CN106643685A - Brand new U-shaped foldable beam silicon micro-annular vibration gyroscope - Google Patents
Brand new U-shaped foldable beam silicon micro-annular vibration gyroscope Download PDFInfo
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- CN106643685A CN106643685A CN201610973782.6A CN201610973782A CN106643685A CN 106643685 A CN106643685 A CN 106643685A CN 201610973782 A CN201610973782 A CN 201610973782A CN 106643685 A CN106643685 A CN 106643685A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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Abstract
The invention relates to a silicon micro-annular vibration gyroscope and particularly relates to a brand new U-shaped foldable beam silicon micro-annular vibration gyroscope, which aims to solve the problems of low measuring precision and low mechanical sensitivity of the present silicon micro-annular vibration gyroscope. The brand new U-shaped foldable beam silicon micro-annular vibration gyroscope comprises a glass substrate, a harmonic oscillator part and an electrode part, wherein the harmonic oscillator part comprises an annular resonance mass, a cylindrical central anchor point and spoke-shaped flexible support cantilevers; the electrode part comprises an outer arc-shaped electrode and an inner arc-shaped electrode; the cylindrical central anchor point is located in an inner chamber of the annular resonance mass; eight spoke-shaped flexible support cantilevers are arranged; each of the spoke-shaped flexible support cantilevers is composed of a first sheet flexible support cantilever, a square wave flexible support cantilever and a second sheet flexible support cantilever. The brand new U-shaped foldable beam silicon micro-annular vibration gyroscope is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer goods, electronics, and the like.
Description
Technical field
The present invention relates to silicon micro-loop shape oscillation gyro, specifically a kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro.
Background technology
Silicon micro-loop shape oscillation gyro is based on a kind of angular movement sensor of Coriolis effect, with small volume, matter
Measure light, low in energy consumption, life-span length, can be mass, low price the advantages of, be widely used in weapon guidance, Aero-Space, biology
The fields such as medical science, consumer electronic, with being extremely widely applied prospect.The concrete operating principle of silicon micro-loop shape oscillation gyro is such as
Under：When not having turning rate input, the harmonic oscillator of silicon micro-loop shape oscillation gyro works under driven-mode, the micro- annular vibration top of silicon
Spiral shell is output as zero.When there is turning rate input, the harmonic oscillator of silicon micro-loop shape oscillation gyro works under sensed-mode, silicon micro-loop
Shape oscillation gyro measures in real time input angular velocity.But practice have shown that, existing silicon micro-loop shape oscillation gyro is due to its harmonic oscillator
The structure of geometry and electrode is limited, and generally existing certainty of measurement is low, the problem that mechanical sensitivity is low.It is necessary invention for this
A kind of brand-new silicon micro-loop shape oscillation gyro, to solve, existing silicon micro-loop shape oscillation gyro certainty of measurement is low, mechanical sensitivity is low
Problem.
The content of the invention
The present invention is in order to solve the problems, such as that existing silicon micro-loop shape oscillation gyro certainty of measurement is low, mechanical sensitivity is low, there is provided
A kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro.
The present invention adopts the following technical scheme that realization：
A kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro, including substrate of glass, resonance subdivision, electrode part；
The resonance subdivision includes circular tuned mass, cylindrical center anchor point, spoke-like resilient support overarm；
The electrode portion point includes outer arcuate electrode, arc electrode；
Wherein, circular tuned mass is placed in the upper surface of substrate of glass；
Cylindrical center anchor point is bonded to the upper surface of substrate of glass；Cylindrical center anchor point is located at the interior of circular tuned mass
Chamber, and the axis of cylindrical center anchor point overlaps with the axis of circular tuned mass；Spoke-like resilient support overarm
Number is eight, and the overarm of eight spoke-like resilient support is around the axis equidistant arrangement of cylindrical center anchor point；
The overarm of each spoke-like resilient support by the resilient support overarm of the first lamellar, square-wave-shaped resilient support overarm, second
Shape resilient support overarm is constituted；The tail end of the first lamellar resilient support overarm is fixed with the lateral surface of cylindrical center anchor point；Side
The head end that the tail end of wavy resilient support overarm flexibly supports overarm with the first lamellar is fixed；Second sheet like flexible supports overarm
The head end that tail end flexibly supports overarm with square-wave-shaped is fixed；Second sheet like flexible supports the head end and circular tuned mass of overarm
Medial surface fix；
The number of outer arcuate electrode is eight, and eight outer arcuate electrodes are bonded to the upper surface of substrate of glass；Eight outer arcs
Shape electrode is respectively positioned on the outside of circular tuned mass, and the medial surface of eight outer arcuate electrodes is outer with circular tuned mass
Side is collectively forming eight microcapacitors；Eight outer arcuate electrodes surround the axis equidistant arrangement of cylindrical center anchor point, and eight
The point midway of individual outer arcuate electrode supports the head end of overarm just right one by one with eight the second sheet like flexible；
The number of arc electrode is the upper surface that arc-shaped electrode is bonded to substrate of glass in eight pairs, and eight pairs；Eight pairs of inner arcs
It is interior with circular tuned mass that shape electrode is respectively positioned on the lateral surface of arc-shaped electrode in the inner chamber of circular tuned mass, and eight pairs
Side is collectively forming eight pairs of microcapacitors；Arc-shaped electrode surrounds the axis equidistant arrangement of cylindrical center anchor point, and eight in eight pairs
Internally arc-shaped electrode is symmetrically distributed in correspondingly the both sides that eight the second sheet like flexible support overarm.
