CN113777368B - Vertical probe card and cantilever type probe thereof - Google Patents
Vertical probe card and cantilever type probe thereof Download PDFInfo
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- CN113777368B CN113777368B CN202010522497.9A CN202010522497A CN113777368B CN 113777368 B CN113777368 B CN 113777368B CN 202010522497 A CN202010522497 A CN 202010522497A CN 113777368 B CN113777368 B CN 113777368B
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- 239000000523 sample Substances 0.000 title claims abstract description 221
- 238000001514 detection method Methods 0.000 claims description 7
- 238000010276 construction Methods 0.000 claims description 3
- 241001422033 Thestylus Species 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 abstract description 11
- 238000013461 design Methods 0.000 abstract description 8
- 238000002513 implantation Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000012360 testing method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
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- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a vertical probe card and a cantilever probe thereof, wherein the cantilever probe comprises a main body section, two side wing sections formed by extending from two opposite sides of the main body section respectively, and a needle measuring section and a fixing section formed by extending from two ends of the main body section in the height direction respectively. The needle section comprises a suspended abutting part and a needle cantilever connecting the abutting part and the main body section. The needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutment is spaced from the body section in the height direction by a distance smaller than the moment arm length. Therefore, the cantilever type probe can be applied to the vertical type probe card by the structural design of the cantilever type probe, so that the implantation, maintenance and replacement of the cantilever type probe are facilitated, and the production and maintenance cost is reduced.
Description
Technical Field
The present invention relates to a probe card, and more particularly, to a vertical probe card and a cantilever type probe thereof.
Background
The existing cantilever type probe is mainly applied to the test of the peripheral type chip, but the existing cantilever type probe has a complex needle implantation mode (such as manual welding needle) and needs to be subjected to line fan-out design (fan-out). Accordingly, the existing cantilever type probe is not easy to implant and maintain, so that the production and maintenance cost is difficult to reduce.
Accordingly, the present inventors considered that the above-mentioned drawbacks could be improved, and have intensively studied and combined with the application of scientific principles, and finally have proposed an invention which is reasonable in design and effectively improves the above-mentioned drawbacks.
Disclosure of Invention
The embodiment of the invention provides a vertical probe card and a cantilever type probe thereof, which can effectively improve the defects possibly generated by the existing cantilever type probe.
The embodiment of the invention discloses a vertical probe card, which comprises a plurality of guide plates and a plurality of cantilever probes. The guide plates are stacked on each other along a height direction; the cantilever probes are positioned on the guide plates, and each cantilever probe comprises a main body section, two side wing sections, a needle measuring section and a fixing section. The main body section is arranged in the guide plates in a penetrating way; two flank sections are respectively formed by extending from two opposite sides of the main body section, and the two flank sections are clamped on at least two guide plates in the plurality of guide plates; a needle section and a fixing section extending from two ends of the main body section in the height direction respectively; the needle detection section comprises a suspending abutting part and a needle detection cantilever which connects the abutting part and the main body section; the abutting parts of the cantilever probes are used for detachably abutting against an object to be tested; the needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutting portion is spaced from the main body section by a distance smaller than the moment arm length in the height direction.
Preferably, a guide plate, remote from the plurality of probe segments, is capable of passing through the plurality of cantilevered probes in the height direction or in a width direction perpendicular to the height direction and length direction, pressing against both side wing segments of each cantilevered probe.
Preferably, in each cantilever probe, the fixing section includes a connecting portion in a suspended shape and a buffer cantilever connecting the connecting portion and the main body section; the vertical probe card comprises an adapter plate, and the connecting parts of the cantilever probes are fixed on the adapter plate.
Preferably, in at least one cantilever-type probe of the plurality of cantilever-type probes, the abutting portion and the connecting portion are not both located in the height direction, and the abutting portion and the connecting portion are separated by a misalignment distance greater than the pitch in the length direction.
Preferably, in at least one cantilever probe of the plurality of cantilever probes, the abutting portion and the connecting portion are both located in a height direction, and when the connecting portion abuts against the object to be measured, the probe cantilever and the buffer cantilever are both elastically bent so that the abutting portion and the connecting portion abut against the main body section.
Preferably, in two adjacent cantilever probes of the plurality of cantilever probes, the abutting portion and the connecting portion of one cantilever probe are not both located in the height direction, and the abutting portion and the connecting portion of the other cantilever probe are both located in the height direction.
Preferably, in each cantilever-type probe, the needle-measuring cantilever is concavely formed with at least one slit along the length direction.
