CN115434005B - Straight-pull monocrystalline silicon crucible seam measuring tool and application method thereof - Google Patents

Straight-pull monocrystalline silicon crucible seam measuring tool and application method thereof Download PDF

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Publication number
CN115434005B
CN115434005B CN202211010306.6A CN202211010306A CN115434005B CN 115434005 B CN115434005 B CN 115434005B CN 202211010306 A CN202211010306 A CN 202211010306A CN 115434005 B CN115434005 B CN 115434005B
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China
Prior art keywords
polishing
unit
shaft
tool
tool body
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CN202211010306.6A
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CN115434005A (en
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熊新爽
娄勇
王泽东
李贺
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Qujing Sunshine New Energy Co ltd
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Qujing Sunshine New Energy Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a straight-pull monocrystalline silicon crucible seam measuring tool and a use method thereof, wherein the straight-pull monocrystalline silicon crucible seam measuring tool comprises: the tool body is made of quartz, is in an isosceles acute triangle shape, the vertex angle of the tool body is arranged against the liquid level of the silicon liquid, and is reserved with an opening; the molybdenum bolt penetrates through the opening and is connected to the bottom end of the air guide sleeve; the application method of the straight-pull monocrystalline silicon crucible seam measuring tool comprises the following steps: step 1, cleaning a tool body, thereby ensuring that no foreign matters are attached to the surface of the tool body; step 2, manually installing the appliance body at the bottom end of the air guide sleeve through a molybdenum bolt, wherein a screw hole connected with the molybdenum bolt is reserved at the bottom end of the air guide sleeve, and the appliance body naturally sags; and 3, the guide cover falls from above the Czochralski monocrystalline silicon crucible, the vertex angle of the tool body is observed by naked eyes, and when the vertex angle of the tool body is abutted against the liquid level of the silicon liquid, the guide cover stops moving downwards.

Description

Straight-pull monocrystalline silicon crucible seam measuring tool and application method thereof
Technical Field
The invention relates to the technical field of Czochralski single crystals, in particular to a Czochralski single crystal silicon crucible seam measuring tool and a use method thereof.
Background
When pulling up single crystals, the accuracy of the crucible seam needs to be ensured, if the crucible seam is inaccurate, crystallization is difficult, multiple seeding is performed, the temperature of the silicon liquid can be adjusted multiple times, a series of problems are caused subsequently, such as multiple temperature adjustment, the quartz crucible in a softened state is not good, and the quartz crucible bulge, even seepage and casting accidents are seriously induced.
And if the crucible seam is inaccurate, if staff directly adjusts the crucible seam, the risk of flooding the guide cover exists, and the explosion of the water cooling screen is seriously caused.
Disclosure of Invention
In order to achieve the above object, the present invention discloses a straight-pulling single crystal silicon crucible seam measuring apparatus, comprising:
the tool comprises a tool body, a pressing device and a pressing device, wherein the tool body is made of quartz materials, the tool body is in an isosceles acute triangle shape, the vertex angle of the tool body is arranged against the liquid surface of silicon liquid, and an opening is reserved in the tool body;
and the molybdenum bolt penetrates through the opening and is connected to the bottom end of the air guide sleeve.
Preferably, the top angle of the tool body is between 15-20 °.
The invention also discloses a use method of the straight-pulled monocrystalline silicon crucible seam measuring tool, which comprises the following steps:
step 1, cleaning a tool body, thereby ensuring that no foreign matters are attached to the surface of the tool body;
step 2, manually installing the appliance body at the bottom end of the air guide sleeve through a molybdenum bolt, wherein a screw hole connected with the molybdenum bolt is reserved at the bottom end of the air guide sleeve, and the appliance body naturally sags;
and 3, the guide cover falls from above the Czochralski monocrystalline silicon crucible, the vertex angle of the tool body is observed by naked eyes, and when the vertex angle of the tool body is abutted against the liquid level of the silicon liquid, the guide cover stops moving downwards.
Preferably, in step 1, the surface cleaning of the tool body is accomplished by a cleaning unit comprising:
an ultrasonic cleaning pool;
the base is arranged on a tank opening of the ultrasonic cleaning tank;
the tool overturning unit is arranged on the base, and the tool body is fixedly arranged on the tool overturning unit;
the vertex angle polishing unit is arranged on the base and is used for polishing the vertex angle of the appliance body;
a tool wiping unit mounted on the base, the tool wiping unit being for performing wiping of the surface of the tool body;
the power unit is arranged on the base, and the tool overturning unit, the vertex angle polishing unit and the tool wiping unit are distributed on the base from top to bottom and are connected with the power unit.
