CN114602875B - Organic cleaning equipment for MEMS (micro-electromechanical systems) manufacturing process - Google Patents
Organic cleaning equipment for MEMS (micro-electromechanical systems) manufacturing process Download PDFInfo
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- CN114602875B CN114602875B CN202210140575.8A CN202210140575A CN114602875B CN 114602875 B CN114602875 B CN 114602875B CN 202210140575 A CN202210140575 A CN 202210140575A CN 114602875 B CN114602875 B CN 114602875B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B11/00—Wrapping, e.g. partially or wholly enclosing, articles or quantities of material, in strips, sheets or blanks, of flexible material
- B65B11/06—Wrapping articles, or quantities of material, by conveying wrapper and contents in common defined paths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B31/00—Packaging articles or materials under special atmospheric or gaseous conditions; Adding propellants to aerosol containers
- B65B31/04—Evacuating, pressurising or gasifying filled containers or wrappers by means of nozzles through which air or other gas, e.g. an inert gas, is withdrawn or supplied
- B65B31/06—Evacuating, pressurising or gasifying filled containers or wrappers by means of nozzles through which air or other gas, e.g. an inert gas, is withdrawn or supplied the nozzle being arranged for insertion into, and withdrawal from, the mouth of a filled container and operating in conjunction with means for sealing the container mouth
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B41/00—Supplying or feeding container-forming sheets or wrapping material
- B65B41/02—Feeding sheets or wrapper blanks
- B65B41/10—Feeding sheets or wrapper blanks by rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B51/00—Devices for, or methods of, sealing or securing package folds or closures; Devices for gathering or twisting wrappers, or necks of bags
- B65B51/10—Applying or generating heat or pressure or combinations thereof
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B61/00—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages
- B65B61/04—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages for severing webs, or for separating joined packages
- B65B61/06—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages for severing webs, or for separating joined packages by cutting
- B65B61/10—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages for severing webs, or for separating joined packages by cutting using heated wires or cutters
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G45/00—Lubricating, cleaning, or clearing devices
- B65G45/10—Cleaning devices
- B65G45/22—Cleaning devices comprising fluid applying means
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses organic cleaning equipment for MEMS (micro-electromechanical systems) manufacturing procedures, which belongs to the technical field of chip cleaning and comprises a cleaning box body, wherein two sides of the cleaning box body are respectively provided with a feed inlet and a discharge outlet, an organic cleaning tank is arranged in the cleaning box body, the organic cleaning tank is communicated with the feed inlet, the feed inlet is communicated with the organic cleaning tank through an input track, a blowing cylinder is arranged on the input track, an output track is arranged on one side, far away from the input track, of the organic cleaning tank, an inspection box is arranged on one side, far away from the organic cleaning tank, of the output track, a packing assembly is arranged in the inspection box, the discharge outlet is communicated with the packing assembly through a chute, and a control panel is arranged on the cleaning box body and is connected with the organic cleaning tank, the output track, the inspection box and the packing assembly through wires.
Description
Technical Field
The invention relates to the technical field of chip cleaning, in particular to organic cleaning equipment for MEMS (micro electro mechanical systems) manufacturing process.
Background
MEMS, i.e. micro-electromechanical system, is a multi-disciplinary crossing leading research field developed on the basis of microelectronics technology, and has been developed for over forty years, so that the MEMS has become one of the important scientific fields of worldwide attention, it relates to various disciplines and technologies such as electronics, machinery, materials, physics, chemistry, biology, medicine, etc., and has a relatively wide application prospect, but the MEMS is often subjected to the condition of infirm welding due to impurities in the manufacturing process and the installation process, and the MEMS sensor is relatively fragile, the structure inside the MEMS sensor is necessarily damaged by the conventional cleaning method, so that the MEMS sensor fails, a certain economic loss is caused, and the sensor is damaged by the conventional cleaning method, so that people focus on organic cleaning, and the MEMS sensor or the chip is cleaned by the organic solvent, thereby avoiding the damage to the internal structure of the MEMS sensor.
Conventional organic cleaning equipment such as: the Chinese patent specification CN202010336726.8 discloses full-automatic organic cleaning equipment, which comprises a feeding table, a station groove, a first blowing platform, a second blowing platform and a discharging table, wherein the top surface of a cleaning table top is provided with a movable manipulator, one side of the cleaning table top is provided with a movable connecting plate, an operation cavity is arranged below the cleaning table top, the movable connecting plate is positioned in the operation cavity, a first moving mechanism is arranged in the operation cavity, the station groove comprises an ultrasonic cleaning groove, an ultrasonic overflow groove and an organic soaking groove, a rotating mechanism is arranged on the manipulator, and the rotating mechanism drives a flower basket to rotate. The invention can realize the functions of automatically degreasing, rinsing, spraying, dehydrating, turning, positioning and blowing the special-shaped parts, can liberate people from severe and dangerous working environments, reduces the pollution brought by people and avoids the influence of noise on human bodies, but has obvious use of organic solvents in the production process and waste of resources, meanwhile, the conventional cleaning means is not suitable for cleaning tiny components such as sensors, and the like, is easy to cause damage, and the cleaning equipment lacks the checking function and is easy to cause secondary pollution in the transportation process.
Disclosure of Invention
The present invention is directed to an organic cleaning device for MEMS process, which solves the above-mentioned problems.
In order to solve the technical problems, the invention provides the following technical scheme:
the cleaning equipment comprises a cleaning box body, wherein a feed inlet and a discharge outlet are respectively arranged on two sides of the cleaning box body, an organic cleaning tank is arranged in the cleaning box body and communicated with the feed inlet, the feed inlet is communicated with the organic cleaning tank through an input rail, a blowing barrel is arranged on the input rail, one side of the organic cleaning tank, which is far away from the input rail, is provided with an output rail, one side of the output rail, which is far away from the organic cleaning tank, is provided with an inspection box, a packing assembly is arranged in the inspection box, the discharge outlet is communicated with the packing assembly through a sliding chute, a control panel is arranged on the cleaning box body, the control panel is connected with the organic cleaning tank, the output rail, the inspection box and the packing assembly through wires, the collected MEMS sensors enter the cleaning box body one by one from the feed inlet, then enter the organic cleaning tank through the input rail, organic cleaning agents are filled in the organic cleaning tank, oil stains and impurities on the MEMS sensors are dissolved in the organic cleaning agents, the MEMS sensors are conveyed into the organic cleaning agents under the action of the output rail, the inspection box is inspected by the inspection box, and the MEMS sensors are conveyed to the inspection box again, and the qualified products are cleaned by the inspection box, and the qualified cleaning machine is conveyed to the cleaning box again.
