CN114720734A

CN114720734A - Probe frame and test platform with same

Info

Publication number: CN114720734A
Application number: CN202210425007.2A
Authority: CN
Inventors: 牛超凡; 郭岩; 戎晓红; 彭薪元
Original assignee: Hebei Shenghao Photoelectric Technology Co ltd
Current assignee: Hebei Shenghao Photoelectric Technology Co ltd
Priority date: 2022-04-21
Filing date: 2022-04-21
Publication date: 2022-07-08
Also published as: WO2023201965A1; CN116519998A

Abstract

The invention provides a probe rack and a test platform with the same, and belongs to the technical field of chip testing, wherein the probe rack comprises a main body and an adjusting platform, the main body is connected with a swing arm through a spring plate, and a probe is arranged on the swing arm; the main part is located to the regulating station, is equipped with the regulating part that is suitable for to swing arm applied pressure on the regulating station, and the cover is equipped with first elastic component on the regulating part, and first elastic component has the elastic force that the direction that the swing arm was kept away from to the drive regulating part orientation removed, and the regulating part facial make-up is equipped with the second elastic component, and the regulating part passes through the second elastic component and contacts with the swing arm. The probe frame provided by the invention can avoid the influence of the action shaking factor on the probe when the probe is abutted against the piece to be detected, thereby being beneficial to improving the abutting pressure of the probe.

Description

Probe frame and test platform with same

Technical Field

The invention relates to the technical field of chip testing, in particular to a probe holder and a test platform with the probe holder.

Background

In the chip production of optical communication, the wafer is not directly cut into single chips, but is cut into a plurality of bars, which are called Bar bars. The Bar strip is provided with a plurality of chips, the parameters of the chips need to be tested in production, the existing mode for testing the chips in the Bar strip is generally carried out by using a test platform, and after a probe on the test platform contacts the Bar strip to be tested, the probe is electrified to simulate the actual working condition to detect the states of the chips in the Bar strip.

The probe of test platform passes through the elastic plate to be installed on test platform, and when the test end butt of probe was on the bar that awaits measuring, the elastic plate made the test end of probe and the bar that awaits measuring between keep certain butt pressure. In actual work, the abutting pressure between the probe and the bar needs to be adjusted, and the accuracy requirement of the abutting pressure of the probe in the whole testing process is high.

However, the abutting pressure of the probe to the bar is easily affected by the action shaking of the adjusting piece, so that the abutting pressure of the probe cannot be in a controllable range between cells, and the test effect is affected.

Disclosure of Invention

Therefore, the present invention is directed to overcome the defect of low accuracy of the probe holding pressure in the probe test platform in the prior art, and provide a probe holder and a test platform having the same.

In order to solve the above problems, the present invention provides a probe holder comprising:

the probe comprises a main body, a probe body and a probe cover, wherein the main body is connected with a swing arm through a spring plate, and the swing arm is provided with a probe;

the adjusting platform is arranged on the main body, and an adjusting piece suitable for applying pressure to the swing arm is arranged on the adjusting platform;

the first elastic piece is sleeved on the adjusting piece and has elastic force for driving the adjusting piece to move towards the direction far away from the swing arm;

the second elastic piece is arranged on the adjusting piece, and the adjusting piece is in contact with the swing arm through the second elastic piece.

Further, the adjusting piece is in threaded connection with the adjusting table.

Further, an end of the adjusting member facing the swing arm has a center hole for mounting the second elastic member, and the second elastic member is partially mounted in the center hole.

Further, one end of the second elastic piece is fixedly connected to one end of the adjusting piece, which faces the swing arm.

Further, still include: a conductive plate connected to the main body, the conductive plate having an abutting surface facing the swing arm, the swing arm having an electrode facing the abutting surface;

in a free state, the regulator applies pressure to the swing arm, and the electrode of the swing arm abuts against the abutment surface of the conductive plate.

Further, still include: a connecting rod connected between the adjusting stage and the conductive plate.

Further, the connecting rod passes through the swing arm.

Furthermore, a clamp for connecting a probe is arranged on the swing arm, and the probe is detachably arranged on the clamp.

Further, the jig includes: the probe comprises a sliding column and a sliding part sleeved on the sliding column in a sliding manner, wherein a clamping hole for penetrating through the probe is formed in the free end of the sliding column;

the sliding column is sleeved with a third elastic piece, and the third elastic piece has elastic force for driving the sliding piece to move towards the free end of the sliding column.

In addition, the invention also provides a test platform which comprises the probe frame.

The technical scheme of the invention has the following advantages:

1. according to the probe frame provided by the invention, the swing arm is connected to the main body through the elastic sheet, the adjusting table is arranged on the main body, the adjusting piece for applying pressure to the swing arm is arranged on the adjusting table, and the first elastic piece is sleeved on the adjusting piece; the regulating part facial make-up is equipped with the second elastic component, and through second elastic component and swing arm contact, the swing arm receives the elastic force effect of second elastic component to the butt pressure that makes the swing arm keeps in the interval within range of little fluctuation, is favorable to guaranteeing the butt precision of probe.