During work, wherein four outer arcuate electrodes are used as drive electrode, four additional outer arcuate electrode as detecting electrode,
And four drive electrodes and four detecting electrodes are staggered.Arc-shaped electrode is used as coordination electrode in eight pairs.The present invention is in control
The four antinodes vibration that ring wave number is 2 is maintained in the presence of system.Specific work process is as follows：When there is no turning rate input,
The present invention makees four antinode bending vibration in face under the excitation of four drive electrodes with driven-mode（As shown in Figure 5）, now four
Individual detecting electrode is located at the node of four antinode bending vibrations, and silicon micro-loop shape oscillation gyro is output as zero.When there is angular velocity defeated
Fashionable, the present invention makees four antinode bending vibration in face under coriolis force coupling with sensed-mode（As shown in Figure 6）, now
Four detecting electrodes are located at the antinode of four antinode bending vibrations, and Oscillation Amplitude is related to input angular velocity, and silicon micro-loop shape is shaken
Dynamic gyro measures in real time input angular velocity.
Based on said process, a kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro of the present invention is by adopting
Brand-new U-shaped folds girder construction, possesses following advantage：First, the present invention is in two operation modes（Driven-mode and detection mould
State）Under tuned mass it is equal, on the one hand two operation modes are thus caused（Driven-mode and sensed-mode）Resonant frequency
Matching is easier, and on the other hand realizes two operation modes（Driven-mode and sensed-mode）Damping Natural matching.Second,
The resonance structure of the present invention is an entirety, so that the impact resistance of silicon micro-loop shape oscillation gyro is greatly improved.Therefore,
The present invention greatly reduces the drift caused because of fabrication error and variation of ambient temperature, so as to effectively increase the micro- annular vibration of silicon
The certainty of measurement and mechanical sensitivity of gyro.
Present configuration rationally, design ingenious, efficiently solve that existing silicon micro-loop shape oscillation gyro certainty of measurement is low, machinery
The low problem of sensitivity, it is adaptable to the field such as weapon guidance, Aero-Space, biomedicine, consumer electronic.
Description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of resonance subdivision in the present invention.
Fig. 3 is the structural representation of spoke-like resilient support overarm in the present invention.
Fig. 4 is the structural representation of electrode part in the present invention.
Fig. 5 is vibration shape schematic diagram of the present invention under driven-mode.
Fig. 6 is vibration shape schematic diagram of the present invention under sensed-mode.
In figure：1- annular shape tuned mass, 2- cylindrical center anchor points, the resilient support overarm of 3- spoke-like, 4- outer arcuates
Electrode, 5- arc electrodes, the resilient support overarm of the lamellars of 31- first, the resilient support overarm of 32- square-wave-shapeds, 33- the second lamellar bullets
Property support overarm.