An upper catch claw and a lower catch claw are arranged in the organic cleaning tank, and the upper catch claw comprises: the device comprises a trigger catch tooth, a clamping catch tooth and a cleaning cylinder, wherein the trigger catch tooth is arranged on a catch disc, the trigger catch tooth is rotatably connected with the catch disc through a connecting strut, a slideway is arranged in the catch disc, the clamping catch tooth is arranged in the slideway and is slidably connected with the slideway, the part of the trigger catch tooth in the catch disc is respectively abutted against each clamping catch tooth, a spring is arranged between the part of the trigger catch tooth in the catch disc and the catch disc, the catch disc is provided with a cleaning cylinder, the cleaning cylinder is arranged at the top end of an organic cleaning pool, the trigger catch tooth is arranged at one end of an input track, a sucker is arranged on a lower catch claw, the lower catch claw is arranged below an upper catch claw, the lower catch claw is arranged at one side of an output track, the lower catch claw is rotatably connected with the organic cleaning pool through the connecting strut, the lower catch claw is rotatably connected with the connecting strut, the input track is input into a MEMS sensor, the trigger catch tooth is separated from the trigger tooth, the trigger catch tooth is separated from the clamping catch tooth, the trigger tooth is moved downwards and is gripped, the cleaning cylinder is moved downwards until the MEMS sensor is completely immersed in the cleaning agent, the cleaning cylinder is contacted with the input track, the trigger tooth is contacted with the trigger tooth after the trigger tooth is separated from the trigger tooth, the trigger tooth is contacted with the trigger tooth, the trigger tooth is finally, the trigger tooth is contacted with the trigger tooth, and the trigger tooth is contacted with the trigger tooth after the trigger tooth is moved upwards, and the trigger tooth is contacted with the trigger tooth, and the trigger tooth is contacted with the cleaning tooth, and the cleaning tooth is contacted with the cleaning tooth, the full cleaning is achieved, no room is left, and the cleaned MEMS sensor is transferred to the output track.
The filter tank is arranged on one side of the organic cleaning tank, the filter tank is communicated with the organic cleaning tank through an input pipe and a return pipe, the return pipe is arranged at the bottom end of the organic cleaning tank, the input pipe is arranged on one side of the organic cleaning tank, the filter tank is arranged in the cleaning tank, an output motor is arranged in the input pipe, the output motor is connected with the inner wall of the input pipe through a bracket, the organic cleaning tank is a funnel-shaped cleaning tank, a spiral guide plate is arranged on the inner wall of the bottom end of the organic cleaning tank, the spiral direction of the spiral guide plate is the same as the rotation direction of the earth, a return motor is arranged in the return pipe, the return motor is connected with the inner wall of the return pipe through a bracket, a return impeller is arranged at the output end of the return motor, a blade on the return impeller is in rotary connection with a return impeller shaft through a spring shaft, a filter screen is arranged in the filter tank, the filter tank is adjacent to the organic cleaning tank, the filter screen is in rotary connection with the filter tank, the edge of the filter screen is in sliding contact with the filter box, a heating plate is arranged in the filter box, an oil drain plate is arranged on the filter box, the oil drain plate is positioned above the heating plate, an included angle alpha is more than or equal to 45 degrees and less than or equal to 60 degrees is formed between the heating plate and the oil drain plate, organic cleaning solvent in the organic cleaning tank cleans the MEMS sensor and dissolves oil stains and dust on the MEMS sensor, after a period of time, a reflux motor in the reflux pipe is started to rotate, in the rotating process, the reflux impeller is opened, organic cleaning agent in the organic cleaning tank flows into the reflux pipe and generates a certain suction force, the organic cleaning agent flows out in a vortex shape through a spiral guide plate in the organic cleaning tank and drives surrounding air, the flow speed of the organic cleaning agent at the moment is accelerated, and vortex air is formed on an upper capturing claw or a lower capturing claw, the method has the advantages that the adhesive force of an oil film on the MEMS sensor is weakened, some magazines such as dust on the oil film are dried and are more easily cleaned, the method is selected according to the actual situation of putting the oil film on the MEMS sensor, when the oil film is in the northern hemisphere, due to the influence of ground deflection force, objects moving along the north-south direction can deflect to the right direction, the spiral deflector is arranged anticlockwise, when the oil film is in the southern hemisphere, the objects moving along the south-north direction can deflect to the left direction, the spiral deflector is arranged clockwise, the deflector is arranged according to the earth rotation, the flow velocity and the forming speed of vortex can be increased, the phenomenon that dirty organic cleaning solvent remains on the MEMS sensor and cannot be cleaned, the repeated cleaning burden is caused can be avoided, at the moment, the organic cleaning agent after passing through the filter box can be filtered by the filter screen, and can be attached to the filter screen, the heating plate heats the organic cleaning solvent, the evaporating oily substances therein can be recondensed on the oil discharging plate, and flows to the oil discharging plate along the oil discharging plate to the left side, the oil film clockwise, the oil discharging plate is arranged on the oil discharging plate, the oil film is more easily cleaned by the filter plate, the filter plate is also can be cleaned by the filter plate, the filter plate is more easily cleaned, the filter is more has an included angle is increased, and the effect of 45 DEG is increased, the filter can be cleaned, the filter can be more easily cleaned, and the filter can be cleaned conveniently cleaned, and has a small filter plate is more has a good effect, and can be cleaned easily cleaned by the filter and has a 45, the oil pollutant is discharged slowly when the angle is larger than 60 degrees, the oil pollutant is continuously condensed in the discharging process, the gravity is increased, the oil pollutant falls into the filter box again, the evaporated organic cleaning agent is polluted, and when the angle is between 45 degrees and 60 degrees, the movement speed of the oil pollutant is matched with the condensation speed, so that the oil pollutant cannot fall to pollute the organic cleaning solvent.