2. According to the probe frame provided by the invention, the second elastic part is partially arranged in the central hole, and the axial direction of the second elastic part is restrained by the central hole, so that the second elastic part can be kept to stretch and retract on the axial line, and the second elastic part is prevented from being deflected and deformed.

3. According to the probe rack provided by the invention, the swing arm is provided with the clamp connected with the probe, the probe is detachably arranged on the clamp, and different elastic pieces can be selected to adjust the elastic force according to different sizes of actual test probes, so that the probe can be ensured to be fixed in the clamping hole, and the probe can be prevented from being incapable of being clamped due to too small elastic force or damaged due to too large elastic force.

4. The test platform provided by the invention has all the advantages of the probe frame because of the probe frame.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a perspective view of a test platform in an embodiment of the present invention;

FIG. 2 is a front view of the test platform shown in FIG. 1;

FIG. 3 is an exploded view of a portion of the test platform shown in FIG. 1;

fig. 4 is a schematic view showing the assembly of the adjusting member and the first and second elastic members in the embodiment of the present invention.

Description of reference numerals:

1. a main body; 2. an adjusting table; 3. a first elastic member; 4. a second elastic member; 5. swinging arms; 6. a probe; 7. an adjustment member; 8. a conductive plate; 9. a connecting rod; 10. a sliding post; 11. a slider; 12. a third elastic member; 111. a central bore; 112. a spring plate; 113. a blocking portion.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

Example 1

The embodiment provides a probe rack which can be applied to bar detection equipment or chip detection equipment.

As shown in fig. 1 to 3, the probe holder of this embodiment includes main part 1 and adjusting station 2, main part 1 is connected with swing arm 5 through shell fragment 112, swing arm 5 facial make-up is equipped with probe 6, adjusting station 2 is located on main part 1, be equipped with on adjusting station 2 and be suitable for the regulating part 7 that applys pressure to swing arm 5, the cover is equipped with first elastic component 3 on regulating part 7, first elastic component 3 has the elastic force that the direction that drives regulating part 7 orientation kept away from swing arm 5 removed, adjusting part 7 facial make-up is equipped with second elastic component 4, regulating part 7 passes through second elastic component 4 and swing arm 5 contact.

Through setting up from this, regulating part 7 receives the restraint elastic force of first elastic component 3 in the state on regulation platform 2 to avoid regulating part 7 to rock the influence and to swing arm 5 exert pressure, swing arm 5 receives the elastic force effect of second elastic component 4, thereby makes the butt pressure of swing arm keep in the interval within range of little fluctuation, is favorable to guaranteeing probe 6's butt precision.

As shown in fig. 2 and 3, in this embodiment, the adjusting member 7 is in threaded connection with the adjusting table 2, the adjusting member 7 is provided with a threaded section adapted to fit with a threaded hole of the adjusting table 2, an end portion of the adjusting member 7 is provided with a blocking portion 113 having an outer diameter larger than the threaded section, the pressure adjustment control precision exerted by the adjusting member 7 on the swing arm 5 is generally within a small range of 0-20g, and the pressure exerted by the adjusting member 7 on the swing arm 5 is affected by the shake caused by factors such as the thread pitch, which causes sudden change of the swing arm 5 under pressure, which is not beneficial to normal detection effect.

As shown in fig. 4, in the present embodiment, the end of the adjusting member 7 facing the swing arm 5 has a central hole 111 for installing the second elastic member 4, and the second elastic member 4 is partially installed in the central hole 111, so as to form a fitting connection between the second elastic member 4 and the adjusting member 7, wherein the second elastic member 4 is partially installed in the central hole 111, and the axial direction of the second elastic member 4 is constrained by the central hole 111, so as to facilitate keeping the extension and retraction of the second elastic member 4 on the axial line and avoid the offset deformation of the second elastic member 4.

As an alternative embodiment, one end of the second elastic member 4 is fixedly connected to one end of the adjusting member 7 facing the swing arm 5, and the other end is disposed in direct abutment with the swing arm 5. The second spring element 4 and the adjusting element 7 can be fixedly connected by welding or by snap-in connection.

As shown in fig. 1 to 3, the swing arm 5 is connected to the main body 1 via the elastic sheet 112, the elastic sheet 112 is preferably a metal sheet with good elasticity, and when the swing arm 5 swings, the elastic sheet 112 deforms along with the swing arm 5, thereby facilitating the pressure detection of the swing arm 5. When adopting shell fragment 112 to connect, shell fragment 112 only takes place self-loss, and work a period of time after change shell fragment 112 can, compare in the pivot and connect, the pivot is connected can take place wearing and tearing with other part cooperation friction, leads to whole part life-span to subtract short, shell fragment 112 sets up to change simply convenient to can avoid taking place the loss with other parts.

The probe holder in this embodiment further includes a conductive plate 8 connected to the main body 1, the conductive plate 8 has an abutting surface facing the swing arm 5, an electrode facing the abutting surface is provided on the swing arm 5, and the electrode of the swing arm 5 abuts against the abutting surface of the conductive plate 8 by applying pressure to the swing arm 5 through the adjuster 7 in a free state.