Preferably, in each cantilever probe, the probe section and the fixing section are located in a projection area formed by orthographic projection of the main body section along the height direction.
The embodiment of the invention also discloses a cantilever probe of the vertical probe card, which comprises a main body section, two flank sections, a probe section and a fixing section. Two flank sections are respectively formed by extending from two opposite sides of the main body section; a needle section and a fixing section extending from two ends of the main body section in a height direction respectively; the needle detection section comprises a suspending abutting part and a needle detection cantilever which connects the abutting part and the main body section; the needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutting portion is spaced from the main body section by a distance smaller than the moment arm length in the height direction.
Preferably, the needle section and the fixing section are located in a projection area formed by orthographic projection of the main body section along the height direction.
In summary, according to the vertical probe card disclosed in the embodiments of the present invention, the cantilever type probe can be applied to the vertical probe card by the structural design of the cantilever type probe, so that the replacement of the implantation and maintenance of the cantilever type probe is facilitated, and the production and maintenance costs are reduced.
For a further understanding of the nature and the technical aspects of the present invention, reference should be made to the following detailed description of the invention and the accompanying drawings, which are included to illustrate and not to limit the scope of the invention.
Drawings
Fig. 1 is a schematic perspective view of a vertical probe card according to a first embodiment of the invention.
Fig. 2 is an exploded perspective view of a probe head according to a first embodiment of the invention.
Fig. 3 is a schematic cross-sectional view of a vertical probe card according to a first embodiment of the invention.
Fig. 4 is a schematic perspective view of a cantilever probe according to a first embodiment of the present invention.
Fig. 5 is a schematic plan view of the cantilever probe of fig. 4 in a first mode.
Fig. 6 is a schematic plan view of a second embodiment of the cantilever probe of fig. 4.
Fig. 7 is a schematic plan view of a third embodiment of the cantilever probe of fig. 4.
Fig. 8 is an exploded perspective view of a probe head according to a second embodiment of the invention.
Fig. 9 is a schematic cross-sectional view of a vertical probe card according to a third embodiment of the invention.
Fig. 10 is a schematic cross-sectional view of a vertical probe card according to a fourth embodiment of the invention.
FIG. 11 is a schematic view of the cantilever probe of FIG. 10 with a needle side section abutting against an object to be flanked.
FIG. 12 is a schematic cross-sectional view of another embodiment of the vertical probe card of FIG. 10.
Fig. 13 is a schematic view of the cantilever probe of fig. 12 with a needle side section abutting against an object to be flanked.
Fig. 14 is a schematic perspective view of a vertical probe card according to a fifth embodiment of the invention.
Fig. 15 is a schematic top view of the vertical probe card of fig. 14.
Fig. 16 is a perspective view of another embodiment of a cantilever-type probe according to the first embodiment of the present invention.
Detailed Description
The following specific examples are presented to illustrate the embodiments of the present invention disclosed herein with respect to a vertical probe card and its cantilever probe, and those skilled in the art will appreciate the advantages and effects of the present invention from the disclosure herein. The invention is capable of other and different embodiments and its several details are capable of modifications and various other uses and applications, all of which are obvious from the description, without departing from the spirit of the invention. The drawings of the present invention are merely schematic illustrations, and are not intended to be drawn to actual dimensions. The following embodiments will further illustrate the related art content of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.
It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or signal from another signal. In addition, the term "or" as used herein shall include any one or combination of more of the associated listed items as the case may be.
Example one
Please refer to fig. 1 to 7 and fig. 16, which are a first embodiment of the present invention. The embodiment discloses a vertical probe card 1000, which comprises a probe head 100 and a transfer board 200 (space transformer) abutted against one side (e.g. the top side of the probe head 100 in fig. 1) of the probe head 100, and the other side (the bottom side of the probe head 100 in fig. 1) of the probe head 100 can be used for abutted against a test object (device under test, DUT) (not shown, e.g. a semiconductor wafer).
It should be noted that, in order to facilitate understanding of the present embodiment, the drawings only show a partial configuration of the vertical probe card 1000, so as to clearly show the respective component configurations and connection relationships of the vertical probe card 1000, but the present invention is not limited to the drawings. The respective component configurations of the probe head 100 and the connection relationships thereof will be described below.