Preferably, the base includes:
the transverse seat is arranged on the tank mouth of the ultrasonic cleaning tank;
the device comprises a transverse seat, a tool overturning unit, a vertex angle polishing unit and a tool wiping unit, wherein the tool overturning unit, the vertex angle polishing unit and the tool wiping unit are arranged between the transverse seat and the transverse seat, and the power unit is arranged at the outer end of the transverse seat.
Preferably, the power unit includes:
the driving cylinder is arranged at the position, close to the bottom end, of the outer end of the supporting vertical plate, and the output end of the driving cylinder is upwards arranged;
the double-sided longitudinal moving rack is arranged at the output end of the driving cylinder, and the tool overturning unit, the vertex angle polishing unit and the tool wiping unit are all connected with the double-sided longitudinal moving rack.
Preferably, the appliance inverting unit includes:
the overturning shafts are rotatably arranged on the two supporting vertical plates;
the overturning plate is arranged on the overturning shaft, a vertical flanging for abutting against the bottom edge of the appliance body is arranged at the end, close to the overturning shaft, of the overturning plate, and an elastic pressing plate for pressing the bottom edge of the appliance body is arranged on the vertical flanging;
the limiting column is arranged on the turnover plate and is matched with the opening;
the first rotating gear is meshed with the double-sided longitudinal moving rack and is arranged at the shaft end of the turning shaft.
Preferably, the appliance wiping unit includes:
the bottom rotating shaft is rotatably arranged on the two supporting vertical plates and is positioned below the overturning shaft;
the second rotating gear is meshed with the double-sided longitudinally-moving rack and is arranged at the shaft end of the bottom rotating shaft;
the telescopic belt installation rods are arranged on the bottom rotating shaft, and the telescopic belt installation rods are arranged at the positions far away from the bottom rotating shaft end in an obtuse angle bending manner;
the elastic telescopic belts are arranged at the two ends of the telescopic belt mounting rods, far away from the bottom rotating shaft ends, and are used for absorbing cleaning liquid in the ultrasonic cleaning tank and wiping the surface of the tool body.
Preferably, the corner grinding unit includes:
the top rotating shaft is rotatably arranged between the two supporting vertical plates and is positioned above the overturning shaft;
the third rotating gear is meshed with the double-sided longitudinally-moving rack and is arranged at the shaft end of the top rotating shaft;
the two fixing arms are symmetrically arranged on the top rotating shaft;
the mounting seat is mounted at the inner end of the fixed arm;
the power chamber is arranged in the mounting seat and is communicated with the end, far away from the fixed arm, of the mounting seat;
the polishing box is arranged in the power chamber;
the upper polishing shaft and the lower polishing shaft are arranged in the polishing box in parallel, and the shaft end of the upper polishing shaft is rotatably arranged on the inner wall of the power chamber;
the polishing rollers are positioned in the polishing box and are respectively arranged on the upper polishing shaft and the lower polishing shaft;
the polishing belt is positioned in the polishing box, the polishing belt is sleeved on the two polishing rollers, and part of the polishing belt is exposed out of the box opening end of the polishing box;
the polishing motor is arranged on the mounting seat, and the output end of the polishing motor extends into the power chamber;
the two driving pulleys are positioned in the power chamber, one driving pulley is arranged on the upper polishing shaft, and the other driving pulley is arranged at the output end of the polishing motor;
the transmission belt is sleeved on the two transmission belt wheels;
the first folding rod and the second folding rod are positioned in the power chamber, the first folding rod and the second folding rod are connected in a rotating mode through a mounting shaft, the two ends of the first folding rod, which are far away from the first folding rod, are connected with the bottom end of the polishing box in a sliding mode, and one end of the second folding rod, which is far away from the second folding rod, is hinged to the inner wall of the power chamber;
the reset torsion spring is sleeved on the mounting shaft, one torsion arm end of the reset torsion spring is connected with the first turnover rod, and the other torsion arm end of the reset torsion spring is connected with the second turnover rod;
the stay cord installation shaft is arranged between the two supporting vertical plates and is positioned above the top rotating shaft;
and the two pull ropes are symmetrically arranged on the pull rope installation shaft, and the pull ropes extend into the power chamber far away from the end of the pull rope installation shaft and are connected with the installation shaft.