The delivery track includes the transportation track, be provided with a plurality of delivery slider on the transportation track, delivery slider passes through connecting rod fixed connection with the transportation track, be provided with the transportation housing on the transportation track, transportation housing both ends respectively with the inspection box, organic cleaning pond intercommunication, the transportation housing respectively with the inspection box, organic cleaning pond vertical setting, be provided with the shower head on the transportation housing, the shower head communicates with the rose box, delivery slider both ends are provided with the water catch bowl respectively, the spray range of shower head is the part that the transportation track is located organic cleaning pond, the part that the transportation track is located organic cleaning pond is close to down and catches the claw, the transportation track input is step motor and is connected with control panel through the wire, the setting mechanism of vertical setting can also be so that the water catch bowl stably keeps the polymerization degree of water film in the time of increase structural stability, and cooperate the tension of organic cleaner, make the water film can not take place to rock and spill over, the delivery track drives the delivery slider and remove, in the organic cleaning pond, and the MEMS sensor from catching claw down, the shower head will carry out the water catch the basin, the shower in the water catch the part, the part is located in the organic cleaning pond, the water catch the water film is located in the organic cleaning pond, the water sensor is not carried out the water sensor is stable to the water cleaner, the water sensor is carried out the water-carrying the water filter is washed under the water sensor, the water sensor is greatly has the water-carrying the water cleaner has the problem, and the water cleaner has the water cleaner and can be washed down, and the water cleaner has the water cleaner and has the largest influence and the water cleaner.
The transportation track is provided with an inspection box on one side far away from the organic cleaning pool, the inspection box comprises an inspection box body and a detection probe, the detection probe is in sliding connection with the inspection box body, the transportation track penetrates through the inspection box body, the inspection box body is fixedly connected with the cleaning box body, the inspection box body is communicated with the organic cleaning pool through a transportation housing, an ultrasonic device is arranged on the detection probe, a pressure sensing film is arranged on the inspection box body and sleeved on the detection probe, the pressure sensing film and the detection probe are positioned above a delivery sliding block, the pressure sensing film is arranged in parallel with the delivery sliding block, one end of the pressure sensing film is fixedly connected with the inspection box body, a magnetic strip is arranged at one end of the pressure sensing film far away from the inspection box body, the magnetic strip is positioned in the magnetic sensing coil, the output end of the magnetic sensing coil is connected with a current detection component, the current detection component and the ultrasonic device are connected with a control panel through wires, when the delivery sliding block moves into the inspection box, the water film of the organic cleaning agent is attached on the delivery slide block at the moment, an ultrasonic device on the detection probe is started, the ultrasonic device generates ultrasonic waves, the ultrasonic waves vibrate on the MEMS sensor and the water film, and under the action of the ultrasonic waves, the impurities which are not removed on the MEMS sensor flow, in the flowing process, the ultrasonic waves rebound and act on the pressure sensing film, the pressure sensing film vibrates to drive the magnetic stripe to slide, the magnetic stripe moves in the pressure sensing coil to generate induced current, the induced current is transmitted into the current detection assembly, the current detection assembly transmits the current to the control panel, the control panel displays specific current values, when the MEMS sensor and the water film are clean, the pressure sensing film vibrates regularly, and the current values are displayed on the control panel, the pressure sensing film is not changed any more, when the MEMS sensor and the water film are not clean, the direction and the frequency of sound wave rebound are changed due to the migration of pollutants, the pressure sensing film is irregularly vibrated, the changed current value is deduced on the control panel according to the value change frequency and the value change size, the size and the state of the pollutants are judged according to the specific value, the control panel is ready to be sent to the packaging assembly when the packaging assembly is clean, and the packaging assembly is returned to the organic cleaning pool for cleaning again when the packaging assembly is not clean, and the stability of the current change can be improved due to the structure of the pressure sensing film and the consignment sliding block which are arranged in parallel, so that the detection is more stable.
The device comprises a plurality of calipers, a plurality of supporting grooves are formed in the supporting grooves, the supporting grooves are connected with the supporting sliding blocks in a rotating mode, a plurality of calipers are arranged on the supporting grooves, each calipers is connected with the supporting grooves in a rotating mode, the plane where the supporting grooves are located is the same plane as the plane where the supporting sliding blocks are located, the calipers are more stable when the MEMS sensor is clamped, the calipers cannot fall off, movable connecting rods are arranged on the portions, located inside the supporting grooves, of each calipers, the movable connecting rods are connected with the supporting grooves in a sliding mode, the movable connecting rods are connected with the calipers in a rotating mode, one ends of the movable connecting rods, far away from the calipers, are connected with the supporting grooves through springs, the highest ends of the supporting grooves are lower than the upper surface of the supporting sliding blocks, packing components are arranged below the supporting grooves, a detection probe is located above the supporting grooves, the rotating motor is connected with a control panel through a conducting wire, after the MEMS sensor is checked to be qualified, the supporting sliding blocks drive the supporting grooves to move, the MEMS sensor is rotated in the moving process, the movable connecting rods in the supporting grooves are driven to move under the action of centrifugal force, the MEMS sensor, the movable connecting rods in the supporting grooves are firmly, the positions of the MEMS sensor are kept away from the rotating in the rotating process, the rotating motor is prevented from being rotated in the rotating, and the rotating machine, and the cleaning agent can continuously and is kept in the rotating and rotated in the process.
The packing component is arranged in the inspection box body, the packing component comprises a film placing frame, a breathing air gun and a heating rod, the film placing frame is arranged in the inspection box body, the heating rod is arranged on the film placing frame, the film placing frame is arranged below a carrying sliding block on a conveying track, the film placing frame 901 is arranged in parallel with the conveying track, the heating rod is in sliding connection with the film placing frame, the breathing air gun is arranged on the film placing frame and is connected with an air pump, the output end of the breathing air gun is arranged between the heating rods, a film feeding roller is arranged in the film placing frame, the film feeding roller is in rotary connection with the film placing frame, one side of the film placing frame far away from the film feeding roller is provided with a film feeding cylinder, the film feeding cylinder is connected with the film feeding roller through a plastic film, the film feeding cylinder is fixedly connected with the inspection box body, the film placing frame is in a sandwich structure, the plastic film flows through the interlayer of the film placing frame, a chute is arranged below the film placing frame, the heating rod is connected with the breathing air gun through a wire, the MEMS sensor which is spin-dried loses the limit of the calipers and falls downwards, finally falls on the plastic film on the film placing frame, the parallel arrangement can prevent the MEMS sensor from sliding off when falling, greatly reduces packaging error rate, blows the plastic film downwards by the breathing air gun, enables the plastic film to deform downwards, blows the turbid air nearby the MEMS sensor in the blowing process, achieves the purification effect after drying, blows inert gas to achieve the oxidation-proof effect, protects the internal structure from corrosion damage, simultaneously dries the MEMS sensor again by the blown gas, can prevent substances such as dust and the like from being adhered again by water vapor, moves to the middle by the heating stick after the fixing time, gathers the plastic film to the middle at the moment, and starts to execute the air suction operation by the breathing air gun, so that the vacuum state is shown in the plastic film, and finally fusing the plastic film by the heating roller to finish the packaging operation, and flowing out of the cleaning box body along with the chute, and rotating the film feeding roller to transfer a new plastic film after one-time packaging is finished.
