CN115144734A

CN115144734A - Swing adjusting device and chip testing machine with same

Info

Publication number: CN115144734A
Application number: CN202210914527.XA
Authority: CN
Inventors: 王泽明; 申卫; 王梓伊; 徐晓钢; 孙家琛
Original assignee: Hebei Shenghao Photoelectric Technology Co ltd
Current assignee: Hebei Shenghao Photoelectric Technology Co ltd
Priority date: 2022-07-29
Filing date: 2022-07-29
Publication date: 2022-10-04
Anticipated expiration: 2042-07-29
Also published as: CN115144734B

Abstract

The invention relates to the technical field of wafer production, in particular to a swing adjusting device and a chip testing machine with the same. A swing adjusting device is suitable for a chip testing machine or a testing platform, and comprises: the receiving block is provided with a receiving surface and a receiver with an axis vertical to the receiving surface; swing structure, adjust the seat including first regulation seat and second, first regulation seat is equipped with arc guide rail or guide slot, the second is adjusted the seat and is equipped with guide slot or arc guide rail, first regulation seat and second are adjusted the seat and are passed through arc guide rail and guide slot sliding connection, first regulation seat and second are adjusted the seat and are equipped with the connecting block within a definite time, first regulation seat is equipped with first piece of screwing, first piece of screwing and connecting block butt, be equipped with the receipt piece on the second is adjusted the seat, the relative first regulation seat swing of seat is adjusted to the drive second, the first piece of screwing makes the receiving face parallel with chip positive optical end cross section. The invention solves the problem that the receiving surface of the installation optical fiber (or PD) of the receiving block cannot be parallel to the cross section of the positive optical end due to errors of the receiving block.

Description

Swing adjusting device and chip testing machine with same

Technical Field

The invention relates to the technical field of wafer production, in particular to a swing adjusting device and a chip testing machine with the same.

Background

In the chip production process, the splitter splits Wafer (named as Wafer in Chinese) into bars by a cleaving technology, or splits Bar into chips (named as chip in Chinese). In particular, bar can be regarded as a single Bar formed by a plurality of chips side by side, and is called Bar.

Before producing a single chip, the manufacturer would use a chip tester to test the performance of the single chip arranged on the Bar strip. In the testing process, a probe arranged on a testing platform of the chip testing machine is switched on after being powered on, a power-on end arranged on the chip is powered on, a light-emitting strip can appear in the chip, light signals are emitted from two ends of the light-emitting strip, then the light signals are received by optical fibers (receiving the light signals) or PDs (converting the received light signals into electrical signals), and whether the standard is met or not is judged according to the light signals.

In recent years, with the advent of high speed/high power chips, special chips with oblique angle optical waveguides (e.g. turning optical waveguide chips with SOA amplification function) have appeared, and the angle of the optical signal emitted from both ends of the light-emitting strip changes (the backlight end is still a vertical optical waveguide, while the positive end is designed as an optical waveguide with a fixed angle), which requires that the angle of the optical fiber or PD on the chip tester should change with the change of the angle of the optical signal. In the production process of the existing chip testing machine, due to errors in machining precision and installation, different included angles exist between a receiving block for installing optical fibers or PDs and a testing platform and a horizontal plane respectively, namely, a receiving surface for installing the optical fibers (or PDs) on the receiving block and the cross section of a positive light end cannot be arranged in parallel, so that the optical fibers or the PDs cannot effectively receive optical signals, and errors exist in detection results.

Disclosure of Invention

Therefore, the technical problem to be solved by the present invention is to overcome the problem that the cross sections of the receiving surface of the receiving block on which the optical fiber (or PD) is mounted and the positive end cannot be arranged in parallel due to processing and mounting errors in the receiving block in the prior art, so that the optical fiber or PD cannot effectively receive optical signals, thereby providing a swing adjusting device and a chip tester having the same.

In order to solve the above problem, the present invention provides a swing adjusting apparatus including:

the receiving block is provided with a receiving surface and a receiver with an axis perpendicular to the receiving surface;

swing structure, swing structure includes that first regulation seat and second adjust the seat, first regulation seat be equipped with arc guide rail or guide slot the second adjust the seat and be equipped with guide slot or arc guide rail, first regulation seat and second adjust the seat between through arc guide rail and guide slot sliding connection, first regulation seat and second adjust the seat between be equipped with the connecting block, first piece of screwing on the first regulation seat, first piece of screwing sets up with the connecting block butt, be equipped with on the second adjusts the seat receive the piece, the drive the second is adjusted the seat and is relative first regulation seat swings to preset position, and first piece of screwing makes first regulation seat and second adjust the seat fixed, so that the receiving face is parallel with the cross section of waiting to detect the positive optical end of chip.

