CN116858206A - Dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth - Google Patents

Dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth Download PDF

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CN116858206A
CN116858206A CN202311130368.5A CN202311130368A CN116858206A CN 116858206 A CN116858206 A CN 116858206A CN 202311130368 A CN202311130368 A CN 202311130368A CN 116858206 A CN116858206 A CN 116858206A
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pairs
comb
shaped
electrodes
unilateral
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曹慧亮
刘学
刘俊
石云波
唐军
申冲
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North University of China
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North University of China
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

The invention relates to a micromechanical vibration gyro, in particular to a double-mode high-precision micromechanical gyro structure with ring topology comb teeth. The invention solves the problem of poor precision of the existing micromechanical vibration gyroscope. A dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth comprises a glass substrate, a harmonic oscillator part and an electrode part; the harmonic oscillator part comprises a cylindrical central anchor point, a circular ring-shaped resonance mass, eight spoke-shaped inner side elastic support suspension beams and eight spoke-shaped outer side elastic support suspension beams; the electrode part comprises eight pairs of arc inner electrodes, eight pairs of arc outer electrodes, eight pairs of unilateral comb-shaped electrodes A, eight pairs of unilateral comb-shaped electrodes B, eight pairs of unilateral comb-shaped electrodes C, eight pairs of unilateral comb-shaped electrodes D, eight pairs of unilateral comb-shaped electrodes E and eight pairs of unilateral comb-shaped electrodes F. The invention is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like.

Description

Dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth
Technical Field
The invention relates to a micromechanical vibration gyro, in particular to a double-mode high-precision micromechanical gyro structure with ring topology comb teeth.
Background
The micromechanical vibration gyro is an angular velocity sensitive device based on the Coriolis effect, has the advantages of small volume, light weight, low power consumption, long service life, mass production, low price and the like, is widely applied to the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like, and has extremely wide application prospect. The specific working principle of the micromechanical vibration gyro is as follows: when no angular velocity is input, the harmonic oscillator of the micromechanical vibration gyro works in a driving mode, and the output of the micromechanical vibration gyro is zero. When the angular velocity is input, the harmonic oscillator of the micromechanical vibration gyro works in a detection mode, and the micromechanical vibration gyro detects the input angular velocity in real time. However, practice shows that the existing micromechanical vibrating gyroscope has the problem of poor precision generally due to the limited geometric structure of a harmonic oscillator and the limited structure of an electrode. Therefore, a dual-mode high-precision micromechanical gyroscope structure with ring-shaped topological comb teeth is necessary to be invented, so that the problem that the precision of the existing micromechanical vibrating gyroscope is poor is solved.
Disclosure of Invention
The invention provides a dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth, which aims to solve the problem of poor precision of the existing micromechanical vibrating gyroscope.
The invention is realized by adopting the following technical scheme:
a dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth comprises a glass substrate, a harmonic oscillator part and an electrode part;
the harmonic oscillator part comprises a cylindrical central anchor point, a circular ring-shaped resonance mass, eight spoke-shaped inner side elastic support suspension beams and eight spoke-shaped outer side elastic support suspension beams;
the electrode part comprises eight pairs of arc inner electrodes, eight pairs of arc outer electrodes, eight pairs of single-side comb-tooth-shaped electrodes A, eight pairs of single-side comb-tooth-shaped electrodes B, eight pairs of single-side comb-tooth-shaped electrodes C, eight pairs of single-side comb-tooth-shaped electrodes D, eight pairs of single-side comb-tooth-shaped electrodes E and eight pairs of single-side comb-tooth-shaped electrodes F;
wherein, the cylindrical center anchor point is bonded on the upper surface of the glass substrate;
the circular ring-shaped resonance mass is placed on the upper surface of the glass substrate, and the central line of the circular ring-shaped resonance mass coincides with the central line of the cylindrical central anchor point;
the eight spoke-shaped inner side elastic support suspension beams are positioned between the cylindrical central anchor point and the annular resonance mass and are symmetrically distributed around the central line of the cylindrical central anchor point;
each spoke-shaped inner side elastic support cantilever beam consists of a straight beam section A, a pair of U-shaped beam sections and a straight beam section B; the tail end of the straight beam section A is fixed with the side face of the cylindrical central anchor point; the pair of U-shaped beam sections are enclosed together to form a closed rounded rectangle, and the tail ends of the pair of U-shaped beam sections are fixed with the head end of the straight beam section A; the tail ends of the straight beam sections B are respectively fixed with the head ends of a pair of U-shaped beam sections; the head end of the straight beam section B is fixed with the inner side surface of the circular ring-shaped resonance mass;
the eight spoke-shaped outer elastic support suspension beams are all positioned on the outer side of the annular resonance mass and are symmetrically distributed around the central line of the cylindrical central anchor point;