The cleaning box body is internally provided with a garbage recycling box, the garbage recycling box is provided with a cleaning shower head, the garbage recycling box is arranged below the filter screen, the cleaning shower head is arranged above the filter screen, the cleaning box body is provided with a visual window, the cleaning shower head can flush the filter screen, water after flushing the filter screen enters the garbage recycling box with impurities and other substances, and then the cleaned filter screen is sent into the filter box for preparation of filtering operation again.
Compared with the prior art, the invention has the following beneficial effects: 1. the invention utilizes the organic solvent to soak the MEMS sensor, oil stains and other magazines on the sensor after soaking are dissolved by the organic solvent and fall off from the MEMS sensor, and the organic solvent can be recycled, thereby greatly saving the use of the organic solvent,
2. the device for repeatedly filtering and using the organic cleaning agent is adopted, the filtered organic cleaning agent can further repeatedly clean the MEMS sensor, the heated organic cleaning agent has better cleaning effect on the sensor, vortex air can be weakened and brought away from oil stains which are not easy to fall off from the MEMS sensor in the process of backflow, and some oil substances can be thoroughly cleaned when the heated organic cleaning solvent is waited for cleaning again.
3. The invention adopts a closed transportation method, can greatly avoid the problem of secondary pollution in the process of transportation, and simultaneously, a layer of stable cleaning agent film is attached to the MEMS sensor in the process of transportation, thereby being more convenient for checking whether the MEMS sensor is qualified or not while avoiding pollution.
4. The invention adopts the integrated packing device, directly packs after cleaning, adopts the vacuum packing mode, avoids the problem of recontamination in the process of taking out or transporting, and realizes the final cleaning effect.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic three-dimensional structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the washing tank of the present invention;
FIG. 3 is a schematic view showing the internal structure of the organic cleaning tank of the present invention;
FIG. 4 is a schematic view of the upper catch pawl structure of the present invention;
FIG. 5 is a schematic view showing an internal structure of the inspection box of the present invention;
fig. 6 is a schematic view of the internal structure of the filter housing of the present invention;
FIG. 7 is a schematic diagram of the mating relationship of the transport track and the shipping slider of the present invention;
FIG. 8 is a schematic view of the structure of FIG. 5 in partial enlarged form A in accordance with the present invention;
FIG. 9 is a schematic view of the internal structure of the shipping slider of the present invention;
FIG. 10 is a schematic view of the structure of the garbage can of the present invention;
in the figure: 1. cleaning the box body; 2. a feed inlet; 3. a discharge port; 4. an organic cleaning tank; 5. an input track; 6. an air blowing tube; 7. an output track; 701. a transport rail; 702. a shipping slide; 703. a transport housing; 704. a spray header; 705. a water collecting tank; 706. a rotating electric machine; 707. a support groove; 708. a caliper; 710. a movable connecting rod; 8. checking a box; 801. checking the box body; 802. a detection probe; 803. an ultrasonic device; 804. a pressure-sensitive film; 805. a magnetic stripe; 806. a pressure-sensitive coil; 9. a packaging assembly; 901. a film placing frame; 902. a respiratory air gun; 903. a heating rod; 904. film feeding rollers; 905. a film feeding cylinder; 10. a chute; 11. a control panel; 12. an upper catch claw; 1201. triggering the catching teeth; 1202. clamping the catching teeth; 1203. cleaning a cylinder; 1204. a catch tray; 13. a lower catch claw; 14. a connecting strut; 15. a filter box; 1501. an input tube; 1502. a return pipe; 1503. an output motor; 1504. a reflow motor; 1505. a reflux impeller; 1506. a heating plate; 1507. an oil drain plate; 1508. a filter screen; 16. a garbage recycling bin; 17. and cleaning the shower head.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-8, the present invention provides the following technical solutions: this cleaning equipment includes washs box 1, washs box 1 both sides and is provided with feed inlet 2 and discharge gate 3 respectively, be provided with organic cleaning tank 4 in washs box 1, organic cleaning tank 4 and feed inlet 2 intercommunication, feed inlet 2 and organic cleaning tank 4 are through the input track 5 intercommunication, be provided with the dryer 6 on the input track 5, organic cleaning tank 4 keeps away from input track 5 one side and is provided with output track 7, output track 7 one side is kept away from organic cleaning tank 4 one side and is provided with inspection box 8, be provided with packing subassembly 9 in the inspection box 8, discharge gate 3 and packing subassembly 9 are through spout 10 intercommunication, be provided with control panel 11 on washs box 1, control panel 11 passes through wire and organic cleaning tank 4, output track 7, inspection box 8, packing subassembly 9 is connected, the MEMS sensor of collecting gets into washout box 1 one by one from feed inlet 2, later by input track 5 get into in the organic cleaning tank 4, organic cleaning tank 4 intubate is equipped with the organic cleaner, the MEMS sensor will soak into in the organic cleaner, after a period of time keep away from organic cleaning tank 4 one, the MEMS sensor will be washed by the effect in the inspection box 8 and the cleaning tank is carried out in the inspection box 3 again through spout 10, the detergent will be passed through in the inspection box 8 and the cleaning tank is passed through the inspection box is passed through and the inspection box is finished and the quality is washed down.