Optionally, first regulation seat is including wearing to establish regulation pole in arc guide rail or the guide slot, it is equipped with turning handle and screw rod end to adjust the pole, the second is adjusted and is provided with the regulation end on the terminal surface of seat towards first regulation, the screw rod end with adjust the end meshing setting, rotate turning handle, it is relative to adjust the end the screw rod end motion.

Optionally, the connecting block is arranged in an arc shape.

Optionally, the receiver is a PD receiver or an optical fiber receiver, the optical fiber receiver is connected with a spectrometer, and the PD receiver is connected with a signal amplification and acquisition board.

Optionally, still include rotating-structure, rotating-structure is equipped with rotation seat, first rolling disc and second rolling disc from bottom to top in proper order along the direction of height, first rolling disc and second rolling disc rotate to be connected first rolling disc rotates with the rotation seat to be connected, the rotation seat with second regulation seat fixed connection, the piece of receiving is located on the second rolling disc.

Optionally, a bearing is arranged between the first rotating disc and the second rotating disc, a second rotating piece is rotatably arranged on the fixed end of the first rotating disc, and the second rotating piece is abutted to the second rotating disc.

Optionally, be equipped with the spout in the rotation seat, expose in the spout and have three at least balls, first rotary disk and ball point contact, the fine setting end of rotating the seat is equipped with angle adjusting piece, be equipped with angle adjusting lever on the first rotary disk, angle adjusting piece with the angle adjusting lever butt.

Optionally, still include altitude mixture control seat, first level adjusting plate, the second level adjusting plate that sets gradually from bottom to top along the direction of height, the altitude mixture control seat is located on the second rolling disc, and is equipped with altitude mixture control spare, be equipped with first level adjusting spare on the first level adjusting plate, be equipped with second level adjusting spare on the second level adjusting plate, the axis of first level adjusting spare sets up with the axis of second level adjusting spare is perpendicular, it fixes and locates to receive the piece on the second level adjusting plate.

A chip testing machine comprises the swing adjusting device and a base plate, wherein the swing adjusting device is arranged on the base plate.

Optionally, still include test platform, place on the test platform and treat the Bar that detects to reach with treat the probe structure that the Bar corresponds the setting.

The technical scheme of the invention has the following advantages:

1. the invention provides a swing adjusting device, comprising: the receiving block is provided with a receiving surface and a receiver with the axis perpendicular to the receiving surface; swing structure, be equipped with first regulation seat and second regulation seat, first regulation seat is equipped with arc guide rail or guide slot, the second is adjusted the seat and is equipped with guide slot or arc guide rail, first regulation seat and second are adjusted the seat and are passed through arc guide rail and guide slot sliding connection, first regulation seat and second are adjusted the seat and are equipped with the connecting block within a definite time, be equipped with the piece of screwing on the first regulation seat, first piece of screwing and connecting block butt setting, be equipped with the receiving block on the second regulation seat, the relative first regulation seat of drive second regulation seat swings to preset position, it makes first regulation seat and second regulation seat fixed to screw first piece of screwing, so that the cross section that receives the face and wait to detect the positive optical end of chip is parallel. First regulation seat and second are adjusted the seat and are passed through arc guide rail and guide slot sliding connection, in order to realize the relative movement between the two, drive the second and adjust the seat and drive the receiving face of receiving the piece to swing relative first regulation seat, make the receiving face of receiving the piece parallel with the cross section of waiting to detect the positive optical end of chip through the swing, the receiver of the axis perpendicular to receiving face of being convenient for receives the light signal that sends from the positive optical end effectively, thereby reduce because of processing, the error that the installation appears, still can eliminate the harmful effects of other environmental factors such as temperature, promote the precision of testing result. After the first adjusting seat and the second adjusting seat are adjusted, the screwing piece is rotated towards the first adjusting seat, and the screwing piece enables the connecting block to be tightly abutted to the first adjusting seat, so that the first adjusting seat and the second adjusting seat are fixed, and relative sliding between the first adjusting seat and the second adjusting seat is avoided.