The probe head 100 includes a plurality of guide plates 1 stacked on each other in a height direction H and a plurality of cantilever probes 2 positioned on the plurality of guide plates 1. In detail, for convenience of explanation, the plurality of guide plates 1 in the present embodiment are named as a first guide plate 1a, a second guide plate 1b and a third guide plate 1c, respectively, and the plurality of guide plates 1 are stacked in the height direction H from bottom to top to be arranged as the second guide plate 1b, the third guide plate 1c and the first guide plate 1a. In addition, in order to facilitate the construction of the following components, a length direction L perpendicular to the height direction H and a width direction D perpendicular to the height direction H and the length direction L are defined in this embodiment.
It should be noted that, in the present embodiment, the plurality of guide plates 1 are disposed corresponding to each other, and the probe head 100 excludes a manner of including only a single guide plate 1. Furthermore, the cantilever-type probe 2 is described as being matched with the above components (e.g. a plurality of the guide plates 1) in the present embodiment, but in other embodiments not shown in the present invention, the cantilever-type probe 2 may be matched with other components or be separately applied (e.g. sold).
Wherein the third guide plate 1c is clamped between the first guide plate 1a and the second guide plate 1 b. The first guide plate 1a is formed with a first elongated hole 10a, and the first elongated hole 10a is formed perpendicular to the width direction D. In the present embodiment, the first elongated hole 10a is substantially rectangular in shape, but the present invention is not limited thereto. For example, in other embodiments of the present invention, which are not shown, a plurality of the first elongated holes 10a may be formed in the first guide plate 1a, and the plurality of first elongated holes 10a may be respectively recessed along the width direction D.
The second guide plate 1b is formed with a second elongated hole 10b, and the position of the second elongated hole 10b corresponds to the first elongated hole 10a along the height direction H (e.g., the second elongated hole 10b is located right below the first elongated hole 10a in the present embodiment). However, in other embodiments of the present invention, which are not shown, a plurality of the second elongated holes 10b can be formed on the second guide plate 1b, a plurality of the first elongated holes 10a can also be formed on the first guide plate 1a, and the positions of the plurality of the second elongated holes 10b respectively correspond to the plurality of the first elongated holes 10a, but the present invention is not limited thereto.
The third guide plate 1c is formed with a plurality of third elongated holes 10c, and each of the third elongated holes 10c is formed in a recessed manner along the width direction D in parallel with the longitudinal direction L. Further, the third elongated holes 10c are respectively located between the first elongated holes 10a and the second elongated holes 10b along the height direction H, and the length of the third elongated holes 10c in the length direction L is greater than the length of the first elongated holes 10a and the second elongated holes 10b in the long axis direction thereof. In the present embodiment, any one of the third elongated holes 10c is rectangular in shape, but the present invention is not limited thereto.
In other embodiments, not shown, the second guide plate 1b may be protruded on a side adjacent to the first guide plate 1a and abut against the first guide plate 1a, so as to replace the third guide plate 1c. Accordingly, the third guide plate 1c of the probe head 100 may be omitted or replaced by other members, but the present invention is not limited thereto.
One ends of the plurality of cantilever-type probes 2 pass through the first elongated holes 10a of the first guide plate 1a, respectively, and the other ends of the plurality of cantilever-type probes 2 pass through the second elongated holes 10b of the second guide plate 1b, respectively. Further, a part of each of the cantilever-type probes 2 (e.g., a main body section 21 described below) is located in the first guide plate 1a, the second guide plate 1b, and the third guide plate 1 c. The cantilever probe 2 is in a conductive and integrally formed single-piece structure in the present embodiment, and the cantilever probe 2 can be manufactured by micro-electro-mechanical system (MEMS) technology, but the invention is not limited thereto.
It should be noted that, in fig. 1 of the present embodiment, the plurality of cantilever-type probes 2 are illustrated as being aligned along one side of the probe head 100, but in the portion not depicted in the present embodiment, the plurality of cantilever-type probes 2 may be aligned along at least two sides of the probe head 100, and the plurality of cantilever-type probes 2 aligned along any side of the probe head 100 may also be aligned in at least two rows. That is, the arrangement of the plurality of cantilever-type probes in the probe head 100 can be adjusted according to the design requirement, which is not limited to the embodiment.
Since the plurality of cantilever-type probes 2 of the probe head 100 are configured substantially the same in the present embodiment, the following description will take a single cantilever-type probe 2 as an example, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the plurality of cantilever-type probes 2 of the probe head 100 may also have different configurations from each other. Furthermore, to facilitate an understanding of the configuration of the cantilever-type probe 2, the cantilever-type probe 2 will be described below with the probe head 100 in the needle-implantation position.