An upper catch claw 12 and a lower catch claw 13 are arranged in the organic cleaning tank 4, and the upper catch claw 12 comprises: the trigger catch teeth 1201, the clamping catch teeth 1202 and the cleaning cylinders 1203 are arranged on the catch disc 1204, the trigger catch teeth 1201 and the catch disc 1204 are rotationally connected, a slide way is arranged in the catch disc 1204, the clamping catch teeth 1202 are arranged in the slide way and are in sliding connection with the slide way, the part of the trigger catch teeth 1201 in the catch disc 1204 respectively props against each clamping catch tooth 1202, a spring is arranged between the part of the trigger catch teeth 1201 in the catch disc 1204 and the catch disc 1204, the cleaning cylinders 1203 are arranged on the catch disc 1204, the cleaning cylinders 1203 are arranged at the top end of the organic cleaning pool 4, the trigger catch teeth 1201 are positioned at one end of the input track 5, a sucker is arranged on the lower catch claw 13, the lower catch claw 13 is positioned below the upper catch claw 12, the lower catch claw 13 is positioned at one side of the output track 7, the lower catch claw 13 is connected with the organic cleaning pool 4 through a connecting strut 14, the connecting strut 14 is rotationally connected with the organic cleaning tank 4, the lower catch claw 13 is rotationally connected with the connecting strut 14, the input track 5 is input with the MEMS sensor, the MEMS sensor is propped against the trigger catch tooth 1201, the trigger catch tooth 1201 is separated from the clamping catch tooth 1202, the trigger catch tooth 1201 moves downwards and clamps the MEMS sensor, the cleaning cylinder 1203 moves downwards until the MEMS sensor is completely immersed in the organic cleaning agent, after a period of immersion, the cleaning cylinder 1203 continues to move downwards, finally, the lower catch claw 13 is propped against the lower catch claw 13, the lower catch claw 13 can be used for sucking the input track 5 to input the MEMS sensor, the MEMS sensor is propped against the trigger catch tooth 1201, the trigger catch tooth 1201 is separated from the clamping catch tooth 1202, the sucking disc on the trigger catch tooth 1201 is used for sucking the MEMS sensor and jacking the MEMS sensor upwards, the jacked sensor can enable the clamping catch tooth 1202 to move upwards, and finally, the trigger catch tooth 1201 is separated, and finally, the MEMS sensor is fixed on the lower catch claw 13, so that the place, which is not contacted with the organic cleaning agent, of the MEMS sensor contacts the organic cleaning agent, the cleaning in all aspects is achieved, no margin is left, and the cleaned MEMS sensor is conveyed to the output track 7.
A filter tank 15 is arranged on one side of the organic cleaning tank 4, the filter tank 15 is communicated with the organic cleaning tank 4 through an input pipe 1501 and a return pipe 1502, the return pipe 1502 is arranged at the bottom end of the organic cleaning tank 4, the input pipe 1501 is arranged on one side of the organic cleaning tank 4, the filter tank 15 is arranged in the cleaning tank body 1, an output motor 1503 is arranged in the input pipe 1501, the output motor 1503 is connected with the inner wall of the input pipe 1501 through a bracket, the organic cleaning tank 4 is a funnel-shaped cleaning tank, a spiral guide plate 401 is arranged on the inner wall of the bottom end of the organic cleaning tank 4, the spiral direction of the spiral guide plate 401 is the same as the rotation direction of the earth, a return motor 1504 is arranged in the return pipe 1502, the return motor 1504 is connected with the inner wall of the return pipe 1502 through a bracket, a blade on the return impeller 1505 is rotationally connected with the return impeller shaft through a spring shaft, a filter screen 1508 is arranged in the filter tank 15, the filter tank 15 is adjacent to the organic cleaning tank 4, the filter screen 1508 is rotationally connected with the filter tank 15, the edge of the filter screen 1508 is in sliding contact with the filter tank 15, a heating plate 1506 is arranged in the filter tank 15, an oil drain plate 1507 is arranged on the filter tank 15, the oil drain plate 1507 is positioned above the heating plate 1506, an included angle of 45 degrees or more and less than or equal to 60 degrees exists between the heating plate 1506 and the oil drain plate 1507, an organic cleaning solvent in the organic cleaning tank 4 cleans the MEMS sensor and dissolves oil stains and dust on the MEMS sensor, after a period of time, a reflux motor 1504 in the reflux pipe 1502 is started to rotate, in the rotating process, a reflux impeller 1505 is opened, organic cleaning agent in the organic cleaning tank 4 flows into the reflux pipe 1502 and generates a certain suction force, the organic cleaning agent flows through a spiral flow guide plate in the organic cleaning tank 4 and shows vortex-shaped outflow, the flow speed of the organic cleaning agent is accelerated, vortex air is formed on the upper capturing claw 12 or the lower capturing claw 13, so that the adhesive force of an oil film on the MEMS sensor is weakened, some dust and other magazines are dried and are more easily cleaned, according to the actual situation selection of the device arranged in the north-south hemisphere, when the device is arranged in the north hemisphere, due to the influence of ground deflection force, an object moving in the south-north direction can deflect to the right, a spiral guide plate is arranged anticlockwise, when the device is arranged in the south hemisphere, the object moving in the south-north direction can deflect to the left, the spiral guide plate is arranged clockwise, the guide plate is arranged in a rotation mode according to the earth, the flow speed and the forming speed of vortex can be increased, the wind power reduction received on the MEMS sensor can be avoided after cyclone formed by reversely arranging the guide plate is reduced, the organic cleaning solvent remained on the MEMS sensor is unable to clean up, and the oil film is diffused, so as to cause repeated cleaning burden, at this time, the organic cleaning agent passing through the filter tank 15 will be filtered by the filter screen 1508, and possibly adhere to the filter screen 1508, the heating plate 1506 heats the organic cleaning solvent, the oil substances therein are evaporated, the oil substances will recondense on the oil drain plate 1507, and flow into the garbage recycling tank 16 along the oil drain plate 1507, the temperature of the filtered organic cleaning agent is increased, the decontamination capability is enhanced, meanwhile, the adjacent structural design can also increase the utilization rate of the heating plate 1506 in the filter tank 15, the output motor 1503 is started, the organic cleaning agent will be sent into the organic cleaning pool 4 again, and the MEMS sensor is cleaned again, due to the effect of air, the organic cleaning agent can more easily clean the pollutants on the MEMS sensor, the included angle between the heating plate 1506 and the oil drain plate 1507 can influence the discharge effect of the evaporated impurities, when the included angle is smaller than 45 degrees, the formed oily matters are due to gravity, so that the oily matters on the oil drain plate 1507 fall back into the filter box 15 when the oily matters are not discharged from the oil drain plate 1507, when the included angle is larger than 60 degrees, the discharge speed of the oily matters is too slow, the oily matters can be continuously condensed in the discharge process, the gravity is increased, the oily matters can fall into the filter box 15 again, the evaporated organic cleaning agent is polluted, and when the included angle is between 45 degrees and 60 degrees, the movement speed of the oily matters is matched with the condensation speed, so that the oily matters cannot fall to pollute the organic cleaning solvent.