2. The invention provides a swing adjusting device, wherein a first adjusting seat comprises an adjusting rod which is arranged in an arc-shaped guide rail or a guide groove in a penetrating mode, the adjusting rod is provided with a rotating handle and a screw rod end, the end face, facing the first adjusting seat, of the guide groove or the arc-shaped guide rail of a second adjusting seat is provided with an adjusting end, the screw rod end and the adjusting end are arranged in a meshed mode, and the rotating adjusting end moves relative to the screw rod end. The screw end of the adjusting rod is meshed with the adjusting end of the second adjusting seat to form a worm and gear structure, and relative movement between the first adjusting seat and the second adjusting seat is achieved through meshing.

3. According to the swing adjusting device provided by the invention, the connecting block is arranged in an arc shape so as to be more suitable for the shape of the first adjusting seat.

4. According to the swing adjusting device provided by the invention, the receiver is a PD (potential difference) receiver or an optical fiber receiver, the optical fiber receiver is connected with a spectrometer, the optical fiber receiver sends received spectral curve data into the spectrometer for spectral signal analysis, whether the quality requirement of a product is met is judged according to the result of spectral test data, and the product grade classification is carried out; the PD receiver is connected with a signal amplification acquisition board, converts the optical signal into an electric signal and transmits the electric signal to the signal amplification acquisition board for data acquisition, calculates and processes electrical characteristic data and classifies the electrical characteristic grade according to judgment conditions.

5. The swing adjusting device further comprises a rotating structure, wherein the rotating structure is sequentially provided with a rotating seat, a first rotating disk and a second rotating disk from bottom to top along the height direction, the first rotating disk and the second rotating disk are rotationally connected, the first rotating disk is rotationally connected with the rotating seat, the rotating seat is fixedly connected with the second adjusting seat, and a receiving block is arranged on the second rotating disk. After the specification, the material and the like of the chip to be detected change, the angle of the positive light end of the chip to be detected changes, and the angle of the receiving block needs to be adjusted through the rotating structure, so that the angle of the receiving surface is consistent with the angle of the positive light end.

6. According to the swing adjusting device provided by the invention, the bearing is arranged between the first rotating disc and the second rotating disc, the second rotating piece is rotatably arranged at the fixed end of the first rotating disc, and the second rotating piece is abutted against the second rotating disc so as to fix the second rotating disc through the rotating piece.

7. The invention provides a swing adjusting device, wherein a sliding groove is arranged in a rotating seat, at least three balls are exposed in the sliding groove, a first rotating disc is in point contact with the balls, an angle adjusting piece is arranged at the fine adjustment end of the rotating seat, an angle adjusting rod is arranged on a first rotating rod, and the angle adjusting piece is abutted to the angle adjusting rod. First rotary disk and ball point contact rotate in order to realize first rotary disk and rotation seat within a definite time relatively, and rotation angle regulating part drives the angle modulation pole and rotates, drives first rotary disk and rotates for rotating the seat.

8. The swing adjusting device provided by the invention further comprises a height adjusting seat, a first level adjusting plate and a second level adjusting plate which are sequentially arranged along the height direction from bottom to top, wherein the height adjusting seat is arranged on the second rotating disc and is provided with a height adjusting piece, and the height adjusting piece is used for adjusting the height of the height adjusting seat. Be equipped with first level (l) ing spare on the first level (l) ing board, be equipped with second level (l) ing spare on the second level (l) ing board, the axis of first level (l) ing spare sets up with the axis of second level (l) ing spare is perpendicular to realize the not equidirectional regulation of horizontal plane, receive the piece and fix on the second level (l) ing board.

