CN210104125U - Device for accurately positioning seeding crucible position and equal diameter GAP - Google Patents
Device for accurately positioning seeding crucible position and equal diameter GAP Download PDFInfo
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- CN210104125U CN210104125U CN201920964521.7U CN201920964521U CN210104125U CN 210104125 U CN210104125 U CN 210104125U CN 201920964521 U CN201920964521 U CN 201920964521U CN 210104125 U CN210104125 U CN 210104125U
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Abstract
The utility model discloses a device of accurate location seeding crucible position and equal diameter GAP belongs to monocrystalline silicon production facility technical field. The device comprises a guide shell and a positioning assembly arranged on the guide shell, wherein one end of the positioning assembly is rotatably connected with the guide shell, and the other end of the positioning assembly extends out of the bottom end of the guide shell. When the material melting is finished and the temperature is stable, the crucible is lifted to enable the silicon liquid level to contact the lower end of the positioning assembly, GAP is set according to the seeding process, the crucible is lowered for a certain distance, namely the seeding crucible position, the equal-diameter GAP is judged according to the distance from the lower end of the positioning assembly to the liquid level during the equal diameter, and the equal-diameter GAP can be accurately and visually judged due to the fact that the positioning assembly is close to the liquid level. When the positioning assembly is interfered by external force, the positioning assembly rotates along the guide cylinder to play a role in buffering and prevent the positioning assembly from being deformed and damaged, and when the external force interference disappears, the positioning assembly rotates along the guide cylinder to automatically return to prevent the positioning assembly from displacing to cause inaccurate positioning of a seeding pot position or an equal-diameter GAP.
Description
Technical Field
The utility model belongs to the technical field of monocrystalline silicon production facility, concretely relates to accurate location seeding crucible position and isometric GAP's device.
Background
The position of the liquid level needs to be determined when stabilizing the temperature in the Czochralski single crystal process flow, and the judgment of the position of the liquid level at present mainly depends on visual observation and confirmation. Due to the difference in skill and experience of operators, the deviation of the liquid level position at the stabilized temperature is large, and the survival rate of the single crystal is further influenced. If the liquid level is positioned wrongly, the light person causes the abnormality of silicon spraying of the guide shell, and the serious person may scald the furnace body and cause water leakage and explosion accidents.
In the prior art, a liquid level positioning device for pulling a single crystal in a hot furnace is provided, wherein a molybdenum rod and a graphite needle are arranged on the inner wall of a guide cylinder, although the device can judge the position of an isometric GAP (the distance between the liquid level and the bottom of the outer layer of a heat shield during crystal pulling is called GAP) to a certain extent, in the actual operation, the molybdenum rod or the graphite needle is deformed, displaced or damaged due to uneven external force extrusion or impact, the accuracy of a crystal-seeding pot position or the isometric GAP is influenced, and the service life of equipment is shortened.
Disclosure of Invention
In view of this, the utility model provides a device of accurate location seeding crucible position and isometric GAP to solve the technical problem that seeding pot position or isometric GAP location are inaccurate, equipment warp easily and damage that exist among the prior art.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a device of accurate location seeding crucible position and isometric GAP, includes the draft tube and set up in locating component on the draft tube, locating component's one end rotatable coupling the draft tube, the other end is followed the bottom of draft tube is stretched out.
Preferably, the positioning assembly comprises a connecting molybdenum rod and a positioning reference rod, the connecting molybdenum rod is horizontally arranged, one end of the connecting molybdenum rod is rotatably connected with the guide cylinder, and one end of the positioning reference rod is connected with the connecting molybdenum rod and is perpendicular to the connecting molybdenum rod.
Preferably, one end of the positioning reference rod, which is far away from the molybdenum connecting rod, is provided with a heavy hammer.
Preferably, the draft tube comprises a shell, an inner container and a carbon felt layer arranged between the shell and the inner container, wherein an installation groove is formed in the inner wall of the inner container, a shaft sleeve is arranged in the installation groove, and the connecting molybdenum rod is connected into the shaft sleeve through a bearing.
Preferably, the connecting molybdenum rod is provided with a joint bearing, and the positioning reference rod is connected to the joint bearing.