Here, the current conducting plate and the external circuit are connected with an indicating unit, the indicating unit can be an indicating lamp or other devices for indicating the on-off state, the indicating lamp is normally on in the on-off state, when the detection work is carried out, the external force is set to drive the swing arm 5 to swing upwards, the swing arm 5 overcomes the elastic force swing of the second elastic piece 4, when the electrode of the swing arm 5 is separated from the abutting surface of the current conducting plate 8, the current conducting plate 8 is disconnected to turn off the indicating lamp, and the force value is the abutting pressure during the detection work. Set up the conducting plate 8 and be used for debugging the butt pressure of probe 6 on the one hand, on the other hand retrains the swing range of swing arm 5 with the regulation platform 2 of main part 1 jointly to be favorable to adjusting the butt precision of probe 6.

On the basis of the structure provided with the current-conducting plate 8, a connecting rod 9 is further arranged between the adjusting platform 2 and the current-conducting plate 8, after the connecting rod 9 sequentially penetrates through the adjusting platform 2 and the swing arm 5, the upper end of the connecting rod is abutted and limited by the upper end face of the adjusting platform 2, and the lower end of the connecting rod is in threaded connection with the current-conducting plate 8, so that the adjusting platform 2 is fixedly connected with the current-conducting plate 8. Set up connecting rod 9 and can keep the relative position of regulation platform 2 and current conducting plate 8, avoid current conducting plate 8 atress skew, in addition, wear to establish connecting rod 9 of swing arm 5 and can play the wobbling effect of direction again to swing arm 5 to avoid swing arm 5 to take place lateral shifting. As an alternative embodiment, the connecting rod 9 may also be arranged without passing through the swing arm 5.

As shown in fig. 3, in the present embodiment, a clamp for connecting the probe 6 is installed on the swing arm 5, and the probe 6 is detachably installed on the clamp. Specifically, the clamp includes a sliding column 10 and a sliding member 11 slidably sleeved on the sliding column 10, a free end of the sliding column 10 is provided with a clamping hole for passing through the probe 6, a third elastic member 12 is sleeved on the sliding column 10, and the third elastic member 12 has an elastic force for driving the sliding member 11 to move towards the free end of the sliding column 10.

Through the setting, when actual need test probe 6's size changes, can choose for use different elastic component to adjust the elastic force to can guarantee that probe 6 is fixed in the centre gripping hole, and can avoid can't press from both sides tightly or the too big damage probe 6 of elastic force because of the elastic force undersize.

Example 2

This embodiment provides a test platform comprising a probe holder as described in embodiment 1, which has all the advantages of the probe holder as it has the probe holder as described in embodiment 1.

Here, the test platform may be a bar test platform or a test platform for a single chip.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.

Claims

1. A probe holder, comprising:

the probe comprises a main body (1) and a probe body, wherein the main body is connected with a swing arm (5) through a spring plate (112), and a probe (6) is arranged on the swing arm (5);

the adjusting platform (2) is arranged on the main body (1), and an adjusting piece (7) suitable for applying pressure to the swing arm (5) is arranged on the adjusting platform (2);

the first elastic piece (3) is sleeved on the adjusting piece (7), and the first elastic piece (3) has elastic force for driving the adjusting piece (7) to move towards the direction far away from the swing arm (5);

the second elastic piece (4) is arranged on the adjusting piece (7), and the adjusting piece (7) is in contact with the swing arm (5) through the second elastic piece (4).

2. The probe holder according to claim 1, characterized in that the adjustment piece (7) is screwed with the adjustment station (2).

3. The probe holder according to claim 1, characterized in that the end of the adjusting member (7) facing the swing arm (5) has a central hole (111) for mounting the second elastic member (4), the second elastic member (4) being partly mounted in the central hole (111).

4. The probe holder according to claim 1, characterized in that one end of the second elastic member (4) is fixedly connected to one end of the adjusting member (7) facing the swing arm (5).

5. The probe holder according to any of claims 1-4, further comprising: a conductive plate (8) connected to the main body (1), the conductive plate (8) having an abutment surface facing the swing arm (5), the swing arm (5) having an electrode facing the abutment surface;

in a free state, the electrode of the swing arm (5) is abutted against the abutment surface of the conductive plate (8) by applying pressure to the swing arm (5) through the adjuster (7).

6. The probe holder of claim 5, further comprising: a connecting rod (9) connected between the adjusting table (2) and the conductive plate (8).

7. Probe holder according to claim 6, wherein the connecting rod (9) passes through the swing arm (5).

8. Probe holder according to any of claims 1 to 4 or 6 to 7, wherein the swing arm (5) is provided with a clamp for attaching a probe (6), the probe (6) being detachably mounted on the clamp.

9. The probe holder of claim 8, wherein the clamp comprises: the probe comprises a sliding column (10) and a sliding part (11) sleeved on the sliding column (10) in a sliding manner, wherein a clamping hole for penetrating through the probe (6) is formed in the free end of the sliding column (10);

the sliding column (10) is sleeved with a third elastic piece (12), and the third elastic piece (12) has elastic force for driving the sliding piece (11) to move towards the free end of the sliding column (10).

10. A test platform, comprising: the probe holder of any one of claims 1-9.