each spoke-shaped outer side elastic support cantilever beam consists of a straight beam section C, a pair of double-side comb-shaped beam sections A, a pair of double-side comb-shaped beam sections B and a pair of double-side comb-shaped beam sections C; the tail end of the straight beam section C is fixed with the outer side surface of the circular ring-shaped resonant mass; the pair of double-sided comb-shaped beam sections A are symmetrically fixed on two side surfaces of the straight beam section C; the pair of double-sided comb-shaped beam sections B are symmetrically fixed on two side surfaces of the straight beam section C, and the pair of double-sided comb-shaped beam sections B are positioned on the outer sides of the pair of double-sided comb-shaped beam sections A; the pair of double-sided comb-shaped beam sections C are symmetrically fixed on two side surfaces of the straight beam section C, and the pair of double-sided comb-shaped beam sections C are positioned on the outer sides of the pair of double-sided comb-shaped beam sections B;
eight pairs of arc inner layer electrodes are bonded on the upper surface of the glass substrate and are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of arc inner layer electrodes are symmetrically distributed on two sides of the eight straight beam sections B in a one-to-one correspondence manner, and the outer side surfaces of the eight pairs of arc inner layer electrodes and the inner side surfaces of the annular resonance mass jointly form eight pairs of micro capacitors A;
eight pairs of arc outer electrodes are bonded on the upper surface of the glass substrate and are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of arc-shaped outer electrodes are symmetrically distributed on two sides of the eight straight beam sections C in a one-to-one correspondence manner, and the inner side surfaces of the eight pairs of arc-shaped outer electrodes and the outer side surfaces of the annular resonance mass jointly form eight pairs of micro capacitors B;
eight pairs of unilateral comb-shaped electrodes A are bonded on the upper surface of the glass substrate and are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of unilateral comb-shaped electrodes A are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections A in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes A and eight pairs of bilateral comb-shaped beam sections A form eight pairs of micro capacitors C in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes B are bonded on the upper surface of the glass substrate and are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of unilateral comb-shaped electrodes B are embedded at the outer sides of the eight pairs of bilateral comb-shaped beam sections A in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped electrodes B and the eight pairs of bilateral comb-shaped beam sections A form eight pairs of micro capacitors D in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes C are bonded on the upper surface of the glass substrate and are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of unilateral comb-shaped electrodes C are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections B in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes C and eight pairs of bilateral comb-shaped beam sections B form eight pairs of micro capacitors E in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes D are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes D are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of unilateral comb-shaped electrodes D are embedded on the outer sides of eight pairs of bilateral comb-shaped beam sections B in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes D and eight pairs of bilateral comb-shaped beam sections B form eight pairs of micro capacitors F in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes E are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes E are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of unilateral comb-shaped electrodes E are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections C in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes E and eight pairs of bilateral comb-shaped beam sections C form eight pairs of micro capacitors G in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes F are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes F are symmetrically distributed around the central line of the cylindrical central anchor point; eight pairs of unilateral comb-shaped electrodes F are embedded on the outer sides of eight pairs of bilateral comb-shaped beam sections C in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes F and eight pairs of bilateral comb-shaped beam sections C form eight pairs of micro capacitors H in a one-to-one correspondence manner.
When the electric power source is in operation, the first pair of arc inner electrodes, the fifth pair of arc inner electrodes, the first pair of arc outer electrodes, the fifth pair of arc outer electrodes, the first pair of single-side comb-tooth electrodes A, the fifth pair of single-side comb-tooth electrodes A, the first pair of single-side comb-tooth electrodes B, the fifth pair of single-side comb-tooth electrodes B, the first pair of single-side comb-tooth electrodes C, the fifth pair of single-side comb-tooth electrodes C, the first pair of single-side comb-tooth electrodes D, the fifth pair of single-side comb-tooth electrodes D, the first pair of single-side comb-tooth electrodes E, the fifth pair of single-side comb-tooth electrodes E, the first pair of single-side comb-tooth electrodes F and the fifth pair of single-side comb-tooth electrodes F are all used as driving mode control electrodes. The first pair of micro-capacitors A, the fifth pair of micro-capacitors A, the first pair of micro-capacitors B, the fifth pair of micro-capacitors B, the first pair of micro-capacitors C, the fifth pair of micro-capacitors C, the first pair of micro-capacitors D, the fifth pair of micro-capacitors D, the first pair of micro-capacitors E, the fifth pair of micro-capacitors E, the first pair of micro-capacitors F, the fifth pair of micro-capacitors F, the first pair of micro-capacitors G, the fifth pair of micro-capacitors G, the first pair of micro-capacitors H and the fifth pair of micro-capacitors H are all used as driving mode excitation capacitances. The second pair of arc inner electrodes, the sixth pair of arc inner electrodes, the second pair of arc outer electrodes, the sixth pair of arc outer electrodes, the second pair of single-side comb-tooth electrodes A, the sixth pair of single-side comb-tooth electrodes A, the second pair of single-side comb-tooth electrodes B, the sixth pair of single-side comb-tooth electrodes B, the second pair of single-side comb-tooth electrodes C, the sixth pair of single-side comb-tooth electrodes C, the second pair of single-side comb-tooth