Preferably, the tool turning unit and the vertex angle polishing unit turn the same, and the tool turning unit and the tool wiping unit turn the opposite directions.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of the present invention mounted on a pod;
FIG. 2 is a view of the present invention;
FIG. 3 is a flow chart of the present invention;
FIG. 4 is a view showing the external shape of the cleaning unit according to the present invention;
FIG. 5 is a schematic view showing the structure of a cleaning unit at the outer end of a supporting riser according to the present invention;
FIG. 6 is a schematic view of the structure of the cleaning unit of the present invention at the inner end of the support riser;
FIG. 7 is a schematic view of the installation of the tool body of the present invention;
FIG. 8 is a schematic view of the structure of the vertex angle polishing unit in the present invention;
fig. 9 is a schematic view of a 90 ° turning structure of the corner polishing unit according to the present invention.
In the figure: 1. a tool body; 2. molybdenum bolts; 3. a cleaning unit; 4. a guide cover; 5. a silicon liquid; 31. an ultrasonic cleaning pool; 32. a base; 33. a tool overturning unit; 34. a vertex angle polishing unit; 35. a tool wiping unit; 36. a power unit; 37. a transverse seat; 38. supporting a vertical plate; 39. a driving cylinder; 30. double-sided longitudinal moving racks; 41. a turnover shaft; 42. a turnover plate; 43. a limit column; 44. a first rotating gear; 45. a third rotary gear; 51. a bottom rotating shaft; 52. a second rotating gear; 53. a telescopic belt mounting rod; 54. an elastic stretch band; 61. a top rotating shaft; 62. a fixed arm; 63. a mounting base; 64. a power chamber; 65. polishing box; 66. the first turnover rod is turned over; 67. a grinding roller; 68. polishing the belt; 69. a transmission belt wheel; 60. and a second turnover rod.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples
The invention will be further described with reference to the accompanying drawings.
As shown in fig. 1 and 2, the measuring tool for a straight-pull monocrystalline silicon crucible seam and the using method thereof provided by the embodiment include:
the tool comprises a tool body 1, wherein the tool body 1 is made of quartz, the tool body 1 is in an isosceles acute triangle shape, the vertex angle of the tool body 1 is arranged against the liquid surface of a silicon liquid 5, and an opening is reserved in the tool body 1;
and the molybdenum bolt 2 penetrates through the opening and is connected to the bottom end of the air guide sleeve 4.
The working principle and beneficial effects of the technical scheme are as follows:
the invention discloses a straight-pull monocrystalline silicon crucible seam measuring tool, which is arranged at the bottom end of a guide cover 4 through a molybdenum bolt 2. The tool body 1 is made of quartz materials, a quartz sharp corner formed by the tool body 1 is connected with a molybdenum bolt through a pin hole, and the tool is naturally sagged and convenient to detach; the quartz sharp angle does not react with the molten silicon, so that impurities cannot be introduced into the molten silicon due to the tool body 1; the tool body 1 can ensure that the crucible seam deviation is less than 0.5mm; the operator can observe the crucible seam through naked eye observation while dismantling conveniently, and is easy to learn and easy to get.
In one embodiment, the top angle of the appliance body 1 is between 15-20 °.
As shown in fig. 3, the application method of the straight-pulling monocrystalline silicon crucible seam measurement apparatus provided in this embodiment is applied to the straight-pulling monocrystalline silicon crucible seam measurement apparatus as described above, and is characterized in that the application method includes:
step 1, cleaning a tool body 1, thereby ensuring that no foreign matters are attached to the surface of the tool body 1;
step 2, manually installing the tool body 1 at the bottom end of the guide cover 4 through the molybdenum bolt 2, wherein a screw hole connected with the molybdenum bolt 2 is reserved at the bottom end of the guide cover 4, and the tool body 1 naturally sags;
and 3, the guide cover 4 falls from above the Czochralski monocrystalline silicon crucible, the vertex angle of the tool body 1 is observed by naked eyes, and when the vertex angle of the tool body 1 is abutted against the liquid level of the silicon liquid 5, the guide cover 4 stops moving downwards.