Specific embodiment
A kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro, including substrate of glass, resonance subdivision, electrode part；
The resonance subdivision includes circular tuned mass 1, cylindrical center anchor point 2, spoke-like resilient support overarm 3；
The electrode portion point includes outer arcuate electrode 4, arc electrode 5；
Wherein, circular tuned mass 1 is placed in the upper surface of substrate of glass；
Cylindrical center anchor point 2 is bonded to the upper surface of substrate of glass；Cylindrical center anchor point 2 is located at circular tuned mass 1
Inner chamber, and the axis of cylindrical center anchor point 2 overlaps with the axis of circular tuned mass 1；Spoke-like is flexibly supported
The number of overarm 3 is eight, and eight spoke-like resilient support overarm 3 is around the axis equidistant arrangement of cylindrical center anchor point 2；
Each spoke-like resilient support overarm 3 by the first lamellar resilient support overarm 31, square-wave-shaped resilient support overarm 32, the
Two sheet like flexible support overarm 33 to constitute；The tail end of the first lamellar resilient support overarm 31 and the outside of cylindrical center anchor point 2
Face is fixed；The head end that the tail end of square-wave-shaped resilient support overarm 32 flexibly supports overarm 31 with the first lamellar is fixed；Second lamellar
The head end that the tail end of resilient support overarm 33 flexibly supports overarm 32 with square-wave-shaped is fixed；Second sheet like flexible supports overarm 33
Head end is fixed with the medial surface of circular tuned mass 1；
The number of outer arcuate electrode 4 is eight, and eight outer arcuate electrodes 4 are bonded to the upper surface of substrate of glass；Eight outer
Arc-shaped electrode 4 is respectively positioned on the outside of circular tuned mass 1, and the medial surface of eight outer arcuate electrodes 4 and circular resonant mass
The lateral surface of amount 1 is collectively forming eight microcapacitors；Eight outer arcuate electrodes 4 are equidistant around the axis of cylindrical center anchor point 2
Arrangement, and the point midway of eight outer arcuate electrodes 4 supports the head end of overarm 33 just right one by one with eight the second sheet like flexible；
The number of arc electrode 5 is the upper surface that arc-shaped electrode 5 is bonded to substrate of glass in eight pairs, and eight pairs；In eight pairs
Arc-shaped electrode 5 is respectively positioned on the lateral surface of arc-shaped electrode 5 and circular resonant mass in the inner chamber of circular tuned mass 1, and eight pairs
The medial surface of amount 1 is collectively forming eight pairs of microcapacitors；Arc-shaped electrode 5 is equidistant around the axis of cylindrical center anchor point 2 in eight pairs
Arrangement, and arc-shaped electrode 5 is symmetrically distributed in correspondingly the both sides that eight the second sheet like flexible support overarm 33 in eight pairs.
When being embodied as, the consistent size of eight spoke-like resilient support overarm 3, and eight spoke-like resilient support overarms
3 height is highly equal with circular tuned mass 1.Circular tuned mass 1,2, eight spokes of cylindrical center anchor point
Arc-shaped electrode 5 is processed using monocrystalline silicon piece in shape resilient support 3, eight 4, eight pairs, outer arcuate electrodes of overarm, and annulus
Shape tuned mass 1,2, eight spoke-like resilient support of cylindrical center anchor point overarm 3 are manufactured using deep reaction ion etching technique
It is integrated.
Claims (3)
1. a kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro, it is characterised in that：Including substrate of glass, resonance subdivision,
Electrode part；
The resonance subdivision includes circular tuned mass（1）, cylindrical center anchor point（2）, spoke-like resilient support overarm
（3）；
The electrode portion point includes outer arcuate electrode（4）, arc electrode（5）；
Wherein, circular tuned mass（1）It is placed in the upper surface of substrate of glass；
Cylindrical center anchor point（2）It is bonded to the upper surface of substrate of glass；Cylindrical center anchor point（2）Positioned at circular resonant mass
Amount（1）Inner chamber, and cylindrical center anchor point（2）Axis and circular tuned mass（1）Axis overlap；Spoke-like
Resilient support overarm（3）Number be eight, and eight spoke-like resilient support overarm（3）Around cylindrical center anchor point（2）
Axis equidistant arrangement；
Each spoke-like resilient support overarm（3）Hung oneself from a beam by the first lamellar resilient support（31）, square-wave-shaped resilient support overarm
（32）, the second sheet like flexible support overarm（33）Constitute；The resilient support overarm of first lamellar（31）Tail end and cylindrical center
Anchor point（2）Lateral surface fix；Square-wave-shaped resilient support overarm（32）Tail end and the first lamellar resilient support overarm（31）'s
Head end is fixed；Second sheet like flexible supports overarm（33）The resilient support overarm of tail end and square-wave-shaped（32）Head end fix；The
Two sheet like flexible support overarm（33）Head end and circular tuned mass（1）Medial surface fix；
Outer arcuate electrode（4）Number be eight, and eight outer arcuate electrodes（4）It is bonded to the upper surface of substrate of glass；Eight
Individual outer arcuate electrode（4）It is respectively positioned on circular tuned mass（1）Outside, and eight outer arcuate electrodes（4）Medial surface and circle
Ring-type tuned mass（1）Lateral surface be collectively forming eight microcapacitors；Eight outer arcuate electrodes（4）Around cylindrical center anchor
Point（2）Axis equidistant arrangement, and eight outer arcuate electrodes（4）Point midway and eight the second sheet like flexible support overarm
（33）Head end it is just right one by one；
Arc electrode（5）Number be eight pairs, and eight pairs in arc-shaped electrode（5）It is bonded to the upper surface of substrate of glass；Eight
Internal arc-shaped electrode（5）It is respectively positioned on circular tuned mass（1）Inner chamber, and arc-shaped electrode in eight pairs（5）Lateral surface and circle
Ring-type tuned mass（1）Medial surface be collectively forming eight pairs of microcapacitors；Arc-shaped electrode in eight pairs（5）Around cylindrical center anchor
Point（2）Axis equidistant arrangement, and arc-shaped electrode in eight pairs（5）Eight the second sheet like flexible are symmetrically distributed in correspondingly
Support overarm（33）Both sides.