electrodes D, the sixth pair of single-side comb-tooth electrodes D, the second pair of single-side comb-tooth electrodes E, the sixth pair of single-side comb-tooth electrodes E, the second pair of single-side comb-tooth electrodes F and the sixth pair of single-side comb-tooth electrodes F are all used as detection mode control electrodes. The third pair of arc inner electrodes, the seventh pair of arc inner electrodes, the third pair of arc outer electrodes, the seventh pair of arc outer electrodes, the third pair of single-side comb-tooth electrodes A, the seventh pair of single-side comb-tooth electrodes A, the third pair of single-side comb-tooth electrodes B, the seventh pair of single-side comb-tooth electrodes B, the third pair of single-side comb-tooth electrodes C, the seventh pair of single-side comb-tooth electrodes C, the third pair of single-side comb-tooth electrodes D, the seventh pair of single-side comb-tooth electrodes D, the third pair of single-side comb-tooth electrodes E, the seventh pair of single-side comb-tooth electrodes E, the third pair of single-side comb-tooth electrodes F and the seventh pair of single-side comb-tooth electrodes F are all used as driving mode displacement measuring electrodes. The fourth pair of arc inner electrodes, the eighth pair of arc inner electrodes, the fourth pair of arc outer electrodes, the eighth pair of arc outer electrodes, the fourth pair of single-side comb-tooth electrodes A, the eighth pair of single-side comb-tooth electrodes A, the fourth pair of single-side comb-tooth electrodes B, the eighth pair of single-side comb-tooth electrodes B, the fourth pair of single-side comb-tooth electrodes C, the eighth pair of single-side comb-tooth electrodes C, the fourth pair of single-side comb-tooth electrodes D, the eighth pair of single-side comb-tooth electrodes D, the fourth pair of single-side comb-tooth electrodes E, the eighth pair of single-side comb-tooth electrodes E, the fourth pair of single-side comb-tooth electrodes F and the eighth pair of single-side comb-tooth electrodes F are all used as detection modal displacement measuring electrodes. Sixteen pairs of driving mode control electrodes, sixteen pairs of detection mode control electrodes, sixteen pairs of driving mode displacement measurement electrodes and sixteen pairs of detection mode displacement measurement electrodes are all connected with a control system through metal wires.
The specific working process is as follows: the control system generates a driving voltage signal which is transmitted to sixteen pairs of driving mode excitation capacitors through metal wires, so that on one hand, annular resonance quality maintains four-antinode vibration with the annular wave number of 2 under the action of electrostatic force, and on the other hand, eight spoke-shaped outer side elastic support cantilever beams perform line vibration (the frequency of the line vibration is the same as that of the four-antinode vibration). In the vibration process, the control system measures the annular resonance mass and the displacement of the eight spoke-shaped outer elastic support cantilever beams in real time through sixteen pairs of driving mode displacement measuring electrodes and controls driving voltage signals in real time according to measurement results, so that the annular resonance mass and the displacement amplitude of the eight spoke-shaped outer elastic support cantilever beams are kept constant on one hand, and the annular resonance mass and the eight spoke-shaped outer elastic support cantilever beams vibrate on resonance frequency points of the annular resonance mass and the eight spoke-shaped outer elastic support cantilever beams on the other hand. When no angular velocity is input, under the excitation of sixteen pairs of driving mode excitation capacitors, the annular resonant mass makes four antinode bending vibration in the plane by the driving mode, the eight spoke-shaped outer elastic support cantilever beams perform linear vibration (the frequency of the linear vibration is the same as that of the four antinode bending vibration), sixteen pairs of detection mode displacement measurement electrodes are positioned at the nodes of the four antinode bending vibration, and no detection voltage signal is generated by the sixteen pairs of detection mode displacement measurement electrodes. At this point, the output of the present invention is zero. When angular velocity is input, under the coupling action of the coriolis force, the annular resonant mass is subjected to four antinode bending vibration in a detection mode, the eight spoke-shaped outer elastic support cantilever beams are subjected to linear vibration (the frequency of the linear vibration is the same as that of the four antinode bending vibration), sixteen pairs of detection mode displacement measurement electrodes are positioned at antinodes of the four antinode bending vibration, sixteen pairs of detection mode displacement measurement electrodes generate detection voltage signals, and the detection voltage signals are related to the input angular velocity. At this time, the control system calculates the input angular velocity in real time based on the detected voltage signal. In the process, sixteen pairs of detection mode control electrodes are used for carrying out orthogonal control and force feedback control on the annular resonance mass and the eight spoke-shaped outer side elastic support cantilever beams.
Based on the process, the dual-mode high-precision micromechanical gyroscope structure with the ring-shaped topological comb teeth has the following advantages by adopting a brand new structure: firstly, the resonance quality of the two working modes (the driving mode and the detecting mode) is equal, so that on one hand, the resonance frequency matching of the two working modes (the driving mode and the detecting mode) is easier, and on the other hand, the damping natural matching of the two working modes (the driving mode and the detecting mode) is realized, and the precision is effectively improved. Secondly, the harmonic oscillator adopts a ring topology comb tooth structure, so that the harmonic oscillator can work in a film pressing state and a film sliding state (the ring-shaped resonance mass works in the film pressing state, the eight spoke-shaped outer elastic support cantilever beams work in the film sliding state, and the film sliding state has better linearity compared with the film pressing state), and the precision is further improved.