The output track 7 comprises a transportation track 701, a plurality of delivery sliding blocks 702 are arranged on the transportation track 701, the delivery sliding blocks 702 are fixedly connected with the transportation track 701 through connecting rods, a transportation housing 703 is arranged on the transportation track 701, two ends of the transportation housing 703 are respectively communicated with the inspection box 8 and the organic cleaning tank 4, the transportation housing 703 is respectively vertically arranged with the inspection box 8 and the organic cleaning tank 4, a spray header 704 is arranged on the transportation housing 703, the spray header 704 is communicated with the filter box 15, water collecting grooves 705 are respectively arranged at two ends of the delivery sliding blocks 702, the spraying range of the spray header 704 is the part of the transportation track 701 positioned in the organic cleaning tank 4, the part of the transportation track 701 positioned in the organic cleaning tank 4 is close to the lower capturing claw 13, the input end of the transportation track 701 is a stepping motor and is connected with the control panel 11 through a wire, the vertically arranged setting mechanism is used for increasing the structural stability, the water collecting tank 705 can also stably maintain the polymerization degree of the water film and match with the tension of the organic cleaning agent, so that the water film can not shake and overflow, the output track 7 drives the delivery slide block 702 to move into the organic cleaning tank 4 and receive MEMS sensors from the lower capturing claw 13, the spray header 704 sprays the delivery slide block 702, during the spraying process, some organic cleaning agent is reserved in the water collecting tank 705, under the tension of the organic cleaning agent in the water collecting tank 705, a water film is formed on the surface of the MEMS sensors, and during the spraying process, the delivery slide block 702 is cleaned, so that the problem of secondary pollution is avoided, the water film can not flow out any more, and finally stably runs into the inspection box 8, when the lower capturing claw is close to the lower capturing claw 13, the falling point of the MEMS sensors is increased, the moving distance is reduced, and the influence of the flow of the organic cleaning agent on the transmission of the MEMS sensor is reduced by matching with the sensor setting position on the carrying groove.
An inspection box 8 is arranged on one side of the transportation track 701 far away from the organic cleaning pool 4, the inspection box 8 comprises an inspection box body 801 and a detection probe 802, the detection probe 802 is in sliding connection with the inspection box body 801, the transportation track 701 penetrates through the inspection box body 801, the inspection box body 801 is fixedly connected with the cleaning box body 1, the inspection box body 801 is communicated with the organic cleaning pool 4 through a transportation cover 703, an ultrasonic device 803 is arranged on the detection probe 802, a pressure sensing film 804 is arranged on the inspection box body 801, the pressure sensing film 804 is sleeved on the detection probe 802, the detection probe 802 is positioned above a delivery slide block 702, the pressure sensing film 804 is arranged in parallel with the delivery slide block 702, one end of the pressure sensing film 804 is fixedly connected with the inspection box body 801, one end of the pressure sensing film 804 far away from the inspection box body 801 is provided with a magnetic strip 805, the magnetic strip 805 is positioned in a pressure sensing coil 806, and the output end of the pressure sensing coil 806 is connected with a current detection component, the current detection component and the ultrasonic device 803 are connected with the control panel 11 through wires, when the delivery slide block 702 moves into the inspection box 8, a water film of an organic cleaning agent is attached to the delivery slide block 702 at the moment, the ultrasonic device 803 on the detection probe 802 is started, the ultrasonic device 803 generates ultrasonic waves, the ultrasonic waves vibrate on the MEMS sensor and the water film, and under the action of the ultrasonic waves, the impurities which are not removed on the MEMS sensor flow, in the flowing process, the ultrasonic waves rebound and act on the pressure sensing film 804, the pressure sensing film 804 vibrates to drive the magnetic strip 805 to slide, the magnetic strip 805 moves in the pressure sensing coil 806 to generate induced current, the induced current is transmitted into the current detection component, the current detection component transmits the current to the control panel 11, the control panel 11 displays specific values of the current, when the MEMS sensor and the water film are clean, regular vibration of the pressure sensing film 804 will occur, no change occurs after the current value is displayed on the control panel 11, when the MEMS sensor and the water film are not clean, the direction and the frequency of sound wave rebound will change due to the migration of pollutants, the irregular vibration of the pressure sensing film 804 will occur, the changed current value will occur on the control panel 11, the size and the state of the pollutants are deduced according to the value change frequency and the value change size, the control panel 11 will regulate and control the transportation track 701 according to the specific value, when the transportation track is clean, the transportation track is ready to be sent to the packing assembly 9, when the transportation track is not clean, the transportation track is returned to the organic cleaning pool 4 for cleaning again, and due to the structure of the parallel arrangement of the pressure sensing film 804 and the supporting sliding block 702, the impact of ultrasonic waves on the pressure sensing film is more uniform, the moving speed of the magnetic stripe is driven is smoother, and the generated induction current change will not be too rapid.
A rotating motor 706 is arranged in each delivery slide block 702, a delivery slot 707 is arranged on the output end of the rotating motor 706, the delivery slot 707 is in rotary connection with the delivery slide block 702, a plurality of calipers 708 are arranged on the delivery slot 707, each calipers 708 is in rotary connection with the delivery slot 707, the plane of the delivery slot 707 is on the same plane as the plane of the delivery slide block 702, the centrifugal force exerted by the movable connecting rod in all directions is consistent, the force exerted by the calipers 708 on the MEMS sensor is consistent, the falling phenomenon is avoided, the part of each calipers 708 positioned in the delivery slot 707 is provided with a movable connecting rod 710, the movable connecting rod 710 is in sliding connection with the delivery slot 707, the movable connecting rod 710 is in rotary connection with the calipers 708, one end of the movable connecting rod 710 away from the calipers 708 is connected with the delivery slot 707 through a spring, the highest end of the carrying groove 707 is lower than the upper surface of the carrying slide block 702, a packing assembly 9 is arranged below the carrying groove 707, a detection probe 802 is located above the carrying groove 707, a rotating motor 706 is connected with a control panel 11 through a wire, after the MEMS sensor is inspected to be qualified, the carrying slide block 702 drives the carrying groove 707 to move, in the moving process, the rotating motor 706 rotates, a movable connecting rod 710 in the carrying groove 707 drives a caliper 708 to move under the action of centrifugal force, the position of the MEMS sensor is firmly limited, the MEMS sensor is prevented from being thrown off, an organic cleaning agent in the MEMS sensor is dried under the high-speed rotation of the rotating motor 706, the rotating motor 706 continuously works in the moving process of the conveying track 701, after a period of time, the rotating motor 706 stops, and the MEMS sensor appears on the packing assembly 9.