9. The chip tester provided by the invention has the advantages of any one of the above because the swing adjusting device is adopted. Still include bottom plate and test platform, locate swing adjusting device on the bottom plate, place on the test platform and wait to detect the Bar strip to and wait to detect the probe structure that the Bar strip corresponds the setting, with wait to detect the Bar strip contact after probe structure circular telegram, wait that the chip on the Bar strip can form luminous strip, luminous strip positive optical end and backlight end send optical signal respectively, the optical signal who sends from positive optical end is received to the receiver of the swing adjusting device who sets up on the bottom plate.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic structural view of a swing adjusting apparatus provided in an embodiment of the present invention;

fig. 2 is a schematic structural view of a swing structure provided in an embodiment of the present invention;

FIG. 3 is a schematic structural view of a first adjustment seat provided in an embodiment of the present invention;

FIG. 4 is a schematic structural view of a second adjustment seat provided in an embodiment of the present invention;

fig. 5 is a schematic structural view of a swing structure provided in an embodiment of the present invention;

fig. 6 is a schematic structural view of a rotation structure provided in an embodiment of the present invention;

FIG. 7 is a schematic cross-sectional view of a first turntable and a second turntable of a swing structure provided in an embodiment of the present invention;

FIG. 8 is a schematic structural view of a height-adjustment seat, a first level-adjustment plate, and a second level-adjustment plate provided in an embodiment of the present invention;

fig. 9 is a schematic structural view of a connection between a rotary block and a PD receiver according to an embodiment of the present invention;

FIG. 10 is a schematic structural diagram of a test platform provided in an embodiment of the present invention;

fig. 11 is a schematic structural diagram of a Bar to be detected in an embodiment of the invention.

Description of reference numerals: 1. a fiber optic receiver; 2. a receiving surface; 3. a PD receiver; 4. receiving a block; 5. a second level adjustment plate; 6. a first level adjustment plate; 7. a swing structure; 8. a rotating structure; 9. a height adjusting seat; 10. rotating the handle; 11. a first adjusting seat; 12. a second adjustment seat; 13. a screw end; 14. an arc-shaped guide rail; 15. a guide groove; 16. an adjustment end; 17. connecting blocks; 18. a first tightening member; 19. rotating the base; 20. a first rotating disk; 21. a second rotating disk; 22. a second tightening member; 23. an angle adjusting rod; 24. a fine tuning end; 25. an angle adjusting member; 26. a third tightening member; 27. a bearing; 28. a height adjustment member; 29. a supporting base; 30. a movable seat; 31. a fastener; 32. a second horizontal adjustment member; 33. a second fixing plate; 34. a second movable plate; 35. a first movable plate; 36. a first level adjustment member; 37. an extension end; 38. a first fixing plate; 39. a fixing hole; 40. placing the plate; 41. a probe structure; 42. a base plate; 43. a backlight end; 44. a power-on end; 45. a chip to be detected; 46. a light emitting strip; 47. bar strips to be detected; 48. and a positive light end.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

One embodiment of a wobble adjustment apparatus as shown in fig. 1-11, comprises: swing structure 7, the rotating-structure 8 that sets gradually from bottom to top along the direction of height are equipped with two altitude mixture control seats 9 on the rotating-structure 8 side by side, and each altitude mixture control seat 9 is provided with first level adjustment board 6, second level adjustment board 5 and receiving block 4 from bottom to top along the direction of height. Wherein the receiving face 2 of one receiving block 4 is provided with a PD receiver 3 and the receiving face 2 of the other receiving block 4 is provided with a fiber optic receiver 1.

As shown in fig. 1, 2, 3, 4 and 5, the swing structure 7 includes a first adjusting seat 11 and a second adjusting seat 12, the first adjusting seat 11 is provided with an arc-shaped guide rail 14 and an adjusting rod penetrating through the arc-shaped guide rail 14, wherein the adjusting rod is provided with a rotating handle 10 and a screw end 13, and the screw end 13 is exposed on the surface of the arc-shaped guide rail 14; the second is adjusted the seat 12 and is equipped with guide slot 15 and is equipped with on the terminal surface towards first regulation seat 11 and adjust end 16, adjusts end 16 and be the arc structure, and is equipped with the tooth, and first regulation seat 11 and second are adjusted seat 12 and are passed through arc guide rail 14 and guide slot 15 sliding connection, and screw rod end 13 sets up with adjusting end 16 meshing and be formed with the worm gear structure. In order to facilitate the fixing of the adjusted first adjusting seat 11 and the second adjusting seat 12, as shown in fig. 4 and 5, an arc-shaped connecting block 17 is further disposed between the first adjusting seat 11 and the second adjusting seat 12, a first screwing member 18 is further disposed on the first adjusting seat 11, an axial direction of the first screwing member 18 is perpendicular to a length direction of the connecting block 17, the first screwing member 18 is abutted against the connecting block 17, and the first screwing member 18 is rotated towards the connecting block 17 to fix the first adjusting seat 11 and the second adjusting seat 12 through the connecting block 17. Specifically, the first tightening member 18 is a bolt.

