pairs of micro capacitors corresponding to the positions of the four arc-shaped inner layer detection modal displacement measuring electrodes (51) are used as four pairs of inner layer detection modal force feedback capacitors;
eight pairs of arc outer layer control electrodes (62) are all bonded on the upper surface of the glass substrate, and the eight pairs of arc outer layer control electrodes (62) are all positioned outside the circular outer layer resonance mass (12); eight pairs of arc-shaped outer layer control electrodes (62) are symmetrically distributed around the central line of the cylindrical central anchor point (21), and the eight pairs of arc-shaped outer layer control electrodes (62) are symmetrically distributed on two sides of the eight third straight beam sections (32 a) in a one-to-one correspondence manner; the inner side surfaces of the eight pairs of arc-shaped outer layer control electrodes (62) and the outer side surface of the circular outer layer resonance mass (12) form eight pairs of micro capacitors together; four pairs of micro capacitors corresponding to the positions of the four arc-shaped outer layer driving modal displacement measuring electrodes (42) are used as four pairs of outer layer driving modal excitation capacitors, and four pairs of micro capacitors corresponding to the positions of the four arc-shaped outer layer detection modal displacement measuring electrodes (52) are used as four pairs of outer layer detection modal force feedback capacitors.
2. The dual-ring micromechanical gyroscope structure with both large-scale and high-precision according to claim 1, characterized in that: the height of the annular inner layer resonance mass (11), the height of the annular outer layer resonance mass (12), the height of the eight spoke-shaped inner elastic support suspension beams (31) and the height of the eight spoke-shaped outer elastic support suspension beams (32) are all consistent; the sizes of the eight block-shaped peripheral anchor points (22) are consistent; the sizes of the eight spoke-shaped inner elastic support suspension beams (31) and the sizes of the eight spoke-shaped outer elastic support suspension beams (32) are consistent; the sizes of the four arc-shaped inner layer driving mode displacement measuring electrodes (41) and the sizes of the four arc-shaped inner layer detection mode displacement measuring electrodes (51) are consistent; the sizes of the four arc-shaped outer layer driving modal displacement measuring electrodes (42) and the sizes of the four arc-shaped outer layer detection modal displacement measuring electrodes (52) are consistent; the sizes of the eight pairs of arc inner layer control electrodes (61) are consistent; the eight pairs of arc-shaped outer control electrodes (62) are of uniform size.
3. A dual-ring micromechanical gyroscope structure with both large-scale and high-precision according to claim 1 or 2, characterized in that: the ring-shaped inner layer resonance mass (11), the ring-shaped outer layer resonance mass (12), the cylindrical center anchor point (21), the eight block-shaped peripheral anchor points (22), the eight spoke-shaped inner side elastic support suspension beams (31), the eight spoke-shaped outer side elastic support suspension beams (32) are all formed by processing monocrystalline silicon wafers, and the ring-shaped inner layer resonance mass (11), the ring-shaped outer layer resonance mass (12), the cylindrical center anchor point (21), the eight block-shaped peripheral anchor points (22), the eight spoke-shaped inner side elastic support suspension beams (31) and the eight spoke-shaped outer side elastic support suspension beams (32) are manufactured into a whole by adopting a bulk silicon processing technology.
4. A dual-ring micromechanical gyroscope structure with both large-scale and high-precision according to claim 1 or 2, characterized in that: the area of the inner side surface of each arc-shaped inner layer driving mode displacement measuring electrode (41) is equal to the sum of the areas of the outer side surfaces of a pair of corresponding arc-shaped inner layer control electrodes (61); the area of the inner side surface of each arc-shaped inner-layer detection mode displacement measuring electrode (51) is equal to the sum of the areas of the outer side surfaces of a pair of corresponding arc-shaped inner-layer control electrodes (61); the area of the outer side surface of each arc-shaped outer layer driving mode displacement measuring electrode (42) is equal to the sum of the areas of the inner side surfaces of a pair of corresponding arc-shaped outer layer control electrodes (62); the area of the outer side surface of each arc-shaped outer layer detection mode displacement measuring electrode (52) is equal to the sum of the areas of the inner side surfaces of a pair of corresponding arc-shaped outer layer control electrodes (62).
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| CN114543781B (en) * | 2022-03-04 | 2022-11-29 | 中北大学 | Micromechanical gyroscope structure with attitude correction function and external correction electrode |
| CN114543782B (en) * | 2022-03-04 | 2022-11-29 | 中北大学 | Micromechanical gyroscope structure with attitude correction function and built-in correction electrode |
| CN114459452B (en) * | 2022-03-15 | 2022-10-25 | 重庆天箭惯性科技股份有限公司 | Main and auxiliary dual-fluctuation annular single-structure gyroscope array |
| CN114485600B (en) * | 2022-03-15 | 2022-09-13 | 重庆天箭惯性科技股份有限公司 | Integrated gyro with multi-anchor-point high-strength multi-fluctuation annular structure |
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