The cantilever-type probe 2 comprises a main body section 21, two side wing sections 22 respectively extending from opposite sides of the main body section 21, a fixing section 23 extending from the top edge of the main body section 21, and a probe section 24 extending from the bottom edge of the main body section 21. In detail, the main body section 21 is inserted into the corresponding first, second and third elongated holes 10a, 10b, 10c, the fixing section 23 is exposed on the upper surface of the first guide plate 1a, the needle measuring section 24 is exposed on the lower surface of the second guide plate 1b, and the two flank sections 22 are correspondingly disposed on the third guide plate 1c.
In another aspect, an end edge of the fixing section 23 (e.g., a top edge of the fixing section 23 in fig. 3) facing the first guide plate 1a is sequentially extended to form the main section 21 and the two side wing sections 22 (e.g., left and right sides of the main section 21 in fig. 3) in the present embodiment, and the needle section 24.
Further, the main body section 21 is disposed through a plurality of the guide plates 1 (e.g., the first guide plate 1a, the second guide plate 1b, and the third guide plate 1 c), and two of the side wing sections 22 are clamped between at least two of the guide plates 1 (e.g., clamped between the first guide plate 1a and the second guide plate 1b and fixed to the third guide plate 1 c). Accordingly, the plurality of guide plates 1 can clamp the two side wing sections 22 corresponding to each other to stably fix the cantilever-type probe 2, so that the cantilever-type probe 2 is not easy to fall out when the probe head 100 is moved or turned.
In the present embodiment, the main body section 21 perpendicular to the width direction D is substantially trapezoidal in shape, and the cross section of the main body section 21 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the shape of the body section 21 perpendicular to the width direction D may be non-trapezoidal (e.g., rectangular).
The two side wing sections 22 extend from the main body section 21 along opposite sides of the longitudinal direction L, and a cross section of any one of the side wing sections 22 perpendicular to the height direction H is substantially rectangular, and the two side wing sections 22 are connected to a substantially central position of the main body section 21 (left and right sides) in the height direction H. The length of any one of the side wing sections 22 in the longitudinal direction L is approximately 1/10 to 1/20 of the length of the main body section 21 in the longitudinal direction L. The thickness of the two side wing sections 22 in the width direction D is substantially equal to the thickness of the main body section 21, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the thickness of the wing section 22 may not be equal to the thickness of the body section 21.
It should be noted that, the two side wing sections 22 of the cantilever-type probe 2 are formed according to the purpose, so that the cantilever-type probe 2 is relatively stably clamped in the plurality of guide plates 1, and the cantilever-type probe 2 is excluded from only comprising a single side wing section 22.
The fixing section 23 is formed to extend in the height direction H from the top edge of the main body section 21 in a direction away from the main body section 21. Wherein the fixing section 23 exposes the surfaces of the plurality of guide plates 1 (e.g., the first guide plate 1a in fig. 3).
The fixing section 23 includes a suspended connection portion 231 and a buffer cantilever 232 connecting the connection portion 231 and the main body section 21. The connection portion 231 has a substantially trapezoidal shape perpendicular to the width direction D, and the connection portion 231 has a substantially rectangular cross section perpendicular to the height direction H, but the present invention is not limited thereto. For example, as shown in fig. 16, the fixing section 23 may be formed with only a connection portion 231, and the connection portion 231 is directly formed on the main body section 21; or in other embodiments not shown in the present invention, the shape of the connection portion 231 perpendicular to the width direction D may be non-trapezoid (e.g., rectangular).
In this embodiment, the buffer cantilever 232 has a substantially straight configuration (as shown in fig. 4) perpendicular to the width direction D, and one of the two ends of the buffer cantilever 232 is connected to the (top edge of the) main body section 21, so that the other end of the buffer cantilever 232 is connected to the connecting portion 231. In more detail, the buffer cantilever 232 is capable of being deformed by force to have a resilient force, and the buffer cantilever 232 has a substantially rectangular cross section perpendicular to the height direction H, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the buffer cantilever 232 may be of arcuate configuration.
That is, the connection parts 231 are disposed on the main body section 21 at intervals by the buffer cantilevers 232, so that the connection parts 231 can be disposed on the top sides of the plurality of guide plates 1 (e.g., above the first guide plate 1a in fig. 3), and the top ends of the connection parts 231 are used to be fixed to the adapter plate 200.
The needle section 24 is formed extending from the bottom edge of the main body section 21 in the height direction H in a direction away from the main body section 21, and the needle section 24 is exposed on the surface of the plurality of guide plates 1 (e.g., the second guide plate 1b in fig. 3).