According to the above technical scheme, the utility model provides an accurate location seeding crucible position and isometric GAP's device, its beneficial effect is: one end of the positioning assembly is rotatably connected to the guide cylinder, the other end of the positioning assembly extends out of the bottom end of the guide cylinder, when the monocrystalline silicon is drawn, the distance from the lower end of the positioning assembly to the bottom of the guide cylinder is measured before the monocrystalline silicon is closed, the distance is recorded, when the material melting and the temperature are stable, the crucible is lifted, the silicon liquid level is in contact with the lower end of the positioning assembly, GAP is set according to a seeding process, the crucible is lowered for a certain distance, namely the seeding crucible position, the distance and the distance from the lower end of the positioning assembly to the bottom of the guide cylinder are the GAP set by the seeding process, when the diameter is equal, the equal-diameter GAP is judged according to the distance from the lower end of the positioning assembly to the liquid level, and the equal-diameter GAP can be accurately judged due to the fact that the positioning. More importantly, when the locating component receives external force and disturbs, the locating component follows the draft tube rotates, plays the cushioning effect, prevents the locating component deformation damage, when external force disturbs and disappears, the locating component follows the draft tube rotates, self return prevents the locating component displacement, causes seeding pot position or isometric GAP location inaccurate.
Drawings
Fig. 1 is a structural sectional view of a device for accurately positioning a seeding crucible position and a constant diameter GAP.
Fig. 2 is a partially enlarged view of a portion a shown in fig. 1.
In the figure: the device comprises a device 10 for accurately positioning a seeding crucible position and a GAP with equal diameter, a guide shell 100, a shell 101, an inner container 102, a carbon felt layer 103, a positioning component 200, a connecting molybdenum rod 210, a positioning reference rod 220, a mounting groove 110, a shaft sleeve 111, a heavy hammer 221 and a joint bearing 211.
Detailed Description
The following combines the drawings of the utility model to further elaborate the technical scheme and technical effect of the utility model.
Referring to fig. 1 and 2, in an embodiment, a device 10 for accurately positioning a seeding crucible position and an isometric GAP is used for accurately positioning a seeding crucible position or an isometric GAP when material melting is completed and temperature is stable in a monocrystalline silicon production process, and includes a guide cylinder 100 and a positioning assembly 200 arranged on the guide cylinder 100, wherein one end of the positioning assembly 200 is rotatably connected to the guide cylinder 100, and the other end of the positioning assembly extends out from the bottom end of the guide cylinder 100.
In the process of drawing the monocrystalline silicon, before closing the furnace, measuring and recording the distance from the lower end of the positioning assembly 200 to the bottom of the guide shell 100. And when the material melting is finished and the temperature is stable, the crucible is lifted to enable the silicon liquid level to contact the lower end of the positioning assembly 200, GAP is set according to the seeding process, and the crucible is lowered for a certain distance, namely the seeding crucible position. The distance between the seeding pot position and the distance between the lower end of the positioning assembly 200 and the bottom of the draft tube 100 is the GAP set by the seeding process. During isodiametric measurement, the isodiametric GAP is judged according to the distance from the lower end of the positioning assembly 200 to the silicon liquid level, and the positioning assembly 200 is close to the silicon liquid level, so that the isodiametric GAP can be accurately judged, and the judgment process is more intuitive.
More importantly, in the process of judging the seeding pot position or the equal-diameter GAP, when the positioning assembly 200 is interfered by external force, the positioning assembly 200 rotates along the guide shell 100 to play a buffering role to prevent the positioning assembly 200 from being deformed and damaged, and when the external force interference disappears, the positioning assembly 200 rotates along the guide shell 100 to automatically return to the original position to prevent the positioning assembly 200 from displacing to cause inaccurate positioning of the seeding pot position or the equal-diameter GAP.
It should be noted that, the above-mentioned positioning assembly 200 being rotatably connected to the draft tube 100 means that the positioning assembly 200 can be connected by a bearing connection, a ferrule connection, or the like, so that the positioning assembly 200 can swing up and down, back and forth, left and right, or any plane along the draft tube 100.
For example, the positioning assembly 200 includes a connection molybdenum rod 210 and a positioning reference rod 220, the connection molybdenum rod 210 is horizontally disposed, and one end of the connection molybdenum rod 210 is rotatably connected to the guide shell 100, specifically, an installation groove 110 is disposed on the guide shell 100, a shaft sleeve 111 is disposed in the installation groove 110, and the connection molybdenum rod 210 is connected to the shaft sleeve 111 through a bearing. One end of the positioning reference rod 220 is connected to the connecting molybdenum rod 210 and is perpendicular to the connecting molybdenum rod 210. When the connection molybdenum rod 210 can rotate along the axis in the shaft sleeve 111, the positioning reference rod 220 can drive the connection molybdenum rod 210 to rotate along the axis when the connection molybdenum rod 210 is acted by an external force, so that the positioning reference rod 220 can swing left and right. When the connection molybdenum rod 210 is connected in the shaft sleeve 111 in a rod end joint bearing manner, the positioning reference rod 220 can drive the connection molybdenum rod 210 to swing in any direction when an external force is applied, so that the external force impact is effectively counteracted, the deformation or damage of the positioning reference rod 220 is avoided, and the service life of the equipment is prolonged.