The working principle and beneficial effects of the technical scheme are as follows:
the quartz sharp angle of the tool body 1 serving as the top angle of the tool body 1 is detached and then is stained with crystalline silicon liquid to remain, after the tool body 1 is cleaned, the surface of the tool body 1 is ensured to be free from foreign matter adhesion, the tool body 1 is manually installed at the bottom end of the guide cover 4 through the molybdenum bolt 2, the tool body 1 naturally sags under the action of gravity, the guide cover 4 falls from the upper part of the Czochralski monocrystalline silicon crucible, an operator observes the quartz sharp angle of the tool body 1 with naked eyes, and when the quartz sharp angle of the tool body 1 is clung to the liquid level of the silicon liquid 5, the guide cover 4 stops moving downwards, so that the accuracy of a crucible seam is ensured.
As shown in fig. 4, in one embodiment, in step 1, surface cleaning of the tool body 1 is accomplished by a cleaning unit 3, the cleaning unit 3 comprising:
an ultrasonic cleaning tank 31;
a base 32, wherein the base 32 is installed on a tank opening of the ultrasonic cleaning tank 31;
a tool turning unit 33, wherein the tool turning unit 33 is mounted on the base 32, and the tool body 1 is fixedly mounted on the tool turning unit 33;
a vertex angle polishing unit 34, wherein the vertex angle polishing unit 34 is mounted on the base 32, and the vertex angle unit 34 is used for polishing the vertex angle of the tool body 1;
a tool wiping unit 35, the tool wiping unit 35 being mounted on the base 32, the tool wiping unit 35 being configured to perform wiping of the surface of the tool body 1;
the power unit 36 is mounted on the base 32, and the tool overturning unit 33, the vertex angle polishing unit 34 and the tool wiping unit 35 are distributed on the base 32 from top to bottom and are connected with the power unit 36.
The working principle and beneficial effects of the technical scheme are as follows:
the tool body 1 is manually installed on the tool overturning unit 33, at the moment, the quartz sharp corner of the tool body 1 is soaked in the ultrasonic cleaning tank 31, the power unit 36 works, so that the tool overturning unit 33, the vertex angle polishing unit 34 and the tool wiping unit 35 which are located above the ultrasonic cleaning tank 31 and installed on the base 32 work synchronously, the tool overturning unit 33 achieves upward anticlockwise overturning of the tool body 1, the vertex angle polishing unit 34 achieves polishing of the quartz sharp corner of the tool body 1, after polishing, the tool overturning unit 33 continuously drives the tool body 1 to overturn anticlockwise, the tool wiping unit 35 achieves wiping of the surface of the tool body 1, then the power unit 36 acts reversely, the quartz sharp corner of the tool body 1 returns to the ultrasonic cleaning tank 31, and the ultrasonic cleaning tank 31 achieves surface cleaning of the tool body 1.
As shown in fig. 5, in one embodiment, the base 32 includes:
a horizontal seat 37, wherein the horizontal seat 37 is installed on a tank opening of the ultrasonic cleaning tank 31;
the two support risers 38 are mounted on the transverse seat 37, the tool overturning unit 33, the vertex angle polishing unit 34 and the tool wiping unit 35 are mounted between the two support risers 38, and the power unit 36 is mounted at the outer end of the support risers 38.
As shown in fig. 5, in one embodiment, the power unit 36 includes:
the driving cylinder 39 is arranged at the position, close to the bottom end, of the outer end of the supporting vertical plate 38, and the output end of the driving cylinder 39 is upwards;
the double-sided longitudinal moving rack 30 is mounted at the output end of the driving cylinder 39, and the tool overturning unit 33, the vertex angle polishing unit 34 and the tool wiping unit 35 are all connected with the double-sided longitudinal moving rack 30.
The working principle and beneficial effects of the technical scheme are as follows:
the driving cylinder 39 drives the double-sided longitudinally moving rack 30 arranged at the output end of the driving cylinder to descend, thereby driving the tool overturning unit 33 and the vertex angle polishing unit 34 to rotate anticlockwise, the tool wiping unit 35 to rotate clockwise so as to finish polishing of the quartz sharp angle of the tool body 1 and wiping of the surface of the tool body 1, and conversely, the driving cylinder 39 drives the double-sided longitudinally moving rack 30 arranged at the output end of the driving cylinder to ascend, thereby driving the tool overturning unit 33 and the vertex angle polishing unit 34 to rotate clockwise, the tool wiping unit 35 rotates anticlockwise, the quartz sharp angle of the tool body 1 returns to the ultrasonic cleaning pool 31, and the ultrasonic cleaning pool 31 finishes cleaning of the surface of the tool body 1.