The invention effectively solves the problem of poor precision of the traditional micromechanical vibration gyro, and is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a partial schematic structure of fig. 1.
Fig. 3 is a schematic diagram of the structure of a harmonic oscillator section in the present invention.
Fig. 4 is a partial structural schematic diagram of fig. 3.
In the figure: 101-cylindrical center-comb-tooth electrode, 102-circular ring-shaped resonance mass, 103-straight beam section A, 104-U-beam section, 105-straight beam section B, 106-straight beam section C, 107-double-sided comb-tooth beam section A, 108-double-sided comb-tooth beam section B, 109-double-sided comb-tooth beam section C, 201-arc inner layer electrode, 202-arc outer layer electrode, 203-single-sided comb-tooth electrode A, 204-single-sided comb-tooth electrode B, 205-single-sided comb-tooth electrode C, 206-single-sided comb-tooth electrode D, 207-single-sided comb-tooth electrode E, 208-single-sided comb-tooth electrode F, 209-block-shaped anchor A, 210-block-shaped anchor B, 211-block-shaped anchor C, 212-block-shaped anchor D, 213-block-anchor E, 214-block-shaped anchor F, 215-block-shaped anchor G, 216-block-shaped anchor H, 217-block-shaped anchor I, 218-block-anchor J, 219-block-shaped anchor K, 220-block-shaped anchor L.
Detailed Description
A dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth comprises a glass substrate, a harmonic oscillator part and an electrode part;
the harmonic oscillator part comprises a cylindrical central anchor point 101, a circular ring-shaped resonant mass 102, eight spoke-shaped inner side elastic support suspension beams and eight spoke-shaped outer side elastic support suspension beams;
the electrode part comprises eight pairs of arc-shaped inner electrodes 201, eight pairs of arc-shaped outer electrodes 202, eight pairs of single-side comb-tooth-shaped electrodes A203, eight pairs of single-side comb-tooth-shaped electrodes B204, eight pairs of single-side comb-tooth-shaped electrodes C205, eight pairs of single-side comb-tooth-shaped electrodes D206, eight pairs of single-side comb-tooth-shaped electrodes E207 and eight pairs of single-side comb-tooth-shaped electrodes F208;
wherein, the cylindrical central anchor point 101 is bonded to the upper surface of the glass substrate;
the annular resonance mass 102 is arranged on the upper surface of the glass substrate, and the central line of the annular resonance mass 102 coincides with the central line of the cylindrical central anchor point 101;
the eight spoke-shaped inner side elastic support suspension beams are positioned between the cylindrical central anchor point 101 and the annular resonant mass 102, and are symmetrically distributed around the central line of the cylindrical central anchor point 101;
each spoke-shaped inner side elastic support cantilever beam consists of a straight beam section A103, a pair of U-shaped beam sections 104 and a straight beam section B105; the tail end of the straight beam section A103 is fixed with the side surface of the cylindrical central anchor point 101; the pair of U-shaped beam sections 104 are jointly enclosed to form a closed rounded rectangle, and the tail ends of the pair of U-shaped beam sections 104 are fixed with the head end of the straight beam section A103; the tail ends of the straight beam sections B105 are respectively fixed with the head ends of a pair of U-beam sections 104; the head end of the straight beam section B105 is fixed with the inner side surface of the circular ring-shaped resonant mass 102;
the eight spoke-shaped outer elastic support suspension beams are all positioned on the outer side of the annular resonant mass 102 and are symmetrically distributed around the central line of the cylindrical central anchor point 101;
each spoke-shaped outer side elastic support cantilever beam consists of a straight beam section C106, a pair of double-side comb-shaped beam sections A107, a pair of double-side comb-shaped beam sections B108 and a pair of double-side comb-shaped beam sections C109; the tail end of the straight beam section C106 is fixed with the outer side surface of the circular ring-shaped resonant mass 102; the pair of double-sided comb-shaped beam sections A107 are symmetrically fixed on two side surfaces of the straight beam section C106; the pair of double-sided comb-shaped beam sections B108 are symmetrically fixed on two side surfaces of the straight beam section C106, and the pair of double-sided comb-shaped beam sections B108 are positioned on the outer sides of the pair of double-sided comb-shaped beam sections A107; the pair of double-sided comb-shaped beam sections C109 are symmetrically fixed on two side surfaces of the straight beam section C106, and the pair of double-sided comb-shaped beam sections C109 are positioned on the outer sides of the pair of double-sided comb-shaped beam sections B108;
eight pairs of arc-shaped inner layer electrodes 201 are bonded on the upper surface of the glass substrate, and the eight pairs of arc-shaped inner layer electrodes 201 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of arc-shaped inner layer electrodes 201 are symmetrically distributed on two sides of the eight straight beam sections B105 in a one-to-one correspondence manner, and the outer side surfaces of the eight pairs of arc-shaped inner layer electrodes 201 and the inner side surfaces of the annular resonant masses 102 jointly form eight pairs of micro capacitors A;
eight pairs of arc-shaped outer electrodes 202 are bonded on the upper surface of the glass substrate, and the eight pairs of arc-shaped outer electrodes 202 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of arc-shaped outer electrodes 202 are symmetrically distributed on two sides of the eight straight beam sections C106 in a one-to-one correspondence manner, and the inner side surfaces of the eight pairs of arc-shaped outer electrodes 202 and the outer side surfaces of the annular resonant masses 102 jointly form eight pairs of micro capacitors B;