As shown in fig. 1, 6 and 7, the rotating structure 8 is sequentially provided with a rotating base 19, a first rotating disk 20 and a second rotating disk 21 from bottom to top along the height direction, the rotating base 19 is fixedly connected with the second adjusting base 12, the first rotating disk 20 is rotatably connected with the second rotating disk 21, the first rotating disk 20 is rotatably connected with the rotating base 19, wherein the rotating base 19 is fixedly connected with the second adjusting base 12, and the second rotating disk 21 is fixedly connected with the height adjusting base 9. To facilitate the rotation of the first rotary disk 20 and the second rotary disk 21, as shown in fig. 7, a bearing 27 is provided between the first rotary disk 20 and the second rotary disk 21, and the relative rotation between the first rotary disk 20 and the second rotary disk 21 is achieved by the rotation of the bearing 27. In order to fix the second rotating disk 21, a second tightening member 22 is rotatably disposed on the fixing end of the first rotating disk 20, the second tightening member 22 abuts against the second rotating disk 21, and the second tightening member 22 is rotated to fix the second rotating disk 21. Specifically, the second tightening member 22 is a bolt.

In order to facilitate the rotation of the first rotary disk 20 and the rotary seat 19, an annular sliding groove is formed in the rotary seat 19, three balls are exposed in the sliding groove, and the first rotary disk 20 is in point contact with the balls to realize the relative rotation with the rotary seat 19 through the balls. In order to realize the micro-rotation between the first rotating disk 20 and the rotating base 19, as shown in fig. 6, the rotating base 19 is fixedly provided with a fine-adjustment end 24, the fine-adjustment end 24 is provided with an angle adjusting part 25, the first rotating disk 20 is provided with an angle adjusting rod 23, the angle adjusting part 25 is abutted to the angle adjusting rod 23, the angle adjusting part 25 is rotated to enable the angle adjusting rod 23 to drive the first rotating disk 20 to rotate at a small angle, and the small-angle relative rotation between the first rotating disk 20 and the rotating base 19 is realized. In particular, the angle adjustment member 25 is a differential head. In order to realize the fixation between the first rotary disk 20 and the rotary base 19, the third rotating member 26 is arranged on the first rotary disk 20, the third rotating member 26 passes through the first rotary disk 20 to abut against the rotary base, and the third rotating member 26 is rotated to realize the fixation between the first rotary disk 20 and the rotary base. Specifically, the third tightening member 26 is a bolt.

As shown in fig. 8, the height adjusting base 9 includes a movable base 30, a supporting base 29 and a height adjusting member 28, the supporting base 29 is fixedly connected to the second rotating disk 21, wherein the height adjusting member 28 is disposed on the supporting base 29, and the height adjusting member 28 abuts on the inclined surface of the movable base 30, and the height of the movable base 30 is adjusted by rotating the height adjusting member 28 to contact with different positions of the inclined surface of the movable base 30, so as to change the height of the receiving block 4. In particular, the height adjustment member 28 is a differential head.

As shown in fig. 8, the first leveling plate 6 includes a first fixed plate 38 and a first movable plate 35 that are slidably connected, the first fixed plate 38 is fixedly connected to the movable base 30, wherein an "L" -shaped protruding end 37 is provided on the first fixed plate 38, a first leveling member 36 is provided on the protruding end 37, the first leveling member 36 abuts against a side surface of the first movable plate 35, and rotating an adjusting lever of the first leveling member 36 pushes the first movable plate 35 to move relative to the first fixed plate 38. Specifically, the first level adjustment member 36 is a differential head. In order to fix the adjusted first movable plate 35 and the adjusted first fixed plate 38, the first level adjustment plate 6 is further provided with a fastening member 31, and the fastening member 31 is rotatably fixed to the first movable plate 35.