As shown in fig. 6 and 7, in one embodiment, the tool inverting unit 33 includes:
a turning shaft 41, wherein the turning shaft 41 is rotatably installed on the two supporting risers 38;
the overturning plate 42 is arranged on the overturning shaft 41, a vertical flanging for abutting against the bottom edge of the appliance body 1 is arranged at the end, close to the overturning shaft 41, of the overturning plate 42, and an elastic pressing plate for pressing the bottom edge of the appliance body 1 is arranged on the vertical flanging;
the limiting column 43 is installed on the turnover plate 42, and the limiting column 43 is adapted to the open hole;
the first rotating gear 44, the first rotating gear 44 is meshed with the double-sided longitudinal moving rack 30, and the first rotating gear 44 is mounted on the shaft end of the turning shaft 41.
The working principle and beneficial effects of the technical scheme are as follows:
the tool body 1 is abutted against the turnover plate 42, the opening faces the limit post 43, the bottom edge of the tool body 1 is abutted against the vertical turnover edge, the elastic pressing plate is pressed against the tool body 1 under the force, the driving cylinder 39 drives the double-sided longitudinal moving rack 30 arranged at the output end of the tool body to descend, so that the first rotating gear 44 meshed with the double-sided longitudinal moving rack 30 and the turnover shaft 41 connected with the first transmission gear 44 are driven to rotate anticlockwise between the two supporting risers 38, the turnover plate 42 arranged on the turnover shaft 41 is driven to rotate anticlockwise, the turnover plate 42 drives the tool body 1 arranged on the turnover plate to rotate anticlockwise, the quartz sharp corner of the tool body 1 is turned towards the direction close to the vertex angle polishing unit 34, conversely, the driving cylinder 39 drives the double-sided longitudinal moving rack 30 arranged at the output end of the tool body to ascend, the turnover plate 42 drives the tool body 1 arranged on the double-sided longitudinal moving rack to rotate clockwise, the quartz sharp corner returns to the ultrasonic cleaning pool 31, and the ultrasonic cleaning pool 31 completes surface cleaning of the tool body 1.
As shown in fig. 5 and 6, in one embodiment, the implement wiping unit 35 includes:
a bottom rotating shaft 51 rotatably mounted on the two supporting risers 38, the bottom rotating shaft 51 being located below the turnover shaft 41;
a second rotating gear 52, the second rotating gear 52 is meshed with the double-sided longitudinal moving rack 30, and the second rotating gear 52 is installed at the shaft end of the bottom rotating shaft 51;
the telescopic belt installation rods 53 are arranged on the bottom rotating shaft 51, and the ends of the telescopic belt installation rods 53 far away from the bottom rotating shaft 51 are bent at an obtuse angle;
the elastic telescopic belts 54 are arranged at the ends of the two telescopic belt mounting rods 53 far away from the bottom rotating shaft 51, and the elastic telescopic belts 54 are used for absorbing the cleaning liquid in the ultrasonic cleaning tank 31 and wiping the surface of the tool body 1.
The working principle and beneficial effects of the technical scheme are as follows:
the driving cylinder 39 drives the double-sided longitudinally moving rack 30 arranged at the output end of the ultrasonic cleaning device to descend, so that the second rotating gear 52 meshed with the double-sided longitudinally moving rack 30 and the bottom rotating shaft 51 connected with the second rotating gear 52 are driven to rotate clockwise between the two supporting risers 38, the telescopic belt mounting rod 53 arranged on the bottom rotating shaft 51 and the elastic telescopic belt 54 arranged on the telescopic belt mounting rod 53 are driven to lift out of the ultrasonic cleaning tank 31, cleaning liquid adsorbed in the elastic telescopic belt is used for cleaning the surface of the device body 1, and conversely, the driving cylinder 39 drives the double-sided longitudinally moving rack 30 arranged at the output end of the device to ascend, the elastic telescopic belt returns to the ultrasonic cleaning tank 31, and the ultrasonic cleaning tank 31 is used for cleaning the surface of the elastic telescopic belt.