The probe section 24 includes a contact portion 241 in a suspended state and a probe cantilever 242 connecting the contact portion 241 and the main body section 21. The abutting portion 241 has a substantially trapezoidal shape (as shown in fig. 4) or a convex shape (as shown in fig. 5) perpendicular to the width direction D, and the abutting portion 241 has a substantially rectangular cross section perpendicular to the height direction H, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the shape of the abutment 241 perpendicular to the width direction D may be non-trapezoidal (e.g., rectangular).
In this embodiment, the needle detecting cantilever 242 has a substantially straight configuration (as shown in fig. 4) or a stepped configuration (as shown in fig. 6) perpendicular to the width direction D, one of the two ends of the needle detecting cantilever 242 is connected to the (bottom edge of the) main body section 21, and the other end of the needle detecting cantilever 242 is connected to the abutting portion 241. In more detail, the needle detecting cantilever 242 can be deformed by force to have a resilient force, thereby providing a stroke required for the operation of the cantilever-type probe 2. The cross section of the needle detecting cantilever 242 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the needle cantilever 242 may be of arcuate configuration.
In addition, the needle test cantilever 242 can be adjusted and changed according to design requirements; for example, referring to fig. 7, the needle detecting cantilever 242 is disposed on a surface perpendicular to the width direction H, the needle detecting cantilever 242 may be concavely formed with a slit 2421 along the length direction L, the slit 2421 is substantially rectangular in shape perpendicular to the width direction D, and the slit 2421 penetrates through both sides of the needle detecting cantilever 242 along the width direction D. In addition, in other embodiments not shown in the present invention, the needle detecting cantilever 242 may be concavely formed with a plurality of slits 2421 along the length direction L, but the present invention is not limited thereto.
Furthermore, the abutting portion 241 is disposed on the main body section 21 through the probing cantilever 242, so that the abutting portion 241 can be disposed at intervals on the bottom sides of the plurality of guide plates 1 (e.g. under the second guide plate 1b in fig. 3), and the abutting portion 241 is configured to detachably abut against the object to be tested.
Wherein the needle section 24 has a moment arm length L24 in the length direction L. That is, the length of the needle cantilever 242 in the longitudinal direction L is substantially equal to the arm length L24, and the abutting portion 241 is spaced apart from (the bottom side of) the main body section 21 in the height direction H by a distance G smaller than the arm length L24. In the present embodiment, the distance G is approximately 1/5 to 1/10 of the arm length L24, but the present invention is not limited thereto.
The cantilever probe 2 is disposed on the first guide plate 1a, the third guide plate 1c and the second guide plate 1b in sequence. The main body section 21 is fixed to the corresponding first and second elongated holes 10a and 10b, and the two side wing sections 22 are correspondingly disposed in the third elongated hole 10c, so that the two side wing sections 22 are clamped between the first and second guide plates 1a and 1b.
The fixing section 23 passes through the first elongated hole 10a, and the connecting portion 231 of the fixing section 23 is exposed on the surface of the first guide plate 1a. The needle section 24 passes through the second elongated hole 10b, and the abutting portion 241 of the needle section 24 is exposed on the surface of the second guide plate 1b.
In this embodiment, the stylus section 24 and the fixing section 23 of each cantilever-type probe 2 are located in a projection area formed by orthographic projection of the main body section 21 along the height direction H, so that each cantilever-type probe 2 is disposed on a plurality of guide plates 1 along the height direction H.
When the abutting portion 241 of each cantilever-type probe 2 abuts against the object to be tested, the elasticity is provided by the probing cantilever 242, so that the abutting portion 241 is in contact with the object to be tested, and the connection between the abutting portion 241 and the object to be tested can be more stable.
It should be noted that, in this embodiment, one guide plate 1 (e.g., the first guide plate 1 a) far from the plurality of probe segments 24 can pass through the plurality of cantilever probes 2 along the height direction H and press against the two side wing segments 22 of each cantilever probe 2, so that the first elongated hole 10a accommodates (the side adjacent to the fixed segment 23) each main body segment 21 of the portion. In detail, the two lateral wing sections 22 of each cantilever-type probe 2 are pressed against the first guide plate 1a, so that the main body section 21 of each cantilever-type probe 2 is fixed in a plurality of guide plates 1.
As described above, the cantilever-type probe 2 of the vertical probe card 1000 can be positioned between the first guide plate 1a and the second guide plate 1b by the two side wing sections 22, and the probe section 24 can provide the stroke required for detecting the stress of the cantilever-type probe 2 without dislocation, so as to provide a vertical probe card and the cantilever-type probe thereof different from the prior art. Furthermore, since the plurality of guide plates 1 (e.g., the first guide plate 1a, the second guide plate 1b, and the third guide plate 1 c) do not need to be arranged in a staggered manner to position the cantilever-type probe 2, the length of the cantilever-type probe 2 can be effectively shortened, so that the cantilever-type probe 2 can effectively improve the test performance and result, and is helpful to improve the needle implantation efficiency or facilitate maintenance and replacement of the cantilever-type probe 2.