As shown in fig. 8, the second leveling plate 5 includes a second fixed plate 33 and a second movable plate 34 which are slidably connected, the second fixed plate 33 is fixedly connected with the first movable plate 35, wherein an "L" -shaped protruding end 37 is provided on the second fixed plate 33, a second leveling member 32 is provided on the protruding end 37, an axis of the second leveling member 32 is perpendicular to an axis of the first leveling member 36, the second leveling member 32 abuts against a side surface of the second movable plate 34, and rotating an adjusting lever of the second leveling member 32 pushes the second movable plate 34 to move relative to the second fixed plate 33. Specifically, the second level adjustment member 32 is a differential head. In order to fix the adjusted second movable plate 34 and the second fixed plate 33, a fastening member 31 is further disposed on the second level adjustment plate 5, and the fastening member 31 is rotated to be fixed with the second movable plate 34.

As shown in fig. 9, the receiving block 4 is provided with four fixing holes 39, and bolts are inserted into the four fixing holes 39 to be fixedly connected with the second movable plate 34 of the second level adjustment plate 5. In order to fix the fiber-optic receiver 1 or the PD receiver 3, the receiving block 4 has an L-shaped cross section, and the fiber-optic receiver 1 or the PD receiver 3 is clamped on the receiving block 4 with its axis perpendicular to the receiving surface 2. In order to analyze whether the optical signal meets the requirement or not, the PD receiver 3 is connected with a signal amplification collecting plate, and the optical fiber receiver 1 is connected with a spectrometer to analyze and judge the collected electrical characteristic curve and spectrum curve.

A chip testing machine, as shown in fig. 10 and 11, includes the above swing adjusting device, and further includes a bottom plate 42, the bottom plate 42 is provided with the swing adjusting device, a testing platform corresponding to the swing adjusting device, and a power mechanism for driving the testing platform to move, wherein the testing platform is provided with a placing plate 40, the placing plate 40 is provided with bars 47 to be detected and probe structures 41 arranged right above the bars 47 to be detected, specifically, the bars 47 to be detected are provided with two chips arranged at intervals, each chip is provided with three power-on ends 44, and each power-on end 44 corresponds to one probe of the probe structures 41.

In the specific implementation process, due to different specifications (such as thickness, height, size and the like) and different materials of the chip 45 to be detected, the rotation angle of the second rotating disc 21 is set according to the inclined optical waveguide angle of the positive optical end 48, so that the axis of the receiver perpendicular to the receiving surface 2 of the receiving block 4 is parallel to the axis of the positive optical end 48, that is, the axis of the PD receiver 3 or the optical fiber receiver 1 is perpendicular to the cross section of the positive optical end 48 of the chip 45 to be detected (the PD or the optical fiber probe is consistent with the optical waveguide angle of the chip 45 to be detected). Subsequently, the second adjustment base 12 is driven to pivot relative to the first adjustment base 11, so that the receiving surface 2 is parallel to the cross section of the positive end 48 of the chip 45 to be tested. When the axis of the front end 48 of the chip 45 to be detected is found to be offset from the central axis of the receiver (the two axes are parallel but not coincident), the height is slightly adjusted by the field personnel through the height adjusting piece 28, the first horizontal adjusting piece 36 and the second horizontal adjusting piece 32 are slightly adjusted in two directions vertically arranged in the horizontal plane, and the central axis of the PD receiver 3 is coincident with the central axis of the front end 48 of the light-emitting strip 46. After all the position adjustments are completed, the probe is lowered and electrified to enable the light-emitting bar 46 of the same chip to emit light, the positive light end 48 and the backlight end 43 of the light-emitting bar 46 respectively emit light signals, the spectral coupling peak value is the highest and the best, and the PD receiver 3 receives the light signals transmitted by the positive light end 48 with the highest efficiency. After the PD receiver 3 receives the optical signal, the test platform moves to the optical signal receiving area of the optical fiber receiver 1, and performs fine adjustment in the height and horizontal directions to receive the optical signal with maximum efficiency.

As an alternative embodiment, the first adjusting seat 11 may be further provided with a guide groove 15, and the second adjusting seat 12 may be further provided with an arc-shaped guide rail 14.

As an alternative embodiment, the adjusting end 16 of the second adjusting seat 12 may also be a nut, i.e. the screw of the adjusting rod of the first adjusting seat 11 penetrates into the nut to achieve the relative movement between the first adjusting seat 11 and the second adjusting seat 12.

Alternatively, the number of balls may be 4, 5 or even more.

Alternatively, the height adjustment member 28, the first horizontal adjustment member 36, and the second horizontal adjustment member 32 may be bolts or the like.

As an alternative embodiment, the Bar 47 to be detected can also be provided with 3, 4 or even more chips 45 to be detected arranged at intervals.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications of the invention may be made without departing from the spirit or scope of the invention.