eight pairs of unilateral comb-shaped electrodes A203 are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes A203 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of unilateral comb-shaped electrodes A203 are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections A107 in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes A203 and eight pairs of bilateral comb-shaped beam sections A107 form eight pairs of micro capacitors C in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes B204 are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes B204 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of unilateral comb-shaped electrodes B204 are embedded on the outer sides of eight pairs of bilateral comb-shaped beam sections A107 in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes B204 and eight pairs of bilateral comb-shaped beam sections A107 form eight pairs of micro capacitors D in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes C205 are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes C205 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of unilateral comb-shaped electrodes C205 are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections B108 in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes C205 and eight pairs of bilateral comb-shaped beam sections B108 form eight pairs of micro capacitors E in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes D206 are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes D206 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of unilateral comb-shaped electrodes D206 are embedded on the outer sides of the eight pairs of bilateral comb-shaped beam sections B108 in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes D206 and eight pairs of bilateral comb-shaped beam sections B108 form eight pairs of micro capacitors F in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes E207 are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes E207 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of unilateral comb-shaped electrodes E207 are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections C109 in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes E207 and eight pairs of bilateral comb-shaped beam sections C109 form eight pairs of micro capacitors G in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes F208 are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes F208 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of unilateral comb-shaped electrodes F208 are embedded on the outer sides of the eight pairs of bilateral comb-shaped beam sections C109 in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes F208 and eight pairs of bilateral comb-shaped beam sections C109 form eight pairs of micro capacitors H in a one-to-one correspondence manner.
The electrode part also comprises eight pairs of block anchors A209, eight pairs of block anchors B210, eight pairs of block anchors C211, eight pairs of block anchors D212, eight pairs of block anchors E213, eight pairs of block anchors F214, eight pairs of block anchors G215, eight pairs of block anchors H216, eight pairs of block anchors I217, eight pairs of block anchors J218, eight pairs of block anchors K219 and eight pairs of block anchors L220; eight pairs of block anchor points A209 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points A209 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points A209 are fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes A203 in a one-to-one correspondence manner; eight pairs of block anchor points B210 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points B210 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points B210 are fixed at the head ends of eight pairs of unilateral comb-shaped electrodes A203 in a one-to-one correspondence manner; eight pairs of block anchor points C211 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points C211 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points C211 are correspondingly fixed at the tail ends of the eight pairs of unilateral comb-shaped electrodes B204 one by one; eight pairs of block anchor points D212 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points D212 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points D212 are fixed at the head ends of eight pairs of unilateral comb-shaped electrodes B204 in a one-to-one correspondence manner; eight pairs of block anchor points E213 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points E213 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points E213 are correspondingly fixed at the tail ends of the eight pairs of unilateral comb-shaped electrodes C205; eight pairs of block anchor points F214 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points F214 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points F214 are fixed at the head ends of eight pairs of unilateral comb-shaped electrodes C205 in a one-to-one correspondence manner; eight pairs of block anchor points G215 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points G215 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points G215 are correspondingly fixed at the tail ends of the eight pairs of unilateral comb-shaped electrodes D206; eight pairs of block anchor points H216 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points H216 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points H216 are fixed at the head ends of eight pairs of unilateral comb-shaped electrodes D206 in a one-to-one correspondence manner; eight pairs of block anchor points I217 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points I217 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points I217 are correspondingly fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes E207; eight pairs of block anchor points J218 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points J218 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points J218 are fixed at the head ends of eight pairs of unilateral comb-shaped electrodes E207 in a one-to-one correspondence manner; eight pairs of block anchor points K219 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points K219 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points K219 are fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes F208 in a one-to-one correspondence manner; eight pairs of block anchor points L220 are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points L220 are symmetrically distributed around the central line of the cylindrical central anchor point 101; eight pairs of block anchor points L220 are fixed at the head ends of eight pairs of unilateral comb-shaped electrodes F208 in a one-to-one correspondence.