Example two
Please refer to fig. 8, which is a second embodiment of the present invention, since the present embodiment is similar to the first embodiment, the same parts of the two embodiments will not be described again, and the differences between the present embodiment and the first embodiment are generally described as follows:
in the vertical probe card 1000 of the present embodiment, the first elongated hole 10a is recessed along the width direction D, and the first guide plate 1a passes through the plurality of cantilever probes 2 along the width direction D, so that the first elongated hole 10a can pass through the plurality of cantilever probes 2 along the width direction D, and the first elongated hole 10a accommodates (a side of) each main body section 21 of a portion adjacent to the fixing section 23, and the first guide plate 1a presses against both of the side wing sections 22 of each cantilever probe 2.
In detail, the two lateral wing sections 22 of each cantilever-type probe 2 are pressed against by the first guide plate 1a, so that the main body section 21 of each cantilever-type probe 2 is fixed in a plurality of the guide plates 1.
As described above, when the cantilever-type probes 2 of the vertical probe card 1000 are disposed on the second guide plate 1b and the third guide plate 1c, the first guide plate 1a can pass through a plurality of the cantilever-type probes 2 along the width direction D. The arrangement mode of the first guide plate 1a can be adjusted according to design requirements, so that the cantilever type probe 2 is beneficial to improving the needle implantation efficiency or facilitating maintenance and replacement of the cantilever type probe 2.
Example III
Please refer to fig. 9, which is a third embodiment of the present invention, since the present embodiment is similar to the first embodiment, the same parts of the two embodiments will not be described again, and the differences between the present embodiment and the first embodiment are generally described as follows:
In the vertical probe card 1000 of the present embodiment, the abutting portion 241 and the connecting portion 231 of the cantilever-type probe 2 are not both located in the height direction H. In other words, the probe cantilever 242 of the probe section 24 and the buffer cantilever 232 of the fixed section 23 extend in different directions in the length direction L, and the abutting portion 241 and the connecting portion 231 are separated by a misalignment distance L100 greater than the gap G in the length direction L, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the offset distance L100 is spaced apart from the length direction L by not more than the pitch G, but the present invention is not limited thereto.
As described above, the abutting portion 241 and the connecting portion 231 of one of the cantilever-type probes 2 of the vertical probe card 1000 are not both located in the height direction H, so that the connecting portion 231 of the cantilever-type probe 2 can be matched with different adapter plates 200, thereby increasing the application range of the cantilever-type probe 2.
Example IV
Referring to fig. 10 to 13, which are views of a fourth embodiment of the present invention, since the present embodiment is similar to the first embodiment, the same parts of the two embodiments will not be described again, and the differences between the present embodiment and the first embodiment are substantially as follows:
As shown in fig. 10 and 11, in the vertical probe card 1000 of the present embodiment, the abutting portion 241 and the connecting portion 231 of the cantilever probe 2 are both located in the height direction H, and the connecting portion 231 of the buffer cantilever 232 abuts against the main body section 21. Furthermore, when the abutting portion 241 is used to abut against the object to be tested, the probing cantilever 242 is elastically bent, so that the abutting portion 241 abuts against both sides of the main body section 21.
In detail, the main body section 21 may have a trapezoid structure 211 formed by protruding from a portion thereof adjacent to the abutting portion 241 and the connecting portion 231 along the height direction H. Accordingly, when the cantilever-type probe 2 abuts against the object to be measured through the abutting portion 241, the abutting portion 241 abuts against the trapezoid structure 211 adjacent thereto. For example, in other embodiments not shown in the present disclosure, one of the abutting portion 241 and the connecting portion 231 may also be the trapezoid structure 211 that does not abut the main body section 21, but the present disclosure is not limited thereto.
In addition, as shown in fig. 12 and 13, one of the two trapezoid structures 211 may be formed on the side of the abutting portion 241 adjacent to (the bottom side of) the main body section 21, and the other trapezoid structure 211 may be formed on the side of the connecting portion 231 adjacent to (the top side of) the main body section 21, but the present invention is not limited thereto. For example, in other embodiments not shown in the present disclosure, one of the two trapezoid structures 211 may be formed adjacent to the abutting portion 241 or the connecting portion 231 of the main body section 21, and the other trapezoid structure 211 is formed on the main body section 21, but the present disclosure is not limited thereto.