As shown in fig. 8 and 9, in one embodiment, the corner sanding unit 34 includes:
a top rotating shaft 61, wherein the top rotating shaft 61 is rotatably installed between the two supporting risers 38, and the top rotating shaft 61 is located above the turning shaft 41;
a third rotating gear 45, wherein the third rotating gear 45 is meshed with the double-sided longitudinal moving rack 30, and the third rotating gear 45 is installed at the shaft end of the top rotating shaft 61;
the fixed arms 62, two said fixed arms 62 are symmetrically installed on said top rotating shaft 61;
a mounting seat 63, wherein the mounting seat 63 is mounted at the inner end of the fixed arm 62;
the power chamber 64 is arranged in the mounting seat 63, and the power chamber 64 is communicated with the end, far away from the fixed arm 62, of the mounting seat 63;
a sanding box 65, the sanding box 65 being mounted within the power compartment 64;
an upper polishing shaft and a lower polishing shaft, which are installed in parallel in the polishing box 65, and the shaft end of the upper polishing shaft is rotatably installed on the inner wall of the power chamber 64;
the polishing rollers 67, two polishing rollers 67 are located in the polishing box 65, and the polishing rollers 67 are respectively installed on the upper polishing shaft and the lower polishing shaft;
the polishing belt 68 is positioned in the polishing box 65, the polishing belt 68 is sleeved on the two polishing rollers 67, and part of the polishing belt 68 is exposed out of the box mouth end of the polishing box 65;
the polishing motor is arranged on the mounting seat 63, and the output end of the polishing motor extends into the power chamber 64;
a drive pulley 69, two of the drive pulleys 69 are located in the power chamber 64, one of the drive pulleys 69 is mounted on the upper grinding shaft, and the other drive pulley 69 is mounted at the output end of the grinding motor;
the transmission belt is sleeved on the two transmission belt pulleys 69;
the first folding rod 66 and the second folding rod 60 are positioned in the power chamber 64, the first folding rod 66 and the second folding rod 60 are rotatably connected through a mounting shaft, the end, away from the second folding rod 60, of the first folding rod 66 is slidably connected to the bottom end of the polishing box 65, and the end, away from the first folding rod 66, of the second folding rod 60 is hinged to the inner wall of the power chamber 64;
the reset torsion spring is sleeved on the mounting shaft, one torsion arm end of the reset torsion spring is connected with the first folding rod 66, and the other torsion arm end of the reset torsion spring is connected with the second folding rod 60;
a string installation shaft 46, wherein the string installation shaft 46 is installed between the two supporting risers 38, and the string installation shaft 46 is positioned above the top rotating shaft 61;
and the two pull ropes are symmetrically arranged on the pull rope installation shaft 46, and the end, away from the pull rope installation shaft 46, of each pull rope extends into the power chamber 64 and is connected with the installation shaft.
The working principle and beneficial effects of the technical scheme are as follows:
the driving cylinder 39 drives the double-sided longitudinally moving rack 30 arranged at the output end of the driving cylinder to descend, thereby driving the third rotating gear 45 meshed with the double-sided longitudinally moving rack 30 and the top rotating shaft 61 connected with the third rotating gear 45 to rotate anticlockwise between the two supporting risers 38, the top rotating shaft 61 drives the fixed arm 62 arranged on the top rotating shaft 61 and the mounting seat 63 arranged on the fixed arm 62 to move away from the pull rope mounting shaft 46, the pull rope pulls the mounting shaft, the reset torsion spring is stressed, so that the first folding rod 66 and the second folding rod 60 tend to be collinear, the polishing boxes 65 are outwards turned over by taking the polishing shaft above the polishing boxes 65 as the center, the two polishing boxes 65 form a triangle, thereby the quartz sharp corner of the tool body 1 is fed between the two polishing boxes 65, the polishing motor works, the upper polishing shaft is driven to rotate by the driving belt 68 positioned in the polishing boxes 65 through the polishing roller 67, and the polishing belt 68 finishes polishing the quartz sharp corner of the tool body 1, and peeling off the crystal silicon liquid on the quartz sharp corner of the tool body 1.
In one embodiment, the appliance inverting unit 33 and the corner sanding unit 34 turn the same, and the appliance inverting unit 33 and the appliance wiping unit 35 turn the opposite.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.