The packing component 9 is arranged in the inspection box body 801, the packing component 9 comprises a film placing frame 901, a breathing air gun 902 and a heating rod 903, the film placing frame 901 is arranged in the inspection box body 801, the heating rod 903 is arranged on the film placing frame 901, the film placing frame 901 is positioned below a delivery slide block 702 on a conveying track 701, the film placing frame 901 is arranged in parallel with the conveying track 701, the heating rod 903 is in sliding connection with the film placing frame 901, the breathing air gun 902 is arranged on the film placing frame 901, the breathing air gun 902 is connected with an air pump, the output end of the breathing air gun 902 is positioned between the heating rods 903, a film inlet roller 904 is arranged in the film placing frame 901, the film inlet roller 904 is in rotary connection with the film placing frame 901, a film inlet cylinder 905 is arranged on one side of the film placing frame 901 far away from the film inlet roller 904, the film inlet cylinder 905 is connected with the film inlet roller 904 through a plastic film, the film inlet cylinder 905 is fixedly connected with the inspection box body 801, the film placing frame 901 is in a sandwich structure, the plastic film flows through the sandwich layer of the film placing frame 901, the chute 10 is arranged below the film placing frame 901, the heating rod 903 and the breathing air gun 902 are connected with the control panel 11 through wires, the spin-dried MEMS sensor loses the limit of the calipers 708 and falls downwards, finally falls on the plastic film on the film placing frame 901, the parallel arrangement can prevent the MEMS sensor from shifting when falling on the plastic film and stably falling on the center of the plastic film, and simultaneously the plastic film stably moves downwards when being matched with the blowing effect of the breathing air gun, the plastic film is not punctured, the packaging error rate is greatly reduced, the breathing air gun 902 blows to the plastic film, the plastic film is enabled to deform downwards, meanwhile, the blowing process can also blow the turbid air near the MEMS sensor, the purification effect after drying is achieved, the inert gas blowing can also achieve the oxidation prevention effect, the internal structure is protected from corrosion damage, simultaneously, the blown gas can also dry the MEMS sensor again, so that substances such as dust and the like can be prevented from being adhered to the moisture again, after the fixed time, the heating rod 903 moves to the middle, at the moment, the plastic film is gathered to the middle, the breathing air gun 902 starts to execute the air suction operation, so that the plastic film is in a vacuum state, the heating rod 903 finally fuses the plastic film, the packaging operation is completed, the plastic film flows out of the cleaning box body 1 along with the chute 10, and after one-time packaging is completed, the film feeding roller 904 rotates to transfer a new plastic film.
The cleaning box body 1 is internally provided with a garbage recycling box 16, the garbage recycling box 16 is provided with a cleaning shower head 17, the garbage recycling box 16 is arranged below the filter screen 1508, the cleaning shower head 17 is arranged above the filter screen 1508, the cleaning box body 1 is provided with a visual window, the cleaning shower head 17 can flush the filter screen 1508, water after flushing the filter screen 1508 enters the garbage recycling box 16 with impurities and other substances, and then the cleaned filter screen 1508 is sent into the filter box 15 to be ready for filtering operation again.
The working principle of the invention is as follows: the collected MEMS sensors enter the cleaning box body 1 from the feed inlet 2 one by one, the input track 5 inputs the MEMS sensors, the MEMS sensors prop against the trigger catch teeth 1201, the trigger catch teeth 1201 are separated from the clamping catch teeth 1202, the trigger catch teeth 1201 move downwards and grip the MEMS sensors, the upper catch claw 12 transfers the MEMS sensors to the lower catch claw 13, the organic cleaning tank 4 is filled with the organic cleaning agent, the MEMS sensors are immersed in the organic cleaning agent, after a period of time, oil stains and impurities on the MEMS sensors are dissolved in the organic cleaning agent, the organic cleaning agent in the organic cleaning tank 4 is filtered and heated under the action of the filter box 15 and finally flows back into the organic cleaning tank 4, the organic cleaning agent can present vortex-like outflow in the flowing process and drives surrounding air, the organic cleaning agent at the moment has a rapid flow speed, vortex air is formed on the upper catch claw 12 or the lower catch claw 13, the adhesion force of an oil film on the MEMS sensor is weakened, some magazines such as dust on the MEMS sensor are dried and are more easily cleaned, the cleaned MEMS sensor is transmitted into the inspection box 8 under the action of the output track 7, the output track 7 drives the delivery slide block 702 to move, the delivery slide block is moved into the organic cleaning pool 4, the spray header 704 sprays the delivery slide block 702, some organic cleaning agent is reserved under the action of the water collecting tank 705 in the spraying process, a water film is formed on the surface of the MEMS sensor, the water film is free from outflow, finally, the delivery slide block 702 is stably operated into the inspection box 8 to be inspected by the inspection box 8, ultrasonic waves are vibrated on the MEMS sensor and the water film, when the MEMS sensor and the water film are clean, the pressure sensing film 804 can generate regular vibration, and the current value is not changed after the control panel 11 displays the current value, when the MEMS sensor and the water film are not clean, the direction and the frequency of the rebound of the sound wave are changed, irregular vibration of the pressure sensing film 804 is generated, the MEMS sensor which is unqualified in inspection is transmitted back to the organic cleaning pool 4 for cleaning again, and the qualified product is packed through the chute 10 and is transmitted to the discharge port 3.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. An organic cleaning device for MEMS manufacturing process, characterized in that: the cleaning equipment comprises a cleaning box body (1), wherein two sides of the cleaning box body (1) are respectively provided with a feed inlet (2) and a discharge outlet (3), an organic cleaning tank (4) is arranged in the cleaning box body (1), the organic cleaning tank (4) is communicated with the feed inlet (2), the feed inlet (2) is communicated with the organic cleaning tank (4) through an input track (5), a blowing barrel (6) is arranged on the input track (5), an output track (7) is arranged on one side, far away from the input track (5), of the organic cleaning tank (4), an inspection box (8) is arranged on one side, far away from the organic cleaning tank (4), a packing assembly (9) is arranged in the inspection box (8), the discharge outlet (3) is communicated with the packing assembly (9) through a sliding groove (10), and a control panel (11) is arranged on the cleaning box body (1) and is connected with the organic cleaning tank (4), the output track (7) and the inspection box (8) through wires and the packing assembly (9).