The height of the cylindrical center anchor point 101, the height of the annular resonant mass 102, the heights of the eight spoke-shaped inner side elastic support hanging beams and the heights of the eight spoke-shaped outer side elastic support hanging beams are all identical; the sizes of the eight spoke-shaped inner side elastic support suspension beams are consistent; the sizes of the eight spoke-shaped outer elastic support cantilever beams are consistent, the lengths of the eight pairs of double-side comb-shaped beam sections B108 are correspondingly larger than those of the eight pairs of double-side comb-shaped beam sections A107, and the lengths of the eight pairs of double-side comb-shaped beam sections C109 are correspondingly larger than those of the eight pairs of double-side comb-shaped beam sections B108; eight pairs of arc-shaped inner layer electrodes 201 are uniform in size; the eight pairs of arc-shaped outer electrodes 202 have the same size, and the inner side areas of the eight pairs of arc-shaped outer electrodes 202 are equal to the outer side areas of the eight pairs of arc-shaped inner electrodes 201 in a one-to-one correspondence; the eight pairs of unilateral comb-shaped electrodes A203 have the same size; the sizes of the eight pairs of single-side comb-shaped electrodes B204 are consistent, and the lengths of the eight pairs of single-side comb-shaped electrodes B204 are equal to the lengths of the eight pairs of single-side comb-shaped electrodes A203 in a one-to-one correspondence manner; the sizes of the eight pairs of unilateral comb-shaped electrodes C205 are consistent, and the lengths of the eight pairs of unilateral comb-shaped electrodes C205 are correspondingly larger than those of the eight pairs of unilateral comb-shaped electrodes B204 one by one; the sizes of the eight pairs of unilateral comb-shaped electrodes D206 are consistent, and the lengths of the eight pairs of unilateral comb-shaped electrodes D206 are equal to the lengths of the eight pairs of unilateral comb-shaped electrodes C205 in a one-to-one correspondence manner; the sizes of the eight pairs of single-side comb-shaped electrodes E207 are consistent, and the lengths of the eight pairs of single-side comb-shaped electrodes E207 are correspondingly larger than those of the eight pairs of single-side comb-shaped electrodes D206 one by one; the eight pairs of single-sided comb-shaped electrodes F208 are uniform in size, and the lengths of the eight pairs of single-sided comb-shaped electrodes F208 are equal to the lengths of the eight pairs of single-sided comb-shaped electrodes E207 in one-to-one correspondence.
The cylindrical central anchor point 101, the annular resonance mass 102, the eight spoke-shaped inner side elastic support suspension beams and the eight spoke-shaped outer side elastic support suspension beams are all formed by processing monocrystalline silicon wafers, and the cylindrical central anchor point 101, the annular resonance mass 102, the eight spoke-shaped inner side elastic support suspension beams and the eight spoke-shaped outer side elastic support suspension beams are manufactured into a whole by adopting a bulk silicon processing technology.
The size of the eight pairs of block anchors a209, the size of the eight pairs of block anchors B210, the size of the eight pairs of block anchors C211, the size of the eight pairs of block anchors D212, the size of the eight pairs of block anchors E213, the size of the eight pairs of block anchors F214, the size of the eight pairs of block anchors G215, the size of the eight pairs of block anchors H216, the size of the eight pairs of block anchors I217, the size of the eight pairs of block anchors J218, the size of the eight pairs of block anchors K219, the size of the eight pairs of block anchors L220 are all identical.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that these are by way of example only, and the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the principles and spirit of the invention, but such changes and modifications fall within the scope of the invention.

Claims (5)

1. A double-mode high-precision micromechanical gyroscope structure with ring topology comb teeth is characterized in that: comprises a glass substrate, a harmonic oscillator part and an electrode part;
the harmonic oscillator part comprises a cylindrical central anchor point (101), a circular ring-shaped resonant mass (102), eight spoke-shaped inner side elastic support suspension beams and eight spoke-shaped outer side elastic support suspension beams;
the electrode part comprises eight pairs of arc-shaped inner electrodes (201), eight pairs of arc-shaped outer electrodes (202), eight pairs of single-side comb-tooth-shaped electrodes A (203), eight pairs of single-side comb-tooth-shaped electrodes B (204), eight pairs of single-side comb-tooth-shaped electrodes C (205), eight pairs of single-side comb-tooth-shaped electrodes D (206), eight pairs of single-side comb-tooth-shaped electrodes E (207) and eight pairs of single-side comb-tooth-shaped electrodes F (208);
wherein, the cylindrical central anchor point (101) is bonded to the upper surface of the glass substrate;
the annular resonance mass (102) is arranged on the upper surface of the glass substrate, and the central line of the annular resonance mass (102) coincides with the central line of the cylindrical central anchor point (101);
the eight spoke-shaped inner side elastic support cantilever beams are positioned between the cylindrical central anchor point (101) and the annular resonance mass (102), and are symmetrically distributed around the central line of the cylindrical central anchor point (101);
each spoke-shaped inner side elastic support cantilever beam consists of a straight beam section A (103), a pair of U-shaped beam sections (104) and a straight beam section B (105); the tail end of the straight beam section A (103) is fixed with the side surface of the cylindrical central anchor point (101); the pair of U-shaped beam sections (104) are jointly enclosed to form a closed round rectangle, and the tail ends of the pair of U-shaped beam sections (104) are fixed with the head end of the straight beam section A (103); the tail ends of the straight beam sections B (105) are respectively fixed with the head ends of a pair of U-shaped beam sections (104); the head end of the straight beam section B (105) is fixed with the inner side surface of the circular ring-shaped resonant mass (102);
the eight spoke-shaped outer elastic support suspension beams are all positioned at the outer side of the annular resonant mass (102) and symmetrically distributed around the central line of the cylindrical central anchor point (101);
each spoke-shaped outer elastic support cantilever beam consists of a straight beam section C (106), a pair of double-sided comb-tooth beam sections A (107), a pair of double-sided comb-tooth beam sections B (108) and a pair of double-sided comb-tooth beam sections C (109); the tail end of the straight beam section C (106) is fixed with the outer side surface of the circular ring-shaped resonant mass (102); the pair of double-sided comb-tooth beam sections A (107) are symmetrically fixed on two side surfaces of the straight beam section C (106); the pair of double-sided comb-tooth-shaped beam sections B (108) are symmetrically fixed on two side surfaces of the straight beam section C (106), and the pair of double-sided comb-tooth-shaped beam sections B (108) are positioned on the outer sides of the pair of double-sided comb-tooth-shaped beam sections A (107); the pair of double-sided comb-tooth beam sections C (109) are symmetrically fixed on two side surfaces of the straight beam section C (106), and the pair of double-sided comb-tooth beam sections C (109) are positioned on the outer sides of the pair of double-sided comb-tooth beam sections B (108);