2. a kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro according to claim 1, it is characterised in that：Eight
Spoke-like resilient support overarm（3）Consistent size, and eight spoke-like resilient support overarm（3）Height it is humorous with annular shape
Shake quality（1）It is highly equal.
3. a kind of brand-new U-shaped folded beam silicon micro-loop shape oscillation gyro according to claim 1 and 2, it is characterised in that：Circle
Ring-type tuned mass（1）, cylindrical center anchor point（2）, eight spoke-like resilient support overarms（3）, eight outer arcuate electrodes
（4）, arc-shaped electrode in eight pairs（5）Processed using monocrystalline silicon piece, and circular tuned mass（1）, cylindrical center anchor
Point（2）, eight spoke-like resilient support overarms（3）It is integrated using the manufacture of deep reaction ion etching technique.
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| CN201610973782.6A CN106643685A (en) | 2016-11-07 | 2016-11-07 | Brand new U-shaped foldable beam silicon micro-annular vibration gyroscope |
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Cited By (9)
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| CN108332731A (en) * | 2018-01-26 | 2018-07-27 | 珠海全志科技股份有限公司 | Micromechanics simple oscialltor three-axis gyroscope |
| CN109839104A (en) * | 2019-01-17 | 2019-06-04 | 苏州大学 | The MEMS gyroscope substantially symmetrical about its central axis of the more sensing units of single-chip |
| CN109900262A (en) * | 2019-04-08 | 2019-06-18 | 瑞声科技(新加坡)有限公司 | Gyroscope |
| CN110672081A (en) * | 2019-08-30 | 2020-01-10 | 北京时代民芯科技有限公司 | Large-capacitance annular resonant micromechanical gyroscope |
| CN111504291A (en) * | 2020-04-30 | 2020-08-07 | 瑞声声学科技(深圳)有限公司 | Gyroscope |
| CN112857352A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
| CN112857351A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
| WO2022007089A1 (en) * | 2020-07-09 | 2022-01-13 | 瑞声声学科技(深圳)有限公司 | Mems gyroscope and electronic product |
| WO2023065834A1 (en) * | 2021-06-21 | 2023-04-27 | 西北工业大学 | Annular coupling system suitable for mems modal localization sensor |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108332731B (en) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | Micro-mechanical single-vibrator three-axis gyroscope |
| CN108332731A (en) * | 2018-01-26 | 2018-07-27 | 珠海全志科技股份有限公司 | Micromechanics simple oscialltor three-axis gyroscope |
| CN109839104A (en) * | 2019-01-17 | 2019-06-04 | 苏州大学 | The MEMS gyroscope substantially symmetrical about its central axis of the more sensing units of single-chip |
| CN109900262A (en) * | 2019-04-08 | 2019-06-18 | 瑞声科技(新加坡)有限公司 | Gyroscope |
| CN110672081A (en) * | 2019-08-30 | 2020-01-10 | 北京时代民芯科技有限公司 | Large-capacitance annular resonant micromechanical gyroscope |
| CN111504291A (en) * | 2020-04-30 | 2020-08-07 | 瑞声声学科技(深圳)有限公司 | Gyroscope |
| WO2022007089A1 (en) * | 2020-07-09 | 2022-01-13 | 瑞声声学科技(深圳)有限公司 | Mems gyroscope and electronic product |
| CN112857352A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
| CN112857351A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
| CN112857351B (en) * | 2021-04-15 | 2022-03-25 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
| CN112857352B (en) * | 2021-04-15 | 2022-03-25 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
| WO2023065834A1 (en) * | 2021-06-21 | 2023-04-27 | 西北工业大学 | Annular coupling system suitable for mems modal localization sensor |
| GB2625464A (en) * | 2021-06-21 | 2024-06-19 | Univ Northwestern Polytechnical | Annular coupling system suitable for MEMS modal localization sensor |
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Application publication date: 20170510 |