As described above, the abutting portion 241 and the connecting portion 231 of one of the cantilever-type probes 2 of the vertical probe card 1000 abut against two sides of the main body section 21 respectively, so that the cantilever-type probes 2 can shorten the transmission path, and the cantilever-type probes 2 can help to improve the transmission effect.
Example five
Please refer to fig. 14 and 15, which are a fifth embodiment of the present invention, since the present embodiment is similar to the first embodiment, the same parts of the two embodiments will not be described again, and the differences between the present embodiment and the first embodiment are substantially described as follows:
In the vertical probe card 1000 of the present embodiment, two adjacent cantilever probes 2 of the plurality of cantilever probes 2 along the width direction D are not both located in the height direction H, but the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 are both located in the height direction H.
Accordingly, the plurality of cantilever probes 2 of the vertical probe card 1000 are distributed in the above manner, so that the connection portion 231 can be matched with different adapter plates 200, and the application range of the cantilever probes 2 is further increased. Further, the probe head 100 can effectively enlarge the pitch between two adjacent connection portions 231 by arranging a plurality of connection portions 231 (as shown in FIG. 14), thereby affecting the pitch setting of the interposer 200. For example, the probe head 100 shown in fig. 14 is only required to be further matched with a circuit board, so as to facilitate improving the electrical quality and reducing the manufacturing cost.
[ Technical Effect of embodiments of the invention ]
In summary, according to the vertical probe card disclosed in the embodiments of the present invention, the cantilever type probe can be applied to the vertical probe card by the structural design of the cantilever type probe, so that the replacement of the implantation and maintenance of the cantilever type probe is facilitated, and the production and maintenance costs are reduced.
In addition, the vertical probe card disclosed by the embodiment of the invention can move and fix the cantilever type probe along the height direction or the width direction by punching or grooving the guide plate (such as the first guide plate), so that the cantilever type probe can provide the stroke required by the needle testing section when being stressed without dislocation, and the length of the cantilever type probe can be effectively shortened to effectively improve the testing efficiency. In addition, each cantilever type probe can be directly and vertically arranged along the height direction, so that the vertical type probe card is beneficial to the replacement of the planting needle and the maintenance of the cantilever type probe, and the production and the maintenance cost are reduced.
In addition, in the vertical probe card disclosed in the embodiment of the invention, the abutting part and the connecting part of the cantilever probe are not located in the height direction, so that the connecting part of the cantilever probe can be matched with different adapter plates, and the application range of the cantilever probe is further increased.
In addition, in the detection process of the vertical probe card disclosed by the embodiment of the invention, the abutting part and the connecting part of the cantilever type probe can be respectively abutted against two sides of the main body section, so that the cantilever type probe can shorten the transmission path, and the cantilever type probe is beneficial to improving the transmission effect.
In addition, in the vertical probe card disclosed in the embodiment of the invention, in two adjacent cantilever probes along the width direction, the abutting part and the connecting part of one cantilever probe may not be located in the height direction, but the abutting part and the connecting part of the other cantilever probe are located in the height direction, so that the connecting parts can achieve a cross arrangement effect, and further the fixing section can be matched with different adapter plates, and the interval between the connecting parts of the two cantilever probes can be enlarged.
The foregoing disclosure is only illustrative of the preferred embodiments of the present invention and is not to be construed as limiting the scope of the invention, as all changes which come within the meaning and range of equivalency of the description and drawings are therefore intended to be embraced therein.
Claims (7)
1. A vertical probe card, the vertical probe card comprising:
a plurality of guide plates stacked on each other along a height direction; and
A plurality of cantilevered probes positioned on a plurality of said guide plates, each of said cantilevered probes being of electrically conductive and integrally formed one-piece construction, and each of said cantilevered probes comprising:
The main body section is penetrated in the guide plates;
Two side wing sections formed to extend from opposite sides of the main body section, respectively, and to be clamped to at least two of the plurality of guide plates; and
A needle section and a fixing section extending from both ends of the main body section in the height direction; the needle section comprises a hanging abutting part and a needle cantilever for connecting the abutting part and the main body section, the fixing section comprises a hanging connecting part and a buffer cantilever for connecting the connecting part and the main body section, and the abutting part and the connecting part are both positioned in the height direction; the abutting parts of the cantilever probes are used for detachably abutting against an object to be tested;
Wherein the needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutment is spaced from the main body section in the height direction by a distance smaller than the moment arm length;
Wherein, in each cantilever probe, the main body section is protruded to form a trapezoid structure at the position adjacent to the abutting part and the connecting part along the height direction;
when the abutting part of any cantilever type probe abuts against the object to be detected, the needle detection cantilever and the buffer cantilever are elastically bent, so that the abutting part abuts against the adjacent trapezoid structure, and the connecting part abuts against the adjacent trapezoid structure.