eight pairs of arc-shaped inner layer electrodes (201) are bonded on the upper surface of the glass substrate, and the eight pairs of arc-shaped inner layer electrodes (201) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of arc inner layer electrodes (201) are symmetrically distributed on two sides of the eight straight beam sections B (105) in a one-to-one correspondence manner, and the outer side surfaces of the eight pairs of arc inner layer electrodes (201) and the inner side surfaces of the annular resonance masses (102) jointly form eight pairs of micro capacitors A;
eight pairs of arc-shaped outer electrodes (202) are bonded on the upper surface of the glass substrate, and the eight pairs of arc-shaped outer electrodes (202) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of arc-shaped outer electrodes (202) are symmetrically distributed on two sides of the eight straight beam sections C (106) in a one-to-one correspondence manner, and the inner side surfaces of the eight pairs of arc-shaped outer electrodes (202) and the outer side surfaces of the annular resonant masses (102) jointly form eight pairs of micro capacitors B;
eight pairs of unilateral comb-shaped electrodes A (203) are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes A (203) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of unilateral comb-shaped electrodes A (203) are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections A (107) in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped electrodes A (203) and the eight pairs of bilateral comb-shaped beam sections A (107) form eight pairs of micro capacitors C in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes B (204) are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes B (204) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of unilateral comb-shaped electrodes B (204) are embedded outside the eight pairs of bilateral comb-shaped beam sections A (107) in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped electrodes B (204) and the eight pairs of bilateral comb-shaped beam sections A (107) form eight pairs of micro capacitors D in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes C (205) are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes C (205) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of unilateral comb-shaped electrodes C (205) are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections B (108) in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped electrodes C (205) and the eight pairs of bilateral comb-shaped beam sections B (108) form eight pairs of micro capacitors E in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes D (206) are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes D (206) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of unilateral comb-shaped electrodes D (206) are embedded outside the eight pairs of bilateral comb-shaped beam sections B (108) in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped electrodes D (206) and the eight pairs of bilateral comb-shaped beam sections B (108) form eight pairs of micro capacitors F in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes E (207) are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes E (207) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of unilateral comb-shaped electrodes E (207) are embedded into the inner sides of eight pairs of bilateral comb-shaped beam sections C (109) in a one-to-one correspondence manner, and eight pairs of unilateral comb-shaped electrodes E (207) and eight pairs of bilateral comb-shaped beam sections C (109) form eight pairs of micro capacitors G in a one-to-one correspondence manner;
eight pairs of unilateral comb-shaped electrodes F (208) are bonded on the upper surface of the glass substrate, and the eight pairs of unilateral comb-shaped electrodes F (208) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of unilateral comb-shaped electrodes F (208) are embedded outside the eight pairs of bilateral comb-shaped beam sections C (109) in a one-to-one correspondence manner, and the eight pairs of unilateral comb-shaped electrodes F (208) and the eight pairs of bilateral comb-shaped beam sections C (109) form eight pairs of micro capacitors H in a one-to-one correspondence manner.
2. The dual-mode high-precision micromechanical gyroscope structure with ring-topology comb teeth according to claim 1, characterized in that: the electrode part also comprises eight pairs of block anchors A (209), eight pairs of block anchors B (210), eight pairs of block anchors C (211), eight pairs of block anchors D (212), eight pairs of block anchors E (213), eight pairs of block anchors F (214), eight pairs of block anchors G (215), eight pairs of block anchors H (216), eight pairs of block anchors I (217), eight pairs of block anchors J (218), eight pairs of block anchors K (219), and eight pairs of block anchors L (220); eight pairs of block anchor points A (209) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points A (209) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points A (209) are correspondingly fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes A (203); eight pairs of block anchor points B (210) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points B (210) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points B (210) are correspondingly fixed at the head ends of eight pairs of unilateral comb-shaped electrodes A (203); eight pairs of block anchor points C (211) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points C (211) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points C (211) are correspondingly fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes B (204); eight pairs of block anchor points D (212) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points D (212) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points D (212) are correspondingly fixed at the head ends of eight pairs of unilateral comb-shaped electrodes B (204); eight pairs of block anchor points E (213) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points E (213) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points E (213) are correspondingly fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes C (205); eight pairs of block anchor points F (214) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points F (214) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points F (214) are correspondingly fixed at the head ends of eight pairs of unilateral comb-shaped electrodes C (205); eight pairs of block anchor points G (215) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points G (215) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points G (215) are correspondingly fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes D (206); eight pairs of block anchor points H (216) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points H (216) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points H (216) are correspondingly fixed at the head ends of eight pairs of unilateral comb-shaped electrodes D (206); eight pairs of block anchor points I (217) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points I (217) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points I (217) are correspondingly fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes E (207); eight pairs of block anchor points J (218) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points J (218) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points J (218) are correspondingly fixed at the head ends of eight pairs of unilateral comb-shaped electrodes E (207); eight pairs of block anchor points K (219) are bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points K (219) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points K (219) are fixed at the tail ends of eight pairs of unilateral comb-shaped electrodes F (208) in a one-to-one correspondence manner; eight pairs of block anchor points L (220) are bonded on the upper surface of the glass substrate, and the eight pairs of block anchor points L (220) are symmetrically distributed around the central line of the cylindrical central anchor point (101); eight pairs of block anchor points L (220) are fixed at the head ends of eight pairs of unilateral comb-shaped electrodes F (208) in a one-to-one correspondence.