Claims

1. A kind of swing controlling device, characterized by that, suitable for the chip tester or test platform, comprising:

a receiving block (4), wherein the receiving block (4) is provided with a receiving surface (2) and a receiver with an axis perpendicular to the receiving surface (2);

swing structure (7), swing structure (7) adjust seat (12) including first regulation seat (11) and second, first regulation seat (11) are equipped with arc guide rail (14) or guide slot (15), second regulation seat (12) are equipped with guide slot (15) or arc guide rail (14), first regulation seat (11) and second are adjusted and are passed through arc guide rail (14) and guide slot (15) sliding connection between seat (12), first regulation seat (11) and second are adjusted and are equipped with connecting block (17) between seat (12), be equipped with first spiral tightening piece (18) on first regulation seat (11), first spiral tightening piece (18) and connecting block (17) butt setting, be equipped with on second regulation seat (12) receive piece (4), the drive second is adjusted seat (12) and is relative first regulation seat (11) swing to preset position, and spiral tightening first spiral tightening piece (18) makes first regulation seat (11) and second regulation seat (12) fixed, so that make the receiving face (2) and the positive cross section of waiting to detect the chip (48) are held.

2. The swing adjusting device according to claim 1, wherein the first adjusting seat (11) comprises an adjusting rod inserted into the arc-shaped guide rail (14) or the guide groove (15), the adjusting rod is provided with a rotating handle (10) and a screw end (13), the end surface of the second adjusting seat (12) facing the first adjusting seat (11) is provided with an adjusting end (16), the screw end (13) is engaged with the adjusting end (16), the rotating handle (10) is rotated, and the adjusting end (16) moves relative to the screw end (13).

3. The oscillation device of claim 1 wherein the connecting block (17) is arcuately disposed.

4. The wobble adjustment device of claim 1, wherein the receiver is a PD receiver (3) or a fiber optic receiver (1), the fiber optic receiver (1) is connected with a spectrometer, and the PD receiver (3) is connected with a signal amplification and acquisition board.

5. The swing adjusting device according to any one of claims 1 to 4, further comprising a rotating structure (8), wherein the rotating structure (8) is provided with a rotating base (19), a first rotating disk (20) and a second rotating disk (21) in sequence from bottom to top along the height direction, the first rotating disk (20) and the second rotating disk (21) are rotatably connected, the first rotating disk (20) is rotatably connected with the rotating base (19), the rotating base (19) is fixedly connected with the second adjusting base (12), and the receiving block (4) is arranged on the second rotating disk (21).

6. The oscillation adjustment device of claim 5, wherein a bearing (27) is provided between the first rotary disk (20) and the second rotary disk (21), and a second rotating member (22) is rotatably provided on the fixed end of the first rotary disk (20), the second rotating member (22) abutting against the second rotary disk (21).

7. The oscillation adjustment device according to claim 6, wherein a sliding groove is formed in the rotating seat (19), at least three balls are exposed in the sliding groove, the first rotating disk (20) is in point contact with the balls, an angle adjustment member (25) is arranged at the fine adjustment end (24) of the rotating seat (19), an angle adjustment rod (23) is arranged on the first rotating disk (20), and the angle adjustment member (25) is abutted against the angle adjustment rod (23).

8. The swing adjusting device according to claim 5, further comprising a height adjusting seat (9), a first level adjusting plate (6) and a second level adjusting plate (5) which are sequentially arranged from bottom to top along the height direction, wherein the height adjusting seat (9) is arranged on the second rotating disc (21) and is provided with a height adjusting piece (28), the first level adjusting plate (6) is provided with a first level adjusting piece (36), the second level adjusting plate (5) is provided with a second level adjusting piece (32), the axis of the first level adjusting piece (36) is perpendicular to the axis of the second level adjusting piece (32), and the receiving block (4) is fixedly arranged on the second level adjusting plate (5).

9. A chip testing machine, comprising the swing adjusting device as claimed in any one of claims 1 to 8, and further comprising a base plate (42), wherein the swing adjusting device is provided on the base plate (42).

10. The chip testing machine according to claim 9, further comprising a testing platform, wherein a Bar (47) to be detected and a probe structure (41) corresponding to the Bar (47) to be detected are placed on the testing platform.