An upper catching jaw (12) and a lower catching jaw (13) are arranged in the organic cleaning tank (4), and the upper catching jaw (12) comprises: trigger catch tooth (1201), press from both sides tight catch tooth (1202), wash cylinder (1203), trigger catch tooth (1201) and a plurality of press from both sides tight catch tooth (1202) and set up on catch dish (1204), trigger catch tooth (1201) and catch dish (1204) swivelling joint, be provided with the slide in catch dish (1204), press from both sides tight catch tooth (1202) and set up in the slide and with slide sliding connection, trigger catch tooth (1201) are located the part of catch dish (1204) and are supported each clamp catch tooth (1202) respectively, trigger catch tooth (1201) are located the part of catch dish (1204) and are provided with the spring between catch dish (1204), be provided with wash cylinder (1203) on catch dish (1204), wash cylinder (1203) set up on organic wash pond (4) top, trigger catch tooth (1201) are located input track (5) one end, be provided with the sucking disc on lower catch claw (13), lower catch claw (13) are located last catch claw (12) below, lower catch claw (13) are located output track (7) one side and are connected with wash pond (14) through the pillar (14) and are connected with wash pond (14), the lower catch claw (13) is rotationally connected with the connecting strut (14);
The utility model discloses a filter screen washing machine, including organic washing pond (4), filter tank (15) are provided with on one side of organic washing pond (4), filter tank (15) are through input tube (1501), back flow (1502) and organic washing pond (4) intercommunication, back flow (1502) set up in organic washing pond (4) bottom, input tube (1501) set up on one side of organic washing pond (4), filter tank (15) set up in washing box (1), be provided with output motor (1503) in input tube (1501), output motor (1503) are connected with input tube (1501) inner wall through the support, organic washing pond (4) are hopper-shaped washing pond, and organic washing pond (4) bottom inner wall is provided with heliciform guide plate (401) with the direction of spiral rotation the same of heliciform guide plate (401), be provided with in back flow (1502) return tube (1504), back flow motor (1504) are connected with back flow (1502) inner wall through the support, back flow motor (1504) output is provided with back flow impeller (1505), back flow impeller (1505) are connected with filter screen (1508) through impeller (1508) on the impeller (1505), filter screen (1508) are connected with filter screen (15) in the filter screen washing pond (15) rotation, the edge of the filter screen (1508) is in sliding contact with the filter box (15), a heating plate (1506) is arranged in the filter box (15), an oil drain plate (1507) is arranged on the filter box (15), the oil drain plate (1507) is positioned above the heating plate (1506), and an included angle of 45 degrees or more and alpha or less than 60 degrees exists between the heating plate (1506) and the oil drain plate (1507);
The output track (7) comprises a transportation track (701), a plurality of consignment sliding blocks (702) are arranged on the transportation track (701), the consignment sliding blocks (702) are fixedly connected with the transportation track (701) through connecting rods, a transportation housing (703) is arranged on the transportation track (701), two ends of the transportation housing (703) are respectively communicated with an inspection box (8) and an organic cleaning pool (4), the transportation housing (703) is respectively vertically arranged with the inspection box (8) and the organic cleaning pool (4), a spray head (704) is arranged on the transportation housing (703), the spray head (704) is communicated with a filtering box (15), water collecting grooves (705) are respectively arranged at two ends of the consignment sliding blocks (702), the spraying range of the spray head (704) is the part of the transportation track (701) located in the organic cleaning pool (4), the part of the transportation track (701) located in the organic cleaning pool (4) is close to a lower capture claw (13), and the input end of the transportation track (701) is provided with a stepping motor and is connected with a control panel (11) through a wire;
the utility model discloses a cleaning device for the organic cleaning tank, which is characterized in that an inspection box (8) is arranged on one side of the transportation track (701) far away from the organic cleaning tank (4), the inspection box (8) comprises an inspection box body (801) and a detection probe (802), the detection probe (802) is in sliding connection with the inspection box body (801), the transportation track (701) penetrates through the inspection box body (801), the inspection box body (801) is communicated with the organic cleaning tank (4) through a transportation cover shell (703), the inspection box body (801) is fixedly connected with the cleaning box body (1), an ultrasonic device (803) is arranged on the detection probe (802), a pressure sensing film (804) is arranged on the inspection box body (801), the pressure sensing film (804) is sleeved on the detection probe (802), the pressure sensing film (804) and the delivery sliding block (702) are arranged in parallel, the pressure sensing film (804) and the detection probe (802) are positioned above the delivery sliding block (702), one end of the pressure sensing film (804) is fixedly connected with the detection box body (801), one end of the pressure sensing film (804) away from the detection box body (801) is provided with the magnetic stripe (805), the magnetic stripe (805) is positioned in the pressure sensing coil (806), the output end of the pressure sensing coil (806) is connected with the current detection assembly, and the current detection assembly, the ultrasonic device (803) is connected with the control panel (11) through a wire;
Each delivery slide block (702) is internally provided with a rotating motor (706), a delivery groove (707) is arranged at the output end of the rotating motor (706), the delivery groove (707) is rotationally connected with the delivery slide block (702), the plane where the delivery groove (707) is located and the plane where the delivery slide block (702) is located are on the same plane, a plurality of calipers (708) are arranged on the delivery groove (707), each calipers (708) is rotationally connected with the delivery groove (707), a movable connecting rod (710) is arranged at the part, located in the delivery groove (707), of each calipers (708), the movable connecting rod (710) is slidingly connected with the delivery groove (707), one end, away from the calipers (708), of the movable connecting rod (710) is connected with the delivery groove (707) through a spring, the highest end of the delivery groove (707) is lower than the upper surface of the delivery slide block (702), a packing assembly (9) is arranged below the delivery groove (707), and the detection motor (708) is located on the delivery groove (707) and is rotationally connected with the probe (706) through a guide wire (11).
2. The organic cleaning apparatus for MEMS processing according to claim 1, wherein: the packaging component (9) is arranged in the inspection box body (801), the packaging component (9) comprises a film placing frame (901), a breathing air gun (902) and a heating rod (903), the film placing frame (901) is arranged in the inspection box body (801), the film placing frame (901) is provided with the heating rod (903), the film placing frame (901) is positioned below a carrying slider (702) on a conveying track (701), the film placing frame (901) is arranged in parallel with the conveying track (701), the heating rod (903) is in sliding connection with the film placing frame (901), the breathing air gun (902) is arranged on the film placing frame (901), the breathing air gun (902) is connected with an air pump, the output end of the breathing air gun (902) is positioned between the heating rod (903), the film placing frame (901) is internally provided with a film feeding roller (904), the film feeding roller (904) is rotationally connected with the film placing frame (901), one side of the film placing frame (901) far away from the film feeding roller (904) is provided with a film feeding roller (905), the film feeding drum (905) is fixedly connected with the film feeding drum (905) through the film feeding drum, the film feeding drum (905) is connected with the film feeding drum (801) through the film feeding structure, a chute (10) is arranged below the film placing frame (901), and the heating rod (903) and the breathing air gun (902) are connected with the control panel (11) through wires.
3. The organic cleaning apparatus for MEMS processing according to claim 1, wherein: still be provided with rubbish recycling bin (16) in wasing box (1), be provided with on rubbish recycling bin (16) and wash and drench head (17), rubbish recycling bin (16) set up in filter screen (1508) below, wash and drench head (17) set up in filter screen (1508) top, be provided with visual window on wasing box (1).
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