Claims (2)

1. The application method of the straight-pull monocrystalline silicon crucible seam measuring tool is applied to the straight-pull monocrystalline silicon crucible seam measuring tool, and the straight-pull monocrystalline silicon crucible seam measuring tool comprises the following components: the device comprises a device body (1), wherein the device body (1) is made of quartz, the device body (1) is in an isosceles acute triangle shape, the vertex angle of the device body (1) is arranged close to the liquid level of silicon liquid (5), and an opening is reserved in the device body (1); molybdenum bolt (2), molybdenum bolt (2) wear to establish the trompil to connect in the bottom of kuppe (4), its characterized in that includes:
step 1, cleaning a tool body (1), thereby ensuring that no foreign matters are attached to the surface of the tool body (1);
step 2, manually installing the tool body (1) at the bottom end of the guide cover (4) through the molybdenum bolt (2), wherein a screw hole connected with the molybdenum bolt (2) is reserved at the bottom end of the guide cover (4), and the tool body (1) naturally sags;
step 3, the guide cover (4) falls from the upper part of the Czochralski monocrystalline silicon crucible, the vertex angle of the tool body (1) is observed by naked eyes, and when the vertex angle of the tool body (1) is abutted against the liquid surface of the silicon liquid (5), the guide cover (4) stops moving downwards;
in step 1, surface cleaning of the appliance body (1) is accomplished by a cleaning unit (3), the cleaning unit (3) comprising:
an ultrasonic cleaning tank (31);
a base (32), wherein the base (32) is arranged on a tank opening of the ultrasonic cleaning tank (31);
a tool turning unit (33), wherein the tool turning unit (33) is mounted on the base (32), and the tool body (1) is fixedly mounted on the tool turning unit (33);
a vertex angle polishing unit (34), wherein the vertex angle polishing unit (34) is arranged on the base (32), and the vertex angle polishing unit (34) is used for finishing the vertex angle polishing of the appliance body (1);
a tool wiping unit (35), the tool wiping unit (35) being mounted on the base (32), the tool wiping unit (35) being used for completing wiping of the surface of the tool body (1);
the power unit (36), the power unit (36) is installed on the base (32), and the tool overturning unit (33), the vertex angle polishing unit (34) and the tool wiping unit (35) are distributed on the base (32) from top to bottom and are connected with the power unit (36);
the base (32) includes:
the transverse seat (37) is arranged on the tank mouth of the ultrasonic cleaning tank (31);
the device comprises supporting risers (38), wherein two supporting risers (38) are arranged on a transverse seat (37), the tool overturning unit (33), the vertex angle polishing unit (34) and the tool wiping unit (35) are arranged between the two supporting risers (38), and the power unit (36) is arranged at the outer end of the supporting risers (38);
the power unit (36) includes:
the driving air cylinder (39), the driving air cylinder (39) is installed at the position, close to the bottom end, of the outer end of the supporting vertical plate (38), and the output end of the driving air cylinder (39) is upwards arranged;
the double-sided longitudinal moving rack (30) is arranged at the output end of the driving cylinder (39), and the tool overturning unit (33), the vertex angle polishing unit (34) and the tool wiping unit (35) are connected with the double-sided longitudinal moving rack (30);
the tool turning unit (33) includes:
the turnover shafts (41) are rotatably arranged on the two supporting vertical plates (38);
the overturning plate (42), the overturning plate (42) is arranged on the overturning shaft (41), a vertical flanging for abutting against the bottom edge of the appliance body (1) is arranged at the end, close to the overturning shaft (41), of the overturning plate (42), and an elastic pressing plate for pressing the bottom edge of the appliance body (1) is arranged on the vertical flanging;
the limiting column (43) is arranged on the overturning plate (42), and the limiting column (43) is matched with the opening;
a first rotating gear (44), wherein the first rotating gear (44) is meshed with the double-sided longitudinal moving rack (30), and the first rotating gear (44) is arranged at the shaft end of the turning shaft (41);
the implement wiping unit (35) includes:
the bottom rotating shaft (51) is rotatably arranged on the two supporting vertical plates (38), and the bottom rotating shaft (51) is positioned below the turnover shaft (41);
a second rotating gear (52), wherein the second rotating gear (52) is meshed with the double-sided longitudinal moving rack (30), and the second rotating gear (52) is arranged at the shaft end of the bottom rotating shaft (51);