More importantly, after the external force disappears, the positioning reference rod 220 can automatically rotate and return under the action of the gravity of the positioning reference rod, so that the positioning reference rod 220 is prevented from displacing, and the positioning error of a seeding pot or an equal-diameter GAP is increased.
Preferably, in order to allow the positioning reference rod 220 to be automatically returned and prevent a deviation angle from being small, a vertical component of gravity of the positioning reference rod 220 is insufficient to return the positioning reference rod 220, and a weight 221 is provided at an end of the positioning reference rod 220 remote from the connection molybdenum rod 210.
Preferably, the draft tube 100 comprises a casing 101, an inner container 102 and a carbon felt layer 103 disposed between the casing 101 and the inner container 102, and the connecting molybdenum rod 210 is rotatably connected to an inner wall of the inner container 102 for facilitating manufacture and installation.
Further, the connection molybdenum rod 210 has a joint bearing 211 thereon, and the positioning reference rod 220 is connected to the joint bearing 211, so that the positioning reference rod 220 can swing relative to the connection molybdenum rod 210, thereby further reducing the impact of external force on the positioning reference rod 220.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (5)
1. The utility model provides a device of accurate location seeding crucible position and isometric GAP which characterized in that, includes the draft tube and set up in locating component on the draft tube, locating component's one end rotatable coupling the draft tube, the other end is followed the bottom of draft tube stretches out.
2. The device for accurately positioning a seeding crucible position and a GAP with equal diameter according to claim 1, wherein the positioning assembly comprises a connecting molybdenum rod and a positioning reference rod, the connecting molybdenum rod is horizontally arranged, one end of the connecting molybdenum rod is rotatably connected with the guide cylinder, and one end of the positioning reference rod is connected with the connecting molybdenum rod and is perpendicular to the connecting molybdenum rod.
3. The device for accurately positioning a seeding crucible position and a GAP with a constant diameter according to claim 2, wherein the end of the positioning reference rod far away from the molybdenum connecting rod is provided with a heavy hammer.
4. The device for accurately positioning the seeding crucible position and the equal-diameter GAP according to any one of claims 2 or 3, wherein the draft tube comprises a shell, an inner container and a carbon felt layer arranged between the shell and the inner container, an installation groove is formed in the inner wall of the inner container, a shaft sleeve is arranged in the installation groove, and the connecting molybdenum rod is connected into the shaft sleeve through a bearing.
5. The device for accurately positioning a seeding crucible position and a constant diameter GAP according to claim 4, wherein the connecting molybdenum rod is provided with a joint bearing, and the positioning reference rod is connected to the joint bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920964521.7U CN210104125U (en) | 2019-06-25 | 2019-06-25 | Device for accurately positioning seeding crucible position and equal diameter GAP |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920964521.7U CN210104125U (en) | 2019-06-25 | 2019-06-25 | Device for accurately positioning seeding crucible position and equal diameter GAP |
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| Publication Number | Publication Date |
|---|---|
| CN210104125U true CN210104125U (en) | 2020-02-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920964521.7U Active CN210104125U (en) | 2019-06-25 | 2019-06-25 | Device for accurately positioning seeding crucible position and equal diameter GAP |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114808115A (en) * | 2022-04-28 | 2022-07-29 | 晶科能源股份有限公司 | Liquid gap measuring method and liquid gap testing device |
| CN115434005A (en) * | 2022-08-23 | 2022-12-06 | 曲靖阳光新能源股份有限公司 | Tool for measuring crucible seam of czochralski silicon and using method thereof |
-
2019
- 2019-06-25 CN CN201920964521.7U patent/CN210104125U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114808115A (en) * | 2022-04-28 | 2022-07-29 | 晶科能源股份有限公司 | Liquid gap measuring method and liquid gap testing device |
| CN115434005A (en) * | 2022-08-23 | 2022-12-06 | 曲靖阳光新能源股份有限公司 | Tool for measuring crucible seam of czochralski silicon and using method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210121 Address after: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee after: FERROTEC (NINGXIA) ADVANCED QUARTZ MATERIAL Co.,Ltd. Address before: 25 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee before: NINGXIA YINHE NEW ENERGY TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee after: Ningxia dunyuan poly core semiconductor technology Co.,Ltd. Address before: 750021 No.23 Guangming West Road, Xixia District, Yinchuan City, Ningxia Hui Autonomous Region Patentee before: FERROTEC (NINGXIA) ADVANCED QUARTZ MATERIAL Co.,Ltd. |