3. A dual mode high precision micromechanical gyroscope structure having ring topology comb teeth according to claim 1 or 2, characterized in that: the height of the cylindrical center anchor point (101), the height of the annular resonant mass (102), the heights of the eight spoke-shaped inner side elastic support hanging beams and the heights of the eight spoke-shaped outer side elastic support hanging beams are all consistent; the sizes of the eight spoke-shaped inner side elastic support suspension beams are consistent; the sizes of the eight spoke-shaped outer elastic support cantilever beams are consistent, the lengths of the eight pairs of double-side comb-shaped beam sections B (108) are correspondingly larger than those of the eight pairs of double-side comb-shaped beam sections A (107), and the lengths of the eight pairs of double-side comb-shaped beam sections C (109) are correspondingly larger than those of the eight pairs of double-side comb-shaped beam sections B (108); the eight pairs of arc inner layer electrodes (201) are consistent in size; the eight pairs of arc-shaped outer electrodes (202) are consistent in size, and the inner side areas of the eight pairs of arc-shaped outer electrodes (202) are equal to the outer side areas of the eight pairs of arc-shaped inner electrodes (201) in a one-to-one correspondence manner; the eight pairs of unilateral comb-shaped electrodes A (203) have the same size; the sizes of the eight pairs of unilateral comb-shaped electrodes B (204) are consistent, and the lengths of the eight pairs of unilateral comb-shaped electrodes B (204) are equal to the lengths of the eight pairs of unilateral comb-shaped electrodes A (203) in a one-to-one correspondence manner; the sizes of the eight pairs of unilateral comb-shaped electrodes C (205) are consistent, and the lengths of the eight pairs of unilateral comb-shaped electrodes C (205) are correspondingly larger than those of the eight pairs of unilateral comb-shaped electrodes B (204); the sizes of the eight pairs of unilateral comb-shaped electrodes D (206) are consistent, and the lengths of the eight pairs of unilateral comb-shaped electrodes D (206) are equal to the lengths of the eight pairs of unilateral comb-shaped electrodes C (205) in a one-to-one correspondence manner; the sizes of the eight pairs of single-side comb-shaped electrodes E (207) are consistent, and the lengths of the eight pairs of single-side comb-shaped electrodes E (207) are correspondingly larger than those of the eight pairs of single-side comb-shaped electrodes D (206); the eight pairs of single-side comb-shaped electrodes F (208) are uniform in size, and the lengths of the eight pairs of single-side comb-shaped electrodes F (208) are equal to the lengths of the eight pairs of single-side comb-shaped electrodes E (207) in a one-to-one correspondence.
4. A dual mode high precision micromechanical gyroscope structure having ring topology comb teeth according to claim 1 or 2, characterized in that: the cylindrical center anchor point (101), the annular resonance mass (102), the eight spoke-shaped inner side elastic support suspension beams and the eight spoke-shaped outer side elastic support suspension beams are all formed by processing monocrystalline silicon wafers, and the cylindrical center anchor point (101), the annular resonance mass (102), the eight spoke-shaped inner side elastic support suspension beams and the eight spoke-shaped outer side elastic support suspension beams are manufactured into a whole by adopting a bulk silicon processing technology.
5. The dual-mode high-precision micromechanical gyroscope structure with ring-topology comb teeth according to claim 2, characterized in that: the size of the eight pairs of block anchors A (209), the size of the eight pairs of block anchors B (210), the size of the eight pairs of block anchors C (211), the size of the eight pairs of block anchors D (212), the size of the eight pairs of block anchors E (213), the size of the eight pairs of block anchors F (214), the size of the eight pairs of block anchors G (215), the size of the eight pairs of block anchors H (216), the size of the eight pairs of block anchors I (217), the size of the eight pairs of block anchors J (218), the size of the eight pairs of block anchors K (219), and the size of the eight pairs of block anchors L (220) are all consistent.
CN202311130368.5A 2023-09-04 2023-09-04 Dual-mode high-precision micromechanical gyroscope structure with ring topology comb teeth Pending CN116858206A (en)

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