the telescopic belt mounting rods (53), the two telescopic belt mounting rods (53) are mounted on the bottom rotating shaft (51), and the ends, far away from the bottom rotating shaft (51), of the telescopic belt mounting rods (53) are bent at an obtuse angle;
the elastic telescopic belts (54) are arranged at the ends, far away from the bottom rotating shaft (51), of the two telescopic belt mounting rods (53), and the elastic telescopic belts (54) are used for absorbing cleaning liquid in the ultrasonic cleaning pool (31) and wiping the surface of the tool body (1);
the corner grinding unit (34) includes:
a top rotating shaft (61), wherein the top rotating shaft (61) is rotatably installed between the two supporting vertical plates (38), and the top rotating shaft (61) is positioned above the turnover shaft (41);
a third rotating gear (45), wherein the third rotating gear (45) is meshed with the double-sided longitudinal moving rack (30), and the third rotating gear (45) is arranged at the shaft end of the top rotating shaft (61);
the fixed arms (62), two fixed arms (62) are symmetrically arranged on the top rotating shaft (61);
the mounting seat (63) is mounted at the inner end of the fixed arm (62);
the power chamber (64) is arranged in the mounting seat (63), and the power chamber (64) is communicated with the end, far away from the fixed arm (62), of the mounting seat (63);
a sanding box (65), the sanding box (65) being mounted within the power chamber (64);
the upper polishing shaft and the lower polishing shaft are arranged in the polishing box (65) in parallel, and the shaft end of the upper polishing shaft is rotatably arranged on the inner wall of the power chamber (64);
the polishing rollers (67), the two polishing rollers (67) are positioned in the polishing box (65), and the polishing rollers (67) are respectively arranged on the upper polishing shaft and the lower polishing shaft;
the polishing belt (68) is positioned in the polishing box (65), the polishing belt (68) is sleeved on the two polishing rollers (67), and part of the polishing belt (68) is exposed out of the box mouth end of the polishing box (65);
the polishing motor is arranged on the mounting seat (63), and the output end of the polishing motor extends into the power chamber (64);
the two driving pulleys (69) are positioned in the power chamber (64), one driving pulley (69) is arranged on the upper polishing shaft, and the other driving pulley (69) is arranged at the output end of the polishing motor;
the transmission belt is sleeved on the two transmission belt wheels (69);
the folding rod I (66) and the folding rod II (60) are positioned in the power chamber (64), the folding rod I (66) and the folding rod II (60) are rotationally connected through a mounting shaft, the folding rod I (66) is far away from the folding rod II (60) and is slidingly connected with the bottom end of the polishing box (65), and the folding rod II (60) is far away from the folding rod I (66) and is hinged to the inner wall of the power chamber (64);
the reset torsion spring is sleeved on the mounting shaft, one torsion arm end of the reset torsion spring is connected with the first turnover rod (66), and the other torsion arm end of the reset torsion spring is connected with the second turnover rod (60);
a pull rope installation shaft (46), wherein the pull rope installation shaft (46) is installed between the two supporting risers (38), and the pull rope installation shaft (46) is positioned above the top rotating shaft (61);
and the two pull ropes are symmetrically arranged on the pull rope installation shaft (46), and the end, far away from the pull rope installation shaft (46), of the pull rope stretches into the power chamber (64) and is connected with the installation shaft.
2. The use method of a straight pulling single crystal silicon crucible seam measuring instrument according to claim 1, wherein the instrument turning unit (33) and the vertex angle polishing unit (34) are turned the same, and the instrument turning unit (33) and the instrument wiping unit (35) are turned in opposite directions.
CN202211010306.6A 2022-08-23 2022-08-23 Straight-pull monocrystalline silicon crucible seam measuring tool and application method thereof Active CN115434005B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006256898A (en) * 2005-03-16 2006-09-28 Sumco Corp Silicon single crystal pulling apparatus
CN102251275B (en) * 2011-07-07 2013-07-10 杭州慧翔电液技术开发有限公司 Single-crystal furnace thermal field device capable of measuring distance between fused silicon liquid surface and guide cylinder
CN210104125U (en) * 2019-06-25 2020-02-21 宁夏银和新能源科技有限公司 Device for accurately positioning seeding crucible position and equal diameter GAP
CN112813492A (en) * 2020-12-23 2021-05-18 上海新昇半导体科技有限公司 Liquid level detection device for crystal growth and crystal growth device

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