2. The vertical probe card of claim 1, wherein one of said guide plates, remote from a plurality of said probing segments, is capable of pressing against two of said side wing segments of each of said cantilever probes through a plurality of said cantilever probes along said height direction or along a width direction perpendicular to said height direction and said length direction.
3. The vertical probe card of claim 1, wherein in each of the cantilever probes, the vertical probe card comprises an adapter plate, and the connection portions of the plurality of cantilever probes are fixed to the adapter plate.
4. The vertical probe card of claim 1, wherein in each of the cantilever-type probes, the probing cantilever is concavely formed with at least one slit along the length direction.
5. The vertical probe card of claim 1, wherein in each cantilever probe, the probe section and the fixed section are located within a projection area formed by orthographic projection of the main body section along the height direction.
6. A cantilever probe of a vertical probe card, wherein the cantilever probe of the vertical probe card is of a conductive and integrally formed one-piece construction and comprises:
a main body section;
Two flank sections extending from opposite sides of the main body section, respectively; and
A needle section and a fixing section extending from two ends of the main body section in a height direction; the needle section comprises a hanging abutting part and a needle cantilever for connecting the abutting part and the main body section, the fixing section comprises a hanging connecting part and a buffer cantilever for connecting the connecting part and the main body section, and the abutting part and the connecting part are both positioned in the height direction;
Wherein the needle section has a moment arm length in a length direction perpendicular to the height direction, and the abutment is spaced from the main body section in the height direction by a distance smaller than the moment arm length;
Wherein, the main body section is provided with a trapezoid structure in a protruding way at the position adjacent to the abutting part and the connecting part along the height direction;
When the abutting part abuts against an object to be detected, the needle detection cantilever and the buffer cantilever are elastically bent, so that the abutting part abuts against the adjacent trapezoid structure, and the connecting part abuts against the adjacent trapezoid structure.
7. The cantilever probe of a vertical probe card of claim 6, wherein the stylus section and the fixed section are located within a projection area formed by orthographic projection of the main body section in the height direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202010522497.9A CN113777368B (en) | 2020-06-10 | 2020-06-10 | Vertical probe card and cantilever type probe thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010522497.9A CN113777368B (en) | 2020-06-10 | 2020-06-10 | Vertical probe card and cantilever type probe thereof |
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| CN113777368B true CN113777368B (en) | 2024-06-21 |
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| JP2021188947A (en) * | 2020-05-27 | 2021-12-13 | 株式会社日本マイクロニクス | Optical connector protection structure and connecting device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002365308A (en) * | 2001-06-08 | 2002-12-18 | Japan Electronic Materials Corp | Vertical blade type probe, vertical blade type probe unit and vertical blade type probe card using the same |
| TW201339586A (en) * | 2012-02-03 | 2013-10-01 | Interconnect Devices Inc | Electrical connector with insulation member |
| CN110068711A (en) * | 2018-01-24 | 2019-07-30 | 中华精测科技股份有限公司 | Probe card device and rectangular probe |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014013184A (en) * | 2012-07-04 | 2014-01-23 | Micronics Japan Co Ltd | Cantilever type probe assembly and probe card or probe unit equipped with the same |
| CN110018334B (en) * | 2018-01-10 | 2021-06-11 | 中华精测科技股份有限公司 | Probe card device and rectangular probe thereof |
| TWI642942B (en) * | 2018-04-18 | 2018-12-01 | 中華精測科技股份有限公司 | Probe card device and rectangular probe thereof |
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2020
- 2020-06-10 CN CN202010522497.9A patent/CN113777368B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002365308A (en) * | 2001-06-08 | 2002-12-18 | Japan Electronic Materials Corp | Vertical blade type probe, vertical blade type probe unit and vertical blade type probe card using the same |
| TW201339586A (en) * | 2012-02-03 | 2013-10-01 | Interconnect Devices Inc | Electrical connector with insulation member |
| CN110068711A (en) * | 2018-01-24 | 2019-07-30 | 中华精测科技股份有限公司 | Probe card device and rectangular probe |
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| CN113777368A (en) | 2021-12-10 |
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